TW201307946A - A rapid and precise temperature controlling equipment in the manufacturing process of glass surface for liquid crystal display and other products - Google Patents

Abstract

A rapid and precise temperature controlling equipment in the manufacturing process of glass surface for liquid crystal display and other products is disclosed. The temperature controlling equipment is used between the film forming step and the exposing step which are the steps of the manufacturing process for the glass surface, and the steps of the manufacturing process includes film forming step, exposing step and etching step. The temperature controlling equipment includes a temperature controlling wind cycle tank and some flat angle cylinder members. The cycle tank has a storage space can cover whole of all size glass surface. Some flat angle cylinder members are cross disposed on the center of the cycle tank's under side. Recycle ports which send and recycle the temperature controlling wind are disposed on the flat angle cylinder members. When the glass surface is transported near to the cycle tank's under side, the temperature controlling equipment controls the glass surface's temperature rapidly by blow temperature controlling and contact temperature controlling. The blow temperature controlling is made by the temperature controlling wind which blows form the cycle tank to the interspace of the flat angle cylinder members. The contact temperature controlling is made by the temperature controlling wind which is contacted to the glass surface before sending to the recycle port. The temperature controlling equipment recycles the wind with heat quantity by the recycle port at the same time to avoid the wind mixes the controlling wind in the cycle tank, and achieve precise temperature controlling in the range of 23 DEG C ± 0.05 DEG C.

Description

High-speed and high-precision adjustment of the glass substrate surface in processes such as liquid crystal displays Warm temperature control device

The present invention relates to a temperature regulating device that performs high-speed and high-precision temperature adjustment on a glass substrate surface in a process such as a liquid crystal display.

When the photosensitive film is in a film-forming state on the surface of the glass substrate, if the photosensitive film is dried, the temperature of the glass substrate is raised. At this time, it is necessary to cool it to a temperature suitable for the exposure process of 23 degrees Celsius, thereby causing unnecessary waste of the procedure. In the prior art, Japanese Patent Laid-Open No. Hei. No. 3,701,007 discloses a technique of tempering a glass substrate surface by using a plurality of nozzles to vertically blow a tempered wind to a surface of a glass substrate that has been formed.

However, the state in which the tempering wind is blown vertically through the nozzle is clearly shown in FIG. 4, since the tempered wind stays at the rebound contact point when it touches the surface of the glass substrate, it not only takes extra tempering time but also has a temperature. The rebound wind and the blowing wind will resist each other, and in the case of mixing with the tempering wind, the temperature adjustment of the glass substrate surface will be lacking in precision, although it is mentioned in the aforementioned patent literature that it has a temperature of 23 degrees ± 0.1 degrees Celsius. Accuracy, but there are problems in this application that are lower than this accuracy.

In order to achieve the above object, the temperature regulating device of the present invention has a temperature regulating air circulation groove covering the entire range of the size of the glass substrate surface, and a plurality of installations are arranged across the middle portion of the lower portion of the circulation groove. Will adjust the temperature The wind recycles the flat-angle cylinder of the recovery port that is fed. When the surface of the glass substrate is transported to the vicinity of the lower side of the circulation groove, the temperature of the temperature inside the circulation groove is adjusted from the gap between the square barrels, and the temperature of the tempering wind flows into the vicinity of the recovery port and the glass. The contact temperature adjustment of the surface contact of the substrate further recovers the hot air after the heat exchange through the recovery port, thereby avoiding mixing with the temperature-regulating wind in the circulation tank, thereby preventing the turbulent flow of the return air and eliminating the resistance of the temperature-regulating wind. It saves energy and achieves high-precision temperature regulation within a range of 23 degrees ± 0.05 degrees Celsius, solving the problems encountered in the prior art.

The present invention is constructed by a simple device, and in addition to efficiently blowing the temperature of the glass substrate to a temperature range of 23 degrees ± 0.05 degrees Celsius, the temperature can be shortened compared with the prior art. High-precision temperature adjustment of the glass substrate surface in time.

In addition, the rectangular tube bodies are arranged side by side at a narrow interval, and a recovery port is provided in the lower portion of the rectangular tube body, and the effect of high-speed temperature adjustment is achieved by blowing and adjusting the temperature and contact temperature of the glass substrate surface.

Furthermore, the high-precision temperature adjustment effect can be achieved by eliminating the rebound phenomenon of the tempered wind blowing and preventing the hot air from being mixed into the tempering wind.

Furthermore, at high speeds, the intermittent transportation speed of the conveyor belt can be accelerated and the efficiency of the production operation can be improved.

The invention relates to a temperature regulating device for a glass substrate surface between a film forming and an exposure step in a process of forming, exposing and etching a large-sized glass substrate surface in a liquid crystal display process, and the structure thereof is as follows: high speed and high precision The effect of temperature regulation.

This is characterized in that the temperature regulating device is provided with a temperature regulating air circulation groove capable of covering the capacity of all the glass substrate faces, and the lower portion of the circulation groove is provided with a plurality of rectangular barrels which are separated from each other by a narrow gap. When the surface of the glass substrate after the film formation is transported to the vicinity of the lower side of the circulation groove, the temperature-regulating wind inside the circulation groove is pushed downward, and is blown to the surface of the glass substrate by the gap between the rectangular barrels. Therefore, the blowing temperature adjustment of the glass substrate surface and the temperature adjustment air are returned to the contact temperature adjustment before the recovery port, and the glass substrate surface is tempered at a high speed, and the hot air after the temperature adjustment is recovered from the recovery port. Avoid mixing with the tempering wind in the circulation tank to achieve a high-precision temperature adjustment within a range of 23 degrees ± 0.05 degrees Celsius.

Embodiment 1

1 to 3 are schematic views of the first embodiment. The conveyor belt 11 intermittently operated in the clean room is sequentially disposed into a film drying chamber 12, a temperature regulating device 13 and an exposure chamber 14, and the glass is first placed on the conveyor belt 11. The substrate G is transported to the lower surface of the film forming drying chamber 12, enters the film forming drying chamber 12, and then drops the photosensitive liquid on the surface thereof, and then applies a centrifugal force to the glass substrate G to make the photosensitive liquid exhibit uniformity. The thickness is then heated and dried to complete the predetermined film forming step, and then the glass substrate G is transported under the temperature regulating device 13, and after entering the temperature regulating device 13, the glass substrate G having a high temperature is adjusted to be suitable for exposure. 23 degrees Celsius.

A circulation air passage 16 for tempering air circulation for temperature regulation is disposed on a side surface of the inside of the circulation tank 15, and a portion facing the circulation groove 15 is disposed at an upper portion of the circulation air passage 16 for tempering the temperature adjustment air. Supply of cooling air conditioner C /C, a heating air conditioner H/C is provided above the inside of the circulation tank 15, and a fan 17 that blows the temperature-regulating wind downward is provided below the heating air conditioner H/C. The component symbol 18 is a temperature sensor that controls the heating of the air conditioner H/C.

On the bottom surface of the circulation groove 15, a plurality of elongated rectangular tube bodies 20 which are spaced apart from each other by a narrow interval 19 are arranged in parallel. A recovery port 21 is disposed in the middle of the lower longitudinal direction of each of the rectangular tube bodies 20, and the hot air after the temperature adjustment from the recovery port 21 is returned to the circulation by the both ends in the long axis direction after passing through the inside of the rectangular tube body 20. The air path 16 is circulated.

Then, when the film-formed glass substrate G is transported to the vicinity of the lower side of the temperature control device 13 by the conveyor belt 11, the fan 17 passes the temperature-controlled wind of 23 degrees inside the circulation groove downward toward the narrow gap 19 between the rectangular tube bodies 20 The glass substrate G is subjected to high-speed temperature adjustment by blowing and temperature-regulating the surface of the glass substrate G and the contact temperature adjustment in which the temperature-controlled air is returned to the surface of the glass substrate G in front of the recovery port 21.

Furthermore, since the hot air after the temperature adjustment in the prior art is recovered by the recovery port 21, the rebound phenomenon will no longer occur, and the hot air will not mix with the temperature regulation wind in the circulation tank 15, so that High-precision temperature adjustment in the range of 23 degrees ± 0.05 degrees Celsius.

In this configuration, the glass substrate G which has been tempered by high speed and high precision is then sent to the exposure chamber 14 for subsequent exposure processing.

The present invention can be widely used by adjusting the temperature of a glass substrate surface formed by forming a photosensitive film to a temperature suitable for exposure with high speed and high precision.

11‧‧‧Conveyor belt

12‧‧‧ Film drying room

13‧‧‧temperature control device

14‧‧‧Exposure room

15‧‧‧Circular trough

16‧‧‧Circular wind road

17‧‧‧Fan

18‧‧‧ Temperature Sensor

19‧‧‧ gap

20‧‧‧Blank cylinder

21‧‧‧Recovery

C/C‧‧‧Cooling air conditioner

G‧‧‧glass substrate

H/C‧‧‧heating air conditioner

1 is a partial schematic view of a manufacturing process; FIG. 2 is a partially enlarged longitudinal sectional view of an important part of the temperature regulating device; FIG. 3 is a transverse sectional view of FIG. 2; and FIG. 4 is a temperature regulating wind blown from a nozzle in a conventional example. A state diagram showing the rebound of the glass substrate.

11‧‧‧Conveyor belt

13‧‧‧temperature control device

15‧‧‧Circular trough

16‧‧‧Circular wind road

17‧‧‧Fan

18‧‧‧ Temperature Sensor

19‧‧‧ gap

20‧‧‧Blank barrel

21‧‧‧Recovery

C/C‧‧‧Cooling air conditioner

G‧‧‧glass substrate

H/C‧‧‧heating air conditioner

Claims (1)

A temperature regulating device for performing high-speed and high-precision temperature adjustment on a glass substrate surface in a process such as a liquid crystal display, wherein the glass substrate surface is in a process of film formation, exposure and etching sequence, between film forming and exposure steps a temperature regulating device for the glass substrate surface, the temperature regulating device comprising: a temperature regulating air circulation groove having a size covering a whole range of the size of the glass substrate surface; and a plurality of rectangular barrels attached to the circulation groove a middle portion of the lower portion is disposed across the bottom, and is provided with a recovery port for collecting the temperature-regulated wind; wherein, when the glass substrate surface is transported to the vicinity of the lower side of the circulation groove, the inside of the circulation groove is The tempering wind is tempered from the gap between the flat-angle cylinders, and the tempering wind flows into the contact with the surface of the glass substrate before flowing into the periphery of the recovery port to adjust the temperature to make the glass substrate surface high speed The temperature adjustment is carried out, and the hot air after the temperature adjustment is recovered from the recovery port to avoid mixing with the adjustment air in the circulation tank to achieve high-precision temperature adjustment within a range of 23 degrees ± 0.05 degrees Celsius.