JP5465701B2 - Rapid and high-precision temperature control device for glass substrate surface in manufacturing process of liquid crystal display etc. - Google Patents

Description

  The present invention relates to a rapid and highly accurate temperature control device for a glass substrate surface in a manufacturing process of a liquid crystal display or the like.

  When a photosensitive film is formed on the glass substrate surface and dried, the glass substrate becomes high temperature, and it is necessary to cool to 23 ° C. suitable for exposure. Japanese Patent No. 3701007 proposed previously describes that the temperature of the glass substrate surface is controlled by blowing the temperature-controlled air vertically onto the glass substrate surface formed by a number of nozzles.

Japanese Patent Application No. 3701007

  However, as shown in Fig. 4, the vertical blowing of the temperature-controlled air by the nozzle stays at the point contact where the temperature-controlled air bounces against the glass substrate surface, so that it takes time to adjust the temperature and the heated rebounding air blows. In addition, the accuracy of the glass substrate surface is lacking in precision by adjusting to the temperature-controlled air, and the publication states that the temperature is adjusted with an accuracy of 23 ° C. ± 0.1, but the accuracy is actually lower than that. There is a problem of becoming.

The present invention is a temperature control device for a glass substrate surface provided between film formation and exposure in a flow process in which film formation, exposure, and etching are sequentially performed on a glass substrate surface, and covers all large and small glass substrate surfaces. A large-sized temperature-controlled air circulation tank, a plurality of rectangular cylinders arranged side by side with a narrow gap so that temperature-controlled air is blown to the lower part of the tank , and a collection between the rectangular cylinders During the collection of the temperature-controlled air from the narrow gap between the rectangular cylinders and the collection port of the spray-controlled temperature air, the glass substrate surface that has run near the rectangular cylinder is provided This problem was solved by adjusting the temperature of the glass substrate surface rapidly and with high accuracy without the resistance and mixing of wind heated by heat exchange .

  The present invention efficiently blows highly accurate temperature-controlled air within 23 ° C ± 0.05 ° C on a glass substrate surface in a simple device, and achieves precise temperature control of the glass substrate in a very short time compared to the conventional. This produces the effect that it can be performed.

  By arranging parallel rectangular cylinders at narrow intervals and providing a recovery port in the middle of the lower surface, the glass substrate surface can be quickly adjusted by spraying temperature control and contact surface temperature control. Produces an effect.

By eliminating the rebound of the blown temperature-controlled air and preventing the heated air from being mixed into the temperature-controlled air, there is an effect that highly accurate temperature adjustment is performed.
The rapid adjustment can speed up the intermittent running of the conveyor and improve the working efficiency.

Plan view showing part of the manufacturing process Partial enlarged vertical sectional view of the main part of the temperature control device Same as above, cross section Explanatory drawing which shows the state in which the temperature control air blown from the nozzle in the conventional example rebounds on the glass substrate surface

DESCRIPTION OF SYMBOLS 11 Conveyor 12 Film-forming drying chamber 13 Temperature control device 14 Exposure chamber 15 Circulation tank 16 Circulation air passage 17 Fan 18 Temperature sensor 19 Gap 20 Flat cylinder 21 Recovery port C / C Cooling air conditioner H / C is heating air conditioner G is glass substrate

  In the liquid crystal display production line, the glass substrate surface temperature control device provided between the film formation and the exposure is configured as follows in the flow process of sequentially performing film formation, exposure and etching on the large and small glass substrate surfaces. Therefore, the temperature is adjusted rapidly and with high accuracy.

  The configuration is to form a temperature-controlled air circulation tank that covers all large and small glass substrate surfaces, and a plurality of flat rectangular cylinders are placed across the bottom of the tank at narrow intervals to form a film. Then, the glass substrate surface spraying temperature control by lowering the temperature-controlled air in the tank to the glass substrate surface entering the vicinity under the tank and spraying the glass substrate surface from the narrow gap between each rectangular tube, The temperature of the glass substrate is rapidly adjusted by combining with the surface temperature control by contacting the glass substrate surface until the temperature-controlled air is collected from the recovery port. By collecting and preventing it from being mixed into the temperature-controlled air in the tank, it is possible to adjust the temperature with high accuracy within a preset temperature of 23 ° C. ± 0.05 ° C.

  1 to 3 show an embodiment. A film forming and drying chamber 12, a temperature control device 13, and an exposure chamber 14 are provided in this order on a conveyor 11 that runs intermittently in a clean room. A photosensitive solution is dropped on the surface of the glass substrate G that has run near the film drying chamber 12 and heated to a uniform thickness by a centrifugal force that rotates the glass substrate G. A predetermined film is formed in the manner of drying the glass substrate G, and the glass substrate G whose temperature has risen near the temperature control device 13 is adjusted to 23 ° C. which is optimal for exposure.

The temperature control device 13 for temperature control is provided with a temperature control air circulation air passage 16 on the side surface of the circulation tank 15, and a cooling air conditioner C / C supplied with temperature adjustment toward the inside of the tank 15 at the upper part thereof. A heating air conditioner H / C is provided in the upper part of the tank 15 and a fan 17 for pressing the temperature-controlled air downward is provided therebelow. Reference numeral 18 denotes a temperature sensor for controlling the heating air conditioner H / C.

  Accordingly, a plurality of long rectangular tubes 20 are arranged in parallel at a lower space 19 at a lower portion forming the bottom surface in the tank 15. Each rectangular tube 20 is provided with a recovery port 21 in the middle in the longitudinal direction of the bottom surface, and the heated hot air after temperature adjustment that has returned to the recovery port 21 passes through the rectangular tube 20 into the circulation air passage 16 from both ends in the longitudinal direction. It goes back and circulates.

  When the formed glass substrate G enters the vicinity of the temperature control device 13 as the conveyor 11 travels, temperature-controlled air of 23 ° C. pushed down by the fan 17 is blown from the narrow gap 19 between the rectangular tubes 20 to adjust the temperature. The temperature of the glass substrate surface G is rapidly adjusted by the temperature adjustment of the glass substrate surface G to be heated and the contact surface temperature adjustment that continues to contact the glass substrate G until the blowing temperature control air returns to the recovery port 21. The Rukoto.

Moreover, there is no rebound of the heated air after temperature adjustment, which has occurred in the past, and since it is all recovered from the recovery port 21, it is not mixed with the temperature-controlled air in the tank 15, so it is excellent within 23 ° C ± 0.05 ° C. The temperature will be adjusted with high accuracy.
The glass substrate G that has been rapidly and accurately adjusted in this way enters the exposure chamber 14 and is exposed.

  The present invention is widely used by rapidly and accurately adjusting the temperature of a glass substrate surface on which a photosensitive film is formed to a temperature suitable for exposure.

Claims (1)

A temperature control device for a glass substrate surface provided between the film formation and exposure in a flow process in which film formation, exposure, and etching are sequentially performed on the glass substrate surface, and is adjusted to cover all the large and small glass substrate surfaces. A hot air circulation tank, a plurality of flat cylindrical bodies arranged in parallel with a narrow gap so as to blow temperature-controlled air to the lower part of the tank , and a recovery port provided in the middle of each rectangular cylindrical body The surface of the glass substrate that has traveled close to the bottom of the rectangular cylinder is sprayed with temperature-controlled air from a narrow gap between the rectangular cylinders, and the surface of the glass substrate is collected through the recovery port of the sprayed temperature-controlled air. The glass substrate surface is rapidly and highly adjusted in the manufacturing process of liquid crystal displays and the like, characterized in that the temperature of the glass substrate surface is adjusted rapidly and with high accuracy without the resistance and mixing of wind heated by heat exchange with the temperature. Precision temperature control device.

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