JP5445114B2 - 振動片および発振器 - Google Patents

振動片および発振器 Download PDF

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Publication number
JP5445114B2
JP5445114B2 JP2009291927A JP2009291927A JP5445114B2 JP 5445114 B2 JP5445114 B2 JP 5445114B2 JP 2009291927 A JP2009291927 A JP 2009291927A JP 2009291927 A JP2009291927 A JP 2009291927A JP 5445114 B2 JP5445114 B2 JP 5445114B2
Authority
JP
Japan
Prior art keywords
region
vibrating
resonator element
vibrating arm
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009291927A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010233204A (ja
JP2010233204A5 (OSRAM
Inventor
明法 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009291927A priority Critical patent/JP5445114B2/ja
Publication of JP2010233204A publication Critical patent/JP2010233204A/ja
Publication of JP2010233204A5 publication Critical patent/JP2010233204A5/ja
Application granted granted Critical
Publication of JP5445114B2 publication Critical patent/JP5445114B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16195—Flat cap [not enclosing an internal cavity]

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2009291927A 2009-03-02 2009-12-24 振動片および発振器 Expired - Fee Related JP5445114B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009291927A JP5445114B2 (ja) 2009-03-02 2009-12-24 振動片および発振器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009047641 2009-03-02
JP2009047641 2009-03-02
JP2009291927A JP5445114B2 (ja) 2009-03-02 2009-12-24 振動片および発振器

Publications (3)

Publication Number Publication Date
JP2010233204A JP2010233204A (ja) 2010-10-14
JP2010233204A5 JP2010233204A5 (OSRAM) 2013-01-31
JP5445114B2 true JP5445114B2 (ja) 2014-03-19

Family

ID=42666791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009291927A Expired - Fee Related JP5445114B2 (ja) 2009-03-02 2009-12-24 振動片および発振器

Country Status (2)

Country Link
US (1) US8183750B2 (OSRAM)
JP (1) JP5445114B2 (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110227450A1 (en) * 2010-03-18 2011-09-22 Seiko Epson Corporation Resonator body, resonator device, and electronic device
US20110227451A1 (en) * 2010-03-18 2011-09-22 Seiko Epson Corporation Resonator body, resonator device, and electronic device
JP5062784B2 (ja) * 2010-03-31 2012-10-31 日本電波工業株式会社 音叉型圧電振動片及び圧電デバイス
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
JP5617392B2 (ja) 2010-07-09 2014-11-05 セイコーエプソン株式会社 振動片、振動子及び発振器
JP5659585B2 (ja) 2010-07-09 2015-01-28 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP2013030850A (ja) * 2011-07-26 2013-02-07 Seiko Epson Corp 振動デバイスおよび電子機器
JP6119134B2 (ja) * 2012-07-19 2017-04-26 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146588A (en) * 1976-05-31 1977-12-06 Matsushima Kogyo Kk Quartz oscillator
JPS54102889A (en) * 1978-01-26 1979-08-13 Seiko Epson Corp Crystal oscillator of diapason type
JPS5538785A (en) * 1978-09-12 1980-03-18 Murata Mfg Co Ltd Voltage tuning fork
JPH0232229U (OSRAM) * 1988-08-23 1990-02-28
US5987987A (en) * 1997-04-14 1999-11-23 Denso Corporation Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
JP3475928B2 (ja) * 1998-07-24 2003-12-10 セイコーエプソン株式会社 圧電振動子およびその製造方法
JP4026074B2 (ja) 2003-06-30 2007-12-26 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器
JP4694953B2 (ja) * 2005-11-30 2011-06-08 セイコーインスツル株式会社 圧電振動片の製造方法、圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP2007258918A (ja) * 2006-03-22 2007-10-04 Epson Toyocom Corp 圧電デバイス
WO2009143492A1 (en) * 2008-05-23 2009-11-26 Statek Corporation Piezoelectric resonator

Also Published As

Publication number Publication date
JP2010233204A (ja) 2010-10-14
US20100219898A1 (en) 2010-09-02
US8183750B2 (en) 2012-05-22

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