JP5377899B2 - Paste applicator - Google Patents

Paste applicator Download PDF

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JP5377899B2
JP5377899B2 JP2008183377A JP2008183377A JP5377899B2 JP 5377899 B2 JP5377899 B2 JP 5377899B2 JP 2008183377 A JP2008183377 A JP 2008183377A JP 2008183377 A JP2008183377 A JP 2008183377A JP 5377899 B2 JP5377899 B2 JP 5377899B2
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earthquake
substrate
paste
nozzle
information
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JP2010022883A (en
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仁志 眞鍋
宏寿 角田
健 渡辺
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Hitachi Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a paste applicator, wherein, on the occurrence of earthquake, the damage of an apparatus and a substrate is prevented by taking earthquake occurrence information into a control part in the apparatus and by cutting power source after setting the apparatus in a prescribed state when the intensity of earthquake is equal to or above a prescribed degree, and the readjustment time is shortened by recording the state immediately before the stoppage. <P>SOLUTION: In the paste applicator for applying a prescribed paste pattern on the substrate by relatively moving the substrate 9 and a nozzle while discharging a prescribed quantity of paste from the nozzle, the control part 18 includes a determination part which fetches the earthquake information from the outside to determine the magnitude. When the control part 18 receives the information of the occurrence of the earthquake while the paste is applied, it determines the magnitude of the earthquake. In the case that the magnitude of the earthquake is determined higher than the prescribed level, the applicator stops coating, records the coating state immediately before the stoppage, separates a coating head from the substrate surface with a prescribed distance to wait, and then shut the power off. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は液晶パネル等の薄型ディスプレイを製造する際に、2枚の基板を貼り合せるため一方の基板に接着剤(シール剤)を塗布するためのペースト塗布機に係り、特に、外部振動による装置の破損を防止することを考慮したペースト塗布機に関する。   The present invention relates to a paste applicator for applying an adhesive (sealant) to one substrate for bonding two substrates when manufacturing a thin display such as a liquid crystal panel. The present invention relates to a paste applicator considering the prevention of breakage.

液晶表示パネルの製造には、透明電極や薄膜トランジスタアレイを設けた2枚のガラス基板を、数μm程度の極めて接近した間隔をもって基板の周縁部に設けた接着剤(以下、シール剤ともいう)で貼り合せ(以後、貼り合せ後の基板をセルと呼ぶ)、それによって形成される空間に液晶を封止する工程がある。   For the production of a liquid crystal display panel, an adhesive (hereinafter also referred to as a sealing agent) in which two glass substrates provided with a transparent electrode and a thin film transistor array are provided at the peripheral edge of the substrate with a very close distance of about several μm is used. There is a step of bonding (hereinafter, the substrate after bonding is referred to as a cell) and sealing a liquid crystal in a space formed thereby.

この液晶の封止には、注入口を設けないようにシール剤をクローズしたパターンに描画した一方の基板上に液晶を滴下しておいて、真空チャンバ内において他方の基板を一方の基板上に配置し、上下の基板を接近させて貼り合せる方法などがある。   To seal the liquid crystal, liquid crystal is dropped on one substrate drawn in a pattern in which a sealing agent is closed so as not to provide an injection port, and the other substrate is placed on one substrate in a vacuum chamber. There is a method of arranging and bonding the upper and lower substrates close to each other.

ところで、このシール剤をクローズしたパターンに描画するための装置として特許文献1に示すような装置がある。この特許文献1では、ペーストを塗布する際に各移動部材が動作することによって発生する振動を抑制する構造としてある。   By the way, as an apparatus for drawing this sealant in a closed pattern, there is an apparatus as shown in Patent Document 1. In this patent document 1, it has a structure which suppresses the vibration which generate | occur | produces when each moving member operate | moves when apply | coating a paste.

また、地震情報に基づいて装置の運転制御するものとして、エレベータの運転制御するものが数多く提案されている。エレベータ装置以外で地震情報に基づいて制御するものとして、特許文献2には、地震情報に基づいてボイラの燃焼停止や運転続行を行うものが開示されている。   In addition, many devices for controlling the operation of elevators have been proposed as devices for controlling the operation of devices based on earthquake information. As what controls based on earthquake information other than an elevator apparatus, patent document 2 is disclosing what performs the combustion stop of a boiler or a continuation of operation based on earthquake information.

特開2004−008871号公報JP 2004-008871 A 特開2007−017149号公報JP 2007-0117149 A

上記特許文献1の従来技術では、外部振動、特に地震発生時の対応としては、オペレータの停止指示により装置を停止することで対応していた。そのため、地震発生後の対応となり、装置や、作業中の基板を損傷するという問題があった。また、装置を再起動する場合は、装置を再調整する必要があり、再調整のために、時間を要するという問題も有る。又、塗布作業中であった場合には、中断時の塗布状態が正確に把握されておらず、作業中の基板は廃棄せざるをえない状態であった。   In the prior art of the above-mentioned Patent Document 1, the response to external vibrations, particularly when an earthquake occurs, has been dealt with by stopping the apparatus according to an operator stop instruction. For this reason, there is a problem that it becomes a countermeasure after the occurrence of the earthquake and damages the apparatus and the substrate being worked on. In addition, when the device is restarted, it is necessary to readjust the device, and there is a problem that it takes time for readjustment. Further, when the coating operation was being performed, the coating state at the time of the interruption was not accurately grasped, and the substrate being worked on had to be discarded.

また特許文献2では、地震の大きさに応じて運転続行か、運転停止かを判断し、運転停止する場合は、ボイラの燃焼を停止することで対応するものである。しかし、本装置のように、生産設備においては、生産中の物品の損傷防止や、製造装置自体の損傷を抑制する必要がある。   Further, in Patent Document 2, it is determined whether the operation is continued or stopped according to the magnitude of the earthquake, and when the operation is stopped, the combustion of the boiler is stopped. However, like this apparatus, in production facilities, it is necessary to prevent damage to articles being produced and to prevent damage to the manufacturing apparatus itself.

そこで、本発明の目的は、地震発生時に、地震発生情報を装置内の制御部に取り込み、所定以上の震度の地震である場合、装置を所定の状態にした後運転を中断することで、装置及び基板の破損を防止し、停止直前の状態を記録しておくことで、再調整時間を短縮したペースト塗布機を提供することにある。 Therefore, the object of the present invention is to capture the earthquake occurrence information into the control unit in the apparatus when an earthquake occurs, and in the case of an earthquake having a seismic intensity of a predetermined level or higher , interrupt the operation after setting the apparatus to a predetermined state. Another object of the present invention is to provide a paste applicator that prevents the breakage of the substrate and records the state immediately before the stop, thereby shortening the readjustment time.

上記目的を達成するため、本発明では、ノズルから所定量のペーストを吐出しながら基板とノズルを相対移動させて、基板上に所定のペーストパターンを塗布するペースト塗布機において、制御部に外部から地震情報を取り込み、その大きさを判別する判別部を設け、ペーストを塗布している時に、制御部が地震発生の情報を受信すると、その地震の大きさを判別し、所定の大きさ以上の地震であると判断した場合に、塗布動作中であれば、塗布を中断すると共に、中断前の塗布状態を記憶部に記録し、塗布ヘッドのノズルを基板面から所定距離、離間して退避させた後に運転を中断し、塗布動作中でなければ、基板搭載又は搬出中であるか否かを判断し、基板搭載又は基板搬出動作中であればロボットハンドを装置との干渉がなくなるまで退避させ、基板とノズルを接触しないようにしたものである。 In order to achieve the above object, in the present invention, in a paste applicator for applying a predetermined paste pattern on a substrate by moving the substrate and the nozzle relative to each other while discharging a predetermined amount of paste from the nozzle, the controller is externally connected. When a control unit receives information on the occurrence of an earthquake while applying paste and applying a paste, it will determine the size of the earthquake and capture the earthquake information. If it is determined that the earthquake, if the coating operation, the interrupting application records the coating state before the suspension in the storage unit, the predetermined distance of the nozzle of the coating head from the substrate surface, are retracted apart interrupting the operation after the, if not in the coating operation, it is determined whether the in board mounted in or out, until the interference between the device robot hand if the substrate mounting or substrate unloading operation is eliminated By removing, in which to avoid contact of the substrate and the nozzle.

また、地震終了後に、先に記録した情報に基づいて、中断時の状態から塗布作業を継続することにより、作業復旧時間を大幅に短縮することができる。   In addition, after the earthquake ends, based on the previously recorded information, the work recovery time can be greatly shortened by continuing the application work from the state of interruption.

大きな地震が発生しても、装置及び基板の損傷を防止し、かつ、塗布中断時の状態を記録しておくことで、地震終了後の復旧時間を大幅に短縮することができる。   Even if a large earthquake occurs, damage to the apparatus and the substrate can be prevented, and the state at the time of application interruption can be recorded, so that the recovery time after the earthquake can be greatly shortened.

図1は本発明によるディスペンサ装置の一実施例を示す斜視図である。   FIG. 1 is a perspective view showing an embodiment of a dispenser device according to the present invention.

図1において、架台1の面上には、X軸方向への移動ガイドを備えたX軸移動テーブル3が設けられている。このX軸移動テーブル3に直交するように、Y軸方向への移動ガイドを備えたY軸移動テーブル5が設けてある。更に、X軸移動テーブル3上には、Y軸移動テーブル5をX軸方向に移動させるためのX軸サーボモータ4とボールネジが設けられている。また、Y軸移動テーブル5上にはθ軸移動テーブル8が設けてあり、Y軸移動テーブルにθ軸移動テーブル8をY軸方向に移動させるためのY軸サーボモータ6とボールネジが設けてある。θ軸移動テーブル8上には基板保持機構を備えた基板保持テーブル7が設けてある。θ軸移動テーブル8には基板保持テーブル7をθ軸方向に回転させるためのθ軸サーボモータ(図示せず)が設けてある。以後X軸移動テーブルY軸移動テーブル、θ軸移動テーブル全体をXYθテーブルと称する。ここで、基板保持機構には、ガラス基板9を負圧により吸引し吸着させる吸引吸着機構を用いている。   In FIG. 1, an X-axis movement table 3 having a movement guide in the X-axis direction is provided on the surface of the gantry 1. A Y-axis movement table 5 having a movement guide in the Y-axis direction is provided so as to be orthogonal to the X-axis movement table 3. Further, an X-axis servo motor 4 and a ball screw for moving the Y-axis movement table 5 in the X-axis direction are provided on the X-axis movement table 3. Further, a θ-axis moving table 8 is provided on the Y-axis moving table 5, and a Y-axis servo motor 6 and a ball screw for moving the θ-axis moving table 8 in the Y-axis direction are provided on the Y-axis moving table. . A substrate holding table 7 having a substrate holding mechanism is provided on the θ-axis moving table 8. The θ-axis moving table 8 is provided with a θ-axis servo motor (not shown) for rotating the substrate holding table 7 in the θ-axis direction. Hereinafter, the entire X-axis movement table, Y-axis movement table, and θ-axis movement table are referred to as an XYθ table. Here, as the substrate holding mechanism, a suction adsorption mechanism that sucks and adsorbs the glass substrate 9 with a negative pressure is used.

また、架台1上にはZ軸テーブル支持架台2が設けてある。Z軸テーブル支持架台2には、Z軸移動テーブル支持ブラケット10が設けられ、このZ軸移動テーブル支持ブラケット10に、Z軸方向の移動ガイドを備えたZ軸移動テーブル11が固定されている。Z軸移動テーブル11上には距離計16やペースト収納筒(シリンジ)13等を取り付けた支持台(可動部)22が設けられ、Z軸移動テーブル11にはこの支持台22をZ軸方向に移動させるためのZ軸サーボモータ12やボールネジが設けてある。また、ペースト収納筒13は、支持台22に着脱自在に取り付けられている。ペースト収納筒13の先端側には、ペースト収納筒13から延伸された吐出ノズルを支持するノズル支持具14が設けてある。   A Z-axis table support frame 2 is provided on the frame 1. A Z-axis movement table support bracket 10 is provided on the Z-axis table support frame 2, and a Z-axis movement table 11 having a Z-axis direction movement guide is fixed to the Z-axis movement table support bracket 10. A support base (movable part) 22 to which a distance meter 16, a paste storage cylinder (syringe) 13 and the like are attached is provided on the Z-axis movement table 11, and the support base 22 is attached to the Z-axis movement table 11 in the Z-axis direction. A Z-axis servomotor 12 and a ball screw are provided for movement. The paste storage cylinder 13 is detachably attached to the support base 22. A nozzle support 14 for supporting the discharge nozzle extended from the paste storage tube 13 is provided on the distal end side of the paste storage tube 13.

また、基板の位置合せやペーストパターンの形状認識などを行なうための照明の可能な光源を有する鏡筒を備えた画像認識カメラ15が、支持台22に基板に対向するように設けられている。   Further, an image recognition camera 15 including a lens barrel having a light source capable of illumination for performing substrate alignment, paste pattern shape recognition, and the like is provided on the support base 22 so as to face the substrate.

更に、架台1の内部には、各サーボモータ4,6,8,12などを制御する主制御部17が設けられている。この主制御部17は、ケーブル21を介して副制御部18に接続されている。副制御部18にはモニタ19と、キーボード20と、ハードディスク18aやフロッピディスク18bを備えた外部記憶装置とが接続されている。キーボード20からは、かかる主制御部17での各種処理のためのデータが入力される。また、画像認識カメラ15で捉えた画像や主制御部17での処理状況がモニタ19で表示される。更に、キーボード20から入力されたデータなどは、外部記憶装置であるハードディスク18aやフロッピディスク18bなどの記憶媒体に記憶保管される。   Furthermore, a main controller 17 for controlling the servo motors 4, 6, 8, 12 and the like is provided inside the gantry 1. The main control unit 17 is connected to the sub control unit 18 via the cable 21. Connected to the sub-control unit 18 are a monitor 19, a keyboard 20, and an external storage device including a hard disk 18a and a floppy disk 18b. From the keyboard 20, data for various processes in the main control unit 17 is input. Further, the image captured by the image recognition camera 15 and the processing status in the main control unit 17 are displayed on the monitor 19. Further, data input from the keyboard 20 is stored and stored in a storage medium such as a hard disk 18a or a floppy disk 18b which is an external storage device.

さらに、副制御部18には外部の情報装置との間で情報のやり取りを行うインターフェースが設けてあり、地震情報を取り込めるようになっている。なお、本実施例では制御部を主制御部と副制御部に分割した構成で説明したが、1つの制御部にまとめた構成としてもよい。   Further, the sub-control unit 18 is provided with an interface for exchanging information with an external information device so that earthquake information can be taken in. In this embodiment, the control unit is divided into the main control unit and the sub control unit. However, the control unit may be combined into one control unit.

次に、図1の装置の代表的な動作を説明する。まず塗布対象の基板9が基板保持テーブル7上に搭載され基板保持機構により吸着保持される。次に、XYθテーブルを駆動して、基板9に設けた位置合せマークを画像認識カメラ15が撮像できる位置に移動してマークを撮像する。通常位置合せマークは基板の4箇所に設けてあり、順次XYθテーブルを移動して撮像する。このときXYθテーブルの移動量を記憶しておき、撮像結果とXYθテーブルの移動量から基準位置を求めて、実際の塗布時の位置座標を決定する。塗布開始時の初期位置に基板を移動し、そこで、塗布ヘッドのノズルの高さを求める。ノズルと基板の間隔は待機状態では、基板にノズルが接触しない十分に高い位置に設定されている。なお、塗布時のノズルと基板間距離は距離計16を用いて測定する。   Next, typical operations of the apparatus shown in FIG. 1 will be described. First, the substrate 9 to be coated is mounted on the substrate holding table 7 and sucked and held by the substrate holding mechanism. Next, the XYθ table is driven, and the alignment mark provided on the substrate 9 is moved to a position where the image recognition camera 15 can image, and the mark is imaged. Normal alignment marks are provided at four locations on the substrate, and images are taken by sequentially moving the XYθ table. At this time, the movement amount of the XYθ table is stored, the reference position is obtained from the imaging result and the movement amount of the XYθ table, and the position coordinates at the time of actual application are determined. The substrate is moved to the initial position at the start of coating, and the height of the nozzle of the coating head is determined there. The interval between the nozzle and the substrate is set at a sufficiently high position where the nozzle does not contact the substrate in the standby state. The distance between the nozzle and the substrate at the time of application is measured using a distance meter 16.

ペーストを塗布しているときは、ノズルと基板間距離は一般にペースト高さに略等しいか、若干高い程度に設定される。シール剤の高さによるが、例えば40μmから80μm程度に設定される。ノズルと基板間の距離の設定が終了すると、ノズルの吐出圧が予め設定された圧になるよう調整される。ノズルの吐出圧やノズルと基板との相対速度は使用するペーストの粘度等を考慮して予め設定される。又、塗布するパターンも記憶装置に予め設定され記憶されている。塗布圧等の設定値に従って所定の圧になると塗布を開始する。そして決められたパターンの塗布が終了すると、ノズルは初期の待機状態の高さ位置まで移動し、基板がテーブルから次の工程に搬出される。以上は、塗布が正常に行われる場合の動作である。本発明では塗布を実行しているときに外部振動(特に地震)を受けた場合に、装置や基板の破損を防止するためのものである。そのため、制御部が装置外部から地震情報を受取り、震度が所定の震度より大きな場合に、装置を停止する指令を出すようにしている。   When applying the paste, the distance between the nozzle and the substrate is generally set to be approximately equal to or slightly higher than the paste height. Depending on the height of the sealant, for example, it is set to about 40 μm to 80 μm. When the setting of the distance between the nozzle and the substrate is completed, the discharge pressure of the nozzle is adjusted to a preset pressure. The discharge pressure of the nozzle and the relative speed between the nozzle and the substrate are set in advance in consideration of the viscosity of the paste to be used. The pattern to be applied is also preset and stored in the storage device. When a predetermined pressure is reached according to a set value such as a coating pressure, coating is started. When the application of the determined pattern is completed, the nozzle moves to the initial height position in the standby state, and the substrate is unloaded from the table to the next process. The above is the operation when the application is performed normally. In the present invention, when an external vibration (especially an earthquake) is applied during application, the apparatus and the substrate are prevented from being damaged. For this reason, the control unit receives earthquake information from the outside of the apparatus, and issues a command to stop the apparatus when the seismic intensity is greater than a predetermined seismic intensity.

図2にペースト塗布機の情報伝達系統を示す。   FIG. 2 shows an information transmission system of the paste applicator.

主制御部17では各軸の駆動制御部を備えている。すなわち、X軸移動テーブルの駆動制御部1a、Y軸移動テーブルの駆動制御部1b、θ軸移動テーブルの駆動制御部1c、Z軸移動テーブルの駆動部1d等を備えている。さらに図示していないがペースト収納筒13に供給する吐出圧の制御や、画像認識カメラ15が撮像した画像を処理して塗布ノズルの位置等を決める位置制御や、距離計16の計測結果からZテーブルの高さ制御等を実行する。この主制御部17の制御状況は副制御部18のモニタ19に表示される。また、副制御部18は外部の情報処理装置25から地震情報等を取り込めるようになっている。情報処理装置25は気象庁等にインターネットにて接続されており、常時地震情報を取り込めるようになっている。   The main control unit 17 includes a drive control unit for each axis. That is, it includes an X-axis movement table drive control unit 1a, a Y-axis movement table drive control unit 1b, a θ-axis movement table drive control unit 1c, a Z-axis movement table drive unit 1d, and the like. Further, although not shown in the drawing, the control of the discharge pressure supplied to the paste storage cylinder 13, the position control for determining the position of the application nozzle by processing the image captured by the image recognition camera 15, and the measurement result of the distance meter 16, Z Execute table height control. The control status of the main control unit 17 is displayed on the monitor 19 of the sub control unit 18. The sub-control unit 18 can take in earthquake information and the like from the external information processing device 25. The information processing apparatus 25 is connected to the Japan Meteorological Agency or the like via the Internet, and can always take in earthquake information.

上記図2の構成で、地震の発生情報を受けた場合にペースト塗布機の動作を図3のフローチャートを用いて説明する。   The operation of the paste applicator will be described with reference to the flowchart of FIG.

情報処理装置25が遠隔地で地震発生の情報を受信すると副制御部18に地震情報が入力される(ステップ110)。副制御部18では地震の大きさを判別する判別部が設けてある。この判別部で、塗布を中断する大きさの地震であると判断されると、装置の状態が調べられる。すなわち、副制御部18にて装置が待機中か否かを判断する(ステップ120)。待機中であれば塗布ヘッドは退避状態であるので地震終了までその状態を維持する(ステップ180)。待機中でなければ、塗布動作中か否かを判断する(ステップ130)。塗布動作中であれば位置情報などの塗布情報の収集と、収集した塗布情報を記憶手段に退避(一時記憶)させる(ステップ140)。塗布情報の退避が完了すると塗布ヘッドを退避動作させる(ステップ170)。ステップ130で塗布動作中でなければ、基板搭載/搬出中であるか否かを判断する(ステップ150)。基板搭載又は基板搬出動作中であれば、ロボットハンド等を装置との干渉がなくなるまで退避させる。基板搭載又は基板搬出処理中では、塗布ヘッド等はテーブル面から離れた位置に退避しているのでその状態を保持する。基板搭載又は搬出動作中ではない場合は、塗布ヘッド等の退避動作(ステップ170)へ進む。地震終了後(ステップ180)は、継続運転するか否かを判断する(ステップ190)。継続する場合は、復旧動作(ステップ200)にて動作中断部分からの状態を確認し、動作を中断状態から継続して行う。継続しない場合は運転を停止する(ステップ210)。   When the information processing device 25 receives information on the occurrence of an earthquake at a remote location, the earthquake information is input to the sub-control unit 18 (step 110). The sub-control unit 18 is provided with a determination unit that determines the magnitude of the earthquake. If the discriminating unit determines that the earthquake is large enough to interrupt the application, the state of the apparatus is examined. That is, the sub-control unit 18 determines whether or not the apparatus is on standby (step 120). If it is on standby, the application head is in the retracted state, and the state is maintained until the end of the earthquake (step 180). If not waiting, it is determined whether or not the coating operation is in progress (step 130). If the application operation is being performed, application information such as position information is collected, and the collected application information is saved (temporarily stored) in the storage means (step 140). When the application information evacuation is completed, the application head is retracted (step 170). If the coating operation is not being performed in step 130, it is determined whether the substrate is being loaded / unloaded (step 150). If the substrate is being loaded or unloaded, the robot hand or the like is retracted until there is no interference with the apparatus. During the substrate mounting or substrate unloading process, the coating head and the like are retracted to a position away from the table surface, and the state is maintained. When the substrate mounting or unloading operation is not in progress, the process proceeds to the retracting operation (step 170) of the coating head or the like. After the earthquake is over (step 180), it is determined whether or not to continue the operation (step 190). When continuing, the state from the operation interruption part is confirmed in the recovery operation (step 200), and the operation is continued from the interruption state. If not continued, the operation is stopped (step 210).

以上のように、地震がある程度以上の大きさの場合は、塗布ヘッド等にテーブル面から振動が伝達してきても、テーブルや基板面に接触しない位置に退避させることで、ノズルや基板を損傷させることを防止することができる。また、塗布中断時の状態を記憶装置に記録してあるために、地震終了後に中断時の状態から塗布を再開することができる。   As described above, when the earthquake is larger than a certain level, even if vibration is transmitted from the table surface to the coating head, etc., the nozzle or substrate is damaged by retracting it to a position where it does not contact the table or substrate surface. This can be prevented. Moreover, since the state at the time of application interruption is recorded in the storage device, application can be resumed from the state at the time of interruption after the end of the earthquake.

なお本実施例では、ペースト塗布機としてテーブルを移動しながら塗布ヘッドは水平方向には固定して塗布するものを示しているが、テーブルを固定して、塗布ヘッドを水平方向に移動制御するものにも本発明を適用することが可能である。   In this embodiment, the application head is fixed in the horizontal direction while moving the table as a paste application machine, but the table is fixed and the application head is moved and controlled in the horizontal direction. The present invention can also be applied to.

また、本実施例では地震情報を外部からもらって制御することで説明したが、装置近傍に地震計や振動計を設置しておきその情報を取り込んで制御しても良いことは言うまでもない。   In this embodiment, the earthquake information is controlled by receiving it from the outside, but it goes without saying that a seismometer or a vibration meter may be installed in the vicinity of the apparatus and the information may be taken in and controlled.

本発明の一実施例となるペースト塗布機の斜視図である。It is a perspective view of the paste coating machine which becomes one Example of this invention. 本発明ペースト塗布機の情報系の概略を示した図である。It is the figure which showed the outline of the information system of this invention paste coating device. 本発明における地震発生時の塗布装置の動作フローチャートである。It is an operation | movement flowchart of the coating device at the time of the earthquake occurrence in this invention.

符号の説明Explanation of symbols

1…架台、2…Z軸テーブル支持架台、3…X軸移動テーブル、4…X軸サーボモータ、5…Y軸移動テーブル、10…Z軸移動テーブル支持ブラケット、11…Z軸移動テーブル、12…Z軸サーボモータ、13…ペースト収納筒、14…ノズル支持具、15…画像認識カメラ、16…距離計。   DESCRIPTION OF SYMBOLS 1 ... Base, 2 ... Z-axis table support base, 3 ... X-axis movement table, 4 ... X-axis servo motor, 5 ... Y-axis movement table, 10 ... Z-axis movement table support bracket, 11 ... Z-axis movement table, 12 ... Z-axis servo motor, 13 ... paste container, 14 ... nozzle support, 15 ... image recognition camera, 16 ... distance meter.

Claims (2)

ノズルから所定量のペーストを吐出しながら基板とノズルを相対移動させて、基板上に所定のペーストパターンを塗布するペースト塗布機において、制御部に外部から地震情報を取り込み、その大きさを判別する判別部を設け、ペーストを塗布している時に、制御部が地震発生の情報を受信すると、その地震の大きさを判別し、所定の大きさ以上の地震であると判断した場合に、塗布動作中であれば、塗布を中断すると共に、中断前の塗布状態を記憶部に記録し、塗布ヘッドのノズルを基板面から所定距離、離間して退避させた後に運転を中断し、塗布動作中でなければ、基板搭載又は搬出中であるか否かを判断し、基板搭載又は基板搬出動作中であれば、ロボットハンドを装置との干渉がなくなるまで退避させることを特徴とするペースト塗布機。 In a paste applicator that applies a predetermined paste pattern on the substrate by moving the substrate and the nozzle relative to each other while discharging a predetermined amount of paste from the nozzle, the seismic information is taken into the control unit from the outside, and its size is determined. When the control section receives information about the occurrence of an earthquake while providing a discriminating section and applying paste, it determines the magnitude of the earthquake, and if it is determined that the earthquake is greater than or equal to a predetermined magnitude, the application operation if during, the interrupting application records the coating state before the suspension in the storage unit, the predetermined distance of the nozzle of the coating head from the substrate surface, to interrupt the operation after backing spaced, in the coating operation without words, it is determined whether the in board mounted in or out, if the substrate mounting or substrate unloading operation, pastes, characterized in that retracted until interference between the robot hand device is eliminated Cloth machine. 請求項1に記載のペースト塗布機において、地震終了後、先に記録した中断時の情報を読み出し、塗布ヘッドのノズルを前記中断時の情報に応じて、中断前の状態にして作業を再開することを特徴とするペースト塗布機。   The paste application machine according to claim 1, wherein after the earthquake ends, the previously recorded information at the time of interruption is read, and the nozzle of the application head is set to the state before the interruption according to the information at the time of interruption, and the operation is resumed. A paste applicator characterized by that.
JP2008183377A 2008-07-15 2008-07-15 Paste applicator Expired - Fee Related JP5377899B2 (en)

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