JP5397296B2 - Gas analyzer - Google Patents

Gas analyzer Download PDF

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JP5397296B2
JP5397296B2 JP2010086355A JP2010086355A JP5397296B2 JP 5397296 B2 JP5397296 B2 JP 5397296B2 JP 2010086355 A JP2010086355 A JP 2010086355A JP 2010086355 A JP2010086355 A JP 2010086355A JP 5397296 B2 JP5397296 B2 JP 5397296B2
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cell
light
gas analyzer
mirror
gas
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JP2011220689A (en
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豊彦 田中
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Shimadzu Corp
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Description

本発明は、光吸収分析法により気体中の微量成分を計測するガス分析装置に関する。   The present invention relates to a gas analyzer that measures trace components in a gas by a light absorption analysis method.

光吸収分析でガス濃度を測定する場合、ランバートベールの法則により感度は光路長に比例するので、高感度を必要とする分析装置ではセルの内部で光を多重反射させることにより光路長を長くする構造が採用される。例えば、特許文献1に示された例は、2枚の平面鏡を平行に配置し、その間で光を幾度も折り返す構成である。   When measuring gas concentration by optical absorption analysis, the sensitivity is proportional to the optical path length according to Lambert-Beer's law. Therefore, in analyzers that require high sensitivity, the optical path length is increased by multiple reflection of light inside the cell. Structure is adopted. For example, the example shown in Patent Document 1 has a configuration in which two plane mirrors are arranged in parallel and the light is folded back and forth between them.

図3に、特許文献1と同様の従来一般の多重反射セルの構成例を示す。
同図において、円筒状のセルボディ10の両端は対向する2枚の鏡板11、12で封じられてセルを形成する。セル内はガス入口13からガス出口14へ流れる分析対象ガスで満たされる。鏡板11、12の対向する面(鏡面)は平行に配置され、且つ鏡面加工が施されている。鏡板12には2箇所に光透過窓15、16が開設されており、これを通してセル内に出入りする光が両鏡面の間で複数回折り返すことで長い光路長を得る構造である。
In FIG. 3, the structural example of the conventional general multiple reflection cell similar to patent document 1 is shown.
In the figure, both ends of a cylindrical cell body 10 are sealed by two facing end plates 11 and 12 to form a cell. The inside of the cell is filled with the analysis target gas flowing from the gas inlet 13 to the gas outlet 14. The opposing surfaces (mirror surfaces) of the end plates 11 and 12 are arranged in parallel and are subjected to mirror finishing. The mirror plate 12 is provided with light transmission windows 15 and 16 at two locations, and a structure in which a long optical path length is obtained by a plurality of diffractions of light entering and exiting the cell through the two mirror surfaces.

特開2005−147962号公報JP-A-2005-147862

セルに導入されるガスの種類によっては鏡面が汚染または腐食されることがあるので、保守作業として必要に応じ鏡面の洗浄が行われる。洗浄には手間が掛かり、また、洗浄しても完全に復旧するとは限らないので、最終的には鏡板を交換することが必要となるが、鏡板は精密加工された高価な部材であるから交換のコストが高いことが問題であった。
本発明は上記事情に鑑みてなされたものであり、多重反射セルを備えたガス分析装置において鏡面の保守作業の手間を省き、保守コストを削減することを目的とする。
Since the mirror surface may be contaminated or corroded depending on the type of gas introduced into the cell, the mirror surface is cleaned as necessary as a maintenance operation. Cleaning takes time and does not always recover completely even after cleaning, so eventually it is necessary to replace the end plate. However, the end plate is an expensive precision processed member. The problem was the high cost of
The present invention has been made in view of the above circumstances, and it is an object of the present invention to reduce the maintenance cost by omitting the work of maintaining a mirror surface in a gas analyzer equipped with multiple reflection cells.

本発明は、上記課題を解決するために、鏡面を有する薄板製の反射板をガスセルの内壁面に当接して着脱可能に装着する。薄板製の反射板は低コストで製作できるから、この構成により使い捨てが可能となり、鏡面が汚染、腐食されたときは反射板を新品と交換することで保守の手間を省き、保守コストも低減できる。また、薄板製の反射板の両面に鏡面を設けておけば裏返して再度使用できるので、さらなるコスト削減と現場でのすばやい応急処置が可能となる。   In order to solve the above problems, the present invention attaches a detachable reflector made of a thin plate having a mirror surface to the inner wall surface of a gas cell. Thin reflectors can be manufactured at low cost, so this configuration allows them to be disposable. When the mirror surface is contaminated or corroded, the reflector can be replaced with a new one, saving maintenance and reducing maintenance costs. . In addition, if mirror surfaces are provided on both sides of a thin reflector, it can be turned over and used again, so that further cost reduction and quick first aid on site are possible.

本発明は上記のように構成されているので、反射板の使い捨てが可能となり、保守の手間が省けるばかりでなく、保守コストの削減を図ることができる。   Since the present invention is configured as described above, the reflector can be disposable, and not only maintenance work can be saved, but also maintenance costs can be reduced.

本発明の一実施例を示す図である。It is a figure which shows one Example of this invention. 本発明の他の実施例を示す図である。It is a figure which shows the other Example of this invention. 従来の構成例を示す図である。It is a figure which shows the example of a conventional structure.

図1に本発明の一実施例を示す。
同図において、円筒状のセルボディ10の両端が対向する鏡板11、12で封じられてセルを形成し、ガス入口13からガス出口14へ流れる分析対象ガスで満たされるセル内空間で光透過窓15、16を通して出入りする光が複数回折り返すことは前述した従来構成と同様である。なお、光透過窓15、16やその他の各部材間は図示しないOリング等でシールされ、セル内はガス入口13とガス出口14を除いて気密に構成されている。
FIG. 1 shows an embodiment of the present invention.
In the same figure, both ends of a cylindrical cell body 10 are sealed with facing end plates 11 and 12 to form a cell, and a light transmission window 15 is formed in a cell interior space filled with an analysis target gas flowing from a gas inlet 13 to a gas outlet 14. , 16 that the light entering and exiting through the light 16 diffracts a plurality of times is the same as in the conventional configuration described above. The light transmission windows 15 and 16 and other members are sealed with an O-ring (not shown) or the like, and the inside of the cell is airtight except for the gas inlet 13 and the gas outlet 14.

従来と相違する点は、鏡板11、12の対向する内壁面は鏡面を有さず、代わりに両面に鏡面加工された薄板製の反射板17、18がそれぞれ鏡板11、12の対向する内壁面を覆って装着されていることである。この構成により、一方の光透過窓15を通して光源(図示せず)から来る光が導入され、2枚の反射板17、18の鏡面の間を多重反射した後、他方の光透過窓16を通過して光検出器(図示せず)へ導かれ、ここでセル内のガス種や濃度に応じた光の吸収を検出することにより測定が行われる。
なお、反射板18には、光透過窓15、16に対応する位置に孔(図示せず)が開設されているので、光の出入りを妨げることはない。
The difference from the prior art is that the opposed inner wall surfaces of the mirror plates 11 and 12 do not have a mirror surface, and instead the thin reflector plates 17 and 18 that are mirror-finished on both surfaces are opposed to the inner wall surfaces of the mirror plates 11 and 12, respectively. It is that it is worn and covered. With this configuration, light coming from a light source (not shown) is introduced through one light transmission window 15, and after multiple reflection between the mirror surfaces of the two reflection plates 17 and 18, passes through the other light transmission window 16. Then, the light is guided to a photodetector (not shown), where measurement is performed by detecting light absorption according to the gas type and concentration in the cell.
In addition, since the hole (not shown) is opened in the reflecting plate 18 in the position corresponding to the light transmission windows 15 and 16, the entrance and exit of light is not hindered.

反射板17、18は、それぞれ鏡板11、12に重ねてセルボディ10の端部にネジ19で締着されているので、ネジ19を弛めることで容易に取り外し可能である。
また、反射板17、18は薄板製であって低コストで製作できるから、鏡面が汚染・腐食を受けたときは、洗浄せずに新品と交換することができる。これにより、洗浄等の手間が省け、保守コストの削減が可能となる。
The reflecting plates 17 and 18 are fastened to the end portions of the cell body 10 by screws 19 so as to overlap the end plates 11 and 12, respectively, and can be easily removed by loosening the screws 19.
Further, since the reflecting plates 17 and 18 are made of thin plates and can be manufactured at a low cost, when the mirror surface is contaminated or corroded, it can be replaced with a new one without washing. As a result, it is possible to save the trouble of cleaning and the like and to reduce the maintenance cost.

さらに本実施例では、反射板17、18は両面に鏡面加工が施されているので、片面の鏡面が汚染・腐食を受けたときは、裏返して再度使用できる。反射板17、18を使い捨てるまでに2回使用できるから、保守コストの削減効果が大きい効果と、現場での修理に迅速に対処が可能となる効果がある。この場合、鏡板11、12の反射板17、18で覆われる面の一部を窪ませて凹部11a、12aを設けてあるので、反射板17、18の使用中でない鏡面が当たってキズや汚れが付くことを防止できる。   Further, in this embodiment, the reflecting plates 17 and 18 are mirror-finished on both sides, so that when the mirror surface on one side is contaminated or corroded, it can be turned over and used again. Since the reflectors 17 and 18 can be used twice before being thrown away, there is an effect that the maintenance cost is greatly reduced, and that an on-site repair can be quickly dealt with. In this case, since the concave portions 11a and 12a are provided by recessing part of the surfaces of the mirror plates 11 and 12 that are covered with the reflecting plates 17 and 18, the mirror surfaces of the reflecting plates 17 and 18 that are not in use hit and are scratched or soiled. Can be prevented.

反射板17、18は、厚さ1mm前後のステンレス等の金属板を材料として電解複合研磨等により鏡面を加工して製作できる。   The reflectors 17 and 18 can be manufactured by processing a mirror surface by electrolytic composite polishing or the like using a metal plate such as stainless steel having a thickness of about 1 mm.

なお、上記は両面に鏡面を有する反射板17、18を用いる例であるが、片面のみに鏡面を設けた場合でも、保守コストの削減効果は幾分劣るものの有用である。また、反射板17、18の片面にのみ鏡面を有する場合でも、凹部11a、12aを設けることは鏡面に不要な力を掛けないという点で効果がある。
さらにまた、本考案は、光がセル内で複数回反射する場合(多重反射)に限らず、1回だけ反射する場合にも適用できる。その場合は、図1における反射板18は不要であり、光源からの光は光透過窓15からセルに入射し、反射板17で1回だけ反射して光透過窓16から光検出器へ至る構成となる。
The above is an example in which the reflecting plates 17 and 18 having mirror surfaces on both sides are used. However, even if a mirror surface is provided on only one side, the maintenance cost reduction effect is somewhat inferior, but it is useful. Further, even when the mirrors have a mirror surface only on one side of the reflectors 17 and 18, providing the recesses 11a and 12a is effective in that unnecessary force is not applied to the mirror surface.
Furthermore, the present invention can be applied not only to the case where light is reflected a plurality of times in the cell (multiple reflection) but also to the case where it is reflected only once. In that case, the reflector 18 in FIG. 1 is unnecessary, and the light from the light source enters the cell from the light transmission window 15, is reflected only once by the reflection plate 17, and reaches the photodetector from the light transmission window 16. It becomes composition.

図2は本発明の他の実施例として、光源と光検出器がセルを挟んで反対側に配置された通過型セルに本発明を適用した例を示す。
同図において、光透過窓15、16はそれぞれ鏡板11、12に各1個ずつ設けられる点が図1の構成と相違する。その他、図1と同符号を付した部材は図1と同一の機能を有する。この構成においては、光源(図示せず)からの光は図の右側から光透過窓15を通して入射し、両反射板17、18間で折り返して光透過窓16から左側へ抜け光検出器(図示せず)に達する。
この構成においても、本発明の作用効果は図1の場合に比べて何ら損なわれないことは自明である。
FIG. 2 shows another embodiment of the present invention in which the present invention is applied to a pass-through cell in which a light source and a photodetector are arranged on opposite sides of the cell.
In the same figure, the light transmission windows 15 and 16 are different from the structure of FIG. In addition, the member which attached | subjected the same code | symbol as FIG. 1 has the same function as FIG. In this configuration, light from a light source (not shown) enters through the light transmission window 15 from the right side of the drawing, is folded between the reflecting plates 17 and 18, and exits from the light transmission window 16 to the left side. (Not shown).
Even in this configuration, it is obvious that the effects of the present invention are not impaired as compared with the case of FIG.

本発明は、光吸収分析法により気体中の微量成分を計測するガス分析装置に利用できる。   INDUSTRIAL APPLICABILITY The present invention can be used for a gas analyzer that measures a trace component in a gas by a light absorption analysis method.

10 セルボディ
11 鏡板
11a 凹部
12 鏡板
12a 凹部
13 ガス入口
14 ガス出口
15 光透過窓
16 光透過窓
17 反射板
18 反射板
19 ネジ
DESCRIPTION OF SYMBOLS 10 Cell body 11 End plate 11a Recess 12 End plate 12a Recess 13 Gas inlet 14 Gas outlet 15 Light transmission window 16 Light transmission window 17 Reflection plate 18 Reflection plate 19 Screw

Claims (3)

試料ガスが導入されるセルと、光を該セルに入射させる光源と、該セル内の鏡面で反射して前記セルから出射する光の強度を検出する光検出器を備えて成る光吸収分析法によるガス分析装置において、前記セルの内壁面に当接して着脱可能に装着された反射板の両面に前記鏡面が形成されていることを特徴とするガス分析装置。 A light absorption analysis method comprising a cell into which a sample gas is introduced, a light source that makes light incident on the cell, and a light detector that detects the intensity of light reflected from a mirror surface in the cell and emitted from the cell. The gas analyzer according to claim 1, wherein the mirror surfaces are formed on both surfaces of a reflection plate that is detachably mounted in contact with the inner wall surface of the cell. 装着された前記反射板によって覆われる前記内壁面に凹部を設けたことを特徴とする請求項記載のガス分析装置。 Gas analyzer according to claim 1, characterized in that a recess on the inner wall surface covered by said reflector is mounted. 前記セルが、端部が開放された中空筒状のセルボディと該セルボディの開放端を封止する着脱可能な鏡板とで構成され、前記反射板は前記セルボディの開放端と前記鏡板との間に挟着されることを特徴とする請求項1または請求項2記載のガス分析装置 The cell includes a hollow cylindrical cell body having an open end and a removable end plate that seals the open end of the cell body, and the reflector is between the open end of the cell body and the end plate. The gas analyzer according to claim 1 or 2 , wherein the gas analyzer is sandwiched.
JP2010086355A 2010-04-02 2010-04-02 Gas analyzer Expired - Fee Related JP5397296B2 (en)

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CN107589087A (en) * 2013-10-24 2018-01-16 日月光半导体制造股份有限公司 Sensing module and its manufacture method
CN104749740A (en) * 2013-12-26 2015-07-01 上海伟钊光学科技股份有限公司 Optical fiber optical path pool
CN110018124A (en) * 2018-01-08 2019-07-16 高利通科技(深圳)有限公司 Argoshield spectral analysis device and spectrochemical analysis for gases system
JP2021067631A (en) * 2019-10-28 2021-04-30 ゼネラルパッカー株式会社 Method of measuring gas concentration in packaging bag
JP2021067633A (en) * 2019-10-28 2021-04-30 ゼネラルパッカー株式会社 Method of measuring gas concentration in packaging bag
JP2021067634A (en) * 2019-10-28 2021-04-30 ゼネラルパッカー株式会社 Device for measuring gas concentration in packaging bag

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JPH0720046A (en) * 1993-07-06 1995-01-24 Canon Inc Infrared spectroscopic cell for liquid chromatography
JP3268966B2 (en) * 1995-10-05 2002-03-25 株式会社堀場製作所 Multiple reflection gas cell
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