JP2012042341A - Sample cell for gas analyzer - Google Patents

Sample cell for gas analyzer Download PDF

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JP2012042341A
JP2012042341A JP2010183848A JP2010183848A JP2012042341A JP 2012042341 A JP2012042341 A JP 2012042341A JP 2010183848 A JP2010183848 A JP 2010183848A JP 2010183848 A JP2010183848 A JP 2010183848A JP 2012042341 A JP2012042341 A JP 2012042341A
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gas
cell
sample
window
gas inlet
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Mitsuru Oishi
満 大石
Kozo Akao
幸造 赤尾
Hideyuki Konishi
英之 小西
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Fuji Electric Co Ltd
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Fuji Electric Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a sample cell for a gas analyzer, which allows an optical window and an inside wall of the cell to be easily cleaned and allows gas substitution to be quickly performed by causing gas introduced into a cell body from a gas inlet to flow to a gas outlet smoothly without staying.SOLUTION: The sample cell for a gas analyzer, through which sample gas is caused to flow from a gas inlet provided at one end of the cell toward a gas outlet provided at the other end, includes: a cylindrical cell body (11) having screw portions formed in end parts on both sides; and inlet-side and outlet-side window holders (14a and 14b) which hold optical windows (13a and 13b) made of an infrared-transmissive material and are attached so as to be engaged with screw portions (16a and 16b) of the cell body to seal up an end part on the gas inlet side and an end part on the gas outlet side. The inlet-side window holder (14a) is provided with a gas inlet pipe (12a), and the outlet-side window holder (14b) is provided with a gas outlet pipe (12b).

Description

本発明は、赤外線がガス中を透過する際、種々のガスに固有な特定波長の光が吸収されることを利用し、ガス中に含まれる所望のガス成分の濃度を計測する赤外線ガス分析計に用いられるガス分析計用試料セルに関する。   The present invention uses an infrared gas analyzer that measures the concentration of a desired gas component contained in a gas by utilizing the fact that light having a specific wavelength that is unique to various gases is absorbed when the infrared light passes through the gas. The present invention relates to a sample cell for a gas analyzer used in the above.

従来の赤外線ガス分析計30は、図4に示す様に、赤外線光源31、光チョッパ32、試料セル20(以下、「セル」ともいう)、赤外線検出器33等から構成されている。赤外線光源31から発せられた赤外光は、光チョッパ32により断続光となり試料セル20に入射する。そして、赤外光は、試料セル20内を反射し、赤外線検出器33に入射する。その際、試料セル20内に存在する測定対象成分の濃度に応じ、試料セル20内での赤外線吸収量が変化するので、その変化をマスフローセンサなどの赤外線検出器33により検出し、濃度信号(V)として出力するようにしている。   As shown in FIG. 4, the conventional infrared gas analyzer 30 includes an infrared light source 31, an optical chopper 32, a sample cell 20 (hereinafter also referred to as “cell”), an infrared detector 33, and the like. The infrared light emitted from the infrared light source 31 becomes intermittent light by the light chopper 32 and enters the sample cell 20. Then, the infrared light is reflected inside the sample cell 20 and enters the infrared detector 33. At that time, since the amount of infrared absorption in the sample cell 20 changes according to the concentration of the component to be measured existing in the sample cell 20, the change is detected by an infrared detector 33 such as a mass flow sensor, and a concentration signal ( V) is output.

図5に、上述のシングルビーム方式の赤外線ガス分析計30に組み込まれている試料セル20の詳細な構成を示す。
試料セル20は、赤外線などの光線を透過させるとともに、セル本体21に設けたガス入口管22aからサンプルガスを導入し、ガス出口管22bに向けてサンプルガスを流通させるものである。
FIG. 5 shows a detailed configuration of the sample cell 20 incorporated in the single beam infrared gas analyzer 30 described above.
The sample cell 20 transmits light such as infrared rays, introduces a sample gas from a gas inlet pipe 22a provided in the cell body 21, and circulates the sample gas toward the gas outlet pipe 22b.

円筒形状を呈するセル本体21は、例えばステンレス鋼などの金属からなり、その両端には窓ホルダー24a,24bが嵌め込まれている。この窓ホルダー24a,24bには、赤外線透過材料で形成された光学窓23a,23bが接着されている。また、セル本体21の両側端部外周面と窓ホルダー24a,24bとの間には、Oリング25a,25bが設けられており、気密を確保している。   The cell body 21 having a cylindrical shape is made of a metal such as stainless steel, for example, and window holders 24a and 24b are fitted to both ends thereof. Optical windows 23a and 23b made of an infrared transmitting material are bonded to the window holders 24a and 24b. Further, O-rings 25a and 25b are provided between the outer peripheral surfaces of the both end portions of the cell main body 21 and the window holders 24a and 24b to ensure airtightness.

このように、試料セル20は、長期間使用した場合にサンプルガス中に含まれるダストやミストなどによりセル本体21の内壁が汚れても、窓ホルダー24a,24bを取り外し、簡単に清掃することができる構造となっている。   As described above, the sample cell 20 can be easily cleaned by removing the window holders 24a and 24b even if the inner wall of the cell body 21 is contaminated by dust or mist contained in the sample gas when used for a long period of time. It has a structure that can be done.

また、その他の赤外線ガス分析計としては、例えば、特許文献1に記載されているダブルビーム方式のものが知られている。この赤外線ガス分析計は、2つのセルを有し、第1セル及び第2セルに対し、測定対象ガスを含むサンプルガス(試料ガス)とリファレンスガス(基準ガス)とを一定の周期で交互に供給し、ガスの切換周期に対応した周波数の交流信号として出力される測定信号を演算処理することにより、セルの汚れに起因するドリフトの影響をキャンセルできるようにしている。   As another infrared gas analyzer, for example, a double beam system described in Patent Document 1 is known. This infrared gas analyzer has two cells, and a sample gas (sample gas) containing a measurement target gas and a reference gas (reference gas) are alternately arranged at a constant cycle with respect to the first cell and the second cell. The influence of the drift due to the contamination of the cell can be canceled by calculating and processing the measurement signal that is supplied and output as an AC signal having a frequency corresponding to the gas switching period.

実開昭53−166685号公報Japanese Utility Model Publication No. 53-166585

ところで、赤外線ガス分析計では、赤外線検出器33の受光量が分析計の検出器感度に大きく影響するので、十分な受光量を確保できるようにセル20の内径を比較的太く(φ25程度)設定するようにしていた。このために、セル20内へのガスの導入や置換に時間が掛かり、100%応答時間も約30秒以上を要していた。   By the way, in the infrared gas analyzer, since the amount of light received by the infrared detector 33 greatly affects the detector sensitivity of the analyzer, the inner diameter of the cell 20 is set to be relatively large (about φ25) so as to ensure a sufficient amount of light received. I was trying to do it. For this reason, it took time to introduce or replace the gas into the cell 20, and the 100% response time required about 30 seconds or more.

特に、ダブルビーム方式の赤外線ガス分析計にあっては、サンプルガス中に含まれるダストやミスト、および腐食成分等によるセル内面の反射率変化の影響を低減することができるという優れた特徴をもち、ガス濃度測定における長期安定性を確保できるにも関わらず、2つのセルに対してガスの置換を速やかに行うことが困難であることから、高速応答を必要とするアプリケーションには使用できず、限定的な用途にしか用いることが出来ないという問題があった。   In particular, the double beam infrared gas analyzer has an excellent feature that it can reduce the effect of changes in the reflectance of the inner surface of the cell due to dust, mist, and corrosive components contained in the sample gas. In spite of ensuring long-term stability in gas concentration measurement, it is difficult to quickly replace the gas in two cells, so it cannot be used for applications that require high-speed response. There was a problem that it could be used only for limited purposes.

本発明は、上記の問題点に鑑みなされたものであって、光学窓やセルの内壁を簡単に清掃することができ、しかも、ガス入口からセル本体内に導入されたガスが滞留することなくスムーズにガス出口に流れるようにして、ガスの置換を速やかに行うことのできるガス分析計用試料セルを提供することを目的とする。   The present invention has been made in view of the above-described problems, and can easily clean the optical window and the inner wall of the cell, and the gas introduced into the cell body from the gas inlet does not stay. An object of the present invention is to provide a sample cell for a gas analyzer capable of promptly replacing a gas so as to smoothly flow to a gas outlet.

請求項1の発明は、セルの一端に設けられたガス入口から、他端に設けられたガス出口に向けて試料ガスを流通させるガス分析計用試料セルにおいて、両側の端部にねじ部が形成された円筒形状のセル本体と、測定光を透過する材料よりなる光学窓を保持すると共に、前記セル本体のねじ部と螺合して、ガス入口側の端部、ガス出口側の端部を封止するように取り付けられる入口側、出口側の窓ホルダーとを備えてなり、前記入口側の窓ホルダーに前記光学窓と近接させてガス入口管を設け、さらに、前記出口側の窓ホルダーに前記光学窓と近接させてガス出口管を設けるようにしたことを特徴とする。   The invention of claim 1 is a gas analyzer sample cell in which a sample gas is circulated from a gas inlet provided at one end of the cell to a gas outlet provided at the other end, and screw portions are provided at both ends. The formed cylindrical cell main body and an optical window made of a material that transmits the measurement light are held, and screwed with the threaded portion of the cell main body so that the gas inlet side end and the gas outlet side end An inlet side and an outlet side window holder attached so as to seal, a gas inlet pipe is provided close to the optical window in the inlet side window holder, and the outlet side window holder A gas outlet pipe is provided adjacent to the optical window.

請求項2の発明は、請求項1に記載のガス分析計用試料セルにおいて、前記ガス入口管が、当該ガス入口管の中心軸がセル本体の長手方向の軸心を通らないように配置されていることを特徴とする。   According to a second aspect of the present invention, in the sample cell for a gas analyzer according to the first aspect, the gas inlet pipe is disposed such that a central axis of the gas inlet pipe does not pass through a longitudinal axis of the cell body. It is characterized by.

請求項1の発明によれば、入口側の窓ホルダーに光学窓と近接させてガス入口管を設け、さらに、出口側の窓ホルダーに光学窓と近接させてガス出口管を設けるようにし、ガス入口管およびガス出口管をセル本体の端面(光学窓の内面)に近接させ、ガスが滞留する原因となっていたデッドスペースを削減するようにしたので、ガスの置換を速やかに行うことが可能となり、これを組み込んだガス分析計の応答速度を向上させることが可能となる。   According to the first aspect of the present invention, the gas inlet pipe is provided near the optical window in the window holder on the inlet side, and the gas outlet pipe is provided near the optical window on the window holder on the outlet side. The inlet pipe and gas outlet pipe are placed close to the end face of the cell body (the inner surface of the optical window) to reduce the dead space that caused the gas to stay, allowing for quick gas replacement. Thus, the response speed of the gas analyzer incorporating this can be improved.

請求項2の発明によれば、ガス入口管から導入されたガスが、セル内壁に沿って渦流を生じさせ、セル内に残存するガスを効率よく押し出すので、さらに応答性を改善することができる。   According to the second aspect of the present invention, the gas introduced from the gas inlet pipe generates a vortex along the cell inner wall and efficiently pushes out the gas remaining in the cell, so that the responsiveness can be further improved. .

本発明によるガス分析計用試料セルの一例を示す図で、(A)は一部を断面にして示す縦断面図、(B)は側面図である。BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows an example of the sample cell for gas analyzers by this invention, (A) is a longitudinal cross-sectional view which shows a part in cross section, (B) is a side view. 本発明の動作原理を説明するための主要部について示す図で、(A)は縦断面図、(B)は側面図である。It is a figure shown about the principal part for demonstrating the operation principle of this invention, (A) is a longitudinal cross-sectional view, (B) is a side view. 本発明による試料セルを組み込んだ赤外線ガス分析計の応答特性を示す図である。It is a figure which shows the response characteristic of the infrared gas analyzer incorporating the sample cell by this invention. 従来の赤外ガス分析計の概要を示す図である。It is a figure which shows the outline | summary of the conventional infrared gas analyzer. 従来のガス分析計用試料セルの構成を示す図で、(A)は一部を断面にして示す縦断面図、(B)は側面図である。It is a figure which shows the structure of the conventional sample cell for gas analyzers, (A) is a longitudinal cross-sectional view which makes a part cross section, (B) is a side view. 従来のガス分析計用試料セルの主要部について示す図で、(A)は縦断面図、(B)は側面図である。It is a figure shown about the principal part of the conventional sample cell for gas analyzers, (A) is a longitudinal cross-sectional view, (B) is a side view.

以下、本発明の実施形態について、添付図面を参照して具体的に説明する。
図1は、本発明によるガス分析計用試料セルの一例を示す図である。
図に示すように、円筒形状のセル本体11の両側端部には、第1(入口側)の窓ホルダー14a、第2(出口側)の窓ホルダー14bが設けられている。第1の窓ホルダー14aは、測定光である赤外線を透過するCaF2 (フッ化カルシウム)などの材料よりなる光学窓23aを保持すると共に、その枠部内周面にはセル本体11の赤外線光源側の端部外周面に形成されたおねじ部16aと螺合するめねじ部141aが形成されており、セル本体11のガス入口側の端部を封止する。同様に、第2の窓ホルダー14bも、CaF2などの赤外線透過材料よりなる光学窓23bを保持すると共に、その枠部内周面にはセル本体11の赤外線検出器側の端部外周面に形成されたおねじ部16bと螺合するめねじ部141bが形成されており、セル本体11のガス出口側の端部を封止する。
Hereinafter, embodiments of the present invention will be specifically described with reference to the accompanying drawings.
FIG. 1 is a view showing an example of a sample cell for a gas analyzer according to the present invention.
As shown in the figure, a first (inlet side) window holder 14a and a second (outlet side) window holder 14b are provided at both ends of the cylindrical cell body 11. The first window holder 14a holds an optical window 23a made of a material such as CaF2 (calcium fluoride) that transmits infrared light as measurement light, and has an inner peripheral surface of the frame portion on the infrared light source side of the cell body 11. A female thread part 141a that is screwed with the external thread part 16a formed on the outer peripheral surface of the end part is formed, and the end part on the gas inlet side of the cell body 11 is sealed. Similarly, the second window holder 14b also holds an optical window 23b made of an infrared transmitting material such as CaF2, and is formed on the inner peripheral surface of the frame portion on the outer peripheral surface of the end of the cell body 11 on the infrared detector side. A female thread portion 141b that is screwed into the male thread portion 16b is formed, and seals the end of the cell body 11 on the gas outlet side.

15a、15bは、気密を確保するためのOリングであり、それぞれ、第1の窓ホルダー14aの内周面とセル本体11の端部外周面との間、第2の窓ホルダー14aの内周面とセル本体11の端部外周面との間、に介挿されている。   Reference numerals 15a and 15b denote O-rings for ensuring airtightness, respectively, between the inner peripheral surface of the first window holder 14a and the outer peripheral surface of the end of the cell body 11, and the inner periphery of the second window holder 14a. It is inserted between the surface and the outer peripheral surface of the end portion of the cell main body 11.

そして、第1、第2の窓ホルダー14a、14bの周壁には、貫通孔17a、17bが設けられており、それぞれ、ガス入口管12a、ガス出口管12bが嵌め込まれている。サンプルガスSあるいはリファレンスガスR(例えばN2やAir等)は、ガス入口管12aから導入され、他端に設けられたガス出口管12bに向けて流通する。   And the through-holes 17a and 17b are provided in the surrounding wall of the 1st, 2nd window holders 14a and 14b, and the gas inlet pipe 12a and the gas outlet pipe 12b are fitted, respectively. The sample gas S or the reference gas R (for example, N2 or Air) is introduced from the gas inlet pipe 12a and flows toward the gas outlet pipe 12b provided at the other end.

従来のセルでは、図6に示すように、ガス入口管22aがセル本体に設けられ、セルの端面となる光学窓23aから離れて取り付けられていたので、光学窓23aの近傍部分ににデッドスペースが生じやすい。すなわち、ガス入口管22aからセル本体21内に導入されたサンプルガスSあるいはリファレンスガスRは、図6中で示すように、矢印52のようにガス出口側に向かうものもあるが、矢印51で示すように光学窓側に向かって流れるものもある。その結果、セル本体21に導入されたガスがデッドスペースに滞留してしまい、サンプルガスSとリファレンスガスRとの置換が速やかに行われなくなり、所謂ガスの置換効率の低下が生じ、ガス分析の応答速度が遅くなっていた。   In the conventional cell, as shown in FIG. 6, the gas inlet pipe 22a is provided in the cell main body and is attached away from the optical window 23a serving as the end face of the cell, so that a dead space is formed in the vicinity of the optical window 23a. Is likely to occur. That is, the sample gas S or the reference gas R introduced into the cell body 21 from the gas inlet pipe 22a may be directed to the gas outlet side as indicated by an arrow 52 as shown in FIG. Some flow toward the optical window as shown. As a result, the gas introduced into the cell body 21 stays in the dead space, and the replacement of the sample gas S and the reference gas R is not performed quickly, so that the so-called gas replacement efficiency is lowered, and the gas analysis is performed. The response speed was slow.

これに対し、本発明による試料セル10では、図2に示すように、ガス入口管12a を窓ホルダー14aに設け、ガス入口管12aを出来るだけセル本体11の端面側に近づけ、赤外線光源側の光学窓23aの近傍部分に生じていたデッドスペースを削減するようにしている。同様に、ガス出口管12b も、窓ホルダー14bに設けるようにし、赤外線検出器側の光学窓23bの近傍部分に生じていたデッドスペースについても削減するようにしている。従って、セル本体11内に導入されたガスは、セル本体11内に滞留することなく、矢印61のようにガス出口管12bへ向けてスムーズに流れるようになる。   On the other hand, in the sample cell 10 according to the present invention, as shown in FIG. 2, the gas inlet tube 12a is provided in the window holder 14a, and the gas inlet tube 12a is brought as close to the end face side of the cell body 11 as possible. The dead space generated in the vicinity of the optical window 23a is reduced. Similarly, the gas outlet pipe 12b is also provided in the window holder 14b so as to reduce the dead space generated in the vicinity of the optical window 23b on the infrared detector side. Therefore, the gas introduced into the cell main body 11 flows smoothly toward the gas outlet pipe 12b as indicated by the arrow 61 without staying in the cell main body 11.

本実施形態では、内径14mm、長さ250mmの本体セル11を用いている。また、ガス入口管12a、ガス出口管12bの内径は2.5mmである。この場合、ガス入口管12aの中心軸と光学窓13a内面との距離、及びガス出口管12bの中心軸と光学窓13bとの距離は3mm以下となるように設定するのが望ましい。   In this embodiment, the main body cell 11 having an inner diameter of 14 mm and a length of 250 mm is used. The inner diameters of the gas inlet pipe 12a and the gas outlet pipe 12b are 2.5 mm. In this case, the distance between the central axis of the gas inlet pipe 12a and the inner surface of the optical window 13a and the distance between the central axis of the gas outlet pipe 12b and the optical window 13b are preferably set to 3 mm or less.

さらに、本発明による試料セル10では、特に、セル本体11と直交するガス入口管12aが、セル本体11の長手方向の軸心を含む平面Z1と所定の距離をおいた平行平面Z2内にガス入口管12aの中心軸が位置するように配置されている。このように、ガス入口管12aを、その中心軸がセル本体11の長手方向の軸心を通らないように配置することにより、ガス入口管12aから導入されたガスが、断面円形状を呈するセルの内壁面に沿って螺旋状に移動する渦流61を生じさせ、ガス置換前のセル本体内11に残存するサンプルガスSまたはリファレンスガスRを効率的に押し出すこととなり、より一層応答性が改善される。   Further, in the sample cell 10 according to the present invention, in particular, the gas inlet tube 12a orthogonal to the cell body 11 is gas in a parallel plane Z2 having a predetermined distance from the plane Z1 including the longitudinal axis of the cell body 11. It arrange | positions so that the center axis | shaft of the inlet pipe 12a may be located. Thus, by arranging the gas inlet pipe 12a so that its central axis does not pass through the longitudinal axis of the cell body 11, the gas introduced from the gas inlet pipe 12a has a circular cross section. As a result, a vortex flow 61 that spirally moves along the inner wall surface is generated, and the sample gas S or the reference gas R remaining in the cell body 11 before gas replacement is efficiently pushed out, and the responsiveness is further improved. The

図3は、本実施形態に係る試料セル10を組み込んだ赤外線ガス分析計と、従来セルを組み込んだ赤外線ガス分析計との応答特性に関する比較データを示す図である。図3に示すように、本実施形態によれば、従来セルと比較した場合、100%応答時間が約1/2に短縮され応答特性に著しい効果があることが確認されている。セル径やセル長を好適に選定することで、従来数十秒の応答時間を要していたサンプルガスの置換が数秒程度まで大幅に短縮することが可能となる。   FIG. 3 is a diagram showing comparison data regarding response characteristics between an infrared gas analyzer incorporating the sample cell 10 according to the present embodiment and an infrared gas analyzer incorporating a conventional cell. As shown in FIG. 3, according to the present embodiment, it has been confirmed that the response time is shortened to about 1/2 when compared with the conventional cell, and the response characteristics have a significant effect. By suitably selecting the cell diameter and the cell length, the replacement of the sample gas, which conventionally required a response time of several tens of seconds, can be significantly reduced to about several seconds.

10:試料セル
11:セル本体
12a:ガス入口管
12b:ガス出口管
13a、13b:光学窓(赤外線透過窓)
14a:第1(入口側)の窓ホルダー
14b:第2(出口側)の窓ホルダー
16a、16b:ねじ部
10: Sample cell 11: Cell body 12a: Gas inlet pipe 12b: Gas outlet pipe 13a, 13b: Optical window (infrared transmission window)
14a: first (entrance side) window holder 14b: second (outlet side) window holders 16a, 16b: threaded portion

Claims (2)

セルの一端に設けられたガス入口から、他端に設けられたガス出口に向けて試料ガスを流通させるガス分析計用試料セルにおいて、
両側の端部にねじ部が形成された円筒形状のセル本体と、
測定光を透過する材料よりなる光学窓を保持すると共に、前記セル本体のねじ部と螺合して、ガス入口側の端部、ガス出口側の端部を封止するように取り付けられる入口側、出口側の窓ホルダーとを備えてなり、
前記入口側の窓ホルダーに前記光学窓と近接させてガス入口管を設け、さらに、前記出口側の窓ホルダーに前記光学窓と近接させてガス出口管を設けるようにしたことを特徴とするガス分析計用試料セル。
In the sample cell for the gas analyzer that circulates the sample gas from the gas inlet provided at one end of the cell toward the gas outlet provided at the other end,
Cylindrical cell body with threaded parts on both ends,
An inlet side that holds an optical window made of a material that transmits measurement light, and that is screwed into the threaded portion of the cell main body so as to seal the gas inlet side end and the gas outlet side end. A window holder on the exit side,
A gas inlet pipe is provided in the window holder on the inlet side in the vicinity of the optical window, and a gas outlet pipe is provided in the window holder on the outlet side in the vicinity of the optical window. Sample cell for analyzer.
請求項1に記載のガス分析計用試料セルにおいて、
前記ガス入口管は、当該ガス入口管の中心軸がセル本体の長手方向の軸心を通らないように配置されている、ことを特徴とするガス分析計用試料セル。
The sample cell for a gas analyzer according to claim 1,
The gas analyzer sample cell, wherein the gas inlet tube is arranged such that a central axis of the gas inlet tube does not pass through a longitudinal axis of the cell body.
JP2010183848A 2010-08-19 2010-08-19 Sample cell for gas analyzer Withdrawn JP2012042341A (en)

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