JP5445291B2 - Angular velocity sensor and manufacturing method thereof - Google Patents

Description

The present invention includes a sensor unit for measuring the angular velocity, but a case for housing the sensor unit, an angular velocity sensor having a housing part for housing the case, and a manufacturing method thereof.

  Conventionally, as disclosed in, for example, Patent Document 1, an angular velocity sensor including a vibrator, a case for housing the vibrator, and a storage portion for storing the case has been proposed. The case is formed on a multilayer circuit board having a layer structure of ceramic and a conductor for wiring, a side wall made of ceramic formed over the outer periphery of the upper surface of the multilayer circuit board, and an upper surface of the multilayer circuit board surrounded by the side walls. A stepped portion. Electrodes for electrical connection with vibrators and the like are formed on the surfaces of the multilayer circuit board and the stepped portion, and serve as electrodes for electrical connection with a metal lid on the upper surface of the side wall. A metal frame is formed.

  Patent Document 2 discloses a plurality of laminated insulating layers and a plating tie bar that is disposed between the insulating layers and the insulating layer so as to be plated at various locations on the package body and exposed on the side surface of the package body. And an electronic component package body comprising: This electronic component package main body corresponds to the case described in Patent Document 1. Accordingly, hereinafter, the electronic component package body is simply referred to as a case.

  The case described in Patent Document 2 is manufactured by performing the following steps. First, a plurality of metal paste layers are formed on a green sheet, and the plurality of green sheets are laminated and pressure-bonded. And the laminated body which consists of a some green sheet is cut | disconnected in a predetermined position, A part of metal paste layer is exposed to a cut surface.

  Then, after forming a new metal paste layer on the cut surface so as to connect the exposed end portions of the plurality of metal paste layers, the cut laminate is fired to form the metal formed on the green sheet. The paste layer is used as a wiring, and the metal paste layer formed on the cut surface is used as a conductive layer for plating.

  Next, in a state where the cut and fired laminate is immersed in a plating solution, a current is passed through the wiring through the plating conductor layer, thereby plating all the portions of the wiring immersed in the plating solution. Then, by removing the plating conductive layer, the wirings electrically connected to each other through the plating conductive layer are electrically independent. The case described in Patent Document 2 is manufactured through the above steps. In addition, the site | part to which the plating in wiring was given corresponds to the electrode formed in the surface of the case of patent document 1. As shown in FIG.

International Publication No. 2003/046479 JP-A-9-199627

  As described above, in the case of the manufacturing method disclosed in Patent Document 2, it is possible to perform plating once on a portion of the case where the plating is desired (a portion serving as an electrode in the wiring). For this reason, there is an advantage that the productivity of the case is improved. However, since the end portion of the wiring is exposed to the side surface (cut surface) of the case, when conductive dust or the like adheres to the side surface, a plurality of wirings are electrically connected through the dust. There is a risk. Thus, in the case of the case manufactured through the manufacturing method disclosed in Patent Document 2, there is a risk that the electrical connection reliability is lowered.

  On the other hand, the angular velocity sensor disclosed in Patent Document 1 has a configuration in which a case for storing a vibrator is stored in a storage unit. Therefore, when the case formed through the manufacturing method shown in Patent Document 2 is applied to the case shown in Patent Document 1 in order to improve productivity, it is possible to suppress the occurrence of electrical problems due to dust or the like. The However, when the case formed through the manufacturing method disclosed in Patent Document 2 is stored in the storage unit, the following problems may occur. That is, when a temperature difference occurs between the air in the storage unit and the outside air, moisture contained in the air in the storage unit is condensed, and a plurality of wirings are electrically connected through this condensation. There is a fear. As described above, even in the configuration disclosed in Patent Document 1, when the end portion of the wiring is exposed on the side surface of the case, the electrical connection reliability may be reduced.

In view of the above problems, an object of the present invention is to provide an angular velocity sensor with improved electrical connection reliability and a manufacturing method thereof.

In order to achieve the above object, an invention according to claim 1 is an angular velocity sensor having a sensor unit for measuring an angular velocity, a case for housing the sensor unit, and a housing unit for housing the case. The case has a bottomed cylindrical insulating base member formed by laminating a plurality of ceramic sheets, a wiring pattern provided inside the insulating base member, and electrically connected to the wiring pattern, The electrode provided on the surface of the insulating base material portion and a closing portion for closing the opening of the insulating base material portion, and the end portion of the wiring pattern is exposed on the outer surface of the insulating base material portion and exposed. At least a part of the end portion of the wiring pattern is covered with an insulating member, and the sensor unit includes a sensor chip that converts the angular velocity into an electrical signal, and a processing chip that processes the electrical signal output from the sensor chip. Have a sensor In the detection direction perpendicular to the vibration direction of the vibrator and the application direction of the angular velocity, the two vibrators forming a pair that vibrates in opposite phases, the movable electrode constituted by a part of the vibrator, A fixed electrode facing the movable electrode, and the insulating base part includes a rectangular bottom part on which the sensor part is mounted, and four wall parts provided so as to surround the sensor part. And the storage portion includes a mounting portion for mounting the case, and a side wall portion that is connected to the mounting portion and surrounds the periphery of the wall portion of the insulating base material portion, and is aligned with the side wall portion in the vibration direction. The outer surface of the arranged wall portion is covered with an insulating member, the insulating member has elasticity, and a concave portion is formed on the outer surface of the insulating base material portion, and a part of the wall surface constituting the concave portion However, the space formed by the end portions of the wiring pattern and the recesses is the insulating portion. Met by, and the insulating member is characterized in that has a convex shape projecting from the recess towards the side wall of the housing portion.
The invention according to claim 2 is an angular velocity sensor having a sensor unit for measuring an angular velocity, a case for housing the sensor unit, and a housing unit for housing the case, and the case includes a plurality of cases. A bottomed cylindrical insulating base material formed by laminating ceramic sheets, a wiring pattern provided inside the insulating base material part, and electrically connected to the wiring pattern, on the surface of the insulating base material part Provided with the provided electrode and a closing portion for closing the opening of the insulating base material portion, the end of the wiring pattern is exposed on the outer surface of the insulating base material portion, and the end of the exposed wiring pattern At least a portion is covered with an insulating member, and the sensor unit includes a sensor chip that converts angular velocity into an electrical signal, and a processing chip that processes the electrical signal output from the sensor chip. Vibrate in antiphase A pair of two vibrators, a movable electrode constituted by a part of the vibrator, a fixed electrode facing the movable electrode in a detection direction perpendicular to the vibration direction of the vibrator and the application direction of the angular velocity, The insulating base portion includes a rectangular bottom portion on which the sensor portion is mounted, and four wall portions provided so as to surround the sensor portion, and the storage portion includes a case. A mounting portion to be mounted, and a side wall portion that is connected to the mounting portion and surrounds the periphery of the wall portion of the insulating base material portion, and in the detection direction, the outer surface of the wall portion arranged side by side with the side wall portion, It is covered with an insulating member, the insulating member has elasticity , a recess is formed on the outer surface of the insulating base material portion, and a part of the wall surface constituting the recess is configured by an end portion of the wiring pattern A space constituted by the recess is filled with an insulating member, and Insulating member is characterized in that has a convex shape projecting from the recess towards the side wall of the housing portion.

As described above , according to the first and second aspects of the invention, at least a part of the end portion of the wiring pattern exposed on the outer surface of the insulating base portion is covered with the insulating member. According to this, even if a temperature difference occurs between the air inside the storage part and the outside air, and condensation occurs on the outer surface of the insulating base part, at least a part of the end of the wiring pattern is covered with the insulating member. Therefore, it is suppressed that a plurality of wiring patterns are electrically connected through dew condensation. Thereby, electrical connection reliability is improved. Further, even when the case vibrates in the vibration direction or the detection direction, the vibration of the case is reduced by the insulating member having elasticity due to the contact between the insulating member and the side wall portion.

Furthermore, in the invention of claim 1 and claim 2 , a concave portion is formed on the outer surface of the insulating base portion, and a part of the wall surface constituting the concave portion is constituted by an end portion of the wiring pattern, and the concave portion The configured space is filled with the insulating member , and the insulating member has a convex shape protruding from the concave portion toward the side wall portion of the storage portion. According to this, since the contact area between the insulating member and the outer surface of the insulating base material portion is increased, the insulating member is prevented from peeling off from the outer surface of the insulating base material portion. Thereby, electrical connection reliability is further improved.

According to a third aspect of the present invention, it is preferable that the insulating member is formed on the outer surface of the insulating base portion so as to be point symmetric via the center of gravity of the case. According to this, when the case vibrates due to an external stress or the like applied to the storage unit, the case is prevented from eccentrically vibrating. Thereby, it is suppressed that the vibration of the case resulting from an external stress is applied to a sensor part. Therefore, it is suppressed that the detection accuracy of a sensor part falls by external stress.

The invention according to claim 4 is an angular velocity sensor having a sensor portion for measuring angular velocity, a case for housing the sensor portion, and a housing portion for housing the case, wherein the case includes a plurality of ceramic sheets. A bottomed cylindrical insulating base material layer, a wiring pattern provided inside the insulating base material part, and electrically connected to the wiring pattern and provided on the surface of the insulating base material part. And an end portion of the wiring pattern is exposed on the outer surface of the insulating base material portion, and at least one of the exposed end portions of the wiring pattern is provided. The portion is covered with an insulating member, and the sensor portion includes a sensor chip that converts angular velocity into an electrical signal, and a processing chip that processes the electrical signal output from the sensor chip. Pairs that vibrate in opposite phase Two vibrators, a movable electrode constituted by a part of the vibrator, and a fixed electrode facing the movable electrode in a detection direction perpendicular to the vibration direction of the vibrator and the application direction of the angular velocity. The insulating base portion has four walls provided on each of the four sides forming the mounting surface of the sensor portion on the rectangular bottom portion on which the sensor portion is mounted so as to surround the sensor portion. And the storage portion includes a mounting portion for mounting the case, and a side wall portion connected to the mounting portion and surrounding the periphery of the wall portion of the insulating base material portion. Two of the wall portions are arranged side by side in the vibration direction, and the other two wall portions are arranged in the detection direction. Wiring is provided on the outer surface of each of the two wall portions arranged in the detection direction. The end of the pattern is exposed and the end of the wiring pattern is covered with an insulating member It is, the insulating member, characterized in that elastic.

  When external stress is applied to the storage portion, the case vibrates in the detection direction. Then, along with the vibration, the sensor unit is also displaced (vibrated) in the detection direction. For this reason, there is a possibility that the detection accuracy of the angular velocity is lowered.

On the other hand, in the invention according to claim 4 , the insulating base portion has four wall portions provided so as to surround the periphery of the sensor portion, and the storage portion is a wall portion of the insulating base portion. It has the side wall part surrounding the circumference | surroundings. And the edge part of a wiring pattern is exposed to the outer surface of each of two wall parts arrange | positioned along with a detection direction, and the edge part of the wiring pattern is coat | covered with the insulating member which has elasticity. According to this structure, the insulating member which has elasticity is arrange | positioned between the wall part arrange | positioned along with the detection direction, and a side wall part. Therefore, when the case vibrates in the detection direction and the insulating member and the side wall portion come into contact with each other, the vibration of the case is reduced by the insulating member having elasticity. As a result, the displacement (vibration) in the detection direction of the sensor unit is suppressed, and the decrease in angular velocity detection accuracy is suppressed.

According to a fifth aspect of the present invention, it is preferable that the insulating member has a convex shape protruding from the wall portion of the case toward the side wall portion of the storage portion along the detection direction. According to this, when the insulating member collides with the side wall, the energy generated by the collision can be dispersed in the direction from the side wall to the wall. Thereby, the vibration of the detection direction of a case is reduced more effectively. As a result, displacement (vibration) in the detection direction of the sensor unit is more effectively suppressed, and a decrease in angular velocity detection accuracy is more effectively suppressed.

According to a sixth aspect of the present invention, in the detection direction, a configuration in which a protruding portion that protrudes from the side wall portion of the storage portion toward the wall portion of the case is formed on the inner surface of the side wall portion of the storage portion that faces the insulating member. good. According to this, when the case vibrates in the detection direction due to an external stress, the insulating member and the side wall portion easily collide with each other through the protruding portion, so the vibration of the case is reduced by the elastic insulating member. Can be made easier. Thereby, the displacement (vibration) of the sensor unit in the detection direction is further effectively reduced, and the angular velocity detection accuracy is further effectively suppressed from being lowered.

According to a seventh aspect of the present invention, a configuration in which an insulating member having elasticity is formed on the outer surface of each of the two wall portions arranged side by side in the vibration direction is preferable. According to this, since the insulating member is formed on each of the outer surfaces of the four wall portions, the case has an eccentric vibration as compared with the configuration in which the insulating member is formed only on the outer surface of the wall portion arranged side by side in the detection direction. Is suppressed. Thereby, it is suppressed that the detection accuracy of a sensor part falls. Moreover, in the case of the said structure, the insulating member which has elasticity is arrange | positioned between the wall part and side wall part which were arrange | positioned along with the vibration direction. Therefore, for example, when the case vibrates in the vibration direction due to external stress or the like, and the insulating member and the side wall portion come into contact with each other, the vibration of the case is reduced by the elastic insulating member. As a result, displacement (vibration) in the vibration direction of the sensor unit is suppressed, and a decrease in angular velocity detection accuracy is suppressed.

As described in claim 8, it is preferable that the case is mechanically connected to the mounting portion via an adhesive having elasticity. According to this, when an external stress is applied to the storage portion, a part of the external stress is converted into a force that vibrates the case by an elastic adhesive, and thus applied to the sensor portion via the case. External stress is reduced. Thereby, it is suppressed that the detection accuracy of a sensor part falls.

In addition, as a mechanical and electrical connection configuration of the angular velocity sensor, as described in claim 9 , the sensor unit is mechanically connected to the case via an adhesive, and is connected to the case via a first wire. A portion of a plurality of leads that are electrically connected to the electrodes and electrically connect the inside and the outside of the storage portion are embedded in the storage portion, respectively, and the insulating base material is interposed via the second wire. It is possible to adopt a configuration in which the electrode formed on the outer surface of the bottom of the part is electrically connected to the corresponding lead.

The insulating base part of the case of the angular velocity sensor according to any one of claims 1 to 9 can be manufactured by the manufacturing method according to claim 10 . That is, the insulating base material portion includes a first metal paste layer forming step of forming a plurality of metal paste layers on the ceramic sheet, and a lamination pressing step of laminating and pressing a plurality of ceramic sheets including the ceramic sheet having the metal paste layers. And a break groove forming step for forming a break groove for splitting in a laminate composed of a plurality of ceramic sheets, and cutting the laminate for each plating unit along a cutting line intersecting the break groove, A cutting process in which a part of the metal paste layer electrically connected to the metal paste layer formed on the surface of the laminate is exposed to the cut surface, and cutting of the plating unit laminate formed by cutting the laminate into plating units A second metal paste layer forming step of electrically connecting a plurality of metal paste layers exposed on the cut surface by forming a new metal paste layer on the surface; By firing the stick unit laminate, the firing process using the metal paste layer formed on the ceramic sheet as a wiring pattern and the metal paste layer formed on the cut surface as the electrode for plating, and the plating unit laminate, A plating process in which an electrode is formed by applying a current to the plating electrode in a state immersed in the plating solution, thereby plating the wiring pattern that is electrically connected to the plating electrode and in contact with the plating solution, By removing the plating electrode, so that the wiring patterns whose ends are exposed on the cut surface are electrically independent from each other, and at least a part of the ends of the wiring pattern exposed on the cut surface is covered Insulating member forming step of forming insulating member by applying insulating paint as constituent material of insulating member to side surface of fired plating unit laminated body, and fired plating unit laminated body , By dividing along the break groove is produced by passing through a dividing step of dividing each case quantity, the.

  As described above, according to the present invention, in the cutting step, the laminate is cut for each plating unit, and in the plating step, the laminate is fired and plated in the plating unit. According to this, in a cutting process, a laminated body is cut | disconnected for every case unit, and a plating process is simplified compared with the manufacturing method which baked in a plating process and plated the laminated body cut | disconnected in the case unit. be able to.

In the invention according to claim 10 , in the cutting step, the laminated body is cut for each plating unit, and in the insulating member forming step, the insulating member is formed in the laminated body that is baked and cut into the plating unit. . According to this, compared with the manufacturing method which cut | disconnects a laminated body for every case unit in a cutting process, and forms an insulating member in the laminated body cut | disconnected by the insulating member formation process and baked in the case unit, The formation process can be simplified.

Since the effects of the invention of claim 11 have been described in the inventions of claim 1 and claim 2, the description is omitted. Moreover, since the effect of the invention of Claim 12 is the same as that of the invention of Claim 5 , the description is omitted.

It is a top view which shows schematic structure of the mechanical quantity sensor which concerns on 1st Embodiment. It is sectional drawing which follows the II-II line | wire of FIG. It is a top view which shows the electrical connection structure of a sensor part and a case. It is a side view which shows the side surface of an insulation base material part, (a) is the side surface seen from the detection direction, (b) has shown the side surface seen from the vibration direction. It is a schematic plan view for demonstrating a laminated body. It is a side view for demonstrating an insulating member formation process, (a) is the plating unit laminated body in which the recessed part was formed, (b) is the state in which the mask was provided in the side surface of the plating unit laminated body, (c) Indicates a state in which an insulating member is formed on the plating unit laminate. It is sectional drawing for demonstrating the manufacturing method of the mechanical quantity sensor which concerns on 1st Embodiment, (a) is a preparatory process, (b) is an adhesive agent coating process, (c) is a case mounting process, (d). Is a connecting step, (e) is a storing step, and (f) is a lead forming step. It is a top view for demonstrating the modification of an insulating member. It is a top view for demonstrating the modification of an insulating member.

Hereinafter, an embodiment in which the mechanical quantity sensor according to the present invention is applied to an angular velocity sensor will be described with reference to the drawings.
(First embodiment)
FIG. 1 is a plan view showing a schematic configuration of the mechanical quantity sensor according to the first embodiment. 2 is a cross-sectional view taken along line II-II in FIG. FIG. 3 is a plan view showing an electrical connection configuration between the sensor unit and the case. 4A and 4B are side views showing the side surface of the insulating base portion, where FIG. 4A shows the side surface viewed from the detection direction, and FIG. 4B shows the side surface viewed from the vibration direction. FIG. 5 is a schematic plan view for explaining the laminated body. FIGS. 6A and 6B are side views for explaining the insulating member forming step, in which FIG. 6A is a plating unit laminate in which a recess is formed, and FIG. 6B is a state in which a mask is provided on the side of the plating unit laminate. (C) shows a state in which an insulating member is formed on the plating unit laminate. FIG. 7 is a cross-sectional view for explaining the method of manufacturing the mechanical quantity sensor according to the first embodiment, wherein (a) is a preparation step, (b) is an adhesive application step, and (c) is a case mounting step. , (D) shows a connecting step, (e) shows a storing step, and (f) shows a lead forming step.

  In FIG. 1, the lid portion 52 of the storage portion 50 is omitted, and in FIG. 3, the closing portion 34 of the case 30 is omitted. In the following description, a vibration direction of a vibrator described later is referred to as a vibration direction, a direction in which the sensor chip 11 and the processing chip 12 are stacked is referred to as a stacking direction, and a direction perpendicular to the vibration direction and the stacking direction is referred to as a detection direction. The above-described stacking direction corresponds to the application direction of the angular velocity described in the claims.

  The mechanical quantity sensor 100 includes a sensor unit 10, a case 30, and a storage unit 50 as main parts. As shown in FIGS. 1 and 2, the sensor unit 10 is fixed to the inner surface of the case 30 via an adhesive (not shown), and the case 30 is fixed to the storage unit 50 via an adhesive 70. . The sensor unit 10 is stored in an internal space formed by the case 30, and the case 30 is stored in an internal space formed by the storage unit 50. As described above, the sensor unit 10 is stored in a double manner by the case 30 and the storage unit 50 with the configuration shown.

  As shown in FIG. 3, the sensor unit 10 and the case 30 are electrically connected via the first wire 71, and as shown in FIG. 1, the case 30 and the storage unit 50 are partially embedded. The lead 54 is electrically connected via the second wire 72. One end of the lead 54 is provided in an internal space formed by the storage unit 50, and the other end of the lead 54 is provided outside the storage unit 50 and can be electrically connected to an external element. As described above, the output signal of the sensor unit 10 is output to the external element via the first wire 71, the case 30, the second wire 72, and the lead 54 with the configuration shown above.

  The sensor unit 10 includes a sensor chip 11 that converts angular velocity into an electrical signal, and a processing chip 12 that processes the electrical signal output from the sensor chip 11. As shown in FIG. 2, the sensor unit 10 has a stack structure in which a sensor chip 11 is laminated on a processing chip 12. The sensor chip 11 and the processing chip 12 are mechanically and electrically connected via bumps 13. Connected. As shown in FIG. 3, an external terminal 14 is formed on the mounting surface of the sensor chip 11 in the processing chip 12, and the external terminal 14 includes the internal electrode 33 a formed inside the case 30, and the first electrode. It is electrically connected via a wire 71.

  Although not shown, the sensor chip 11 is opposed to the movable electrode in the vibration direction, two vibrators forming a pair that vibrates in opposite phases, a movable electrode formed by a part of the vibrator, and the detection direction. And a fixed electrode. When an angular velocity is applied in the stacking direction with the vibrator vibrating in the vibration direction, a Coriolis force along the detection direction is generated in the vibrator. Then, the vibrator is displaced (vibrated) in the detection direction by this Coriolis force, and the movable electrode that is a part of the vibrator is also displaced (vibrated) in the detection direction along with the displacement (vibration). As a result, the electrode interval between the movable electrode and the fixed electrode varies, and the capacitance between the movable electrode and the fixed electrode varies. This variation in capacitance is output to the processing chip 12 as an output signal of the sensor chip 11.

  Although not shown, the processing chip 12 has a CV conversion circuit. When an electric signal including a change in capacitance is input from the sensor chip 11 to the processing chip 12 via the bump 13, the change in capacitance is converted into a change in voltage by the CV conversion circuit described above. Is done. This voltage fluctuation is output to an external element through the first wire 71, the case 30, the second wire 72, and the lead 54 as an output signal of the processing chip 12, that is, an output signal of the sensor unit 10. As described above, in the sensor unit 10, the angular velocity is detected by converting the angular velocity into a capacitance and converting the converted capacitance into a voltage.

  The case 30 is electrically connected to the bottomed cylindrical insulating base 31 having one end opened in the stacking direction, the wiring pattern 32 provided inside the insulating base 31, and the wiring pattern 32. It has the electrode 33 provided in the surface of the insulating base material part 31, and the obstruction | occlusion part 34 which obstruct | occludes the opening part of the insulating base material part 31. FIG. As shown in FIG. 2, the outer surface of the closing portion 34 is a fixed surface with the storage portion 50, and the closing portion 34 is mechanically connected to the storage portion 50 via an adhesive 70. The closing portion 34 is made of metal, and the adhesive 70 is mainly made of a resin having elasticity.

  As shown in FIGS. 2 and 3, the insulating base material portion 31 according to the present embodiment has a rectangular bottom portion 35 and sensor portions 10 on each of the four sides forming the mounting surface 35 a of the sensor portion 10 in the bottom portion 35. Four wall portions 36 to 39 provided so as to surround the periphery, and a step portion 40 provided on the mounting surface 35a surrounded by the wall portions 36 to 39.

  As shown in FIGS. 1 and 3, a plurality of internal electrodes 33a are formed on the upper surface of the stepped portion 40, a plurality of external electrodes 33b are formed on the outer surface of the bottom portion 35, and on the upper surfaces of the wall portions 36 to 39, A frame-shaped connection electrode 33c is formed. Each internal electrode 33a is electrically connected to the external terminal 14 of the processing chip 12 via the first wire 71, and each external electrode 33b is electrically connected to the corresponding lead 54 via the second wire 72. It is connected. Further, the connection electrode 33c is mechanically and electrically connected to the closing portion 34 through a joining member (not shown). Any one of these electrodes 33 a to 33 c is electrically connected to each other via the corresponding wiring pattern 32.

  As shown in FIGS. 1 and 3, of the four wall portions 36 to 39, two wall portions 36 and 37 are arranged side by side in the vibration direction, and the remaining two wall portions 38 and 39 are arranged in the detection direction. Is arranged in. As shown in FIGS. 1 to 4, the end portions of the wiring pattern 32 are exposed on the outer surfaces of the two wall portions 36 and 37 arranged side by side in the detection direction. Further, as shown by broken lines in FIG. 3 and FIG. 4B, a concave portion 41 is formed on the outer surface of each of the wall portions 36 and 37, and a part of the inner surface constituting the concave portion 41 is part of the wiring pattern 32. It is formed by the edge part.

  In the present embodiment, the wiring pattern 32 that constitutes a part of the inner surface of the recess 41 includes the input wiring of the case 30 and the output wiring. The recess 41 is filled with an insulating member 73, and the wiring pattern 32 that constitutes a part of the inner surface of the recess 41 is covered with the insulating member 73. This insulating member 73 is a characteristic point of the mechanical quantity sensor 100 according to the present embodiment. The input wiring and the output wiring described above are included in the connection wiring described in the claims.

  The storage portion 50 includes a cylindrical portion 51 having two openings, a lid portion 52 that closes the two openings of the cylindrical portion 51, and a support portion that supports the case 30 and is connected to the inner surface of the cylindrical portion 51. 53. As shown in FIG. 2, the case 30 and the support part 53 are accommodated in an internal space constituted by the cylinder part 51 and the lid part 52, and are arranged on two wall parts arranged in the vibration direction in the cylinder part 51. A part of the lead 54 is embedded. One end of the lead 54 is provided in the internal space constituted by the cylindrical portion 51 and the lid portion 52, and the other end of the lead 54 is provided outside the internal space constituted by the cylindrical portion 51 and the lid portion 52. It has been. Note that one end of the lead 54 is provided in a connecting portion 60 described later.

  The support portion 53 is mounted with the mounting portion 55 for mounting the case 30, the side wall portions 56 to 59 connected to the mounting portion 55 and surrounding the wall portions 36 to 39 of the insulating base material portion 31, and the side wall portions 56 to 59. And a connecting part 60 that connects the cylinder part 51. The mounting portion 55 has a planar shape along a plane defined by the vibration direction and the detection direction, and the connecting portion 60 has a frame shape on the plane defined by the vibration direction and the detection direction. The side wall portions 56 to 59 extend in the stacking direction, one end of each of the side wall portions 56 to 59 is connected to the mounting surface 55a of the case 30 in the mounting portion 55, and the other end of each of the side wall portions 56 to 59 is a frame. It is connected with the inner surface of the connection part 60 of a shape. In the vibration direction, the wall portion 36 and the side wall portion 56 face each other, the wall portion 37 and the side wall portion 57 face each other, and in the detection direction, the wall portion 38 and the side wall portion 58 face each other. 39 and the side wall 59 face each other. Thereby, the above-described insulating member 73 is disposed between the wall portion 36 and the side wall portion 56 and between the wall portion 37 and the side wall portion 57.

  In the present embodiment, a protruding portion 61 that protrudes from the side wall portion 56 to the wall portion 36 (insulating member 73) is formed at a portion of the side wall portion 56 that faces the insulating member 73. A protruding portion 61 that protrudes from the side wall portion 57 to the wall portion 37 (insulating member 73) is formed at the opposing portion. The surface of the protrusion 61 facing the insulating member 73 has a rectangular shape.

  Next, the insulating member 73 that is a characteristic point of the mechanical quantity sensor 100 according to the present embodiment will be described. The insulating member 73 covers at least a part of the end of the wiring pattern 32 exposed on the outer surface of the case 30. In the present embodiment, the insulating member 73 covers a part of the wiring pattern 32 exposed on the walls 36 and 37. As shown in FIG. 4B, the insulating member 73 is formed so as to fill the recess 41 formed in each of the wall portions 36 and 37. The shape of the insulating member 73 protruding from the concave portion 41 of the wall portion 36 forms a convex shape protruding from the outer surface of the wall portion 36 to the side wall portion 56, and the shape of the insulating member 73 protruding from the concave portion 41 of the wall portion 37. However, a convex shape protruding from the outer surface of the wall portion 37 to the side wall portion 57 is formed. Two insulating members 73 are formed on each of the outer surfaces of the wall portions 36 and 37 arranged side by side in the vibration direction. The insulating member 73 is formed on the wall portion 36 and the wall portion 37. The insulating member 73 is point-symmetric with respect to the center of gravity of the case 30. The insulating member 73 is made of a material having low elasticity of 1 to 10 MPa, adhesiveness, and heat resistance. As a material having such characteristics, for example, a silicone-based adhesive can be employed.

  Next, the manufacturing method of the insulating base material part 31 of the case 30 according to the present embodiment will be described. First, a plurality of ceramic sheets on which openings and vias are formed are prepared by punching out predetermined portions. Next, a plurality of metal paste layers are formed on the surface of the ceramic sheet on which the openings and vias are formed. The above is the first metal paste layer forming step.

  After the first metal paste layer forming step, a plurality of ceramic sheets including a ceramic sheet having a metal paste layer are laminated and pressure-bonded. Thereby, the laminated body 90 in which the some ceramic sheet | seat shown in FIG. 5 was integrated is formed. The above is the lamination pressure bonding process.

  After the laminating and crimping step, by applying pressure to the break groove formation planned line in the laminate 90 to locally reduce the thickness of the laminate 90, the break break grooves shown by broken lines in FIG. 91 is formed. The above is the break groove forming step.

  After the break groove forming step, first, the laminate 90 is cut along an edge line 92 indicated by a one-dot chain line shown in FIG. Thereby, the edge of the laminate 90 is cut. Next, the laminated body 90 is cut | disconnected for every plating unit along the cutting line 93 (line shown with a two-dot chain line in FIG. 5) which cross | intersects the break groove | channel 91. FIG. As a result, the laminate 90 forms a plated unit laminate 94 that is cut into plating units, and a part of the metal paste layer that is electrically connected to the metal paste layer formed on the surface of the laminate 90 is cut. It is exposed on the surface 94a. The above is the cutting process. The rectangular portion having the smallest surface area formed by the break groove 91 and the cutting line 93 shown in FIG. 5 corresponds to the case unit in the laminate 90, and four case units are connected in the detection direction. A portion where the two break grooves 91 are formed corresponds to the plating unit laminate 94.

  After the cutting step, a new metal paste layer is formed on the cut surface 94a of the plating unit laminate 94, thereby electrically connecting the plurality of metal paste layers exposed on the cut surface 94a. The above is the second metal paste layer forming step.

  After the second metal paste layer forming step, the plating unit laminate 94 is baked, whereby the metal paste layer formed on the ceramic sheet is used as the wiring pattern 32, and the metal paste layer formed on the cut surface 94a is used as the electrode for plating. To do. The above is the firing step.

  After the firing step, the plating unit laminate 94 is immersed in the plating solution, and a current is passed through the plating electrode, whereby the wiring pattern 32 that is electrically connected to the plating electrode and contacts the plating solution is plated. To form the electrode 33. The above is the plating process.

  After the plating step, the plating electrode is removed and a part of the outer surface of the plating unit laminate 94 is cut off so that the wiring patterns 32 whose ends are exposed on the cut surface 94a are electrically independent from each other. The portion forms a recess 41 constituted by the end of the wiring pattern 32. FIG. 6A shows a state in which the recess 41 is formed on the cut surface 94 a of the plating unit laminate 94. The above is the removal step.

  After the removing step, a mask 95 having an opening 95a formed in a portion corresponding to the recess 41 is provided on the cut surface 94a of the plating unit laminate 94 shown in FIG. 6A, as shown in FIG. 6B. To do. In this state, as shown in FIG. 6C, an insulating coating material that is a constituent material of the insulating member 73 so that the shape protruding from the concave portion 41 becomes a convex shape while filling the space formed by the concave portion 41. Apply. Thereby, the edge part of the wiring pattern 32 which comprises a part of wall surface of the recessed part 41 is coat | covered with an insulating coating material, ie, the insulating member 73. FIG. Insulating paint may be applied to a predetermined portion of the cut surface 94a without using the mask 95. The above is the insulating member forming step.

  After the insulating member forming step, the plating unit laminate 94 is divided along the break grooves 91 to be divided for each case unit. The above is the dividing step.

  The insulating base material part 31 of the case 30 is manufactured through the above steps. After the above-described sensor unit 10 is bonded and fixed to the insulating base member 31 via an adhesive (not shown), and the sensor unit 10 and the case 30 are electrically connected via the first wire 71, The sensor unit 10 is accommodated in the internal space of the case 30 by closing the opening of the insulating base material portion 31 by the closing portion 34.

  The mechanical quantity sensor 100 according to the present embodiment is manufactured through the steps shown in FIG. First, as shown in FIG. 7A, a cylindrical portion 51 in which a part of the lead 54 is embedded and the support portion 53 is connected is prepared by insert molding. The above is the preparation process. In the preparation process, the plurality of leads 54 are mechanically and electrically connected via a connecting portion (not shown).

  After the preparation step, as shown in FIG. 7B, an adhesive 70 is applied to the mounting surface 55 a of the mounting portion 55 in the support portion 53. The above is the adhesive application process.

  After the adhesive application step, as shown in FIG. 7C, the outer surface of the closing portion 34 of the case 30 in which the sensor unit 10 is accommodated is brought into contact with the adhesive 70 to solidify the adhesive 70, thereby 30 is mounted on the mounting portion 55. The above is the case mounting process.

  After the case mounting process, the case 30 and the lead 54 are electrically connected via the second wire 72 as shown in FIG. As a result, the sensor unit 10 is electrically connected to the lead 54 via the case 30. The above is the connection process.

  After the connecting step, as shown in FIG. 7 (e), the lid portion 52 is attached and fixed to each of the two openings of the cylindrical portion 51. Thereby, the case 30 is accommodated in the internal space constituted by the cylindrical portion 51 and the lid portion 52. The above is the storing step.

  After the storing step, as shown in FIG. 7 (f), while the leads 54 are formed into a predetermined shape, the connecting portions that mechanically and electrically connect the plurality of leads 54 are removed, and each of the leads 54 is removed. Be electrically independent. The above is the lead forming process. The mechanical quantity sensor 100 according to the present embodiment is manufactured through the above steps.

  Next, functions and effects of the mechanical quantity sensor 100 according to the present embodiment will be described. As described above, the end portion of the wiring pattern 32 is exposed on the outer surface of each of the wall portions 36 and 37 arranged side by side in the vibration direction in the insulating base material portion 31, and the exposed end portion of the wiring pattern 32 is exposed. Is covered with an insulating member 73. According to this, even if a temperature difference occurs between the air in the storage unit 50 and the outside air, and condensation occurs on the walls 36 and 37, a part of the end of the wiring pattern 32 is covered with the insulating member 73. Therefore, it is possible to prevent the plurality of wiring patterns 32 from being electrically connected through dew condensation. Thereby, electrical connection reliability is improved.

  In the present embodiment, a recess 41 is formed on the outer surface of the walls 36 and 37, and a part of the wall surface constituting the recess 41 is configured by the wiring pattern 32. The recess 41 is filled with the insulating member 73. According to this, since the contact area between the insulating member 73 and the wall portions 36 and 37 is increased, the insulating member 73 is prevented from being peeled off from the wall portions 36 and 37. Thereby, electrical connection reliability is further improved.

  In the present embodiment, the insulating member 73 formed on the wall portion 36 and the insulating member 73 formed on the wall portion 37 are symmetric with respect to the center of gravity of the case 30. According to this, when the case 30 vibrates due to an external stress or the like applied to the storage unit 50, the case 30 is restrained from eccentric vibration. Thereby, it is suppressed that the vibration of the case 30 resulting from external stress is applied to the sensor unit 10. As a result, it is suppressed that the detection accuracy of angular velocity falls.

  In the present embodiment, the wall 36 and the side wall 56 are arranged side by side, and the wall 37 and the side wall 57 are arranged side by side in the vibration direction. The insulating member 73 is disposed between the wall portion 36 and the side wall portion 56 and between the wall portion 37 and the side wall portion 57. In addition, a protruding portion 61 that protrudes from the side wall portion 56 to the wall portion 36 (insulating member 73) is formed in a portion of the side wall portion 56 that faces the insulating member 73, and in a portion of the side wall portion 57 that faces the insulating member 73, A protruding portion 61 that protrudes from the side wall portion 57 to the wall portion 37 (insulating member 73) is formed. The insulating member 73 is made of a material having low elasticity of 1 to 10 MPa, adhesiveness, and heat resistance.

  Thus, since the protrusion part 61 is formed in each of the side wall parts 56 and 57, compared with the structure without the protrusion part 61, the space between the insulating member 73 and the case 30 in the detection direction becomes narrow. Yes. Therefore, when the case 30 vibrates in the detection direction due to an external stress applied to the storage portion 50, the insulating member 73 and the protruding portion 61 are easily in contact with each other. As described above, since the insulating member 73 has elasticity, when the insulating member 73 and the projecting portion 61 collide, the insulating member 73 reduces the vibration of the case 30. As a result, displacement (vibration) in the detection direction of the sensor unit 10 is suppressed, and a decrease in angular velocity detection accuracy is suppressed.

  In the present embodiment, the shape of the insulating member 73 protruding from the concave portion 41 of the wall portion 36 forms a convex shape protruding from the outer surface of the wall portion 36 to the side wall portion 56, and the insulating member protruding from the concave portion 41 of the wall portion 37. The shape of 73 forms a convex shape protruding from the outer surface of the wall portion 37 to the side wall portion 57.

  According to this, when the insulating member 73 collides with the protrusion 61, the energy generated by the collision can be dispersed from the tip of the insulating member 73 having a convex shape toward the bottom surface. Thereby, the vibration of the detection direction of case 30 is reduced more effectively. As a result, the displacement (vibration) in the detection direction of the sensor unit 10 is more effectively suppressed, and the angular velocity detection accuracy is more effectively suppressed from decreasing.

  In the present embodiment, the case 30 is mounted on the mounting portion 55 via an adhesive 70 made mainly of an elastic resin. According to this, when an external stress is applied to the storage unit 50, a part of the external stress is converted into a force that vibrates the case 30 by the adhesive 70. Therefore, the external stress applied to the sensor unit 10 via the case 30 is reduced. Thereby, it is suppressed that the detection accuracy of the sensor part 10 falls.

  In the present embodiment, the laminate 90 is cut for each plating unit in the cutting step, and the fired plated unit laminate 94 is plated in the plating step. According to this, in the cutting process, the laminated body is cut for each case unit, and in the plating process, the plating process is simplified as compared with the manufacturing method in which the laminated body is fired and cut in the case unit. The

  In the present embodiment, the insulating member 73 is formed on the baked plated unit laminate 94 in the insulating member forming step. According to this, in the insulating member forming step, the insulating member forming step is simplified as compared with the manufacturing method in which the insulating member is formed on the laminated body that is baked and cut into case units.

  The preferred embodiments of the present invention have been described above. However, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

  In the present embodiment, an example is shown in which two insulating members 73 are formed on each of the outer surfaces of the wall portions 36 and 37 arranged side by side in the vibration direction. However, the number of insulating members 73 formed on the walls 36 and 37 is not limited to the above example. For example, as shown in FIG. 8, each of the outer surfaces of the walls 36 and 37 arranged in the vibration direction. It is also possible to adopt a configuration in which one is formed at a time. In FIG. 8, the insulating member 73 formed on the wall portion 36 and the insulating member 73 formed on the wall portion 37 are symmetric with respect to the center of gravity of the case 30. FIG. 8 is a plan view for explaining a modification of the insulating member.

  In this embodiment, the example in which the insulating member 73 was formed in the wall parts 36 and 37 arrange | positioned along with the vibration direction was shown. However, the part where the insulating member 73 is formed is not limited to the above example. For example, as shown in FIG. 9, not only the wall portions 36 and 37 arranged side by side in the vibration direction, but also in the detection direction. You may form in the outer surface of the arrange | positioned wall parts 38 and 39, respectively. According to this, since the insulating member 73 is formed on each of the outer surfaces of the four wall portions 36 to 39, only the outer surfaces of the wall portions 36 and 37 arranged side by side in the detection direction as shown in the present embodiment. As compared with the configuration in which the insulating member 73 is formed, the case 30 is restrained from eccentric vibration. Thereby, it is suppressed that the detection accuracy of the sensor part 10 falls. In the case of the above modification, the insulating member 73 having elasticity is disposed between the wall portion 38 and the side wall portion 58 and between the wall portion 39 and the side wall portion 59. Therefore, for example, when the case 30 vibrates in the vibration direction due to external stress or the like and the insulating member 73 and the side wall portions 58 and 59 come into contact with each other, the vibration of the case 30 is reduced by the insulating member 73 having elasticity. As a result, the displacement (vibration) of the sensor unit 10 in the vibration direction is suppressed, and the detection accuracy of the angular velocity is suppressed from decreasing. In FIG. 9, the insulating member 73 formed on the wall portion 36 and the insulating member 73 formed on the wall portion 37 are symmetric with respect to the center of gravity of the case 30, and are formed on the wall portion 38. The insulating member 73 and the insulating member 73 formed on the wall 39 are point-symmetric with respect to the center of gravity of the case 30. FIG. 9 is a plan view for explaining a modification of the insulating member.

  In the present embodiment, an example in which a part of the wiring pattern 32 exposed on the walls 36 and 37 is covered with the insulating member 73 is shown. However, all of the wiring pattern 32 exposed on the wall portions 36 and 37 may be covered with the insulating member 73.

  In the present embodiment, a protruding portion 61 that protrudes from the side wall portion 56 to the wall portion 36 is formed at a portion facing the insulating member 73 in the side wall portion 56, and a side wall portion is formed at a portion facing the insulating member 73 in the side wall portion 57. The example in which the protrusion part 61 which protrudes from 57 to the wall part 37 was formed was shown. However, the protruding portion 61 may not be provided.

DESCRIPTION OF SYMBOLS 10 ... Sensor part 30 ... Case 31 ... Insulation base-material part 36-39 ... Wall part 50 ... Storage part 53 ... Support part 56-59 ... Side wall part 73 ... -Insulating member 90 ... laminate 93 ... plating unit laminate 100 ... mechanical quantity sensor

Claims (12)

A sensor unit for measuring angular velocity;
A case for housing the sensor unit;
An angular velocity sensor having a storage portion for storing the case,
The case has a bottomed cylindrical insulating base member formed by laminating a plurality of ceramic sheets, a wiring pattern provided inside the insulating base member, and electrically connected to the wiring pattern, An electrode provided on the surface of the insulating base part, and a closing part for closing the opening of the insulating base part,
An end portion of the wiring pattern is exposed on the outer surface of the insulating base material portion, and at least a part of the exposed end portion of the wiring pattern is covered with an insulating member,
The sensor unit includes a sensor chip that converts an angular velocity into an electrical signal, and a processing chip that processes an electrical signal output from the sensor chip,
The sensor chip includes a pair of vibrators that vibrate in opposite phases, a movable electrode formed by a part of the vibrator, and a detection perpendicular to the vibration direction of the vibrator and the application direction of the angular velocity. A fixed electrode facing the movable electrode in a direction,
The insulating base part has a rectangular bottom part on which the sensor part is mounted, and four wall parts provided so as to surround the sensor part,
The storage portion includes a mounting portion for mounting the case, and a side wall portion connected to the mounting portion and surrounding the periphery of the wall portion of the insulating base material portion,
In the vibration direction, an outer surface of the wall portion arranged side by side with the side wall portion is covered with the insulating member,
The insulating member has elasticity ;
A concave portion is formed on the outer surface of the insulating base portion,
A part of the wall surface constituting the recess is constituted by an end of the wiring pattern,
An angular velocity sensor characterized in that a space formed by the recess is filled with the insulating member, and the insulating member has a convex shape protruding from the recess toward the side wall of the storage portion . A sensor unit for measuring angular velocity;
A case for housing the sensor unit;
An angular velocity sensor having a storage portion for storing the case,
The case has a bottomed cylindrical insulating base member formed by laminating a plurality of ceramic sheets, a wiring pattern provided inside the insulating base member, and electrically connected to the wiring pattern, An electrode provided on the surface of the insulating base part, and a closing part for closing the opening of the insulating base part,
An end portion of the wiring pattern is exposed on the outer surface of the insulating base material portion, and at least a part of the exposed end portion of the wiring pattern is covered with an insulating member,
The sensor unit includes a sensor chip that converts an angular velocity into an electrical signal, and a processing chip that processes an electrical signal output from the sensor chip,
The sensor chip includes a pair of vibrators that vibrate in opposite phases, a movable electrode formed by a part of the vibrator, and a detection perpendicular to the vibration direction of the vibrator and the application direction of the angular velocity. A fixed electrode facing the movable electrode in a direction,
The insulating base part has a rectangular bottom part on which the sensor part is mounted, and four wall parts provided so as to surround the sensor part,
The storage portion includes a mounting portion for mounting the case, and a side wall portion connected to the mounting portion and surrounding the periphery of the wall portion of the insulating base material portion,
In the detection direction, an outer surface of the wall portion arranged side by side with the side wall portion is covered with the insulating member,
The insulating member has elasticity ;
A concave portion is formed on the outer surface of the insulating base portion,
A part of the wall surface constituting the recess is constituted by an end of the wiring pattern,
An angular velocity sensor characterized in that a space formed by the recess is filled with the insulating member, and the insulating member has a convex shape protruding from the recess toward the side wall of the storage portion . 3. The angular velocity sensor according to claim 1, wherein the insulating member is formed on an outer surface of the insulating base material portion so as to be point-symmetrical with respect to the center of gravity of the case. A sensor unit for measuring angular velocity;
A case for housing the sensor unit;
An angular velocity sensor having a storage portion for storing the case,
The case has a bottomed cylindrical insulating base member formed by laminating a plurality of ceramic sheets, a wiring pattern provided inside the insulating base member, and electrically connected to the wiring pattern, An electrode provided on the surface of the insulating base part, and a closing part for closing the opening of the insulating base part,
An end portion of the wiring pattern is exposed on the outer surface of the insulating base material portion, and at least a part of the exposed end portion of the wiring pattern is covered with an insulating member,
The sensor unit includes a sensor chip that converts an angular velocity into an electrical signal, and a processing chip that processes an electrical signal output from the sensor chip,
The sensor chip includes a pair of vibrators that vibrate in opposite phases, a movable electrode formed by a part of the vibrator, and a detection perpendicular to the vibration direction of the vibrator and the application direction of the angular velocity. A fixed electrode facing the movable electrode in a direction,
The insulating base portion includes four rectangular bases on which the sensor unit is mounted and four sides forming a mounting surface of the sensor unit on the bottom so as to surround the sensor unit. A wall, and
The storage portion includes a mounting portion for mounting the case, and a side wall portion connected to the mounting portion and surrounding the periphery of the wall portion of the insulating base material portion,
Of the four wall portions, the two wall portions are arranged side by side in the vibration direction, and the remaining two wall portions are arranged side by side in the detection direction,
The end portions of the wiring pattern are exposed on the outer surfaces of the two wall portions arranged side by side in the detection direction, and the end portions of the wiring pattern are covered with the insulating member,
The angular velocity sensor, wherein the insulating member has elasticity. The angular velocity sensor according to claim 4 , wherein the insulating member has a convex shape that protrudes from the wall portion of the case toward the side wall portion of the storage portion along the detection direction. In the detection direction, a protruding portion that protrudes from the side wall portion of the storage portion toward the wall portion of the case is formed on the inner surface of the side wall portion of the storage portion that faces the insulating member. The angular velocity sensor according to claim 4 or 5 . The angular velocity sensor according to any one of claims 4 to 6, wherein the insulating member having elasticity is formed on an outer surface of each of the two wall portions arranged side by side in the vibration direction. The angular velocity sensor according to any one of claims 4 to 7 , wherein the case is mechanically connected to the mounting portion via an adhesive having elasticity. The sensor unit is mechanically connected to the case via an adhesive, and is electrically connected to an electrode of the case via a first wire,
A portion of a plurality of leads for electrically connecting the inside and the outside of the storage portion is embedded in the storage portion, and formed on the outer surface of the bottom portion of the insulating base portion via a second wire. the angular velocity sensor according to any one of claims 1-8 in which the electrodes, and corresponding features that have been read and electrically connected to the. A method for manufacturing an angular velocity sensor according to claim 1,
A first metal paste layer forming step of forming a plurality of metal paste layers on the ceramic sheet;
A laminating and crimping step of laminating and crimping a plurality of ceramic sheets, including a ceramic sheet having the metal paste layer;
A break groove forming step of forming a break groove for splitting in a laminate composed of a plurality of the ceramic sheets;
One of the metal paste layers electrically connected to the metal paste layer formed on the surface of the laminated body by cutting the laminated body for each plating unit along a cutting line intersecting the break groove. A cutting step of exposing the part to the cut surface;
A second metal paste layer is formed on the cut surface of the plated unit laminate formed by cutting the laminate into plating units, thereby electrically connecting a plurality of metal paste layers exposed on the cut surface. A metal paste layer forming step;
By firing the plating unit laminate, a firing step in which the metal paste layer formed on the ceramic sheet is used as the wiring pattern, and the metal paste layer formed on the cut surface is used as a plating electrode;
The plating unit laminate is immersed in a plating solution, and a current is passed through the plating electrode, thereby electrically connecting the plating electrode and plating the wiring pattern in contact with the plating solution. A plating step for forming the electrodes;
By removing the plating electrode, the removal step of making the wiring patterns whose ends are exposed on the cut surface electrically independent,
By applying an insulating paint, which is a constituent material of the insulating member, to the side surface of the fired plated unit laminate so as to cover at least a part of the end of the wiring pattern exposed on the cut surface, An insulating member forming step for forming the insulating member;
A method for manufacturing an angular velocity sensor, comprising: dividing the fired plated unit laminate body into case units by dividing the laminated laminate unit along the break grooves. In the removing step, the plating electrode is removed, and a part of the wall surface is formed by cutting out a part of the outer surface of the plating unit laminate, thereby forming a recess constituted by an end of the wiring pattern,
The method of manufacturing an angular velocity sensor according to claim 10 , wherein, in the insulating member forming step, the insulating member is formed so as to fill a space formed by the concave portion. In the insulating member forming step, the shape of the insulating paint, into a projecting shape protruding from the cutting plane, in claim 10 or claim 11, characterized in that applying the insulating coating to the cutting plane The manufacturing method of the angular velocity sensor of description.

Images