JP5398855B2 - Optical scanning apparatus and image forming apparatus - Google Patents

Description

  The present invention relates to an optical scanning device including a MEMS mirror that deflects scanning laser light and an image forming apparatus including the optical scanning device.

  2. Description of the Related Art Conventionally, an image forming apparatus including a MEMS (Micro Electro Mechanical Systems) mirror that reciprocally vibrates is known as a reflection mirror for deflecting a scanning laser beam toward a photosensitive member (see, for example, Patent Document 1). ). In FIG. 3 of Patent Document 1, reference numeral 8 indicates a MEMS mirror, and reference numerals a, b, c, and d indicate piezoelectric bodies as drive sources that vibrate the MEMS mirror 8. The MEMS mirror 8 causes torsional vibration by driving the driving sources a and b in the same phase and driving the driving sources c and d in the opposite phase to the driving sources a and b. As a result, the laser beam incident on the MEMS mirror 8 is deflected and scanned.

  FIG. 2 of Patent Document 1 describes a block diagram of a drive circuit for driving the drive sources a, b, c, and d. In FIG. 2 of Patent Document 1, a sine wave is generated by the oscillator 121a, and the sine wave is input to the phase inversion circuit 121b and the phase shifter 121c. In the phase shifter 121c, a signal adjusted so that the image signal and the phase of the MEMS mirror 8 correspond to each other is generated. The signal is amplified by the amplifier 121e and supplied to the drive sources a and b. The sine wave generated by the oscillator 121a is inverted in phase through the phase inversion circuit 121b and supplied to the driving sources c and d through the phase shifter 121d and the amplifier 121f.

  Patent Document 2 discloses a technique in which a mirror driving unit is configured as one electromagnetic actuator including a coil and a permanent magnet, and the mirror is vibrated by a torque acting on the permanent magnet when a current is passed through the coil. Is described. In the technique disclosed in Patent Document 2, after two sine waves are generated by an arbitrary waveform generator, the two sine waves are added (superimposed) by an adder, and this is amplified by an amplifier to be coiled. Is applied. That is, by driving the coil with a voltage in which two sine waves are superimposed, the waveform of the change in the angular velocity of the mirror is changed to a triangular wave or a saw wave, and the mirror is oscillated at a substantially constant speed. Thereby, good printing can be performed in the image forming apparatus.

JP 2004-177543 A JP 2008-40460 A

  However, the oscillator capable of generating the sine wave and the amplifier capable of accurately amplifying the sine wave are expensive, and in particular, a plurality of sine waves as disclosed in Patent Document 2 are superimposed. In the configuration in which the MEMS mirror is vibrated by the driving voltage, the number of oscillators and amplifiers corresponding to the number of sine waves to be superimposed is required, which is a factor that increases the manufacturing cost.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide an optical scanning device including a MEMS mirror that is driven by superimposing a plurality of voltages, and image formation including the same. It is to provide the device at a low cost.

  The optical scanning device according to the present invention fluctuates in a MEMS mirror that deflects laser light output from a light source, a basic driving voltage that fluctuates in a predetermined basic period, and a superposition period that is shorter than the basic period. A drive unit that swings the MEMS mirror using a superimposed drive voltage, and light that receives the laser light deflected by the MEMS mirror at a predetermined position and outputs a detection signal indicating that the light has been received. Based on the timing at which the detection signal is output by the light detection unit to correct the basic drive voltage and the superimposed drive voltage so as to compensate for a change in the deflection angle of the detection mirror and the MEMS mirror, A basic correction voltage value, which is a voltage value used when correcting the drive voltage, and a superposition correction voltage value, which is a voltage value used when correcting the superposition drive voltage A correction value calculation unit to calculate, a basic voltage generation unit that generates a DC voltage having a voltage value lower than the basic correction voltage value, and a superimposed voltage generation unit that generates a DC voltage having a voltage value lower than the superimposition correction voltage value A basic voltage amplification unit that amplifies the DC voltage generated by the basic voltage generation unit to a voltage value equal to the basic correction voltage value, and the DC voltage generated by the superimposed voltage generation unit, A superimposed voltage amplification unit that amplifies the voltage to be equal to the superimposed correction voltage value, and a waveform of a DC voltage amplified by the basic voltage amplification unit is shaped into a rectangular wave that fluctuates in the basic period, and the basic drive A basic waveform shaping unit that outputs to the drive unit as a voltage, and a DC voltage waveform amplified by the superimposed voltage amplification unit is shaped into a rectangular wave that fluctuates in the superposition period, and the drive voltage is used as the superimposed drive voltage. Comprising a superposition waveform shaping section for outputting the parts, the.

  According to this configuration, a DC voltage having a voltage value lower than the basic correction voltage value is generated by the basic voltage generation unit, and the generated DC voltage is set to a voltage value equal to the basic correction voltage value by the basic voltage amplification unit. Amplified. Then, the waveform of the amplified DC voltage is shaped by the basic waveform shaping unit so as to fluctuate in a rectangular waveform with a basic period, and is output to the drive unit as a basic drive voltage. In addition, a DC voltage having a voltage value lower than the superimposed correction voltage value is generated by the superimposed voltage generation unit, and the generated DC voltage is amplified by the superimposed voltage amplification unit so as to have a voltage value equal to the superimposed correction voltage value. Then, the waveform of the amplified DC voltage is shaped by the superposition waveform shaping unit so as to fluctuate in a rectangular waveform with a superposition period, and is output to the drive unit as a superposition drive voltage.

  In other words, as a configuration for generating the basic drive voltage and the superimposed drive voltage, an inexpensive basic voltage generation unit capable of generating a DC voltage instead of an expensive oscillator capable of generating a sine wave used in the prior art. And the superposition voltage generation part is adopted. In the prior art, a configuration including an expensive amplifier capable of accurately amplifying a sine wave for each driving voltage is adopted. However, in this configuration, an inexpensive basic voltage amplification unit capable of accurately amplifying a DC voltage is employed. And the structure provided with the superimposition voltage amplification part is employ | adopted. As a result, an optical scanning device including a MEMS mirror that is driven by superimposing the basic drive voltage and the superimposed drive voltage can be provided at low cost.

  The MEMS mirror is supported by a movable frame so as to be rotatable by a twisting operation of the first torsion bar, and the movable frame has a second torsion shaft having a torsion axis coaxial with the torsion axis of the first torsion bar. It is supported by a fixed frame provided outside the movable frame in a state where it can be rotated by a twisting operation of the bar, and the driving unit twists the second torsion bar using the basic driving voltage to While rotating the movable frame, the MEMS mirror is pivoted by twisting the first torsion bar using the superimposed drive voltage to rotate the MEMS mirror, and the correction value calculating unit The MEMS mirror generated by the frequency component of the superposition period included in the basic drive voltage shaped into the rectangular wave Of so as to cancel the driving force, it is preferable to calculate the superimposition correction voltage value.

  According to this configuration, the movable frame is rotated by the drive unit using the basic drive voltage, and the MEMS mirror is swung by rotating the MEMS mirror using the superimposed drive voltage. For this reason, when the first torsion bar is twisted using a rectangular wave equal to the superposition correction voltage value that fluctuates in the superposition period, the second torsion bar is twisted and the movable frame is driven. There is a possibility that the first torsion bar cannot be twisted with high accuracy due to the frequency component of the superposition period included in the shaped basic drive voltage.

  However, according to this configuration, the superimposition correction is performed by the correction value calculation unit so as to cancel out the driving force of the MEMS mirror caused by the harmonic component having the same period as the superposition period included in the basic drive voltage shaped into the rectangular wave. Since the voltage value is calculated, the first torsion bar can be twisted with high accuracy.

  The driving unit drives the movable frame in opposite directions according to the basic driving voltage, and the first driving of the MEMS mirror according to the overlapping driving voltage. A third driving unit that drives in the same direction as the second driving unit, and a fourth driving unit that drives the MEMS mirror in the same direction as the second driving unit according to the overlapping driving voltage, the basic waveform shaping unit The direct current voltage amplified by the basic voltage amplification unit is alternately output to the first drive unit and the second drive unit every half of the basic period, thereby the first drive unit and the first drive unit. The waveform of the basic drive voltage output to the two drive units is shaped into a rectangular wave that fluctuates in the basic cycle, and the superimposed waveform shaping unit converts the DC voltage amplified by the superimposed voltage amplification unit into the superposition cycle. By alternately outputting to the third drive unit and the fourth drive unit every half cycle, the waveform of the superimposed drive voltage output to the third drive unit and the fourth drive unit is respectively superimposed on the superimposed drive voltage. It is preferable to shape it into a rectangular wave that varies with the period.

  According to this configuration, the first drive unit and the second drive unit alternately output the output destination of the DC voltage amplified by the basic voltage amplification unit every half of the basic cycle. The waveform of the basic drive voltage output to the drive unit and the second drive unit can be shaped into a rectangular wave that varies with the basic period. In addition, the third drive unit and the fourth drive unit are simply configured to output the output destination of the DC voltage amplified by the superimposition voltage amplification unit alternately to the third drive unit and the fourth drive unit every half of the superposition period. The waveform of the superimposed drive voltage output to the four drive units can be shaped into a rectangular wave that fluctuates with a superposition cycle.

  The basic waveform shaping unit is provided between the basic voltage amplifying unit and the driving unit, and outputs the direct-current voltage amplified by the basic voltage amplifying unit to the first driving unit and the second driving unit. It is preferable to include a basic switching element that switches between the driving unit and a basic switching control unit that switches the basic switching element every half of the basic period.

  According to this configuration, the basic waveform shaping unit can be configured at low cost by using an inexpensive switching element that switches the drive voltage supply path in at least two directions.

  The superimposed waveform shaping unit is provided between the superimposed voltage amplification unit and the driving unit, and outputs the direct-current voltage amplified by the superimposed voltage amplification unit to the third driving unit and the fourth driving unit. It is preferable to include a superimposing switching element that switches between the driving unit and a superimposing switching control unit that switches the superimposing switching element every half of the superimposing period.

  According to this configuration, the superimposed waveform shaping unit can be configured at low cost by using an inexpensive switching element that switches the drive voltage supply path in at least two directions.

  The correction value calculating unit further calculates a basic correction duty ratio indicating a ratio of a period during which the DC voltage amplified by the basic voltage amplifying unit is output to the driving unit in the basic period, and the basic waveform The shaping unit preferably sets the basic drive voltage to a high level during the period corresponding to the basic correction duty ratio calculated by the correction value calculation unit in the basic period.

  According to this configuration, not only the basic correction voltage value but also the basic drive voltage can be corrected using the basic correction duty ratio.

  The correction value calculation unit further calculates a superposition correction duty ratio indicating a ratio of a period during which the DC voltage amplified by the superposition voltage amplification unit is output to the drive unit in the superposition period, and the superposition waveform The shaping unit preferably sets the superposition drive voltage to a high level during a period corresponding to the superposition correction duty ratio calculated by the correction value calculation unit in the superposition period.

  According to this configuration, not only the superimposed correction voltage value but also the superimposed drive voltage can be corrected using the superimposed correction duty ratio.

  The basic voltage amplifying unit includes an amplifier that amplifies the DC voltage generated by the basic voltage generating unit with a fixed amplification factor, and the basic voltage generating unit converts the basic correction voltage value to the basic voltage. It is preferable to generate a DC voltage having a voltage value obtained by dividing by the previously fixed amplification factor used in the amplification unit.

According to this configuration, the basic voltage amplifying unit can be configured at low cost by using an inexpensive amplifier that amplifies the DC voltage with a fixed amplification factor.

  The superposed voltage amplifying unit includes an amplifier that amplifies the DC voltage generated by the superposed voltage generating unit with a fixed amplification factor, and the superposed voltage generating unit converts the superposed correction voltage value to the superposed voltage. It is preferable to generate a DC voltage having a voltage value obtained by dividing by the previously fixed amplification factor used in the amplification unit.

According to this configuration, the superposed voltage amplifying unit can be configured at low cost by using an inexpensive amplifier that amplifies the DC voltage with a fixed amplification factor.

  The basic voltage amplifier includes an amplifier that amplifies the DC voltage generated by the basic voltage generator with a variable amplification factor. The basic voltage generator is fixed in advance lower than the basic correction voltage value. A value obtained by dividing the basic correction voltage value by the initial basic voltage value is set as the variable amplification factor used in the basic voltage amplification unit. It is preferable to further include a basic gain setting unit.

  According to this configuration, the basic voltage generation unit generates a DC voltage having an initial basic voltage value that is a voltage value fixed in advance lower than the basic correction voltage value. That is, it is possible to make the basic voltage generator simple and inexpensive as compared with the case where the basic voltage generator is configured to generate DC voltages having various voltage values.

  The superposed voltage amplifying unit includes an amplifier that amplifies the DC voltage generated by the superposed voltage generating unit with a variable amplification factor, and the superposed voltage generating unit is fixed in advance lower than the superposed correction voltage value. A value obtained by dividing the superposition correction voltage value by the initial superposition voltage value is set as the variable amplification factor used in the superposition voltage amplification unit. It is preferable to further include a superposition gain setting unit.

  According to this configuration, the superimposed voltage generation unit generates a DC voltage having an initial superimposed voltage value that is a voltage value fixed in advance lower than the superimposed correction voltage value. That is, compared to the case where the superimposed voltage generation unit is configured to generate DC voltages having various voltage values, the superimposed voltage generation unit can be simple and inexpensive.

  An image forming apparatus according to the present invention includes: the optical scanning device; and an image forming unit that forms an image corresponding to the latent image on a sheet using a latent image formed on a photosensitive member by the optical scanning device. Is provided.

  ADVANTAGE OF THE INVENTION According to this invention, the optical scanning device and image forming apparatus provided with the MEMS mirror which drives by superimposing a several voltage can be provided at low cost.

1 is a schematic cross-sectional view showing a multifunction machine as an example of an image forming apparatus to which an optical scanning device according to the present invention is applied. 1 is a block diagram illustrating an example of an electrical configuration of a multifunction machine. The figure which shows the arrangement | positioning relationship of the optical component which comprises an exposure part. The figure which shows the principle of an optical deflection | deviation part. (A) Sectional drawing which cut | disconnected the optical deflection | deviation part shown in FIG. 4 along the AA line. (B) Sectional drawing which cut | disconnected the optical deflection | deviation part shown in FIG. 4 along the BB line. (A) The figure which shows the state which the PZT thin film of the mirror drive part of one side extended, and the PZT thin film of the mirror drive part of the other side contracted in the same cross section as Fig.5 (a). (B) In the same cross section as FIG.5 (b), the figure which shows the state which the PZT thin film of the mirror drive part of one side extended, and the PZT thin film of the mirror drive part of the other side contracted. The figure which shows the time change of the deflection angle of a movable frame and a mirror part. The block diagram which shows the structure of an exposure part. (A) The figure which shows the change of the voltage value of the DC voltage input into a 1st amplifier and a basic waveform shaping part. (B) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (1st drive part). (C) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (2nd drive part). The figure which shows the change of the deflection angle of a movable frame according to the change of the voltage value of the DC voltage input into a mirror drive part (a 1st drive part and a 2nd drive part). (A) The figure which shows the change of the voltage value of the DC voltage input into a 2nd amplifier and a superimposed waveform shaping part. (B) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (3rd drive part). (C) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (4th drive part). The figure which shows the relative change with respect to the movable frame of the deflection angle of a mirror part according to the change of the voltage value of the DC voltage input into a mirror drive part (a 3rd drive part and a 4th drive part). The figure which shows the relationship between the time change of the basic drive voltage shape | molded by the rectangular wave, the fundamental wave of the said rectangular wave, and a 3rd harmonic. The block diagram which shows the structure of the exposure part different from FIG. (A) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (1st drive part) according to the basic correction duty ratio computed by the correction value calculation part. (B) The figure which shows the change of the voltage value of the DC voltage input into load according to the basic correction duty ratio calculated by the correction value calculation part. (C) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (2nd drive part) according to the basic correction duty ratio computed by the correction value calculation part. The block diagram which shows the structure of the exposure part different from FIG.8 and FIG.14. (A) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (3rd drive part) according to the superimposition correction | amendment duty ratio calculated by the correction value calculation part. (B) The figure which shows the change of the voltage value of the DC voltage input into load according to the superimposition correction | amendment duty ratio calculated by the correction value calculation part. (C) The figure which shows the change of the voltage value of the DC voltage input into a mirror drive part (4th drive part) according to the superimposition correction | amendment duty ratio calculated by the correction value calculation part.

  FIG. 1 is a schematic sectional view of a multifunction peripheral (image forming apparatus) to which an optical scanning device according to the present invention is applied. As shown in FIG. 1, the multifunction peripheral (image forming apparatus) 1 has a plurality of functions such as a copy, a printer, and a scanner. The MFP 1 includes a main body unit 100, a document reading unit 200 disposed on the main body unit 100, a document feeding unit 300 disposed on the document reading unit 200, and an operation unit disposed on the upper front surface of the main body unit 100. 400.

  The document feeder 300 functions as an automatic document feeder, and can continuously send a plurality of documents placed on the document placing unit 301 to the document reading unit 200.

  The document reading unit 200 includes a carriage 201 equipped with a CCD (Charge Coupled Device) sensor and an LED (Light Emitting Diode), a document table 203 formed of a transparent member such as glass, and a document reading slit 205. When reading a document placed on the document table 203, the document is read by the CCD sensor while moving the carriage 201 in the longitudinal direction of the document table 203. On the other hand, when reading a document fed from the document feeding unit 300, the carriage 201 is moved to a position facing the document reading slit 205, and the document fed from the document feeding unit 300 is scanned. Reading is performed by the CCD sensor through the reading slit 205. The CCD sensor outputs the read original as image data.

  The main body 100 includes a paper storage unit 101, an image forming unit 103, and a fixing unit 105. The sheet storage unit 101 includes a sheet tray 107 that can store a bundle of sheets. In the stack of sheets stored in the sheet tray 107, the uppermost sheet is fed out toward the sheet transport unit 111 by driving the pickup roller 109. The sheet is conveyed to the image forming unit 103 through the sheet conveying unit 111.

  The image forming unit 103 forms a toner image on the conveyed paper based on the image data. The image forming unit 103 includes a photosensitive drum 113, an exposure unit 115, a developing unit 117, and a transfer unit 119. The exposure unit 115 generates light corresponding to image data (image data output from the document reading unit 200, image data transmitted from a personal computer, image data received by facsimile, etc.), and is uniformly charged photoconductor. Irradiate the peripheral surface of the drum 113. As a result, an electrostatic latent image corresponding to the image data is formed on the peripheral surface of the photosensitive drum 113. In this state, a toner image corresponding to image data is formed on the peripheral surface by supplying toner from the developing unit 117 to the peripheral surface of the photosensitive drum 113. This toner image is transferred to the paper conveyed from the paper storage unit 101 by the transfer unit 119.

  The sheet on which the toner image is transferred is sent to the fixing unit 105. The fixing unit 105 applies heat and pressure to the toner image and the paper to fix the toner image on the paper. The paper is discharged to the stack tray 121 or the paper discharge tray 123.

  The operation unit 400 includes a display unit 403 and an operation key unit 401. The display unit 403 has a touch panel function, and displays a screen including soft keys. The user performs an input operation such as setting input necessary for executing a function such as copying by operating a soft key while viewing the screen.

  The operation key unit 401 includes operation keys including hard keys. Specifically, a start key 405, a numeric key 407, a stop key 409, a reset key 411, a function switching key for switching between a copy, a printer, a scanner, and a facsimile. 413 and the like.

  A start key 405 is a key for starting operations such as copying and facsimile transmission. A numeric keypad 407 is a key for inputting numbers such as the number of copies and a facsimile number. A stop key 409 is a key for stopping a copy operation or the like halfway. The reset key 411 is a key for returning the set contents to the initial setting state.

  The function switching key 413 includes a copy key, a transmission key, and the like, and is a key for switching between a copy function, a transmission function, and the like. When the copy key is operated, an initial copy screen is displayed on the display unit 403. When the transmission key is operated, an initial screen for facsimile transmission and mail transmission is displayed on the display unit 403.

  FIG. 2 is a block diagram illustrating an electrical configuration of the multifunction machine 1. The multifunction device 1 is connected so that the functional units such as the main unit 100, the document reading unit 200, the document feeding unit 300, the operation unit 400, the communication unit 600, and the control unit 500 can communicate with each other. It has been configured. Since the main body unit 100, the document reading unit 200, the document feeding unit 300, and the operation unit 400 have already been described, description thereof will be omitted.

  The communication unit 600 includes a facsimile communication unit 601 and a network I / F unit 603. The facsimile communication unit 601 includes an NCU (Network Control Unit) that controls connection of a telephone line with a destination facsimile and a modulation / demodulation circuit that modulates / demodulates a signal for facsimile communication. The facsimile communication unit 601 is connected to the telephone line 605.

  The network I / F unit 603 is connected to a LAN (Local Area Network) 607. A network I / F unit 603 is a communication interface circuit for executing communication with a terminal device such as a personal computer connected to the LAN 607.

  The control unit 500 includes, for example, a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an image memory, and the like. The CPU executes control necessary for operating the multifunction device 1 on the above-described components of the multifunction device 1 such as the main body 100. The ROM stores software and setting values necessary for controlling the operation of the multifunction device 1. The RAM is used for temporarily storing data generated during execution of software. The image memory temporarily stores image data (image data output from the document reading unit 200, image data transmitted from a personal computer, image data received by facsimile, etc.).

  FIG. 3 is a diagram showing an arrangement relationship of optical components that constitute the exposure unit 115. The exposure unit 115 includes a light source 31, a light deflection unit 10, two scanning lenses 33 and 35, and the like. The light source 31 is, for example, a laser diode, and irradiates a light beam (laser light) LB modulated in accordance with image data.

  A collimator lens 37 and a cylindrical lens 39 are disposed on the optical path between the light source 31 and the light deflection unit 10. The collimator lens 37 makes the light beam LB emitted from the light source 31 parallel light. The cylindrical lens 39 condenses the light beam LB converted into parallel light into a linear shape. The light beam LB condensed linearly is incident on the light deflection unit 10.

  A scanning lens 33 and a scanning lens 35 are disposed on the optical path between the light deflection unit 10 and the photosensitive drum 113. The light beam LB incident on the mirror unit 11 of the light deflection unit 10 is reflected and deflected by the mirror unit 11 and imaged on the photosensitive drum 113 by the scanning lenses 33 and 35. In other words, an electrostatic latent image is formed on the photosensitive drum 113 by scanning the photosensitive drum 113 with the light beam LB.

  The exposure unit 115 further includes BD (Beam Detect) lenses 41a and 41b and BD sensors (light detection units) 43a and 43b. When the light beam LB scans the photosensitive drum 113 from one side 113a to the other side 113b of the photosensitive drum 113, the light beam LB exceeding the effective scanning range R is BD lens 41a, The light is condensed by 41b and received by the BD sensors 43a and 43b. When receiving the light beam LB exceeding the effective scanning range R, each of the BD sensors 43a and 43b outputs a detection signal indicating that the light beam LB has been received. The detection signals output from the BD sensors 43a and 43b are used to synchronize the image signal representing the electrostatic latent image formed on the photosensitive drum 113 with the timing for scanning the effective scanning range R. The

  The light deflection unit 10 will be described. FIG. 4 is a diagram illustrating the principle of the light deflecting unit 10. 5A is a cross-sectional view of the optical deflection unit 10 shown in FIG. 4 cut along the line AA. FIG. 5B is a cross-sectional view of the optical deflection unit 10 shown in FIG. It is sectional drawing cut | disconnected along.

  The light deflection unit 10 includes a mirror unit 11, a movable frame 16, a fixed frame 13, torsion bars 15a, 15b, and 15c, and mirror drive units (drive units) 17a, 17b, 17c, 17d, 17e, 17f, 17g, and 17h. Prepare.

  The mirror unit 11 is a rectangular plate-shaped MEMS mirror. The mirror unit 11 is fixed to a torsion bar (first torsion bar) 15 a and is disposed at the center of the light deflection unit 10. The light beam LB enters the mirror unit 11 and is reflected and deflected by the mirror unit 11.

  The shape of the movable frame 16 is a rectangle. The movable frame 16 includes a pair of side parts 16a and 16b, a pair of side parts 16c and 16d extending in a direction orthogonal to the pair of side parts 16a and 16b, and beams 16e supported by the pair of side parts 16c and 16d. 16f.

  The torsion bar 15 a extends in the short side direction of the mirror part 11 so as to pass through the center part of the long side of the mirror part 11. One end of the torsion bar 15a is supported by the beam 16e, and the other end of the torsion bar 15a is supported by the beam 16f.

  On the beam 16e, a mirror driving unit 17e is formed on the side 16c side of the torsion bar 15a, and a mirror driving unit 17f is formed on the side 16d side of the torsion bar 15a. On the beam 16f, a mirror drive unit 17g is formed on the side 16c side of the torsion bar 15a, and a mirror drive unit 17h is formed on the side 16d side of the torsion bar 15a.

  The shape of the fixed frame 13 is a rectangle. The fixed frame 13 is fixed to the outside of the movable frame 16, and includes a pair of sides 13a and 13b, a pair of sides 13c and 13d extending in a direction orthogonal to the pair of sides 13a and 13b, and a pair of sides 13c. , 13d and beams 13e, 13f supported by 13d.

  The torsion bars (second torsion bars) 15b and 15c extend on the same axis as that of the torsion bar 15a. That is, the ends of the torsion bars 15b and 15c extend through the center of the long side of the mirror unit 11. The portion 11 extends in the short side direction. One end of the torsion bar 15b is supported by the beam 13e, and the other end of the torsion bar 15b supports the side portion 16a of the movable frame 16. One end of the torsion bar 15c is supported by the beam 13f, and the other end of the torsion bar 15c supports the side portion 16b of the movable frame 16. That is, the movable frame 16 is supported by the torsion bars 15b and 15c.

  On the beam 13e, a mirror drive unit 17a is formed on the side 13c side of the torsion bar 15b, and a mirror drive unit 17b is formed on the side 13d side of the torsion bar 15b. On the beam 13f, a mirror drive unit 17c is formed on the side 13c side of the torsion bar 15c, and a mirror drive unit 17d is formed on the side 13d side of the torsion bar 15c.

  As shown in FIG. 5A, the mirror driving unit 17a includes a lower electrode 23, a PZT thin film 25, and an upper electrode 27. The mirror driving units 17b, 17c, and 17d have the same configuration as the mirror driving unit 17a. Reference numeral NL denotes a normal line to the fixed frame 13.

  Hereinafter, the mirror driving units 17a, 17b, 17c, and 17d will be referred to as the mirror driving unit 171 unless it is necessary to distinguish them. An alternating voltage that fluctuates at a predetermined fixed basic cycle is applied to the mirror driving unit 171 as a driving voltage. Hereinafter, the driving voltage of the mirror driving unit 171 is referred to as a basic driving voltage.

  As illustrated in FIG. 5B, the mirror driving unit 17 e includes a lower electrode 23, a PZT thin film 25, and an upper electrode 27. The mirror driving units 17f, 17g, and 17h have the same configuration as the mirror driving unit 17e. Reference numeral NL denotes a normal line to the fixed frame 13.

  Hereinafter, the mirror driving units 17e, 17f, 17g, and 17h will be referred to as the mirror driving unit 172 unless it is necessary to distinguish them. The mirror drive unit 172 is supplied with an alternating voltage, which is a cycle shorter than the above basic cycle, which is a variation cycle of the basic drive voltage, and fluctuates at a predetermined constant superposition cycle as a drive voltage. Hereinafter, the driving voltage of the mirror driving unit 172 is referred to as a superimposed driving voltage.

  FIG. 6A shows the same cross section as FIG. 5A, in which the PZT thin film 25 of the mirror driving units 17a and 17c (first driving unit) extends and the mirror driving units 17b and 17d (second driving unit). It is a figure which shows the state which applied the basic drive voltage to the mirror drive part 171 so that the PZT thin film 25 may shrink. The beams 13e and 13f are bent, whereby the torsion bars 15b and 15c are twisted, and the movable frame 16 is tilted together with the torsion bars 15b and 15c.

  The operation in which the torsion bars 15b and 15c are twisted rightward as the PZT thin film 25 of the mirror driving units 17a and 17c extends and the PZT thin film 25 of the mirror driving units 17b and 17d contracts is defined as a first operation. On the other hand, when the PZT thin film 25 of the mirror driving units 17a and 17c is contracted and the PZT thin film 25 of the mirror driving units 17b and 17d is extended, the operation of twisting the torsion bars 15b and 15c in the left direction is a second operation.

  The phase of the basic drive voltage applied to the mirror drive units 17a and 17c and the phase of the basic drive voltage applied to the mirror drive units 17b and 17d are inverted so that the first operation and the second operation are alternately repeated. To bend the beams 13e and 13f. As a result, the movable frame 16 rotates about the torsion bars 15b and 15c.

  6B, in the same cross section as FIG. 5B, the PZT thin film 25 of the mirror driving units 17e and 17g (third driving unit) extends, and the mirror driving units 17f and 17h (fourth driving unit). It is a figure which shows the state which applied the superimposition drive voltage to the mirror drive part 172 so that the PZT thin film 25 may shrink. The beams 16e and 16f are bent, whereby the torsion bar 15a is twisted, and the mirror portion 11 is tilted together with the torsion bar 15a.

  The operation in which the PZT thin film 25 of the mirror driving units 17e and 17g is extended and the PZT thin film 25 of the mirror driving units 17f and 17h is contracted to twist the torsion bar 15a in the right direction is a third operation. On the other hand, a fourth operation is an operation in which the torsion bar 15a is twisted leftward as the PZT thin film 25 of the mirror driving units 17e and 17g contracts and the PZT thin film 25 of the mirror driving units 17f and 17h extends.

  The phase of the superimposed drive voltage applied to the mirror drive units 17e and 17g and the phase of the superimposed drive voltage applied to the mirror drive units 17f and 17h are inverted so that the third operation and the fourth operation are alternately repeated. To bend the beams 16e and 16f. Thereby, the mirror part 11 rotates around the torsion bar 15a.

Next, the variation of the deflection angle θ with respect to the normal NL of the movable frame 16 and the mirror unit 11 will be described with reference to FIG. FIG. 7 is a diagram illustrating a change with time of the deflection angle θ of the movable frame 16 and the mirror unit 11. 7, the graph G ₁ are movable frame 16 is caused to rotate, which shows the time variation of the deflection angle θ of the movable frame 16 relative to the normal NL when driving the mirror driving portion 171. The time change shows a waveform of a sine wave (θ ₁ (t) = A ₁ sin ωt) having an amplitude of A ₁ and an angular frequency of ω. Hereinafter, a sine wave having the amplitude A ₁ and the angular frequency ω will be referred to as a basic sine wave θ ₁ . Here, there is a relationship of ω = 2π / T (= 2πf) between the angular frequency ω and one cycle T (frequency f) of the sine wave.

Further, in FIG. 7, the graph G ₂ is, when driving only the mirror driving unit 172 without driving the mirror driving unit 171, the mirror unit 11 is caused to rotate, the deflection of the mirror 11 with respect to the normal line NL The time change of the angle θ is shown. That is, the change with time indicates a change with time of the deflection angle θ of the mirror unit 11 with respect to the movable frame 16 that is generated by driving the mirror driving unit 172. The time change is A ₃ whose amplitude is smaller than A ₁ and the angular frequency is 3ω that is three times the basic sine wave θ ₁ , that is, the frequency is three times that of the basic sine wave θ ₁ . It shows that it fluctuates with a sine wave (θ ₃ (t) = A ₃ sin 3ωt). Hereinafter, the amplitude at A _3, angular frequency is described as superimposed sinusoidal theta ₃ sine wave 3 [omega].

That is, by driving both the mirror driving unit 171 and the mirror driving unit 172 and superimposing the basic sine wave θ ₁ and the superimposed sine wave θ ₃ , as shown in the graph G _{0 of} FIG. The angle θ is time-varying with a waveform of a substantially triangular wave (θ ₀ (t) = A ₁ sin ωt + A ₃ sin 3ωt). As a result, the light beam LB incident on the mirror unit 11 is reflected and deflected toward the photosensitive drum 113 at a substantially constant speed, and an electrostatic latent image can be formed on the photosensitive drum 113 at a substantially constant speed. it can. Hereinafter referred to as the substantially triangular wave substantially triangular wave theta _0.

  FIG. 8 is a block diagram showing the configuration of the exposure unit 115. The exposure unit 115 includes a light source 31, a light deflection unit 10, BD sensors 43a and 43b, a correction value calculation unit 51, a first DAC (basic voltage generation unit) 52, a first amplifier (basic voltage amplification unit) 53, and a basic waveform shaping. Unit 54, second DAC (superimposed voltage generation unit) 55, second amplifier (superimposed voltage amplification unit) 56, and superimposed waveform shaping unit 57.

  The light beam LB output from the light source 31 is scanned by being reflected and deflected by the mirror unit 11 oscillated by the mirror driving units 171 and 172 in the light deflecting unit 10. When receiving the light beam LB exceeding the effective scanning range R (FIG. 3), each of the BD sensors 43a and 43b outputs a detection signal indicating that the light beam LB has been received to the correction value calculation unit 51.

  The correction value calculation unit 51 corrects the basic drive voltage supplied to the mirror drive unit 171 in order to compensate for the change in the deflection angle θ of the mirror unit 11 due to environmental changes such as ambient temperature and aging deterioration. A correction value such as a basic correction voltage value that is a voltage value at the time of the correction, a superposition correction voltage value that is a voltage value when the superimposition drive voltage supplied to the mirror driving unit 172 is corrected, and the like are calculated.

  Specifically, a method in which the correction value calculation unit 51 compensates for a change in the deflection angle θ of the mirror unit 11 will be described with reference to FIG. The BD sensor 43 a is fixed at a position where the light beam LB reflected by the mirror unit 11 is incident when the deflection angle θ of the mirror unit 11 is θa, and the BD sensor 43 b is a deflection angle of the mirror unit 11. When θ is θb, the light beam LB reflected by the mirror unit 11 is fixed at a position where it is incident.

Further, θa and θb have a relationship of θb = A ₁ √3 / 2 and | θb | ≠ | θa | using the amplitude A ₁ of the basic sine wave θ ₁ . For this reason, the basic sine wave θ ₁ shows a value equal to the amplitude A ₁ when a quarter of one cycle T has elapsed, and when a sixth of one cycle T has elapsed and three of one cycle T. When one-minute has elapsed, a value equal to θb corresponding to the fixed position of the BD sensor 43b is shown.

The BD sensors 43a and 43b output a detection signal indicating that the light beam LB has been received four times during one period T to the correction value calculation unit 51 as the mirror unit 11 reciprocates (oscillates). . As a result, the correction value calculation unit 51 calculates four signal intervals t ₁ , t ₁₂ , t ₂ , and t ₂₁ . The four signal intervals when the deflection angle characteristic of the mirror unit 11 is in the initial state are stored in advance in a ROM or the like as experimental values obtained by a test operation or the like.

In the case where the amplitude A ₃ of the fundamental sine wave theta ₁ of the amplitude A ₁ and superimposed sinusoidal theta ₃ is not changed both remain in the initial state, shown in the graph G ₀ in FIG. 7, the fundamental sine wave theta ₁ and superimposed sinusoidal when the waves theta ₃ substantially triangular wave theta ₀ obtained by superimposing is θ ₀ (t) = θb, superimposed sinusoidal theta ₃ is 0. That is, even if the magnitude of the amplitude A ₃ of the superimposed sine wave θ ₃ changes, it is considered that the signal interval t ₁ does not change due to the change.

Therefore, the correction value calculating unit 51, if the signal interval t ₁ is smaller than that stored in the ROM or the like, in order to increase correcting the time interval of the detection signal output from the BD sensor 43 b, the basic sine A voltage value necessary for increasing the magnitude (absolute value) of the amplitude A ₁ of the wave θ ₁ is calculated as a basic correction voltage value. The correction value calculating unit 51, if the signal interval t ₁ is greater than that stored in the ROM or the like, in order to correct small time interval of the detection signal output from the BD sensor 43 b, the fundamental sine wave A voltage value necessary to reduce the magnitude of the amplitude A ₁ of θ ₁ is calculated as a basic correction voltage value. Note that the relationship between the adjustment amount of the amplitude A ₁ of the basic sine wave θ ₁ and the adjustment amount of the voltage value of the basic drive voltage is stored in advance in a ROM or the like based on experimental values such as test operation.

Then, the correction value calculation unit 51 passes through a first DAC 52, a first amplifier 53, and a basic waveform shaping unit 54, which will be described later, with a basic drive voltage that is equal to the calculated basic correction voltage value. 171 is driven, and if the signal interval t ₂ in this case is less than that stored in the ROM or the like, in order to increase correcting the time interval of the detection signal output from the BD sensor 43a, superimposed sine wave A voltage value necessary to increase the magnitude (absolute value) of the amplitude A ₃ of θ ₃ is calculated as the superimposed correction voltage value.

The correction value calculation unit 51, which signal interval t ₂ when the voltage value drives the mirror driving unit 171 equally since basic driving voltage to the basic correction voltage value calculated is stored in the ROM or the like Is larger than the voltage value necessary for reducing the magnitude of the amplitude A ₃ of the superimposed sine wave θ ₃ in order to correct the time interval of the detection signal output from the BD sensor 43a to be small. Calculate as a value. Note that the relationship between the adjustment amount of the amplitude A ₃ of the superimposed sine wave θ ₃ and the adjustment amount of the voltage value of the superimposed drive voltage is stored in advance in a ROM or the like based on experimental values such as test operation.

  Returning to FIG. 8, the correction value calculation unit 51 outputs a digital signal indicating a voltage value smaller than the basic correction voltage value as a result of dividing the calculated basic correction voltage value by an amplification factor used in the first amplifier 53 described later. Output to one DAC 52. In addition, the correction value calculation unit 51 supplies a digital signal indicating a voltage value smaller than the superposition correction voltage value to the second DAC 55 as a result of dividing the calculated superposition correction voltage value by an amplification factor used in the second amplifier 56 described later. Output.

  The first DAC 52 is a so-called digital-analog converter, generates a DC voltage V <b> 1 indicated by the digital signal input from the correction value calculation unit 51, and outputs it to the first amplifier 53. Similarly, the second DAC 55 is a so-called digital / analog converter, which generates a DC voltage V <b> 5 indicated by the digital signal input from the correction value calculation unit 51 and outputs it to the second amplifier 56.

  The first amplifier 53 amplifies the DC voltage V <b> 1 input from the first DAC 52 with a predetermined amplification factor, and outputs a voltage V <b> 2 equal to the basic correction voltage value to the basic waveform shaping unit 54. Similarly, the second amplifier 56 amplifies the DC voltage V5 input from the second DAC 55 with a predetermined amplification factor, and outputs a voltage V6 equal to the superimposed correction voltage value to the superimposed waveform shaping unit 57.

The basic waveform shaping unit 54, the amplified DC voltage V2 at the first amplifier 53, is shaped to vary the basic period is a period equal to the period of the fundamental sine wave theta ₁ above. Similarly, superimposing the waveform shaping section 57, a DC voltage V6 amplified by the second amplifier 56, a period equal to the period of the superimposition sinusoidal theta _3, that is, in the first cycle of 3 minutes fundamental period Shape so that it fluctuates in a certain superposition cycle.

  Specifically, the basic waveform shaping unit 54 includes a basic switching element 541 and a basic switching control unit 542.

  The basic switching element 541 is provided between the first amplifier 53 and the mirror driving unit 171, and the output destination of the DC voltage V2 amplified by the first amplifier 53 is the mirror driving unit 17a, 17c or the mirror driving unit 17b, 17d. It is an element to switch to. The basic switching control unit 542 switches the basic switching element 541 every half of the basic period.

  Similarly, specifically, the superimposed waveform shaping unit 57 includes a superimposed switching element 571 and a superimposed switching control unit 572.

  The superposition switching element 571 is provided between the second amplifier 56 and the mirror driving unit 172, and the output destination of the DC voltage V6 amplified by the second amplifier 56 is the mirror driving units 17e and 17g or the mirror driving units 17f and 17h. It is an element to switch to. The superposition switching control unit 572 switches the superposition switching element 571 every half of the superposition period.

  FIG. 9A is a diagram illustrating a change in the voltage value of the DC voltage V1 input to the first amplifier 53 and a change in the voltage value of the DC voltage V2 input to the basic waveform shaping unit 54. FIG. 9B is a diagram showing a change in the voltage value of the drive voltage V3 which is a DC voltage input to the mirror drive units 17a and 17c. FIG. 9C is a diagram showing a change in the voltage value of the drive voltage V4 that is a DC voltage input to the mirror drive units 17b and 17d. FIG. 10 is a diagram showing a change in the deflection angle of the movable frame 16 according to a change in the voltage values of the drive voltages V3 and V4.

  As shown in FIG. 9A, when the DC voltage V1 input to the first amplifier 53 rises at time t0 based on the basic correction voltage value calculated by the correction value calculation unit 51, the basic waveform shaping unit. The waveform of the DC voltage V2 input to 54 and amplified by the first amplifier 53 rises smoothly. The reason why the waveform of the DC voltage V2 rises smoothly is that the response of the first amplifier 53 is poor.

  Thereafter, in the basic waveform shaping unit 54, the basic switching control unit 542 switches the basic switching element 541 every cycle T / 2 that is half the basic cycle T, and the DC voltage V2 input to the basic waveform shaping unit 54 is switched. Are alternately switched and output between the mirror driving units 17a and 17c and the mirror driving units 17b and 17d every cycle T / 2 which is half the basic cycle T. As a result, the basic waveform shaping unit 54 shapes the waveform of the DC voltage V2 amplified by the first amplifier 53 into a rectangular wave that fluctuates in the basic period T, as shown in FIGS. 9B and 9C. The drive voltage V3 of the mirror drive units 17a and 17c and the drive voltage V4 of the mirror drive units 17b and 17d are output.

  As shown in FIG. 10, the deflection angle of the movable frame 16 is determined by the drive voltage supplied to the mirror drive units 17a and 17c and the mirror drive units 17b and 17d shown in FIGS. 9B and 9C. According to V3 and V4, the maximum deflection angle increases and changes in the basic period T when the half period T / 2 of the basic period T elapses from time t0.

  FIG. 11A is a diagram illustrating a change in the voltage value of the DC voltage V <b> 5 input to the second amplifier 56 and a change in the voltage value of the DC voltage V <b> 6 input to the superimposed waveform shaping unit 57. FIG. 11B is a diagram illustrating a change in the voltage value of the drive voltage V7 which is a DC voltage input to the mirror drive units 17e and 17g. FIG. 11C is a diagram showing a change in the voltage value of the drive voltage V8 which is a DC voltage input to the mirror drive units 17f and 17h. FIG. 12 is a diagram showing a relative change of the deflection angle of the mirror portion 11 with respect to the movable frame 16 in accordance with a change in the voltage values of the drive voltages V7 and V8.

  As shown in FIG. 11A, when the DC voltage V5 input to the second amplifier 56 rises at time t0 based on the superimposed correction voltage value calculated by the correction value calculation unit 51, the superimposed waveform shaping unit. The waveform of the DC voltage V6 input to 57 and amplified by the second amplifier 56 rises smoothly. The reason why the waveform of the DC voltage V6 rises smoothly is that the response of the second amplifier 56 is poor.

  Thereafter, in the superimposed waveform shaping unit 57, as shown in FIGS. 11B and 11C, the superimposed switching control unit 572 performs the superimposed switching element 571 every cycle T / 6 that is half of the superimposed cycle T / 3. Is switched, and the DC voltage V6 input to the superimposed waveform shaping unit 57 is between the mirror driving units 17b and 17d and the mirror driving units 17a and 17c every cycle T / 6 that is half of the superposition cycle T / 3. Are alternately switched and output. That is, the superimposed waveform shaping unit 57 shapes the waveform of the DC voltage V6 amplified by the second amplifier 56 into a rectangular wave that fluctuates at the superposition period T / 3, and the drive voltage V7 and mirror drive of the mirror drive units 17e and 17g. It outputs as drive voltage V8 of the parts 17f and 17h.

  As shown in FIG. 12, the relative deflection angle of the mirror unit 11 with respect to the movable frame 16 is the mirror driving units 17e and 17g and the mirror driving unit shown in FIGS. 11 (b) and 11 (c). Depending on the drive voltages V7 and V8 supplied to 17f and 17h, the maximum deflection angle increases when the half period T / 6 of the superposition period T / 3 elapses from time t0, and the superposition period T / 3 will change.

  According to the configuration of the above embodiment, the first DAC 52 generates the DC voltage V1 having a voltage value lower than the basic correction voltage value, and the generated DC voltage V1 is the voltage value equal to the basic correction voltage value by the first amplifier 53. It is amplified so that it becomes. Then, the waveform of the amplified DC voltage V2 is shaped by the basic waveform shaping unit 54 so as to fluctuate in a rectangular wave shape at the basic period, and the AC voltages V3 and V4 that fluctuate at the basic period are used as the basic drive voltage as the mirror drive part 171 is output.

  Similarly, a DC voltage V5 having a voltage value lower than the superimposed correction voltage value is generated by the second DAC 55, and the generated DC voltage V5 is amplified by the second amplifier 56 so as to have a voltage value equal to the superimposed correction voltage value. The The waveform of the amplified DC voltage V6 is shaped by the superposition waveform shaping unit 57 so as to fluctuate in a rectangular wave shape with a superposition period equal to one-third of the basic period, and the alternating current that fluctuates in this superposition period. The voltages V7 and V8 are output to the mirror drive unit 172 as a superimposed drive voltage.

  That is, in this embodiment, as a configuration for generating the basic drive voltage and the superimposed drive voltage, instead of an expensive oscillator that can generate a sine wave used in the prior art, an inexpensive DC voltage can be generated. The first DAC 52 and the second DAC 55 are used. In the prior art, a configuration including an expensive amplifier capable of accurately amplifying a sine wave for each drive voltage is employed. However, in this embodiment, a DC voltage is accurately amplified with a preset amplification factor. A configuration including a possible inexpensive first amplifier 53 and second amplifier 56 is employed. As a result, an optical scanning device including a MEMS mirror that is driven by superimposing the basic drive voltage and the superimposed drive voltage can be provided at low cost.

  The basic waveform shaping unit 54 includes a basic switching element 541 and a basic switching control unit 542. That is, with a simple configuration in which the output destination of the DC voltage V2 amplified by the first amplifier 53 is alternately output to the mirror driving units 17a and 17c and the mirror driving units 17b and 17d every half of the basic period. The waveform of the basic drive voltage output to the mirror drive units 17a and 17c and the mirror drive units 17b and 17d can be shaped into a rectangular wave that varies with the basic period.

  The superimposed waveform shaping unit 57 includes a superimposed switching element 571 and a superimposed switching control unit 572. That is, with a simple configuration in which the output destination of the DC voltage V6 amplified by the second amplifier 56 is alternately output to the mirror driving units 17e and 17g and the mirror driving units 17f and 17h every half of the superposition period. The waveform of the superimposed drive voltage output to the mirror drive units 17e and 17g and the mirror drive units 17f and 17h can be shaped into a rectangular wave that fluctuates with the overlap period.

  In addition, the basic waveform shaping unit 54 can be configured at low cost by using an inexpensive switching element that switches the drive voltage supply path in at least two directions.

  In addition, the superimposed waveform shaping unit 57 can be configured at low cost by using an inexpensive switching element that switches the drive voltage supply path in at least two directions.

  Note that the configurations and settings shown in FIGS. 1 to 12 in the above embodiment are merely examples, and are not intended to limit the present invention.

  For example, the correction value calculation unit 51 is configured to calculate the superposition correction voltage value so as to cancel the driving force of the mirror unit 11 generated by the frequency component of the superposition period included in the basic drive voltage shaped into a rectangular wave. May be.

The configuration will be described in detail. FIG. 13 is a diagram illustrating the relationship between the time change of the basic drive voltage shaped into a rectangular wave and the fundamental wave and the third harmonic of the rectangular wave. As shown in the graph W _{0 of} FIG. 13, the basic waveform shaping unit 54 changes the basic drive voltage over time v ₀ (t) shaped into a rectangular wave having a voltage value V ₁ ′ and varying in the basic period T. Is a sine wave having a frequency of ω / 2π (sin ωt), a sine wave having a frequency of 3ω / 2π (sin 3ωt), a sine wave having a frequency of 5ω / 2π (sin 5ωt), and so on. A plurality of sine waves having an odd multiple of the frequency ω / 2π can be combined.

In FIG. 13, among the sine waves constituting the rectangular wave of the graph W ₀ , in particular, a fundamental wave that is a sine wave (sin ωt) of ω / 2π whose frequency is equal to the frequency of the fundamental sine wave is shown in the graph W ₁ . frequency indicates the third harmonic is a sine wave equal 3 [omega] / 2 [pi to three times the frequency of the fundamental sine wave (sin3ωt) in the graph W _3. As described above, the basic drive voltage includes a sine wave having a frequency three times that of the basic sine wave, that is, a frequency component having a superposition period.

The sine wave having a frequency three times that of the basic sine wave is in an opposite phase to the phase of the superimposed sine wave θ ₃ constituting the substantially triangular wave θ ₀ shown in FIG. Therefore, when the mirror drive unit 171 is driven by the basic drive voltage shaped into a rectangular wave, the torsion bar 15a is driven by the drive voltage based on the frequency component of the superposition period included in the rectangular wave of the waveform of the basic drive voltage. There is a risk of deterring.

  That is, when the torsion bar 15a is twisted using a rectangular wave that is equal to the superimposed correction voltage value that fluctuates in the overlapping period, the movable frame 16 is driven by twisting the torsion bars 15b and 15c. There is a possibility that the torsion bar 15a cannot be accurately twisted by the frequency component of the superposition period included in the shaped basic drive voltage.

  Therefore, in this configuration, when calculating the superimposed correction voltage value, the correction value calculation unit 51 deletes only the voltage value indicated by the sine wave having a frequency three times that of the basic sine wave indicated by the dotted line in FIG. The superposition correction voltage value is calculated by performing subtraction.

  According to this configuration, the correction value calculation unit 51 performs superimposition so as to cancel the driving force of the mirror unit 11 generated by the harmonic component having the same period as the superposition period included in the basic drive voltage shaped into a rectangular wave. Since the correction voltage value is calculated, the torsion bar 15a can be twisted with high accuracy.

  Further, the correction value calculation unit 51 further calculates a basic correction duty ratio that is a duty ratio indicating a ratio of a period during which the DC voltage V2 amplified by the first amplifier 53 is output to the mirror driving unit 171 in the basic period. You may comprise. Accordingly, the basic waveform shaping unit 54 may be configured to set the basic drive voltage to a high level during the period corresponding to the basic correction duty ratio calculated by the correction value calculation unit 51 in the basic period. Good.

FIG. 14 is a block diagram showing a configuration of the exposure unit 115 in the configuration. As shown in FIG. 14, the correction value calculation unit 51 uses the timing at which the detection signals are output from the BD sensors 43a and 43b to compensate for the change in the deflection angle θ of the mirror unit 11 as described above. The basic sine wave θ ₁ is calculated as a basic correction voltage value by calculating a voltage value necessary to coarsely correct the amplitude A ₁ of the basic sine wave θ ₁ (eg, to compensate for 95% of the change). A basic correction duty ratio for correcting the magnitude of the amplitude A ₁ of the wave θ _{1 to} a small amount (for example, to compensate for 5% of the amount of change) is calculated and output to the basic waveform shaping unit 54.

  In accordance with this, the basic switching element 541 can switch the output destination of the DC voltage V2 amplified by the first amplifier 53 to the load L1 in addition to the mirror driving units 17a and 17c and the mirror driving units 17b and 17d. It is configured.

  FIG. 15A is a diagram showing a change in the voltage value of the drive voltage V3, which is a DC voltage input to the mirror drive units 17a and 17c, according to the basic correction duty ratio calculated by the correction value calculation unit 51. is there. FIG. 15B is a diagram illustrating a change in the voltage value of the DC voltage VL1 input to the load L1 according to the basic correction duty ratio calculated by the correction value calculation unit 51. FIG. 15C is a diagram showing a change in the voltage value of the drive voltage V4, which is a DC voltage input to the mirror drive units 17b and 17d, according to the basic correction duty ratio calculated by the correction value calculation unit 51. is there.

  When the basic correction duty ratio calculated by the correction value calculation unit 51 is, for example, 40%, the basic switching control unit 542, as shown in FIG. 15A, the basic correction duty calculated by the correction value calculation unit 51. In accordance with the ratio of 40%, the basic switching element is configured so that the output destination of the DC voltage V2 amplified by the first amplifier 53 is the mirror drive units 17a and 17c during the first 40% period of the basic period T. 541 is switched.

  Subsequently, as shown in FIG. 15B, the basic switching control unit 542 performs a period of 10% of the basic period T, which is the remaining period until the half period T / 2 of the basic period T elapses. The basic switching element 541 is switched so that the output destination of the DC voltage V2 amplified by one amplifier 53 is the load L1.

  Subsequently, as shown in FIG. 15C, the basic switching control unit 542 determines the output destination of the DC voltage V2 amplified by the first amplifier 53 for a period of 40% of the basic period T as the mirror driving unit 17b. , 17d, the basic switching element 541 is switched.

  Then, as shown in FIG. 15 (b), the basic switching control unit 542 performs the direct current amplified by the first amplifier 53 for a period of 10% of the basic period T, which is the remaining period until the basic period T elapses. The basic switching element 541 is switched so that the output destination of the voltage V2 is the load L1.

  According to this configuration, not only the basic correction voltage value but also the basic correction duty ratio is used to adjust the period during which the basic drive voltage is applied to the mirror drive unit 171, thereby supplying the mirror drive unit 171. The drive voltage can be corrected.

  Similarly, the correction value calculation unit 51 includes a superposition correction duty that is a duty ratio indicating a ratio of a period during which the DC voltage V6 amplified by the second amplifier 56 is output to the mirror drive unit 172 in the superposition period. The ratio may be further calculated. Accordingly, the superimposed waveform shaping unit 57 may be configured to set the superimposed drive voltage to a high level during the period corresponding to the superimposed correction duty ratio calculated by the correction value calculation unit 51 in the superposition period. Good.

FIG. 16 is a block diagram showing a configuration of the exposure unit 115 in the configuration. As shown in FIG. 16, the correction value calculation unit 51 uses the timing at which the detection signals are output from the BD sensors 43a and 43b to compensate for the change in the deflection angle θ of the mirror unit 11 as described above. The voltage value necessary for correcting the amplitude A ₃ of the superimposed sine wave θ ₃ to be coarse (for example, to compensate for 95% of the change amount) is calculated as the superimposed correction voltage value, and the superimposed sine A superposition correction duty ratio for correcting the magnitude of the amplitude A ₃ of the wave θ ₃ to be slightly remaining (for example, to compensate for 5% of the amount of change) is calculated and output to the superposition waveform shaping unit 57.

  In accordance with this, the superposition switching element 571 can switch the output destination of the DC voltage V6 amplified by the second amplifier 56 to the load L2 in addition to the mirror driving units 17e and 17g and the mirror driving units 17f and 17h. It is configured.

  FIG. 17A is a diagram illustrating a change in the voltage value of the drive voltage V7 that is a DC voltage input to the mirror drive units 17e and 17g according to the superimposition correction duty ratio calculated by the correction value calculation unit 51. is there. FIG. 17B is a diagram illustrating a change in the voltage value of the DC voltage VL2 input to the load L2 according to the superimposition correction duty ratio calculated by the correction value calculation unit 51. FIG. 17C is a diagram illustrating a change in the voltage value of the drive voltage V8 that is a DC voltage input to the mirror drive units 17b and 17d according to the superimposition correction duty ratio calculated by the correction value calculation unit 51. is there.

  When the superposition correction duty ratio calculated by the correction value calculation unit 51 is 40%, for example, the superposition switching control unit 572 displays the superposition correction duty calculated by the correction value calculation unit 51 as shown in FIG. In accordance with the ratio 40%, the first 40% period of the superposition period T / 3 is superposed so that the output destination of the DC voltage V6 amplified by the second amplifier 56 is the mirror drive units 17f and 17h. The switching element 571 is switched.

  Subsequently, as illustrated in FIG. 17B, the superimposition switching control unit 572 performs 10% of the superposition period T / 3 that is the remaining period until the half period T / 6 of the superposition period T / 3 has elapsed. During this period, the superposition switching element 571 is switched so that the output destination of the DC voltage V6 amplified by the second amplifier 56 is the load L2.

  Subsequently, as shown in FIG. 17A, the superposition switching control unit 572 performs mirror drive on the output destination of the DC voltage V6 amplified by the second amplifier 56 for a period of 40% of the superposition period T / 3. The superimposing switching element 571 is switched so that the parts 17e and 17g are formed.

  Then, as shown in FIG. 17B, the superimposing switching control unit 572 uses the second amplifier 56 for a period of 10% of the superimposing period T / 3 that is the remaining period until the superimposing period T / 3 elapses. The superimposed switching element 571 is switched so that the output destination of the amplified DC voltage V6 is the load L2.

  According to this configuration, not only the superimposition correction voltage value but also the superimposition correction duty ratio is used to adjust the period during which the superimposition driving voltage is applied to the mirror driving unit 172, thereby supplying the mirror driving unit 172 with it. The drive voltage can be corrected.

  The correction value calculation unit 51 includes the configuration described with reference to FIGS. 14, 15 (a), 15 (b), and 15 (c), and FIGS. 16, 17 (a), In combination with the configuration described with reference to FIGS. 17B and 17C, the basic correction duty ratio and the superimposition correction duty ratio are calculated together. 54, the basic drive voltage is set to a high level during a period corresponding to the basic correction duty ratio in the basic period T. May be configured to be at a high level.

  In the above configuration, the first amplifier 53 is configured to amplify the direct-current voltage V1 output from the first DAC 52 with a predetermined amplification factor. The amplifier may be configured to amplify the DC voltage output from the first DAC 52 with a variable amplification factor.

  In accordance with this, the first DAC 52 supplies a DC voltage having a fixed voltage value (initial basic voltage value) that is sufficiently smaller than the basic correction voltage value calculated by the correction value calculation unit 51 to the first amplifier 53. Configure to output. Then, a basic gain setting unit that calculates a value obtained by dividing the basic correction voltage value calculated by the correction value calculating unit 51 by the initial basic voltage value and sets the calculated value as the gain of the first amplifier 53 (see FIG. Are configured to be further provided in the exposure unit 115.

  According to this configuration, the first DAC 52 generates a DC voltage having an initial basic voltage value, which is a voltage value fixed in advance lower than the basic correction voltage value. That is, it is possible to make the first DAC 52 simple and inexpensive as compared to the case where the first DAC 52 is configured to generate DC voltages having various voltage values.

  In the above configuration, the second amplifier 56 is configured to amplify the DC voltage V5 output from the second DAC 55 at a predetermined amplification factor. Alternatively, the DC voltage output from the second DAC 55 may be configured by an amplifier capable of amplifying with a variable amplification factor.

  In accordance with this, the second DAC 55 supplies a DC voltage having a voltage value (initial superimposed voltage value) that is sufficiently smaller than the superimposed correction voltage value calculated by the correction value calculation unit 51 to the second amplifier 56. It is configured to output the output. Then, a value obtained by dividing the superimposed correction voltage value calculated by the correction value calculation unit 51 by the initial superimposed voltage value is calculated, and the calculated value is set as the amplification factor of the second amplifier 56 (see FIG. Are configured to be further provided in the exposure unit 115.

  According to this configuration, the second DAC 55 generates a DC voltage having an initial superimposed voltage value that is a voltage value fixed in advance lower than the superimposed correction voltage value. That is, it is possible to make the second DAC 55 simple and inexpensive as compared with the case where the second DAC 55 is configured to generate DC voltages having various voltage values.

Also, if the amplitude A ₃ of the fundamental sine wave theta ₁ of the amplitude A ₁ and superimposed sinusoidal theta ₃ is not changed both remain in the initial state, from the symmetry of the substantially triangular wave theta ₀ shown in the graph G ₀ 7 and the signal interval _{t 12} and the signal interval _{t 21} is equal. Therefore, if the signal interval t ₁₂ and the signal interval t ₂₁ calculated by the correction value calculating unit 51 is different from the above symmetry is broken, the phase difference occurs in the fundamental sine wave theta ₁ and superimposed sinusoidal theta ₃ It is thought that.

Therefore, the correction value calculation unit 51 calculates the superimposed sine wave θ ₃ so that the calculated signal interval t ₁₂ and the signal interval t ₂₁ are equal when the calculated signal interval t ₁₂ and the signal interval t ₂₁ are different. The phase difference when the phase is advanced or delayed may be calculated based on experimental values, and the phase difference may be output to the basic switching control unit 542 or the superposition switching control unit 572. In accordance with this, the basic switching control unit 542 is configured to shift the switching timing of the basic switching element 541 in accordance with the input phase difference. Alternatively, the superposition switching control unit 572 is configured to shift the switching timing of the superposition switching element 571 according to the input phase difference.

  In the above embodiment, a multifunction peripheral is described as an example of the image forming apparatus according to the present invention. However, the present invention is not limited to an image forming apparatus such as a printer, a copier, or a fax machine, a scanner, a projector, It can also be applied to an optical scanning device such as a barcode reader.

1 MFP (image forming device)
10 Light deflection part 11 Mirror part (MEMS mirror)
113 Photosensitive drum 115 Exposure unit 13 Fixed frame 13a, 13b, 13c, 13d Side (fixed frame)
13e, 13f Beam (fixed frame)
15a Torsion bar (1st torsion bar)
15b, 15c Torsion bar (second torsion bar)
16 Movable frames 16a, 16b, 16c, 16d Side (movable frame)
16e, 16f Beam (movable frame)
17a, 17c Mirror drive unit (drive unit first drive unit)
17b, 17d Mirror drive unit (drive unit second drive unit)
17e, 17g Mirror drive part (drive part 3rd drive part)
17f, 17h Mirror drive part (drive part 4th drive part)
171 and 172 Mirror drive unit (drive unit)
23 Lower electrode 25 PZT thin film 27 Upper electrode 31 Light source 43a, 43b BD sensor (light detection part)
51 Correction Value Calculation Unit 52 First DAC (Basic Voltage Generation Unit)
53 First amplifier (basic voltage amplifier)
54 basic waveform shaping unit 541 basic switching element 542 basic switching control unit 55 second DAC (superimposed voltage generation unit)
56 Second amplifier (superimposed voltage amplifier)
57 Superimposed Waveform Shaping Unit 571 Superimposed Switching Element 572 Superimposed Switching Control Units L1, L2 Load LB Light Beam (Laser Light)

Claims (12)

A MEMS mirror for deflecting the laser beam output from the light source;
A drive unit that swings the MEMS mirror using a basic drive voltage that fluctuates in a predetermined basic period, and a superimposed drive voltage that fluctuates in a superposition period that is shorter than the basic period;
A light detector that receives the laser beam deflected by the MEMS mirror at a predetermined position and outputs a detection signal indicating that the laser beam has been received;
The basic drive voltage is corrected based on the timing at which the detection signal is output by the light detection unit to correct the basic drive voltage and the superimposed drive voltage so as to compensate for a change in the deflection angle of the MEMS mirror. A correction value calculation unit that calculates a basic correction voltage value that is a voltage value to be used when performing a superimposition correction voltage value that is a voltage value to be used when correcting the superposition drive voltage;
A basic voltage generator that generates a DC voltage having a voltage value lower than the basic correction voltage value;
A superimposed voltage generating unit that generates a DC voltage having a voltage value lower than the superimposed correction voltage value;
A basic voltage amplification unit that amplifies the direct-current voltage generated by the basic voltage generation unit to a voltage value equal to the basic correction voltage value;
A superimposed voltage amplifying unit that amplifies the DC voltage generated by the superimposed voltage generation unit so as to have a voltage value equal to the superimposed correction voltage value;
A basic waveform shaping unit that shapes the waveform of the DC voltage amplified by the basic voltage amplification unit into a rectangular wave that fluctuates in the basic period and outputs the waveform to the driving unit as the basic driving voltage;
A superimposed waveform shaping unit that shapes the waveform of the DC voltage amplified by the superimposed voltage amplification unit into a rectangular wave that fluctuates in the superposition period, and outputs the waveform to the drive unit as the superimposed drive voltage;
An optical scanning device comprising: The MEMS mirror is supported by the movable frame in a state where it can be rotated by a twisting operation of the first torsion bar,
The movable frame is supported by a fixed frame provided on the outer side of the movable frame in a state where the movable frame can be rotated by a twisting operation of a second torsion bar having a torsion axis coaxial with the torsion axis of the first torsion bar,
The driving unit twists the second torsion bar using the basic driving voltage to rotate the movable frame, and twists the first torsion bar using the superimposed driving voltage. By rotating the mirror, the MEMS mirror is swung,
The correction value calculation unit calculates the superimposition correction voltage value so as to cancel the driving force of the MEMS mirror generated by the frequency component of the superposition period included in the basic driving voltage shaped into the rectangular wave. 2. An optical scanning device according to 1. The driving unit includes a first driving unit and a second driving unit that drive the movable frame in opposite directions according to the basic driving voltage, and the MEMS mirror according to the overlapping driving voltage. A third driving unit that drives in the same direction, and a fourth driving unit that drives the MEMS mirror in the same direction as the second driving unit according to the overlapping driving voltage,
The basic waveform shaping unit alternately outputs the DC voltage amplified by the basic voltage amplification unit to the first driving unit and the second driving unit every half of the basic cycle. Shaping the waveform of the basic drive voltage output to one drive unit and the second drive unit into rectangular waves that vary in the basic period,
The superimposed waveform shaping unit alternately outputs the DC voltage amplified by the superimposed voltage amplification unit to the third drive unit and the fourth drive unit every half of the superposition period. The optical scanning device according to claim 2, wherein the waveform of the superimposed drive voltage output to the three drive unit and the fourth drive unit is shaped into a rectangular wave that fluctuates in the superposition period.   The basic waveform shaping unit is provided between the basic voltage amplifying unit and the driving unit, and the output destination of the DC voltage amplified by the basic voltage amplifying unit is the first driving unit and the second driving unit. The optical scanning device according to claim 3, further comprising: a basic switching element that switches between and a basic switching control unit that switches the basic switching element every half of the basic period.   The superimposed waveform shaping unit is provided between the superimposed voltage amplification unit and the drive unit, and outputs the direct current voltage amplified by the superimposed voltage amplification unit to the third drive unit and the fourth drive unit. 5. The optical scanning device according to claim 3, further comprising: a superimposing switching element that switches between the superimposing switching element and a superimposing switching control unit that switches the superimposing switching element every half of the superimposing period. The correction value calculation unit further calculates a basic correction duty ratio indicating a ratio of a period during which the DC voltage amplified by the basic voltage amplification unit is output to the drive unit in the basic period,
The basic waveform shaping unit sets the basic drive voltage to a high level during a period corresponding to the basic correction duty ratio calculated by the correction value calculation unit in the basic period. The optical scanning device according to Item. The correction value calculation unit further calculates a superposition correction duty ratio indicating a ratio of a period during which the DC voltage amplified by the superposition voltage amplification unit is output to the drive unit in the superposition period,
The superimposition waveform shaping unit sets the superposition drive voltage to a high level during a period corresponding to the superposition correction duty ratio calculated by the correction value calculation unit in the superposition period. The optical scanning device according to Item. The basic voltage amplifier comprises an amplifier that amplifies the DC voltage generated by the basic voltage generator with a fixed amplification factor,
The said basic voltage production | generation part produces | generates the DC voltage of the voltage value obtained by dividing the said basic correction voltage value by the said fixed amplification factor used in the said basic voltage amplification part. The optical scanning device according to Item. The superposed voltage amplifying unit is composed of an amplifier that amplifies the DC voltage generated by the superposed voltage generating unit with a fixed amplification factor,
9. The superimposition voltage generation unit generates a DC voltage having a voltage value obtained by dividing the superposition correction voltage value by the fixed amplification factor used in the superposition voltage amplification unit. The optical scanning device according to Item. The basic voltage amplification unit includes an amplifier that amplifies the DC voltage generated by the basic voltage generation unit with a variable amplification factor,
The basic voltage generation unit generates a direct-current voltage of an initial basic voltage value that is a fixed voltage value lower than the basic correction voltage value,
The basic amplification factor setting unit that further sets a value obtained by dividing the basic correction voltage value by the initial basic voltage value as the variable amplification factor used in the basic voltage amplification unit. The optical scanning device according to one item. The superposed voltage amplifying unit comprises an amplifier that amplifies the DC voltage generated by the superposed voltage generating unit with a variable amplification factor,
The superimposed voltage generation unit generates a DC voltage of an initial superimposed voltage value that is a voltage value fixed in advance lower than the superimposed correction voltage value,
The superimposed correction voltage value from claim 1, further comprising the initial superimposed voltage value further superimposed amplification factor setting unit for setting a value obtained by dividing the amplification factor of the variable used in the superimposed voltage amplifier at the 7 and 10 The optical scanning device according to any one of the above. An optical scanning device according to any one of claims 1 to 11,
An image forming apparatus comprising: an image forming unit that forms an image corresponding to the latent image on a sheet using a latent image formed on a photosensitive member by the optical scanning device.

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