JP5382358B2 - 物理量センサー - Google Patents
物理量センサー Download PDFInfo
- Publication number
- JP5382358B2 JP5382358B2 JP2010101963A JP2010101963A JP5382358B2 JP 5382358 B2 JP5382358 B2 JP 5382358B2 JP 2010101963 A JP2010101963 A JP 2010101963A JP 2010101963 A JP2010101963 A JP 2010101963A JP 5382358 B2 JP5382358 B2 JP 5382358B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- frequency
- physical quantity
- resonator
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000001133 acceleration Effects 0.000 claims description 78
- 238000001514 detection method Methods 0.000 claims description 61
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 21
- 230000008859 change Effects 0.000 claims description 20
- 230000009977 dual effect Effects 0.000 claims description 7
- 239000013078 crystal Substances 0.000 description 75
- 230000010355 oscillation Effects 0.000 description 33
- 238000010586 diagram Methods 0.000 description 14
- 230000001360 synchronised effect Effects 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 230000010354 integration Effects 0.000 description 9
- 239000003990 capacitor Substances 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000004069 differentiation Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 235000014676 Phragmites communis Nutrition 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Landscapes
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010101963A JP5382358B2 (ja) | 2010-04-27 | 2010-04-27 | 物理量センサー |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010101963A JP5382358B2 (ja) | 2010-04-27 | 2010-04-27 | 物理量センサー |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011232144A JP2011232144A (ja) | 2011-11-17 |
| JP2011232144A5 JP2011232144A5 (enExample) | 2013-05-23 |
| JP5382358B2 true JP5382358B2 (ja) | 2014-01-08 |
Family
ID=45321605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010101963A Expired - Fee Related JP5382358B2 (ja) | 2010-04-27 | 2010-04-27 | 物理量センサー |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5382358B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107870558B (zh) * | 2016-09-27 | 2021-06-25 | 精工爱普生株式会社 | 物理量测定装置、电子设备和移动体 |
| JP6834299B2 (ja) * | 2016-09-27 | 2021-02-24 | セイコーエプソン株式会社 | 回路装置、物理量測定装置、電子機器及び移動体 |
| JP6862900B2 (ja) * | 2017-02-22 | 2021-04-21 | セイコーエプソン株式会社 | 回路装置、物理量測定装置、電子機器及び移動体 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4437699B2 (ja) * | 2004-05-14 | 2010-03-24 | 富士通マイクロエレクトロニクス株式会社 | センサ |
| JP4775576B2 (ja) * | 2006-09-20 | 2011-09-21 | エプソントヨコム株式会社 | 速度センサおよびその調整方法 |
| JP2008128762A (ja) * | 2006-11-20 | 2008-06-05 | Yokogawa Electric Corp | 圧力測定装置および圧力測定方法 |
| JP2009229363A (ja) * | 2008-03-25 | 2009-10-08 | Epson Toyocom Corp | 加速度検知ユニット、及び加速度センサ |
-
2010
- 2010-04-27 JP JP2010101963A patent/JP5382358B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011232144A (ja) | 2011-11-17 |
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