JP4622780B2 - Angular velocity sensor device - Google Patents

Description

  The present invention relates to a vibration type angular velocity sensor device in which an angular velocity detecting element having a vibrating body is mounted on a package via an adhesive having a vibration absorbing function.

  Conventionally, in this type of vibration type angular velocity sensor device, an angular velocity detecting element having a vibrating body is mounted on a package mounting surface via an adhesive having a vibration absorbing function, and is applied to the angular velocity detecting element. There has been proposed one in which external vibration is absorbed by the elasticity of the adhesive (see, for example, Patent Document 1).

  In such an angular velocity sensor device, the vibrating body is driven and vibrated, and the angular velocity is detected by detecting the displacement of the vibrating body due to the Coriolis force when the angular velocity is applied. In this case, for example, when mounted in an automobile, external vibration such as vehicle vibration is transmitted from the package to the angular velocity detecting element on the adhesive, which adversely affects the sensor characteristics.

Therefore, an adhesive having a low elastic modulus is used as an adhesive having a vibration absorbing function, and a spring mass system having a vibration absorbing function using the angular velocity detecting element as a mass and the adhesive as a spring constitutes the elasticity of the adhesive. Thus, external vibration transmitted from the package to the angular velocity detecting element is attenuated and absorbed.
JP 2003-28644 A

  However, in the above-described conventional angular velocity sensor device, by providing the adhesive below the angular velocity detection element, substantially only in the stacking direction of the package mounting surface and the angular velocity detection element, that is, in the direction perpendicular to the mounting surface. A spring mass system having the above-described vibration absorbing function is formed, and in particular, absorption is insufficient for external vibration in a direction parallel to the mounting surface.

  The present invention has been made in view of the above problem, and in a vibration type angular velocity sensor device, a spring mass system having a vibration absorbing function in a direction parallel to the mounting surface of the package between the angular velocity detection element and the package. An object of the present invention is to provide an anti-vibration structure that absorbs external vibration.

In order to achieve the above object, according to the present invention, in a vibration type angular velocity sensor device, a plate-like pedestal (60) is provided between an angular velocity detection element (20) and a mounting surface (13) of a package (10). The plate surface is interposed along a direction parallel to the mounting surface (13), the angular velocity detection element (20) is supported on the pedestal (60), and the first adhesive (41) is attached to the pedestal (60). A pedestal (60) is supported between the mounting surface (13) and a wall surface (14) extending upward from the mounting surface (13) is provided around the mounting surface (13) of the package (10). Of the end face of the angular velocity detection element (20) and the end face of the pedestal (60), only the end face of the pedestal (60) absorbs external vibration applied to the angular velocity detection element (20) by elasticity, and is a second adhesive. and characterized in that connected to the wall (14) through (44) That.

  According to this, the angular velocity detection element (20) is supported on the pedestal (60), and the lower surface and the end surface of the pedestal (60) are attached to the first and second adhesives (41, 44) having a vibration absorbing function. The spring mass system having a vibration absorbing function is formed not only in the direction perpendicular to the mounting surface (13) but also in the direction parallel to the mounting surface (13). A vibration-proof structure that absorbs vibration can be provided.

  The circuit board (30) may be interposed between the angular velocity detection element (20) and the pedestal (60) or between the pedestal (60) and the mounting surface (13).

  In the present invention, when the circuit board (30) is interposed between the pedestal (60) and the mounting surface (13), the end surface of the pedestal (60) is partially cut out. A notch (61) is provided, and the pad (31) of the circuit board (30) is looked upward from the notch (61), and the circuit board (30) is inserted through the notch (61). ) Pad (31) is wire-bonded.

  According to this, the electrical connection with respect to the circuit board (30) located under the base (60) can be performed appropriately.

  In addition, the code | symbol in the bracket | parenthesis of each means described in the claim and this column is an example which shows a corresponding relationship with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other are given the same reference numerals in the drawings in order to simplify the description.

(First embodiment)
FIG. 1 is a diagram showing a schematic cross-sectional configuration of a vibration-type angular velocity sensor device 100 according to the first embodiment of the present invention, and FIG. 2 is a view when the angular velocity sensor device 100 shown in FIG. 1 is viewed from above. It is a top view. FIG. 1 is a schematic cross-sectional view along AA in FIG. In FIG. 2, the vibrating body 21 is omitted, and the surface of the base end face adhesive 44 is point-hatched for convenience for identification.

  This angular velocity sensor device 100 is applied, for example, as a device that is mounted on a vehicle and detects an angular velocity applied to the vehicle.

  In this angular velocity sensor device 100, a pedestal 60, a circuit board 30, and an angular velocity detection element 20 are laminated on a package 10 via adhesives 41 to 44, and electrical connection of each part is a bonding wire. 50 is performed.

  The package 10 accommodates the angular velocity detection element 20, the circuit board 30, and the pedestal 60, and serves as a base that defines and forms the main body of the angular velocity sensor device 100.

  In the example shown in FIG. 1, the package 10 is configured as a laminated substrate in which a plurality of ceramic layers 11 such as alumina are laminated, for example, and although not shown, the surface of each layer 11 and through holes formed in each layer are formed. Wiring is formed inside. The angular velocity sensor device 100 and the outside can be electrically connected via this wiring.

  The package 10 has an opening 12 as a recess that opens upward. In this example, as shown in FIG. 2, the planar shape of the opening 12, that is, the opening shape is a rectangular shape.

  The bottom surface 13 of the opening 12 is configured as a mounting surface 13 on which the angular velocity detection element 20, the circuit board 30 and the pedestal 60 are mounted. The side surface 14 of the opening 12 is formed around the mounting surface 13. The wall surface 14 of the package 10 extends upward from the mounting surface 13.

  On the mounting surface 13 of the package 10, a plate-like pedestal 60, a circuit board 30, and an angular velocity detecting element 20 are laminated from the mounting surface 13 side, and each part is interposed via adhesives 41 to 43. Are glued together. The pedestal 60, the circuit board 30, and the angular velocity detection element 20 are arranged on the mounting surface 13 with their plate surfaces along a direction parallel to the mounting surface 13.

  The mounting surface 13 and the lower surface of the pedestal 60 are bonded and fixed via an adhesive 41 for the lower surface of the pedestal, and the pedestal 60 and the circuit board 30 are bonded and fixed via an adhesive 42 for a circuit board. The substrate 30 and the angular velocity detection element 20 are bonded and fixed via an element adhesive 43. The end surface of the pedestal 60 and the wall surface 14 of the package 10 are connected via an adhesive 44 for pedestal end surface.

  Here, in this embodiment, the pedestal bottom surface adhesive 41 and the pedestal end surface adhesive 44 are respectively a first adhesive 41 and a second adhesive that elastically absorb external vibration applied to the angular velocity detection element 20. It is configured as an agent 44.

  Both the base underside adhesive 41 and the base end face adhesive 44 having a vibration absorbing function are made of a member having a low elastic modulus and a vibration isolating function. For example, a liquid curable type such as silicone gel is used. Resin adhesives, adhesive films such as silicone, epoxy, and polyimide are used. In addition, a conventionally used soft adhesive for vibration isolation can be appropriately employed.

  Further, the circuit board adhesive 42 and the element adhesive 43 are both more elastic, that is, harder than the pedestal lower surface adhesive 41 and the pedestal end surface adhesive 44, and absorb vibration as they have. It has no function. The angular velocity detection element 20 is supported on the pedestal 60 via the circuit board adhesive 42, the circuit board 30, and the element adhesive 43.

  The angular velocity detection element 20 is used for angular velocity detection, and is configured as a semiconductor chip including the vibrating body 21, similar to that described in Patent Document 1 above. Such an angular velocity detecting element 20 is formed by performing known micromachining on a semiconductor substrate such as an SOI (silicon-on-insulator) substrate, and in this example, a rectangular plate as shown in FIG. It is a shape.

  Specifically, the vibrating body 21 in the angular velocity detection element 20 can be a generally known beam structure having a comb-tooth structure, and is supported by an elastic beam and is movable by applying an angular velocity. .

  In FIG. 1, when an angular velocity Ω about the z axis is applied when the vibrating body 21 is driven to vibrate in the x-axis direction, the vibrating body 21 is caused to move in the y-axis direction orthogonal to the x-axis by Coriolis force. It is designed to vibrate.

  The angular velocity detection element 20 is provided with a detection electrode (not shown), and by detecting a change in capacitance between the vibration body 21 and the detection electrode due to the detection vibration of the vibration body 21, the angular velocity Ω can be detected. Detection is possible. Thus, the angular velocity detection element 20 detects the angular velocity Ω based on the drive vibration of the vibrating body 21.

  In addition, the circuit board 30 is configured as a signal processing chip having functions such as sending signals for driving and detection to the angular velocity detecting element 20, processing electric signals from the angular velocity detecting element 20, and outputting them to the outside. Is.

  Such a circuit board 30 is composed of, for example, an IC chip or the like in which a MOS transistor, a bipolar transistor, or the like is formed using a known semiconductor process on a silicon substrate or the like. FIG. 2).

  As shown in FIGS. 1 and 2, the angular velocity detecting element 20 and the circuit board 30 and the circuit board 30 and the wiring of the package 10 are electrically connected via bonding wires 50 made of gold, aluminum, or the like. Connected. In this way, the angular velocity detecting element 20, the circuit board 30, and each part of the package 10 are electrically connected via the bonding wires 50.

  Thus, the electrical signal from the angular velocity detecting element 20 is sent to the circuit board 30 and converted into a voltage signal by, for example, a C / V conversion circuit provided on the circuit board 30 so as to be output as an angular velocity signal. It has become.

  Further, the pedestal 60 has a planar shape similar to the opening shape of the opening 12 of the package 10, and its planar size is slightly smaller than the opening 12 and can be inserted into the opening 12. In this example, as shown in FIGS. 1 and 2, the base 60 has a rectangular plate shape in accordance with the opening shape of the opening 12.

  The pedestal 60 supports the angular velocity detecting element 20 together with the circuit board 30 and is supported on the mounting surface 13 by a pedestal lower surface adhesive 41 interposed between the pedestal 60 and the mounting surface 13.

  Further, the end surface of the pedestal 60 is bonded and fixed to the wall surface 14 of the package 10 via the pedestal end surface adhesive 44. In this example, as shown in FIG. The base end face adhesive 44 as a second adhesive is connected to the wall surface 14.

  Such a pedestal 60 is for increasing the mass of the entire structure including the pedestal 60, the angular velocity detecting element 20 on the pedestal 60, and the circuit board 30, and is preferably heavier than the angular velocity detecting element 20. Is preferably heavier than the combined weight of the angular velocity detecting element 20 and the circuit board 30.

  Specifically, the pedestal 60 is preferably made of a material having a higher density than the angular velocity detecting element 20 and the circuit board 30, and is usually a Cu having a higher density than the silicon constituting the angular velocity detecting element 20 and the circuit board 30. And those made of iron-based metals. Furthermore, such a high density ceramic may be used.

  In the angular velocity sensor device 100 of the present embodiment, the mass of the entire structure on the pedestal lower surface adhesive 41 can be increased by the pedestal 60 by interposing the pedestal 60. Therefore, in the spring-mass system in which the base 41 adhesive 41 is a spring and the structure is a mass, the natural vibration frequency of the structure can be reduced.

  For example, when external vibration such as automobile vibration is applied to the angular velocity sensor device 100, the external vibration is transmitted to the structure, and the structure on the base lower surface adhesive 41 is about to vibrate.

  Here, the external vibration having a frequency lower than the natural vibration frequency of the structure including the pedestal 60 is attenuated in the structure. Considering this point, the base 60 is made heavier than the angular velocity detecting element 20 in this embodiment in order to absorb external vibrations over a wider range of frequencies.

  The manufacturing method of such an angular velocity sensor device 100 is not limited, but is as follows.

  On the mounting surface 13 of the package 10, the pedestal 60 is bonded via the pedestal lower surface adhesive 41, and the end surface of the pedestal 60 is bonded to the wall surface 14 via the pedestal end surface adhesive 44. Further, the circuit board 30 and the angular velocity detecting element 20 are bonded on the pedestal 60 via the circuit board adhesive 42 and the element adhesive 43, respectively.

  Thereafter, wire bonding is performed among the angular velocity detection element 20, the circuit board 30 and the package 10. In some cases, a lid is attached to cover the opening 12 of the package 10 to seal the inside of the package 10. Thus, the angular velocity sensor device 100 is completed.

  By the way, according to the present embodiment, the angular velocity detecting element 20 is placed between the angular velocity detecting element 20 and the mounting surface 13 of the package 10 in a state parallel to the mounting surface 13. The angular velocity detecting element 20 and the pedestal 60 are supported on the mounting surface 13 via a pedestal lower surface adhesive 41 having a vibration absorbing function as a first adhesive located on the lower surface of the pedestal 60. is doing.

  As a result, a spring-mass system having a vibration absorption function using the pedestal 60 and the structure including the angular velocity detecting element 20 and the circuit board 30 thereon as a mass and the pedestal lower surface adhesive 41 as a spring is perpendicular to the mounting surface 13. The external vibration formed in the direction and applied to the angular velocity detecting element 20 is attenuated and absorbed by the elasticity of the adhesive 41 for the lower surface of the base.

  Furthermore, in the present embodiment, not only the lower surface of the pedestal 60 but also the end surface of the pedestal 60 with respect to the wall surface 14 of the package 10 via a pedestal end surface adhesive 44 as a second adhesive having a vibration absorbing function. Connected.

  As a result, a spring-mass system having a vibration absorption function using the structure as a mass and the base end face adhesive 44 as a spring is also formed in a direction parallel to the mounting surface 13 and applied to the angular velocity detection element 20. External vibration, in particular, external vibration in a direction parallel to the mounting surface 13 is attenuated and absorbed by the elasticity of the base end surface adhesive 44.

  As described above, according to the present embodiment, the spring-mass system having the vibration absorbing function is formed not only in the direction perpendicular to the mounting surface 13 of the package 10 but also in the direction parallel to the mounting surface 13. A vibration-proof structure that absorbs vibration can be provided.

  In the illustrated example, the entire circumference of the end surface of the pedestal 60 is connected to the wall surface via the pedestal end surface adhesive 44 as the second adhesive, so that the direction parallel to the mounting surface 13 is achieved. Vibration absorption is performed with respect to external vibration in any direction along the line.

  In addition to the above example, any one of the end surfaces of the pedestal 60 may be connected to the wall surface 13 of the package 10 via the pedestal end surface adhesive 44, and thereby the above-described book. The effects of the embodiment can be obtained. For example, in the flat rectangular base 60 shown in the above example, only one side of the end may be connected, or one of the four corners may be connected.

  However, it is preferable that end faces of the pedestal 60 facing each other are preferably connected to the wall surface 13 of the package 10 via the pedestal end face adhesive 44, and according to this, the direction parallel to the mounting surface 13 is preferable. The support of the pedestal 60 becomes stable. For example, in the flat rectangular pedestal 60 shown in the above example, two or more opposing end faces may be connected.

(Second Embodiment)
FIG. 3 is a diagram showing a schematic cross-sectional configuration of a vibration-type angular velocity sensor device 200 according to the second embodiment of the present invention, and FIG. 4 is a view when the angular velocity sensor device 200 shown in FIG. 3 is viewed from above. It is a top view. 3 is a schematic cross-sectional view taken along the line BB in FIG. Further, in FIG. 4, the vibrating body 21 is omitted, and the surface of the base end face adhesive 44 is point-hatched for convenience for identification.

  In the above embodiment, the circuit board 30 is interposed between the angular velocity detecting element 20 and the pedestal 60 on the upper surface side of the pedestal 60, but the circuit board 30 is disposed on the lower surface side of the pedestal 60, that is, between the pedestal 60 and the package 10. It may be interposed between the mounting surface 13.

  In the present embodiment, as shown in FIG. 3, the circuit board 30 is interposed between the pedestal 60 and the mounting surface 13, and the circuit board 30 is bonded to the mounting surface 13 via the circuit board adhesive 42. And is supported on the mounting surface 13.

  In this example, the pedestal bottom surface adhesive 41 as the first adhesive having a vibration absorbing function is interposed between the bottom surface of the pedestal 60 and the circuit board 30. In this case, a spring-mass system having a vibration absorbing function is formed in a direction perpendicular to the mounting surface 13 using the pedestal 60 and the structure including the angular velocity detecting element 20 thereon as a mass and the pedestal lower surface adhesive 41 as a spring. The

  Also in this example, similarly to the above embodiment, the end surface of the base 60 and the wall surface 14 of the package 10 are connected via the base end surface adhesive 44 as the second adhesive. A spring-mass system having a vibration absorbing function using the adhesive 44 as a spring and the structure on the spring as a mass is formed in a direction parallel to the mounting surface 13.

  Thus, also with the angular velocity sensor device 200 of this embodiment, a spring-mass system having a vibration absorbing function is formed in a direction perpendicular to and parallel to the mounting surface 13 of the package 10 to absorb external vibration. An anti-vibration structure can be provided.

  Here, in the present embodiment, as shown in FIG. 4, the end surface of the pedestal 60 has a cutout portion 61 that is partially cut out, and the pedestal 60 has the cutout portion 61. The other end face is bonded and fixed to the wall surface 14 of the package 10 via a base end face adhesive 44.

  Further, as shown in FIGS. 3 and 4, the pad 31 of the circuit board 30 located under the pedestal 60 is peeking upward from the notch 61. Then, wire bonding is performed on the pad 31 of the circuit board 30 through the notch 61.

  In this example, the angular velocity detection element 20 and the circuit board 30, and the pad 31 of the circuit board 30 and the wiring of the package 10 are connected via the bonding wire 50 through the notch 61.

  In the angular velocity sensor device 200 of the present embodiment, for example, the circuit board 30, the pedestal 60, and the angular velocity detection element 20 are sequentially stacked on the mounting surface 13 of the package 10 via each adhesive, and then a notch portion. It is manufactured by performing wire bonding via 61.

  Further, in this example, the base 41 lower surface adhesive 41 having a vibration absorbing function is interposed between the lower surface of the base 60 and the circuit board 30, and the circuit board 30 and the mounting surface 13 are harder than the circuit board. It is fixed via an adhesive 42 for use.

  Thereby, the circuit board 30 is firmly fixed to the mounting surface 13 of the package 10, and when the wire bonding is performed on the circuit board 30 as in this example, the circuit board 30 is reliably held and the bonding property is improved.

  When the circuit board 30 is interposed between the pedestal 60 and the mounting surface 13 of the package 10 as in this embodiment, the pedestal lower surface adhesive 41 in FIG. The circuit board adhesive 42 may be a soft adhesive having a vibration absorbing function.

  That is, in this case, the base 60 is supported by the circuit board 30, and the circuit board adhesive 42 as the first adhesive having a vibration absorbing function is interposed between the circuit board 30 and the mounting surface 13. The same effect as that of the above-described embodiment can be obtained together with the adhesive 44 for the pedestal end surface as the second adhesive.

  Further, when the circuit board 30 is interposed between the pedestal 60 and the mounting surface 13 of the package 10 as in this embodiment, both the pedestal lower surface adhesive 41 and the circuit board adhesive 42 in FIG. 3 vibrate. A soft adhesive having an absorbing function may be used.

  That is, in this case, the adhesives 41 and 42 as the first adhesive having a vibration absorbing function are interposed between the base 60 and the circuit board 30 and between the circuit board 30 and the mounting surface 13. Thus, together with the pedestal end surface adhesive 44 as the second adhesive, the same effects as those of the above embodiment can be obtained.

(Other embodiments)
As described above, the angular velocity sensor device described above supports the angular velocity detection element 20 via the plate-like pedestal 60 disposed in parallel with the mounting surface 13 of the package 10, and the lower surface and the mounting surface of the pedestal 60. 13 is connected via a first adhesive 41 having a vibration absorbing function, and the end surface of the pedestal 60 is connected to a wall surface 14 of the package 10 via a second adhesive 44 having a vibration absorbing function. The configuration of each unit is not limited to the above embodiment.

  For example, the package 10 is not limited to the ceramic package described above, and the shape thereof is not limited to the illustrated example. That is, the package 10 only needs to have the mounting surface 13 on which the pedestal 60 that supports the angular velocity detection element 20 can be mounted and the wall surface 14 to which the end surface of the pedestal 60 is connected.

  Further, the electrical connection configuration of each part inside the package 10 is not limited to the above illustrated example. For example, the angular velocity detection element 20 and the circuit board 30 may not be directly connected by the bonding wire 50 as shown in FIG. 1, and the angular velocity detection element 20 and the package 10 are connected by the bonding wire 50. Then, the package 10 and the circuit board 30 may be connected by the bonding wire 50. By doing so, the angular velocity detection element 20 and the circuit board 30 may be electrically connected via the package 10.

  Further, the angular velocity detecting element 20 may be any element that has a vibrating body 21 and performs angular velocity detection using Coriolis force, and the direction of driving vibration and the direction of detected vibration are x, as shown in FIG. It is not limited to the y-axis.

  In the first embodiment, the circuit board 30 is interposed between the angular velocity detection element 20 and the pedestal 60. However, here, the circuit board is omitted, and the angular velocity detection element 20 is replaced with an element adhesive 43. It may be directly fixed to the base 60 via The pedestal 60 is for supporting the angular velocity detecting element 20, and may have a circuit board function.

  Further, in the method for manufacturing each angular velocity sensor device 100, 200 shown in the above embodiment, the respective parts 20, 30, 60 are sequentially stacked on the mounting surface 13 of the package 10 via the respective adhesives. However, the present invention is not limited to this. For example, a laminated body may be formed in advance on each of the parts 20, 30, 60 via an adhesive, and then the laminated body may be bonded onto the mounting surface 13 of the package 10.

  Further, the planar shape of the plate-like pedestal 60 and the opening shape of the opening portion 12 of the package 10 are not limited to the above-described rectangle, but are, for example, a circular shape, a triangular shape, a polygonal shape having five or more corners, and the like. Also good.

  Moreover, in the said embodiment, although the notch part 61 is provided in the edge part of the base 60, the circuit board 30 located under the base 60 is looked up through this notch part 61, and wire bonding is enabled. The shape of the notch 61 is not limited to the example shown in FIG. 4 as long as the pad 31 of the circuit board 30 is exposed.

1 is a schematic cross-sectional view of a vibration type angular velocity sensor device according to a first embodiment of the present invention. FIG. 2 is a top view of the angular velocity sensor device shown in FIG. 1. It is a schematic sectional drawing of the vibration type angular velocity sensor apparatus which concerns on 2nd Embodiment of this invention. FIG. 4 is a top view of the angular velocity sensor device shown in FIG. 3.

Explanation of symbols

10 ... package, 12 ... opening of package, 13 ... mounting surface of package,
14 ... Wall surface of package, 20 ... Angular velocity detection element, 21 ... Vibrating body, 30 ... Circuit board,
31 ... Pad of circuit board, 41 ... Adhesive for base surface, 42 ... Adhesive for circuit board,
44 ... Adhesive for pedestal end face, 60 ... pedestal, 61 ... notch of pedestal.

Claims (11)

An angular velocity detection element (20) having a vibrating body (21) is mounted on a mounting surface (13) of the package (10) via a first adhesive (41).
In the angular velocity sensor device, external vibration applied to the angular velocity detection element (20) is absorbed by elasticity of the first adhesive (41).
Between the said angular velocity detection element (20) and the said mounting surface (13), the plate-shaped base (60) arrange | positioned in the state in which the plate surface followed the said mounting surface (13) was parallel. Intervening,
The angular velocity detecting element (20) is supported on the pedestal (60),
The first adhesive (41) is interposed between the pedestal (60) and the mounting surface (13) to support the pedestal (60),
The package (10) has a wall surface (14) extending upward from the mounting surface (13) around the mounting surface (13),
Of the end face of the angular velocity detecting element (20) and the end face of the pedestal (60), only the end face of the pedestal (60) absorbs external vibration applied to the angular velocity detecting element (20) by elasticity. The angular velocity sensor device is connected to the wall surface (14) via an adhesive (44). The package (10) has an opening (12),
The bottom surface of the opening (12) is the mounting surface (13), and the side surface of the opening (12) is the wall surface (14) to be connected by the second adhesive (44). The angular velocity sensor device according to claim 1, wherein The planar size of the pedestal (60) is a size that can be inserted into the opening (12), and the planar shape of the pedestal (60) is similar to the opening shape of the opening (12). The angular velocity sensor device according to claim 2. The end surfaces facing each other among the end surfaces of the pedestal (60) are connected to the wall surface (14) via the second adhesive (44). The angular velocity sensor device according to one. The entire circumference of the end surface of the pedestal (60) is connected to the wall surface (14) via the second adhesive (44). The angular velocity sensor device described. The angular velocity sensor device according to any one of claims 1 to 5, wherein a circuit board (30) is interposed between the angular velocity detection element (20) and the pedestal (60). . A circuit board (30) is interposed between the pedestal (60) and the mounting surface (13),
The circuit board (30) is supported on the mounting surface (13),
The first adhesive (41) is interposed between the pedestal (60) and the circuit board (30) among the pedestal (60) and the mounting surface (13) . The angular velocity sensor device according to claim 1 or 2. A circuit board (30) is interposed between the pedestal (60) and the mounting surface (13),
The pedestal (60) is supported on the circuit board (30),
The first adhesive (42) is interposed between the circuit board (30) and the mounting surface (13) among the pedestal (60) and the mounting surface (13) . The angular velocity sensor device according to claim 1 or 2, wherein A circuit board (30) is interposed between the pedestal (60) and the mounting surface (13),
The first adhesive (41, 42) is formed between the pedestal (60) and the circuit board (30) and between the pedestal (60) and the mounting surface (13) and the circuit board. The angular velocity sensor device according to claim 1 or 2, wherein the angular velocity sensor device is interposed between the mounting surface (30) and the mounting surface (13). The end surface of the pedestal (60) has a cutout portion (61) partly cut out.
The pad (31) of the circuit board (30) is peeking upward from the notch (61),
10. The angular velocity sensor device according to claim 8, wherein wire bonding is performed to the pad (31) of the circuit board (30) through the notch (61). 11. The angular velocity sensor device according to claim 1, wherein the pedestal (60) is heavier than the angular velocity detection element (20).

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