JP5431179B2 - Circuit board fixing device and circuit board inspection device - Google Patents

Description

  The present invention relates to a circuit board fixing device that includes a clamping mechanism that clamps a circuit board and fixes the circuit board, and a circuit board inspection device that includes the circuit board fixing device and performs electrical inspection on the circuit board.

  As this type of circuit board fixing device clamping mechanism, a fixing device (circuit board fixing device) disclosed by the applicant in Japanese Patent Application Laid-Open No. 2009-117740 is known. The fixing device includes a base body, a pair of beam members, a moving mechanism, a plurality of clamping mechanisms, and the like. In this case, each beam member is arranged in a second direction (second direction) orthogonal to the first direction so that the first direction (first direction) and the length direction of the base body coincide with each other. It is arranged on the base body so as to be movable (slidable) along. Further, the moving mechanism moves the beam members along the second direction so as to be close to each other. The clamp mechanism is configured to include a main body portion, a slide portion, and a rotation portion, and clamps the edge portion of the circuit board by the front end portion of the main body portion and the front end portion of the rotation portion. In the clamp mechanism, the main body portion is fitted in the concave portion of the beam member, and the first air cylinder disposed in the main body portion projects and releases the rod toward the wall surface forming the concave portion. It is moved along the direction.

In the fixing device configured as described above, in a state where the edge portion of the circuit board is clamped by each clamping mechanism, the circuit board is moved in the first direction so as to be separated from each other. It can be pulled along one direction. For this reason, in this fixing device, for example, when deformation such as wrinkles along the second direction occurs in the circuit board, the deformation can be corrected. Further, in a state where the edge of the circuit board is clamped by each clamping mechanism, the circuit board can be pulled along the second direction by moving each beam member along the second direction. For this reason, in this fixing device, for example, when deformation such as wrinkles along the first direction occurs in the circuit board, the deformation can be corrected.
Japanese Patent Laying-Open No. 2009-117740 (page 5-10, FIGS. 2 and 5)

However, the above fixing device has the following problems to be improved. That is, in this fixing device, each clamp mechanism is moved along the first direction, so that deformations such as wrinkles along the second direction in the circuit board are corrected, and each beam member is moved along the second direction. By doing so, deformation such as wrinkles along the first direction in the circuit board is corrected. In this case, the fixing device has a structure in which each clamp mechanism is individually moved along the first direction. Therefore, when deformation such as wrinkles along the second direction is partially generated, the deformation is not caused. occur a clamping mechanism that clamps the site is by moving in Tsu along the first direction, it is possible to reliably correct the deformation. However, this fixing device has a structure in which the beam members are moved to move the clamp mechanisms disposed on the beam members along the second direction by the same movement amount at a time. Therefore, in this fixing device, when deformation such as wrinkles along the first direction is partially generated, it is difficult to individually adjust the movement amount of each clamp mechanism along the second direction. Such deformation may not be sufficiently corrected, and improvement of this point is desired. In addition, as shown in FIG. 17, when each clamp mechanism is moved along the second direction B by the same amount of movement at a time and the circuit board 100 is pulled along the second direction B, the second in the circuit board. In some cases, a slack may occur at the center of the edge along the direction B, and improvement of this point is also desired.

  The present invention has been made in view of such a problem, and a main object of the present invention is to provide a circuit board fixing device and a circuit board inspection apparatus that can reliably correct deformation of the circuit board while preventing the occurrence of slack. .

In order to achieve the above object, a circuit board fixing device according to claim 1 is provided with a circuit board fixing base and a circuit to be fixed that is disposed on the base so as to be movable along a predetermined first direction. A circuit board fixing device, comprising: a plurality of clamp mechanisms for clamping edges along the first direction of the board; and a moving mechanism for moving the clamp mechanism, wherein the circuit board is fixed. At least one of the mechanisms is configured such that, in a state where the edge portion is clamped, a rotation direction as a combined direction in which the first direction and a second direction orthogonal to the first direction are combined , and the first direction. even along any direction in the tilting direction as the synthetic direction inclined Te is composed of movable synthetic direction movable clamping mechanism, the moving mechanism, the synthesis side the synthesized direction movable clamping mechanism It is moved along the.

  The circuit board fixing device according to claim 2 is the circuit board fixing device according to claim 1, wherein the clamping mechanism clamps each of a plurality of portions of the one edge portion along the first direction in the circuit board. A plurality of first clamping mechanisms, and a plurality of other edge portions that are arranged to face each of the first clamping mechanisms on a one-to-one basis and that face the one edge portion of the circuit board. And at least one of the first clamp mechanism and the second clamp mechanism facing each other is constituted by the composite direction movable clamp mechanism.

  According to a third aspect of the present invention, there is provided the circuit board fixing device according to the second aspect, wherein both the first clamp mechanism and the second clamp mechanism that face each other are configured by the composite direction movable clamp mechanism. The circuit board fixing device according to claim 2.

  According to a fourth aspect of the present invention, in the circuit board fixing device according to the second or third aspect, the base has a base body and a length direction that coincides with the first direction. A pair of beam members disposed on the base body, and a contact / separation mechanism for contacting and separating the beam members from each other, wherein the first clamp mechanism is configured to move in the length direction of one of the pair of beam members. The second clamp mechanism is disposed along the length direction of the other of the pair of beam members.

  The circuit board fixing device according to claim 5 is the circuit board fixing device according to claim 4, wherein the edge portion of the circuit board is clamped by being respectively fixed to the central portion in the length direction of each beam member. A center clamp mechanism is provided, and two of the first clamp mechanisms are disposed on one of the pair of beam members, and the first clamp mechanisms are separated from each other with the center clamp mechanism in the beam member interposed therebetween. Two second clamp mechanisms are arranged at two positions, respectively, and the second clamp mechanisms are arranged on the other of the pair of beam members, and the second clamp mechanisms are separated from each other with the center clamp mechanism in the beam members interposed therebetween. Are arranged at two positions.

  The circuit board fixing device according to claim 6 is the circuit board fixing device according to claim 4 or 5, wherein the circuit board fixing device is fixed to the base body and clamps an edge portion of the circuit board along the second direction. An auxiliary clamp mechanism is provided, and the contact / separation mechanism causes the pair of beam members to contact and separate from each other around a fixed position where the auxiliary clamp mechanism is fixed.

  The circuit board fixing device according to claim 7 is the circuit board fixing device according to any one of claims 1 to 6, wherein the composite direction movable clamp mechanism is movable in a recess formed in the base. A main body portion that is accommodated in the circuit board and supports one side of the edge portion of the circuit board; A pressing portion that presses the side and clamps the edge portion together with the main body portion, and the moving mechanism includes a first pressing portion that presses the main body portion along the first direction, and the main body portion as described above. A second pressing portion that presses along the second direction, and moves the movable clamping mechanism in the combining direction along the combining direction by pressing by the first pressing portion and the second pressing portion.

  The circuit board fixing device according to claim 8 is the circuit board fixing device according to claim 7, wherein the main body portion is formed in a substantially rectangular plate shape, and the concave portion is larger than the main body portion. The first pressing part is formed in a substantially rectangular shape in plan view, and the first pressing part is formed in the main body part and has an opening on a side surface along the second direction in the main body part, and into the first cylinder. And a first piston that slides in the first cylinder along the first direction by supplying air, and the main body portion is moved to the first by pressing against the inner peripheral wall of the recess when the first piston slides. The second pressing portion is formed in the main body portion and has a second cylinder having an opening on a side surface along the first direction in the main body portion, and into the second cylinder. Before by air supply A second piston that slides in the second cylinder along a second direction, and presses the main body along the second direction by pressing against the inner peripheral wall of the recess when the second piston slides. To do.

  According to a ninth aspect of the present invention, there is provided a circuit board inspection apparatus that contacts the circuit board fixing device according to any one of the first to eighth aspects and a circuit board fixed by the circuit board fixing apparatus. And a probing device for performing an electrical inspection on the circuit board based on an electrical signal input through the inspection probe.

The circuit board fixing device according to claim 1 and the circuit board inspection device according to claim 9, wherein a plurality of clamp mechanisms that can move along the first direction by clamping edges along the first direction in the circuit board. At least one is composed of a composite direction movable clamp mechanism that can move along a composite direction in which the first direction and a second direction orthogonal to the first direction are combined, and the moving mechanism combines the composite direction movable clamp mechanism Move along the direction. For this reason, according to this circuit board fixing device and circuit board inspection apparatus, both the direction along the first direction and the direction along the second direction of the edge of the circuit board clamped by the composite direction movable clamp mechanism Can be pulled individually towards Therefore, according to the circuit board fixing device and the circuit board inspection apparatus, when deformation such as wrinkles along the second direction in the circuit board partially occurs in the vicinity of the composite direction movable clamp mechanism, the composite direction is movable. In addition to being able to individually correct the deformation by the moving component along the first direction of the movement along the combining direction in the clamp mechanism, deformation such as wrinkles along the first direction is combined. Even when it occurs partially in the vicinity of the directional movable clamp mechanism, the deformation is individually corrected by the moving component along the second direction of the movement along the combined direction in the combined directional movable clamp mechanism. be able to. In addition, even if slack occurs at the center of the edge along the second direction in the circuit board, the edge of the edge along the first direction is clamped by the compound direction movable clamp mechanism, and the compound direction movable clamp By moving the mechanism along the combining direction, the slack can be reliably corrected by the moving component along the second direction of the movement along the combining direction in the combining direction movable clamp mechanism. Therefore, according to the circuit board fixing device and circuit board inspection apparatus for this, it is possible to reliably correct the deformation of the circuit board while preventing the occurrence of slack.

  Further, in the circuit board fixing device according to claim 2 and the circuit board inspection device according to claim 9, a plurality of first clamping mechanisms that respectively clamp a plurality of portions of one edge portion along the first direction in the circuit board. And a plurality of second clamp mechanisms that are arranged to face each of the first clamp mechanisms and clamp a plurality of other edge portions of the circuit board, respectively, and are opposed to each other. At least one of the mechanisms is composed of a composite direction movable clamp mechanism. Therefore, according to the circuit board fixing device and the circuit board inspection device, deformations such as wrinkles are partially generated in the plurality of portions clamped by the first clamp mechanism and the second clamp mechanism facing each other on the circuit board. Even in such a case, these deformations can be individually corrected.

  In the circuit board fixing device according to the third aspect and the circuit board inspection apparatus according to the ninth aspect, both the first clamp mechanism and the second clamp mechanism that are opposed to each other are constituted by a composite direction movable clamp mechanism. Therefore, according to the circuit board fixing device and the circuit board inspection device, deformations such as wrinkles are partially generated in the plurality of portions clamped by the first clamp mechanism and the second clamp mechanism facing each other on the circuit board. Since the part can be pulled by the two clamping mechanisms at the time, the deformation can be corrected more reliably.

  Further, according to the circuit board fixing device according to claim 4 and the circuit board inspection device according to claim 9, the base is configured by including a pair of beam members that are brought into and out of contact with each other by the contact and separation mechanism. By arranging the first clamp mechanism along the length direction of the beam member and arranging the second clamp mechanism along the length direction of the other beam member, the first clamp mechanism and the second clamp mechanism are the same. For example, when deformation such as wrinkles along the first direction occurs uniformly over the entire range between both ends of the circuit board, the deformation can be made even. Can be stretched and corrected.

  Moreover, according to the circuit board fixing device according to claim 5 and the circuit board inspection device according to claim 9, the positions separated from each other with the center clamp mechanism fixed to the center portion in the length direction of each beam member By disposing two clamp mechanisms on each side, each clamp mechanism is moved in the direction away from the center clamp mechanism along the first direction with the center clamp mechanism as a center, thereby moving the circuit board along the first direction. Can be pulled evenly. For this reason, for example, even if the circuit board is deformed so as to bend along the first direction, the circuit board can be corrected to a sufficiently flat state.

  Further, according to the circuit board fixing device according to claim 6 and the circuit board inspection device according to claim 9, the contact / separation mechanism includes an auxiliary clamp mechanism that clamps an edge portion along the second direction of the circuit board. However, by moving both the beam members along the second direction so as to contact and separate from each other around the fixed position of the auxiliary clamp mechanism, the circuit board can be pulled evenly along the second direction. For this reason, for example, even if the circuit board is deformed so as to bend along the second direction, the circuit board can be corrected to a sufficiently flat state.

  In the circuit board fixing device according to claim 7 and the circuit board inspection device according to claim 9, the synthetic direction movable clamp mechanism includes a main body portion movably accommodated in a recess formed in the beam member. The moving mechanism is configured by including a first pressing portion configured to press the main body portion along the first direction and a second pressing portion pressing the main body portion along the second direction, and the first pressing portion. And a synthetic | combination direction movable clamp mechanism is moved along a synthetic | combination direction by the press of the main-body part by a 2nd press part. For this reason, according to this circuit board fixing device and circuit board inspection apparatus, the moving mechanism can be simply configured.

  In the circuit board fixing device according to claim 8 and the circuit board inspection device according to claim 9, the first cylinder formed in the main body portion having an opening on a side surface along the second direction in the main body portion. And a first piston that slides in the first cylinder along the first direction by supplying air into the first cylinder, the first pressing portion is configured, and a side surface along the first direction in the main body portion is formed. The second pressing portion includes a second cylinder having an opening and formed in the main body, and a second piston that slides in the first cylinder along the second direction by supplying air to the second cylinder. It is configured. That is, in the circuit board fixing device and the circuit board inspection device, the first pressing portion and the second pressing portion are built in the main body portion. Therefore, according to the circuit board fixing device and the circuit board inspection apparatus, the composite direction movable clamp mechanism can be sufficiently miniaturized as compared with the configuration in which the first pressing portion and the second pressing portion are disposed outside the main body portion. can do.

  Further, according to the circuit board inspection apparatus of the ninth aspect, even if the circuit board fixing device is provided with the circuit board fixing device, the circuit board fixing device reliably deforms the circuit board. Therefore, the inspection probe can be reliably brought into contact with the inspection object (for example, a conductor pattern) of the circuit board, so that the inspection can be performed accurately.

1 is a configuration diagram showing a configuration of an inspection apparatus 1. FIG. 3 is a plan view of the fixing device 2. FIG. It is a top view in the state where clamp mechanisms 14a and 14b (14c and 14d) and center clamp mechanism 15a (15b) were arranged in beam member 12a (12b). It is a perspective view in the state where clamp mechanisms 14a and 14b (14c and 14d) and center clamp mechanism 15a (15b) were arranged in beam member 12a (12b). It is a top view in the state where main part 41 of clamp mechanism 14b (14a, 14c, 14d) was stored in crevice 91 of beam member 12a (12b). It is a perspective view which shows the structure of the recessed part 91 in the beam member 12a. It is a perspective view of clamp mechanism 14 in the state where rotation part 43 was removed. FIG. 6 is a first explanatory view explaining the operation of the clamp mechanism 14. FIG. 10 is a second explanatory view for explaining the operation of the clamp mechanism 14. FIG. 10 is a third explanatory diagram for explaining the operation of the clamp mechanism 14. 3 is a perspective view of an auxiliary clamp mechanism 16. FIG. FIG. 6 is a first explanatory view explaining the operation of the auxiliary clamp mechanism 16. FIG. 10 is a second explanatory view for explaining the operation of the auxiliary clamp mechanism 16. 5 is an explanatory diagram for explaining a method of fixing the circuit board 100 to the fixing device 2. FIG. FIG. 6 is a first explanatory diagram illustrating the operation of the fixing device 2. FIG. 6 is a second explanatory diagram for explaining the operation of the fixing device 2. It is explanatory drawing explaining operation | movement of the conventional circuit board fixing device.

  Embodiments of a circuit board fixing device and a circuit board inspection apparatus according to the present invention will be described below with reference to the accompanying drawings.

  First, the configuration of the inspection apparatus 1 shown in FIG. 1 will be described. The inspection device 1 is an example of a circuit board inspection device, and includes a fixing device 2, a probing device 3, and a control unit 4 as shown in the figure, and is configured to be able to perform an electrical inspection on the circuit board 100. ing. The circuit board 100 includes, as an example, a board body formed in a rectangular shape and a conductor pattern (not shown) formed on the surface of the board body.

  The fixing device 2 is an example of a circuit board fixing device. As shown in FIG. 2, the base 5, the contact / separation mechanism 13, and the clamp mechanisms 14a to 14d (an example of a composite direction movable clamp mechanism, When not distinguished, also referred to as “clamp mechanism 14”, center clamp mechanisms 15a and 15b (hereinafter also referred to as “center clamp mechanism 15” when not distinguished), and auxiliary clamp mechanisms 16a and 16b (hereinafter referred to as “auxiliary clamp mechanism when not distinguished from each other). 16 ”), a compressor 17 (see FIG. 1), and a solenoid valve 18 (see FIG. 1).

  As shown in FIG. 2, the base 5 includes a base body 11 and a pair of beam members 12 a and 12 b (hereinafter, also referred to as “beam members 12” when not distinguished). As shown in the figure, the base body 11 is formed in a substantially rectangular plate shape as an example. A substantially rectangular opening 11 a is formed at the center of the base body 11. The beam member 12 is formed in a long plate shape as a whole, as shown in FIGS. Further, as shown in FIGS. 3 to 6, the beam member 12 is fitted with two concave portions 91 for accommodating a main body 41 described later in the clamp mechanism 14 and a main body 44 of the center clamp mechanism 15 described later. Two recesses 92 are formed. As shown in FIGS. 5 and 6, the recess 91 has a slightly larger opening area than the main body 41 and is formed in a substantially rectangular shape (rectangular shape) in plan view. Specifically, as shown in FIG. 5, the recess 91 is about 2 mm between the side surfaces 41 a to 41 d of the main body 41 and the inner peripheral walls 91 a to 91 d of the recess 91 in a state where the main body 41 is accommodated. The gap 401 is formed in such a size. FIG. 5 shows a state in which a slide part 42 and a rotation part 43 (to be described later) in the clamp mechanism 14b are removed.

  Further, the beam member 12 is slidably disposed on the base body 11 such that the first direction A of the base body 11 shown in FIG. Specifically, the beam member 12a is disposed at the edge of the opening 11a in the base body 11 along the second direction B (direction orthogonal to the first direction A) of the base body 11 shown in FIG. Both end portions are fixed to sliders 22a and 22b that are movable on the rails 21a and 21b. The beam member 12b is fixed at both ends thereof to sliders 22c and 22d that can move on the rails 21a and 21b.

  As shown in FIG. 2, the contact / separation mechanism 13 includes a motor 31, belts 32a to 32c (hereinafter also referred to as “belt 32” when not distinguished), a rotating shaft 33 and pulleys 34a to 34f (hereinafter referred to as “pulley” when not distinguished). 34 ”). The motor 31 rotates the drive shaft 31 a according to the control of the control unit 4. As shown in the figure, the belt 32a is bridged between a pulley 34a attached to the drive shaft 31a of the motor 31 and a pulley 34b attached to the rotary shaft 33, and the torque ( Rotational force) is transmitted to the rotary shaft 33. The belts 32b and 32c are timing belts (toothed belts) between the pulley 34c attached to the rotating shaft 33 and the pulley 34d attached to the base body 11, and to the rotating shaft 33. They are bridged between the pulley 34e attached and the pulley 34f attached to the base body 11.

  Further, the belts 32b and 32c are engaged with a rack (not shown) formed on the sliders 22a and 22b at a predetermined portion on the upper side (front side in FIG. 2), and on the lower side (the back side in FIG. 2). ) Is engaged with a rack formed on the sliders 22c and 22d. With this configuration, when the rotary shaft 33 rotates in the direction of the arrow X1, the sliders 22a and 22b are moved in the direction of the arrow B1, and the sliders 22c and 22d are moved in the direction of the arrow B2. On the contrary, when the rotating shaft 33 rotates in the direction of the arrow X2, the sliders 22a and 22b are moved in the direction of the arrow B2, and the sliders 22c and 22d are moved in the direction of the arrow B1. That is, the contact / separation mechanism 13 includes a beam member 12a having both ends fixed to the sliders 22a and 22b, and a beam member 12b having both ends fixed to the sliders 22c and 22d in the length direction of the rails 21a and 21b. Are moved along the second direction B so as to be close to and away from each other around the center (fixed positions of auxiliary clamp mechanisms 16a and 16b described later).

  The clamp mechanisms 14a and 14b correspond to the first clamp mechanism, and are arranged at positions spaced apart from each other with the center clamp mechanism 15a in the beam member 12a interposed therebetween as shown in FIG. One of the edge portions along A (for example, the edge portion 102a shown in FIG. 14) can be clamped. Further, the clamp mechanisms 14c and 14d correspond to a second clamp mechanism, and as shown in FIG. 2, are positioned away from each other with the center clamp mechanism 15b in the beam member 12b interposed therebetween, and the clamp mechanisms 14a and 14b. The other one of the edges along the first direction A in the circuit board 100 (for example, the edge 102b shown in FIG. 14) can be clamped.

  Moreover, the clamp mechanisms 14a-14d are each provided with the main-body part 41, the slide part 42, and the rotation part 43, as shown in FIG. The clamping mechanisms 14a and 14d and the clamping mechanisms 14b and 14c are configured except that the constituent elements (particularly the air cylinders 51 to 53 and 55 and the springs 61 to 65) are symmetrically arranged. It is constituted similarly. Therefore, in FIGS. 5 and 7 and FIGS. 8 to 10, 15, and 16 described later, the ramp mechanism 14b is illustrated and described as a representative of the clamp mechanisms 14a to 14d. As shown in the drawing, the main body 41 is formed in a plate shape having a substantially rectangular shape (rectangular shape) in plan view. Moreover, as shown to FIGS. 3-5, the lower part (refer FIG. 4) is accommodated in the recessed part 91 currently formed in the beam member 12, as the main-body part 41 is shown. Further, the movement of the main body 41 in the vertical direction (thickness direction) is restricted by screws 402 and 402 (see FIG. 3) inserted through the insertion holes 41e and 41e (see FIG. 5).

  In this case, as shown in FIG. 5, when the main body 41 is accommodated in the recess 91, a gap of about 2 mm is provided between the side surfaces 41 a to 41 d of the main body 41 and the inner peripheral walls 91 a to 91 d of the recess 91. 401 has occurred. Further, in the main body 41, the diameters of the insertion holes 41 e and 41 e are formed to be about 2 mm larger than the diameter of the screw 402. For this reason, the main body 41 has the first direction A, the second direction B, and the composite direction (specifically, the first direction A and the second direction B) by the gap 401 in the recess 91 (specifically, It moves with respect to the beam member 12 (that is, with respect to the base 5) along the rotation direction F shown in FIG. 15 and the inclination direction G inclined with respect to the length direction of the beam member 12 shown in FIG. It is possible to do.

  Further, when the circuit board 100 is fixed using the fixing device 2, the main body 41 has one end 101 a (see FIG. 10) side of the edge of the circuit board 100 at its tip end 204 (upper left portion in the figure). ). Further, as shown in FIG. 7, the main body portion 41 is formed with a concave portion 93 into which the slide portion 42 can be fitted.

  As shown in FIG. 5, the main body 41 is provided with cylinders 51 and 55 and springs 61, 64 and 65. The air cylinder 51 corresponds to a first pressing portion, and is oriented in the first direction A away from the center of the opening 11a (see FIG. 2) of the base body 11 (in the clamp mechanisms 14a and 14c, the same figure). The main body 41 is pressed in the direction of the arrow A2 shown in FIG. 1, and in the clamp mechanisms 14b and 14d (the direction of the arrow A1 shown in the figure). Specifically, as shown in the figure, the air cylinder 51 includes a cylinder 51a and a piston 51b. The cylinder 51a corresponds to the first cylinder, is formed in the main body 41, and is a side surface (clamp mechanism 14a) that is located on the center side of the base body 11 among the side surfaces along the second direction B in the main body 41. , 14c, and the clamp mechanism 14b, 14d is formed by a circular hole in plan view having an opening on the side surface 41c). In this case, the formation position of the cylinder 51a is defined on the end portion side located on the central portion side of the base body 11 on the side surface described above. An air supply insertion hole 51c is formed at the bottom of the cylinder 51a, and an air coupler 51e (see FIG. 7) is connected to the insertion hole 51c.

  As shown in FIG. 5, the piston 51b is accommodated in the cylinder 51a, and slides in the cylinder 51a by supplying and stopping supply of air into the cylinder 51a through the insertion hole 51c. In this case, as the piston 51b slides toward the opening side of the cylinder 51a, the tip of the rod 51d attached to the piston 51b is moved to the cylinder 51a of the inner peripheral wall of the recess 91 along the second direction B. The inner peripheral wall (the inner peripheral wall 91a shown in the figure for the clamp mechanisms 14a and 14c and the inner peripheral wall 91c shown in the figure for the clamp mechanisms 14b and 14d) facing the side surface of the formed main body portion 41 is pressed. The main body 41 is pressed along the first direction A in a direction away from the center of the base main body 11 by the reaction force. The spring 61 has a side surface opposite to the side surface on which the cylinder 51a is formed in the main body 41 (a side surface 41c shown in the figure for the clamp mechanisms 14a and 14c and a side surface 41a shown in the figure for the clamp mechanisms 14b and 14d). In the circular hole in plan view formed in the direction toward the center of the base body 11 along the first direction A (in the clamp mechanisms 14a and 14c, the direction of the arrow A1 shown in FIG. In the mechanisms 14b and 14d, the main body 41 is pressed in the direction of the arrow A2 shown in FIG.

  The air cylinder 55 corresponds to a second pressing portion, and is separated from the center portion of the base body 11 (opening portion 11a) along the second direction B (in the clamp mechanisms 14a and 14b, the arrow B2 shown in FIG. 5). And the clamp mechanism 14c, 14d press the main body 41 in the direction of the arrow B1 shown in FIG. Specifically, the air cylinder 55 includes a cylinder 55a and a piston 55b as shown in FIG. The cylinder 55a corresponds to a second cylinder, is formed in the main body 41, and is a side surface (clamp mechanism 14a) located on the center side of the base body 11 among the side surfaces along the first direction A in the main body 41. , 14b, and the clamp mechanism 14c, 14d has a circular hole in plan view having an opening on the side surface 41b). In this case, the formation position of the cylinder 55a is defined on the end side away from the central portion of the base body 11 along the first direction A on the side surface. Further, an insertion hole 55c for supplying air is formed at the bottom of the cylinder 55a, and an air coupler 55e (see FIG. 7) is connected to the insertion hole 55c.

  As shown in FIG. 5, the piston 55b is accommodated in the cylinder 55a, and slides in the cylinder 55a by supplying and stopping supply of air into the cylinder 55a through the insertion hole 55c. In this case, as the piston 55b slides toward the opening side of the cylinder 55a, the tip of the rod 55d attached to the piston 55b is connected to the cylinder 55a of the inner peripheral wall of the recess 91 along the first direction A. The inner peripheral wall (the inner peripheral wall 91d shown in the figure for the clamp mechanisms 14a and 14b and the inner peripheral wall 91b shown in the figure for the clamp mechanisms 14c and 14d) facing the side surface of the formed main body 41 is pressed, The main body 41 is pressed along the second direction B in a direction away from the center of the base main body 11 by the reaction force. The springs 64 and 65 are opposite to the side surface of the main body 41 where the cylinder 55a is formed (the side surfaces 41b shown in the figure for the clamp mechanisms 14a and 14b and the side surfaces shown in the figure for the clamp mechanisms 14c and 14d). 41d) are respectively accommodated in circular holes in a plan view and are directed in the second direction B toward the center of the base body 11 (in the clamp mechanisms 14a and 14b, the arrow B1 shown in FIG. The main body 41 is pressed in the direction and the direction of the arrow B2 shown in FIG. The moving mechanism 19 is configured by the air cylinders 51 and 55 (that is, the first pressing portion and the second pressing portion).

  As shown in FIG. 7, the slide part 42 is fitted in the recess 93 of the main body part 41 so as to be slidable along the second direction B (arranged in the main body part 41). The slide portion 42 includes a pair of air cylinders 52 and a pair of springs 62, and the rod of each air cylinder 52 faces the wall surface 202 on the base end portion 208 side of the main body portion 41 constituting the recess 93. It slides along the 2nd direction B by making 52a project (or projecting cancellation | release). Further, the slide portion 42 is biased toward the base end portion 208 side of the main body portion 41 by the elastic force of the spring 62 as shown in FIG. 8 in a state where air is not supplied to the air cylinder 52.

  Further, as shown in FIG. 7, the slide portion 42 includes a hinge portion 71 that supports the turning portion 43 so as to be rotatable about a turning shaft 71a parallel to the first direction A as a fulcrum (center), and a pair of air cylinders. 53 and a spring 63. In this case, the rod 53a of each air cylinder 53 protrudes (or is released from the protrusion) toward the lower surface 203 on the base end portion 209 side of the rotating portion 43 supported by the hinge portion 71, whereby the distal end portion of the main body portion 41. The rotating part 43 is rotated in a direction in which 204 and the distal end part 205 of the rotating part 43 come into contact with and away from each other (in the direction of arrow C shown in the figure).

  The rotating portion 43 corresponds to a pressing portion, and when the circuit board 100 is fixed using the fixing device 2, the tip portion 205 and the tip portion 204 of the main body portion 41 are close to each other as shown in FIG. Is rotated by the air cylinder 53 in the direction (direction of the arrow C1 shown in the figure), whereby the other surface 101b of the edge of the circuit board 100 is pressed by the front end portion 205 to the front end of the main body 41. The edge part of the circuit board 100 is clamped together with the part 204. Further, in a state in which air is not supplied to the air cylinder 53, the rotating portion 43 is in a posture in which the tip portion 205 is separated from the tip portion 204 of the main body portion 41 by the elastic force of the spring 63, as shown in FIG. Is maintained.

  As shown in FIG. 4, the center clamp mechanism 15 includes a main body portion 44 and the above-described slide portion 42 and rotating portion 43. The main body 44 is configured in substantially the same manner as the main body 41 described above except that the air cylinders 51 and 55 and the springs 61, 64 and 65 are not provided. Further, the main body 44 is fixed to the central portion in the length direction of the beam member 12 in a state of being fitted in the recess 91 of the beam member 12 (the movement in the first direction A and the second direction B is restricted). ) Clamp the edge of the circuit board 100. That is, the center clamp mechanism 15 is configured similarly to the clamp mechanism 14 except that the main body 44 does not slide in the first direction A and the second direction B.

  As shown in FIG. 2, each auxiliary clamp mechanism 16 is fixed to the center portion (fixed position) in the width direction of the base body 11 at the edge of the opening 11a so as to face each other with the opening 11a interposed therebetween. Has been. Further, the auxiliary clamp mechanism 16 is configured to be able to clamp other edges except for the edge of the circuit board 100 clamped by the clamp mechanism 14 and the center clamp mechanism 15. Specifically, as shown in FIG. 11, the auxiliary clamp mechanism 16 includes a main body portion 81, a slide portion 82, and a rotation portion 83. As shown in FIG. 13, the main body 81 supports the one surface 101 a side of the edge of the circuit board 100 with the tip 206 when the circuit board 100 is fixed using the fixing device 2. Further, the main body portion 81 is formed with a concave portion 94 into which the slide portion 82 can be fitted.

  As shown in FIG. 11, the slide portion 82 is fitted in the concave portion 94 of the main body portion 81 so as to be slidable along the first direction A. Further, as shown in the figure, the slide portion 82 includes a hinge portion (not shown) that rotatably supports the rotation portion 83 around a rotation axis parallel to the second direction B. ing. The rotating portion 83 is attached to the hinge portion of the slide portion 82, and, as shown in FIG. 13, the direction in which the distal end portion 206 of the main body portion 81 and the distal end portion 207 are close to each other (the direction of the arrow E1 shown in FIG. ), The other surface 101b of the edge of the circuit board 100 is pressed by the tip portion 207, and the circuit board 100 is clamped together with the tip portion 206 of the main body 81.

  Further, as shown in FIG. 11, the auxiliary clamp mechanism 16 includes an air cylinder 54 and springs 66 and 67. In this case, by projecting (or releasing the projection) the rod 54a of the air cylinder 54, the slide portion 82 disposed in the recess 94 is moved along the first direction A shown in FIG. Is rotated in the direction of arrow E shown in FIG. When air is not supplied to the air cylinder 54, the slide portion 82 is positioned on the base end portion 210 side of the main body portion 81 by the elastic force of the springs 66 and 67 as shown in FIG. The rotating portion 83 is maintained in a posture in which the tip portions 207 and 206 are separated from each other.

  The compressor 17 supplies air (compressed air). The solenoid valve 18 includes an air tube (not shown), the compressor 17, an air coupler 51e (see FIG. 7) of the air cylinder 51, an air coupler 52b (see the figure) of the air cylinder 52, an air coupler 53b (see the figure) of the air cylinder 53, The air coupler 55e is connected to an air coupler 55e (see the same figure) of the air cylinder 55 and an air coupler 54b (see FIG. 11) of the air cylinder 54. Under the control of the control unit 4, the air tube and each of the air couplers 51e, 52b, 53b, 54b, 55e are connected. The supply of air from the compressor 17 to the air cylinders 51 to 54 through the air supply and the supply stop are performed.

  As shown in FIG. 1, the probing device 3 includes an inspection probe 301 that is brought into contact with the conductor pattern of the circuit board 100 and a probing mechanism 302 that moves the inspection probe 301 according to the control of the control unit 4. Yes. The control unit 4 controls the electromagnetic valve 18 to supply and stop supplying air to the air cylinders 51 to 55. Further, the control unit 4 controls the probing mechanism 302 of the probing apparatus 3 to bring the inspection probe 301 into contact with the conductor pattern of the circuit board 100. Furthermore, the control unit 4 functions as an inspection unit, and executes an electrical inspection based on the electric signal S input via the inspection probe 301.

  Next, a method for inspecting the circuit board 100 using the inspection apparatus 1 will be described with reference to the accompanying drawings.

  First, an operation unit (not shown) is operated to input various set values such as the size of the circuit board 100. Next, the control unit 4 controls the motor 31 to rotate the drive shaft 31a by a predetermined number of rotations in a predetermined rotation direction. Subsequently, the torque of the drive shaft 31a is transmitted to the rotary shaft 33 via the belt 32a, and the rotary shaft 33 rotates, and the belts 32b and 32c are pulled accordingly, and the sliders 22a to 22d and the beam member 12a are pulled. , 12b are moved in the direction of arrow B1 or arrow B2 by the amount of movement corresponding to the size of the circuit board 100. Next, as shown in FIG. 14, the front end portion 204 of the main body portion 41 in each clamp mechanism 14, the front end portion 204 a of the main body portion 44 in each center clamp mechanism 15, and the front end portion 206 of the main body portion 81 in each auxiliary clamp mechanism 16. In addition, one surface 101a (surface on the back side of the drawing in the figure) of the edge portions 102a to 102d (hereinafter also referred to as “edge portion 102” when not distinguished) of the circuit board 100 is placed in contact.

  Subsequently, the operation unit is operated to start measurement. At this time, the compressor 17 starts supplying air. Next, the control unit 4 controls the electromagnetic valve 18 to supply air to the air cylinder 52 of the clamp mechanism 14 and the center clamp mechanism 15. At this time, as shown in FIG. 9, the rod 52a of each air cylinder 52 is directed toward the wall surface 202 on the base end 208 side of the main body 41 (the direction of the arrow B1 shown in FIG. 2 in the clamp mechanisms 14a and 14b). Further, the clamp mechanisms 14c and 14d protrude in the direction of the arrow B2 shown in the figure, and accordingly, the slide part 42 is on the side of the distal end part 204 of the main body 41 (in the clamp mechanisms 14a and 14b, the arrow shown in the figure). In the direction of B2, the clamp mechanisms 14c and 14d are slid in the direction of arrow B1 shown in FIG. Subsequently, the control unit 4 controls the electromagnetic valve 18 to supply air to the air cylinder 53 of the clamp mechanism 14 and the center clamp mechanism 15. At this time, as shown in FIG. 10, the rod 53a of each air cylinder 53 protrudes in the direction of the arrow D1 shown in the figure, and is on the base end 209 side of the rotating part 43 (lower right side part in the figure). The lower surface 203 is pressed, and accordingly, the rotating portion 43 is rotated in the direction of the arrow C1 shown in FIG. As a result, the distal end portion 205 of the rotating portion 43 presses the other surface 101b of the circuit board 100. As a result, the distal end portion 205 of the rotating portion 43 and the distal end portion 204 (the distal end portion 204a) of the main body portion 41 (main body portion 44). As a result, the edge of the circuit board 100 is clamped.

  In this case, in the clamp mechanism 14 (and the center clamp mechanism 15), the rod 53a of the air cylinder 53 protrudes from the lower surface 203 of the rotation portion 43 on the base end portion 209 side and directly presses the rotation shaft 71a. The circuit board 100 is clamped by rotating the rotating part 43 as a fulcrum. For this reason, by strongly pressing the base end 209 side of the rotating part 43 by the air cylinder 53, the distal end part 205 of the rotating part 43 can be applied with a sufficiently strong force and uniformly in the entire width direction. As a result of being able to press against the substrate 100, the circuit substrate 100 can be reliably clamped. Therefore, in this clamping mechanism 14, the clamping mechanism 14 (the beam member 12 provided with the clamping mechanism 14) that clamps the circuit board 100 is moved along the second direction B by the contact / separation mechanism 13 as will be described later. Even when the circuit board 100 is pulled with a strong force, it is possible to reliably prevent the circuit board 100 from being detached from the clamp mechanism 14.

  Subsequently, the control unit 4 controls the electromagnetic valve 18 to supply air to the air cylinder 54 of each auxiliary clamp mechanism 16. At this time, as shown in FIG. 12, the rod 54a of the air cylinder 54 in the auxiliary clamp mechanism 16a protrudes toward the slide portion 82, and the pressing member 54c attached to the tip of the rod 54a accordingly. The bearing 83a of the rotating part 83 is pressed, whereby the slide part 82 and the rotating part 83 are moved forward (the direction of the first direction A2 shown in FIG. 2 in the auxiliary clamp mechanism 16a and the same figure in the auxiliary clamp mechanism 16b. In the first direction A1 shown). Next, when the rod 54a further protrudes, as shown in FIG. 13, the rotating portion 83 is rotated in the direction of the arrow E1 shown in FIG. As a result, the distal end portion 207 of the rotating portion 83 presses the other surface 101 b of the circuit board 100, so that the edge portion of the circuit board 100 is clamped by the distal end portion 206 of the main body portion 81 and the distal end portion 207 of the rotating portion 83. Is done.

  Subsequently, the control unit 4 controls the motor 31 to rotate the drive shaft 31a in the direction of the arrow X1 as shown in FIG. At this time, the torque of the drive shaft 31a is transmitted to the rotary shaft 33 via the belt 32a, and the rotary shaft 33 rotates in the direction of the arrow X1, and the belts 32b and 32c are pulled by this, and each slider 22a is pulled. 22b and beam member 12a are moved in the direction of arrow B1, and sliders 22c and 22d and beam member 12b are moved in the direction of arrow B2. As a result, when the circuit board 100 is pulled in the directions (outward directions) of the arrows B1 and B2, the wrinkle is corrected when the circuit board 100 has wrinkles along the first direction A.

  Next, the control unit 4 controls the electromagnetic valve 18 to supply air to the cylinder 51 a of the air cylinder 51 and the cylinder 55 a of the air cylinder 55 in each clamp mechanism 14. At this time, as shown in FIG. 15, the piston 51b accommodated in the cylinder 51a slides toward the opening of the cylinder 51a. Along with this sliding, the tip of the rod 51d attached to the piston 51b becomes the inner peripheral wall along the second direction B in the concave portion 91 of the beam member 12 (in the clamp mechanisms 14a and 14c, the inner peripheral wall 91a shown in FIG. In the clamping mechanisms 14b and 14d, the inner peripheral wall 91c) shown in the figure is pressed, and by this reaction force, the main body portion 41 is pressed in the direction away from the central portion of the base main body 11 along the first direction A. Is done.

  Further, by supplying air to the cylinder 55a of the air cylinder 55, the piston 55b accommodated in the cylinder 55a slides toward the opening side of the cylinder 55a as shown in FIG. Along with this slide, the tip of the rod 55d attached to the piston 55b becomes an inner peripheral wall along the first direction A in the concave portion 91 of the beam member 12 (in the clamp mechanisms 14a and 14b, the inner peripheral wall 91d shown in FIG. In the clamping mechanisms 14c and 14d, the inner peripheral wall 91b) shown in the figure is pressed, and by this reaction force, the main body portion 41 is pressed along the second direction B in a direction away from the central portion of the base main body 11. The

  Here, in the fixing device 2, a gap 401 is generated between the main body 41 and the recess 91 in which the main body 41 is accommodated, and the main body 41 is moved in the first direction A, the second direction B, and It is configured to be movable with respect to the base 5 along the synthesis direction in which the first direction A and the second direction B are synthesized. For this reason, as described above, it is pressed in the direction away from the central portion of the base body 11 along the first direction A, and in the direction away from the central portion of the base body 11 along the second direction B. The pressed main body portion 41 is, for example, a rotation direction in which the arrangement position side of the air cylinder 55 in the main body portion 41 is separated from the central portion of the base main body 11 (a combined direction in which the first direction A and the second direction B are combined). The clamp mechanisms 14a and 14d are rotated along a clockwise rotation direction, and the clamp mechanisms 14b and 14c are rotated along a counterclockwise rotation direction (rotation direction F shown in FIG. 15). Or moved away from the central portion of the base body 11 along the tilt direction G (another example of the combined direction in which the first direction A and the second direction B are combined) as shown in FIG. Or let me be For this reason, the circuit board 100 clamped by each clamp mechanism 14 is pulled outward along the second direction B in addition to being pulled outward along the first direction A. As a result, when wrinkles are generated along the second direction B of the circuit board 100, the wrinkles are surely corrected, and in addition, the pulling by the contact / separation mechanism 13 (the first of the beam members 12a and 12b) Even when the wrinkles along the first direction A are not corrected by the movement along the two directions B), the wrinkles are reliably corrected.

  Further, in the fixing device 2, each clamp mechanism 14 is configured to be individually movable in the combined direction in which the first direction A and the second direction B are combined, and therefore, along the second direction B in the circuit board 100. When the deformation such as the wrinkles is partially generated in the vicinity of the clamp mechanism 14, the deformation is individually performed by the moving component along the first direction A of the movement along the composite direction in the clamp mechanism 14. In addition to being able to correct, even when deformation such as wrinkles along the first direction A occurs partially in the vicinity of the clamp mechanism 14, the clamp mechanism 14 moves along the composite direction. The deformation can be individually corrected by the moving component along the second direction B. Furthermore, even if the center portion of the edge along the second direction B in the circuit board 100 is loosened due to the pulling by the contact / separation mechanism 13 (see FIG. 17), the synthesis in each clamp mechanism 14 The movement component along the second direction B of the movements along the direction can surely correct the slack.

  Next, the control unit 4 controls the probing mechanism 302 of the probing device 3 to move the inspection probe 301 to contact the conductor pattern to be inspected on the circuit board 100. In this case, even if the circuit board 100 is deformed, such as wrinkles, the deformation is reliably corrected by the fixing device 2 as described above, so that the inspection probe 301 is reliably attached to the conductor pattern to be inspected. Touched.

  Subsequently, the control unit 4 performs an electrical inspection based on the electrical signal S input via the inspection probe 301. Thereafter, when the inspection of the circuit board 100 is finished, the control unit 4 controls the electromagnetic valve 18 to stop the supply of air to the air cylinders 51 to 55. As a result, the distal end portion 205 of the rotating portion 43 in the clamp mechanism 14 and the center clamp mechanism 15 and the distal end portion 207 of the rotating portion 83 in the auxiliary clamp mechanism 16 are brought into contact with the main body portions 41 and 44 by the elastic force of the springs 63 and 66. , 81 are respectively rotated in directions away from the tip portions 204, 205, 206 of the circuit board 81, and the clamp of the circuit board 100 by the clamp mechanisms 14, 15, 16 is released. Further, due to the elastic force of the springs 61, 64, 65, the main body 41 rotates in the direction opposite to the above-described rotation direction (the counterclockwise rotation direction in the clamp mechanisms 14a, 14d, the clamp mechanisms 14b, 14c). Is rotated in the clockwise direction) to be in an initial state.

As described above, in the fixing device 2 and the inspection device 1, at least one of a plurality of clamp mechanisms that can move along the first direction A by clamping the edge portion 102 along the first direction A in the circuit board 100 is provided. The clamp mechanism 14 is configured as a combined direction movable clamp mechanism capable of moving along a combined direction in which the first direction A and the second direction B orthogonal to the first direction A are combined, and the moving mechanism 19 is the clamp mechanism. 14 is moved along the synthesis direction. Therefore, according to the fixing device 2 and the inspection device 1, the edge 102 of the circuit board 100 clamped by the clamp mechanism 14 is both oriented along the first direction A and oriented along the second direction B. Can be pulled individually towards Therefore, according to the fixing device 2 and the inspection device 1, when deformation such as wrinkles along the second direction B in the circuit board 100 is partially generated in the vicinity of the clamp mechanism 14, the synthesis in the clamp mechanism 14 is performed. In addition to being able to individually correct the deformation by the movement component along the first direction A of the movement along the direction, deformation such as wrinkles along the first direction A causes the clamping mechanism 14 to Even when it occurs partially in the vicinity of, the deformation can be individually corrected by the movement component along the second direction B of the movement along the composite direction in the clamp mechanism 14. In addition, even if the center portion of the edge portion along the second direction B in the circuit board 100 is loosened, the end portion of the edge portion along the first direction A is clamped by the clamp mechanism 14 so that the clamp mechanism 14 is By moving along the combining direction, the slack can be reliably corrected by the moving component along the second direction B of the movement along the combining direction in the clamp mechanism 14. Therefore, according to the fixing device 2 and the inspection apparatus 1 of this, it is possible to reliably correct the deformation of the circuit board 100 while preventing the occurrence of slack.

  Further, in the fixing device 2 and the inspection device 1, a plurality of (for example, two) clamp mechanisms (clamps in the above example) that respectively clamp a plurality of locations of one edge portion 102 a along the first direction A in the circuit board 100. Mechanisms 14a and 14b) and a plurality of clamp mechanisms (in the above example) for clamping a plurality of portions of the other edge portion 102b opposite to the edge portion 102a of the circuit board 100, which are respectively opposed to the clamp mechanisms. Clamp mechanism 14c, 14d), and at least one of the opposing clamp mechanisms (that is, in the above example, clamp mechanisms 14a, 14b, clamp mechanisms 14a, 14d, clamp mechanisms 14b, 14c, clamp mechanisms 14c, 14d, clamps) Mechanisms 14a, 14b, 14c, clamping mechanisms 14a, 14b, 1 d, the clamping mechanism 14a, 14c, 14d, the clamp mechanism 14b, 14c, 14d and the clamping mechanism 14a, 14b, 14c, combinations of any of 14d) is a synthetic direction movable clamping mechanism. For this reason, according to the fixing device 2 and the inspection device 1, even when deformations such as wrinkles are partially generated in a plurality of portions clamped by the clamping mechanisms facing each other on the circuit board 100, the deformations are also generated. Can be corrected individually.

  Further, in the fixing device 2 and the inspection device 1, both of the clamp mechanisms facing each other (in the above example, the clamp mechanisms 14a and 14b and the clamp mechanisms 14c and 14d) are configured by a composite direction movable clamp mechanism. That is, in the fixing device 2 and the inspection device 1, all the clamp mechanisms 14 are composed of composite direction movable clamp mechanisms. Therefore, according to the fixing device 2 and the inspection device 1, when deformation such as wrinkles is partially generated in a plurality of portions clamped by the clamping mechanisms facing each other on the circuit board 100, the portions are Since it can be pulled by the two clamp mechanisms 14, these deformations can be corrected more reliably.

  Furthermore, according to the fixing device 2 and the inspection device 1, the base 5 is configured by including the pair of beam members 12 that are brought into and out of contact with each other by the contact / separation mechanism 13, and along the length direction of the one beam member 12. Since the clamp mechanisms 14a and 14b are arranged and the clamp mechanisms 14c and 14d are arranged along the length direction of the other beam member 12, the clamp mechanisms 14a and 14b and the clamp mechanisms 14c and 14d are moved with the same movement amount. For example, when deformation such as wrinkles along the first direction A occurs uniformly over the entire range between both ends of the circuit board 100, the deformation is uniformly stretched. Can be corrected.

  Further, according to the fixing device 2 and the inspection device 1, two clamp mechanisms 14 are disposed at positions spaced apart from each other with the center clamp mechanism 15 fixed to the center portion of each beam member 12 in the length direction. Thus, the circuit board 100 is moved in the first direction A by moving the main body 41 of each clamp mechanism 14 in the direction away from the center clamp mechanism 15 along the first direction A with the center clamp mechanism 15 as the center. Can be pulled evenly along. For this reason, for example, even if the circuit board 100 is deformed to be curved along the first direction A, the circuit board 100 can be corrected to a sufficiently flat state.

  Further, according to the fixing device 2 and the inspection device 1, the auxiliary clamp mechanism 16 that clamps the edge along the second direction B of the circuit board 100 is provided, and the contact / separation mechanism 13 fixes the auxiliary clamp mechanism 16. By moving both the beam members 12 along the second direction B so as to approach and separate from each other about the position, the circuit board 100 can be evenly pulled along the second direction B. For this reason, for example, even if the circuit board 100 is deformed to be curved along the second direction B, the circuit board 100 can be corrected to a sufficiently flat state.

  Further, in the fixing device 2 and the inspection device 1, the clamp mechanism 14 is configured by including the main body 41 that is movably accommodated in the recess 91 formed in the beam member 12, and the main body 41 is moved in the first direction A. The moving mechanism 19 is configured to include the air cylinder 51 that presses along the main body 41 and the air cylinder 55 that presses the main body 41 along the second direction B, and the main body 41 is pressed by the air cylinders 51 and 55. The clamp mechanism 14 is moved along the synthesis direction. For this reason, according to the fixing device 2 and the inspection device 1, the moving mechanism 19 can be simply configured.

  In the fixing device 2 and the inspection device 1, the cylinder 51 a having an opening on the side surface in the second direction B in the main body 41 and formed in the main body 41, and the supply of air into the cylinder 51 a The air cylinder 51 is configured to include a piston 51b that slides in the cylinder 51a along the first direction A. The air cylinder 51 is formed on the side surface along the first direction A of the main body 41 and formed in the main body 41. The air cylinder 55 is configured to include the cylinder 55a formed and a piston 55b that slides in the cylinder 55a along the second direction B by supplying air to the cylinder 55a. That is, in the fixing device 2 and the inspection device 1, the air cylinders 51 and 55 are built in the main body 41. Therefore, according to the fixing device 2 and the inspection device 1, the clamp mechanism 14 can be sufficiently downsized as compared with the configuration in which the air cylinders 51 and 55 are disposed outside the main body 41.

  Further, according to the inspection apparatus 1, since the fixing device 2 is provided, even if the circuit board 100 is deformed such as wrinkles, the deformation can be reliably corrected by the fixing device 2. Therefore, the inspection probe 301 can be reliably brought into contact with the conductor pattern to be inspected, so that the inspection can be performed accurately.

  In addition, this invention is not limited to said structure. For example, the configuration example in which the main body portion 41 is pressed using one air cylinder 51 and one air cylinder 55 has been described above. However, the number of the air cylinders 51 and the air cylinders 55 is not limited to one, and can be arbitrarily set. Can be changed. Further, an example in which the air cylinders 51 and 55 are configured by including the cylinders 51 a and 55 a formed inside the main body 41 and the pistons 51 b and 55 b accommodated in the cylinders 51 a and 55 a, that is, the air cylinders 51 and 55 in the main body 41. As described above, the configuration example in which the air cylinders 51 and 55 that are separate from the main body 41 are disposed outside the main body 41 (for example, the upper surface of the main body 41) is adopted. You can also. Further, instead of the air cylinders 51 and 55, a mechanism including a motor and a ball screw, a hydraulic cylinder, or the like can be used as the first pressing portion and the second pressing portion. In addition, the configuration example in which the main body portion 41 is moved by pressing the main body portion 41 with the first pressing portion and the second pressing portion has been described above. However, the main body portion 41 is directly rotated by a rotation mechanism such as a motor in the rotation direction F. A configuration in which the main body portion 41 is pressed in a direction along the inclination direction G and the main body portion 41 is moved in that direction can also be employed.

  In addition, the configuration example in which two clamp mechanisms 14 are arranged in each beam member 12 has been described above, but the number of clamp mechanisms 14 arranged in the beam member 12 is not limited to two, and three or more arbitrary Can be specified in numbers. In addition, the example in which all the clamp mechanisms 14 are configured by the composite direction movable clamp mechanism is described above, but at least one of the pair of clamp mechanisms 14 facing each other is configured by the composite direction movable clamp mechanism. Clamp mechanisms 14a, 14b, clamp mechanisms 14a, 14d, clamp mechanisms 14b, 14c, clamp mechanisms 14c, 14d, clamp mechanisms 14a, 14b, 14c, clamp mechanisms 14a, 14b, 14d, clamp mechanisms 14a, 14c, 14d, and clamps Each clamp mechanism 14 according to any combination of the mechanisms 14b, 14c, and 14d can be composed of a composite direction movable clamp mechanism. Further, only one of all the clamp mechanisms 14 can be constituted by a composite direction movable clamp mechanism.

  In addition, the configuration example in which the contact / separation mechanism 13 moves both the beam members 12 along the second direction so as to contact and separate from each other about the fixed position of the auxiliary clamp mechanism 16 has been described above. It is also possible to adopt a configuration in which only one of these is moved. In addition, although the configuration example including the auxiliary clamp mechanism 16 has been described above, a configuration that does not include the auxiliary clamp mechanism 16 may be employed.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2 Fixing apparatus 3 Probing apparatus 4 Control part 5 Base 12a, 12b Beam member 13 Contact / separation mechanism 14a-14d Clamp mechanism 15a, 15b Center clamp mechanism 16a, 16b Auxiliary clamp mechanism 19 Moving mechanism 41 Main body part 41a-41d Side surface 42 Slide portion 43 Rotating portion 51, 55 Air cylinder 51a, 55a Cylinder 51b, 55b Piston 91 Recessed portion 91a-91d Inner peripheral wall 100 Circuit board 101a One surface 101b Other surface 102a-102d Edge portion 301 Inspection probe A First direction B Second direction F Rotation direction G Inclination direction

Claims (9)

A base for fixing a circuit board, and a plurality of clamps arranged on the base so as to be movable along a predetermined first direction and clamping edges along the first direction of the circuit board to be fixed A circuit board fixing device including a mechanism and a moving mechanism for moving the clamp mechanism to fix the circuit board,
At least one of the plurality of clamping mechanisms includes a rotation direction as a combined direction obtained by combining the first direction and a second direction orthogonal to the first direction in a state where the edge portion is clamped, and the first direction even along any direction in the tilting direction as the synthetic direction inclined with respect to one direction consists of a movable synthetic direction movable clamping mechanism,
The circuit board fixing device, wherein the moving mechanism moves the combining direction movable clamp mechanism along the combining direction. A plurality of first clamping mechanisms as the clamping mechanisms that respectively clamp a plurality of portions of the one edge portion along the first direction in the circuit board, and one-to-one facing the first clamping mechanisms. A second clamping mechanism as the clamping mechanism, each of which is arranged in such a manner as to clamp each of a plurality of locations of the other one edge facing the one edge in the circuit board,
The circuit board fixing device according to claim 1, wherein at least one of the first clamp mechanism and the second clamp mechanism facing each other is configured by the composite direction movable clamp mechanism.   3. The circuit board fixing device according to claim 2, wherein both of the first clamp mechanism and the second clamp mechanism facing each other are configured by the composite direction movable clamp mechanism. 4. The base includes a base body, a pair of beam members disposed on the base body so that a length direction thereof coincides with the first direction, and a contact / separation for bringing the beam members into and out of contact with each other. With a mechanism,
The first clamp mechanism is disposed along the length direction in one of the pair of beam members,
The circuit board fixing device according to claim 2, wherein the second clamp mechanism is disposed along the length direction of the other of the pair of beam members. A center clamp mechanism that clamps the edge of the circuit board by being fixed to the central portion in the length direction of each beam member;
Two of the first clamp mechanisms are disposed on one of the pair of beam members, and each of the first clamp mechanisms is disposed at two positions spaced apart from each other across the center clamp mechanism of the beam member. ,
Two of the second clamp mechanisms are disposed on the other of the pair of beam members, and each of the second clamp mechanisms is disposed at two positions separated from each other across the center clamp mechanism of the beam member. The circuit board fixing device according to claim 4. An auxiliary clamp mechanism that is fixed to the base body and clamps an edge of the circuit board along the second direction;
6. The circuit board fixing device according to claim 4, wherein the contact / separation mechanism contacts and separates the pair of beam members from each other around a fixed position where the auxiliary clamp mechanism is fixed. The composite direction movable clamp mechanism is movably accommodated in a recess formed in the base, and is in contact with and separated from the main body portion supporting the one surface side of the edge portion of the circuit board. A pressing portion disposed on the main body portion and pressing the other surface side of the edge portion of the circuit board to clamp the edge portion together with the main body portion,
The moving mechanism includes a first pressing portion that presses the main body portion along the first direction, and a second pressing portion that presses the main body portion along the second direction. The circuit board fixing device according to claim 1, wherein the combined direction movable clamp mechanism is moved along the combined direction by pressing by a second portion and the second pressing portion. The main body is formed in a substantially rectangular plate shape,
The concave portion is larger than the main body portion and formed in a substantially rectangular shape in plan view.
The first pressing portion is formed in the main body portion and has a first cylinder having an opening on a side surface along the second direction in the main body portion, and the first direction by supplying air into the first cylinder. A first piston that slides in the first cylinder along the first cylinder, and presses the main body portion along the first direction by pressing against the inner peripheral wall of the recess accompanying the sliding of the first piston,
The second pressing portion is formed in the main body portion and has a second cylinder having an opening on a side surface along the first direction in the main body portion, and the second direction by supplying air into the second cylinder. And a second piston that slides in the second cylinder along the second piston, and presses the main body along the second direction by pressing against the inner peripheral wall of the recess accompanying the sliding of the second piston. 8. The circuit board fixing device according to 7.   9. The circuit board fixing device according to claim 1, a probing device for bringing an inspection probe into contact with a circuit board fixed by the circuit board fixing device, and an input via the inspection probe. A circuit board inspection apparatus comprising: an inspection unit that performs an electrical inspection on the circuit board based on the electrical signal.

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