JP5451569B2 - Photosensitive resin composition, cured film, method for forming cured film, organic EL display device, and liquid crystal display device - Google Patents

Description

  The present invention relates to a photosensitive resin composition, a cured film, a method for forming a cured film, an organic EL display device, and a liquid crystal display device.

An organic EL display device, a liquid crystal display device, and the like are provided with a patterned interlayer insulating film. In forming the interlayer insulating film, photosensitive resin compositions are widely used because the number of steps for obtaining a required pattern shape is small and sufficient flatness is obtained.
It is required that the interlayer insulating film and the planarizing film patterned using the photosensitive resin composition as described above be a highly reliable cured film having excellent solvent resistance in addition to transparency. .

  As such a photosensitive resin composition, for example, Patent Document 1 discloses (A) (a) an unsaturated carboxylic acid or unsaturated carboxylic acid anhydride, (b) a radical polymerizable compound having an epoxy group, and (c A photosensitive resin composition having a resin soluble in an alkaline aqueous solution, which is a copolymer of another radical polymerizable compound, and (B) a radiation sensitive acid generating compound has been proposed.

  Examples of the photosensitive resin composition that can ensure storage stability, sensitivity, and high reliability of the formed cured film as the photosensitive resin composition include (meth) acrylic acid ester compounds having an acetal structure or a ketal structure, Radiation-sensitive resin containing a radical polymerizable compound having an epoxy group, a resin that is a copolymer of other radical polymerizable compounds, and a compound that generates an acid having a pKa of 4.0 or less upon irradiation with radiation A composition is known (see, for example, Patent Document 2).

JP-A-5-165214 Japanese Patent No. 4207604

In addition to poor storage stability, the photosensitive resin composition described in Patent Document 1 has insufficient sensitivity, and there has been a problem in the productivity of products of organic EL display devices and liquid crystal display devices.
In addition, the photosensitive resin composition described in Patent Documents 1 and 2 can be used in an exposure process, a development process, when a solvent removal temperature and time fluctuation occur in the solvent removal process for removing the solvent from the applied photosensitive resin composition. It was found that the variation in the line width of the interlayer insulating film and the planarized film patterned through the process was large, and the tolerance of the solvent removal process was insufficient. This proved to be a major problem in terms of product yield.
Therefore, at present, a photosensitive resin composition having a wide tolerance in the solvent removal process while ensuring storage stability, sensitivity, and high reliability (transparency, solvent resistance, etc.) of the formed cured film has been obtained. Absent.

The problem to be solved by the present invention is a photosensitive resin composition that provides a cured film excellent in storage stability, sensitivity and tolerance of a solvent removal step of the photosensitive resin composition, and excellent in transparency and solvent resistance. Is to provide things. Another object is to provide an organic EL display device and a liquid crystal display device having a cured film formed from the photosensitive resin composition as an interlayer insulating film and having high reliability and productivity. .
In addition, the tolerance of the solvent removal step is a good pattern without fluctuation in line width even if the following (1) or (2) occurs in the solvent removal step of removing the solvent from the applied photosensitive resin composition. It has the tolerance in the solvent removal process which can form.
(1) The solvent removal time is shorter or longer than the optimum time.
(2) The solvent removal temperature is lower or higher than the optimum temperature.

The above-described problems of the present invention have been solved by means described in the following <1>, <12> to <14>, <16>, <17>. It is described below together with <2> to <11> and <15> which are preferred embodiments.
<1> (A) a monomer unit (1) having a residue in which a carboxy group is protected with an acid-decomposable group, and a monomer unit (2) having a residue in which a phenolic hydroxyl group is protected with an acid-decomposable group; A copolymer containing a monomer unit (3) having a 3-membered ring and / or a 4-membered cyclic ether residue, (B) a photoacid generator, and (C) a solvent. A photosensitive resin composition characterized by
<2> The photosensitive resin composition according to <1>, which is a chemically amplified positive photosensitive resin composition,
<3> The monomer unit (1) is a residue in which a carboxy group is protected with a tertiary alkyl group, a residue in which a carboxy group is protected with an acetal, and a residue in which a carboxy group is protected with a ketal. A monomer unit having at least one residue selected from the group consisting of the monomer unit (2), wherein the phenolic hydroxyl group is protected with a tertiary alkyl group, and the phenolic hydroxyl group is protected with an acetal. The photosensitive resin composition according to <1> or <2>, wherein the monomer unit has at least one residue selected from the group consisting of a residue and a residue in which a phenolic hydroxyl group is protected with a ketal object,
<4> The monomer unit (1) is a residue in which a carboxy group is protected with a tertiary alkyl group represented by the following formula (a), and / or a carboxy group is represented by the following formula (b). An acetal or ketal-protected residue, wherein the monomer unit (2) is a residue in which a phenolic hydroxyl group is protected with a tertiary alkyl group represented by the following formula (a), and / or The photosensitive resin composition according to any one of <1> to <3>, wherein the phenolic hydroxyl group has an acetal or ketal-protected residue represented by the following formula (b):

式（ａ）中、Ｒ¹、Ｒ²及びＲ³は、それぞれ独立にアルキル基又はアリール基を表し、Ｒ¹、Ｒ²及びＲ³のいずれか２つが互いに結合して環を形成していてもよい。

In formula (a), R ¹ , R ² and R ³ each independently represents an alkyl group or an aryl group, and any ^{two of} R ¹ , R ² and R ³ are bonded to each other to form a ring. Also good.

式（ｂ）中、Ｒ⁴及びＲ⁵は、それぞれ独立に水素原子又はアルキル基を表すが、Ｒ⁴とＲ⁵が共に水素原子となることはなく、Ｒ⁶は、アルキル基を表し、Ｒ⁴又はＲ⁵と、Ｒ⁶とが連結して環状エーテルを形成してもよい。

In formula (b), R ⁴ and R ⁵ each independently represent a hydrogen atom or an alkyl group, but R ⁴ and R ⁵ are not both hydrogen atoms, R ⁶ represents an alkyl group, R ⁴ or R ⁵ and R ⁶ may be linked to form a cyclic ether.

<5> The photosensitive resin composition according to any one of <1> to <4>, wherein the monomer unit (3) has a residue selected from the group consisting of the following formulas (3a) and (3b). object,

式（３ｂ）中、Ｒ^1b及びＲ^6bはそれぞれ独立に水素原子又はアルキル基を表し、Ｒ^2b、Ｒ^3b、Ｒ^4b、Ｒ^5b、Ｒ^7b、Ｒ^8b、Ｒ^9b、Ｒ^10bはそれぞれ独立に水素原子、ハロゲン原子、アルキル基、又は、アリール基を表す。

In formula (3b), R ^1b and R ^6b each independently represent a hydrogen atom or an alkyl group, and R ^2b , R ^3b , R ^4b , R ^5b , R ^7b , R ^8b , R ^9b , R ^10b are each independently A hydrogen atom, a halogen atom, an alkyl group, or an aryl group is represented.

<6> (B) The photosensitive resin composition according to any one of <1> to <5>, wherein the photoacid generator is a compound that generates an acid upon irradiation with an actinic ray having a wavelength of 300 nm to 450 nm. <7> (B) The photosensitive resin composition according to any one of <1> to <6>, wherein the photoacid generator is a compound having an oxime sulfonate residue represented by the following formula (4): object,

式（４）中、Ｒ⁵は、アルキル基又はアリール基を表す。

In formula (4), R ⁵ represents an alkyl group or an aryl group.

<8> (B) Any one of <1> to <7>, wherein the photoacid generator is a compound represented by the formula (OS-3), the formula (OS-4), or the formula (OS-5). Photosensitive resin composition according to

式（ＯＳ−３）〜式（ＯＳ−５）中、Ｒ¹はアルキル基、アリール基又はヘテロアリール基を表し、Ｒ²はそれぞれ独立に、水素原子、アルキル基、アリール基又はハロゲン原子を表し、Ｒ⁶はそれぞれ独立に、ハロゲン原子、アルキル基、アルキルオキシ基、スルホン酸基、アミノスルホニル基又はアルコキシスルホニル基を表し、ＸはＯ又はＳを表し、ｎは１又は２を表し、ｍは０〜６の整数を表す。

In formula (OS-3) to formula (OS-5), R ¹ represents an alkyl group, an aryl group or a heteroaryl group, and R ² each independently represents a hydrogen atom, an alkyl group, an aryl group or a halogen atom. , R ⁶ each independently represents a halogen atom, an alkyl group, an alkyloxy group, a sulfonic acid group, an aminosulfonyl group or an alkoxysulfonyl group, X represents O or S, n represents 1 or 2, and m represents The integer of 0-6 is represented.

<9> (B) The photosensitive resin composition according to any one of <1> to <7>, wherein the photoacid generator is a compound represented by the following formula (5):

式（５）中、Ｒ⁵は、アルキル基又はアリール基を表し、Ｘは、アルキル基、アルコキシ基、又は、ハロゲン原子を表し、ｍは、０〜３の整数を表し、ｍが２又は３であるとき、複数のＸは同一でも異なっていてもよい。

In formula (5), R ⁵ represents an alkyl group or an aryl group, X represents an alkyl group, an alkoxy group, or a halogen atom, m represents an integer of 0 to 3, and m represents 2 or 3 , The plurality of X may be the same or different.

<10> (D) The photosensitive resin composition according to any one of <1> to <9>, further containing an antioxidant,
<11> (E) The photosensitive resin composition according to any one of <1> to <10>, further containing a crosslinking agent,
<12> A cured film formed by applying light and / or heat to the photosensitive resin composition according to any one of <1> to <11>,
<13> (1) Application step of applying the photosensitive resin composition according to any one of <1> to <11> on a substrate, (2) removing the solvent from the applied photosensitive resin composition. Forming a cured film comprising: a solvent removing step; (3) an exposure step of exposing with actinic rays; (4) a developing step of developing with an aqueous developer; and (5) a post-baking step of heat curing. Method,
<14> A cured film formed by the method according to <13>,
<15> The cured film according to <12> or <14>, which is an interlayer insulating film,
<16> An organic EL display device comprising the cured film according to <12>, <14> or <15>,
<17> A liquid crystal display device comprising the cured film according to <12>, <14>, or <15>.

  According to the present invention, there is provided a photosensitive resin composition that provides a cured film excellent in storage stability, sensitivity, and tolerance of a solvent removal step of the photosensitive resin composition, and excellent in transparency and solvent resistance. I was able to. In addition, it was possible to provide an organic EL display device and a liquid crystal display device that have a cured film formed of the photosensitive resin composition as an interlayer insulating film and have high reliability and high productivity.

1 shows a conceptual diagram of a configuration of an example of an organic EL display device. A schematic cross-sectional view of a substrate in a bottom emission type organic EL display device is shown, and a planarizing film 4 is provided. 1 is a conceptual diagram of a configuration of an example of a liquid crystal display device. The schematic sectional drawing of the active matrix substrate in a liquid crystal display device is shown, and it has the cured film 17 which is an interlayer insulation film.

The photosensitive resin composition of the present invention comprises (A) a monomer unit (1) having a residue in which a carboxy group is protected with an acid-decomposable group, and a residue in which a phenolic hydroxyl group is protected with an acid-decomposable group. A copolymer containing a monomer unit (2) having a monomer unit (3) having a 3-membered ring and / or a 4-membered cyclic ether residue (hereinafter also referred to as (A) copolymer). And (B) a photoacid generator and (C) a solvent.
Hereinafter, these components represented by (A) to (C) are also referred to as “(A) component” to “(C) component”, respectively.

The photosensitive resin composition of the present invention is a positive photosensitive resin composition.
The photosensitive resin composition of the present invention is preferably a chemically amplified positive photosensitive resin composition (chemically amplified positive photosensitive resin composition).
The photosensitive resin composition of the present invention preferably contains no 1,2-quinonediazide compound as a photoacid generator sensitive to actinic rays. A 1,2-quinonediazide compound generates a carboxy group by a sequential photochemical reaction, but its quantum yield is always 1 or less.
On the other hand, the photoacid generator (B) used in the present invention acts as a catalyst for the deprotection of the acid-protected acid group produced in response to actinic rays. The acid generated by the action contributes to a number of deprotection reactions, and the quantum yield exceeds 1, for example, a large value such as a power of 10, and high sensitivity is obtained as a result of so-called chemical amplification.
Moreover, it is preferable that the photosensitive resin composition of this invention further contains the (E) crosslinking agent mentioned later from a solvent-resistant viewpoint.

  The photosensitive resin composition of the present invention contains the components (A) to (C), so that it has excellent storage stability, high sensitivity, and excellent tolerance in the solvent removal step. Become. Moreover, the photosensitive resin composition from which the cured film excellent in solvent resistance and heat-resistant transparency is obtained can be provided.

Hereinafter, the present invention will be described in detail.
In addition, in the description of the group (atomic group) in this specification, the description which does not describe substitution and non-substitution includes what has a substituent with what does not have a substituent. For example, the “alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group). Here, the permissible substituent is inactive and does not change the original chemical function of the compound containing the specific group. As the permissible substituent, a halogen atom, an alkoxy group, and a hydroxyl group are included. Illustrated.
In the present invention, “(meth) acrylic acid ester” means acrylic acid ester and / or methacrylic acid ester. The same applies to “(meth) acrylic acid” and the like.
Furthermore, in the present invention, the description of “lower limit to upper limit” representing a numerical range represents “more than the lower limit and less than the upper limit” unless otherwise specified. That is, it means a numerical range including a lower limit and an upper limit that are end points.

(A) Copolymer The (A) copolymer contained in the photosensitive resin composition of the present invention is:
(1): a monomer unit in which a carboxy group is protected with an acid-decomposable group (hereinafter also referred to as monomer unit (1)),
(2): a monomer unit in which a phenolic hydroxyl group is protected with an acid-decomposable group (hereinafter also referred to as monomer unit (2)), and
(3): A monomer unit having a 3-membered ring and / or a 4-membered cyclic ether residue (hereinafter also referred to as monomer unit (3)).
It is a polymer having
(A) A copolymer has said monomer unit (1)-monomer unit (3) as an essential component, and may have another monomer unit (4). In addition, the ratio for which the monomer unit (1) to the monomer unit (3) occupy the (A) copolymer is 60 mol% in total with respect to all monomer units of the copolymer from the viewpoint of obtaining the effects of the present invention. The above is preferable, and 80 mol% or more is more preferable.

The method for introducing the monomer unit contained in the copolymer used in the present invention may be a polymerization method or a polymer reaction method. In the polymerization method, monomers containing a predetermined functional group are synthesized in advance, and then these monomers are copolymerized. In the polymer reaction method, after a polymerization reaction is performed, a necessary functional group is introduced into the monomer unit using a reactive group contained in the monomer unit of the obtained copolymer. Here, as the functional group, an alkali-soluble group (acidic group) such as a carboxy group, a phenolic hydroxyl group or a carboxy group is protected, and at the same time, it is decomposed in the presence of a strong acid to release them, an epoxy group or Examples thereof include a crosslinkable group such as an oxetanyl group.
In the copolymer of the component (A), the monomer unit (1), the monomer unit (2), or the monomer unit (3) is introduced into the copolymer (A) by a polymerization method or a polymer reaction. These methods may be used in combination.
In the polymerization method, an ethylenically unsaturated compound having a residue in which a carboxy group is protected with an acid-decomposable group, an ethylenically unsaturated compound having a residue in which a phenolic hydroxyl group is protected with an acid-decomposable group, and an epoxy An ethylenically unsaturated compound having a group and / or an oxetanyl group can be mixed and subjected to addition polymerization to obtain a desired copolymer.
In the polymer reaction method, an epoxy group can be introduced by reacting a copolymer obtained by copolymerizing 2-hydroxyethyl methacrylate with epichlorohydrin. Thus, after copolymerizing an ethylenically unsaturated compound having a reactive group, the residual group in which the phenolic hydroxyl group is protected by an acid-decomposable group is obtained by a polymer reaction utilizing the reactive group remaining in the side chain. A functional group such as a group, a residue in which a carboxy group is protected with an acid-decomposable group, and / or a crosslinkable group can be introduced into the side chain.

(A) The acid-decomposable group of the copolymer represents a functional group that can be decomposed in the presence of an acid. That is, a monomer unit having a residue in which a carboxy group is protected with an acid-decomposable group can generate a carboxy group by the decomposition of the protecting group with an acid, and the phenolic hydroxyl group is an acid-decomposable group. The monomer unit having a protected residue can generate a phenolic hydroxyl group by the decomposition of the protecting group with an acid.
In the present invention, the copolymer (A) is a resin that is alkali-insoluble and becomes alkali-soluble when the acid-decomposable groups of the monomer unit (1) and the monomer unit (2) are decomposed. preferable. Here, in the present invention, “alkali-soluble” means a coating film (thickness) of the compound (resin) formed by applying a solution of the compound (resin) on a substrate and heating at 90 ° C. for 2 minutes. 3 μm) is a dissolution rate in a 0.4% tetramethylammonium hydroxide aqueous solution at 23 ° C. of 0.005 μm / second or more. “Alkali insoluble” means that the solution of the compound (resin) is a substrate. The dissolution rate of the coating film (thickness 3 μm) of the compound (resin) formed by applying the coating on the substrate and heating at 90 ° C. for 2 minutes in a 0.4% tetramethylammonium hydroxide aqueous solution at 23 ° C. It means less than 0.005 μm / second.
The (A) copolymer does not exclude the introduction of an acidic group as long as the entire copolymer (A) is kept insoluble in alkali, and has other carboxy groups, carboxylic acid anhydride residues, etc. described later. The monomer unit (4) may be included.

The (A) copolymer is preferably an addition polymerization type polymer, and more preferably a polymer containing monomer units derived from (meth) acrylic acid and / or its ester. In addition, you may have monomer units other than the monomer unit derived from (meth) acrylic acid and / or its ester, for example, the monomer unit derived from styrene, the monomer unit derived from a vinyl compound, etc.
The (A) copolymer preferably contains 50 mol% or more of monomer units derived from (meth) acrylic acid and / or its ester with respect to all monomer units in the polymer, and contains 90 mol% or more. It is more preferable to use a polymer composed of only monomer units derived from (meth) acrylic acid and / or its ester.
The “monomer unit derived from (meth) acrylic acid and / or its ester” is also referred to as “acrylic monomer unit”.

Hereinafter, each of the monomer unit (1), the monomer unit (2), and the monomer unit (3) will be described.
(1) Monomer unit having a residue in which a carboxy group is protected with an acid-decomposable group (monomer unit (1))
Examples of the monomer unit having a residue in which a carboxy group is protected with an acid-decomposable group include monomer units in which the carboxy group of the monomer unit having a carboxy group is protected with an acid-decomposable group, specifically And a monomer unit derived from (meth) acrylic acid and protecting this carboxy group with an acidic decomposable group. This will be described in detail below.

(1-1) Monomer unit having a carboxy group As the monomer unit having a carboxy group, for example, at least one carboxy group in the molecule, such as an unsaturated monocarboxylic acid, an unsaturated dicarboxylic acid, or an unsaturated tricarboxylic acid. The monomer unit derived from the unsaturated carboxylic acid etc. which have is mentioned.

Examples of the unsaturated carboxylic acid used for obtaining the monomer unit having a carboxy group include those listed below.
That is, examples of the unsaturated monocarboxylic acid include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, and cinnamic acid.
Examples of the unsaturated dicarboxylic acid include maleic acid, fumaric acid, itaconic acid, citraconic acid, and mesaconic acid.

  Moreover, the acid anhydride may be sufficient as unsaturated polyhydric carboxylic acid used in order to obtain the monomer unit which has a carboxy group. Specific examples include maleic anhydride, itaconic anhydride, citraconic anhydride, and the like. The unsaturated polyvalent carboxylic acid may be a mono (2-methacryloyloxyalkyl) ester of a polyvalent carboxylic acid. For example, succinic acid mono (2-acryloyloxyethyl), succinic acid mono (2 -Methacryloyloxyethyl), mono (2-acryloyloxyethyl) phthalate, mono (2-methacryloyloxyethyl) phthalate and the like.

  Further, the unsaturated polyvalent carboxylic acid may be a mono (meth) acrylate of the dicarboxy polymer at both ends, and examples thereof include ω-carboxypolycaprolactone monoacrylate and ω-carboxypolycaprolactone monomethacrylate.

  As the unsaturated carboxylic acid, acrylic acid-2-carboxyethyl ester, methacrylic acid-2-carboxyethyl ester, maleic acid monoalkyl ester, fumaric acid monoalkyl ester, 4-carboxystyrene and the like can also be used.

  Among these, from the viewpoint of developability, in order to form the monomer unit (1-1) having a carboxy group, it is preferable to use acrylic acid, methacrylic acid, an unsaturated polycarboxylic acid anhydride, or the like. More preferably, acid or methacrylic acid is used.

  The monomer unit (1-1) having a carboxy group may be composed of one kind alone, or may be composed of two or more kinds.

(1-2) Monomer unit having both an ethylenically unsaturated group and an acid anhydride residue The monomer unit (1-2) having both an ethylenically unsaturated group and an acid anhydride residue is ethylenically unsaturated. The unit is preferably a unit derived from a monomer obtained by reacting a hydroxyl group present in a monomer unit having a group with an acid anhydride.
As the acid anhydride, known ones can be used, and specific examples include maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, chlorendic anhydride and the like. Examples include basic acid anhydrides; acid anhydrides such as trimellitic anhydride, pyromellitic anhydride, benzophenone tetracarboxylic acid anhydride, and biphenyl tetracarboxylic acid anhydride. Among these, phthalic anhydride, tetrahydrophthalic anhydride, or succinic anhydride is preferable from the viewpoint of developability.
The monomer for forming the monomer unit having a hydroxyl group and an ethylenically unsaturated group is not particularly limited and can be appropriately selected from known monomers.
The reaction rate of the acid anhydride with respect to the hydroxyl group is preferably 10 mol% to 100 mol%, more preferably 30 mol% to 100 mol%, from the viewpoint of developability.

(1-3) Monomer unit having a residue in which a carboxy group is protected with an acid-decomposable group The monomer unit having a residue in which a carboxy group is protected with an acid-decomposable group is the above (1-1) or (1 -2) is a monomer unit having a residue protected by an acid-decomposable group described in detail below.
As the acid-decomposable group, known acid-decomposable groups in the positive resist for KrF and the positive resist for ArF can be used and are not particularly limited.
Conventionally, as an acid-decomposable group, a group that is relatively easily decomposed by an acid (for example, an acetal functional group such as a tetrahydropyranyl group) or a group that is relatively difficult to be decomposed by an acid (for example, a t-butyl ester group, t -T-butyl functional groups such as butyl carbonate groups) are known.
Among these acid-decomposable groups, a monomer unit having a residue in which a carboxy group is protected with a tertiary alkyl group, a residue in which a carboxy group is protected with an acetal, or a residue in which a carboxy group is protected with a ketal It is preferable from the viewpoint of the basic physical properties of the resist, particularly the sensitivity and pattern shape, and the storage stability of the photosensitive resin composition.
Furthermore, among the acid-decomposable groups, the carboxy group is a residue protected with a tertiary alkyl group represented by the following formula (a), or protected with an acetal or ketal represented by the following formula (b). It is more preferable that it is a residue from a viewpoint of the tolerance of a solvent removal process.
In addition, when the carboxy group is a residue protected with a tertiary alkyl group represented by the following formula (a), the entire residue is —C (═O) —O—CR ¹ R ² R. ³ and when the carboxy group is an acetal or ketal-protected residue represented by the following formula (b), the residue as a whole is —C (═O) —O—CR. ⁴ R ⁵ (OR ⁶ ) structure.

式（ａ）中、Ｒ¹、Ｒ²及びＲ³は、それぞれ独立にアルキル基又はアリール基を表し、Ｒ¹、Ｒ²及びＲ³のいずれか２つが互いに結合して環を形成していてもよい。

In formula (a), R ¹ , R ² and R ³ each independently represents an alkyl group or an aryl group, and any ^{two of} R ¹ , R ² and R ³ are bonded to each other to form a ring. Also good.

In the formula (a), when R ¹ , R ² and R ³ represent an alkyl group, the alkyl group may be linear, branched or cyclic.
The linear or branched alkyl group preferably has 1 to 12 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 4 carbon atoms. Specifically, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i-butyl group, sec-butyl group, t-butyl group, n-pentyl group, neopentyl group, n Examples include -hexyl group, texyl group (2,3-dimethyl-2-butyl group), n-heptyl group, n-octyl group, 2-ethylhexyl group, n-nonyl group, and n-decyl group.

  The cyclic alkyl group preferably has 3 to 12 carbon atoms, more preferably 4 to 8 carbon atoms, and still more preferably 4 to 6 carbon atoms. Examples of the cyclic alkyl group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, a norbornyl group, and an isobornyl group.

The alkyl group may have a substituent, and examples of the substituent include a halogen atom, an aryl group, and an alkoxy group. When it has a halogen atom as a substituent, R ¹ , R ² and R ³ become a haloalkyl group, and when it has an aryl group as a substituent, R ¹ , R ² and R ³ become an aralkyl group.
Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, and among these, a fluorine atom or a chlorine atom is preferable.
Moreover, as said aryl group, a C6-C20 aryl group is preferable, More preferably, it is C6-C12, Specifically, a phenyl group, (alpha) -methylphenyl group, a naphthyl group etc. can be illustrated. Examples of the entire alkyl group substituted with an aryl group, that is, an aralkyl group, include a benzyl group, an α-methylbenzyl group, a phenethyl group, and a naphthylmethyl group.
As said alkoxy group, a C1-C6 alkoxy group is preferable, More preferably, it is C1-C4, and a methoxy group or an ethoxy group is still more preferable.
When the alkyl group is a cycloalkyl group, the cycloalkyl group may have a linear or branched alkyl group having 1 to 10 carbon atoms as a substituent, and the alkyl group is linear. Or when it is a branched alkyl group, it may have a C3-C12 cycloalkyl group as a substituent.
These substituents may be further substituted with the above substituents.

In the formula (a), when R ¹ , R ² and R ³ represent an aryl group, the aryl group preferably has 6 to 12 carbon atoms, and more preferably 6 to 10 carbon atoms. The aryl group may have a substituent, and preferred examples of the substituent include an alkyl group having 1 to 6 carbon atoms. Examples of the aryl group include a phenyl group, a tolyl group, a xylyl group, a cumenyl group, and a 1-naphthyl group.

R ¹ , R ² and R ³ can be bonded together to form a ring together with the carbon atom to which they are bonded. Examples of the ring structure when R ¹ and R ² , R ¹ and R ³ or R ² and R ³ are combined include, for example, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a tetrahydrofuranyl group, an adamantyl group, and a tetrahydropyrani group. And the like.

Preferable examples of the tertiary alkyl ester structure of carboxylic acid include a combination of R ¹ = R ² = R ³ = methyl group, R ¹ = R ² = methyl group and R ³ = benzyl group.

式（ｂ）中、Ｒ⁴及びＲ⁵は、それぞれ独立に水素原子又はアルキル基を表すが、Ｒ⁴とＲ⁵が共に水素原子となることはない。Ｒ⁶は、アルキル基を表す。Ｒ⁴又はＲ⁵と、Ｒ⁶とが連結して環状エーテルを形成してもよい。

In formula (b), R ⁴ and R ⁵ each independently represent a hydrogen atom or an alkyl group, but R ⁴ and R ⁵ are not both hydrogen atoms. R ⁶ represents an alkyl group. R ⁴ or R ⁵ and R ⁶ may be linked to form a cyclic ether.

In the formula (b), R ⁴ and R ⁵ each independently represent a hydrogen atom or an alkyl group, and the alkyl group may be linear, branched or cyclic. Here, both R ⁴ and R ⁵ do not represent a hydrogen atom, and at least one of R ⁴ and R ⁵ represents an alkyl group.
The alkyl group is the same as the alkyl group represented by R ^{1 to} R ³ in formula (a), and the preferred range is also the same. Incidentally, either one of R ⁴ and R ⁵ is preferably a hydrogen atom or a methyl group.
In formula (b), R ⁶ represents an alkyl group, and the alkyl group is the same as the alkyl group represented by R ^{1 to} R ³ in formula (a), and the preferred range is also the same.

  Examples of the radical polymerizable monomer used for forming the monomer unit having a residue represented by the formula (b) include 1-alkoxyalkyl acrylate, 1-alkoxyalkyl methacrylate, 1- (haloalkoxy). Alkyl acrylate, 1- (haloalkoxy) alkyl methacrylate, 1- (aralkyloxy) alkyl acrylate, 1- (aralkyloxy) alkyl methacrylate, tetrahydropyran-2-yl acrylate, tetrahydropyran-2-yl methacrylate, acrylic Acid tetrahydrofuran-2-yl, tetrahydrofuran-2-yl methacrylate, and the like. Among these, 1-alkoxyalkyl acrylate, 1-alkoxyalkyl methacrylate, tetrahydropyran-2-yl acrylate, tetrahydropyran-2-yl methacrylate, tetrahydrofuran-2-yl acrylate, tetrahydrofuran-2 methacrylate 1-alkoxyalkyl acrylate, 1-alkoxyalkyl methacrylate, tetrahydrofuran-2-yl acrylate, and tetrahydrofuran-2-yl methacrylate are particularly preferable.

  Specific examples of 1-alkoxyalkyl acrylate and 1-alkoxyalkyl methacrylate include, for example, 1-ethoxyethyl methacrylate, 1-ethoxyethyl acrylate, 1-methoxyethyl methacrylate, 1-methoxyethyl acrylate, 1-n-butoxyethyl methacrylate. 1-n-butoxyethyl acrylate, 1-isobutoxyethyl methacrylate, 1- (2-chloroethoxy) ethyl methacrylate, 1- (2-ethylhexyloxy) ethyl methacrylate, 1-n-propoxyethyl methacrylate, 1-cyclohexyloxy Examples include ethyl methacrylate, 1- (2-cyclohexylethoxy) ethyl methacrylate, 1-benzyloxyethyl methacrylate, and the like. It can be used in combination or class.

  As the radical polymerizable monomer used for forming the monomer unit having the residue represented by the formula (b), a commercially available one may be used, or one synthesized by a known method may be used. it can. For example, as shown below, it can be synthesized by reacting (meth) acrylic acid with vinyl ether in the presence of an acid catalyst.

Ｒ¹¹は、水素原子又はアルキル基を表し、該アルキル基は、式（ａ）において、Ｒ¹〜Ｒ³として示したアルキル基と同様である。Ｒ¹¹としては、水素原子又はメチル基が好ましい。
Ｒ¹²及びＲ¹³は、−ＣＨ（Ｒ¹²）（Ｒ¹³）として、式（ｂ）におけるＲ⁵と同義であり、Ｒ¹⁴は式（ｂ）におけるＲ⁴と同義であり、Ｒ¹⁵は式（ｂ）におけるＲ⁶と同義であり、好ましい範囲も同様である。
上記の合成は（メタ）アクリル酸をその他のモノマーと予め共重合させておき、その後に酸触媒の存在下でビニルエーテルと反応させてもよい。

R ¹¹ represents a hydrogen atom or an alkyl group, and the alkyl group is the same as the alkyl group shown as R ^{1 to} R ³ in formula (a). R ¹¹ is preferably a hydrogen atom or a methyl group.
R ¹² and R ¹³ are the same as R ⁵ in formula (b) as —CH (R ¹² ) (R ¹³ ), R ¹⁴ is synonymous with R ⁴ in formula (b), and R ¹⁵ is a formula It is synonymous with R ⁶ in (b), and the preferred range is also the same.
In the above synthesis, (meth) acrylic acid may be previously copolymerized with other monomers and then reacted with vinyl ether in the presence of an acid catalyst.

  Preferable specific examples of the monomer unit (1) include the following monomer units, but the present invention is not limited thereto.

  In the monomer unit constituting the component (A), the content of the monomer unit (1) is preferably from 3 to 70 mol%, more preferably from 5 to 60 mol%, from the viewpoint of excellent sensitivity and tolerance in the solvent removal step. 10 to 50 mol% is more preferable.

(2) Monomer unit having a residue in which a phenolic hydroxyl group is protected with an acid-decomposable group (monomer unit (2))
(2-1) Monomer unit having a phenolic hydroxyl group The monomer unit having a phenolic hydroxyl group is preferably derived from an ethylenically unsaturated group and has a phenolic hydroxyl group. The introduction of the phenolic hydroxyl group into the monomer unit may be carried out by addition polymerization of a previously synthesized ethylenically unsaturated compound having a phenolic hydroxyl group, or a monomer unit derived from an ethylenically unsaturated compound having a reactive side chain. In addition, a phenolic hydroxyl group may be introduced into the side chain by a polymer reaction. An example of the former is addition polymerization of a hydroxystyrene-based monomer, and an example of the latter is a monomer unit in which a phenolic hydroxyl group is introduced into a (co) polymer derived from glycidyl (meth) acrylate by a polymer reaction. It can be illustrated. Among these, a monomer unit derived from (meth) acrylate having α-methylhydroxystyrene and a phenolic hydroxyl group is preferable from the viewpoint of transparency of the cured film.
Examples of the monomer unit having a phenolic hydroxyl group include monomer units constituting a hydroxystyrene-based or novolak-based resin. Among these, a monomer unit derived from α-methylhydroxystyrene is preferable from the viewpoint of transparency. .
Among the monomer units having a phenolic hydroxyl group, the monomer unit represented by the following formula (2) is preferable from the viewpoints of transparency and latitude in the solvent removal step.

式（２）中、Ｒ²⁰は水素原子又はメチル基を表し、Ｒ²¹は単結合又は２価の連結基を表し、Ｒ²²はハロゲン原子又はアルキル基を表し、ａは１〜５の整数を表し、ｂは０〜４の整数を表し、ａ＋ｂは５以下である。なお、Ｒ²²が２以上存在する場合、これらのＲ²²は互いに異なっていてもよいし同じでもよい。

In Formula (2), R ²⁰ represents a hydrogen atom or a methyl group, R ²¹ represents a single bond or a divalent linking group, R ²² represents a halogen atom or an alkyl group, and a represents an integer of 1 to 5. B represents an integer of 0 to 4, and a + b is 5 or less. In the case where R ²² is present 2 or more, these R ²² may be the same or may be different from each other.

In the formula (2), R ²⁰ represents a hydrogen atom or a methyl group, and preferably a methyl group.
R ²¹ represents a single bond or a divalent linking group which may have a substituent. Examples of the linking group include an alkylene group having 1 to 10 carbon atoms, and the alkylene group may be linear or branched. Specific examples of R ²¹ being an alkylene group include a methylene group, an ethylene group, a propylene group, an isopropylene group, an n-butylene group, an isobutylene group, a tert-butylene group, a pentylene group, an isopentylene group, and a neopentylene group. . Among these, R ²¹ is preferably a single bond or an alkylene group having 1 to 5 carbon atoms, and more preferably a single bond, a methylene group or an ethylene group. In particular, in the case of a single bond, the sensitivity can be improved, and the transparency of the cured film can be improved, which is preferable.
The alkylene group may have a substituent, and examples of the substituent include a hydroxyl group, an alkoxy group, and a halogen atom.

Moreover, although a represents the integer of 1-5, from the viewpoint of the effect of this invention, and the point that manufacture is easy, it is preferable that a is 1 or 2, and it is more preferable that a is 1. .
Further, the bonding position of the hydroxyl group in the benzene ring is preferably bonded to the 4-position when the carbon atom bonded to R ²¹ is the reference (first position).

R ²² is preferably a halogen atom or a linear or branched alkyl group having 1 to 5 carbon atoms. Specific examples include fluorine atom, chlorine atom, bromine atom, methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, isobutyl group, tert-butyl group, pentyl group, isopentyl group, neopentyl group and the like. It is done. Among these, a chlorine atom, a bromine atom, a methyl group, or an ethyl group is preferable from the viewpoint of easy production.
B represents an integer of 0 to 4, and is preferably 0.

Preferred examples of the linking group for R ²¹ include an alkyleneoxycarbonyl group (from the main chain side of the copolymer) in addition to the alkylene group. In this case, the monomer unit having a phenolic hydroxyl group is represented by the following formula ( It is preferable that it is represented by 3).

式（３）中、Ｒ³⁰は、式（２）におけるＲ²⁰と同義であり、Ｒ³²は式（２）におけるＲ²²と同義であり、ａ及びｂは式（２）におけるａ及びｂとそれぞれ同義である。また、好ましい範囲も同様である。
式（３）中、Ｒ³³は、２価の連結基を表し、アルキレン基が好ましく例示できる。該アルキレン基は、直鎖状又は分岐鎖状のいずれでもよく、炭素数２〜６であることが好ましく、エチレン基、プロピレン基、イソプロピレン基、ｎ−ブチレン基、ｔｅｒｔ−ブチレン基、ペンチレン基、イソペンチレン基、ネオペンチレン基、ヘキシレン基等が挙げられる。また、アルキレン基は置換基を有していてもよく、該置換基としては、ハロゲン原子、水酸基、アルコキシ基等が挙げられる。
これらの中でも、Ｒ³³としては、エチレン基、プロピレン基、２−ヒドロキシプロピレン基であることが、感度及び溶剤除去工程の寛容度の観点から好ましい。

In formula (3), R ³⁰ has the same meaning as R ²⁰ in formula (2), R ³² has the same meaning as R ²² in formula (2), and a and b are the same as a and b in formula (2). Each is synonymous. The preferable range is also the same.
In the formula (3), R ³³ represents a divalent linking group, and an alkylene group can be preferably exemplified. The alkylene group may be linear or branched, and preferably has 2 to 6 carbon atoms, and is an ethylene group, propylene group, isopropylene group, n-butylene group, tert-butylene group, or pentylene group. , Isopentylene group, neopentylene group, hexylene group and the like. Further, the alkylene group may have a substituent, and examples of the substituent include a halogen atom, a hydroxyl group, and an alkoxy group.
Among these, as R ³³ , an ethylene group, a propylene group, or a 2-hydroxypropylene group is preferable from the viewpoints of sensitivity and latitude in the solvent removal step.

(2-2) Monomer unit having a residue in which a phenolic hydroxyl group is protected with an acid-decomposable group A monomer unit having a residue in which a phenolic hydroxyl group is protected with an acid-decomposable group is described in (2-1). The monomer unit has a residue protected by an acid-decomposable group described in detail below.
The acid-decomposable group is not particularly limited, and any known acid-decomposable group in the positive resist for KrF and the positive resist for ArF can be used.
Conventionally, as an acid-decomposable group, a group that is relatively easily decomposed by an acid (for example, an acetal functional group such as a tetrahydropyranyl group) or a group that is relatively difficult to be decomposed by an acid (for example, a t-butyl ester group, t -T-butyl functional groups such as butyl carbonate groups) are known.
Monomer having a residue in which a phenolic hydroxyl group is protected with a tertiary alkyl group, a residue in which a phenolic hydroxyl group is protected with an acetal, or a residue in which a phenolic hydroxyl group is protected with a ketal among acid-decomposable groups A unit is preferable from the viewpoint of basic physical properties of the resist, particularly sensitivity, pattern shape, and storage stability of the photosensitive resin composition.
Further, among the acid-decomposable groups, the phenolic hydroxyl group is a residue protected with a tertiary alkyl group represented by the above formula (a), or protected with an acetal or ketal represented by the above formula (b). It is more preferable from the viewpoint of the tolerance of the solvent removal step.
When the phenolic hydroxyl group is a residue protected with a tertiary alkyl group represented by the above formula (a), the residue as a whole has the structure of -Ph-O-CR ¹ R ² R ³ . (Where Ph represents a phenylene group), and when the phenolic hydroxyl group is a residue protected with an acetal or ketal represented by the above formula (b), It is the structure of —Ph—O—CR ⁴ R ⁵ (OR ⁶ ).

  These monomer units are, for example, derived from an ester of (meth) acrylic acid and an alcohol having a phenolic hydroxyl group, after the hydroxyl group has been previously protected with a tertiary alcohol, an acetal or a ketal, and then co-polymerized with other monomers. It can introduce | transduce into the copolymer of (A) component by superposing | polymerizing.

  In order to derive a hydroxyl group previously protected with a tertiary alcohol, an acetal or a ketal, a known method can be employed. For example, by reacting a (meth) acrylic acid ester having a phenolic hydroxyl group with a vinyl ether compound in the presence of an acid catalyst, the hydroxyl group can be protected with an acetal or a ketal.

Preferable examples of the tertiary alkyl ether structure of the phenolic hydroxyl group include a combination of R ¹ = R ² = R ³ = methyl group, R ¹ = R ² = methyl group and R ³ = benzyl group.

Examples of the radical polymerizable monomer used to form a monomer unit having a residue in which a phenolic hydroxyl group is protected with an acetal or ketal include, for example, a 1-alkoxyalkyl protector of hydroxystyrene, Protected tetrahydropyranyl, protected tetrahydrofuranyl of hydroxystyrene, protected 1-alkoxyalkyl of α-methylhydroxystyrene, protected tetrahydropyranyl of α-methylhydroxystyrene, protected tetrahydrofuranyl of α-methylhydroxystyrene, 1-alkoxyalkyl protector of 4-hydroxyphenyl methacrylate, tetrahydropyranyl protector of 4-hydroxyphenyl methacrylate, tetrahydrofuranyl protector of 4-hydroxyphenyl methacrylate 1-alkoxyalkyl protected form of 4-hydroxybenzoic acid (1-methacryloyloxymethyl) ester, tetrahydropyranyl protected form of 4-hydroxybenzoic acid (1-methacryloyloxymethyl) ester, 4-hydroxybenzoic acid (1-methacryloyl) Oxymethyl) tetrahydrofuranyl protected product of 4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester, 1-alkoxyalkyl protected product of 4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester , 4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester protected with tetrahydrofuranyl, 4-hydroxybenzoic acid (3-methacryloyloxypropyl) ester with protected 1-alkoxyalkyl Tetrahydropyranyl protected form of 4-hydroxybenzoic acid (3-methacryloyloxypropyl) ester, Tetrahydrofuranyl protected form of 4-hydroxybenzoic acid (3-methacryloyloxypropyl) ester, 4-hydroxybenzoic acid (3-methacryloyloxy- 2-hydroxypropyl) ester 1-alkoxyalkyl protected, 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester tetrahydropyranyl protected, 4-hydroxybenzoic acid (3-methacryloyloxy-2) -Hydroxypropyl) ester protected tetrahydrofuranyl.
Among these, 1-alkoxyalkyl protector of 4-hydroxyphenyl methacrylate, tetrahydropyranyl protector of 4-hydroxyphenyl methacrylate, tetrahydrofuranyl protector of 4-hydroxyphenyl methacrylate, 4-hydroxybenzoic acid (1-methacryloyl) 1-alkoxyalkyl protector of oxymethyl) ester, tetrahydropyranyl protector of 4-hydroxybenzoic acid (1-methacryloyloxymethyl) ester, tetrahydrofuranyl protector of 4-hydroxybenzoic acid (1-methacryloyloxymethyl) ester 4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester 1-alkoxyalkyl protected, 4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester tetra Dropyranyl protected, 4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester protected tetrahydrofuranyl, 4-hydroxybenzoic acid (3-methacryloyloxypropyl) ester 1-alkoxyalkyl protected, 4-hydroxybenzoic acid ( 3-Methacryloyloxypropyl) ester tetrahydropyranyl protected, 4-hydroxybenzoic acid (3-methacryloyloxypropyl) ester tetrahydrofuranyl protected, 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester 1-alkoxyalkyl protector, 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester tetrahydropyranyl protector, 4-hydroxybenzoic acid (3-methacrylate) Roiruokishi-2-hydroxypropyl) tetrahydrofuranyl protection of ester is preferred from the viewpoint of transparency.

  Specific examples of protecting groups for phenolic hydroxyl groups include 1-alkoxyalkyl groups. Specific examples of the 1-alkoxyalkyl groups include, for example, 1-ethoxyethyl group, 1-methoxyethyl group, 1-n. -Butoxyethyl group, 1-isobutoxyethyl group, 1- (2-chloroethoxy) ethyl group, 1- (2-ethylhexyloxy) ethyl group, 1-n-propoxyethyl group, 1-cyclohexyloxyethyl group, 1 -(2-Cyclohexylethoxy) ethyl group, 1-benzyloxyethyl group and the like can be mentioned, and these can be used alone or in combination of two or more.

As the radical polymerizable monomer used for forming the monomer unit (2), a commercially available one may be used, or one synthesized by a known method may be used. For example, it can be synthesized by reacting a compound having a phenolic hydroxyl group with vinyl ether in the presence of an acid catalyst.
In the above synthesis, a monomer having a phenolic hydroxyl group may be previously copolymerized with another monomer, and then reacted with vinyl ether in the presence of an acid catalyst.

  An ethylenically unsaturated compound in which such a phenolic hydroxyl group is protected with an acid-decomposable group, preferably a (meth) acrylic acid ester derivative is copolymerized to form a desired monomer unit (2) of component (A). It can be introduced into the copolymer. Specific examples of the monomer unit (2) thus introduced include the following monomer units, but the present invention is not limited thereto.

  In the monomer unit constituting the component (A), the content of the monomer unit (2) is preferably from 3 to 70 mol%, more preferably from 5 to 60 mol%, from the viewpoint of sensitivity and tolerance of the solvent removal step. 10-50 mol% is more preferable.

(3) Monomer unit having a 3-membered ring and / or 4-membered cyclic ether residue (monomer unit (3))
The (A) copolymer contains a monomer unit (monomer unit (3)) having a 3-membered ring and / or a 4-membered cyclic ether residue.
The 3-membered cyclic ether residue is also called an epoxy group, and the 4-membered cyclic ether residue is also called an oxetanyl group.
The monomer unit (3) having an epoxy group and / or oxetanyl group is preferably a monomer unit having an alicyclic epoxy group and / or oxetanyl group, and more preferably a monomer unit having an oxetanyl group.
The alicyclic epoxy group is a group in which an aliphatic ring and an epoxy ring form a condensed ring. Preferred specific examples include 3,4-epoxycyclohexyl group, 2,3-epoxycyclohexyl group, 2, 3-epoxycyclopentyl group etc. are mentioned.
In addition, the group having an oxetanyl group is not particularly limited as long as it has an oxetane group, but a (3-ethyloxetane-3-yl) methyl group can be preferably exemplified.

  The monomer unit having an epoxy group and / or oxetanyl group may have at least one epoxy group or oxetanyl group in one monomer unit, one or more epoxy groups and one or more oxetanyl groups, 2 It may have one or more epoxy groups, or two or more oxetanyl groups, and is not particularly limited, but preferably has a total of 1 to 3 epoxy groups and / or oxetanyl groups. It is more preferable to have one or two oxetanyl groups in total, and it is even more preferable to have one epoxy group or one oxetanyl group.

  Specific examples of the radical polymerizable monomer used to form the monomer unit having an epoxy group include, for example, glycidyl acrylate, glycidyl methacrylate, glycidyl α-ethyl acrylate, and glycidyl α-n-propyl acrylate. Glycidyl α-n-butyl acrylate, 3,4-epoxybutyl acrylate, 3,4-epoxybutyl methacrylate, acrylate-6,7-epoxyheptyl, methacrylic acid-6,7-epoxyheptyl, α-ethylacrylic acid-6,7-epoxyheptyl, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, cycloaliphatic described in paragraphs 0031 to 0035 of Japanese Patent No. 4168443 Compounds containing an epoxy skeleton It is.

  Specific examples of the radical polymerizable monomer used for forming a monomer unit having an oxetanyl group include, for example, a (meth) acryl having an oxetanyl group described in paragraphs 0011 to 0016 of JP-A No. 2001-330953. An acid ester etc. can be mentioned.

  Specific examples of the radical polymerizable monomer used to form a monomer unit having an epoxy group and / or an oxetanyl group include a monomer having a methacrylic ester structure and a monomer having an acrylate structure. Is preferred.

  Among these monomers, more preferred are compounds containing an alicyclic epoxy skeleton described in paragraphs 0034 to 0035 of Japanese Patent No. 4168443 and paragraphs 0011 to 0016 of JP 2001-330953 A. (Meth) acrylic acid esters having an oxetanyl group, particularly preferred are (meth) acrylic acid esters having an oxetanyl group described in paragraphs 0011 to 0016 of JP-A No. 2001-330953. Among these, preferred are 3,4-epoxycyclohexylmethyl acrylate, 3,4-epoxycyclohexylmethyl methacrylate, (3-ethyloxetane-3-yl) methyl acrylate, and methacrylic acid (3-ethyloxetane). -3-yl) methyl, most preferred are acrylic acid (3-ethyloxetane-3-yl) methyl and methacrylic acid (3-ethyloxetane-3-yl) methyl. These monomer units can be used singly or in combination of two or more.

  The monomer unit (3) preferably has a residue selected from the group consisting of the following formulas (3a) and (3b).

The monomer unit (3) has any one of the three residues ((3a-1), (3a-2), (3a-3)) represented by the above formula (3a). ) Is a group obtained by removing one or more hydrogen atoms from the structure represented by
The monomer unit (3) more preferably has a 3,4-epoxycyclohexyl group, a 2,3-epoxycyclohexyl group, and a 2,3-epoxycyclopentyl group.

式（３ｂ）中、Ｒ^1b及びＲ^6bはそれぞれ独立に水素原子又はアルキル基を表し、Ｒ^2b、Ｒ^3b、Ｒ^4b、Ｒ^5b、Ｒ^7b、Ｒ^8b、Ｒ^9b、Ｒ^10bはそれぞれ独立に水素原子、ハロゲン原子、アルキル基、又は、アリール基を表す。

In formula (3b), R ^1b and R ^6b each independently represent a hydrogen atom or an alkyl group, and R ^2b , R ^3b , R ^4b , R ^5b , R ^7b , R ^8b , R ^9b , R ^10b are each independently A hydrogen atom, a halogen atom, an alkyl group, or an aryl group is represented.

In formula (3b), R ^1b and R ^6b each independently represent a hydrogen atom or an alkyl group, preferably a hydrogen atom or an alkyl group having 1 to 8 carbon atoms, and preferably a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. A group (hereinafter also referred to as “lower alkyl group”) is more preferable.
R ^2b , R ^3b , R ^4b , R ^5b , R ^7b , R ^8b , R ^9b and R ^10b each independently represent a hydrogen atom, a halogen atom, an alkyl group or an aryl group.
As a halogen atom, a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom can be illustrated, a fluorine atom and a chlorine atom are more preferable, and a fluorine atom is further more preferable.
The alkyl group may be linear, branched, or cyclic, and may have a substituent. The linear and branched alkyl group preferably has 1 to 8 carbon atoms, more preferably 1 to 6 carbon atoms, and still more preferably 1 to 4 carbon atoms. The cyclic alkyl group preferably has 3 to 10 carbon atoms, more preferably 4 to 8 carbon atoms, and still more preferably 5 to 7 carbon atoms. The linear and branched alkyl groups may be substituted with a cyclic alkyl group, and the cyclic alkyl group may be substituted with a linear and / or branched alkyl group.
The aryl group is preferably an aryl group having 6 to 20 carbon atoms, and more preferably an aryl group having 6 to 10 carbon atoms.
The alkyl group and aryl group may further have a substituent, and examples of the substituent that the alkyl group may have include a halogen atom and an aryl group, and the aryl group has Examples of the substituent that may be used include a halogen atom and an alkyl group.

Among these, R ^2b , R ^3b , R ^4b , R ^5b , R ^7b , R ^8b , R ^9b and R ^10b are each independently a hydrogen atom, a fluorine atom, an alkyl group having 1 to 4 carbon atoms, a phenyl group, or More preferably, it is a perfluoroalkyl group having 1 to 4 carbon atoms.

  Preferred examples of the residue represented by the above formula (3b) include a (3-ethyloxetane-3-yl) methyl group.

  Preferable specific examples of the monomer unit (3) include the following monomer units, but the present invention is not limited to these specific examples.

  In the monomer unit constituting the component (A), the content of the monomer unit (3) is preferably 5 mol% to 60 mol%, and preferably 10 mol% to 55 mol from the viewpoint of various resistances and transparency of the formed film. More preferably, mol% is more preferable, and 20 mol%-50 mol% are further more preferable.

(4) Other monomer units (monomer unit (4))
The (A) copolymer is a monomer unit (4) other than the above (1) to (3) (hereinafter also referred to as “(4) other monomer unit”) within a range not impeding the effects of the present invention. May be contained.
(4) Examples of the radical polymerizable monomer used to form other monomer units include the compounds described in paragraphs 0021 to 0024 of JP-A No. 2004-264623 (provided that (Excluding monomer units (1) to (3)).
Among these, (meth) acrylic acid esters containing alicyclic structures such as (meth) acrylic acid dicyclopentanyl, (meth) acrylic acid cyclohexyl, cyclohexyl acrylate, (meth) acrylic acid, (meth) acrylic Preferred examples include methyl acid, 2-hydroxyethyl (meth) acrylate, and styrene. Among these, (meth) acrylic acid, methyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, and styrene can be illustrated more preferably, and (meth) acrylic acid can be further illustrated.
(4) When the other monomer unit has a free acidic group, the free acidic group is preferably a carboxy group, and preferably has no phenolic hydroxyl group as a free acidic group. . That is, (4) it is preferable not to use a monomer having a phenolic hydroxyl group that is not protected by an acid-decomposable group, such as hydroxystyrene, as a monomer used to form other monomer units. .
These monomer units (4) can be used singly or in combination of two or more.

  The content of the monomer unit (4) in the case where the monomer unit (4) is contained in all the monomer units constituting the copolymer (A) is preferably 1 to 50 mol%, more preferably 3 to 40 mol%. Preferably, 5 to 30 mol% is particularly preferable.

  The weight average molecular weight of the (A) copolymer is preferably 1,000 to 100,000, and more preferably 2,000 to 50,000. In addition, it is preferable that the weight average molecular weight in this invention is a polystyrene conversion weight average molecular weight by gel permeation chromatography (GPC).

  Various methods are known for the synthesis method of the copolymer (A). For example, at least the monomer unit (1), the monomer unit (2), and the monomer unit (3) are formed. It can synthesize | combine by superposing | polymerizing the radically polymerizable monomer mixture containing the radically polymerizable monomer used in order to carry out in an organic solvent using a radical polymerization initiator.

Hereinafter, preferable examples of the copolymer (A) used in the present invention are exemplified, but the present invention is not limited thereto.
In addition, it is preferable that the weight average molecular weights of the said (A) copolymer illustrated below are 2,000-50,000.
Ethyl acetal protector of 4-hydroxybenzoic acid (2-methacryloyloxymethyl) ester / 1-ethoxyethyl methacrylate / glycidyl methacrylate / methacrylic acid / hydroxyethyl methacrylate Ethyl acetal of 4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester Protected body / 1-ethoxyethyl methacrylate / glycidyl methacrylate / methacrylic acid / hydroxyethyl methacrylate Ethyl acetal protected body of 4-hydroxybenzoic acid (3-methacryloyloxypropyl) ester / 1-ethoxyethyl methacrylate / glycidyl methacrylate / methacrylic acid / hydroxy Ethyl methacrylate 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) esthetic Ethyl acetal protector of 1 / 1-ethoxyethyl methacrylate / glycidyl methacrylate / methacrylic acid / hydroxyethyl methacrylate 4-hydroxyphenyl methacrylate protector of ethyl acetal / 1-ethoxyethyl methacrylate / glycidyl methacrylate / methacrylic acid / hydroxyethyl methacrylate 4-hydroxy Ethyl acetal protector of benzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester / 1-ethoxyethyl methacrylate / glycidyl methacrylate / methacrylic acid / hydroxyethyl methacrylate / methyl methacrylate 4-hydroxybenzoic acid (3-methacryloyloxy- 2-Hydroxypropyl) tetrahydropyranyl protected form / 1-ethoxyethylmeta Relate / Glycidyl methacrylate / Methacrylic acid / Hydroxyethyl methacrylate Ethyl acetal protector of 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester / Tetrahydropyran-2-yl methacrylate / Glycidyl methacrylate / Methacrylic acid / Hydroxyethyl methacrylate 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester ethyl acetal protector / tetrahydrofuran-2-yl methacrylate / glycidyl methacrylate / methacrylic acid / hydroxyethyl methacrylate 4-hydroxybenzoic acid ( 3-methacryloyloxy-2-hydroxypropyl) ethyl acetal protector / 1-ethoxyethyl methacrylate / 3,4-epoxycyclohexylmethyl methacrylate / methacrylic acid / hydroxyethyl methacrylate 4-ethylbenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester ethyl acetal protector / 1-ethoxyethyl methacrylate / 3- (methacryloyl) Oxymethyl) -3-ethyloxetane / methacrylic acid / hydroxyethyl methacrylate 4-ethylbenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester ethyl acetal protector / 1-ethoxyethyl methacrylate / 3- (methacryloyloxymethyl) ) -3-Ethyl-oxetane / methacrylic acid / hydroxyethyl methacrylate / methyl methacrylate 4-hydroxybenzoic acid (3-methacryloyloxy-2- (Droxypropyl) ester tetrahydropyranyl protected / 1-ethoxyethyl methacrylate / 3- (methacryloyloxymethyl) -3-ethyloxetane / methacrylic acid / hydroxyethyl methacrylate 4-hydroxybenzoic acid (3-methacryloyloxy-2- Hydroxypropyl) ester tetrahydrofuranyl protected / 1-ethoxyethyl methacrylate / 3- (methacryloyloxymethyl) -3-ethyloxetane / methacrylic acid / hydroxyethyl methacrylate 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ) Ethyl acetal protector of ester / tetrahydropyran-2-yl methacrylate / 3- (methacryloyloxymethyl) -3-ethyl-oxetane / methacrylic acid / Hydroxyethyl methacrylate Ethyl acetal protector of 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester / tetrahydrofuran-2-yl methacrylate / 3- (methacryloyloxymethyl) -3-ethyloxetane / methacryl Acid / Hydroxyethyl methacrylate Ethyl acetal protector of 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester / tert-butyl methacrylate / 3- (methacryloyloxymethyl) -3-ethyloxetane / methacrylic acid / hydroxy Ethyl methacrylate 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester protected ethyl acetal / 1-ethoxyethyl methacrylate Tert-butyl protector of 3- / 3- (methacryloyloxymethyl) -3-ethyloxetane / methacrylic acid / 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester 4-hydroxybenzoic acid (3-methacryloyl) Oxy-2-hydroxypropyl) ester ethyl acetal protector / 1-ethoxyethyl methacrylate / 3- (methacryloyloxymethyl) -3-ethyloxetane / methacrylic acid / tert-butyl methacrylate (A) One type of copolymer It can use individually or in combination of 2 or more types.

  The content of the copolymer (A) in the photosensitive resin composition of the present invention is preferably 20 to 99% by weight, and preferably 50 to 97% by weight with respect to the total solid content of the photosensitive resin composition. %, More preferably 70 to 95% by weight. When the content is within this range, the tolerance of the solvent removal step upon development is good. In addition, the solid content amount of the photosensitive resin composition represents an amount excluding volatile components such as a solvent.

(B) Photoacid generator The photosensitive resin composition of the present invention contains (B) a photoacid generator.
As the photoacid generator (also referred to as “component (B)”) used in the present invention, a compound that reacts with actinic rays having a wavelength of 300 nm or more, preferably 300 to 450 nm, and generates an acid is preferable. The chemical structure is not limited. Further, a photoacid generator that is not directly sensitive to an actinic ray having a wavelength of 300 nm or more can also be used as a sensitizer if it is a compound that reacts with an actinic ray having a wavelength of 300 nm or more and generates an acid when used in combination with a sensitizer. It can be preferably used in combination.
The photoacid generator used in the present invention is preferably a photoacid generator that generates an acid having a pKa of 4 or less, and more preferably a photoacid generator that generates an acid having a pKa of 3 or less.
Examples of the photoacid generator include trichloromethyl-s-triazines, sulfonium salts and iodonium salts, quaternary ammonium salts, diazomethane compounds, imide sulfonate compounds, and oxime sulfonate compounds. Among these, it is preferable to use an oxime sulfonate compound from the viewpoint of insulation. These photoacid generators can be used singly or in combination of two or more.

Specific examples of these include the following.
As trichloromethyl-s-triazines, 2- (3-chlorophenyl) bis (4,6-trichloromethyl) -s-triazine, 2- (4-methoxyphenyl) bis (4,6-trichloromethyl) -s- Triazine, 2- (4-methylthiophenyl) bis (4,6-trichloromethyl) -s-triazine, 2- (4-methoxy-β-styryl) bis (4,6-trichloromethyl) -s-triazine, 2 -Piperonylbis (4,6-trichloromethyl) -s-triazine, 2- [2- (furan-2-yl) ethenyl] bis (4,6-trichloromethyl) -s-triazine, 2- [2- (5 -Methylfuran-2-yl) ethenyl] bis (4,6-trichloromethyl) -s-triazine, 2- [2- (4-diethylamino-2-methylphenyl) Thenyl] bis (4,6-trichloromethyl) -s-triazine, or 2- (4-methoxynaphthyl) bis (4,6-trichloromethyl) -s-triazine and the like;

  Examples of diaryliodonium salts include diphenyliodonium trifluoroacetate, diphenyliodonium trifluoromethanesulfonate, 4-methoxyphenylphenyliodonium trifluoromethanesulfonate, 4-methoxyphenylphenyliodonium trifluoroacetate, phenyl-4- (2′-hydroxy-1) '-Tetradecaoxy) phenyliodonium trifluoromethanesulfonate, 4- (2'-hydroxy-1'-tetradecaoxy) phenyliodonium hexafluoroantimonate, or phenyl-4- (2'-hydroxy-1'-) Tetradecaoxy) phenyliodonium p-toluenesulfonate, etc .;

  Examples of triarylsulfonium salts include triphenylsulfonium trifluoromethanesulfonate, triphenylsulfonium trifluoroacetate, 4-methoxyphenyldiphenylsulfonium trifluoromethanesulfonate, 4-methoxyphenyldiphenylsulfonium trifluoroacetate, 4-phenylthiophenyldiphenylsulfonium trifluoro. Lomethanesulfonate, 4-phenylthiophenyldiphenylsulfonium trifluoroacetate, etc .;

  As quaternary ammonium salts, tetramethylammonium butyltris (2,6-difluorophenyl) borate, tetramethylammonium hexyltris (p-chlorophenyl) borate, tetramethylammonium hexyltris (3-trifluoromethylphenyl) borate, benzyl Dimethylphenylammonium butyltris (2,6-difluorophenyl) borate, benzyldimethylphenylammonium hexyltris (p-chlorophenyl) borate, benzyldimethylphenylammonium hexyltris (3-trifluoromethylphenyl) borate and the like;

  Examples of the diazomethane derivative include bis (cyclohexylsulfonyl) diazomethane, bis (t-butylsulfonyl) diazomethane, bis (p-toluenesulfonyl) diazomethane, and the like;

Examples of imide sulfonate derivatives include trifluoromethylsulfonyloxybicyclo [2.2.1] hept-5-enedicarboximide, succinimide trifluoromethyl sulfonate, phthalimide trifluoromethyl sulfonate, N-hydroxynaphthalimide methanesulfonate, N-hydroxy- 5-norbornene-2,3-dicarboximidopropane sulfonate and the like;
The compound shown below as an oxime sulfonate compound.

  As an oxime sulfonate compound, that is, a compound having an oxime sulfonate residue, a compound containing an oxime sulfonate residue represented by the formula (4) can be preferably exemplified.

In formula (4), R ⁵ represents an alkyl group or an aryl group. Any group may be substituted, and the alkyl group in R ⁵ may be linear, branched or cyclic. Acceptable substituents are described below.
The alkyl group for R ⁵ is preferably a linear or branched alkyl group having 1 to 10 carbon atoms.
The alkyl group of R ⁵ is an aryl group having 6 to 11 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, or a cycloalkyl group (7,7-dimethyl-2-oxonorbornyl group or other bridged type fat It may be substituted with a cyclic group, preferably a bicycloalkyl group or the like.
As the aryl group for R ^5, an aryl group having 6 to 11 carbon atoms is preferable, and a phenyl group or a naphthyl group is more preferable. The aryl group of R ⁵ may be substituted with a lower alkyl group, an alkoxy group or a halogen atom.
As for the said compound containing the oxime sulfonate residue represented by Formula (4), it is more preferable that it is an oxime sulfonate compound represented by following formula (5).

In formula (5), R ⁵ has the same meaning as R ⁵ in formula (4), X represents an alkyl group, an alkoxy group, or a halogen atom, m represents an integer of 0 to 3, and m represents When it is 2 or 3, a plurality of X may be the same or different.
The alkyl group represented by X is preferably a linear or branched alkyl group having 1 to 4 carbon atoms.
The alkoxy group represented by X is preferably a linear or branched alkoxy group having 1 to 4 carbon atoms.
As the halogen atom represented by X, a chlorine atom or a fluorine atom is preferable.
m is preferably 0 or 1.
In the formula (5), m is 1, X is a methyl group, the substitution position of X is an ortho position, R ⁵ is a linear alkyl group having 1 to 10 carbon atoms, 7,7-dimethyl- A compound that is a 2-oxonorbornylmethyl group or a p-tolyl group is particularly preferable.

  Specific examples of the oxime sulfonate compound include the following compound (i), compound (ii), compound (iii), compound (iv), and the like. These may be used alone or in combination of two or more. be able to. Compounds (i) to (iv) can be obtained as commercial products. Moreover, it can also be used in combination with another kind of (B) photo-acid generator.

  The compound containing an oxime sulfonate residue represented by formula (4) is also preferably a photoacid generator represented by formula (II).

In the formula (II), R ^4A represents a halogen atom, a hydroxyl group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, a cyano group or a nitro group, and L is an integer of 0 to 5 Represents. R ^3A is an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, a halogenated alkyl group having 1 to 5 carbon atoms, a halogenated alkoxy group having 1 to 5 carbon atoms, or W A phenyl group which may be substituted, a naphthyl group which may be substituted with W, or an anthranyl group which may be substituted with W, W represents a halogen atom, a cyano group, a nitro group, a carbon number of 1 to 1 It represents a 10 alkyl group, an alkoxy group having 1 to 10 carbon atoms, a halogenated alkyl group having 1 to 5 carbon atoms, or a halogenated alkoxy group having 1 to 5 carbon atoms.

R ^3A in the formula (II) includes methyl group, ethyl group, n-propyl group, n-butyl group, n-octyl group, trifluoromethyl group, pentafluoroethyl group, perfluoro-n-propyl group, perfluoro group, A fluoro-n-butyl group, p-tolyl group, 4-chlorophenyl group or pentafluorophenyl group is preferable, and a methyl group, ethyl group, n-propyl group, n-butyl group or p-tolyl group is particularly preferable. .
The halogen atom represented by R ^4A is preferably a fluorine atom, a chlorine atom or a bromine atom.
The alkyl group having 1 to 4 carbon atoms represented by R ^4A is preferably a methyl group or an ethyl group.
The alkoxy group having 1 to 4 carbon atoms represented by R ^4A is preferably a methoxy group or an ethoxy group.
As L, an integer of 0 to 2 is preferable, and 0 or 1 is particularly preferable.

As a preferred embodiment of the compound included in the photoacid generator represented by the formula (II), R ^3A represents a methyl group, an ethyl group, an n-propyl group, an n-butyl group or a 4-tolyl group, R ^4A represents a hydrogen atom or a methoxy group, and L is 0 or 1.

  Hereinafter, although the especially preferable example of the compound included by the photo-acid generator represented by Formula (II) is shown, this invention is not limited to these.

α- (Methylsulfonyloxyimino) benzyl cyanide (R ^3A = methyl group, R ^4A = hydrogen atom)
α- (Ethylsulfonyloxyimino) benzyl cyanide (R ^3A = ethyl group, R ^4A = hydrogen atom)
α- (n-propylsulfonyloxyimino) benzyl cyanide (R ^3A = n-propyl group, R ^4A = hydrogen atom)
α- (n-butylsulfonyloxyimino) benzyl cyanide (R ^3A = n-butyl group, R ^4A = hydrogen atom)
α- (4-Toluenesulfonyloxyimino) benzyl cyanide (R ^3A = 4-tolyl group, R ^4A = hydrogen atom)
α-[(Methylsulfonyloxyimino) -4-methoxyphenyl] acetonitrile (R ^3A = methyl group, R ^4A = methoxy group)
α-[(Ethylsulfonyloxyimino) -4-methoxyphenyl] acetonitrile (R ^3A = ethyl group, R ^4A = methoxy group)
α-[(n-propylsulfonyloxyimino) -4-methoxyphenyl] acetonitrile (R ^3A = n-propyl group, R ^4A = methoxy group)
α-[(n-butylsulfonyloxyimino) -4-methoxyphenyl] acetonitrile (R ^3A = n-butyl group, R ^4A = methoxy group)
α-[(4-Toluenesulfonyloxyimino) -4-methoxyphenyl] acetonitrile (R ^3A = 4-tolyl group, R ^4A = methoxy group)

  The compound containing an oxime sulfonate residue represented by the formula (4) is also preferably a compound represented by the formula (OS-1).

In the formula (OS-1), R ¹ represents a hydrogen atom, an alkyl group, an alkenyl group, an alkoxy group, an alkoxycarbonyl group, an acyl group, a carbamoyl group, a sulfamoyl group, a sulfo group, a cyano group, an aryl group, or hetero Represents an aryl group. R ² represents an alkyl group or an aryl group.
X is -O -, - S -, - NH -, - NR 5 -, - CH 2 -, - CR 6 H-, or, -CR ⁶ R ⁷ - represents, R ⁵ to R ⁷ is an alkyl group, Or an aryl group is represented.
R ^{21 to} R ²⁴ are each independently a hydrogen atom, halogen atom, alkyl group, alkenyl group, alkoxy group, amino group, alkoxycarbonyl group, alkylcarbonyl group, arylcarbonyl group, amide group, sulfo group, cyano group, Or an aryl group is represented. Two of R ^{21 to} R ²⁴ may be bonded to each other to form a ring.
As R ^{21 to} R ²⁴ , a hydrogen atom, a halogen atom, and an alkyl group are preferable, and an embodiment in which at least two of R ^{21 to} R ²⁴ are bonded to each other to form an aryl group is also preferable. Among these, an embodiment in which R ^{21 to} R ²⁴ are all hydrogen atoms is preferable from the viewpoint of sensitivity.
Any of the aforementioned functional groups may further have a substituent.

  The compound represented by the formula (OS-1) is more preferably a compound represented by the following formula (OS-2).

In said formula (OS-2), R < ¹ >, R < ² >, R < ²¹ > -R < ²⁴ > is synonymous with each in formula (OS-1), and its preferable example is also the same.
Among these, the aspect in which R ¹ in the formula (OS-1) and the formula (OS-2) is a cyano group or an aryl group is more preferable, represented by the formula (OS-2), and R ¹ is a cyano group. The embodiment which is a phenyl group or a naphthyl group is most preferable.

  In the oxime sulfonate compound, the steric structure (E, Z, etc.) of the oxime or benzothiazole ring may be either one or a mixture.

  Specific examples (exemplary compounds b-1 to b-34) of the compound represented by the formula (OS-1) that can be suitably used in the present invention are shown below, but the present invention is not limited thereto. Me represents a methyl group, Et represents an ethyl group, Bn represents a benzyl group, and Ph represents a phenyl group.

  Among the above compounds, b-9, b-16, b-31, and b-33 are preferable from the viewpoint of achieving both sensitivity and stability.

  The compound containing an oxime sulfonate residue represented by the formula (4) is an oxime sulfonate compound represented by the formula (OS-3), formula (OS-4) or formula (OS-5). Is preferred.

（式（ＯＳ−３）〜式（ＯＳ−５）中、Ｒ¹はアルキル基、アリール基又はヘテロアリール基を表し、Ｒ²はそれぞれ独立に、水素原子、アルキル基、アリール基又はハロゲン原子を表し、Ｒ⁶はそれぞれ独立に、ハロゲン原子、アルキル基、アルキルオキシ基、スルホン酸基、アミノスルホニル基又はアルコキシスルホニル基を表し、ＸはＯ又はＳを表し、ｎは１又は２を表し、ｍは０〜６の整数を表す。）

(In Formula (OS-3) to Formula (OS-5), R ¹ represents an alkyl group, an aryl group, or a heteroaryl group, and R ² independently represents a hydrogen atom, an alkyl group, an aryl group, or a halogen atom. R ⁶ represents each independently a halogen atom, an alkyl group, an alkyloxy group, a sulfonic acid group, an aminosulfonyl group or an alkoxysulfonyl group, X represents O or S, n represents 1 or 2, m Represents an integer of 0 to 6.)

In the formulas (OS-3) to (OS-5), the alkyl group, aryl group, or heteroaryl group in R ¹ may have a substituent.
In the formulas (OS-3) to (OS-5), the alkyl group for R ¹ is preferably an alkyl group having 1 to 30 carbon atoms which may have a substituent.
Examples of the substituent that the alkyl group in R ¹ may have include a halogen atom, an alkyloxy group, an aryloxy group, an alkylthio group, an arylthio group, an alkyloxycarbonyl group, an aryloxycarbonyl group, and an aminocarbonyl group. .

Examples of the alkyl group in R ¹ include methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, s-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n -Octyl group, n-decyl group, n-dodecyl group, trifluoromethyl group, perfluoropropyl group, perfluorohexyl group, benzyl group, phenoxyethyl group, methylthioethyl group, phenylthioethyl group, ethoxycarbonylethyl group, Examples include phenoxycarbonylethyl group and dimethylaminocarbonylethyl group.
Among these, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, s-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n-octyl group, An n-decyl group, an n-dodecyl group, a trifluoromethyl group, a perfluoropropyl group, a perfluorohexyl group, and a benzyl group are preferable.

In the formulas (OS-3) to (OS-5), the aryl group for R ¹ is preferably an aryl group having 6 to 30 carbon atoms which may have a substituent.
Examples of the substituent that the aryl group in R ¹ may have include a halogen atom, an alkyl group, an alkyloxy group, an aryloxy group, an alkylthio group, an arylthio group, an alkyloxycarbonyl group, an aryloxycarbonyl group, and an aminocarbonyl group. , A sulfonic acid group, an aminosulfonyl group, and an alkoxysulfonyl group.

As the aryl group in R ¹ , a phenyl group, a p-methylphenyl group, a p-chlorophenyl group, a pentachlorophenyl group, a pentafluorophenyl group, an o-methoxyphenyl group, a p-phenoxyphenyl group, a p-methylthiophenyl group, p -Phenylthiophenyl group, p-ethoxycarbonylphenyl group, p-phenoxycarbonylphenyl group, p-dimethylaminocarbonylphenyl group.
Among these, a phenyl group, p-methylphenyl group, p-chlorophenyl group, pentachlorophenyl group, pentafluorophenyl group, o-methoxyphenyl group, and p-phenoxyphenyl group are preferable.

Further, the formula (OS-3) ~ (OS -5), as the heteroaryl group in R ^1, heteroaryl group having a total carbon number of 4-30 which may have a substituent is preferable.
Examples of the substituent that the heteroaryl group in R ¹ may have include a halogen atom, an alkyl group, an alkyloxy group, an aryloxy group, an alkylthio group, an arylthio group, an alkyloxycarbonyl group, an aryloxycarbonyl group, and an aminocarbonyl. Group, sulfonic acid group, aminosulfonyl group and alkoxysulfonyl group.

In the formulas (OS-3) to (OS-5), at least one of the heteroaryl groups in R ¹ may be a heteroaromatic ring. For example, a heteroaromatic ring and a benzene ring are condensed. May be.
The heteroaryl group in R ¹ may have a substituent, the group consisting of a thiophene ring, a pyrrole ring, a thiazole ring, an imidazole ring, a furan ring, a benzothiophene ring, a benzothiazole ring, and a benzimidazole ring And a group in which one hydrogen atom is removed from the ring selected from the above.

In the formulas (OS-3) to (OS-5), R ² is preferably a hydrogen atom, an alkyl group, or an aryl group, and more preferably a hydrogen atom or an alkyl group.
In the formulas (OS-3) to (OS-5), it is preferable that one or two of R ² present in the compound is an alkyl group, an aryl group or a halogen atom, and one is an alkyl group. More preferably an aryl group or a halogen atom, and particularly preferably one is an alkyl group and the rest is a hydrogen atom.
In the formulas (OS-3) to (OS-5), the alkyl group or aryl group in R ² may have a substituent.
Examples of the substituent that the alkyl group or aryl group in R ² may have include the same groups as the substituent that the alkyl group or aryl group in R ¹ may have.

The alkyl group for R ² is preferably an alkyl group having 1 to 12 carbon atoms which may have a substituent, and an alkyl group having 1 to 6 carbon atoms which may have a substituent. It is more preferable.
Specific examples of the alkyl group for R ² include methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i-butyl group, s-butyl group, t-butyl group, allyl group, n-pentyl group, n-hexyl group, n-octyl group, n-decyl group, n-dodecyl group, perfluorohexyl group, chloromethyl group, bromomethyl group, methoxymethyl group, benzyl group, phenoxyethyl group, methylthioethyl Group, phenylthioethyl group, ethoxycarbonylethyl group, phenoxycarbonylethyl group, dimethylaminocarbonylethyl group.
Among these, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i-butyl group, s-butyl group, n-hexyl group, allyl group, chloromethyl group, bromomethyl group, Methoxymethyl group and benzyl group are preferable, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, i-butyl group, s-butyl group and n-hexyl group are more preferable, and methyl group , An ethyl group, an n-propyl group, an n-butyl group, and an n-hexyl group are more preferable, and a methyl group is particularly preferable.

The aryl group for R ² is preferably an aryl group having 6 to 30 carbon atoms which may have a substituent.
Specific examples of the aryl group for R ² include phenyl group, p-methylphenyl group, o-chlorophenyl group, p-chlorophenyl group, o-methoxyphenyl group, p-phenoxyphenyl group, p-methylthiophenyl group, p- Examples include a phenylthiophenyl group, a p-ethoxycarbonylphenyl group, a p-phenoxycarbonylphenyl group, and a p-dimethylaminocarbonylphenyl group.
Among these, a phenyl group, p-methylphenyl group, o-chlorophenyl group, p-chlorophenyl group, o-methoxyphenyl group, and p-phenoxyphenyl group are preferable.
Examples of the halogen atom for R ² include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.
Among these, a chlorine atom and a bromine atom are preferable.

In the formulas (OS-3) to (OS-5), X represents O or S, and is preferably O.
In formulas (OS-3) to (OS-5), the ring containing X as a ring member is a 5-membered ring or a 6-membered ring.
In the formulas (OS-3) to (OS-5), n represents 1 or 2, and when X is O, n is preferably 1, and when X is S, n is 2 is preferred.

In the formulas (OS-3) to (OS-5), the alkyl group and alkyloxy group in R ⁶ may have a substituent.
In the formulas (OS-3) to (OS-5), the alkyl group for R ⁶ is preferably an alkyl group having 1 to 30 carbon atoms which may have a substituent.
Examples of the substituent that the alkyl group in R ⁶ may have include a halogen atom, an alkyloxy group, an aryloxy group, an alkylthio group, an arylthio group, an alkyloxycarbonyl group, an aryloxycarbonyl group, and an aminocarbonyl group. .

Examples of the alkyl group in R ⁶ include methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, s-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n -Octyl group, n-decyl group, n-dodecyl group, trifluoromethyl group, perfluoropropyl group, perfluorohexyl group, benzyl group, phenoxyethyl group, methylthioethyl group, phenylthioethyl group, ethoxycarbonylethyl group, Examples include phenoxycarbonylethyl group and dimethylaminocarbonylethyl group.
Among these, methyl group, ethyl group, n-propyl group, i-propyl group, n-butyl group, s-butyl group, t-butyl group, n-pentyl group, n-hexyl group, n-octyl group, An n-decyl group, an n-dodecyl group, a trifluoromethyl group, a perfluoropropyl group, a perfluorohexyl group, and a benzyl group are preferable.

In the formulas (OS-3) to (OS-5), the alkyloxy group for R ⁶ is preferably an alkyloxy group having 1 to 30 carbon atoms which may have a substituent.
Examples of the substituent that the alkyloxy group in R ⁶ may have include a halogen atom, an alkyloxy group, an aryloxy group, an alkylthio group, an arylthio group, an alkyloxycarbonyl group, an aryloxycarbonyl group, and an aminocarbonyl group. It is done.

Examples of the alkyloxy group in R ⁶ include methyloxy group, ethyloxy group, butyloxy group, hexyloxy group, phenoxyethyloxy group, trichloromethyloxy group, ethoxyethyloxy group, methylthioethyloxy group, phenylthioethyloxy group, ethoxy Examples thereof include a carbonylethyloxy group, a phenoxycarbonylethyloxy group, and a dimethylaminocarbonylethyloxy group.
Among these, a methyloxy group, an ethyloxy group, a butyloxy group, a hexyloxy group, a phenoxyethyloxy group, a trichloromethyloxy group, or an ethoxyethyloxy group is preferable.
In the formulas (OS-3) to (OS-5), examples of the aminosulfonyl group for R ⁶ include a methylaminosulfonyl group, a dimethylaminosulfonyl group, a phenylaminosulfonyl group, a methylphenylaminosulfonyl group, and an aminosulfonyl group. It is done.
In the formulas (OS-3) to (OS-5), examples of the alkoxysulfonyl group for R ⁶ include a methoxysulfonyl group, an ethoxysulfonyl group, a propyloxysulfonyl group, and a butyloxysulfonyl group.

  In the formulas (OS-3) to (OS-5), m represents an integer of 0 to 6, preferably an integer of 0 to 2, more preferably 0 or 1, and 0. It is particularly preferred.

  The compound containing an oxime sulfonate residue represented by the formula (4) is particularly preferably an oxime sulfonate compound represented by any of the following formulas (OS-6) to (OS-11). .

（式（ＯＳ−６）〜（ＯＳ−１１）中、Ｒ¹はアルキル基、アリール基又はヘテロアリール基を表し、Ｒ⁷は、水素原子又は臭素原子を表し、Ｒ⁸は水素原子、炭素数１〜８のアルキル基、ハロゲン原子、クロロメチル基、ブロモメチル基、ブロモエチル基、メトキシメチル基、フェニル基又はクロロフェニル基を表し、Ｒ⁹は水素原子、ハロゲン原子、メチル基又はメトキシ基を表し、Ｒ¹⁰は水素原子又はメチル基を表す。）

(In the formulas (OS-6) to (OS-11), R ¹ represents an alkyl group, an aryl group or a heteroaryl group, R ⁷ represents a hydrogen atom or a bromine atom, R ⁸ represents a hydrogen atom or a carbon number. Represents an alkyl group of 1 to 8, a halogen atom, a chloromethyl group, a bromomethyl group, a bromoethyl group, a methoxymethyl group, a phenyl group or a chlorophenyl group; R ⁹ represents a hydrogen atom, a halogen atom, a methyl group or a methoxy group; ¹⁰ represents a hydrogen atom or a methyl group.)

R ¹ in the formulas (OS-6) to (OS-11) has the same meaning as R ¹ in the formulas (OS-3) to (OS-5), and preferred embodiments thereof are also the same.
R ⁷ in formula (OS-6) represents a hydrogen atom or a bromine atom, and is preferably a hydrogen atom.
R ⁸ in the formulas (OS-6) to (OS-11) is a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, a halogen atom, a chloromethyl group, a bromomethyl group, a bromoethyl group, a methoxymethyl group, a phenyl group or a chlorophenyl. Represents a group, preferably an alkyl group having 1 to 8 carbon atoms, a halogen atom or a phenyl group, more preferably an alkyl group having 1 to 8 carbon atoms, and an alkyl group having 1 to 6 carbon atoms. Is more preferable, and a methyl group is particularly preferable.
R ⁹ in Formula (OS-8) and Formula (OS-9) represents a hydrogen atom, a halogen atom, a methyl group, or a methoxy group, and is preferably a hydrogen atom.
R ¹⁰ in formulas (OS-8) to (OS-11) represents a hydrogen atom or a methyl group, and is preferably a hydrogen atom.
In the oxime sulfonate compound, the oxime steric structure (E, Z) may be either one or a mixture.

  Specific examples of the oxime sulfonate compound represented by the formula (OS-3) to the formula (OS-5) include the following exemplified compounds, but the present invention is not limited thereto.

  In the photosensitive resin composition of the present invention, the (B) photoacid generator is preferably contained in an amount of 0.1 to 10 parts by weight with respect to 100 parts by weight of the copolymer (A). More preferably, 10 parts by weight is contained.

  The photosensitive resin composition of the present invention may contain a photoacid generator other than (B) a photoacid generator, if necessary, as a photoacid generator sensitive to actinic rays. -It is preferable not to contain a quinonediazide compound. The reason is that the 1,2-quinonediazide compound generates a carboxy group by a sequential photochemical reaction, but its quantum yield is always 1 or less and its sensitivity is low. On the other hand, (B) the photoacid generator was generated by the action of one photon because the acid generated in response to actinic light acts as a catalyst for the deprotection of the protected acidic group. The acid contributes to a number of deprotection reactions, and the quantum yield exceeds 1, for example, a large value such as a power of 10, and it is assumed that high sensitivity is obtained as a result of so-called chemical amplification. .

The photosensitive resin composition of the present invention preferably contains a sensitizer in order to promote its decomposition in combination with (B) the photoacid generator.
The sensitizer absorbs actinic rays or radiation and enters an electronically excited state. The sensitizer in an electronically excited state comes into contact with the photoacid generator, and effects such as electron transfer, energy transfer, and heat generation occur. Thereby, a photo-acid generator raise | generates a chemical change and decomposes | disassembles and produces | generates an acid.
Examples of preferred sensitizers include compounds belonging to the following compounds and having an absorption wavelength in any of the wavelength ranges from 350 nm to 450 nm.

  Polynuclear aromatics (eg, pyrene, perylene, triphenylene, anthracene, 9,10-dibutoxyanthracene, 9,10-diethoxyanthracene, 3,7-dimethoxyanthracene, 9,10-dipropyloxyanthracene), xanthenes (Eg, fluorescein, eosin, erythrosine, rhodamine B, rose bengal), xanthones (eg, xanthone, thioxanthone, dimethylthioxanthone, diethylthioxanthone), cyanines (eg, thiacarbocyanine, oxacarbocyanine), merocyanines ( For example, merocyanine, carbomerocyanine), rhodocyanines, oxonols, thiazines (eg, thionine, methylene blue, toluidine blue), acridines (eg, acridine oleoresin) Di, chloroflavin, acriflavine), acridones (eg, acridone, 10-butyl-2-chloroacridone), anthraquinones (eg, anthraquinone), squariums (eg, squalium), styryls, base styryls ( For example, 2- [2- [4- (dimethylamino) phenyl] ethenyl] benzoxazole), coumarins (for example, 7-diethylamino 4-methylcoumarin, 7-hydroxy-4-methylcoumarin, 2,3,6,7 -Tetrahydro-9-methyl-1H, 5H, 11H- [1] benzopyrano [6,7,8-ij] quinolidine-11-non).

  Among these sensitizers, polynuclear aromatics, acridones, styryls, base styryls, and coumarins are preferable, and polynuclear aromatics are more preferable. Of the polynuclear aromatics, anthracene derivatives are most preferable.

(C) Solvent The photosensitive resin composition of the present invention contains (C) a solvent.
The photosensitive resin composition of the present invention comprises the above components (A) and (B) which are essential components, the following components (D) and / or (E) which are preferred components, and further optional components which will be described later. Is preferably prepared as a solution in (C) a solvent.
As the solvent (C) used in the photosensitive resin composition of the present invention, known solvents can be used, such as ethylene glycol monoalkyl ethers, ethylene glycol dialkyl ethers, ethylene glycol monoalkyl ether acetates, propylene. Glycol monoalkyl ethers, propylene glycol dialkyl ethers, propylene glycol monoalkyl ether acetates, diethylene glycol dialkyl ethers, diethylene glycol monoalkyl ether acetates, dipropylene glycol monoalkyl ethers, dipropylene glycol dialkyl ethers, dipropylene glycol Examples include monoalkyl ether acetates, esters, ketones, amides, lactones and the like.

As the (C) solvent used in the photosensitive resin composition of the present invention, for example,
(A) Ethylene glycol monoalkyl ethers such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether;
(A) Ethylene glycol dialkyl ethers such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol dipropyl ether;
(C) Ethylene glycol monoalkyl ether acetates such as ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, ethylene glycol monopropyl ether acetate, ethylene glycol monobutyl ether acetate;
(D) Propylene glycol monoalkyl ethers such as propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether;
(E) propylene glycol dialkyl ethers such as propylene glycol dimethyl ether, propylene glycol diethyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether;

(F) Propylene glycol monoalkyl ether acetates such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, propylene glycol monobutyl ether acetate;
(G) Diethylene glycol dialkyl ethers such as diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol ethyl methyl ether;
(H) Diethylene glycol monoalkyl ether acetates such as diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol monopropyl ether acetate, diethylene glycol monobutyl ether acetate;
(G) Dipropylene glycol monoalkyl ethers such as dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol monopropyl ether, dipropylene glycol monobutyl ether;
(Co) dipropylene glycol dialkyl ethers such as dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, dipropylene glycol ethyl methyl ether;

(Sa) Dipropylene glycol monoalkyl ether acetates such as dipropylene glycol monomethyl ether acetate, dipropylene glycol monoethyl ether acetate, dipropylene glycol monopropyl ether acetate, dipropylene glycol monobutyl ether acetate;
(L) Lactic acid esters such as methyl lactate, ethyl lactate, n-propyl lactate, isopropyl lactate, n-butyl lactate, isobutyl lactate, n-amyl lactate, isoamyl lactate;
(Su) n-butyl acetate, isobutyl acetate, n-amyl acetate, isoamyl acetate, n-hexyl acetate, 2-ethylhexyl acetate, ethyl propionate, n-propyl propionate, isopropyl propionate, n-butyl propionate, propionate Aliphatic carboxylic acid esters such as isobutyl acid, methyl butyrate, ethyl butyrate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate, isobutyl butyrate;
(C) ethyl hydroxyacetate, ethyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-3-methylbutyrate, ethyl methoxyacetate, ethyl ethoxyacetate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, Methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutylpropionate, 3-methyl-3-methoxybutyl Other esters such as butyrate, methyl acetoacetate, ethyl acetoacetate, methyl pyruvate, ethyl pyruvate;
(So) ketones such as methyl ethyl ketone, methyl propyl ketone, methyl-n-butyl ketone, methyl isobutyl ketone, 2-heptanone, 3-heptanone, 4-heptanone, cyclohexanone;

(Ta) Amides such as N-methylformamide, N, N-dimethylformamide, N-methylacetamide, N, N-dimethylacetamide, N-methylpyrrolidone;
(H) Examples include lactones such as γ-butyrolactone.
In addition, benzyl ethyl ether, dihexyl ether, ethylene glycol monophenyl ether acetate, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, isophorone, caproic acid, caprylic acid, 1-octanol, 1-nonal as necessary for these solvents , Benzyl alcohol, anisole, benzyl acetate, ethyl benzoate, diethyl oxalate, diethyl maleate, ethylene carbonate, propylene carbonate and the like can also be added.
These solvents can be used alone or in combination of two or more.
The solvent that can be used in the present invention is particularly preferably propylene glycol monoalkyl ether acetates.

  The content of the solvent (C) in the photosensitive resin composition of the present invention is preferably 50 to 3,000 parts by weight and 100 to 2,000 parts by weight per 100 parts by weight of the component (A). Is more preferable, and it is still more preferable that it is 150-1,500 weight part.

<Other ingredients>
In the photosensitive resin composition of the present invention, in addition to the component (A), the component (B), and the component (C), if necessary, as an optional component, (D) an antioxidant described below, (E) a crosslinking agent, (F) an adhesion improver, (G) a basic compound, (H) a surfactant, (I) a plasticizer, and (J) a thermal radical generator, and a thermal acid generator, Known additives such as ultraviolet absorbers, thickeners, and organic or inorganic suspending agents can be added.

(D) Antioxidant The photosensitive resin composition of the present invention preferably contains (D) an antioxidant.
(D) As antioxidant, a well-known antioxidant can be contained. (D) By adding an antioxidant, coloring of the cured film can be prevented, or a reduction in film thickness due to decomposition can be reduced, and the heat-resistant transparency is excellent.
Examples of such antioxidants include phosphorus antioxidants, hydrazides, hindered amine antioxidants, sulfur antioxidants, phenolic antioxidants, ascorbic acids, zinc sulfate, sugars, nitrites, sulfites. Examples thereof include salts, thiosulfates, and hydroxylamine derivatives. Among these, a phenolic antioxidant is particularly preferable from the viewpoint of coloring the cured film and reducing the film thickness. These may be used alone or in combination of two or more.

  Examples of commercially available phenolic antioxidants include ADK STAB AO-60 (manufactured by ADEKA), ADK STAB AO-80 (manufactured by ADEKA), and Irganox 1098 (manufactured by Ciba Japan Co., Ltd.). It is done.

(D) The content of the antioxidant is preferably 0.1 to 6% by weight, more preferably 0.2 to 5% by weight, based on the total solid content of the photosensitive resin composition. It is particularly preferably 0.5 to 4% by weight. By setting it within this range, sufficient transparency of the formed film can be obtained, and the sensitivity at the time of pattern formation can be improved.
As additives other than antioxidants, various ultraviolet absorbers described in “New Development of Polymer Additives (Nikkan Kogyo Shimbun Co., Ltd.)”, metal deactivators, and the like are used in the present invention. You may add to a resin composition.

(E) Crosslinking agent It is preferable that the photosensitive resin composition of this invention contains (E) crosslinking agent as needed.
(E) As the crosslinking agent, for example, a compound having two or more epoxy groups or oxetanyl groups in the molecule described below, an alkoxymethyl group-containing crosslinking agent, and a compound having at least one ethylenically unsaturated double bond Can be added. (E) By adding a cross-linking agent, the cured film can be made stronger.

<Compound having two or more epoxy groups or oxetanyl groups in the molecule>
A compound having two or more epoxy groups or oxetanyl groups in the molecule is a compound generally called an epoxy resin or an oxetane resin.
Specific examples of compounds containing two or more epoxy groups in the molecule include bisphenol A type epoxy resins, bisphenol F type epoxy resins, phenol novolac type epoxy resins, cresol novolac type epoxy resins, aliphatic epoxy resins, and the like. Can do.

  These are available as commercial products. For example, as bisphenol A type epoxy resin, JER827, JER828, JER834, JER1001, JER1002, JER1003, JER1055, JER1007, JER1009, JER1010 (above, manufactured by Japan Epoxy Resin Co., Ltd.), EPICLON860, EPICLON1050, EPICLON1051, EPICLON1051, EPICLON1051 DIC Co., Ltd.), etc., as bisphenol F type epoxy resin, JER806, JER807, JER4004, JER4005, JER4007, JER4010 (above, Japan Epoxy Resin Co., Ltd.), EPICLON830, EPICLON835 (above, DIC Corporation) )), LCE-21, RE-602S (above, Nippon Kayaku Co., Ltd.), etc. As the enol novolac type epoxy resin, JER152, JER154, JER157S65, JER157S70 (above, manufactured by Japan Epoxy Resin Co., Ltd.), EPICLON N-740, EPICLON N-740, EPICLON N-770, EPICLON N-775 (above, DIC) (Corporation) etc., as cresol novolac type epoxy resins, EPICLON N-660, EPICLON N-665, EPICLON N-670, EPICLON N-673, EPICLON N-680, EPICLON N-690, EPICLON N-695 (Above, manufactured by DIC Corporation), EOCN-1020 (above, manufactured by Nippon Kayaku Co., Ltd.), etc., as an aliphatic epoxy resin, ADEKA RESIN EP-4080S, EP-4085S, EP-4088S (above, manufactured by ADEKA Corporation), Celoxide 2021P, Celoxide 2081, Celoxide 2083, Celoxide 2085, EHPE3150, EPOLEAD PB 3600, PB 4700 (above, manufactured by Daicel Chemical Industries, Ltd.) ) And the like. In addition, ADEKA RESIN EP-4000S, EP-4003S, EP-4010S, EP-4011S (above, manufactured by ADEKA Corporation), NC-2000, NC-3000, NC-7300, XD-1000, EPPN-501, EPPN-502 (above, manufactured by ADEKA Corporation) and the like can be mentioned. These can be used alone or in combination of two or more.

  Among these, bisphenol A type epoxy resin, bisphenol F type epoxy resin, aliphatic epoxy resin, and phenol novolac type epoxy resin are preferable. In particular, bisphenol A type epoxy resin, aliphatic epoxy resin, and phenol novolac type epoxy resin are preferable.

  As specific examples of the compound containing two or more oxetane groups in the molecule, Aron oxetane OXT-121, OXT-221, OX-SQ, and PNOX (above, manufactured by Toagosei Co., Ltd.) can be used.

  The addition amount of the compound having two or more epoxy groups or oxetanyl groups in the molecule to the photosensitive resin composition is preferably 1 to 50 parts by weight when the total amount of the component (A) is 100 parts by weight. 30 parts by weight is more preferable.

<Alkoxymethyl group-containing crosslinking agent>
As the alkoxymethyl group-containing crosslinking agent, alkoxymethylated melamine, alkoxymethylated benzoguanamine, alkoxymethylated glycoluril, alkoxymethylated urea and the like are preferable. These can be obtained by converting the methylol group of methylolated melamine, methylolated benzoguanamine, methylolated glycoluril, or methylolated urea to an alkoxymethyl group, respectively. The type of the alkoxymethyl group is not particularly limited, and examples thereof include a methoxymethyl group, an ethoxymethyl group, a propoxymethyl group, and a butoxymethyl group. From the viewpoint of the amount of outgas generated, A methoxymethyl group is preferred.
Among these crosslinkable compounds, alkoxymethylated melamine, alkoxymethylated benzoguanamine, and alkoxymethylated glycoluril are mentioned as preferable crosslinkable compounds, and alkoxymethylated glycoluril is particularly preferable from the viewpoint of transparency.

  These alkoxymethyl group-containing crosslinking agents are available as commercial products. For example, Cymel 300, 301, 303, 370, 325, 327, 701, 266, 267, 238, 1141, 272, 202, 1156, 1158, 1123, 1170, 1174, UFR65, 300 (above, manufactured by Mitsui Cyanamid Co., Ltd.), Nicarax MX-750, -032, -706, -708, -40, -31, -270, -280, -290, Nicarac MS-11, Nicarak MW-30HM, -100LM, -390, (manufactured by Sanwa Chemical Co., Ltd.) and the like can be preferably used.

  When the alkoxymethyl group-containing crosslinking agent is used in the photosensitive resin composition of the present invention, the addition amount of the alkoxymethyl group-containing crosslinking agent is 0.05 to 50 parts by weight with respect to 100 parts by weight of the component (A). It is preferably 0.5 to 10 parts by weight. By adding within this range, preferable alkali solubility during development and excellent solvent resistance of the cured film can be obtained.

<Compound having at least one ethylenically unsaturated double bond>
As the compound having at least one ethylenically unsaturated double bond, a (meth) acrylate compound such as a monofunctional (meth) acrylate, a bifunctional (meth) acrylate, or a trifunctional or higher (meth) acrylate is preferably used. be able to.

  Examples of the monofunctional (meth) acrylate include 2-hydroxyethyl (meth) acrylate, carbitol (meth) acrylate, isobornyl (meth) acrylate, 3-methoxybutyl (meth) acrylate, and 2- (meth) acryloyloxyethyl. And 2-hydroxypropyl phthalate.

  Examples of the bifunctional (meth) acrylate include ethylene glycol (meth) acrylate, 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, polypropylene glycol di (meth) acrylate, Examples include tetraethylene glycol di (meth) acrylate, bisphenoxyethanol full orange acrylate, and bisphenoxyethanol full orange acrylate.

  Examples of the trifunctional or higher functional (meth) acrylate include trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, tri ((meth) acryloyloxyethyl) phosphate, pentaerythritol tetra (meth) acrylate, Examples include dipentaerythritol penta (meth) acrylate and dipentaerythritol hexa (meth) acrylate.

These compounds having at least one ethylenically unsaturated double bond are used singly or in combination of two or more.
The proportion of the compound having at least one ethylenically unsaturated double bond in the photosensitive resin composition of the present invention is preferably 50 parts by weight or less with respect to 100 parts by weight of component (A), 30 It is more preferable that the amount is not more than parts by weight. By including at least one compound having an ethylenically unsaturated double bond in such a ratio, the heat resistance and surface hardness of the insulating film obtained from the photosensitive resin composition of the present invention can be improved. it can. When adding a compound having at least one ethylenically unsaturated double bond, it is preferable to add a thermal radical generator (J).

(F) Adhesion improving agent The photosensitive resin composition of the present invention may contain (F) an adhesion improving agent.
The (F) adhesion improver that can be used in the photosensitive resin composition of the present invention is an inorganic substance that serves as a substrate, for example, a silicon compound such as silicon, silicon oxide, or silicon nitride, or a metal such as gold, copper, or aluminum. It is a compound that improves adhesion to an insulating film. Specific examples include silane coupling agents and thiol compounds. The silane coupling agent as the (F) adhesion improving agent used in the present invention is for the purpose of modifying the interface, and any known silane coupling agent can be used without any particular limitation.

Preferred silane coupling agents include, for example, γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, γ-glycidoxypropyltriacoxysilane, γ-glycidoxypropylalkyldialkoxysilane, γ- Methacryloxypropyltrialkoxysilane, γ-methacryloxypropylalkyldialkoxysilane, γ-chloropropyltrialkoxysilane, γ-mercaptopropyltrialkoxysilane, β- (3,4-epoxycyclohexyl) ethyltrialkoxysilane, vinyltri An alkoxysilane is mentioned.
Of these, γ-glycidoxypropyltrialkoxysilane and γ-methacryloxypropyltrialkoxysilane are more preferable, and γ-glycidoxypropyltrialkoxysilane is more preferable.

These can be used alone or in combination of two or more. These are effective for improving the adhesion to the substrate and also for adjusting the taper angle with the substrate.
The content of the (F) adhesion improving agent in the photosensitive resin composition of the present invention is preferably 0.1 to 20 parts by weight, more preferably 0.5 to 10 parts by weight with respect to 100 parts by weight of the component (A). preferable.

(G) Basic compound The photosensitive resin composition of this invention may contain the (G) basic compound.
(G) The basic compound can be arbitrarily selected from those used in chemically amplified resists. Examples include aliphatic amines, aromatic amines, heterocyclic amines, quaternary ammonium hydroxides, quaternary ammonium salts of carboxylic acids, and the like.

Examples of the aliphatic amine include trimethylamine, diethylamine, triethylamine, di-n-propylamine, tri-n-propylamine, di-n-pentylamine, tri-n-pentylamine, diethanolamine, triethanolamine, and dicyclohexylamine. , Dicyclohexylmethylamine and the like.
Examples of the aromatic amine include aniline, benzylamine, N, N-dimethylaniline, diphenylamine and the like.

  Examples of the heterocyclic amine include pyridine, 2-methylpyridine, 4-methylpyridine, 2-ethylpyridine, 4-ethylpyridine, 2-phenylpyridine, 4-phenylpyridine, N-methyl-4-phenylpyridine, 4-dimethylaminopyridine, imidazole, benzimidazole, 4-methylimidazole, 2-phenylbenzimidazole, 2,4,5-triphenylimidazole, nicotine, nicotinic acid, nicotinamide, quinoline, 8-oxyquinoline, pyrazine, Pyrazole, pyridazine, purine, pyrrolidine, piperidine, piperazine, morpholine, 4-methylmorpholine, 1,5-diazabicyclo [4.3.0] -5-nonene, 1,8-diazabicyclo [5.3.0] -7 -Undecene and the like.

  Examples of the quaternary ammonium hydroxide include tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetra-n-butylammonium hydroxide, and tetra-n-hexylammonium hydroxide.

  Examples of the quaternary ammonium salt of carboxylic acid include tetramethylammonium acetate, tetramethylammonium benzoate, tetra-n-butylammonium acetate, and tetra-n-butylammonium benzoate.

The basic compounds that can be used in the present invention may be used singly or in combination of two or more. However, it is preferable to use two or more in combination, and it is more preferable to use two in combination. It is preferable to use two kinds of heterocyclic amines in combination.
The content of the basic compound (G) in the photosensitive resin composition of the present invention is preferably 0.001 to 1 part by weight with respect to 100 parts by weight of the component (A), and 0.005 to 0.005. More preferably, it is 2 parts by weight.

(H) Surfactant The photosensitive resin composition of the present invention may contain (H) a surfactant.
(H) As the surfactant, any of anionic, cationic, nonionic, or amphoteric surfactants can be used, but a preferred surfactant is a nonionic surfactant.
Examples of nonionic surfactants include polyoxyethylene higher alkyl ethers, polyoxyethylene higher alkyl phenyl ethers, higher fatty acid diesters of polyoxyethylene glycol, silicone-based and fluorine-based surfactants. . In addition, the following trade names are KP (manufactured by Shin-Etsu Chemical Co., Ltd.), Polyflow (manufactured by Kyoeisha Chemical Co., Ltd.), F-Top (manufactured by JEMCO), MegaFac (manufactured by DIC Corporation), Florard (Sumitomo 3M) (Made by Co., Ltd.), Asahi Guard, Surflon (made by Asahi Glass Co., Ltd.), PolyFox (made by OMNOVA), and the like.
In addition, as a surfactant, the structural unit A and the structural unit B represented by the following formula (1) are included, and the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography using tetrahydrofuran (THF) as a solvent. A preferred example is a copolymer having (Mw) of 1,000 or more and 10,000 or less.

（式（１）中、Ｒ¹及びＲ³はそれぞれ独立に、水素原子又はメチル基を表し、Ｒ²は炭素数１以上４以下の直鎖アルキレン基を表し、Ｒ⁴は水素原子又は炭素数１以上４以下のアルキル基を表し、Ｌは炭素数３以上６以下のアルキレン基を表し、ｐ及びｑは重合比を表す重量百分率であり、ｐは１０重量％以上８０重量％以下の数値を表し、ｑは２０重量％以上９０重量％以下の数値を表し、ｒは１以上１８以下の整数を表し、ｎは１以上１０以下の整数を表す。）

(In the formula (1), R ¹ and R ³ each independently represent a hydrogen atom or a methyl group, R ² represents a linear alkylene group having 1 to 4 carbon atoms, and R ⁴ represents a hydrogen atom or carbon number. 1 represents an alkyl group having 1 to 4 carbon atoms, L represents an alkylene group having 3 to 6 carbon atoms, p and q are weight percentages representing a polymerization ratio, and p is a numerical value of 10% to 80% by weight. Q represents a numerical value of 20 wt% or more and 90 wt% or less, r represents an integer of 1 or more and 18 or less, and n represents an integer of 1 or more and 10 or less.)

The L is preferably a branched alkylene group represented by the following formula (2). R ⁵ in the formula (2) represents an alkyl group having 1 to 4 carbon atoms, and is preferably an alkyl group having 1 to 3 carbon atoms in terms of compatibility and wettability to the coated surface. More preferred is an alkyl group of 3. The sum (p + q) of p and q is preferably p + q = 100, that is, 100% by weight.

The weight average molecular weight (Mw) of the copolymer is more preferably from 1,500 to 5,000.
These surfactants can be used individually by 1 type or in mixture of 2 or more types.
The addition amount of (H) surfactant in the photosensitive resin composition of the present invention is preferably 10 parts by weight or less, and 0.01 to 10 parts by weight with respect to 100 parts by weight of component (A). It is more preferable that the content is 0.01 to 1 part by weight.

(I) Plasticizer The photosensitive resin composition of the present invention may contain (I) a plasticizer.
Examples of (I) plasticizers include dibutyl phthalate, dioctyl phthalate, didodecyl phthalate, polyethylene glycol, glycerin, dimethyl glycerin phthalate, dibutyl tartrate, dioctyl adipate, and triacetyl glycerin.
The addition amount of the plasticizer (I) in the photosensitive resin composition of the present invention is preferably 0.1 to 30 parts by weight with respect to 100 parts by weight of the component (A), and is 1 to 10 parts by weight. It is more preferable.

(J) Thermal radical generator The photosensitive resin composition of the present invention may contain (J) a thermal radical generator, such as a compound having at least one ethylenically unsaturated double bond as described above. When it contains an ethylenically unsaturated compound, it is preferable to contain (J) a thermal radical generator.
As the thermal radical generator in the present invention, a known radical generator can be used.
The thermal radical generator is a compound that generates radicals by heat energy and initiates or accelerates the polymerization reaction of the polymerizable compound. By adding a thermal radical generator, the obtained cured film becomes tougher and heat resistance and solvent resistance may be improved.
Preferred thermal radical generators include aromatic ketones, onium salt compounds, organic peroxides, thio compounds, hexaarylbiimidazole compounds, ketoxime ester compounds, borate compounds, azinium compounds, metallocene compounds, active ester compounds, carbon Examples thereof include compounds having a halogen bond, azo compounds, and bibenzyl compounds.
(J) A thermal radical generator may be used individually by 1 type, and can also use 2 or more types together.
In the photosensitive resin composition of the present invention, the amount of the (J) thermal radical generator added is 0.01 to 50 parts by weight, based on 100 parts by weight of the copolymer (A), from the viewpoint of improving film properties. Preferably, 0.1 to 20 parts by weight is more preferable, and 0.5 to 10 parts by weight is most preferable.

(Method for forming cured film)
Next, the formation method of the cured film of this invention is demonstrated.
The method for forming a cured film of the present invention includes the following steps (1) to (5).
(1) Application process for applying the photosensitive resin composition of the present invention onto a substrate (2) Solvent removal process for removing the solvent from the applied photosensitive resin composition (3) Exposure process for exposure with actinic rays (4) ) Development step for developing with aqueous developer (5) Post-bake step for thermosetting Each step will be described below in order.

In the coating step (1), the photosensitive resin composition of the present invention is coated on a substrate to form a wet film containing a solvent.
In the solvent removal step (2), the solvent is removed from the applied film by vacuum (vacuum) and / or heating to form a dry coating film on the substrate.

  In the exposure step (3), the obtained coating film is irradiated with actinic rays having a wavelength of 300 nm or more and 450 nm or less. In this step, (B) the photoacid generator is decomposed to generate an acid. Due to the catalytic action of the generated acid, the acid decomposable groups in the monomer unit (1) and the monomer unit (2) contained in the copolymer (A) are hydrolyzed to generate a carboxy group and a phenolic hydroxyl group. .

  In order to accelerate the hydrolysis reaction in the region where the acid catalyst is generated, post-exposure heat treatment (Post Exposure Bake (hereinafter also referred to as “PEB”)) can be performed as necessary. PEB can promote the formation of a carboxy group and a phenolic hydroxyl group from an acid-decomposable group.

The acid-decomposable group in the monomer unit (1) and the monomer unit (2) in the present invention has a low activation energy for acid decomposition, and is easily decomposed by an acid derived from an acid generator by exposure to carboxy group and phenolic Since a hydroxyl group is generated, a positive image can be formed by development without necessarily performing PEB.
In addition, by performing PEB at a relatively low temperature, hydrolysis of an acid-decomposable group can be promoted without causing a crosslinking reaction. The temperature at which PEB is performed is preferably 30 ° C. or higher and 130 ° C. or lower, more preferably 40 ° C. or higher and 110 ° C. or lower, and particularly preferably 50 ° C. or higher and 80 ° C. or lower.

In the developing step (4), a polymer having a liberated carboxy group and a phenolic hydroxyl group is developed using an alkaline developer. A positive image is formed by removing an exposed area containing a resin composition having a carboxy group and a phenolic hydroxyl group that are easily dissolved in an alkaline developer.
In the post-baking step of (5), the obtained positive image is heated to thermally decompose the acid-decomposable groups in the monomer unit (1) and the monomer unit (2) to generate carboxy groups and phenolic hydroxyl groups. A cured film can be formed by crosslinking with an epoxy group and / or an oxetanyl group (3-membered ring and / or 4-membered cyclic ether residue). This heating is preferably performed at a high temperature of 150 ° C. or more, more preferably 180 to 250 ° C., and particularly preferably 200 to 250 ° C. The heating time can be appropriately set depending on the heating temperature or the like, but is preferably in the range of 10 to 90 minutes.

When a step of irradiating the development pattern with actinic rays, preferably ultraviolet rays, before the post-baking step is added, the crosslinking reaction can be promoted by an acid generated by actinic ray irradiation.
Next, the formation method of the cured film using the photosensitive resin composition of this invention is demonstrated concretely.

<Method for preparing photosensitive resin composition>
The photosensitive resin composition is prepared by mixing the essential components (A) to (C) in a predetermined ratio and by an arbitrary method, stirring and dissolving. For example, the resin composition can also be prepared by mixing the components (A) or (B) in advance in a solution in which the component (A) or (B) is previously dissolved in the solvent (C) in a predetermined ratio. The composition solution prepared as described above can be used after being filtered using a filter having a pore size of 0.2 μm or the like.

<Coating process and solvent removal process>
A desired dry coating film can be formed by applying the resin composition to a predetermined substrate and removing the solvent by reducing pressure and / or heating (pre-baking). As the substrate, for example, in the production of a liquid crystal display element, a polarizing plate, a glass plate provided with a black matrix layer and a color filter layer as required, and further a transparent conductive circuit layer can be exemplified. The coating method to a board | substrate is not specifically limited, For example, methods, such as a slit coat method, a spray method, a roll coat method, a spin coat method, can be used. Among them, the slit coating method is preferable from the viewpoint of being suitable for a large substrate. Here, the large substrate means a substrate having a side of 1 m or more on each side.

  In addition, the heating condition of the (2) solvent removal step is that the acid-decomposable group is decomposed in the monomer unit (1) and the monomer unit (2) in the component (A) in the unexposed part, and the component (A) is It is a range that is not soluble in an alkali developer, and it varies depending on the type and blending ratio of each component, but is preferably about 80 to 130 ° C. for about 30 to 120 seconds.

<Exposure process and development process (pattern formation method)>
In the exposure step, the substrate provided with the coating film is irradiated with actinic rays through a mask having a predetermined pattern. After the exposure step, heat treatment (PEB) is performed as necessary, and then in the development step, the exposed area is removed using an alkaline developer to form an image pattern.
For exposure with actinic light, a low-pressure mercury lamp, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a chemical lamp, an LED light source, an excimer laser generator, or the like can be used. Actinic rays having a wavelength of 300 nm to 450 nm can be preferably used. Moreover, irradiation light can also be adjusted through spectral filters, such as a long wavelength cut filter, a short wavelength cut filter, and a band pass filter, as needed.

  A basic compound is used for the developer used in the development step. Examples of the basic compound include alkali metal hydroxides such as lithium hydroxide, sodium hydroxide and potassium hydroxide; alkali metal carbonates such as sodium carbonate and potassium carbonate; alkalis such as sodium bicarbonate and potassium bicarbonate Metal bicarbonates; ammonium hydroxides such as tetramethylammonium hydroxide, tetraethylammonium hydroxide and choline hydroxide; aqueous solutions such as sodium silicate and sodium metasilicate can be used. An aqueous solution obtained by adding an appropriate amount of a water-soluble organic solvent such as methanol or ethanol or a surfactant to the alkaline aqueous solution can also be used as a developer.

The pH of the developer is preferably 10.0 to 14.0.
The development time is preferably 30 to 180 seconds, and the development method may be either a liquid piling method or a dipping method. After the development, washing with running water is performed for 30 to 90 seconds, and a desired pattern can be formed.

<Post-bake process (crosslinking process)>
For a pattern corresponding to an unexposed area obtained by development, using a heating device such as a hot plate or oven, at a predetermined temperature, for example, 180 to 250 ° C., for a predetermined time, for example, 5-60 minutes on the hot plate, In the case of an oven, the acid-decomposable group in the component (A) is decomposed by heat treatment for 30 to 90 minutes to generate a carboxy group and a phenolic hydroxyl group, and the epoxy group in the component (A) and / or By reacting with a crosslinkable group which is an oxetanyl group and crosslinking, a protective film and an interlayer insulating film excellent in heat resistance, hardness, and the like can be formed. In addition, when heat treatment is performed, the transparency can be improved by performing the heat treatment in a nitrogen atmosphere.
Prior to the heat treatment, the substrate on which the pattern is formed is re-exposed with actinic rays and then post-baked (re-exposure / post-bake) to generate an acid from the component (B) present in the unexposed portion, thereby crosslinking. It is preferable to function as a catalyst that accelerates the process.
That is, the method for forming a cured film of the present invention preferably includes a re-exposure step in which re-exposure is performed with actinic rays between the development step and the post-bake step.
The exposure in the re-exposure step may be performed by the same means as in the exposure step. In the re-exposure step, the entire surface of the substrate on which the film is formed by the photosensitive resin composition of the present invention is exposed. It is preferable.
A preferable exposure amount in the re-exposure step is 100 to 1,000 mJ / cm ² .

With the photosensitive resin composition of the present invention, an interlayer insulating film having excellent insulation and high transparency even when baked at high temperatures can be obtained. Since the interlayer insulating film using the photosensitive resin composition of the present invention has high transparency and excellent cured film physical properties, it is useful for applications of organic EL display devices and liquid crystal display devices.
The organic EL display device or liquid crystal display device of the present invention is not particularly limited except that it has a flattening film or an interlayer insulating film formed using the photosensitive resin composition of the present invention, and has various structures. Various known organic EL display devices and liquid crystal display devices can be used.
Moreover, the photosensitive resin composition of this invention and the cured film of this invention are not limited to the said use, It can be used for various uses. For example, in addition to a planarization film and an interlayer insulating film, it can be suitably used for a spacer for keeping the thickness of a liquid crystal layer in a liquid crystal display device constant, a microlens provided on a color filter in a solid-state imaging device, or the like. .

FIG. 1 is a conceptual diagram illustrating an example of an organic EL display device. A schematic cross-sectional view of a substrate in a bottom emission type organic EL display device is shown, and a planarizing film 4 is provided.
A bottom gate type TFT 1 is formed on a glass substrate 6, and an insulating film 3 made of Si ₃ N ₄ is formed so as to cover the TFT 1. A contact hole (not shown) is formed in the insulating film 3, and then a wiring 2 (height: 1.0 μm) connected to the TFT 1 through the contact hole is formed on the insulating film 3. The wiring 2 is used to connect the TFT 1 with an organic EL element formed between the TFTs 1 or in a later process.
Further, in order to flatten the unevenness due to the formation of the wiring 2, the flattening layer 4 is formed on the insulating film 3 in a state where the unevenness due to the wiring 2 is embedded.
On the planarizing film 4, a bottom emission type organic EL element is formed. That is, the first electrode 5 made of ITO is formed on the planarizing film 4 so as to be connected to the wiring 2 through the contact hole 7. The first electrode 5 corresponds to the anode of the organic EL element.
An insulating film 8 having a shape covering the periphery of the first electrode 5 is formed. By providing this insulating film, a short circuit between the first electrode 5 and the second electrode formed in the subsequent process is prevented. be able to.
Further, although not shown in FIG. 1, a hole transport layer, an organic light emitting layer, and an electron transport layer are sequentially deposited through a desired pattern mask, and then a first layer made of Al is formed on the entire surface above the substrate. An active matrix organic material in which two electrodes are formed and sealed by bonding using a sealing glass plate and an ultraviolet curable epoxy resin, and each organic EL element is connected to a TFT 1 for driving it. An EL display device is obtained.

  FIG. 2 is a conceptual cross-sectional view showing an example of the active matrix type liquid crystal display device 10. The color liquid crystal display device 10 is a liquid crystal panel having a backlight unit 12 on the back surface, and the liquid crystal panel includes all pixels disposed between two glass substrates 14 and 15 having a polarizing film attached thereto. The elements of the TFT 16 corresponding to are arranged. Each element formed on the glass substrate is wired with an ITO transparent electrode 19 that forms a pixel electrode through a contact hole 18 formed in the cured film 17. On the ITO transparent electrode 19, an RGB color filter 22 in which a liquid crystal 20 layer and a black matrix are arranged is provided.

  Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to these Examples.

(Synthesis example)
<Synthesis of phenol 1 (4-hydroxybenzoic acid (2-methacryloyloxyethyl) ester)>
To a 100 ml acetonitrile solution of 21 g of 4-hydroxybenzoic acid (2-hydroxyethyl) ester, 20 ml of N, N-dimethylacetamide was added with stirring, and 20 g of methacrylic acid chloride was further added. After reacting with stirring at 35 ° C. for 8 hours, the reaction mixture was poured into ice water, the precipitated crystals were collected by filtration, recrystallized from ethyl acetate / n-hexane, and 4-hydroxybenzoic acid (2-methacryloyloxy). Ethyl) ester was obtained.

<Synthesis of phenol 2 (4-hydroxybenzoic acid (3-methacryloyloxypropyl) ester)>
To a solution of 23 g of 4-hydroxybenzoic acid (3-hydroxypropyl) ester in 100 ml of acetonitrile, 20 ml of N-methylpyrrolidone was added with stirring, and 16 g of methacrylic acid chloride was further added. After reacting at 35 ° C. for 8 hours with stirring, the reaction mixture was poured into ice water, and the precipitated crystals were collected by filtration and recrystallized from ethyl acetate / n-hexane to give 4-hydroxybenzoic acid (3-methacryloyloxy). Propyl) ester was obtained.

<Synthesis of phenol 3 (4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester)>
After adding 100 g of p-hydroxybenzoic acid, 100 g of glycidyl methacrylate, and 9.7 g of tetrabutylammonium bromide to a solution of 250 ml of N-methylpyrrolidone and reacting at 90 ° C. for 6 hours with stirring, the reaction mixture is mixed with water / ethyl acetate. It was poured into a solvent, and the precipitated crystals were collected by filtration and recrystallized from ethyl acetate / n-hexane to obtain 4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester.

<Synthesis of protected phenol>
Phenol 1, 2 and 3, obtained as described above, and phenol 4 described later are reacted with ethyl vinyl ether in the presence of an acid catalyst, thereby protecting an ethyl acetal protector of a phenolic hydroxyl group (protected phenol 1, 2, 3 and 4) were obtained.
In addition, the phenolic hydroxyl group of phenol 3 (4-hydroxybenzoic acid (3-methacryloyloxy-2-hydroxypropyl) ester) obtained by protecting the phenolic hydroxyl group with tert-butyl by a known synthesis method ( The protected phenol 3 ′) was obtained.

<Synthesis of Protected Carboxylic Acid 1>
By reacting methacrylic acid with ethyl vinyl ether in the presence of an acid catalyst, 1-ethoxyethyl methacrylate (protected carboxylic acid 1) was obtained.

<Synthesis of Protected Carboxylic Acid 2: Synthesis of Tetrahydrofuran-2-yl Methacrylate (MATHF)>
Methacrylic acid (86 g, 1 mol) was cooled to 15 ° C., and camphorsulfonic acid (4.6 g, 0.02 mol) was added. To the solution, 2,3-dihydrofuran (71 g, 1 mol, 1.0 equivalent) was added dropwise. After stirring for 1 hour, saturated aqueous sodium hydrogen carbonate solution (500 ml) was added, extracted with ethyl acetate (500 ml), dried over magnesium sulfate, insoluble matter was filtered and concentrated under reduced pressure at 40 ° C. or lower to give a yellow oily residue. Was distilled under reduced pressure to obtain 125 g of tetrahydrofuran-2-yl methacrylate (MATHF) as a colorless oily substance having a boiling point (bp.) Of 54 to 56 ° C./3.5 mmHg (yield 80%).

<Other monomers>
Other monomers used for the copolymerization of component (A) are listed below.
Phenol 4: 4-hydroxyphenyl methacrylate (manufactured by Showa Polymer Co., Ltd.)
t-BuMA: tert-butyl methacrylate GMA: glycidyl methacrylate M100: 3,4-epoxycyclohexylmethyl methacrylate (manufactured by Daicel Chemical Industries, Ltd.)
OXE-30: 3- (methacryloyloxymethyl) -3-ethyloxetane (Osaka Organic Chemical Industry Co., Ltd.)
MAA: methacrylic acid HEMA: 2-hydroxyethyl methacrylate MMA: methyl methacrylate St: styrene

<Synthesis Example 1 (Synthesis of Resin 1)>
As monomer components, protected phenol 1 (64.47 g, 0.2 mol), protected carboxylic acid 1 (31.64 g, 0.2 mol), GMA (56.86 g, 0.4 mol), MAA (8.61 g) 0.1 mol) and HEMA (13.01 g, 0.1 mol), and V-601 (dimethyl-2,2′-azobis (2-methylpropionate) as a radical polymerization initiator, Wako Pure Chemical Industries, Ltd., 7.50 g) was used for polymerization reaction in a solvent PGMEA (propylene glycol monomethyl ether acetate, 407.38 g) for 6 hours to obtain a PGMEA solution of resin 1 (solid content concentration) : 30% by weight). The polymerization temperature was adjusted to a temperature of 70 ° C.
The weight average molecular weight measured by GPC of the obtained resin 1 was 15,000.

<Synthesis Examples 2-8 and 10-15 (Synthesis of Resins 2-8 and Resins 10-15)>
Synthesis was performed in the same manner as in Synthesis Example 1 using the monomer types and addition amounts shown in Tables 1 and 2 as monomer components. The weight average molecular weight of the obtained resin was measured by GPC and listed in Tables 1 and 2.

<Synthesis Example 9 (Synthesis of Resin 9)>
As a monomer component, radical polymerization initiator V-601 (manufactured by Wako Pure Chemical Industries, Ltd., 2.50 g) was used in the monomer species and addition amount shown in Table 1, and the other components were the same as those in Synthesis Example 1. Synthesis was carried out by the method. The weight average molecular weight of the obtained resin 9 was 32,000.

Example 1
<Preparation of photosensitive resin composition>
The following composition was dissolved and mixed, and filtered through a 0.2 μm polytetrafluoroethylene filter to obtain a photosensitive resin composition of Example 1.
-[(A) Resin] PGMEA solution of Resin 1 obtained by the above synthesis method (solid content 100.0 parts)-[(B) Photoacid generator] B-1 2.5 parts Other] Adhesion improver (KBM-403, manufactured by Shin-Etsu Chemical Co., Ltd., following structure) 0.5 part Surfactant (PolyFox PF-6320, manufactured by OMNOVA) 0.02 part (Antioxidant (ADK STAB AO) -60, manufactured by ADEKA Corporation, the following structure) 2.0 parts)
(Crosslinking agent E-1 (MX-270, manufactured by Sanwa Chemical Co., Ltd., the following structure) 2.0 parts)
(Crosslinking agent E-2 (JER157S65, manufactured by Japan Epoxy Resin Co., Ltd.) 5.0 parts)
(Basic compound G-1: 1,8-diazabicyclo [5.4.0] undecene-7, manufactured by Tokyo Chemical Industry Co., Ltd., 0.1 part)

(Examples 2-49 and Comparative Examples 1-3)
Except having changed each component amount of Example 1 as described in Table 1 below, the photosensitive resin compositions of Examples 2 to 18 and Comparative Examples 1 to 3 were respectively the same as Example 1. Prepared.
For Example 15, a photosensitive resin composition was prepared in the same manner as in Example 8 except that the surfactant was changed to W-3 (structure described below).
For Examples 16 and 17, as shown in Table 1, the antioxidant and the crosslinking agent E-1 in parentheses described in the preparation of the photosensitive resin composition of Example 1 were also added, and the photosensitive resin was added. A composition was prepared.
As for Examples 5 to 17 and 45 and Comparative Example 1, as shown in Tables 1 and 2, B-2 was used instead of the photoacid generator B-1.
For Example 18, as shown in Table 1, B-3 was used instead of the photoacid generator B-1, and B-4 was added in the same amount as B-3 as a sensitizer.
For Examples 19 to 31, 46, and 48, as shown in Table 2, B-5 was used instead of the photoacid generator B-1, and B-4 was added as a sensitizer in the same manner as B-5. An amount was added.
As for Examples 32-44, 47, and 49, as described in Table 2, B-6 was used in place of the photoacid generator B-1.
In addition, about Example 19-49, as described in Table 2, the basic compound G-1 in the parenthesis described in preparation of the photosensitive resin composition of the said Example 1, and crosslinking agent E- as needed 2 was also added to prepare a photosensitive resin composition.
In Comparative Examples 2 and 3, the photosensitive resin compositions described in Example 1 of Patent Documents 1 and 2 were prepared and evaluated, respectively.

In addition, each used material is as follows.
B-1: 4,7-di-n-butoxy-1-naphthyltetrahydrothiophenium trifluoromethanesulfonate B-2: CGI-1397 (manufactured by Ciba Specialty Chemicals)
B-3: PAI-1001 (manufactured by Midori Chemical Co., Ltd.)
B-4: DBA (9,10-dibutoxyanthracene, manufactured by Kawasaki Kasei Kogyo Co., Ltd.)
B-5: Compound having the following structure B-6: Compound having the following structure

(Synthesis Example 10: Synthesis of photoacid generator B-5)
1-1. Synthesis of Synthetic Intermediate B-5A 2-Aminobenzenethiol: 31.3 g (manufactured by Tokyo Chemical Industry Co., Ltd.) was dissolved in toluene: 100 mL (manufactured by Wako Pure Chemical Industries, Ltd.) at room temperature (25 ° C.). . Next, phenylacetyl chloride: 40.6 g (manufactured by Tokyo Chemical Industry Co., Ltd.) was added dropwise, and the mixture was stirred at room temperature for 1 hour and then stirred at 100 ° C. for 2 hours for reaction. 500 mL of water was added to the resulting reaction solution to dissolve the precipitated salt, the toluene oil was extracted, and the extract was concentrated with a rotary evaporator to obtain a synthetic intermediate B-5A.

1-2. Synthesis of B-5 2.25 g of the synthetic intermediate B-5A obtained as described above was mixed with tetrahydrofuran (10 mL) (manufactured by Wako Pure Chemical Industries, Ltd.), and then placed in an ice bath and the reaction solution was placed at 5 ° C. Cooled to: Next, tetramethylammonium hydroxide: 4.37 g (25% by weight methanol solution, manufactured by Alfa Acer) was added dropwise, and the mixture was stirred for 0.5 hour in an ice bath to be reacted. Furthermore, 7.03 g of isopentyl nitrite: was dropped while maintaining the internal temperature at 20 ° C. or lower, and after completion of the dropping, the reaction solution was warmed to room temperature and stirred for 1 hour.
Subsequently, after cooling the reaction liquid to 5 ° C. or lower, p-toluenesulfonyl chloride (1.9 g) (manufactured by Tokyo Chemical Industry Co., Ltd.) was added, and stirred for 1 hour while maintaining 10 ° C. or lower. Thereafter, 80 mL of water was added and stirred at 0 ° C. for 1 hour. After filtering the obtained precipitate, 60 mL of isopropyl alcohol (IPA) was added, heated to 50 ° C., stirred for 1 hour, filtered and dried while hot (B-5: the above structure). 8 g was obtained.
¹ H-NMR spectrum (300 MHz, deuterated DMSO ((D ₃ C) ₂ S═O)) of the obtained B-5 is δ = 8.2 to 8.17 (m, 1H), 8.03 to It was 8.00 (m, 1H), 7.95 to 7.9 (m, 2H), 7.6 to 7.45 (m, 9H), 2.45 (s, 3H).
From the above ¹ H-NMR measurement results, it is estimated that the obtained B-5 is a single geometric isomer.

(Synthesis Example 11: Synthesis of B-6)
Aluminum chloride (10.6 g) and 2-chloropropionyl chloride (10.1 g) were added to a suspension of 2-naphthol (10 g) and chlorobenzene (30 mL), and the mixture was heated to 40 ° C. for 2 hours. I let you. Under ice-cooling, 4N HCl aqueous solution (60 mL) was added dropwise to the reaction solution, and ethyl acetate (50 mL) was added for liquid separation. Potassium carbonate (19.2 g) was added to the organic layer, reacted at 40 ° C. for 1 hour, 2N HCl aqueous solution (60 mL) was added and separated, and the organic layer was concentrated. The slurry was reslurried, filtered and dried to obtain a ketone compound (6.5 g).
Acetic acid (7.3 g) and 50% by weight hydroxylamine aqueous solution (8.0 g) were added to a suspension of the obtained ketone compound (3.0 g) and methanol (30 mL), and the mixture was heated to reflux. After allowing to cool, water (50 mL) was added, and the precipitated crystals were filtered, washed with cold methanol, and dried to obtain an oxime compound (2.4 g).
The obtained oxime compound (1.8 g) was dissolved in acetone (20 mL), triethylamine (1.5 g) and p-toluenesulfonyl chloride (2.4 g) were added under ice cooling, and the temperature was raised to room temperature. Reacted for hours. Water (50 mL) was added to the reaction solution, and the precipitated crystals were filtered, reslurried with methanol (20 mL), filtered and dried to obtain B-6 (2.3 g).
In addition, the ¹ H-NMR spectrum (300 MHz, CDCl ₃ ) of B-6 is δ = 8.3 (d, 1H), 8.0 (d, 2H), 7.9 (d, 1H), 7. 8 (d, 1H), 7.6 (dd, 1H), 7.4 (dd, 1H) 7.3 (d, 2H), 7.1 (d.1H), 5.6 (q, 1H) , 2.4 (s, 3H), 1.7 (d, 3H).

(Evaluation)
<Evaluation of liquid aging stability (liquid storage stability)>
E-type viscometer (manufactured by Toki Sangyo Co., Ltd.) shows the viscosity of the photosensitive resin composition immediately after preparation (initial viscosity) and the viscosity of the photosensitive resin composition after storage at 30 ° C. for 2 weeks (viscosity with time). When the relative viscosity with respect to the initial viscosity (100%) is measured relative to the initial viscosity (100%), “3” indicates a change of 10% or more, “2” indicates a change in viscosity of less than 10% and 5% The case where the change in viscosity was less than 5% was defined as “1”.

<Evaluation of sensitivity>
Each photosensitive resin composition was applied onto a glass substrate (Corning 1737, 0.7 mm thick (manufactured by Corning)) using a spinner, and then pre-baked on a hot plate at 100 ° C. for 60 seconds to volatilize the solvent. Thus, a photosensitive resin composition layer having a thickness of 3.0 μm was formed.
Next, using a PLA-501F exposure machine manufactured by Canon Inc. (super high pressure mercury lamp (mixed line of 365 nm (i line), 405 nm (h line), 436 nm (g line))) through a predetermined mask And exposed. Then, after developing with an alkali developer (0.4 wt% tetramethylammonium hydroxide aqueous solution) at 23 ° C./60 seconds, it was rinsed with ultra pure water for 20 seconds. By these operations, the optimum i-line exposure (Eopt) when resolving 10 μm line-and-space at 1: 1 was defined as sensitivity. The evaluation criteria are as follows.
1: Less than 40 mJ / cm ² 2: 40 mJ / cm ² or more and less than 60 mJ / cm ² 3: 60 mJ / cm ² or more

<Evaluation of transparency>
Each photosensitive resin composition was applied on a glass substrate (Corning 1737, 0.7 mm thick (manufactured by Corning)) using a spinner, and then pre-baked on a hot plate at 100 ° C. for 1 minute to volatilize the solvent. Thus, a photosensitive resin composition layer having a thickness of 3.0 μm was formed.
The obtained photosensitive resin composition layer is subjected to a cumulative irradiation amount of 300 mJ / cm ² (illuminance: 20 mW / cm ² , i-line) using a PLA-501F exposure machine (extra-high pressure mercury lamp) manufactured by Canon Inc. Then, this substrate was heated in an oven at 230 ° C. for 1 hour to obtain a cured film.

The light transmittance of the glass substrate having this cured film was measured at a wavelength in the range of 400 to 800 nm using a spectrophotometer “150-20 type double beam (manufactured by Hitachi, Ltd.)”. Tables 3 and 4 show the evaluation of the minimum light transmittance at that time. The evaluation criteria are as follows.
1: 95% or more 2: 92% or more and less than 95% 3: 90% or more and less than 92% 4: 88% or more and less than 90% 5: Less than 88%

<Evaluation of solvent resistance>
A cured film was formed on a glass substrate (Corning 1737, 0.7 mm thick (manufactured by Corning)) in the same manner as in the evaluation of the transparency.
The film thickness (T ¹ ) of the obtained cured film was measured. Then, after the substrate on which the cured film is formed is immersed in dimethyl sulfoxide which is temperature-controlled at 70 ° C. 20 minutes, the film thickness was measured (t ¹⁾ of the cured film, immersing due to the film thickness change ratio { | T ¹ −T ¹ | / T ¹ } × 100 [%] was calculated. The results are shown in Tables 3 and 4. When this value is less than 3%, it can be said that the solvent resistance of the cured film is good.
Less than 1: 1% 2: 1% or more but less than 2% 3: 2% or more but less than 3% 4: 3% or more

<Evaluation of tolerance in solvent removal process>
After applying each photosensitive resin composition on a glass substrate (Corning 1737, 0.7 mm thickness (manufactured by Corning)) using a spinner, the coating was performed at 90 ° C., 100 ° C., 110 ° C. for 60 seconds, and 100 The heated solvent was removed on a hot plate for 40 seconds at 80 ° C. to form a photosensitive resin composition layer having a thickness of 3.0 μm. The obtained photosensitive resin composition layer was removed by heating solvent at 100 ° C./60 seconds with a PLA-501F exposure machine (extra-high pressure mercury lamp) manufactured by Canon Inc. through a mask having a pattern opening of 10 μm square. Thereafter, exposure is performed with a 0.4% tetramethylammonium hydroxide aqueous solution as a developer at an exposure amount (illuminance: 20 mW / cm ² , i-line) that gives a 10 μm square contact hole pattern after development at 23 ° C. for 60 seconds. It was. Each of the exposed substrates was subjected to paddle development at 23 ° C. for 60 seconds using a 0.4% tetramethylammonium hydroxide aqueous solution as a developer. When the difference between the contact hole diameter at this time and 10 μm is less than 0.5 μm, it can be said that the tolerance in the solvent removal step of the photosensitive resin composition is good.
1: Less than 0.3 μm 2: More than 0.3 μm and less than 0.5 μm 3: More than 0.5 μm The results are shown in Tables 3 and 4.

(Example 50)
Using the photosensitive resin composition of Example 38, the same evaluation as in Example 38 was performed using a UV-LED light source exposure machine in place of the ultrahigh pressure mercury lamp. As a result, the same result as in Example 38 was obtained.

(Example 51)
An organic EL display device using a thin film transistor (TFT) was produced by the following method (see FIG. 1).
A bottom gate type TFT 1 was formed on a glass substrate 6, and an insulating film 3 made of Si ₃ N ₄ was formed so as to cover the TFT 1. Next, a contact hole (not shown) is formed in the insulating film 3, and then a wiring 2 (height 1.0 μm) connected to the TFT 1 through the contact hole is formed on the insulating film 3. . The wiring 2 is used to connect the TFT 1 to the organic EL element formed between the TFTs 1 or in a later process.

Further, in order to flatten the unevenness due to the formation of the wiring 2, the flattening layer 4 was formed on the insulating film 3 in a state where the unevenness due to the wiring 2 was embedded. The planarizing film 4 is formed on the insulating film 3 by spin-coating the photosensitive resin composition of Example 8 on the substrate, pre-baking (100 ° C. × 1 minute) on a hot plate, and then applying high pressure from above the mask. Using a mercury lamp, 40 mJ / cm ² (illuminance 20 mW / c
m ² , i-line) irradiation and development with an alkaline aqueous solution to form a pattern,
Heat treatment for 0 minute was performed. The applicability when applying the photosensitive resin composition was good, and no wrinkles or cracks were observed in the cured film obtained after exposure, development and baking. Furthermore, the average step of the wiring 2 was 500 nm, and the thickness of the prepared planarizing film 4 was 2,000 nm.

  Next, a bottom emission type organic EL element was formed on the obtained planarization film 4. First, a first electrode 5 made of ITO was formed on the planarizing film 4 so as to be connected to the wiring 2 through the contact hole 7. Thereafter, a resist was applied, prebaked, exposed through a mask having a desired pattern, and developed. Using this resist pattern as a mask, pattern processing was performed by wet etching using an ITO etchant. Thereafter, the resist pattern was stripped using a resist stripping solution (mixed solution of monoethanolamine and dimethyl sulfoxide (DMSO)). The first electrode 5 thus obtained corresponds to the anode of the organic EL element.

  Next, an insulating film 8 having a shape covering the periphery of the first electrode 5 was formed. As the insulating film, the photosensitive resin composition of Example 8 was used, and the insulating film 8 was formed by the same method as described above. By providing this insulating film, a short circuit between the first electrode 5 and the second electrode formed in the subsequent process can be prevented.

  Furthermore, a hole transport layer, an organic light emitting layer, and an electron transport layer were sequentially deposited through a desired pattern mask in a vacuum deposition apparatus. Next, a second electrode made of Al was formed on the entire surface above the substrate. The obtained board | substrate was taken out from the vapor deposition machine, and it sealed by bonding together using the glass plate for sealing, and an ultraviolet curable epoxy resin.

  As described above, an active matrix type organic EL display device in which each organic EL element is connected to the TFT 1 for driving the organic EL element was obtained. When a voltage was applied via the drive circuit, it was found that the organic EL display device showed good display characteristics and high reliability.

(Example 52)
An organic EL device was produced in the same manner as in Example 51 except that the photosensitive resin composition of Example 8 was replaced with the photosensitive resin composition of Example 48. It was found that the organic EL display device had good display characteristics and high reliability.

(Example 53)
An organic EL device was produced in the same manner as in Example 46 except that the photosensitive resin composition of Example 8 was replaced with the photosensitive resin composition of Example 49. It was found that the organic EL display device had good display characteristics and high reliability.

(Example 54)
In the active matrix liquid crystal display device described in FIG. 1 of Japanese Patent No. 3321003, a cured film 17 was formed as an interlayer insulating film as follows, and a liquid crystal display device of Example 54 was obtained.
That is, using the photosensitive resin composition of Example 17, the cured film 17 was formed as an interlayer insulating film by the same method as the method of forming the planarizing film 4 of the organic EL display device in Example 51.

  When a driving voltage was applied to the obtained liquid crystal display device, it was found that the liquid crystal display device showed good display characteristics and high reliability.

(Example 55)
A liquid crystal display device was produced in the same manner as in Example 54 except that the photosensitive resin composition of Example 8 was replaced with the photosensitive resin composition of Example 48. It was found that the liquid crystal display device had good display characteristics and high reliability.

(Example 56)
A liquid crystal display device was produced in the same manner as in Example 54 except that the photosensitive resin composition of Example 8 was replaced with the photosensitive resin composition of Example 49. It was found that the liquid crystal display device had good display characteristics and high reliability.

1: TFT (Thin Film Transistor)
2: Wiring 3: Insulating film 4: Flattened film 5: First electrode 6: Glass substrate 7: Contact hole 8: Insulating film 10: Liquid crystal display device 12: Backlight unit 14, 15: Glass substrate 16: TFT
17: Cured film 18: Contact hole 19: ITO transparent electrode 20: Liquid crystal 22: Color filter

Claims (17)

(A) a monomer unit (1) having a residue in which a carboxy group is protected with an acid-decomposable group, a monomer unit (2) having a residue in which a phenolic hydroxyl group is protected with an acid-decomposable group, and a three-membered A monomer unit (3) having a cyclic ether residue and / or a 4-membered cyclic ether residue,
(B) a photoacid generator, and
(C) A photosensitive resin composition comprising a solvent.   The photosensitive resin composition of Claim 1 which is a chemically amplified positive photosensitive resin composition.   The monomer unit (1) is a group consisting of a residue in which a carboxy group is protected with a tertiary alkyl group, a residue in which a carboxy group is protected with an acetal, and a residue in which a carboxy group is protected with a ketal. A monomer unit having at least one selected residue, wherein the monomer unit (2) is a residue in which a phenolic hydroxyl group is protected with a tertiary alkyl group, and a residue in which a phenolic hydroxyl group is protected with an acetal 3. The photosensitive resin composition according to claim 1, wherein the photosensitive resin composition is a monomer unit having at least one residue selected from the group consisting of a residue in which a phenolic hydroxyl group is protected with a ketal. The monomer unit (1) is a residue in which a carboxy group is protected with a tertiary alkyl group represented by the following formula (a), and / or an acetal in which the carboxy group is represented by the following formula (b) or A residue having a ketal-protected residue, wherein the monomer unit (2) is a residue in which a phenolic hydroxyl group is protected with a tertiary alkyl group represented by the following formula (a), and / or phenolic The photosensitive resin composition of any one of Claims 1-3 which has a residue protected by the acetal or ketal by which a hydroxyl group is represented with a following formula (b).

In formula (a), R ¹ , R ² and R ³ each independently represents an alkyl group or an aryl group, and any ^{two of} R ¹ , R ² and R ³ are bonded to each other to form a ring. Also good.

In formula (b), R ⁴ and R ⁵ each independently represent a hydrogen atom or an alkyl group, but R ⁴ and R ⁵ are not both hydrogen atoms, R ⁶ represents an alkyl group, R ⁴ or R ⁵ and R ⁶ may be linked to form a cyclic ether. The photosensitive resin composition of any one of Claims 1-4 in which the said monomer unit (3) has a residue chosen from the group which consists of following formula (3a) and (3b).

In formula (3b), R ^1b and R ^6b each independently represent a hydrogen atom or an alkyl group, and R ^2b , R ^3b , R ^4b , R ^5b , R ^7b , R ^8b , R ^9b , R ^10b are each independently A hydrogen atom, a halogen atom, an alkyl group, or an aryl group is represented.   (B) The photosensitive resin composition of any one of Claims 1-5 whose photo-acid generator is a compound which generate | occur | produces an acid by irradiation of actinic rays with a wavelength of 300 to 450 nm. (B) The photosensitive resin composition of any one of Claims 1-6 whose photo-acid generator is a compound which has an oxime sulfonate residue represented by following formula (4).

In formula (4), R ⁵ represents an alkyl group or an aryl group. The photosensitive acid generator according to any one of claims 1 to 7, wherein the photoacid generator (B) is a compound represented by formula (OS-3), formula (OS-4), or formula (OS-5). Resin composition.

In formula (OS-3) to formula (OS-5), R ¹ represents an alkyl group, an aryl group or a heteroaryl group, and R ² each independently represents a hydrogen atom, an alkyl group, an aryl group or a halogen atom. , R ⁶ each independently represents a halogen atom, an alkyl group, an alkyloxy group, a sulfonic acid group, an aminosulfonyl group or an alkoxysulfonyl group, X represents O or S, n represents 1 or 2, and m represents The integer of 0-6 is represented. (B) The photosensitive resin composition of any one of Claims 1-7 whose photo-acid generator is a compound represented by following formula (5).

In formula (5), R ⁵ represents an alkyl group or an aryl group, X represents an alkyl group, an alkoxy group, or a halogen atom, m represents an integer of 0 to 3, and m represents 2 or 3 , The plurality of X may be the same or different.   (D) The photosensitive resin composition of any one of Claims 1-9 which further contains antioxidant.   (E) The photosensitive resin composition of any one of Claims 1-10 which further contains a crosslinking agent. A cured film formed by applying light and / or heat to the photosensitive resin composition according to claim 1. (1) The application | coating process which apply | coats the photosensitive resin composition of any one of Claims 1-11 on a board | substrate,
(2) a solvent removal step of removing the solvent from the applied photosensitive resin composition;
(3) an exposure step of exposing with actinic rays;
(4) a development step of developing with an aqueous developer, and
(5) A method for forming a cured film, comprising a post-bake step of thermosetting.   A cured film formed by the method according to claim 13.   The cured film of Claim 12 or 14 which is an interlayer insulation film.   An organic EL display device comprising the cured film according to claim 12, 14 or 15.   A liquid crystal display device comprising the cured film according to claim 12, 14 or 15.

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