JP5465874B2 - 銅ボンディングワイヤの製造方法および該製造方法を用いた銅ボンディングワイヤ - Google Patents
銅ボンディングワイヤの製造方法および該製造方法を用いた銅ボンディングワイヤ Download PDFInfo
- Publication number
- JP5465874B2 JP5465874B2 JP2008329229A JP2008329229A JP5465874B2 JP 5465874 B2 JP5465874 B2 JP 5465874B2 JP 2008329229 A JP2008329229 A JP 2008329229A JP 2008329229 A JP2008329229 A JP 2008329229A JP 5465874 B2 JP5465874 B2 JP 5465874B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- wire
- ball
- bonding
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052802 copper Inorganic materials 0.000 title claims description 133
- 239000010949 copper Substances 0.000 title claims description 133
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 85
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 47
- 229910052698 phosphorus Inorganic materials 0.000 claims description 47
- 239000011574 phosphorus Substances 0.000 claims description 47
- 229910052782 aluminium Inorganic materials 0.000 claims description 41
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 41
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 31
- 239000001301 oxygen Substances 0.000 claims description 31
- 229910052760 oxygen Inorganic materials 0.000 claims description 31
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 28
- 239000000460 chlorine Substances 0.000 claims description 28
- 229910052801 chlorine Inorganic materials 0.000 claims description 28
- 238000010586 diagram Methods 0.000 claims description 22
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 20
- 238000000137 annealing Methods 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 25
- 230000000052 comparative effect Effects 0.000 description 17
- 239000001257 hydrogen Substances 0.000 description 16
- 229910052739 hydrogen Inorganic materials 0.000 description 16
- 239000007789 gas Substances 0.000 description 14
- 229910045601 alloy Inorganic materials 0.000 description 12
- 239000000956 alloy Substances 0.000 description 12
- 238000012360 testing method Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 229910052757 nitrogen Inorganic materials 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 238000005336 cracking Methods 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 230000008018 melting Effects 0.000 description 7
- 239000000523 sample Substances 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 6
- 238000005266 casting Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 238000001036 glow-discharge mass spectrometry Methods 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000007670 refining Methods 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000005491 wire drawing Methods 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 238000009749 continuous casting Methods 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000002845 discoloration Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000010301 surface-oxidation reaction Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 1
- 230000003796 beauty Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/43—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/43—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/43—Manufacturing methods
- H01L2224/438—Post-treatment of the connector
- H01L2224/43848—Thermal treatments, e.g. annealing, controlled cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/4501—Shape
- H01L2224/45012—Cross-sectional shape
- H01L2224/45015—Cross-sectional shape being circular
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45147—Copper (Cu) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
- H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/48617—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950 °C
- H01L2224/48624—Aluminium (Al) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85203—Thermocompression bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/8538—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/85399—Material
- H01L2224/854—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/85438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/85439—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01007—Nitrogen [N]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01014—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01019—Potassium [K]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01022—Titanium [Ti]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01023—Vanadium [V]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01042—Molybdenum [Mo]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/207—Diameter ranges
- H01L2924/20752—Diameter ranges larger or equal to 20 microns less than 30 microns
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Description
しかし、金線はその重量の99%から99.99%が金で、残部が他添加元素と不可避不純物であるため非常に高価格であることから、材料として安価な銅に替えたいという産業界からの要請がある。
無酸素銅は電解精錬を数回繰り返した後、前記電解精錬により得られた高純度の電気銅を帯域融解法により精製して得られる純度99.999%以上の高純度の銅素材を使用することでチップクラックの発生率を低下させる方法が提案されている(例えば、特許文献1参照。)。
より詳細には、銀メッキされたリードフレームへ高純度アルミニウムを蒸着したシリコンチップをダイボンディングし、アルミニウムと銀メッキリードとの間を従来使用されている各社の4N純度の銅ボンディングワイヤにてワイヤボンディングし、これを樹脂封止せずに温度85℃、湿度85%の恒温恒湿環境で放置したところ、いずれのワイヤも168時間までの放置によってボール接合部が腐食され、シア強度測定試験においてボールが腐食面で剥がれてしまうという現象が観察された。
これは、いずれの半導体パッケージも片側のみが樹脂封止されたものであり、リードと樹脂の隙間から水分がパッケージ内に浸入したためと考えられる。
即ち、線径25μmの銅ボンディングワイヤを用いてボールボンディングを行い、エポキシ樹脂で封止し、焼成して得たパッケージに対しHTB試験(High Temperature Baki ng test,高温動作試験)を行うと、一般的に要求される動作時間である1000時間を待たずに導通不良となる新たな現象が観察されことである。
また銅ボールが酸化したり形状がボール底部へ伸びる楕円形状を呈した場合には、最新のLow−k材料を使用してアルミニウム電極の下へ回路を形成したシリコンチップではパッドが損傷しやすいことも判明した。
即ち、本発明が解決しようとする課題は、超高速で動作するワイヤボンダの大電流短時間放電においても、銅ボールとアルミ電極との接合信頼性を低下させることはなく、酸化しにくい真円度の高いボールを形成し、パッド損傷無しにボールボンディングが行われ、かつアルミニウムパッドと銅ボールとの合金層を酸化させない銅ボンディングワイヤとその製造方法の提供にある。
本発明の銅ボンディングワイヤの製造方法は、前記銅鋳造線材が、塩素を1質量ppm以下、酸素を5ppm以下、リンを10質量ppm以上40質量ppm以下の割合で含み、残部が銅と不可避不純物からなる銅鋳造線材であることが好ましい。
また、本発明の銅ボンディングワイヤは、上記本発明の銅ボンディングワイヤの製造方法により得られた銅ボンディングワイヤである。
また、ボール形成中に水素ガスから水素が銅中に溶け込んでも、銅中で拡散してきた酸素と水素が粒界で結合してH2Oとなる確率が低下し、ボールの粒界割れを発生させることがない。リンは80ppm以下なので高湿度においてもワイヤと水分との接触で水分中に滲出するリン量は極めて少なく、PBGAやQFNといった水分が浸入しやすい片側樹脂封止のパッケージにおいても、リンと塩素の相乗効果によるボール接合部の腐食の問題が完全に解決される。
さらに、最終線径まで縮径後に水素ガスを含む還元ガスで焼鈍するので、空気中の伸線によってワイヤ表面や粒界が酸化しても酸素を除去できるため、ボール形成時のリンの効果を高めるのみならず、ボール粒界割れ防止や、スティッチボンディング性向上にも寄与する。リン量が10〜40質量ppmの場合にはボンディング後のボールやワイヤの色相が純銅とほぼ同色で変色が発生しないため、樹脂封止時のワイヤと樹脂との密着性が良好となり、パッケージが熱変形を起こした場合のワイヤと樹脂界面での剥離の発生が防止される。
なお、銅鋳造線材を最終径まで縮径して得られる銅ボンディングワイヤの組成は、通常銅鋳造線材と同じである。
ワイヤボンディングした後の銅ボールとアルミニウムとの接合界面に染み出してくる塩素の量を抑え、同接合界面における塩素による腐食を押さえるためである。塩素の量としては少なければ少ないほど良いが、1ppm以下とすることで目的は達成される。後記の実施例からは、その塩素量が0.8ppm以下であると、ボンディングパッド損傷等において好ましい評価を得ている。
リンは、ワイヤボンディングに形成される銅ボールの表面酸化を防止するために添加される。従って、リン含有量が少ないと銅ボールの表面酸化が防止できなくなる。また、リン含有量が高いと銅ボールの硬度が上昇するので好ましくない。本発明では、酸素含有量を5ppm以下とすることにより、リン含有量を80質量ppm以下とすることができ、銅ボールの硬度上昇による不具合の発生が防止可能となった。更に、リンは80ppm以下なので高湿度を印加してもワイヤと水分との接触で水分中に滲出するリン量は極めて少なく、PBGAやQFNといった水分が浸入しやすい片側樹脂封止のパッケージにおいても、リンと塩素の相乗効果によるボール接合部の腐食の問題が完全に解決される。
なお、リン含有量を10〜40質量ppmとすると、ボンディング後のボールやワイヤの色相が純銅とほぼ同色で変色が発生しないため、樹脂封止時のワイヤと樹脂との密着性が良好となり、パッケージが熱変形を起こした場合のワイヤと樹脂界面での剥離の発生が防止されるので好ましい。
ワイヤボンディング時に銅ボールを形成すると、ボンディングワイヤ中に存在する酸素により銅ボール表面に酸化銅被膜が発生し、これが接合面に介在して接合強度を低下させたり、信頼性を損なう原因となったりする。このため、前記したように、リンを添加して酸化銅の生成を防止する。従って、酸素含有量が高い場合には、リン含有量を高くしなければならなくなる。リン含有量を高くすると銅ボールの硬度が高くなるという連鎖が起きる。この連鎖の中で、支障ない範囲でのリン含有量とするために、酸素含有量を5ppm以下とする。
さらにボール形成中に水素ガスから水素が銅中に溶け込んでも、信頼性評価中に銅中で拡散してきた酸素と水素が粒界で結合してH2Oとなる確率が低下し、ボールの粒界割れを発生させることがない。
図1の伸び率温度線を例に説明すると、試料Aを熱処理した温度(焼き鈍し温度)が500℃であると、その破断強度は約340mNであって、その伸び率は13.5%であることを示す。この試料Aの伸び率が最大値となる温度X℃は500℃である。したがって、伸び率温度線図における伸び率が最大値となる温度X℃から50℃低い温度(X−50)℃とは、500−50=450℃となり、同伸び率が最大値となる温度X℃から50℃高い温度(X+50)℃とは、500+50=550℃となる。450℃の熱処理温度で処理したのが試料Bで、伸び率は約10.5%であり、550℃の熱処理温度で処理したのが試料Cで、伸び率は約12.5%である。
なお、伸び率温度線図における伸び率が最大値となる温度は銅ボンディングワイヤのリン含有量によって変化するため、用いる銅鋳造線材の組成が異なる毎に伸び率温度線図を測定する。
また最終線径まで縮径後に水素ガスを含む還元ガスで焼鈍するので、仮に空気中での伸線によりワイヤ表面や粒界が酸化されても、酸素を除去できるためボール形成時のリンの効果を高めるのみならず、ボール粒界割れ防止やスティッチボンディング性向上にも寄与する。
表1は本発明の実施例と、現在市場で使用されている従来品の無酸素銅線との化学分析値と最終熱処理温度とを比較して示した表である。
塩素量およびリン量は、直径25μmのワイヤ試料をアルミニウム製キャップに挿入して20tプレスを行い平板状にしたものを測定試料とし、測定前に装置内で約1時間の予備放電を行い、試料表面を数ミクロン程度除去した後、該除去面をグロー放電質量分析法にて測定した。酸素量は不活性ガス溶融赤外吸収法にて測定した。銅量はグロー放電質量分析法と不活性ガス溶融赤外吸収法とによって検出限界以上で検出された各元素の検出値を100%から減じた数字とした。
なお、表1中のT1、T2、T3、T4、T5、T6は各組成試料の25μm径の線材の伸び率温度線図における伸び率が最大値となる最終熱処理温度である。
まず、真空溶解連続鋳造炉においてカーボンルツボ内に原料銅を入れ、溶解チャンバー内を真空度1×10−4Pa以下に保持して高周波溶解を行い、溶湯温度1150℃以上、保持時間10分以上で十分に脱ガスした後、リンをルツボ内に投入して溶解して撹拌し、不活性ガスで溶解チャンバー内を大気圧に戻し、連続鋳造によって8mmφに鋳造し無酸素銅鋳造線材とした。
次に、この材料につき、不活性ガス溶融法による酸素量が5ppm以下で、かつグロー放電質量分析法による塩素量が1ppm以下で、リン量が10、30、80質量ppmの無酸素銅鋳造線材を、途中酸洗浄すること無しに直径25μmまで縮径し、該線材の伸び率温度線図における伸び率が最大値となる温度の上下50℃となる範囲内の温度で焼鈍した銅ボンディングワイヤである。
比較例1はリン量が0.5質量ppmで、塩素量が0.4質量ppm、酸素量が5ppm以下の銅鋳造線材を、縮径して直径25μmとし、5%水素+95%窒素のフォーミングガス中で伸び率温度線図における伸び率が最大値となる温度425℃で焼鈍した銅ボンディングワイヤである。
(1) ボールの評価
A.酸化膜の有無
固定電気トーチを持つカイジョー製ワイヤボンダFB780を用いて、ボールを酸化しやすくするために通常の銅ワイヤボンディングに用いられる5%水素+95%窒素ガスではなく、2.5%水素+97.5%窒素ガスの雰囲気ガスを用いて直径75μmのボールを50個作製し、走査電子顕微鏡観察とエネルギー分散型分析装置によって1個でもボール形成時の酸化が認められた場合をNGと判定した。
B.外形
また底部に伸張した楕円体形状となったボールが50個中1個でも発生した場合をNGと判定した。
C.パッドの損傷
図2にボンディングの評価及び電気抵抗測定に用いた半導体パッケージの平面図を示す。図中1は銅ボンディングワイヤ、2はボール、3はシリコンチップ、4はアルミニウム電極、5は銀メッキ付きリード、6は封止エポキシ樹脂、7は抵抗測定器である。
図2に示すように、厚さ0.8μmのアルミニウム電極4と、アルミニウム電極とシリコン相との間に50nm厚のチタン層と50nmの酸化シリコン層とを有するシリコンチップ3の間に、各種銅ボンディングワイヤの超音波熱圧着ボールボンディングを行った後に、水酸化カリウム溶液で銅ボールごとアルミニウムを洗い流してアルミニウム電極下のパッド損傷を観察し、ひび割れ・欠け等の損傷が100個中1個でも発生した場合をNGと判定した。
D.スティッチ接合性
2個ずつ連結されたアルミニウム電極パッドを持つ前述のCMOSチップのアルミニウム電極4と、リード先端に銀メッキされた42合金のリードフレームのリード5とをワイヤボンディング接続し、1200ワイヤ中1本でもスティッチ不着が発生した場合にNGと判定した。
通電テストは図2に示す半導体パッケージに通電し、抵抗測定器7を使用して電気抵抗を測定した。
ワイヤボンディング後に市販のグリーンエポキシコンパウンドで樹脂封止を行った後に、150℃で1時間焼成して個片試料にリードフレームを切断し、その後175℃で700時間の高温放置試験を行った。
その後、通電テストにおいて50組中電気抵抗が高温放置前の20%以上になった組が1組でも発生した場合をNGと判断した。
F.ボールの粒界割れ
ボール接合部中央の縦断面を集束イオンビームによって作製し、接合界面近くでのボールの粒界割れ発生有無を観察した。
G.酸化被膜厚さ
その後、さらに薄片を作製して透過顕微鏡エネルギー分散型X線分析装置にてアルミニウムと銅との合金層中の酸化層の厚さを測定した。
前述の個片試料を温度125℃、気圧2.3atm、湿度100%の環境で168時間放置するいわゆるプレッシャークッカーテスト(PCT)を行った後、通電テストにて50組中電気抵抗が高温放置前の20%以上になった組が1組でも発生した場合をNGと判断した。
径25.0μmの線を用いてホイートストーンブリッジ回路により電気抵抗を測定して電気比抵抗を算出した。
以上の結果を表2に示す。
2:ボール
3:シリコンチップ
4:アルミニウム電極
5:銀メッキ付きリード
6:封止エポキシ樹脂
7:抵抗測定器
Claims (3)
- アルミニウム電極への接続用銅ボンディングワイヤの製造方法であって、塩素を0.8質量ppm以下、酸素を5質量ppm以下、リンを10質量ppm以上80質量ppm以下の割合で含み、残部が銅と不可避不純物からなる銅鋳造線材を、最終線径まで縮径した後、水素ガスを含む還元雰囲気中において、焼き鈍し温度と前記最終線径まで縮径した銅鋳造線材の伸び率との関係を示す伸び率温度線図における伸び率が最大値となる温度をX℃としたときに、(X+50)℃から(X−50)℃の温度範囲で焼鈍することを特徴とする銅ボンディングワイヤの製造方法。」
- 前記銅鋳造線材が、塩素を0.8質量ppm以下、酸素を5質量ppm以下、リンを10質量ppm以上40質量ppm以下の割合で含み、残部が銅と不可避不純物からなる銅鋳造線材であることを特徴とする請求項1記載の銅ボンディングワイヤの製造方法。
- 請求項1または2記載の製造方法によって得られたことを特徴とするアルミニウム電極への接続用銅ボンディングワイヤ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008329229A JP5465874B2 (ja) | 2008-12-25 | 2008-12-25 | 銅ボンディングワイヤの製造方法および該製造方法を用いた銅ボンディングワイヤ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008329229A JP5465874B2 (ja) | 2008-12-25 | 2008-12-25 | 銅ボンディングワイヤの製造方法および該製造方法を用いた銅ボンディングワイヤ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010153539A JP2010153539A (ja) | 2010-07-08 |
JP5465874B2 true JP5465874B2 (ja) | 2014-04-09 |
Family
ID=42572321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008329229A Active JP5465874B2 (ja) | 2008-12-25 | 2008-12-25 | 銅ボンディングワイヤの製造方法および該製造方法を用いた銅ボンディングワイヤ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5465874B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5095014B1 (ja) * | 2012-02-09 | 2012-12-12 | オーディオ・ラボ有限会社 | 銀ボンディングワイヤの製造方法および銀ボンディングワイヤ |
JP2014208886A (ja) * | 2013-03-27 | 2014-11-06 | 三菱電線工業株式会社 | 線状導体及びその製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6289348A (ja) * | 1985-10-16 | 1987-04-23 | Hitachi Cable Ltd | 銅ボンデイングワイヤとその製造方法 |
-
2008
- 2008-12-25 JP JP2008329229A patent/JP5465874B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2010153539A (ja) | 2010-07-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI496900B (zh) | Copper alloy bonding wire for semiconductors | |
Uno | Bond reliability under humid environment for coated copper wire and bare copper wire | |
JP4349641B1 (ja) | ボールボンディング用被覆銅ワイヤ | |
JP6167227B2 (ja) | 半導体装置用ボンディングワイヤ | |
Uno et al. | Surface-enhanced copper bonding wire for LSI | |
WO2012043727A1 (ja) | 複層銅ボンディングワイヤの接合構造 | |
US10840208B2 (en) | Bonding wire for semiconductor device | |
JP5270467B2 (ja) | Cuボンディングワイヤ | |
JP2009033127A (ja) | 半導体実装用ボンディングワイヤ | |
KR101099233B1 (ko) | 본딩 와이어의 접합 구조 | |
JP5671512B2 (ja) | ボンディング用ワイヤ | |
TW201205695A (en) | Bonding wire for semiconductor | |
JP4482605B1 (ja) | 高純度Cuボンディングワイヤ | |
JP5109881B2 (ja) | 銅ボンディングワイヤ | |
JP5152897B2 (ja) | 銅ボンディングワイヤ | |
CN110998814B (zh) | 半导体装置用Cu合金接合线 | |
JP5465874B2 (ja) | 銅ボンディングワイヤの製造方法および該製造方法を用いた銅ボンディングワイヤ | |
TWI448568B (zh) | Gold (Au) alloy bonding wire | |
Eto et al. | Effects of alloying elements in high reliability copper wire bond material for high temperature applications | |
JP3673368B2 (ja) | 半導体素子用金銀合金細線 | |
JP2010040944A (ja) | 銅絶縁ボンディングワイヤ及びその製造方法 | |
JP3612180B2 (ja) | 半導体素子用金銀合金細線 | |
Uno et al. | Surface-enhanced copper bonding wire for LSI and its bond reliability under humid environment | |
TWI559417B (zh) | 功率模組封裝的連接線及其製造方法 | |
TWI731234B (zh) | 球焊用之貴金屬被覆銀線及其製造方法、及使用球焊用之貴金屬被覆銀線的半導體裝置及其製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20101111 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120124 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20120913 Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20120913 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20120913 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121023 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121225 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20130122 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130422 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20130430 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20130607 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20131209 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140123 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5465874 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |