JP5380980B2 - Work moving table and droplet discharge apparatus equipped with the same - Google Patents

Description

  The present invention relates to a workpiece moving table that floats and conveys a workpiece in a non-contact manner, and a droplet discharge device including the workpiece moving table.

Conventionally, as a substrate processing apparatus (droplet discharge apparatus) equipped with a large substrate (work) moving mechanism (work moving table), a work that is adsorbed and fixed to an air pad extending on both sides along the X-axis direction is X An X-direction moving support device for conveying in the axial direction, a stopper and pusher for roughly positioning the periphery of the workpiece in the Y-axis direction, a roller for supporting the intermediate part of the workpiece and supporting the conveyance, and a processing performed by the processing device A device including a support device and a Y-direction moving device that moves the processing device in the Y-axis direction is known (see Patent Document 1). This droplet discharge device manufactures a color filter or the like of a liquid crystal display device. After aligning a workpiece of a predetermined size roughly positioned by a stopper and a pusher, an X-direction moving support device is used on the processing support device. Transport to. The processing support device is an air float, and performs processing (drawing) on the workpiece by the processing device while maintaining the accuracy in the Z-axis direction of the workpiece by either floating or adsorption by air pressure.
JP 2007-150280 A

  In such a droplet discharge device, if the ambient temperature of the workpiece changes, the workpiece thermally expands or contracts, and high-precision drawing processing becomes impossible. Therefore, the droplet discharge device is a temperature-controlled chamber (clean room). To be housed in. On the other hand, compressed air for causing the workpiece to float on the air is supplied from a compressed air facility in the factory. For this reason, even if the ambient temperature of the workpiece (atmosphere in the chamber) is appropriately temperature controlled, if the temperature of the supplied compressed air differs from the temperature of the supplied compressed air, the workpiece may be thermally expanded or contracted. was there. In particular, compressed air pipes are not insulated or covered like hot water pipes and cooling water pipes (same as pure water pipes), and therefore change in temperature due to the influence of the ambient temperature of the pipe path.

  An object of the present invention is to provide a work movement table that can eliminate the gas-harmonic effect of floating gas on a work and a droplet discharge device including the work movement table.

The work movement table of the present invention is a table base, a gas levitation means having a plurality of Bernoulli chucks that are provided upward and distributed on the upper surface of the table base, and the gas levitation means. Working gas supply means for supplying working gas for levitation, moving means for moving the work that has floated the gas in a horizontal plane, and a plurality of Bernoulli chuck levitation gaps are arranged above the plurality of Bernoulli chucks. And a work set plate on which the work is set . The work set plate is formed with a plurality of negative pressure communication holes for applying the negative pressure of the plurality of Bernoulli chucks to the work .

According to this configuration, the working gas blown out from the Bernoulli chuck smoothly passes through the gap between the table base and the workpiece (the floating gap), so that the workpiece is sucked from the surface of the table base while being sucked toward the table base. Ascend to a certain position. As a result, the workpiece can be stably levitated without causing distortion, and can be smoothly moved in the horizontal plane.
In addition, the working gas blown from the Bernoulli chuck causes the work set plate to be lifted to a certain position from the surface of the table base while being sucked toward the table base, and a plurality of negative pressure communication formed on the work set plate. A suction force can be applied to the workpiece placed thereon via the hole. As a result, the work set plate is stably levitated and held with high planar accuracy, so that the workpiece placed thereon is also attracted with high planar accuracy without causing distortion, and the horizontal plane is smoothly smoothed. You can move in.

In this case, it is preferable to further include a gas harmony means that is provided in a gas supply flow path between the gas floating means and the working gas supply means and adjusts the working gas to a desired gas harmony state.

Furthermore, in this case, it is preferable that the gas conditioning means has a temperature adjusting means for adjusting the temperature of the working gas.

According to these structures, since the workpiece | work can be floated using the working gas by which gas harmony (temperature adjustment) was carried out, the temperature of a workpiece | work can be kept constant with a working gas. That is, the working gas for floating the work can be provided with a function for controlling the temperature of the work. Thereby, since deformation (expansion or contraction) of the workpiece due to a temperature change can be prevented, high-precision processing can be performed on the workpiece. Moreover, since it is not necessary to achieve air conditioning with respect to the entire workpiece moving table, a chamber or the like that accommodates the entire workpiece moving table can be unnecessary (or simple). As a result, the structure of the entire apparatus can be simplified and reduced in size. Depending on the workpiece, it is preferable to adjust the humidity in addition to the temperature.

  In this case, the moving means has an X-axis moving mechanism that moves the work in the X-axis direction via the work set plate, and the X-axis moving mechanism is a pair of tables disposed on both sides along the X-axis direction of the table base. It is preferable to comprise a guide rail and a pair of linear motors having a pair of sliders that move slidably on each guide rail.

  According to this configuration, since there is no bearing portion such as a rotary motor, the moving means (driving system) can be simplified, and high-precision and smooth movement (conveyance) can be performed.

  In this case, it is preferable that an escape groove for escaping the working gas flowing out from each Bernoulli chuck is formed on the upper surface of the table base.

  In this case, it is preferable that the escape groove is arranged so as to surround each Bernoulli chuck.

  According to these configurations, the working gas that has flowed out from the Bernoulli chucks to the floating gap flows along the escape grooves. For this reason, even if a plurality of Bernoulli chucks are covered with a work set plate having a large area, the flying performance of each Bernoulli chuck is not impaired.

  Further, in this case, it is preferable that a vacuum suction means communicates with the escape groove.

  According to this configuration, since the working gas that has flowed along the escape groove is sucked by the vacuum suction means, the working gas flowing out from each Bernoulli chuck can be efficiently released.

  In this case, the plurality of Bernoulli chucks are preferably distributed in a staggered pattern on the upper surface of the table base.

  According to this configuration, the arrangement density of Bernoulli chucks on the upper surface of the table base can be increased. Thereby, sufficient suction | attraction force and levitation | floating force can be given to a workpiece | work (or workpiece | work set plate). In addition, when a work set plate having a negative pressure communication hole is provided, it is assumed that one negative pressure communication hole moves and shifts from the negative pressure generating portion of the Bernoulli chuck as the work set plate moves. However, since another negative pressure communication hole faces another negative pressure generating portion, a stable suction force can be continuously applied to the workpiece.

In addition, the intermediate portion of the table base in the moving direction of the workpiece is a processing area for processing the workpiece. In the processing area, a plurality of levitation floats that are provided in place of the plurality of Bernoulli chucks and float the work set plate. It is preferable to further include a blow nozzle.

  According to this configuration, the work (or work set plate) faces the processing area in a state where the work is floated by the gas blown from the plurality of floating blow nozzles on the lower surface thereof. As a result, the pressure distribution in the processing area can be stabilized in a uniform state, and processing can be performed on a workpiece with high planar accuracy.

In this case, is interposed in the supply passage for connecting the plurality of floating blow nozzle and the working gas supply means, a plurality of flow rate adjusting means for adjusting the gas supply to the plurality of floating blow nozzle individually, a plurality of A controller that controls the flow rate adjusting means; and a detecting means that is disposed in the processing area and detects the height level of each part of the workpiece in the processing area. The controller performs processing based on the detection result of the detecting means. It is preferable to control the plurality of flow rate adjusting means so that the work on the work set plate in the area becomes flat.

  According to this configuration, the workpiece can be floated and maintained in a highly accurate plane state without distortion in the processing area in the processing area, so that the workpiece can be processed with high accuracy.

  A droplet discharge device of the present invention includes the above-described work movement table and an ink jet type functional droplet discharge head that faces the work movement table from above, and is moved in the main scanning direction that is the X-axis direction by the work movement table. A drawing process is performed by selectively ejecting functional droplets from a plurality of ejection nozzles of the functional droplet ejection head to the workpiece.

  According to this configuration, it is possible to omit (or simplify) a chamber or the like for air-conditioning management of the entire apparatus while preventing deformation of the work using the air-conditioned working gas. Thereby, deformation (expansion or contraction) of the workpiece due to temperature change can be prevented, high-precision processing can be performed on the workpiece, and the entire droplet discharge device can be downsized.

  Hereinafter, a droplet discharge apparatus (first embodiment) to which a work movement table of the present invention is applied will be described with reference to the accompanying drawings. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a functional droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced. A light emitting layer to be a pixel, a filter element of a color filter, and the like are formed.

  As shown in FIGS. 1 to 3, the droplet discharge device 1 includes an X-axis support base 21 serving as a machine base and an X-axis that is disposed on the X-axis support base 21 and moves the workpiece W in the X-axis direction. A table (work movement table) 2 and a pair of Y-axis support bases 3a spanned across the X-axis table 2 via a plurality of columns 11 and extend in the Y-axis direction. The Y-axis table 3, the 13 carriage units 4 suspended in a movable manner on the Y-axis table 3 and mounted with a plurality (12) of functional liquid droplet ejection heads 13, and the X-axis table 2 are conveyed (supplied). The workpiece alignment apparatus 5 corrects the deviation of the workpiece W in each direction. Further, the droplet discharge device 1 is provided with a conveyor device 26 that feeds and discharges the workpiece W adjacent to the outside of the X-axis support base 21 in the X-axis direction (see FIG. 2).

  Further, the droplet discharge device 1 supplies the functional liquid to the functional droplet discharge head 13 through the chamber CH that houses these devices in an atmosphere that is not affected by outside air, and the chamber CH. A functional liquid supply device 6 and a main controller 12 (see FIG. 8) for overall control of the droplet discharge device 1 are provided. A main part of the functional liquid supply device 6 is provided on a part of the side wall of the chamber CH. A tank cabinet 6b for storing the main tank 6a and the like is provided. The droplet discharge device 1 discharges the functional droplet discharge head 13 in synchronization with the main scan by the X-axis table 2 and the sub-scan by the Y-axis table 3, thereby providing six colors supplied from the functional liquid supply device 6. Are ejected to draw a predetermined drawing pattern on the workpiece W.

  The droplet discharge device 1 also includes a maintenance device 7 including a flushing unit 15, a suction unit 16, a wiping unit 17, and a discharge inspection unit 18. These units are used for maintenance of the functional droplet discharge head 13, The function of the functional droplet discharge head 13 is maintained and restored. A position immediately below the 13 carriage units 4 located on the X-axis table 2 is a drawing area DA (processing area) for drawing, and deviates from the drawing area DA in the Y-axis direction, and the Y-axis. A position where the carriage unit 4 can be moved by the table 3 is a maintenance area MA. And the suction unit 16 and the wiping unit 17 are arrange | positioned on the mount frame provided in this maintenance area MA. Further, the flushing unit 15 and the discharge inspection unit 18 are mounted on the X-axis table 2.

  The flushing unit 15 includes a pre-drawing flushing unit 61 and a regular flushing unit 62. The pre-drawing flushing unit 61 receives a discharge from the functional liquid droplet ejection head 13 immediately before the drawing process. The function liquid droplet ejection head 13 is discarded and discharged during non-drawing processing such as repositioning (details will be described later). The suction unit 16 has 13 cap units 160, forcibly sucks the functional liquid from the discharge nozzle 57 of each functional liquid droplet discharge head 13, and performs capping. The wiping unit 17 wipes the nozzle surface of the functional liquid droplet ejection head 13 after suction. The ejection inspection unit 18 inspects the presence / absence of ejection from the functional droplet ejection head 13 and the flight bend, and measures the ejection amount (weight) from the diameter of the landing dot D of the functional droplet.

  As shown in FIGS. 1 to 3, the X-axis table 2 includes a table base 22 mounted on an X-axis support base 21, and an air levitation means 23 (which is incorporated on the upper surface of the table base 22 and blows air upward). 8), a work set plate 24 which is disposed above the table base 22 with a floating gap and is formed with a plurality of negative pressure communication holes 240 for sucking and setting the work W, and the work set plate 24 And an X-axis moving mechanism 25 that moves the X-axis in the X-axis direction. As will be described in detail later, the table base 22 includes an air levitation means 23, a Bernoulli chip 33 (Bernoulli chuck) for forming a certain levitation gap between the table base 22 and the work set plate 24, and conveyance A plurality of blow tips 34 and floating blow tips 35 are provided (see FIG. 8 for both). Hereinafter, of the reciprocating movement of the work set plate 24 (work W) by the X-axis moving mechanism 25, the movement from the upper side to the lower side in FIG. 2 is referred to as “forward movement”, and the movement from the lower side to the upper side is performed. The explanation proceeds as “return”.

  The X-axis table 2 is divided into two areas in the X-axis direction across the drawing area DA, one of which is a transfer area SA (upper side in FIG. 2) for mainly feeding and unloading the workpiece W, and the other. Is a moving area TA for mainly moving the flushing unit 15 and the discharge inspection unit 18 (see FIG. 8).

  In addition, the transfer area SA is divided into two areas at approximately the center, and is a first area A1 and a second area A2 in order from the conveyor device 26 side (see FIG. 8). Similarly, the movement area TA is divided into two areas at substantially the center, and is a third area A3 and a fourth area A4 in order from the drawing area DA side (see FIG. 8).

  As shown in FIGS. 2 and 3, the conveyor device 26 is installed so that the workpiece W can be moved horizontally. The conveyor frame 260 that forms the appearance of the conveyor device 26 and the workpiece W from below are supported by the X axis. It is comprised from the several conveyor roller 261 for conveying toward a direction, and the conveyor motor (illustration omitted) which drives each conveyor roller 261 rotationally. Each conveyor roller 261 has substantially the same width as that of the X-axis table 2 and rotates forward and backward in accordance with the material supply and material removal. In addition, it is preferable that the workpiece | work W is introduce | transduced into the conveyor apparatus 26 in the state of pre-alignment in the case of material supply.

  As shown in FIGS. 1 to 3, the Y-axis table 3 includes 13 bridge plates 3 b each of which 13 carriage units 4 are suspended, and 13 sets of 13 bridge plates 3 b that are supported at both ends. A Y-axis slider (not shown) and a pair of Y-axis linear motors (not shown) are provided on the pair of Y-axis support bases 3a and move the bridge plate 3b in the Y-axis direction. In addition, the Y-axis table 3 performs sub-scanning of the functional liquid droplet ejection head 13 during drawing via each carriage unit 4 and causes the functional liquid droplet ejection head 13 to face the suction unit 16 and the wiping unit 17. In this case, the carriage units 4 can be moved independently and individually, or the 13 carriage units 4 can be moved together.

  Each carriage unit 4 has six colors of R, G, B, C, M, and Y, each of two (total 12) functional droplet ejection heads 13 and 12 functional droplet ejection heads 13 The head unit 42 includes a head plate 41 that is supported in two groups each (see FIG. 4). Each carriage unit 4 has a θ rotation mechanism 43 that supports the head unit 42 so as to be capable of θ correction (θ rotation), and a suspension member 44 that supports the head unit 42 on the bridge plate 3b via the θ rotation mechanism 43. And. In addition, each of the carriage units 4 has a sub tank 45 disposed thereon (actually disposed on the bridge plate 3b), and utilizes a natural water head from the sub tank 45 and a pressure regulating valve (not shown). The functional liquid is supplied to each functional liquid droplet ejection head 13 via (omitted). In the present embodiment, the number of carriage units 4 and the number of functional liquid droplet ejection heads 13 mounted on each carriage unit 4 are arbitrary.

  As shown in FIG. 5, the functional liquid droplet ejection head 13 is a so-called double ink jet head, which includes a functional liquid introduction part 51 having two connection needles 54, and a double series head connected to the functional liquid introduction part 51. A substrate 52 and a head main body 53 that discharges functional liquid droplets are provided below the head substrate 52 (see FIG. 5A). A large number of ejection nozzles 57 are arranged on the nozzle plate 56 of the head body 53 in parallel with each other and at a half nozzle pitch position shift (see FIG. 5B).

  As shown in FIGS. 4 and 6, each head unit 42 has a level detection device 46 for detecting the height level of a plurality of parts (a plurality of points) of the work W (work set plate 24) in the drawing area DA. It is installed. The level detection device 46 is a non-contact type distance measuring device such as a laser distance measuring device, and is arranged with a detection surface 48 facing downward from a detection through hole 47 formed through the head plate 41 of each head unit 42. Has been.

  Each level detection device 46 measures the distance (work gap) between each head unit 42 and each part of the work W at the time of non-drawing processing such as when the work W is replaced, and the measurement result is the main controller described above. 12 is sent. Based on the measurement result, the main controller 12 controls the supply pressure (flow rate) of compressed air by the air floating means 23 (the floating blow tip 35 thereof) in the drawing area DA so that the workpiece W becomes flat (horizontal). (Details will be described later). The level measurement of the workpiece W by the level detection device 46 is preferably performed automatically and periodically, but may be performed by an operator's manual operation or the like. Further, the level detection device 46 may not be mounted on all the 13 head units 42, but may be mounted only on the odd number (or even number) head units 42 from the maintenance area MA, or at both ends and the center. It may be installed only in and. That is, the number of parts for detecting the height level of the workpiece W is arbitrary.

  As another embodiment of the mounting method of the level detection device 46, a dedicated carriage unit 4 (level detection carriage (not shown)) for mounting the level detection device 46 is added, and this is removed from the maintenance area MA. You may suspend from the Y axis table 3 via the 14th bridge plate 3b in the farthest position. In this case, the level of the workpiece W is measured when the 13 carriage units 4 are moved together to the maintenance area MA so as to face the suction unit 16 and the wiping unit 17 during the non-drawing process. Move. Then, when the suction process or the like is completed and moved again to the drawing area DA, the level of each part of the workpiece W is measured by the level detection device 46 mounted while moving the level detection carriage. In this embodiment, only one level detection device 46 needs to be mounted, the number of parts can be reduced, and the level of the workpiece W can be efficiently measured during idle periods such as during non-drawing processing.

  As shown in FIG. 1 to FIG. 3 and FIG. 7, the workpiece alignment device 5 captures and recognizes an alignment mark (not shown) of the workpiece W fed and hangs over the X-axis table 2. A pair of passed alignment bridges 5a, a plurality of alignment cameras 5b that are supported by the alignment bridge 5a and that image the pair of alignment marks on the surface of the workpiece W from above, and the X axis of the X axis table 2 for alignment And an alignment controller (not shown) for driving the moving mechanism 25.

  The alignment camera 5b is disposed at nine locations of the pair of alignment bridges 5a so as to be compatible with various sizes of the workpiece W and vertical and horizontal placement of the workpiece W. A pair (or one) of alignment cameras 5b corresponding to the pair of alignment marks captures a pair of alignment marks of the supplied workpiece W. Based on this imaging result, the alignment controller incorporated in the main controller 12 recognizes deviations in the X-axis direction, the Y-axis direction, and the θ direction and calculates a correction amount. As will be described in detail later, the X-axis moving mechanism 25 is driven based on the calculated correction amount to correct the deviation of the workpiece W in the θ direction and to correct in the X-axis direction (alignment). Further, the correction in the Y-axis direction is relative and is performed by slightly moving the carriage unit 4 by the Y-axis table 3. The single alignment camera 5b at the center in the Y-axis direction can capture a pair of alignment marks.

  The chamber CH accommodates the entire droplet discharge device 1 and performs simple temperature and humidity management by an air conditioner (not shown) so that the internal atmosphere is not affected by outside air. Although details will be described later, direct temperature management of the workpiece W (and the workpiece set plate 24) is performed by adjusting the temperature of the air blown out from the air floating means 23. Further, when manufacturing an organic EL device or the like, it is preferable that the chamber CH is configured in an atmosphere of an inert gas (nitrogen gas). In such a case, the working gas supplied to the air levitation means 23 is also an inert gas.

  Next, the X-axis table 2 (work movement table) will be described in detail. As shown in FIGS. 8 to 12, the table base 22 is a plate-like member having a slight thickness, and air floating means for blowing air for stably floating the work set plate 24 on the upper surface (surface) thereof. 23 is incorporated. The air levitation means 23 causes the work set plate 24 to air levitate to a fixed position, and a plurality of Bernoulli chips 33 (Bernoulli chucks) for sucking and setting the work W placed thereon, and air to the work W in the replacement area SA. And a plurality of floating blow tips 35 for floating the work set plate 24 in the drawing area DA.

  The air levitation means 23 is formed in the table base 22, and communicates with the Bernoulli chip 33, the transport blow chip 34, and the levitation blow chip 35, respectively, and the chips 33, 34, and 35. An air supply mechanism 36 that supplies compressed air and an air exhaust mechanism 37 that sucks and exhausts used compressed air (working air, blow air) are provided. The Bernoulli chip 33, the transport blow chip 34, and the floating blow chip 35 may each be formed of a single component and incorporated into the table base 22, or the chips 33, 34, 35 may be mounted on the table base 22 itself. You may make it.

  The plurality of Bernoulli chips 33 are widely distributed over the entire upper surface of the table base 22 other than the drawing area DA. In the first area A1, seven (rows) are arranged in a line at equal intervals along the Y-axis direction. And four rows are arranged at equal intervals along the X-axis direction to form a matrix (28 in total). In the following description, on the upper surface of the table base 22, one row in the X-axis direction is referred to as “row”, and one row in the Y-axis direction is referred to as “column”.

  Similarly, the plurality of Bernoulli chips 33 in the second area A2 are arranged in 7 rows × 4 columns, and between the two columns in the vicinity of the drawing area DA, there are 6 (rows) shifted by a half pitch in the Y-axis direction. ) Is arranged substantially in a matrix (34 in total). That is, the three columns from the drawing area DA side form a staggered pattern (7 rows, 6 rows, 7 rows). Similarly, a plurality of Bernoulli chips 33 in the moving area TA are arranged with seven (rows) arranged at equal intervals and six (rows) arranged at half intervals in the Y-axis direction at equal intervals. The rows are alternately arranged to form a staggered pattern. The plurality of Bernoulli chips 33 are arranged in 7 rows × 4 columns and 6 rows × 3 columns (total of 46) in the third area A3, and in the fourth area A4, 7 rows × 4 columns, 6 rows × 4. Rows (52 in total) are arranged. As described above, 160 Bernoulli chips 33 are arranged in the entire table base 22.

  The plurality of transport blow chips 34 are distributed throughout the transfer area SA, and each of the first area A1 and the second area A2 has 6 rows × 3 columns (18 in total (36 in both areas)). It is arranged and forms a matrix. The rows of Bernoulli chips 33 and the rows of transport blow tips 34 in the transfer area SA described above are alternately arranged to form a staggered shape as a whole.

  Similar to the plurality of Bernoulli chips 33 described above, the plurality of floating blow chips 35 are arranged in a zigzag pattern throughout the drawing area DA, and in detail, 7 rows × 2 columns and 6 rows × 3 columns. A total of 32 floating blow tips 35 are disposed.

  As shown in FIG. 8, in this embodiment, each of the plurality of chips 33, 34, 35 disposed on the table base 22 has a staggered pattern of 35 columns in the X-axis direction and 13 rows in the Y-axis direction. Although formed, the number of chips 33, 34, and 35, the arrangement position, etc. are arbitrary.

  As shown in FIGS. 9 to 13, each Bernoulli chip 33 is formed in a thin annular shape with a member such as a conductive resin material, and has a non-contact holding surface 330 facing the work set plate 24 in a non-contact manner. A swirl flow generating chamber 331 formed in a truncated cone shape having an open upper end on the non-contact holding surface 330; a pair of swirl flow nozzles 332 for blowing air into the swirl flow generating chamber 331 and generating a swirl flow; It comprises a pair of air inflow channels 333 that are connected to a pair of swirl flow nozzles 332 and supply compressed air (working air). At the lower end of the swirl flow generation chamber 331, a pair of swirl flow nozzles 332 along the X-axis direction open at one end in the tangential direction of the inner peripheral surface 335 of the swirl flow generation chamber 331 at a symmetrical position. The other end communicates with a pair of air inflow passages 333 formed vertically from the lower side of each swirl flow nozzle 332 (see FIG. 13B).

  The working air blown from the swirl flow nozzle 332 flows along the inner peripheral surface 335 of the swirl flow generation chamber 331, and becomes a strong swirl flow in the swirl guide channel 334 formed on the surface of the non-contact holding surface 330. Along the flow from the inner circumference side toward the outer circumference side. At this time, a negative pressure is generated at the center of the swirling flow in accordance with Bernoulli's theorem, and the negative pressure and the working air (positive pressure) antagonize, thereby the work set plate 24 existing above the non-contact holding surface 330. And the suction force can be applied to the workpiece W through the plurality of negative pressure communication holes 240 formed in the workpiece set plate 24.

  As shown in FIGS. 9, 10, and 14 (a), each transport blow chip 34 is formed in a thin cylindrical shape with a member such as a conductive resin material, and faces the work set plate 24 in a non-contact manner. A non-contact conveying surface 340, three non-contact conveying surfaces 340 that are open to the three non-contact conveying surfaces 340, blown air obliquely upward toward the material supply direction, and pressure air (blow) Air) 3 supply material blow passages 342, three contact material blow nozzles 343 that open to the non-contact conveyance surface 340 and blow air obliquely upward in the material removal direction, and each material removal The three material removal blow channels 344 are connected to the blow nozzle 343 and supply blow air.

  The three feed blow nozzles 341 have one end opened at equal intervals along the Y-axis direction on the drawing area DA side of the non-contact transport surface 340, and the other end is transported by a blow tip. 34 extends obliquely downward toward the center in the X-axis direction and communicates with each of the feed blow channels 342 formed perpendicular to the non-contact conveying surface 340 (see FIG. 14C). Similarly, the three material removal blow nozzles 343 have one end opened at equal intervals along the Y-axis direction on the conveyor device 26 side of the non-contact conveyance surface 340, and the other end is The conveying blow tip 34 extends obliquely downward toward the center in the X-axis direction, and communicates with each material removal blow channel 344 formed perpendicular to the non-contact conveying surface 340. In addition, the number, arrangement position, etc. of each feed blow nozzle 341 or each material removal blow nozzle 343 are arbitrary. Further, a kind of blow nozzle may be configured to be rotatable in a horizontal plane, and the compressed air may be blown out in the feed direction and the removal direction by rotating the blow nozzle in an arbitrary direction.

  The plurality of transport blow tips 34 face relatively to the negative pressure communication holes 240 formed in the work set plate 24, and the bottom surface (rear surface) of the workpiece W through the negative pressure communication holes 240. By blowing blow air obliquely, levitation conveyance is performed in the material supply direction or the material removal direction. This eliminates the need to lift the workpiece W when feeding and unloading the workpiece W, and allows the workpiece W to be smoothly performed without contact while maintaining its posture.

  As shown in FIGS. 11, 12, and 14 (b), the flying blow tip 35 is formed in a thin cylindrical shape with a member such as a conductive resin material, and faces the work set plate 24 in a non-contact manner. Non-contact air bearing surface 350, a plurality of nozzle sets 351 for blowing air obliquely upward and outward in the Y-axis direction from the two air-blowing nozzles 352 opened to the non-contact air-bearing surface 350, and compressed air connected to each air-blowing nozzle 352 And a plurality of floating blow channels 353 for supplying (blow air).

  One set of nozzles 351 is composed of two floating blow nozzles 352 arranged in the X-axis direction, and each nozzle set 351 is disposed at the four corners of the non-contact floating surface 350 (four sets). 90 ° point symmetry). The two levitation blow nozzles 352 open at one end side by side in the X-axis direction on the non-contact levitation surface 350 and have the other end toward the center of the levitation blow tip 35 in the Y-axis direction. Extending obliquely downward and communicating with each floating blow channel 353 (see FIG. 14C). That is, the four sets of floating blow nozzles 352 blow out air in the opposite and oblique directions in the Y-axis direction, and balance the air blown out obliquely to lift the work set plate 24 upward. In addition, the number of each nozzle set 351 or each floating blow nozzle 352, an arrangement position, etc. are arbitrary.

  The air levitation by the plurality of levitation blow tips 35 is performed by blowing blow air obliquely from the plurality of levitation blow tips 35 (the levitation blow nozzles 352) to the bottom surface (back surface) of the work set plate 24 in the drawing area DA. . Thereby, the pressure distribution can be stabilized in a uniform state, and the workpiece W can be floated with high planar accuracy. Although details will be described later, since the blow air is blown so as to avoid the plurality of negative pressure communication holes 240 formed in the work set plate 24, the work W on the work set plate 24 does not float.

  As shown in FIGS. 9 to 12, an escape groove 31 is formed on the upper surface (front surface) of the table base 22 to allow the compressed air (working air, blown air) blown out from the air floating means 23 to escape. The escape groove 31 is formed in a semicircular cross section, and is formed in a hexagonal shape in plan view so as to surround each of the chips 33, 34, and 35. That is, the escape groove 31 is formed in a honeycomb shape so as to surround each of the plurality of chips 33, 34, 35 arranged in a staggered manner. Further, in a column in which seven (row) Bernoulli chips 33 or floating blow chips 35 are arranged, a pair of vertices in the Y-axis direction of each escape groove 31 has suction connected to an air exhaust communication channel 274 described later. Each hole 32 is formed. That is, a plurality of suction holes 32 communicate with the honeycomb-shaped escape groove 31 as a whole in a matrix.

  In this case, since a suction force acts on the plurality of suction holes 32 by the air exhaust communication flow path 274, the compressed air (working air, blow air) blown out from the plurality of chips 33, 34, 35 is escaped groove 31. And the air is effectively exhausted from the table base 22. For this reason, even if the upper surface of the table base 22 is covered with the work set plate 24, the flying performance of the chips 33, 34, and 35 is not impaired. Note that the shape (including the cross-sectional shape), size, arrangement, and the like of the escape groove 31 are arbitrary, and the shape, size, formation position, and the like of the suction hole 32 are arbitrary.

  As shown in FIGS. 8 to 12, the plurality of communication channels 27 are formed along the Y-axis direction, respectively, and compressed air is applied to the plurality of Bernoulli chips 33 over the entire upper surface of the table base 22 excluding the drawing area DA. A plurality (48) of working air communication channels 270 for supplying (operating air) and a plurality (6) of supplying compressed air (blow air) to a plurality of conveying blow tips 34 in the transfer area SA. ) Feed air communication channel 271 and plural (six) material removal air communication channels 272 and plural (10) for supplying pressurized air (blow air) to the floating blow tip 35 in the drawing area DA. The floating air communication channel 273 and the air exhaust communication channel 274 that exhausts the compressed air on the table base 22 from the plurality of suction holes 32 formed in the escape groove 31. It is. In FIG. 8, only half the number of the working air communication channel 270 and the floating air communication channel 273 are shown.

Two operating air communication channels 270 communicate with each other on the lower side of the plurality of Bernoulli chips 33 in one row, and each of the working air communication channels 270 includes the air inflow channels described above. 333 communicates with H.333, and working air is supplied to each Bernoulli chip 33.
Further, one feed air communication channel 271 and one material removal air communication channel 272 communicate with each other in one row below the plurality of transport blow tips 34 in one row. The communication channel 271 and each material removal air communication channel 272 communicate with each of the above-described feed blow channels 342 and each material removal flow channel 344 and supply blow air to each conveyance blow chip 34. .
Further, two floating air communication channels 273 communicate with each other on the lower side of the plurality of floating blow chips 35 in one row, and each floating air communication channel 273 has the above-described Y axis. Blow air is supplied to each levitation blow tip 35 by communicating with four levitation blow channels 353 connected to two nozzle sets 351 (four levitation blow nozzles 352) arranged in the direction.

  The working air communication channel 270, the feed air communication channel 271, and the floating air communication channel 273 each have an opening at each channel end on one side surface in the Y-axis direction of the table base 22. The number of communication channels 27, the opening position, etc. are arbitrary. Further, when it is difficult to form the communication flow path 27 by perforation from one side surface due to an increase in the size of the table base 22, it is possible to form one flow path by perforating from both side surfaces of the table base 22. Good. Alternatively, the table base 22 may have a double structure of an upper part and a lower part, and grooves serving as respective flow paths may be formed on the lower surface, and the communication flow path 27 may be configured by overlapping the upper part on the grooves. .

  One of the air exhaust communication channels 274 communicates with the plurality of suction holes 32 in each row below the row where the plurality of suction holes 32 are formed, and two air exhaust communication channels 274 are provided in the drawing area DA. The other areas A1, A2, A3, and A4 are each composed of four, totaling eighteen. Each air exhaust communication flow path 274 opens on the side surface in the Y-axis direction opposite to the communication flow paths 270, 271, 272, and 273 described above.

  Next, as shown in FIG. 8, the air supply mechanism 36 includes a compressed air source 360 that supplies compressed air to the Bernoulli chip 33 and the like, a compressed air channel 361 that communicates the upstream end with the pressurized air source 360, and a compressed air channel 361. An air temperature adjustment device 362 that adjusts the temperature of the compressed air, communicates with the downstream end, communicates with a temperature adjustment passage 363 that has an upstream end connected to the air temperature adjustment device 362, and an operating air communication passage 270 of the table base 22. An air supply channel system 364 and a supply side manifold 365 connecting the downstream end of the temperature control channel 363 and the air supply channel system 364 are configured.

  The compressed air channel 361 has an upstream end connected to the compressed air source 360, and in the vicinity of the compressed air source 360, a compressed air valve 380 that opens and closes the compressed air channel 361 from the upstream side, and a compressed air regulator that adjusts the supply pressure of the compressed air 381 is interposed.

  The air temperature adjustment device 362 includes, from the upstream side, a cooler 382 that cools the supplied compressed air, a heater 383 that heats the supplied compressed air, a temperature control sensor 384 that detects the temperature of the cooled or heated compressed air, A temperature controller 385 is connected to these devices. A plurality of non-contact type temperature sensors (not shown) are suspended from the Y-axis support base 3a, and the surface temperature of the work W (or work set plate 24) facing the drawing area DA can be measured. The temperature controller 385 performs feedback control of the cooler 382 and the heater 383 from the detection result of the non-contact temperature sensor. The temperature adjustment sensor 384 is provided in a preliminary manner, and detects whether or not the cooler 382 and the heater 383 are operating normally. The number of non-contact temperature sensors can be installed arbitrarily, and the installation position may be mounted on the head unit 42, for example. When measuring the temperature of the work set plate 24, a contact type temperature sensor may be used instead of the non-contact type temperature sensor.

  In the air temperature adjusting device 362, when the non-contact temperature sensor detects a temperature change, a control signal is sent from the main controller 12 to the temperature controller 385. The temperature controller 385 operates the cooler 382 or the heater 383 based on the control signal, and supplies the pressure-adjusted air whose temperature has been adjusted to the floating gap so as to maintain the workpiece W or the like at the set temperature. It has become. The arrangement of the cooler 382, the heater 383, and the temperature control sensor 384 is arbitrary. For example, the cooler 382 and the heater 383 may be connected in parallel, or a bypass (with a valve) that allows the compressed air to communicate with the temperature control flow path 363 without passing through the cooler 382 and the heater 383. May be provided.

  The air supply channel system 364 includes a plurality of operating air supply channels 386 that supply operating air to the plurality of Bernoulli chips 33, and a supply air supply channel 387 that supplies blow air for supply to the transport blow tip 34. And a material removal air supply channel 388 for supplying blow air for material removal, and a floating air supply channel 389 for supplying blow air to the floating blow tip 35.

  The plurality of working air supply channels 386 are configured by four channels so as to correspond to the four areas A1, A2, A3, and A4 on the entire table base 22 excluding the drawing area DA. Each working air supply flow path 386 has an upstream end connected to the supply side manifold 365, and in the vicinity of the supply side manifold 365, an electropneumatic regulator 36 a that adjusts the supply pressure of the working air from the upstream side, A supply-side solenoid valve 36b that opens and closes the working air supply flow path 386 is interposed.

  The working air supply channel 386 of the first area A1 is divided into eight branches on the downstream side, and the eight working air communication channels 270 having the downstream ends of the branched channels opened on the side surfaces of the first area A1. Is connected to each. Similarly, the working air supply flow paths 386 in the second area A2, the third area A3, and the fourth area A4 are respectively branched into 10 branches, 14 branches, and 16 branches on the downstream side. The downstream end is connected to each working air communication channel 270 opened to the side surface of the corresponding area A2, A3, A4. In FIG. 8, the number of branches of the working air supply channel 386 in each of the areas A1, A2, A3, and A4 is only half of the number of branches described above.

The supply air supply flow path 387 and the removal material air supply flow path 388 each have an upstream end connected to the supply side manifold 365, and in the vicinity of the supply side manifold 365, the supply pressure of blow air from the upstream side An electropneumatic regulator 36a for adjusting the flow rate and a supply side solenoid valve 36b for opening and closing the respective flow paths 387 and 388 are interposed.
The supply air supply flow path 387 is divided into six branches on the downstream side, and six supply air communication flows in which the downstream ends of the branched flow paths are opened in the side surfaces of the first area A1 and the second area A2. Each is connected to a path 271. Similarly, the material removal air supply flow path 388 is also divided into six branches on the downstream side, and is connected to each of the six material removal air communication flow paths 272 opened on the side surfaces of the first area A1 and the second area A2. .

The floating air supply channel 389 has an upstream end connected to the supply side manifold 365, and a supply side solenoid valve 36 b that opens and closes the floating air supply channel 389 is interposed in the vicinity of the supply side manifold 365. Yes.
The floating air supply flow path 389 is branched into 10 on the downstream side, and an electropneumatic regulator 36a for adjusting the supply pressure of blow air is interposed in each branched flow path, and the branched flow paths Are connected to 10 floating air communication channels 273 each having an opening on the side surface of the drawing area DA. The ten electropneumatic regulators 36a are used to control the supply pressure (flow rate) of blow air based on the measurement result of the level detection device 46 described above. In FIG. 8, the number of branches of the floating air supply flow path 389 is only half of the number of branches described above (five branches).

  The main controller 12 controls each electropneumatic regulator 36a based on the measurement result of the level detection device 46 described above. Thereby, since the supply pressure (flow rate) of the blow air supplied to any one floating air communication channel 273 formed along the Y-axis direction can be adjusted, the Y-axis direction of the floating blow tip 35 is adjusted. It is possible to control the blowout amount of blow air from the two nozzle sets 351 arranged side by side. For this reason, the plane accuracy of the workpiece W in the drawing area DA can be maintained satisfactorily.

  As described above, by operating the supply-side solenoid valve 36b provided in each supply flow path, it is possible to supply pressurized air (working air, blow air) only to the area where the work set plate 24 faces. . For this reason, the work set plate 24 (work W) can be efficiently and stably levitated with the minimum air flow rate from the compressed air source 360.

  As shown in FIG. 8, the air exhaust mechanism 37 includes a vacuum suction source 370 that sucks and exhausts compressed air (operating air, blow air) supplied to the Bernoulli chip 33 and the like, and a plurality of air exhaust communication channels of the table base 22. A plurality of air exhaust passages 371 communicating with 274, an exhaust main passage 372 having a downstream end connected to the vacuum suction source 370, and an exhaust side connecting the upstream end of the exhaust main passage 372 and the plurality of air exhaust passages 371. And a manifold 373.

  The plurality of air exhaust passages 371 communicate with the plurality of air exhaust communication passages 274, and the compressed air supplied onto the table base 22 passes from the plurality of suction holes 32 formed in the escape groove 31 to the vacuum suction source 370. This is a flow path for suction and exhaust. An air exhaust passage 371 communicates with each of the two air exhaust communication passages 274 in the drawing area DA. The two air exhaust passages 371 are combined into one by a two-branch joint (not shown). After joining, the joined downstream end is connected to the exhaust side manifold 373. Similarly, each of the four air exhaust communication channels 274 in each of the areas A1, A2, A3, and A4 excluding the drawing area DA is connected to an air exhaust channel 371, and these four air exhaust channels. 371 is joined to one by a four-branch joint (not shown), and the joined downstream end is connected to the exhaust side manifold 373. That is, a plurality (18) of air exhaust passages 371 communicating with the plurality of air exhaust communication passages 274 are merged in each of the five areas A1, A2, DA, A3, A4, and five streams are provided downstream. A downstream end is connected to the exhaust side manifold 373.

  Near the exhaust side manifold 373 of each air exhaust passage 371, from the downstream side, there are a vacuum regulator 37a for adjusting the exhaust pressure of the compressed air and an exhaust side solenoid valve 37b for opening and closing each air exhaust passage 371. It is installed. The five air exhaust passages 371 are joined at the downstream end by the exhaust side manifold 373 and connected to the vacuum suction source 370 through the exhaust main passage 372. Thereby, the area for performing the suction processing of the compressed air supplied from the compressed air source 360 can be arbitrarily selected by controlling the opening and closing of the one vacuum suction source 370 and the exhaust side solenoid valve 37b. Suction processing can be performed efficiently.

  As shown in FIG. 15, the work set plate 24 is formed of a thin plate-like lightweight member, and faces a plurality of chips 33, 34, and 35 disposed on the upper surface of the table base 22 from above. As described above, a plurality of negative pressure communication holes 240 are formed through. In the forward movement direction of the work set plate 24, a pair of positioning pins P are provided so as to be movable in and out along the Y-axis direction. ing. The pair of positioning pins P is disposed near the center along the Y-axis direction, and the workpiece W that has been conveyed hits the pair of positioning pins P protruding on the work set plate 24, so that the X-axis direction Is stopped, and pre-alignment in the θ direction on the work set plate 24 is performed.

  Each negative pressure communication hole 240 includes a plurality of small hole groups 242 formed by arranging a plurality of small holes 241 in a staggered manner. Each small hole 241 is a long hole extending in the X-axis direction, and is vertically formed so as to be aligned in the X-axis direction at equal intervals. Each small hole group 242 has one row of small holes 241 arranged at equal intervals in the X-axis direction and arranged in five rows in the Y-axis direction so as to form a staggered pattern. Thirteen sets are arranged at equal intervals in the Y-axis direction so as to correspond to the chips 33, 34, and 35 on the upper surface. The shape (round holes, long holes, etc.) and size of the small holes 241 are arbitrary, and the number (number of rows) of small holes 241 in the small hole group 242 and arrangement positions (staggered, matrix, etc.) are also included. Is optional.

  Accordingly, in the replacement area SA and the moving area TA, a set of small hole groups 242 (negative pressure communication holes 240) on the plurality of Bernoulli chips 33 in a certain row face a negative pressure generating portion of each Bernoulli chip 33. Become. As a result, the work set plate 24 floats to a certain position from the surface of the table base 22, and a suction force is applied to the work W placed on the work set plate 24 via the small hole group 242. Can do. Similarly, in the replacement area SA, a set of small hole groups 242 on a plurality of transport blow tips 34 in a certain row (even number rows) faces the material supply blow nozzle 341 and the material removal blow nozzle 343. Thereby, since the blow air from the material supply blow nozzle 341 or the material removal blow nozzle 343 can be directly applied to the work W through the small hole group 242, the work W can be lifted and moved.

  On the other hand, in the drawing area DA, as described above, the floating blow nozzles 352 of the floating blow tip 35 are located at both ends in the Y-axis direction, and therefore, the negative pressure communication holes 240 (small holes) above the floating blow tip 35. The group 242) faces a position where blow air from each floating blow nozzle 352 does not hit. That is, since blow air is blown to a position avoiding the negative pressure communication hole 240, the blow air acts only on the work set plate 24. As a result, the workpiece W on the workpiece set plate 24 is stably set on the workpiece set plate 24 without being lifted, and the workpiece set plate 24 has a floating gap with a stable pressure distribution formed by blow air. And will surface stably.

  As shown in FIGS. 1 to 3 and 15, the X-axis moving mechanism 25 includes a pair of X-axis guide rails 250 disposed on both sides of the table base 22 along the X-axis direction, and each X-axis guide rail 250. Three X-axis sliders 251 slidably moving on one side, each X-axis slider 251 and the work set plate 24 are connected to each other, and the work set plate 24 is connected via each X-axis slider 251. And an X-axis linear motor (not shown) for moving (work W).

  On one X-axis guide rail 250, three X-axis sliders 251 provided at the intermediate position and both end positions in the sliding direction of the work set plate 24 are arranged at equal intervals. The connection block 252 is composed of a reference connection block 253 provided at an intermediate position in the sliding direction of the work set plate 24 and a pair of adjustment connection blocks 254 provided at both ends of the X-axis guide rail 250 on one side. These blocks 253 and 254 are mounted on three X-axis sliders 251, respectively. That is, the work set plate 24 is supported by 6 points on both sides.

The pair of reference connecting blocks 253 is made of an elastic material such as hard rubber that allows minute movement in the X-axis direction and the Y-axis direction.
Each adjustment connecting block 254 includes a Y-axis micro guide rail 256 disposed on the X-axis slider 251 along the Y-axis direction, and a Y-axis micro slider 257 that moves slidably on the Y-axis micro guide rail 256. And a Y-axis minute moving mechanism 255 comprising a Y-axis minute slider 257 and a minute slider base 258 for connecting the work set plate 24 to each other. The micro slider base 258 is made of an elastic material such as hard rubber and allows movement in the X-axis direction. The Y-axis minute movement mechanism 255 can move in the smooth θ direction by allowing the movement in the X-axis direction and moving the Y-axis minute slider 257 in the Y-axis direction. Each adjustment connecting block 254 may be made of an elastic material such as hard rubber, similar to each reference connecting block 253, omitting the Y-axis fine movement mechanism 255.

  Here, the alignment of the workpiece W set on the workpiece set plate 24 in the θ direction and the X-axis direction will be described. The workpiece W that has been fed (conveyed) is stopped by the pair of positioning pins P, and is sucked and set on the workpiece set plate 24 in a pre-aligned state. Thereafter, the pair of positioning pins P is immersed, and the above-described work alignment device 5 calculates the correction amount in each direction. The alignment in the θ direction is performed by driving the X-axis linear motors on both sides of the work set plate 24 in opposite directions according to the correction amount. As a result, the work set plate 24 rotates with respect to the central axis perpendicular to the horizontal plane, and the displacement correction amount (movement distance) is distributed to both sides, so that alignment can be performed with a minimum movement distance. Moreover, since each connection block 252 can absorb the twist in the θ direction, it is possible to easily align the work set plate 24 (work W) in the θ direction. Further, correction in the X-axis direction is also performed by moving the X-axis linear motors on both sides in parallel. By performing alignment in this way, a highly accurate drawing process can be performed on the workpiece W. Although the moving distance becomes large, only the moving means on one side of the work set plate 24 may be driven to perform the alignment in the θ direction.

  The flushing unit 15 will be described in detail with reference to FIGS. 1 to 3, 16 and 17. As described above, the flushing unit 15 includes the pre-drawing flushing unit 61 that receives the discarded discharge from the functional liquid droplet ejection head 13 immediately before the drawing process, and the functional liquid droplets that are performed during the non-drawing process such as when the work W is replaced. And a regular flushing unit 62 that receives the discarded discharge of the discharge head 13.

  The pre-drawing flushing unit 61 and the regular flushing unit 62 have substantially the same configuration, and include a liquid receiving sheet 63 wound in a roll shape for receiving the discarded discharge of the functional liquid droplet discharge head 13, and a liquid receiving sheet 63. A pair of an FL support plate 64 that is horizontally supported from below, a liquid receiving sheet supply device 65 that feeds the liquid receiving sheet 63 along with the FL support plate 64 and winds it from the FL support plate 64, and an X-axis moving mechanism 25. And a pair of FL sliders 66 that slidably move on the X-axis guide rail 250. The FL support plate 64 (the liquid receiving sheet 63 and the liquid receiving sheet supply device 65) is slidable in the X-axis direction by the X-axis linear motor via each FL slider 66. The regular flushing unit 62 uses a thicker liquid receiving sheet 63 than the pre-drawing flushing unit 61 because the amount of functional liquid received is larger. However, the same liquid receiving sheet 63 may be used for both the units 61 and 62.

  In the FL support plate 64, a plurality of FL negative pressure communication holes 640 that cause the negative pressure of the plurality of Bernoulli chips 33 to act on the liquid receiving sheet 63 are formed, similarly to the work set plate 24 described above. Each of the negative pressure communication holes 640 for FL is similar to the negative pressure communication hole 240 formed in the work set plate 24, and a plurality of small holes 641 for FL that are elongated holes in the X-axis direction are arranged in a staggered manner. The FL small hole group 642 is configured at a regular interval in the Y-axis direction so as to correspond to the chips 33, 34, and 35 on the upper surface of the table base 22. 13 sets are arranged side by side. The shape (round hole, long hole, etc.), size, etc. of the FL small holes 641 and the number (number of rows) of FL small holes 641 in the FL small hole group 642, arrangement positions (staggered, matrix, etc.), etc. Is optional.

  In the moving area TA and the transfer area SA, a set of FL small hole groups 642 (FL negative pressure communication holes 640) on a plurality of Bernoulli chips 33 in a row face the negative pressure generating portion of each Bernoulli chip 33. Therefore, the FL support plate 64 floats to a certain position from the surface of the table base 22, and the liquid receiving sheet 63 placed on the FL support plate 64 has an adsorption force via the FL small hole group 642. Can act. On the other hand, in the drawing area DA, as described above, blow air is blown to the position avoiding the negative pressure communication hole 640 for FL, so that the liquid receiving sheet 63 does not rise and the FL support plate 64 is stably lifted. Can be made.

  The liquid receiving sheet supply device 65 includes a liquid receiving sheet supply reel 650 that feeds the wound liquid receiving sheet 63 onto the FL support plate 64, a liquid receiving sheet supply motor 651 that drives the liquid receiving sheet supply reel 650, and a liquid receiving A liquid receiving sheet tension motor 652 that is disposed on the sheet supply reel 650 side and applies tension to the liquid receiving sheet 63 on the FL support plate 64, and a receiver that winds the liquid receiving sheet 63 fed out from the liquid receiving sheet supply reel 650. The liquid sheet take-up reel 653, the liquid-receiving sheet take-up motor 654 that drives the liquid-receiving sheet take-up reel 653, and the liquid-receiving sheet 63 on the FL support plate 64 disposed on the liquid-receiving-sheet take-up reel 653 side. And a liquid receiving sheet feed motor 655 for applying tension to the sheet.

  The liquid receiving sheet supply reel 650 and the liquid receiving sheet take-up reel 653 are respectively disposed along the X-axis direction on both sides of the X-axis guide rail 250 in the Y-axis direction, and are provided at the winding center portion. The liquid receiving sheet 63 fed out from the liquid receiving sheet supply reel 650 to pass the X axis by the liquid receiving sheet supply motor 651 and the liquid receiving sheet take-up motor 654 is wound around the liquid receiving sheet take-up reel 653. Rotate to. Each reel 650, 653 has a braking mechanism (not shown) that restricts the rotation of the reels 650, 653 in order to prevent the liquid receiving sheet 63 wound when the motors are stopped. It has been incorporated.

  The liquid receiving sheet tension motor 652 and the liquid receiving sheet feed motor 655 are motors capable of maintaining an angle, such as a geared motor, and the liquid receiving sheet tension motor 652 rotates in the direction opposite to the feeding direction, and the liquid receiving sheet feed motor. The 655 is rotated in the winding direction to give tension (tension) to the liquid receiving sheet 63 fed out on the FL support plate 64. Note that the liquid receiving sheet 63 on the FL support plate 64 can be moved when the liquid receiving sheet 63 fed on the FL support plate 64 can be given sufficient tension by the liquid receiving sheet supply device 65. Therefore, the FL negative pressure communication hole 640 of the FL support plate 64 described above is not necessary.

Here, pre-drawing flushing and regular flushing will be described. The pre-drawing flushing unit 61 moves so as to follow the work set plate 24 located in the replacement area SA from the outer end side (standby position) in the forward movement direction of the moving area TA before moving to the drawing process. The pre-drawing flushing unit 61 moves forward in synchronism with the movement of the work set plate 24, and the functional liquid discharged from the all-function liquid droplet discharge head 13 immediately before the work W faces each head unit 42. Receive drops (flushing before drawing). That is, pre-drawing flushing is performed from the plurality of functional liquid droplet ejection heads 13 that move relatively for drawing, and that reaches the position immediately above the pre-drawing flushing unit 61. Thereby, the ejection of the functional liquid droplet ejection head 13 immediately before the drawing can be stabilized, and the drawing process with high accuracy can be performed on the workpiece W.
The regular flushing unit 62 stands by further outside the standby position of the pre-drawing flushing unit 61 during the drawing process, and moves to the drawing area DA during the non-drawing process, and the all-function liquid droplet ejection heads of each head unit 42. 13 receives functional droplets ejected from 13 (periodic flushing). Thereby, clogging of the discharge nozzle 57 of the functional liquid droplet discharge head 13 during the non-drawing process can be prevented.
Note that the pre-drawing flushing and the regular flushing may be received by one unit.

  Subsequently, the discharge inspection unit 18 will be described in detail with reference to FIGS. 1 to 3 and FIGS. 16 to 18. The discharge inspection unit 18 has a liquid receiving movement unit 71 that is slidably moved in the X-axis direction, and a function that has landed on the liquid receiving movement unit 71, when the functional liquid droplets that have been inspected and discharged from each functional liquid droplet discharge head 13 land. An inspection measuring unit 81 that recognizes an image of the landing dot D of the droplet and inspects the ejection performance and measures the amount of the ejected functional liquid.

  The liquid receiving moving unit 71 has the same configuration as the flushing unit 15 shown in FIGS. 16 and 17, an inspection sheet 72 wound in a roll shape for receiving inspection discharge from the functional liquid droplet discharge head 13, and an inspection An inspection support plate 73 that horizontally supports the sheet 72 from below, an inspection sheet supply device 74 that feeds the inspection sheet 72 along with the inspection support plate 73 and winds it from the inspection support plate 73, and a pair of X-axis guide rails And a pair of inspection sliders 75 that slidably move on 250. The inspection support plate 73 (the inspection sheet 72 and the inspection sheet supply device 74) moves slidably in the X-axis direction by the X-axis linear motor via each inspection slider 75.

Similar to the FL support plate 64 described above, the inspection support plate 73 is composed of a plurality of inspection small hole groups 732 formed by arranging a plurality of inspection small holes 731 in a staggered manner. A negative pressure communication hole 730 is formed.
As with the liquid receiving sheet supply device 65 described above, the inspection sheet supply device 74 includes an inspection sheet supply reel 740, an inspection sheet supply motor 741, an inspection sheet tension motor 742, an inspection sheet take-up reel 743, and an inspection sheet take-up motor. 744 and an inspection sheet feed motor 745. The configurations, operations, and effects of the inspection negative pressure communication holes 730 and the inspection sheet supply device 74 are the same as those of the FL negative pressure communication holes 640 and the liquid receiving sheet supply device 65 described above, and thus description thereof is omitted. .

  The inspection measurement unit 81 is bridged across the X-axis table 2 at the outer end in the forward movement direction of the moving area TA, and is suspended from the bridge frame 82 so as to be movable. Two imaging units 83 for recognizing landing dots D ejected on 72, an imaging moving mechanism 84 for moving each imaging unit 83 in the Y-axis direction, and the main controller 12 are incorporated in each imaging unit 83. The evaluation calculation means (not shown) for evaluating and calculating the ejection performance and the functional liquid amount of the functional liquid droplet ejection head 13 from the recognition result of FIG.

Each imaging unit 83 includes a discharge inspection camera 830 that performs an image for inspecting the presence / absence of discharge from the functional liquid droplet discharge head 13 and a flight bend (landing position), and a function for measuring the amount of discharged functional liquid. A discharge amount measuring camera 831 for performing imaging and a laser length measuring device 832 used for automatic focal length adjustment of the discharge amount measuring camera 831 are configured.
The discharge inspection camera 830 incorporates a coaxial epi-illuminator (not shown), and images the landing dot D under the coaxial epi-illumination. On the other hand, the discharge inspection camera 830 is provided with a switch-type ring illuminator 833 (which can be switched to three colors), and landed under illumination switched to an appropriate color according to the type (color type) of the functional liquid. The dot D is imaged.

  The imaging moving mechanism 84 includes an imaging slider 86 that moves each imaging unit 83 so as to be slidable in the Y-axis direction, and an imaging linear motor (not shown). In this way, by moving each imaging unit 83 by the imaging movement mechanism 84, it is possible to shorten the time in the discharge inspection measurement with the minimum number of cameras 830 and 831 arranged.

  Here, inspection and measurement in the discharge inspection unit 18 will be described. The liquid receiving moving unit 71 stands by further outside the standby position of the regular flushing unit 62 during the drawing process on the workpiece W, and moves to the drawing area DA during the non-drawing process, and moves the head onto the inspection sheet 72. A functional droplet is inspected and discharged from the all-function droplet discharge head 13 of the unit 42. After the test discharge, the liquid receiving moving unit 71 moves to a position facing the imaging unit 83 of the test measurement unit 81 and scans the two imaging units 83 in the Y-axis direction, thereby imaging the landing dot D. Based on this imaging result, the presence / absence of ejection from the functional liquid droplet ejection head 13 and the flight curve are inspected by the evaluation calculation means incorporated in the main controller 12, and the ejection amount is calculated from the diameter of the landing dot D of the functional liquid droplet. Calculate (measure) (weight).

Specifically, as shown in FIG. 19, when the captured landing dot D and the ejection reference mark M held as data by the evaluation calculation means match (see FIG. 19A), the functional liquid It is determined that the discharge nozzle 57 that discharged the droplets is discharging normally. On the other hand, when the landing dot D deviates from the ejection reference mark M (see FIG. 19B), it is determined that the flight is bent, and when the landing dot D is small or not circular (FIG. 19C). Reference) is judged as defective ejection. Further, when there is no landing dot D, it is determined that there is no ejection. In FIG. 19, the ejection reference mark M is displayed as a circle that is slightly larger than the landing dot D for easy determination.
Further, the evaluation calculation means holds, as data, the relationship between the diameter of the landing dot D and the ejection amount (weight) of the functional droplet, which is experimentally obtained in advance, and measures the diameter of the captured landing dot D. By calculating, the ejection amount of the functional droplet can be calculated.

  Here, a processing procedure from the supply to the drawing of the workpiece W of the droplet discharge device 1 by the main controller 12 of the present embodiment will be described. First, the work W conveyed from the conveyor device 26 is fed to the work set plate 24 by blow air from the feed blow nozzles 341 of the plurality of blow blow chips 34. Then, the blow air is stopped and the working air is supplied to each Bernoulli chip 33 in the replacement area SA, the work W is sucked and set, and alignment in each direction is performed. This alignment position is the home position of the work set plate 24. During the alignment, the working air is supplied to each Bernoulli tip 33 in the moving area TA, and the blowing air is supplied to the floating blow tip 35 in the drawing area DA. The discharge inspection unit 18) is moved back. First, the liquid receiving moving unit 71 faces each head unit 42 and receives the inspection discharge from the all-function liquid droplet discharge head 13. Thereafter, the discharge inspection unit 18 moves forward and faces the inspection / measurement unit 81, and a predetermined inspection / measurement is performed. Instead of the liquid receiving moving unit 71, the regular flushing unit 62 faces each head unit 42 and receives regular flushing from the all-function liquid droplet ejection head 13. The pre-drawing flushing unit 61 is located along the work set plate 24 at the home position. Note that air suction by the air exhaust mechanism 37 is also performed at the same time when compressed air is supplied.

  After completion of the alignment, the periodic flushing unit 62 moves back to the standby position, and the work set plate 24 on which the work W is set moves back and forth in the X-axis direction (main scanning direction) before starting the drawing process. Each level detection device 46 measures the level of each part of the work W in the drawing area DA. The level measurement is preferably automatically performed after the drawing process is performed on the specified number of workpieces W. However, the level measurement may be performed every time the drawing process is performed on the workpiece W, or the level of the droplet discharge device 1 may be reduced. It may be performed only once at the start of operation. In this embodiment, level measurement is performed during reciprocal movement, but level measurement may be performed only in either forward movement or backward movement.

  After the level measurement, both the work set plate 24 and the pre-drawing flushing unit 61 reciprocate in the X-axis direction. When traveling forward, prior to the work W, each pre-drawing flushing unit 61 faces each functional liquid droplet ejection head 13 and undergoes pre-drawing flushing, and then the work W faces and undergoes a predetermined drawing process. When the forward movement is completed, each carriage unit 4 (head unit 42) performs a predetermined movement in the Y-axis direction, and drawing processing is also performed when the carriage moves backward. In the present embodiment, due to the configuration, the pre-drawing flushing unit 61 receives the pre-drawing flushing unit 61 only during the forward movement. Note that the drawing process on the workpiece W may be performed only in one of forward movement and backward movement. Further, the pre-drawing flushing unit 61 may be provided on both sides of the work set plate 24 in the X-axis direction so that pre-drawing flushing is performed prior to the forward and backward drawing processes.

  According to the above configuration, since the workpiece W can be lifted using the pressure-air that is gas-conditioned (temperature adjustment), the temperature of the workpiece W can be kept constant by the pressure-air. Thereby, since deformation (expansion or contraction) of the workpiece W due to a temperature change can be prevented, high-precision processing on the workpiece W can be performed. Moreover, since it is not necessary to achieve air conditioning for the entire X-axis table 2, the chamber CH that accommodates the entire X-axis table 2 can be simplified. Thereby, simplification and size reduction of the whole droplet discharge apparatus 1 can be achieved.

  Next, another droplet discharge apparatus 1 (second embodiment) to which the work movement table of the present invention is applied will be described. In this droplet discharge device 1, the work set plate 24 is omitted, and instead of the connection block 252 of the X-axis moving mechanism 25, three X-axis sliders 251 that move slidably on the X-axis guide rails 250 are used. Each has a suction plate 280 that is mounted and suction sets the work W. The suction plate 280 communicates with the vacuum suction source 370 via a vacuum suction channel system 284 for applying a suction force to the workpiece W. Since other configurations are the same as those of the above-described droplet discharge device 1 (first embodiment), description thereof is omitted, and only configurations different from the first embodiment will be described below.

  As shown in FIGS. 20 and 21, three X-axis sliders 251 are continuously arranged on each X-axis guide rail 250, and a divided suction plate 281 is mounted on each X-axis slider 251. ing. That is, the pair of X-axis guide rails 250 includes six divided suction plates 281 that are slidable in the X-axis direction. Each divided suction plate 281 includes a plurality (9) of vacuum suction grooves 282 for applying a suction force to the workpiece W, and a plurality (9) of individual suction communication channels 283 communicating with each of the vacuum suction grooves 282. , Is composed of.

  The vacuum suction grooves 282 are formed in a track shape that is long in the X-axis direction, and three in the X and Y-axis directions, nine in total, are arranged in a matrix on the upper surface (surface) of each divided suction plate 281. It is installed. Thus, by forming the vacuum suction groove 282 in a track shape, the suction force can be applied uniformly while considering the moving direction of the workpiece W. Each vacuum suction groove 282 corresponds to a specified unit dimension (module) of the work W so that the work W cannot close the plurality of corresponding vacuum suction grooves 282 and does not leak suction air. It is preferable that they are arranged as described above.

  As shown in FIG. 21B, the nine individual suction communication channels 283 are formed toward the Y-axis direction in each divided suction plate 281 and are arranged at equal intervals in the X-axis direction. The downstream end is opened on the outer side surface of the divided suction plate 281. Each individual suction communication channel 283 is bifurcated on the upstream side, and the downstream end of each branched channel is communicated with each vacuum suction groove 282.

  The vacuum suction channel system 284 divides a plurality of individual suction channels 285 connected to each individual suction communication channel 283 having an upstream end opened on the outer side surface of each divided suction plate 281 and a plurality of individual suction channels 285. It is composed of six individual manifolds 286 that merge with each suction plate 281, and a plurality of individual exhaust passages 287 that connect each individual manifold 286 and the exhaust side manifold 373 of the air exhaust mechanism 37. That is, the suction plate 280 communicates with the vacuum suction source 370 of the air exhaust mechanism 37 via the vacuum suction flow path system 284 so that suction force can be applied to the workpiece W on the suction plate 280. .

  The individual suction flow paths 285 are composed of 9 pieces for each divided suction plate 281, for a total of 54, and the upstream ends thereof are connected to the individual suction communication flow paths 283, respectively, and the downstream ends thereof are divided and sucked. Nine of each plate 281 is connected to one individual manifold 286. Further, an individual regulator 25a that adjusts the suction pressure and an individual solenoid valve 25b that opens and closes each individual suction channel 285 are provided in the individual suction channel 285 from the vicinity and downstream of the individual manifold 286. ing. By controlling the opening / closing of each individual solenoid valve 25b, vacuum suction can be performed from any vacuum suction groove 282, so that the work W can be moved without causing air leakage at any position on the suction plate 280. Adsorption can be set. Thereby, the degree of freedom of the setting position of the workpiece W is increased, and the workpiece W can be effectively sucked and set with a minimum suction force. In the present embodiment, the work W is sucked and set by the vacuum suction source 370 of the air exhaust mechanism 37 that sucks operating air or the like, but a dedicated vacuum suction means may be provided separately. The opening and closing of the individual solenoid valve 25b may be automatic or manual.

  Here, alignment in the θ direction and the X axis direction of the workpiece W set on each divided suction plate 281 will be described. In the second embodiment, the pair of positioning pins P are provided in the transfer area SA of the table base 22 so as to be able to protrude and retract along the Y-axis direction. Feeding material conveyance is stopped by the positioning pins P, and both ends of the workpiece W in the Y-axis direction are supported in a pre-aligned state on the pair of suction plates 280. Thereafter, the pair of positioning pins P are buried, and the individual suction communication flow path 283 connected to the innermost vacuum suction groove 282 of the pair of divided suction plates 281 located at the center of the pair of X-axis guide rails 250 is opened. The workpiece W is temporarily sucked and set, and the correction amount in each direction is calculated by the workpiece alignment device 5 described above. The alignment in the θ direction is performed by driving the X-axis linear motors of the X-axis sliders 251 on both sides in opposite directions according to the correction amount. Accordingly, the workpiece W rotates with respect to the central axis perpendicular to the horizontal plane, and the correction amount (movement distance) of the shift is distributed to both sides, so that alignment can be performed with a minimum movement distance. In addition, since it is only temporarily set by a part of the vacuum suction grooves 282, the alignment of the workpiece W in the θ direction can be performed without difficulty. Further, correction in the X-axis direction is also performed by moving the X-axis linear motors on both sides in parallel. By performing alignment in this way, a highly accurate drawing process can be performed on the workpiece W. Although the moving distance becomes large, only the moving means on one side of the workpiece W may be driven to perform the alignment in the θ direction.

  According to the above configuration, similarly to the first embodiment, the deformation of the workpiece W can be prevented using the air-conditioned pressure air, and the workpiece W can be levitated and moved while directly acting an adsorption force. . Thereby, deformation (expansion or contraction) of the workpiece W due to temperature change can be prevented, high-precision processing can be performed on the workpiece W, and the entire droplet discharge device 1 can be downsized.

1 is an external perspective view of a droplet discharge device (mainly an X-axis table) in a first embodiment. 1 is a plan view of a droplet discharge device according to a first embodiment. 1 is a side view of a droplet discharge device according to a first embodiment. 2 is a plan view schematically showing a head unit equipped with a functional liquid droplet ejection head. FIG. It is a front and back external perspective view of a functional liquid droplet ejection head. FIG. 2 is a plan view (a), a side view (b), and a perspective view (c) of a level detection device schematically showing a head plate on which a functional liquid droplet ejection head and a level detection device are mounted. It is the top view and sectional drawing of a workpiece alignment apparatus. It is a systematic diagram showing the air levitation mechanism built in the upper surface of a table base typically. It is a perspective view of the Bernoulli chip, the conveyance blow chip, and the communication channel in a part of the table base replacement area. It is the top view and sectional drawing of a Bernoulli chip | tip, a conveyance blow chip | tip, and a communication flow path in a part of replacement area | region of a table base. It is a perspective view of the Bernoulli tip, the floating blow tip, and the communication channel in a part of the drawing area of the table base. It is the top view and sectional drawing of a Bernoulli chip | tip, a floating blow chip | tip, and a communication flow path in a part of drawing area of a table base. It is the top view (a) and sectional drawing (b) of Bernoulli chip. It is a top view of conveyance blow tip (a) and floating blow tip (b), and these sectional views (c). It is a three-view figure of a work set plate and an X-axis moving mechanism. It is an external appearance perspective view of the liquid receiving moving part of a flushing unit and a discharge test | inspection unit. It is a three-view figure of the liquid receiving moving part of a flushing unit and a discharge test | inspection unit. It is a perspective view of the test | inspection measurement part of a discharge test | inspection unit. It is explanatory drawing which shows the imaging result of a landing dot. It is the perspective view of the X-axis moving mechanism in 2nd Embodiment, and the system diagram which represented typically the vacuum suction flow path system. It is the three-plane figure (a) of the X-axis movement mechanism in 2nd Embodiment, and the elements on larger scale (b) of a division | segmentation adsorption | suction plate.

Explanation of symbols

  1: droplet ejection device, 2: X-axis table, 12: main controller, 13: functional droplet ejection head, 22: table base, 23: air levitation mechanism, 25: X-axis movement mechanism, 25a: individual regulator, 25b : Individual solenoid valve, 26: Conveyor device, 31: Escape groove, 32: Suction hole, 33: Bernoulli tip, 34: Transport blow tip, 35: Floating blow tip, 36: Air supply mechanism, 36a: Electropneumatic regulator, 36b : Supply side solenoid valve, 46: level detection device, 57: discharge nozzle, 250: X-axis guide rail, 251: X-axis slider, 280: suction plate, 281: divided suction plate, 282: vacuum suction groove, 283: individual Suction communication flow path, 285: Individual suction flow path, 341: Feeding material blow nozzle, 343: Material removal blow nozzle, 3 2: floating blow nozzle, 360: air source, 362: air temperature controller, 370: vacuum suction source, DA: drawing area, SA: Nogae area, W: workpiece

Claims (11)

Table base,
A gas levitation means having a plurality of Bernoulli chucks that are distributed upward on the upper surface of the table base and that float the work on the table base;
Working gas supply means for supplying working gas for levitation to the gas levitation means;
Moving means for moving the work that has been gas-floated in a horizontal plane;
A work set plate that is disposed above the plurality of Bernoulli chucks with the clearance between the plurality of Bernoulli chucks and on which the work is set ; and
The workpiece moving table , wherein a plurality of negative pressure communication holes for applying negative pressures of the plurality of Bernoulli chucks to the workpiece are formed in the workpiece set plate . The gas-conditioning means which is provided in the gas supply flow path between the gas levitation means and the working gas supply means, and adjusts the working gas to a desired gas harmony state. The work movement table according to 1. The work movement table according to claim 2 , wherein the gas conditioning unit includes a temperature adjusting unit that adjusts a temperature of the working gas. The moving means has an X-axis moving mechanism for moving the work in the X-axis direction via the work set plate,
The X-axis moving mechanism includes a pair of guide rails disposed on both sides along the X-axis direction of the table base,
4. The workpiece moving table according to claim 1 , comprising a pair of linear motors having a pair of sliders that slidably move on the respective guide rails. The work movement table according to any one of claims 1 to 4 , wherein an escape groove is formed on the upper surface of the table base for escaping the working gas flowing out from each Bernoulli chuck. The work movement table according to claim 5 , wherein the escape groove is disposed so as to surround each Bernoulli chuck. The work moving table according to claim 5 or 6 , wherein a vacuum suction means communicates with the escape groove. The work movement table according to claim 1 , wherein the plurality of Bernoulli chucks are distributed in a staggered pattern on the upper surface of the table base. The intermediate part of the movement direction of the work in the table base is a processing area for processing the work,
9. The apparatus according to claim 1 , further comprising a plurality of floating blow nozzles that are provided in place of the plurality of Bernoulli chucks in the processing area and float the gas of the work set plate . Work movement table. A plurality of flow rate adjusting means interposed in a supply flow path connecting the plurality of floating blow nozzles and the working gas supply means, and individually adjusting the amount of gas supplied to the plurality of floating blow nozzles;
A controller for controlling the plurality of flow rate adjusting means;
A detecting means disposed in the processing area and detecting a height level of each part of the workpiece in the processing area;
10. The controller according to claim 9 , wherein the controller controls the plurality of flow rate adjusting means so that the work on the work set plate in the processing area becomes flat based on a detection result of the detection means. The workpiece movement table described. The work movement table according to any one of claims 1 to 10 ,
An ink jet type functional liquid droplet ejection head facing the workpiece moving table from above;
A drawing process is performed by selectively discharging functional liquid droplets from a plurality of discharge nozzles of the functional liquid droplet discharge head to the work moving in the main scanning direction which is the X-axis direction by the work movement table. A droplet discharge device.

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