JP5387919B2 - 温度感度を向上させた弾性表面波トルク・温度センサ - Google Patents
温度感度を向上させた弾性表面波トルク・温度センサ Download PDFInfo
- Publication number
- JP5387919B2 JP5387919B2 JP2010511713A JP2010511713A JP5387919B2 JP 5387919 B2 JP5387919 B2 JP 5387919B2 JP 2010511713 A JP2010511713 A JP 2010511713A JP 2010511713 A JP2010511713 A JP 2010511713A JP 5387919 B2 JP5387919 B2 JP 5387919B2
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- Prior art keywords
- saw
- substrate
- axis
- torque
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000010897 surface acoustic wave method Methods 0.000 title description 39
- 230000035945 sensitivity Effects 0.000 title description 14
- 239000000758 substrate Substances 0.000 claims description 39
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 238000005259 measurement Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
- G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
- G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14538—Formation
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Description
(特許文献)
(特許文献1) 英国特許出願公開第2426336号
英国特許出願公開第2426336号の図1および6に示されている第1および第3実施形態において、トルク測定用SAW共振器M1SAWおよびM2SAWは、温度測定に用いられる共振器TSAW(または共振器T1SAWおよびT2SAW)と同じ基板上に配置されている。基板はY+34°カットの水晶からなり、周波数差Ft(Ftについては、T0060に詳述されており、第1実施形態では、M2SAWとTSAWの共振周波数の差と等しい)の温度に対する感度を最大化するために、TSAW(T1SAWおよびT2SAW)のSAW伝搬方向と基板のX軸とのなす角度αをほぼ30°としている。
Claims (4)
- Y+実質的に34°カットの(すなわち、Y+34°または回転角度についてそれに近似した)水晶からなる基板上に第1および第2のSAW共振器を備えてなり、当該第1のSAWは、使用時に、トルク測定対象となる装置の長手方向軸に揃う向きないし垂直な向きに配置される前記基板のX軸に対して、その主軸が実質的に+45°傾いており、当該第2のSAWは、その主軸が、前記基板のX軸に対して実質的に−45°傾いており、さらに、主軸が、前記基板のX軸に対して実質的に30°に等しい角度で傾いている第3のSAW共振器を備え、前記各SAW共振器は、前記基板上に厚み(h)のアルミニウム膜を配置することにより形成され、該第1〜第3のSAWが平均動作波長λを有し、h/λが0.021〜0.032の範囲にあることを特徴とする非接触型のSAWに基づくトルク・温度センサ。
- 前記各共振器が428MHz〜437MHzの周波数範囲で動作することを特徴とする請求項1に記載の非接触型のSAWに基づくトルク・温度センサ。
- アルミニウムが240nm未満の厚みを有することを特徴とする請求項2に記載の非接触型のSAWに基づくトルク・温度センサ。
- アルミニウムが160〜240nmの厚みを有することを特徴とする請求項2または請求項3に記載の非接触型のSAWに基づくトルク・温度センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0711765.8 | 2007-06-15 | ||
GB0711765.8A GB2450168B (en) | 2007-06-15 | 2007-06-15 | A SAW torque and temperature sensor with improved temperature sensitivity |
PCT/GB2008/000983 WO2008152343A1 (en) | 2007-06-15 | 2008-03-19 | Saw torque and temperature sensor with improved temperature sensitivity |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010530959A JP2010530959A (ja) | 2010-09-16 |
JP5387919B2 true JP5387919B2 (ja) | 2014-01-15 |
Family
ID=38332302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010511713A Active JP5387919B2 (ja) | 2007-06-15 | 2008-03-19 | 温度感度を向上させた弾性表面波トルク・温度センサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US8082800B2 (ja) |
EP (1) | EP2160580B1 (ja) |
JP (1) | JP5387919B2 (ja) |
CN (1) | CN101772695A (ja) |
GB (1) | GB2450168B (ja) |
TW (1) | TWI448670B (ja) |
WO (1) | WO2008152343A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102288339A (zh) * | 2011-05-04 | 2011-12-21 | 北京理工大学 | 温度、振动自补偿的无源无线声表面波扭矩传感器 |
WO2013074422A1 (en) * | 2011-11-17 | 2013-05-23 | Transense Technologies Plc | Quartz Substrate Orientations for Compact Monolithic Differential Temperature Sensor, and Sensors Using Same |
US8987843B2 (en) | 2012-11-06 | 2015-03-24 | International Business Machines Corporation | Mapping density and temperature of a chip, in situ |
CN105716759A (zh) * | 2016-02-02 | 2016-06-29 | 上海交通大学 | 基于表面横波的转轴扭矩测量装置 |
US10450863B2 (en) | 2016-06-02 | 2019-10-22 | General Electric Company | Turbine engine shaft torque sensing |
CN111366111B (zh) * | 2020-03-30 | 2021-12-03 | 电子科技大学 | 一种利用三个lgs声表面波谐振器组成的应变传感器及测试方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61269509A (ja) * | 1985-05-24 | 1986-11-28 | Alps Electric Co Ltd | 弾性表面波素子 |
US5162690A (en) * | 1989-04-14 | 1992-11-10 | Murata Manufacturing Co., Ltd. | Surface acoustic wave device |
JP3953558B2 (ja) * | 1996-10-09 | 2007-08-08 | 京セラキンセキ株式会社 | 弾性表面波装置 |
US6339277B1 (en) * | 1998-10-16 | 2002-01-15 | Seiko Epson Corporation | Surface acoustic wave device |
US6674215B1 (en) * | 1999-11-16 | 2004-01-06 | Mitsubishi Denki Kabushiki Kaisha | Elastic wave device |
JP3897229B2 (ja) * | 2001-04-27 | 2007-03-22 | 株式会社村田製作所 | 表面波フィルタ |
US20030000309A1 (en) * | 2001-06-29 | 2003-01-02 | Anthony Lonsdale | Torque measurement |
US7202589B2 (en) * | 2001-10-16 | 2007-04-10 | Transense Technologies Plc | Temperatures stable saw sensor with third-order elastic constants |
TW508904B (en) * | 2001-11-30 | 2002-11-01 | Diamond Si Co Ltd | Surface acoustic wave filter and its manufacturing method |
TWI273661B (en) * | 2004-07-16 | 2007-02-11 | Ji-Yan Shen | Structure and fabricating method of a surface acoustic wave chip with an embedded air cavity |
US8015886B2 (en) * | 2004-08-16 | 2011-09-13 | Transense Technologies Plc | Torque measurement within a powertrain |
US7165455B2 (en) * | 2004-12-18 | 2007-01-23 | Honeywell International Inc. | Surface acoustic wave sensor methods and systems |
GB2426336A (en) * | 2005-05-20 | 2006-11-22 | Transense Technologies Plc | SAW based torque and temperature sensor |
-
2007
- 2007-06-15 GB GB0711765.8A patent/GB2450168B/en not_active Expired - Fee Related
-
2008
- 2008-03-19 WO PCT/GB2008/000983 patent/WO2008152343A1/en active Application Filing
- 2008-03-19 EP EP08718820.7A patent/EP2160580B1/en active Active
- 2008-03-19 JP JP2010511713A patent/JP5387919B2/ja active Active
- 2008-03-19 CN CN200880020267A patent/CN101772695A/zh active Pending
- 2008-03-31 TW TW097111740A patent/TWI448670B/zh active
-
2010
- 2010-04-06 US US12/755,007 patent/US8082800B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2010530959A (ja) | 2010-09-16 |
GB2450168A (en) | 2008-12-17 |
WO2008152343A1 (en) | 2008-12-18 |
EP2160580A1 (en) | 2010-03-10 |
EP2160580B1 (en) | 2016-08-24 |
GB2450168B (en) | 2012-03-07 |
US20100186513A1 (en) | 2010-07-29 |
GB0711765D0 (en) | 2007-07-25 |
US8082800B2 (en) | 2011-12-27 |
TWI448670B (zh) | 2014-08-11 |
CN101772695A (zh) | 2010-07-07 |
TW200905176A (en) | 2009-02-01 |
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