JP5458514B2 - 半導体装置の製造方法、及び半導体装置 - Google Patents
半導体装置の製造方法、及び半導体装置 Download PDFInfo
- Publication number
- JP5458514B2 JP5458514B2 JP2008164701A JP2008164701A JP5458514B2 JP 5458514 B2 JP5458514 B2 JP 5458514B2 JP 2008164701 A JP2008164701 A JP 2008164701A JP 2008164701 A JP2008164701 A JP 2008164701A JP 5458514 B2 JP5458514 B2 JP 5458514B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- dielectric film
- electrode
- annealing
- subdielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 title claims description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000000137 annealing Methods 0.000 claims description 66
- 239000003990 capacitor Substances 0.000 claims description 56
- 229910010037 TiAlN Inorganic materials 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 12
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 5
- 239000012298 atmosphere Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 67
- 239000010936 titanium Substances 0.000 description 23
- 239000011229 interlayer Substances 0.000 description 15
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 9
- 229910052719 titanium Inorganic materials 0.000 description 7
- 229910017150 AlTi Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 238000002955 isolation Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- HSXKFDGTKKAEHL-UHFFFAOYSA-N tantalum(v) ethoxide Chemical compound [Ta+5].CC[O-].CC[O-].CC[O-].CC[O-].CC[O-] HSXKFDGTKKAEHL-UHFFFAOYSA-N 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/7687—Thin films associated with contacts of capacitors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/405—Oxides of refractory metals or yttrium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Semiconductor Integrated Circuits (AREA)
- Formation Of Insulating Films (AREA)
- Semiconductor Memories (AREA)
Description
半導体基板の上に、TiAlNを含む第1の電極膜を形成する工程と、
前記第1の電極膜上に、酸化タンタルを含む第1誘電体膜を形成する工程と、
前記第1の電極膜と前記第1誘電体膜とが形成されている状態でアニールを行うことにより、前記第1の電極膜中のアルミニウムと前記第1誘電体膜中の酸素とを反応させて、前記第1の電極膜と前記第1誘電体膜との界面に、酸化アルミニウムを含む第2誘電体膜を形成する工程と、
前記第1誘電体膜と前記第2誘電体膜とを介して前記第1の電極膜に対向する位置に第2の電極膜を形成する工程と
を有する。
半導体基板の上に配置され、TiAlNを含む第1の電極、酸化アルミニウムを含む第2誘電体膜、酸化タンタルを含む第1誘電体膜、及び第2の電極が、この順番にまたは逆の順番に積層され、該第1の電極と第2誘電体膜とが相互に接し、該第2誘電体膜と第1誘電体膜とが相互に接するキャパシタを有する。
・ターゲット AlTi合金
・基板温度 300℃
・スパッタガス Ar(流量500sccm)+N2(流量25sccm)
・DC印加パワー 1kW
・圧力 40Pa(0.3Torr)
下部電極膜30の上に、Ta2O5からなる主誘電体膜31を形成する。主誘電体膜31は、例えばプラズマ励起化学気相成長(PE−CVD)により形成される。成膜条件は、例えば下記の通りである。
・Ta原料 ペンタエトキシタンタル(Ta(OEt)5)
・酸化ガス O2(流量100sccm)
・キャリアガス Ar(流量500sccm)
・基板温度 300℃
・RFパワー 450W
・圧力 1.3×103Pa(10Torr)
主誘電体膜31の上に、Al2O3からなる上部副誘電体膜32を形成する。上部副誘電体膜32は、例えばPE−CVDにより形成される。成膜条件は、例えば下記の通りである。
・Al原料 トリメチルアルミニウム(TMA)
・酸化ガス O2(流量150sccm)
・キャリアガス Ar(流量500sccm)
・基板温度 300℃
・RFパワー 600W
・圧力 1.3×103Pa(10Torr)
図1Bに示すように、N2またはAr雰囲気において、アニールを行う。このアニールには、例えばラピッドサーマルアニール(RTA)が用いられる。アニール条件は、例えば下記の通りである。
・圧力 1.0×105Pa(760Torr)
・N2またはAr流量 3slm
・アニール時間 1分
・アニール温度 400℃〜600℃
このアニールにより、下部電極膜30内のAlと、主誘電体膜31内のOとが反応し、両者の界面にAl2O3からなる下部副誘電体膜35が形成される。下部副誘電体膜35が形成されていることは、X線光電子分光分析(XPS)により確認した。XPSの結果については、後に図2A〜図2Cを参照して説明する。
・ターゲット Ti
・スパッタガス Ar(流量500sccm)+N2(流量500sccm)
・DC印加パワー 1kW
・圧力 67Pa(0.5Torr)
・成膜時間 3分
図1Dに示すように、上部電極膜38から下部電極膜30までの各膜を同一のエッチングマスクを用いてパターニングする。これらの膜のエッチングは、例えば2周波誘導結合型プラズマエッチング装置を用いて行う。エッチング条件は、例えば下記の通りである。
・エッチングガス CHF3(流量30sccm)+Ar(流量100sccm)
・圧力 2.0Pa(15mTorr)
・エッチング時間 44秒
・RFパワー 100W/500W
TiAlNからなる下部電極30a、Al2O3からなる下部副誘電体膜35a、Ta2O5からなる主誘電体膜31a、Al2O3からなる上部副誘電体膜32a、及びTiNからなる上部電極38aにより、MIMキャパシタ40が構成される。平面視において、MIMキャパシタ40は、その下の導電プラグ20を内包する。
11 素子分離絶縁膜
12 MISFET
15、17、19 層間絶縁膜
16、20 導電プラグ
18 配線
30 下部電極膜
30a 下部電極
31、31a 主誘電体膜
32、32a 上部副誘電体膜
35、35a 下部副誘電体膜
38 上部電極膜
38a 上部電極
40 MIMキャパシタ
45 層間絶縁膜
46、48 導電プラグ
Claims (9)
- 半導体基板の上に、TiAlNを含む第1の電極膜を形成する工程と、
前記第1の電極膜上に、酸化タンタルを含む第1誘電体膜を形成する工程と、
前記第1の電極膜と前記第1誘電体膜とが形成されている状態でアニールを行うことにより、前記第1の電極膜中のアルミニウムと前記第1誘電体膜中の酸素とを反応させて、前記第1の電極膜と前記第1誘電体膜との界面に、酸化アルミニウムを含む第2誘電体膜を形成する工程と、
前記第1誘電体膜と前記第2誘電体膜とを介して前記第1の電極膜に対向する位置に第2の電極膜を形成する工程と
を有する半導体装置の製造方法。 - 前記第1の電極膜を形成する工程で形成される該第1の電極膜の厚さが5nm以上である請求項1に記載の半導体装置の製造方法。
- 前記第1の電極膜を形成する工程で形成される該第1の電極膜のTiに対するAlの含有量の比が30原子%〜50原子%の範囲内である請求項1または2に記載の半導体装置の製造方法。
- 前記第2誘電体膜を形成する工程のアニール温度を400℃〜600℃の範囲内とする請求項1乃至3のいずれか1項に記載の半導体装置の製造方法。
- 前記第1誘電体膜と前記第2の電極膜との間に、さらに、酸化アルミニウムを含む第3誘電体膜を形成する工程を有する請求項1乃至4のいずれか1項に記載の半導体装置の製造方法。
- 前記第2誘電体膜を形成する工程のアニールは、N 2 またはAr雰囲気において行われる請求項1乃至5のいずれか1項に記載の半導体装置の製造方法。
- 半導体基板の上に配置され、TiAlNを含む第1の電極、酸化アルミニウムを含む第2誘電体膜、酸化タンタルを含む第1誘電体膜、及び第2の電極が、この順番にまたは逆の順番に積層され、該第1の電極と第2誘電体膜とが相互に接し、該第2誘電体膜と第1誘電体膜とが相互に接するキャパシタを有する半導体装置。
- 前記第2誘電体膜の厚さが0.5nm以上である請求項7に記載の半導体装置。
- さらに、前記第1誘電体膜と前記第2の電極との間に、酸化アルミニウムを含む第3誘電体膜が配置されている請求項7または8に記載の半導体装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008164701A JP5458514B2 (ja) | 2008-06-24 | 2008-06-24 | 半導体装置の製造方法、及び半導体装置 |
US12/365,276 US8003462B2 (en) | 2008-06-24 | 2009-02-04 | Manufacture method for semiconductor device having MIM capacitor, and semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008164701A JP5458514B2 (ja) | 2008-06-24 | 2008-06-24 | 半導体装置の製造方法、及び半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010010211A JP2010010211A (ja) | 2010-01-14 |
JP5458514B2 true JP5458514B2 (ja) | 2014-04-02 |
Family
ID=41431032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008164701A Expired - Fee Related JP5458514B2 (ja) | 2008-06-24 | 2008-06-24 | 半導体装置の製造方法、及び半導体装置 |
Country Status (2)
Country | Link |
---|---|
US (1) | US8003462B2 (ja) |
JP (1) | JP5458514B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011034536A1 (en) * | 2009-09-18 | 2011-03-24 | Intermolecular, Inc. | Fabrication of semiconductor stacks with ruthenium-based materials |
US8541867B2 (en) * | 2011-06-28 | 2013-09-24 | International Business Machines Corporation | Metal insulator metal structure with remote oxygen scavenging |
US8912061B2 (en) | 2011-06-28 | 2014-12-16 | International Business Machines Corporation | Floating gate device with oxygen scavenging element |
US8716088B2 (en) | 2012-06-27 | 2014-05-06 | International Business Machines Corporation | Scavenging metal stack for a high-K gate dielectric |
FR2996679A1 (fr) * | 2012-10-09 | 2014-04-11 | St Microelectronics Crolles 2 | Procede de depot d'une couche de tialn peu diffusive et grille isolee comprenant une telle couche |
US20170040108A1 (en) * | 2015-08-06 | 2017-02-09 | Murata Manufacturing Co., Ltd. | Capacitor |
US9564310B1 (en) | 2015-11-18 | 2017-02-07 | International Business Machines Corporation | Metal-insulator-metal capacitor fabrication with unitary sputtering process |
US20210305356A1 (en) * | 2020-03-26 | 2021-09-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Barrier layer for metal insulator metal capacitors |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6485988B2 (en) * | 1999-12-22 | 2002-11-26 | Texas Instruments Incorporated | Hydrogen-free contact etch for ferroelectric capacitor formation |
US6475854B2 (en) * | 1999-12-30 | 2002-11-05 | Applied Materials, Inc. | Method of forming metal electrodes |
JP2002164506A (ja) * | 2000-11-27 | 2002-06-07 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2004039728A (ja) * | 2002-07-01 | 2004-02-05 | Toshiba Corp | 半導体装置及びその製造方法 |
JP2004134451A (ja) * | 2002-10-08 | 2004-04-30 | Renesas Technology Corp | 半導体装置及びその製造方法 |
JP2004152796A (ja) * | 2002-10-28 | 2004-05-27 | Toshiba Corp | 半導体装置及びその製造方法 |
US6919233B2 (en) * | 2002-12-31 | 2005-07-19 | Texas Instruments Incorporated | MIM capacitors and methods for fabricating same |
-
2008
- 2008-06-24 JP JP2008164701A patent/JP5458514B2/ja not_active Expired - Fee Related
-
2009
- 2009-02-04 US US12/365,276 patent/US8003462B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2010010211A (ja) | 2010-01-14 |
US20090316331A1 (en) | 2009-12-24 |
US8003462B2 (en) | 2011-08-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5458514B2 (ja) | 半導体装置の製造方法、及び半導体装置 | |
EP1368822B1 (en) | Rhodium-rich oxygen barriers | |
US7485915B2 (en) | Semiconductor device and method having capacitor and capacitor insulating film that includes preset metal element | |
US6140671A (en) | Semiconductor memory device having capacitive storage therefor | |
TWI401745B (zh) | Semiconductor device and manufacturing method thereof | |
US9887083B2 (en) | Methods of forming capacitors | |
US8563413B2 (en) | Semiconductor device with buried gate and method for fabricating the same | |
JP5883263B2 (ja) | 半導体デバイスで使用する金属−絶縁体−金属キャパシタの製造方法 | |
US11784214B2 (en) | Method for fabricating metal-insulator-metal capacitor | |
JP3943033B2 (ja) | キャパシタ及びその製造方法 | |
US20100164064A1 (en) | Capacitor and Method for Manufacturing the Same | |
JP4571836B2 (ja) | 半導体装置およびその製造方法 | |
JP2009239047A (ja) | 窒化ジルコニウム界面層を有するキャパシター構造 | |
US10403709B2 (en) | Method for manufacturing semiconductor device | |
JP2003017581A (ja) | 半導体装置及びその製造方法 | |
JP2004039728A (ja) | 半導体装置及びその製造方法 | |
US6653198B2 (en) | Method for fabricating capacitor in semiconductor device and capacitor fabricated thereby | |
US6407419B1 (en) | Semiconductor device and manufacturing method thereof | |
JP2003174092A (ja) | 半導体装置及びその製造方法 | |
JP5955045B2 (ja) | 半導体装置の製造方法及び半導体装置 | |
KR100585003B1 (ko) | 캐패시터 및 그 제조 방법 | |
KR100683489B1 (ko) | 반도체 소자의 캐패시터 형성방법 | |
KR20070098275A (ko) | 반도체 장치의 커패시터 제조 방법 | |
KR20020055251A (ko) | 커패시터 제조 방법 | |
JP2024067682A (ja) | 半導体装置の製造方法および半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20110125 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130301 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130409 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130528 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131217 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131230 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5458514 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |