JP5484729B2 - Si含有膜の選択的堆積のための断続的堆積処理方法 - Google Patents
Si含有膜の選択的堆積のための断続的堆積処理方法 Download PDFInfo
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- 230000008021 deposition Effects 0.000 title claims description 46
- 238000003672 processing method Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 109
- 238000000034 method Methods 0.000 claims description 60
- 150000004756 silanes Chemical class 0.000 claims description 43
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 13
- 238000010926 purge Methods 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 229910052801 chlorine Inorganic materials 0.000 claims description 8
- 229910052732 germanium Inorganic materials 0.000 claims description 7
- 239000002019 doping agent Substances 0.000 claims description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 5
- 229910003902 SiCl 4 Inorganic materials 0.000 claims description 4
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 230000006911 nucleation Effects 0.000 claims description 2
- 238000010899 nucleation Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 107
- 239000000460 chlorine Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000005137 deposition process Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910000078 germane Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000011534 incubation Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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Description
Claims (24)
- 基板を処理する方法であって:
処理チャンバ内に前記基板を備える段階であって、前記基板は成長表面及び非成長表面を有する、段階;並びに
前記基板をHXガスにさらし、同時にSiCl4、SiHCl3、SiH2Cl2、SiH3Cl、Si2Cl6又はそれらの少なくとも2つの組み合わせを有する塩素化シランガスのパルス周期に前記基板をさらすことにより、前記成長表面においてSi含有膜を選択的に形成する段階であって、前記基板が500℃乃至700℃の範囲内の温度に保たれる、段階;
を有する方法。 - 請求項1に記載の方法であって、前記成長表面はSi又はSiGeを有し、前記非成長表面は酸化物層、窒化物層又は酸窒化物層を有する、方法。
- 請求項1に記載の方法であって、前記Si含有膜は、多結晶Si、アモルファスSi、多結晶SiGe又はエピタキシャルSiGeを有する、方法。
- 請求項1に記載の方法であって、前記HXガスは、HF、HCl、HBr、HI又はそれらの少なくとも2つの組み合わせを有する、方法。
- 請求項1に記載の方法であって、前記選択的に形成する段階は、前記基板を塩素化シランガスの複数のパルスに周期的に晒しながら、前記基板をHXガスに連続的に晒す段階を有する、方法。
- 請求項5に記載の方法であって、前記塩素化シランガスのパルス数は1乃至1000の範囲内である、方法。
- 請求項5に記載の方法であって、前記塩素化シランガスのパルス数は10乃至200の範囲内である、方法。
- 請求項5に記載の方法であって、前記塩素化シランガスの流量は10sccm乃至500sccmの範囲内である、方法。
- 請求項5に記載の方法であって、前記Si含有膜の成長速度は0.5Å/min乃至10Å/minの範囲内である、方法。
- 請求項5に記載の方法であって、前記Si含有膜の成長速度は1Å/min乃至2Å/minの範囲内である、方法。
- 請求項5に記載の方法であって、前記圧力チャンバの圧力は0.1Torr乃至100Torrの範囲内である、方法。
- 請求項5に記載の方法であって、前記圧力チャンバの圧力は0.5Torr乃至20Torrの範囲内である、方法。
- 請求項1に記載の方法であって:
前記選択的に形成する段階に先行して、前記基板から酸化物層を除去する段階であって、該除去する段階は、F2、Cl2、H2、HCl、HF、H又はそれらの少なくとも2つの組み合わせを有する洗浄ガスに前記基板を晒す段階を有する、段階;
を更に有する、方法。 - 請求項1に記載の方法であって、堆積前HXガスパージ、堆積後HXガスパージ、又は該堆積前HXガスパージ及び該堆積後HXガスパージの両方を更に有する、方法。
- 請求項1に記載の方法であって、堆積前HXガスパージ、堆積後HXガスパージ、又は該堆積前HXガスパージ及び該堆積後HXガスパージの両方を更に有する、方法。
- 請求項15に記載の方法であって、前記塩素化シランガスは、SiCl4、SiHCl3、SiH2Cl2、SiH3Cl、Si2Cl6又はそれらの少なくとも2つの組み合わせを有し、前記ゲルマニウム含有ガスは、GeCl4、GeHCl3、GeH2Cl2、GeH3Cl、Ge2Cl6、GeH4又はそれらの少なくとも2つの組み合わせを有する、方法。
- 請求項5に記載の方法であって、前記基板は500℃乃至700℃の範囲内の温度に保たれる、方法。
- 請求項5に記載の方法であって、前記基板は550℃乃至650℃の範囲内の温度に保たれる、方法。
- 請求項1に記載の方法であって、PH3、AsH3、B2Cl2又はそれらの少なくとも2つの組み合わせを有するドーパントガスに前記基板を晒す段階を更に有する、方法。
- 請求項1に記載の方法であって、塩素化シランガスの各々のパルスのオンタイムは、臨界サイズより大きい前記非成長表面における核の形成を実質的に回避されるように選択される、方法。
- 請求項1に記載の方法であって、前記塩素化シランガスのパルス間のオフタイムは、前記HXに晒すことが前記非成長表面から核を実質的にエッチングにより除去されるように選択される、方法。
- 請求項21に記載の方法であって、前記処理チャンバの圧力は、前記パルスのオンタイムに比べて、前記オフタイムの間に高い、方法。
- 基板を処理する方法であって:
処理チャンバ内に前記基板を備える段階であって、前記基板はエピタキシャルSi成長表面及び非成長表面を有する、段階;並びに
Si2Cl6ガスのパルスに前記基板を周期的にさらしながら、前記基板をHClガスに連続的に晒すことにより、前記Si成長表面においてエピタキシャルSi膜を選択的に形成する段階であって、前記基板は、500℃乃至700℃の範囲内の温度に保たれる、段階;
を有する方法。 - 基板を処理する方法であって:
処理チャンバ内に前記基板を備える段階であって、前記基板は成長表面及び非成長表面を有する、段階;並びに
前記基板をHXガスにさらし、同時にSiCl4、SiHCl3、SiH2Cl2、SiH3Cl、Si2Cl6又はそれらの少なくとも2つの組み合わせを有する塩素化シランガスのパルス周期に前記基板をさらすことにより、前記成長表面においてSi膜又はSiGe膜を選択的に形成する段階であって、前記基板が500℃乃至700℃の範囲内の温度に保たれる、段階;
を有する方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/213,871 US20070048956A1 (en) | 2005-08-30 | 2005-08-30 | Interrupted deposition process for selective deposition of Si-containing films |
US11/213,871 | 2005-08-30 | ||
PCT/US2006/024211 WO2007027275A2 (en) | 2005-08-30 | 2006-06-22 | Interrupted deposition process for selective deposition of si-containing films |
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JP2009512997A JP2009512997A (ja) | 2009-03-26 |
JP5484729B2 true JP5484729B2 (ja) | 2014-05-07 |
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JP2008529019A Active JP5484729B2 (ja) | 2005-08-30 | 2006-06-22 | Si含有膜の選択的堆積のための断続的堆積処理方法 |
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Country | Link |
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US (1) | US20070048956A1 (ja) |
JP (1) | JP5484729B2 (ja) |
KR (1) | KR20080064816A (ja) |
CN (1) | CN101496148B (ja) |
TW (1) | TWI337757B (ja) |
WO (1) | WO2007027275A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021021265A1 (en) * | 2019-07-26 | 2021-02-04 | Applied Materials, Inc. | Anisotropic epitaxial growth |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
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US7405140B2 (en) * | 2005-08-18 | 2008-07-29 | Tokyo Electron Limited | Low temperature formation of patterned epitaxial Si containing films |
US7785995B2 (en) * | 2006-05-09 | 2010-08-31 | Asm America, Inc. | Semiconductor buffer structures |
US8278176B2 (en) | 2006-06-07 | 2012-10-02 | Asm America, Inc. | Selective epitaxial formation of semiconductor films |
US7608526B2 (en) * | 2006-07-24 | 2009-10-27 | Asm America, Inc. | Strained layers within semiconductor buffer structures |
EP1936670A3 (en) * | 2006-12-21 | 2013-05-01 | Imec | Method to improve the Selective Epitaxial Growth (SEG) Process |
US20080153266A1 (en) * | 2006-12-21 | 2008-06-26 | Interuniversitair Microeletronica Centrum (Imec) Vzw | Method to improve the selective epitaxial growth (seg) process |
FI124354B (fi) | 2011-04-04 | 2014-07-15 | Okmetic Oyj | Menetelmä yhden tai useamman polykiteisen piikerroksen pinnoittamiseksi substraatille |
US8809170B2 (en) | 2011-05-19 | 2014-08-19 | Asm America Inc. | High throughput cyclical epitaxial deposition and etch process |
US9127345B2 (en) | 2012-03-06 | 2015-09-08 | Asm America, Inc. | Methods for depositing an epitaxial silicon germanium layer having a germanium to silicon ratio greater than 1:1 using silylgermane and a diluent |
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WO2021021265A1 (en) * | 2019-07-26 | 2021-02-04 | Applied Materials, Inc. | Anisotropic epitaxial growth |
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TW200721270A (en) | 2007-06-01 |
WO2007027275A3 (en) | 2009-04-23 |
US20070048956A1 (en) | 2007-03-01 |
CN101496148B (zh) | 2011-04-06 |
CN101496148A (zh) | 2009-07-29 |
TWI337757B (en) | 2011-02-21 |
KR20080064816A (ko) | 2008-07-09 |
WO2007027275A2 (en) | 2007-03-08 |
JP2009512997A (ja) | 2009-03-26 |
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