JP5375516B2 - Contact - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a contact with reduced parts count and assembling man-hours. <P>SOLUTION: The contact electrically connects a plurality of objects. The contact includes: tubular front and rear ends with a space therewithin, respectively; a spring formed in a tubular part continuing from the tubular front and rear ends and positioned between the tubular front and rear ends; and a spherical contact part formed integrally with the tubular rear end and having a diameter larger than the outside diameter of the tubular rear end. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a contactor for electrically connecting a plurality of objects to each other. For example, the present invention implements this inspection with inspection points set in advance on an inspection object part of an inspected part. The present invention relates to a contact for electrically connecting an inspection device.

  When the contactor is attached to an inspection jig and used, the inspection jig passes an electric current or an electric signal from the inspection apparatus to a predetermined inspection position via the contactor to the inspection target portion of the inspection object. At the same time, an electrical signal is detected from the inspection target part, thereby detecting electrical characteristics of the inspection target part, performing an operation test, and the like.

  Examples of inspected objects include various substrates such as printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, package boards for semiconductor packages, and film carriers, semiconductor wafers and semiconductors. This corresponds to a semiconductor device such as a chip or a CSP (Chip size package).

  In the case where the object to be inspected is, for example, a substrate, and what is mounted on the substrate is an electrical / electronic component such as a semiconductor circuit such as an IC or a resistor, the inspection target portion formed on the substrate is a wiring or an electrode. In that case, in order to ensure that the wiring of the inspection object can accurately transmit electrical signals to them, the wiring of the printed wiring board, liquid crystal panel, and plasma display panel before mounting electrical and electronic components is formed. The electrical characteristics such as the resistance value and the leakage current between the inspection points provided on the circuit board are measured, and the quality of the wiring is judged based on the measurement result.

  Further, the contact can be used as an interposer or connector for electrically connecting a plurality of objects.

Japanese Patent Application Laid-Open No. 60-114777 discloses an adapter pin, one end of which has a head formed in a spherical shape, and the other end has a contact for inspection of a printed wiring board. A contact end portion connected to the portion. A contact tip protruding from the inspection contact is in contact with the head of the adapter pin, and the contact tip is biased in a direction protruding by a spring.

  In Patent Document 1, a spring is provided on an inspection contact separate from the adapter pin in order to bring the both ends of the adapter pin into appropriate contact with the contact tip of the inspection contact and the inspection contact of the substrate. Therefore, as an inspection contact, an adapter pin and an inspection contact are required, and the contact tip of the inspection contact must be brought into contact with the head of the adapter pin, which increases the number of parts and the number of assembly steps. ing.

  Further, since the contact is fine, its manufacture and assembly are relatively difficult.

  Then, an object of this invention is to provide a contactor with few number of parts and assembly man-hours.

  An object of this invention is to provide a contactor with easy manufacture and assembly.

  An object of this invention is to provide the contactor integrally provided with a spring part.

  An object of this invention is to provide the contact which formed the spring part in the cylindrical main-body part.

  An object of this invention is to provide the contactor in which the spherical body was integrally formed in the at least one edge part of the cylindrical main-body part.

  It is an object of the present invention to provide a contact in which a spring portion is formed on a cylindrical main body, and a spherical body is integrally formed on at least one end of the cylindrical main body.

  Therefore, the contact according to the present invention is a contact for electrically connecting a plurality of objects, and includes a cylindrical tip portion and a rear end portion having a space therein, and the cylindrical tip portion. And a spring portion formed in a cylindrical portion continuous from the rear end portion, wherein the spring portion is located between the cylindrical tip end portion and the cylindrical rear end portion, and the cylindrical rear end portion A contact portion having a spherical shape integrally formed with the portion, the contact portion having a diameter larger than the outer diameter of the rear end portion of the cylindrical shape.

  In the contact, the cylindrical front end portion and rear end portion and the spring portion may be made of nickel or a nickel alloy, and the contact portion may be made of nickel or a nickel alloy.

  In the contact, the tip portion, the rear end portion, and the spring portion are formed from a single cylindrical member, and the spring portion is formed by having a spiral cutout on the wall surface of the cylindrical member. Is done.

  In the contact, the cylindrical member has a two-layer structure of an outer layer of nickel or a nickel alloy and an inner layer of gold, and the contact portion is an alloy of the outer layer and the inner layer. It is formed by.

  In the contact, the tip surface of the cylindrical tip may be flat, hemispherical, or a shape having a plurality of sharpened protrusions.

  In the contact, the contact may be attached to an inspection jig for an inspection apparatus for inspecting the electrical characteristics of the target portion of the object to be inspected.

  In the contact, the target portion of the object to be inspected is a part of wiring or an electronic component.

  The contact for electrically connecting a plurality of objects according to the present invention includes an inner probe and an outer probe, and the inner probe has a cylindrical tip portion and a rear end portion having a space inside. And a spring part formed in a cylindrical part continuous from the cylindrical front end part and the rear end part, the spring part being located between the cylindrical front end part and the cylindrical rear end part A spherical contact portion formed integrally with the rear end portion of the cylindrical shape, wherein the contact portion has a diameter larger than the outer diameter of the rear end portion of the cylindrical shape. The outer probe includes a cylindrical tip, a rear end, and a spring, the inner probe is inserted into the outer probe, and a rear end surface of the rear end of the outer probe is It can be locked to the contact portion of the inner probe.

  In the contact, the cylindrical tip of the outer probe can be fixed to the tip of the inner probe by resistance welding, laser welding, adhesive, or caulking.

  In the contact, the tip surface of the cylindrical tip may be flat, hemispherical, or a shape having a plurality of sharpened protrusions.

  According to the present invention, an inspection jig for an inspection apparatus for inspecting an electrical characteristic of a target portion of an object to be inspected is in contact with the contact and the contact portion of the contact. An electrode portion for electrically connecting the contact to the inspection device, and a through hole for guiding the tip of the contact to a predetermined inspection point on the target portion of the inspection object are formed. A head portion, a base portion in which a through hole for guiding the rear end portion of the contact to the electrode portion is formed, and an insulating film laminated on the base portion, the contact being placed in the through hole The cylindrical rear end portion of the insulating film is inserted, and a spherical contact portion formed integrally with the rear end portion is engaged with an edge of the through hole of the insulating film. A laminated insulating film, and the insulating film has elasticity or elasto-plasticity, whereby the edge of the through hole of the insulating film Wherein the contact portion of the integrally formed spherical to the rear end portion locked the is pressed against the electrode portion.

  In the inspection jig, the insulating film can be formed of, for example, a silicone sheet, a polyimide sheet, or a polytetrafluoroethylene sheet.

  Further, according to the present invention, a method for manufacturing a contact for electrically connecting a plurality of objects includes a step of forming a cylindrical member having a notch formed in a wall surface, and the cylindrical member is held. And a step of melting the end of the cylindrical member to form a spherical contact portion having a diameter larger than the outer diameter of the cylindrical member.

  In the method of manufacturing the contact, the cylindrical member has a laminated structure of an outer layer of nickel or a nickel alloy and an inner layer of gold, and the end of the cylindrical member is melted using a laser. Also good.

  According to the present invention, it is possible to provide a contactor with a reduced number of parts and assembly man-hours.

  According to the present invention, a contact that is easy to manufacture and assemble can be provided.

  According to the present invention, it is possible to provide a contactor integrally provided with a spring portion.

  According to the present invention, it is possible to provide a contact having a spring portion formed on a cylindrical body portion.

  According to the present invention, it is possible to provide a contactor in which a spherical body is integrally formed on at least one end of a cylindrical main body.

  According to the present invention, a contact can be provided in which a spring portion is formed on a cylindrical main body, and a spherical body is integrally formed on at least one end of the cylindrical main body.

FIG. 1 is a partial cross-sectional front view showing a schematic configuration of an inspection jig having a plurality of contacts attached thereto according to an embodiment of the present invention. FIG. 2A is a front view showing a schematic configuration of a contact according to an embodiment that can be used in the inspection jig of FIG. 1. FIG. 2B is a front view showing a part of a schematic configuration of a modification of the contact end portion of the contact shown in FIG. 2A. FIGS. 3A and 3B are partial cross-sectional front views illustrating a schematic configuration of a contact according to another embodiment that can be used in the inspection jig of FIG. 1. FIG. 4 is a conceptual diagram including a partial cross-section for explaining an example of the method of manufacturing the contact according to FIG. 5 is a partial cross-sectional front view showing a part of the configuration when the contact shown in FIG. 2A is incorporated in the inspection jig shown in FIG. 6 is a partial cross-sectional front view showing a part of the configuration when the contact shown in FIG. 2A is incorporated in an inspection jig according to another embodiment of the inspection jig shown in FIG. 7 is a partial cross-sectional front view showing a part of the configuration when the contact shown in FIG. 3A is incorporated in an inspection jig according to another embodiment of the inspection jig shown in FIG. FIG. 8 is a partial cross-sectional front view showing a part of the configuration when the contact of FIG. 3B is incorporated in an inspection jig according to another embodiment of the inspection jig of FIG. FIG. 9 is a partial view showing a part of the configuration for explaining the use state of the contact of FIG. 3B incorporated in the inspection jig according to another embodiment of the inspection jig of FIG. It is a cross-sectional front view.

  In the following, a contact of an inspection target portion of a substrate or a semiconductor device to be inspected will be described with reference to the attached drawings.

  In each attached drawing, the thickness, length, shape, interval between members, etc. are enlarged, reduced, deformed, simplified, etc. for easy understanding.

[Schematic configuration of inspection jig]
FIG. 1 relates to an embodiment in which a contact is used for the inspection jig 10, and is a partial cross-sectional front view showing a schematic configuration of the inspection jig 10. The inspection jig 10 includes a head portion 12, a base portion 14, and an electrode portion 16. The head portion 12 and the base portion 14 are held at a predetermined distance from each other by a rod-like support member 11 and a spacer 11s provided around the support member 11. The head portion 12 and the base portion 14 are made of an insulating plate member such as resin or ceramics.

  The head portion 12 is formed with a plurality of through holes 12h, and tip portions 22f of the plurality of probes 22 inserted therein are guided to predetermined positions. A plurality of through holes 14 h are also formed in the base portion 14, and rear end portions 22 r of the plurality of probes 22 inserted into them are guided to the electrode portion 16.

  The rear end portion 22r of the probe 22 is in a state of being electrically connected to the end portion of the conducting wire 18 fixed to the electrode portion 16, and the conducting wire 18 is connected to an inspection device (not shown).

  In FIG. 1, only a part of the probes 22 among the plurality of probes 22 is shown for simplification of the drawing.

  Further, as shown in FIG. 1, when inspecting an inspection object, an inspection object 30 to be inspected, for example, a substrate on which wiring is formed, is arranged below the inspection jig 10, and the inspection jig 10 is arranged. Is lowered to bring the tip 22fe of the probe 22 into contact with a predetermined inspection point, for example, 30d1 to 30dn, thereby inspecting the electrical characteristics of the inspection target portion.

[Probe structure]
2A, 3A, and 3B are schematic configurations for explaining the probes 22, 20a, and 20b according to some embodiments that can be used in the inspection jig of FIG. 1, respectively. FIG. Note that the thickness of the probe 22 is not shown for simplification of the drawing.

  FIG. 2A shows a probe 22 according to an embodiment that can be used in the inspection jig of FIG. The probe 22 includes a cylindrical tip portion 22f, a cylindrical rear end portion 22r, and a spring portion 22s formed therebetween. The front end portion 22f, the spring portion 22s, and the rear end portion 22r are configured by a single cylindrical member, and the spring portion 22s is formed by removing a part of the wall surface of the cylindrical portion with a laser, for example, by a laser. By forming the portion, it can be formed in a substantially spiral shape. The front end surface 22fe of the cylindrical front end portion 22f contacts an inspection point of the inspection target portion, for example, a bump, and the rear end surface 22re of the cylindrical rear end portion 22r has a spherical contact portion 22b at the rear end portion. The contact portion 22b is in contact with the electrode of the substrate inspection apparatus.

  As the cylindrical front end portion 22f, spring portion 22s, and rear end portion 22r, for example, the inside of a tube or pipe of nickel or nickel alloy having an outer diameter of about 25 μm to 300 μm and an inner diameter of 10 μm to 250 μm is hollow. These cylindrical members can be used. In this embodiment, as an example, a nickel tube having an outer diameter of about 50 μm, an inner diameter of about 35 μm, and an overall length L1 of about 15 mm is used, but the present invention is not limited to this. The cylindrical member has a laminated structure of an outer layer of nickel or nickel alloy and an inner layer of gold.

  The length L2 of the cylindrical front end portion 22f is about 5 mm, the length L3 of the spring portion 22s is about 5 mm, and the length L4 of the cylindrical rear end portion 22r is about 5 mm. These values are examples and are not limited thereto.

  Further, as shown in FIG. 2A, a spherical contact portion 22b is integrally formed on the rear end surface 22re of the cylindrical rear end portion 22r. For example, the diameter of the contact portion 22b is about 80 μm, and may be larger than the outer diameter of the cylindrical rear end portion 22r of about 50 μm. The spherical contact portion 22b can be formed as follows.

  First, for example, a cylindrical member having an outer diameter of about 50 μm, an inner diameter of about 35 μm, an overall length L1 of about 15 mm, and a cylindrical shape with both ends open is prepared. The inside of the cylindrical member is a cavity. This cylindrical member has a laminated structure of an outer layer of nickel or a nickel alloy and an inner layer of gold. Although the spring portion 22s has already been formed at this stage, the spring portion 22s may be formed after the spherical contact portion 22b is formed.

  Next, the rear end portion 22r of the cylindrical shape is held, and laser light is irradiated around the rear end surface 22re of the rear end portion 22r to heat the portion. This heating is desirably performed in an inert gas environment such as argon. It may be performed in the atmosphere.

  As a result, the portion irradiated with the laser beam is melted, and the melted portion becomes spherical due to surface tension, and solidifies to form a spherical contact portion 22b. Since the portion where the contact portion 22b is formed originally has a laminated structure of an outer layer of nickel or a nickel alloy and an inner layer of gold, they are melted and mixed. Since the molten material is formed into a spherical shape by the surface tension, the contact portion 22b is formed from an alloy of an outer layer of nickel or a nickel alloy and an inner layer of gold.

  As described above, since the rear end surface 22re of the cylindrical rear end portion 22r and the spherical contact portion 22b are integrally formed, there is no connection surface therebetween.

  In addition, a probe corresponding to the spherical contact portion 22b is manufactured as a separate member and connected to the rear end surface 22re of the cylindrical rear end portion 22r so that they are connected in a continuous manner. It can also be manufactured.

  Except for the end face 22fe and the contact part 22b of the cylindrical tip part 22f, the peripheral surface of the probe 22 may be insulated and coated as necessary.

  2B shows a probe 22 having a tip surface 22'fe of another shape different from the flat shape of the tip surface 22fe of the cylindrical tip portion 22f of the probe 22 of FIG. 2A. The front end surface 22'fe is not flat, and has a plurality of sharpened portions by forming a plurality of circular cutouts having a small diameter. As a result, the plurality of sharpened portions are fitted into inspection points of the inspection target portion, for example, bumps, so that the electrical connection between the probe 22 and the inspection point can be further ensured. Moreover, the self-cleaning effect of a sharp part can also be expected.

  Further, instead of FIG. 2B, a spherical shape may be integrally formed on the front end surface 22fe by the same forming method as the contact portion 22b of the rear end surface 22re of the probe 22 of the probe 22 of FIG. 2A.

  FIG. 3A shows a probe 20a according to another embodiment of the present invention. The probe 20a includes a large-diameter cylindrical portion 24a of the outer probe and a probe 22 of the inner probe inserted therein. The probe 22 is the same as the probe 22 of FIG. 2A, but the outer diameter, inner diameter, and dimensions from L1 to L4 may be changed.

  The cylindrical portion 24a includes a cylindrical tip portion 24f, a cylindrical rear end portion 24r, and a spring portion 24s formed therebetween. The spring portion 24s is similar to the spring portion 22s of the probe 22. A part of the cylindrical portion is removed by a laser to form a substantially spiral shape.

  The cylindrical portion 24a can be made of, for example, a nickel or nickel alloy tube, and its dimensions are determined according to the dimensions of the probe 22 inserted therein. For example, the outer diameter can be 40 μm to 315 μm, the inner diameter can be 25 μm to 300 μm, and the total length can be about 12 mm. These values are examples and are not limited thereto.

  As shown in FIG. 3A, the length of the cylindrical portion 24a is shorter than the length of the probe 22, and the rear end surface 24re of the rear end portion 24r contacts the contact portion 22b of the rear end portion 22r of the probe 22. When the cylindrical portion 24a is arranged as described above, the distal end side of the distal end portion 22f of the natural length probe 22 protrudes from the distal end surface 24fe of the distal end portion 24f of the cylindrical shaped portion 24a.

  As will be described later, when the distal end surface 22fe of the distal end portion 22f of the probe 22 is pressed against the inspection point at the time of inspection, the spring portion 22s contracts, so that the distal end portion 22f of the probe 22 becomes lower than the cylindrical portion 24a. It goes into the tip 24f. Therefore, the length of the tip portion 22f protruding from the tip portion 24f is required to be at least as long as the thickness of the head portion 12, so that the tip surface 22fe enters the tip portion 24f. Don't get lost.

  FIG. 3B shows a probe 20b according to still another embodiment of the present invention. The probe 20b includes a large-diameter cylindrical portion 24b of the outer probe and an inner probe probe 22 inserted therein. The probe 22 is the same as the probe 22 of FIG. 2A, but the outer diameter, inner diameter, and dimensions from L1 to L4 may be changed.

  Similar to the probe 20a of FIG. 3A, the cylindrical portion 24b includes a cylindrical tip portion 24f, a cylindrical rear end portion 24r, and a spring portion 24s formed therebetween. Similarly to the spring portion 22 s of the probe 22, 24 s is formed in a substantially spiral shape by removing a part of the cylindrical portion with a laser.

  With the configuration shown in FIG. 3A, the connection device can be assembled without fixing the probe 22 and the cylindrical portion 24a to each other, as will be described later.

  The probe 20b is different from the probe 20a in FIG. 3A at the position P of the tip 24f of the cylindrical portion 24b, for example, by resistance welding, laser welding, adhesive or caulking, for example, the tip 24f of the cylindrical portion 24b. And the front-end | tip part 22f of the probe 22 is joined, and they are mutually fixed. Therefore, the distal end portion 24f of the cylindrical portion 24b and the distal end portion 22f of the probe 22 move together. Therefore, when the distal end surface 22fe of the distal end portion 22f of the probe 22 is pressed, the spring portion 22s contracts and the distal end portion 24f retracts, but the rear end surface 24re of the rear end portion 24r is in contact with the contact portion 22b. The spring portion 24s of the cylindrical portion 24b contracts. As a result, the spring portion 22s and the spring portion 24s can function as a pressing portion that presses the contact portion 22b and the tip end surface 22fe against the electrode and the inspection point with appropriate elastic forces, respectively, and reduces the contact resistance.

  When the pressing pressure is sufficient for the spring portion 24s, the spring portion 24s may be omitted, and the length of the cylindrical portion 24b where the rear end surface 24re does not contact the contact portion 22b even at the maximum pressing may be selected. .

  As shown in FIG. 4, for example, the tip portion 24 f of the cylindrical portion 24 b and the tip portion 22 f of the probe 22 are joined at the position P of the tip portion 24 f of the cylindrical portion 24 b using the caulking device 40. Can do. More specifically, the opposing position P of the tip 24f of the cylindrical portion 24a of the probe 20a in FIG. 3A is sandwiched by a pair of tools, and pressure is applied. Thereby, the tip portion 24f and the tip portion 22f are joined at the portion where pressure is applied by the pair of tools.

  As shown in FIGS. 8 and 9 to be described later, the joining position P comes out of the through hole 12h1 when the distal end 24f of the cylindrical portion 24b is inserted into the through hole 12h1 of the head portion 12. It is desirable to be in position. That is, when joining at the position P, the joining position may be slightly deformed. Therefore, by bringing the joining position outside the through hole 12h1, the deformation at the position P affects the wall surface of the through hole 12h1. This is to prevent it from occurring.

  Further, in FIG. 4, caulking is performed at two opposing positions P of the tip 24 f, but only one position may be caulked.

[Outline of inspection jig]
FIG. 5 is an enlarged cross-sectional view of a part of the inspection jig to which the probe 22 of FIG. 2A is attached. As shown in FIG. 5, the head portion 12 and the base portion 14 are formed with through holes 12h and 14hn, respectively, and the through holes 12h and 14hn respectively have a distal end portion 22f and a rear portion of the probe 22. The end 22r is inserted.

  Since the diameter of the contact portion 22b is larger than the diameter of the through hole 14hn of the base portion 14, the contact portion 22b is caught on the edge forming the through hole 14hn of the base portion 14. Further, the contact portion 22 b is in contact with the end portion 18 e of the conducting wire 18 that penetrates the electrode portion 16.

  FIG. 6 is an enlarged cross-sectional view of a part of the inspection jig to which the probe 22 of FIG. 2A is attached, as in FIG. However, unlike the inspection jig shown in FIG. 5, in the inspection jig of FIG. 6, the insulating film 14 e is laminated above the base portion 14.

  A through hole 14hn is also formed in the insulating film 14e, and the contact portion 22b is locked to an edge forming the through hole 14hn of the insulating film 14e. Further, the contact portion 22 b is in contact with the end portion 18 e of the conducting wire 18 that penetrates the electrode portion 16. At this time, by selecting the insulating film 14e having elasticity or elasto-plasticity, the electrode portion 16 and the base portion 14 can be fixed without difficulty even when there is a difference in the size of the contact portion 22b due to the elastic force. Thus, it is possible to realize a state in which the contact portion 22b is pressed against the end portion 18e by a force having an appropriate size. For example, a silicone sheet or a polyimide sheet can be used as the insulating film 14e.

  According to the embodiment shown in FIGS. 5 and 6, when attaching the probe 22 to the inspection jig, the tip 22 f of the probe 22 is simply inserted from the through hole 14 hn of the base portion 14, and the tip 22 f is inserted. What is necessary is just to let it penetrate to the through-hole 12h of the head part 12. Then, since the contact portion 22b is caught by the base portion 14 or the insulating film 14e and locked, the attachment of the probe 22 to the inspection jig is completed. The locking can prevent the probe 22 from falling off.

  7 and 8 are enlarged cross-sectional views of a part of the inspection jig to which the probes 20a and 20b shown in FIGS. 3A and 3B are attached, respectively.

  As shown in FIGS. 7 and 8, a plate 12 u is attached to the lower surface of the head portion 12 of the inspection jig. The head portion 12 has a large diameter portion 12h1, and the plate 12u has a small diameter portion 12h2. However, the large diameter portion 12h1 and the small diameter portion 12h2 may be integrally formed on the head portion 12 itself without using the plate 12u.

  The large diameter portion 12h1 is inserted with the distal end portions 24f of the large diameter cylindrical portions 24a and 24b of the probes 20a and 20b, and the distal end surface 24fe of the distal end portion 24f is shown in FIGS. 7 and 8 of the plate 12u. It is in contact with the upper surface. As such, the plate 12u forms a locking portion for the distal end surface 24fe of the large-diameter cylindrical portions 24a and 24b. Further, a cylindrical tip portion 22f of the probe 22 is inserted into the small diameter portion 12h2.

  On the other hand, the rear end portions 24r and 24s of the cylindrical portions 24a and 24b and the rear end portion 22r of the probe 22 penetrating therethrough are inserted into the through hole 14hb of the base portion 14. The rear end surfaces 24re of the rear end portions 24r of the cylindrical portions 24a and 24b are engaged with the contact portion 22b of the probe 22. Further, the contact portion 22 b of the probe 22 is in contact with the end face 18 e of the conducting wire 18. Needless to say, the spring portion 24s may be disposed at a position where the spring portion 24s is not inserted into the through hole 14hb of the base portion 14.

  More specifically, in the probe 20a of FIG. 7, the probe 20a is incorporated in the inspection jig so that the tip surface 24fe of the cylindrical portion 24a is slightly pushed from the plate 12u. On the other hand, the rear end surface 24re of the rear end portion 24r of the cylindrical portion 24a is locked near the rear end surface 22r of the contact portion 22b of the probe 22. Therefore, the spring portion 24s contracts by the amount the tip surface 24fe is pressed from the plate 12u, and the contact portion 22b of the probe 22 is pressed against the end surface 18e of the conductor 18 by the urging force that the spring portion 24s tries to return. Thereby, since a preload can be given to the probe 20a and the conducting wire 18, the electrical contact between them can be ensured.

  Also in the probe 20b of FIG. 8, the probe 20b is incorporated in the inspection jig so that the tip surface 24fe of the cylindrical portion 24b is slightly pushed from the plate 12u. On the other hand, the rear end surface 24re of the rear end portion 24r of the cylindrical portion 24b is locked near the rear end surface 22r of the contact portion 22b of the probe 22. Therefore, the spring portion 24s contracts by the amount the tip surface 24fe is pressed from the plate 12u, and the contact portion 22b of the probe 22 is pressed against the end surface 18e of the conductor 18 by the urging force that the spring portion 24s tries to return. Further, in the probe 20b of FIG. 8, the distal end portion 24f and the distal end portion 22f of the probe 22 are coupled to each other at the position P of the distal end portion 24f of the cylindrical portion 24b. Since the portion 22 f also moves, the spring portion 22 s contracts with the movement of the probe 22, and the rear end portion 22 r of the probe 22 presses the contact portion 22 b against the end surface 18 e of the conducting wire 18 by the urging force to return. As described above, an appropriate amount of preload can be applied between the probe 20a and the conducting wire 18 by the urging force of the spring portion 24s and the spring portion 22s, so that electrical connection between the probe 20a and the conducting wire 18 can be achieved. Contact is even more secure.

  In order to give a preload of an appropriate size between the probe 20a and the conducting wire 18, the length from the front end surface 24fe to the rear end surface 24re of the cylindrical portions 24a, 24b of natural length is approximately the upper surface of the plate 12u (or The distance from the lower surface of the head portion 12 to the upper surface of the base portion 14 must be greater.

  Because of the difference in size, when the probes 20a and 20b are incorporated in the inspection jig as shown in FIG. 7 or FIG. 8, only the spring portions 24s of the cylindrical portions 24a and 24b are only corresponding to the difference. Or both the spring portion 24s and the spring portion 22s of the probe 22 can contract.

  FIG. 9 is an enlarged cross-sectional view of a part of the inspection jig for explaining a situation when the inspection object is inspected using the inspection jig of FIG.

  When inspecting an object to be inspected such as a substrate, the inspection jig is lowered and the tip surface 22fe of the tip 22f of the probe 22 of the probe 20b is set to a predetermined inspection point 30d1 on the inspection target portion such as the wiring of the object to be inspected 30. For example, the inspection point 30d1 is pushed with a force of about several gf to 15 gf (several tens of mN to 100 mN). Then, as shown in FIG. 9, the tip 22f of the probe 22 is pushed into the head 12 and the through holes 12h1 and 12h2 of the plate 12u. At this time, since the tip 22f of the probe 22 and the tip 24f of the cylindrical portion 24b are joined at the position P, when the tip 22f is pushed up, the tip 24f is pushed up together with it, and its tip face 24fe separates from the inner surface of the plate 12u of the locking portion. As a result, the spring portion 24s of the cylindrical portion 24b is further compressed, and the tip surface 22fe is strongly pressed by the inspection point 30d1 due to the urging force generated in the spring portion 24s. Therefore, the electrical contact between the tip surface 22fe and the inspection point 30d1 is ensured.

  At that time, the contact portion 22b of the probe 22 is already pressed against the end surface 18e of the conductor 18 by the constant urging force of the spring portion 22s, but the spring portion 24s of the cylindrical portion 24b is further contracted so that it becomes larger. The contact portion 22b is pressed against the end surface 18e of the conducting wire 18 by the urging force. Thereby, the electrical contact between the contact portion 22b and the end face 18e of the conductor 18 is further ensured.

  When the inspection is finished and the inspection jig is separated from the object to be inspected, the distal end portion 22f of the probe 22 is pushed back downward in FIG. 9 by the biasing force of the spring portion 22s. At that time, since the front end portion 22f and the front end portion 24f of the cylindrical portion 24b are joined at the position P, the front end portion 24f is also pushed back at the same time, and the front end surface 24fe of the front end portion 24f becomes the plate 12u of the locking portion. It abuts on the upper surface.

[Other Embodiments]
In the above-described embodiment, the substrate is described as an inspection object. However, the present invention is not limited thereto, and includes a semiconductor device as the inspection object.

  Moreover, although said embodiment demonstrated what used the contactor for the test | inspection jig | tool, it is not limited to it, A contactor can also be used as an interposer for a connector and a connection between board | substrates.

  In the above embodiment, the end surface 22fe of the tip 22f of the cylindrical portions 24a and 24b is flat. However, the end surface 22fe is formed in another shape, for example, a crown shape having a plurality of sharp protrusions. May be.

  As described above, the embodiments of the inspection jig for inspecting the inspection object according to the present invention and the contactor for electrically connecting the probe and the object that can be used for the inspection jig have been described. Additions, deletions, modifications, and the like that are not restricted and can be easily made by those skilled in the art are included in the present invention, and the technical scope of the present invention is defined by the description of the appended claims. Please be aware that it will be determined.

DESCRIPTION OF SYMBOLS 10 ... Inspection jig | tool 11 ... Support member 11s ... Spacer 12 ... Head part 12h, 14h ... Through-hole 12h1 ... Large diameter part 12h2 ... Small diameter part 14 ... Base portion 16 ... electrode portions 20a, 20b, 22 ... probes 24a, 24b ... large-diameter cylindrical portions 22f, 24f ... tip portions 22r, 24r ... rear end portions 22fe, 24fe. ..Front end surfaces 22re, 24re ... Rear end surfaces 22s, 24s ... Spring portion 22b ... Contact portion

Claims (3)

A contact for electrically connecting a plurality of objects,
It consists of an inner probe and an outer probe,
The inner probe is
Cylindrical tip and rear ends having a space inside,
A spring portion formed in a cylindrical portion continuous from the cylindrical tip portion and the rear end portion, the spring portion positioned between the cylindrical tip portion and the cylindrical rear end portion;
A spherical contact portion formed integrally with the rear end portion of the cylindrical shape, the contact portion having a diameter larger than the outer diameter of the rear end portion of the cylindrical shape,
The outer probe includes a cylindrical tip, rear end, and spring.
The inner probe is inserted into the outer probe;
A contact, wherein a rear end surface of the rear end portion of the outer probe is engaged with the contact portion of the inner probe.   The contact according to claim 1, wherein the cylindrical tip of the outer probe is fixed to the tip of the inner probe by resistance welding, laser welding, adhesive, or caulking.   3. The contact according to claim 1, wherein a distal end surface of the cylindrical distal end portion may be any one of a flat shape, a hemispherical shape, and a shape having a plurality of sharpened protrusions.

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