JP5375442B2 - Pallet for substrate transfer - Google Patents

Pallet for substrate transfer Download PDF

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JP5375442B2
JP5375442B2 JP2009196842A JP2009196842A JP5375442B2 JP 5375442 B2 JP5375442 B2 JP 5375442B2 JP 2009196842 A JP2009196842 A JP 2009196842A JP 2009196842 A JP2009196842 A JP 2009196842A JP 5375442 B2 JP5375442 B2 JP 5375442B2
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stacking
pallet
stacking member
substrate
bottom plate
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JP2011046415A (en
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貴大 森永
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Toppan Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a board transfer pallet 10 on which glass boards are loaded and stacked horizontally and a light and inexpensive upper lid 11 is stacked at high density. <P>SOLUTION: The bottom board 13C of a stage has extended portions 13D on its four corners and a connecting hole 15 on its back surface. A stacking member 40 having a connecting portion 45 on its surface is placed in a cylindrical frame 23 when the stacking member is stacked on the bottom board 13C. The connecting hole 15 on the back surface of the pallet 10 is fitted on the connecting portion 45 of the stacking member 40 so that the connected portion and the stacking member 40 jointly support the board transfer pallet 10. When the pallet 10 carrying glass boards is stacked, the stacking member 40 is placed on a pedestal 22 to raise the level of the upper part of the stacking member 40. When the pallet 10 carrying no glass board is stacked, the stacking member 40 is placed on the extended portions 13D to lower the level of the upper part of the stacking member 40. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、ガラス基板を水平に積載した、積重が可能な基板搬送用パレットに関するものであり、特に、上蓋が軽量で安価な基板搬送用パレット、及び空の基板搬送用パレットの積重する際には、より多数を積重できる基板搬送用パレットに関する。   TECHNICAL FIELD The present invention relates to a substrate carrying pallet in which glass substrates are stacked horizontally, and is capable of stacking, and in particular, a substrate carrying pallet that is lightweight and inexpensive, and an empty substrate carrying pallet are stacked. In particular, the present invention relates to a substrate carrying pallet capable of stacking a larger number.

近年、液晶ディスプレイやプラズマディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）に用いられるガラス基板の大型化が進んでいる。この大型ガラス基板を効率よく、かつ安定して搬送するための手段として、ガラス基板を水平に積載することが可能な基板搬送用パレット、及びそれを使用した搬送方法が、例えば、特開２００７−１５３３９５に開示されている。   In recent years, glass substrates used for flat panel displays (FPD) such as liquid crystal displays and plasma displays have been increasing in size. As means for efficiently and stably transporting this large glass substrate, a substrate transport pallet capable of horizontally loading glass substrates and a transport method using the same are disclosed in, for example, Japanese Patent Application Laid-Open No. 2007-2007. 153395.

図１は、開示されている基板搬送用パレット（板状体梱包箱）の概略を示す側断面図である。図１に示すように、この基板搬送用パレット（１）は、ガラス基板を積載する台座（３）と、天板と４側面を有する上蓋（２）と、ガラス基板を上方から固定する押さえ具（５）で構成されている。上蓋（２）は台座に対し着脱可能であり、台座上にガラス基板（４）を水平に積載できる空間を有し、台座上のガラス基板を覆うことができる。
この基板搬送用パレット（１）は、複数枚のガラス基板を水平に積載した状態で収納する。 FIG. 1 is a side sectional view showing an outline of a disclosed substrate carrying pallet (plate-like body packaging box). As shown in FIG. 1, this substrate transport pallet (1) includes a pedestal (3) on which a glass substrate is stacked, a top plate and an upper lid (2) having four side surfaces, and a pressing tool for fixing the glass substrate from above. (5). The upper lid (2) is detachable from the pedestal, has a space in which the glass substrate (4) can be horizontally stacked on the pedestal, and can cover the glass substrate on the pedestal.
The substrate transport pallet (1) stores a plurality of glass substrates stacked horizontally.

この基板搬送用パレット（１）は、複数枚のガラス基板を水平に収納できるので、基板搬送用パレットの高さを低くすることができる。従って、天井の低い格納室にも収納することができる。また、基板搬送用パレットの上蓋（２）と、台座（３）の下部に嵌合部（６Ａ、６Ｂ）を設けているので、複数の基板搬送用パレットを上下に積重するすることが可能である。図２は、基板搬送用パレット（１）が上下に積重された状態を示す側断面図である。
この基板搬送用パレットを積重して用いることにより、収納、及び搬送効率が向上したものとなる。 Since this board | substrate conveyance pallet (1) can accommodate several glass substrates horizontally, the height of a board | substrate conveyance pallet can be made low. Therefore, it can also be stored in a storage room with a low ceiling. In addition, since the fitting parts (6A, 6B) are provided on the upper lid (2) of the substrate transfer pallet and the lower part of the base (3), it is possible to stack a plurality of substrate transfer pallets vertically. It is. FIG. 2 is a side sectional view showing a state in which the substrate carrying pallets (1) are stacked one above the other.
By stacking and using the substrate transfer pallets, the storage and transfer efficiency is improved.

しかし、上記基板搬送用パレット（１）においては、上蓋（２）に嵌合部（６Ａ）を設けて、上下に基板搬送用パレットを積重することを可能にしているため、上蓋は十分な耐荷重性を有していなければならない。従って、上蓋には重量の増加、及びコストの上昇をもたらすことになる。また、重量が増加することにより、人手による取り扱いが困難となる。すなわち、開梱設備には、ガラス基板の積み下ろし機構のみでなく、上蓋の取り外し機構が必要になり、設備のコストの上昇が伴ってくる。   However, in the substrate transport pallet (1), the upper lid (2) is provided with the fitting portion (6A) so that the substrate transport pallets can be stacked up and down. Must be load bearing. Therefore, the upper lid brings about an increase in weight and an increase in cost. Further, the increase in weight makes it difficult to handle manually. That is, the unpacking facility requires not only a mechanism for loading and unloading glass substrates but also a mechanism for removing the upper lid, which increases the cost of the facility.

また、上蓋（２）の上部に積重用の嵌合部（６Ａ）、台座（３）の下部に嵌合部（６Ｂ）を設けているので、ガラス基板を積み下ろした後の、空パレットの状態においても、ガラス基板を積載した状態と同じ積重の形態をとることになる。すなわち、空パレットの状態においては、ガラス基板を積載するスペース効率は悪化するといった問題がある。   Moreover, since the fitting part (6A) for stacking is provided in the upper part of the upper lid (2) and the fitting part (6B) is provided in the lower part of the base (3), the state of the empty pallet after loading and unloading the glass substrate In this case, the same stacking form as that in which the glass substrates are stacked is taken. That is, in the empty pallet state, there is a problem that the space efficiency for loading the glass substrate deteriorates.

特開２００７−１５３３９５号公報JP 2007-153395 A

本発明は、上記の問題を解決するためになされたものであり、ガラス基板を水平に積載した、積重が可能な基板搬送用パレットであって、水平に積載したガラス基板を保護するための上蓋が軽量で安価な基板搬送用パレットを提供することを課題とするものである。これにより、設備のコストは低減されたものとなる。
また、空の基板搬送用パレットの輸送費用を低減させるため、空の基板搬送用パレットを積重する際には、ガラス基板積載時の基板搬送用パレットを積重する際よりも高密度、すなわち、より多数の基板搬送用パレットを上下に積重できる基板搬送用パレットを提供すること課題とする。 The present invention has been made to solve the above problem, and is a substrate transport pallet in which glass substrates are stacked horizontally and can be stacked, and is for protecting horizontally stacked glass substrates. An object of the present invention is to provide a pallet for transporting a substrate that is lightweight and inexpensive at an upper lid. Thereby, the cost of equipment is reduced.
Also, in order to reduce the transportation cost of empty substrate transfer pallets, when stacking empty substrate transfer pallets, higher density than when stacking substrate transfer pallets when loading glass substrates, that is, It is an object of the present invention to provide a substrate transport pallet capable of stacking a larger number of substrate transport pallets vertically.

本発明は、ガラス基板を水平に積載したパレットを積重して搬送する基板搬送用パレットにおいて、
１）前記基板搬送用パレットは、少なくとも、ガラス基板を水平に積載するステージ、該ステージに対し着脱可能なカバー、パレットを積重するための連結部で構成され、
２）前記ステージの底板は、その四隅に底板の延長部を有し、該延長部の裏面には連結用穴が設けられ、該連結用穴に対応した底板の延長部の表面上には、筒状枠部からなる連結部が設けられており、
３）基板搬送用パレットを積重する際には、その上部に連結用突起を有する積重用部材を上記筒状枠部内に装着し、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴を、上記筒状枠部内に装着した積重用部材の連結用突起に嵌合し、
底板の延長部の表面上の連結部と積重用部材とで積重する基板搬送用パレットを保持し、前記連結部は筒状枠部内の一部に座台を有し、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、積重用部材を筒状枠部内の座台上に装着して積重用部材上部の高さをカバーより高くし、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合し、Ｂ）空の基板搬送用パレットを積重する際には、積重用部材を筒状枠部内の延長部の表面上に装着して積重用部材上部の高さをステージの上板より高くし、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合することを特徴とする基板搬送用パレットである。
The present invention is a substrate transport pallet for stacking and transporting pallets loaded with glass substrates horizontally,
1) The substrate transport pallet includes at least a stage for horizontally loading glass substrates, a cover that can be attached to and detached from the stage, and a connecting portion for stacking the pallets.
2) The bottom plate of the stage has an extension of the bottom plate at its four corners, a connection hole is provided on the back surface of the extension, and on the surface of the extension of the bottom plate corresponding to the connection hole, A connecting part consisting of a cylindrical frame part is provided,
3) When stacking the substrate transport pallet, a stacking member having a connection projection on the top is mounted in the cylindrical frame portion, and the back surface of the bottom plate extension of the substrate transport pallet to be stacked Fitting the connecting hole provided in the stacking member of the stacking member mounted in the cylindrical frame,
Holding the substrate transport pallet that stacks with the connecting part on the surface of the extension part of the bottom plate and the stacking member , the connecting part has a pedestal in a part of the cylindrical frame part,
A) When stacking the substrate transfer pallet when loading the glass substrate, the stacking member is mounted on the seat in the cylindrical frame so that the height of the upper portion of the stacking member is higher than the cover. Fit the connection hole provided on the back surface of the extension of the bottom plate of the substrate transport pallet to be connected to the connection protrusion of the stacking member, and B) When stacking empty substrate transport pallets, A heavy member is mounted on the surface of the extension in the cylindrical frame so that the height of the upper part of the stacking member is higher than the top plate of the stage, and is provided on the back of the extension of the bottom plate of the stacking board pallet A board transfer pallet characterized by fitting the formed connection hole to a connection protrusion of a stacking member .

また、本発明は、上記発明による基板搬送用パレットにおいて、前記連結部の筒状枠部が平面視で逆さ凸の字状であり、
１）該逆さ凸の字状の、筒状枠部内の上半部左右に座台を設け、
２）直方体の積重用部材を延長部の表面上に装着するための連結部の底面の矩形形状と、直方体の積重用部材を座台上に装着するための面の矩形形状を同一の矩形形状とし、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、直方体の積重用部材を上記座台上に装着し、
Ｂ）空の基板搬送用パレットを積重する際には、直方体の積重用部材を上記延長部の表面上に装着することを特徴とする基板搬送用パレットである。 Moreover, the present invention is the substrate carrying pallet according to the above invention, wherein the cylindrical frame portion of the connecting portion is an inverted convex shape in plan view,
1) A seat is provided on the left and right sides of the upper half of the upside-down cylindrical shape of the inverted convex shape,
2) The rectangular shape of the bottom surface of the connecting portion for mounting the cuboid stacking member on the surface of the extension portion and the rectangular shape of the surface for mounting the cuboid stacking member on the seat are the same rectangular shape age,
A) When stacking the substrate transfer pallet when the glass substrate is loaded, a rectangular parallelepiped stacking member is mounted on the pedestal,
B) When stacking empty substrate transport pallets, a cuboid stacking member is mounted on the surface of the extension portion.

また、本発明は、ガラス基板を水平に積載したパレットを積重して搬送する基板搬送用パレットにおいて、
１）前記基板搬送用パレットは、少なくとも、ガラス基板を水平に積載するステージ、該ステージに対し着脱可能なカバー、パレットを積重するための連結部で構成され、
２）前記ステージは、その四隅側面に無蓋箱状の連結部を有し、該連結部の底板の裏面には連結用穴が設けられており、
３）基板搬送用パレットを積重する際には、その上部に連結用突起を有する積重用部材を上記無蓋箱状の連結部内に装着し、積重する基板搬送用パレットの、連結部の底板の裏面に設けられた連結用穴を、上記無蓋箱状の連結部内に装着した積重用部材の連結用突起に嵌合し、
ステージの四隅側面の連結部と積重用部材とで積重する基板搬送用パレットを保持し、
前記無蓋箱状の連結部内の一部に座台を有し、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、積重用部材を連結部内の座台上に装着して積重用部材上部の高さをカバーより高くし、積重する基板搬送用パレットの、連結部の底板の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合し、
Ｂ）空の基板搬送用パレットを積重する際には、積重用部材を連結部内の底板の表面上に装着して積重用部材上部の高さをステージの上板より高くし、積重する基板搬送用パレットの、連結部の底板の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合することを特徴とする基板搬送用パレットである。
In addition, the present invention provides a substrate transport pallet for stacking and transporting pallets loaded with glass substrates horizontally,
1) The substrate transport pallet includes at least a stage for horizontally loading glass substrates, a cover that can be attached to and detached from the stage, and a connecting portion for stacking the pallets.
2) The stage has an open box-like connecting portion on the four corner side surfaces, and a connecting hole is provided on the back surface of the bottom plate of the connecting portion,
3) When stacking the substrate transfer pallets, a stacking member having a connection protrusion on the top is mounted in the above-mentioned lidless box-shaped connection portion, and the bottom plate of the connection portion of the substrate transfer pallet to be stacked The connecting hole provided on the back surface of the fitting is fitted to the connecting protrusion of the stacking member mounted in the open box-like connecting portion,
Holds the substrate transfer pallet that stacks with the connecting parts on the four corner sides of the stage and the stacking member ,
It has a pedestal in a part of the lidless box-like connection part,
A) When stacking the substrate transfer pallet when loading the glass substrate, the stacking member is mounted on the pedestal in the connecting portion so that the height of the upper portion of the stacking member is higher than the cover, and the stacked substrates Fit the connection hole provided on the back surface of the bottom plate of the connection part of the transport pallet to the connection protrusion of the stacking member,
B) When stacking empty substrate transfer pallets, the stacking member is mounted on the surface of the bottom plate in the connecting portion so that the height of the upper portion of the stacking member is higher than that of the upper plate of the stage. The substrate transport pallet is characterized in that a connection hole provided on the back surface of the bottom plate of the connection portion of the substrate transport pallet is fitted to the connection protrusion of the stacking member .

また、本発明は、上記発明による基板搬送用パレットにおいて、前記無蓋箱状の連結部が平面視で逆さ凸の字状であり、
１）該逆さ凸の字状の、連結部内の上半部左右に座台を設け、
２）直方体の積重用部材を底板の表面上に装着するための連結部の底面の矩形形状と、直方体の積重用部材を座台上に装着するための面の矩形形状を同一の矩形形状とし、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、直方体の積重用部材を上記座台上に装着し、
Ｂ）空の基板搬送用パレットを積重する際には、直方体の積重用部材を上記底板の表面上に装着することを特徴とする基板搬送用パレットである。 Further, the present invention is the substrate transport pallet according to the present invention, wherein the open box-shaped connecting portion is an inverted convex character shape in plan view,
1) A seat is provided on the left and right of the upper half in the connecting portion of the inverted convex shape,
2) The rectangular shape of the bottom surface of the connecting portion for mounting the rectangular parallelepiped stacking member on the surface of the bottom plate and the rectangular shape of the surface for mounting the rectangular parallelepiped stacking member on the seat are the same rectangular shape. ,
A) When stacking the substrate transfer pallet when the glass substrate is loaded, a rectangular parallelepiped stacking member is mounted on the pedestal,
B) When stacking empty substrate transport pallets, the substrate transport pallet is characterized in that a rectangular parallelepiped stacking member is mounted on the surface of the bottom plate.

本発明は、ステージの底板は、その四隅に底板の延長部を有し、該延長部の裏面には連結用穴が設けられ、該連結用穴に対応した底板の延長部の表面上には、筒状枠部からなる連結部が設けられており、或いは、ステージは、その四隅側面に無蓋箱状の連結部を有し、該連結部の底板の裏面には連結用穴が設けられており、基板搬送用パレットを積重する際には、その上部に連結用突起を有する積重用部材を上記連結部に装着し、積重する基板搬送用パレットに設けられた連結用穴を、積重用部材の連結用突起に嵌合し、連結部と積重用部材とで積重する基板搬送用パレットを保持するので、上蓋が軽量で安価な基板搬送用パレットとなり、設備のコストは低減されたものとなる。   According to the present invention, the bottom plate of the stage has an extension portion of the bottom plate at the four corners, and a connection hole is provided on the back surface of the extension portion, and on the surface of the extension portion of the bottom plate corresponding to the connection hole. The stage is provided with a connecting part composed of a cylindrical frame part, or the stage has an open box-like connecting part at the four corner side surfaces, and a connecting hole is provided on the back surface of the bottom plate of the connecting part. When stacking the substrate transport pallet, a stacking member having a connection projection on the upper portion thereof is attached to the connecting portion, and the connection holes provided in the stacked substrate transport pallet are stacked. The board transport pallet that fits the connection projection of the heavy member and stacks with the connection part and the stacking member is held, so the top lid becomes a lightweight and inexpensive substrate transport pallet, and the cost of equipment is reduced It will be a thing.

また、本発明は、連結部は筒状枠部内の一部に座台を有し、或いは、無蓋箱状の連結部内の一部に座台を有し、ガラス基板積載時の基板搬送用パレットを積重する際には、積重用部材を座台上に装着して積重用部材上部の高さをカバーより高くして、積重する基板搬送用パレットに設けられた連結用穴を積重用部材の連結用突起に嵌合し、空の基板搬送用パレットを積重する際には、積重用部材を筒状枠部内の延長部の表面上に装着して、或いは、積重用部材を連結部内の底板の表面上に装着して積重用部材上部の高さをステージの上板より高くし、積重する基板搬送用パレットに設けられた連結用穴を積重用部材の連結用突起に嵌合するので、空の基板搬送用パレットを積重する際には、高密度、すなわち、より多数の基板搬送用パレットを上下に積重でき、基板搬送用パレットの輸送費用を低減できる基板搬送用パレットとなる。   Further, according to the present invention, the connecting part has a pedestal in a part of the cylindrical frame part, or has a pedestal in a part of the open box-like connecting part, and a substrate carrying pallet when loading the glass substrates. When stacking, the stacking member is mounted on the pedestal, the height of the top of the stacking member is set higher than the cover, and the connection holes provided on the stacking board transport pallet are stacked. When stacking empty substrate carrying pallets by fitting to the connecting projections of the members, the stacking members are mounted on the surface of the extension in the cylindrical frame, or the stacking members are connected Mounted on the surface of the bottom plate in the unit, the height of the upper part of the stacking member is made higher than the upper plate of the stage, and the connecting holes provided in the stacking board transport pallet are fitted into the connecting protrusions of the stacking member Therefore, when stacking empty substrate transfer pallets, high density, that is, more substrate transfer pallets Vertically can intussusception, a substrate conveying pallet capable of reducing transport costs of the board conveying pallet.

また、本発明は、連結部の筒状枠部が平面視で逆さ凸の字状であり、筒状枠部内の上半部左右に座台を設け、積重用部材を延長部の表面上に装着するための連結部の底面と、積
重用部材を座台上に装着するための面を同一の矩形形状とし、ガラス基板積載時の基板搬送用パレットを積重する際には、直方体の積重用部材を上記座台上に装着し、空の基板搬送用パレットを積重する際には、直方体の積重用部材を延長部の表面上に装着するので、或いは、無蓋箱状の連結部が平面視で逆さ凸の字状であり、該逆さ凸の字状の、連結部内の上半部左右に座台を設け、直方体の積重用部材を底板の表面上に装着するための連結部の底面の矩形形状と、直方体の積重用部材を座台上に装着するための面の矩形形状を同一の矩形形状とし、ガラス基板積載時の基板搬送用パレットを積重する際には、直方体の積重用部材を上記座台上に装着し、空の基板搬送用パレットを積重する際には、直方体の積重用部材を上記底板の表面上に装着するので、空の基板搬送用パレットを積重する際には、高密度、すなわち、より多数の基板搬送用パレットを上下に積重でき、基板搬送用パレットの輸送費用を低減できる基板搬送用パレットとなる。 Further, according to the present invention, the cylindrical frame portion of the connecting portion has an inverted convex shape in plan view, and a pedestal is provided on the left and right upper half portions in the cylindrical frame portion, and the stacking member is placed on the surface of the extension portion. The bottom surface of the connecting part for mounting and the surface for mounting the stacking member on the pedestal have the same rectangular shape, and when stacking the substrate transport pallet when loading glass substrates, When the heavy member is mounted on the pedestal and the empty substrate carrying pallet is stacked, a rectangular parallelepiped stacking member is mounted on the surface of the extension part, or there is an open box-like connecting part. In the shape of an upside-down convex in a plan view, a seat is provided on the left and right of the upper half of the connecting portion, and the connecting portion for mounting the rectangular parallelepiped stacking member on the surface of the bottom plate The rectangular shape of the bottom surface and the rectangular shape of the surface for mounting the rectangular parallelepiped stacking member on the seat are the same rectangular shape, and the glass substrate When stacking the pallet for transporting the substrate at the time, the cuboid stacking member is mounted on the pedestal, and when stacking the empty pallet for transporting the substrate, the stacking member of the cuboid is mounted on the bottom plate. Because it is mounted on the surface of the board, when stacking empty board transfer pallets, high density, that is, more board transfer pallets can be stacked up and down, reducing the transportation cost of board transfer pallets It becomes a pallet for transporting substrates.

基板搬送用パレット（板状体梱包箱）の概略を示す側断面図である。It is a sectional side view which shows the outline of the board | substrate conveyance pallet (plate-shaped body packaging box). 基板搬送用パレットが上下に積重された状態を示す側断面図である。It is a sectional side view which shows the state in which the board | substrate conveyance pallet was piled up and down. 本発明による基板搬送用パレットの一例の概略を示す側断面図である。It is a sectional side view which shows the outline of an example of the pallet for board | substrate conveyance by this invention. 本発明による基板搬送用パレットの一例の概略を示す平面図である。It is a top view which shows the outline of an example of the pallet for board | substrate conveyance by this invention. 本発明による基板搬送用パレットの一例の概略を示す底面図（底板の裏面）である。It is a bottom view (back surface of a baseplate) which shows the outline of an example of the pallet for board | substrate conveyance by this invention. 図４に符号（Ａ）で囲む、延長部の表面上に設けられた連結部を拡大して示す平面図である。It is a top view which expands and shows the connection part provided on the surface of the extension part enclosed with the code | symbol (A) in FIG. 図５に符号（Ｂ）で囲む、延長部の裏面の近傍を拡大して示す底面図である。It is a bottom view which expands and shows the vicinity of the back surface of the extension part enclosed with the code | symbol (B) in FIG. 図６のＸ−Ｘ線での断面図である。It is sectional drawing in the XX line of FIG. （ａ）、（ｂ）は、基板搬送用パレットを積重する際の積重用部材の一例の平面図及び側面図である。(A), (b) is the top view and side view of an example of the member for stacking | stacking at the time of stacking | stacking the pallet for board | substrate conveyance. 積重用部材を連結部内に装着し、基板搬送用パレットを積重した状態である。The stacking member is mounted in the connecting portion, and the substrate carrying pallet is stacked. １基の基板搬送用パレット上に、２基の基板搬送用パレットが積重された状態を示す側断面である。4 is a side cross-sectional view showing a state in which two substrate transfer pallets are stacked on one substrate transfer pallet. 連結部の筒状枠部内に設ける座台の例を示す平面図である。It is a top view which shows the example of the seat provided in the cylindrical frame part of a connection part. 連結部が筒状枠部内の一部に座台を有している他の例を示す平面図である。It is a top view which shows the other example in which the connection part has a base in a part in a cylindrical frame part. 連結部が筒状枠部内の一部に座台を有している他の例を示す底面図である。It is a bottom view which shows the other example in which the connection part has a base in a part in a cylindrical frame part. 図１３のＸ−Ｘ線での断面図である。It is sectional drawing in the XX line of FIG. 図１３のＹ−Ｙ線での断面図である。It is sectional drawing in the YY line of FIG. 連結部の底面の平面視の形状の説明図である。It is explanatory drawing of the shape of planar view of the bottom face of a connection part. 積重用部材が座台上で装着される面の形状の説明図である。It is explanatory drawing of the shape of the surface where the member for stacking is mounted | worn on a seat. （ａ）、（ｂ）、（ｃ）は、積重用部材の平面図、正面図、及び側面図である。(A), (b), (c) is the top view, front view, and side view of a member for stacking. 空の基板搬送用パレット上に、２基の空の基板搬送用パレットが積重された状態を表した側断面図である。It is a sectional side view showing the state where two empty substrate transfer pallets were stacked on an empty substrate transfer pallet. 請求項４に係わる発明の基板搬送用パレットの一例の概略を示す側断面図である。It is a sectional side view which shows the outline of an example of the pallet for board | substrate conveyance of the invention concerning Claim 4. ステージの一隅側面に設けられた連結部の近傍を拡大して示す平面図である。It is a top view which expands and shows the vicinity of the connection part provided in the corner side of a stage. 連結部の裏面の近傍を拡大して示す底面図である。It is a bottom view which expands and shows the vicinity of the back surface of a connection part. 図２２のＸ−Ｘ線での断面図である。It is sectional drawing in the XX line of FIG. 積重用部材を連結部内に装着し、基板搬送用パレットを積重した状態の部分である。This is a portion in which the stacking member is mounted in the connecting portion and the substrate transfer pallet is stacked. 請求項５に係わる発明における連結部内に設ける座台の例を示す平面図である。It is a top view which shows the example of the seat provided in the connection part in the invention concerning Claim 5. 請求項６に係わる発明を説明する平面図である。It is a top view explaining the invention concerning Claim 6. 請求項６に係わる発明を説明する底面図である。It is a bottom view explaining the invention concerning Claim 6. 請求項６に係わる発明を説明するＸ−Ｘ線での断面図である。It is sectional drawing in the XX line explaining the invention concerning Claim 6. 請求項６に係わる発明を説明するＹ−Ｙ線での断面図である。It is sectional drawing in the YY line explaining the invention concerning Claim 6. 連結部の底面の平面視の形状の説明図である。It is explanatory drawing of the shape of planar view of the bottom face of a connection part. 積重用部材が座台上で装着される面の形状の説明図である。It is explanatory drawing of the shape of the surface where the member for stacking is mounted | worn on a seat.

以下に、本発明を実施の形態に基づいて説明する。
図３は、本発明による基板搬送用パレットの一例の概略を示す側断面図である。また、図４は平面図、図５は底面図（底板の裏面）である。本発明による基板搬送用パレットは、ガラス基板を水平に積載したパレットを上下に積重して搬送する基板搬送用パレットである。図３〜図５に示すように、基板搬送用パレット（１０）は、ガラス基板を水平に積載するステージ（１３）、ステージに対し着脱可能なカバー（１１）、カバーの４辺を固定する側面ガイド（１２）、基板搬送用パレットを積重するための連結部（２０）で構成されている。 Hereinafter, the present invention will be described based on embodiments.
FIG. 3 is a side sectional view showing an outline of an example of the substrate carrying pallet according to the present invention. 4 is a plan view, and FIG. 5 is a bottom view (the back surface of the bottom plate). The pallet for transporting substrates according to the present invention is a pallet for transporting substrates in which pallets on which glass substrates are horizontally stacked are stacked and transported up and down. As shown in FIGS. 3 to 5, the substrate carrying pallet (10) includes a stage (13) for horizontally loading glass substrates, a cover (11) that can be attached to and detached from the stage, and a side surface that fixes four sides of the cover. It comprises a guide (12) and a connecting portion (20) for stacking the substrate carrying pallets.

ガラス基板を水平に積載するステージ（１３）は、上板（１３Ａ）、桟（１３Ｂ）、底板（１３Ｃ）で構成され、ステージの底板（１３Ｃ）は、その四隅に底板の延長部（１３Ｄ）を有している。延長部（１３Ｄ）には連結部（２０）が設けられる。また、フォークリフトのフォークを受けるためのフォークリフト用穴（１４）がステージ（１３）の側面に設けられる。   The stage (13) for horizontally loading the glass substrate is composed of an upper plate (13A), a crosspiece (13B), and a bottom plate (13C), and the bottom plate (13C) of the stage is an extension (13D) of the bottom plate at its four corners. have. The extension part (13D) is provided with a connecting part (20). A forklift hole (14) for receiving a fork of the forklift is provided on the side surface of the stage (13).

ステージに対し着脱可能なカバー（１１）は、天板と４側面とで空間を形成し、ガラス基板の複数枚を水平に積載した積層体（３０）を覆うようになっている。
側面ガイド（１２）は、カバー（１１）の４辺を固定している。筒状枠部からなる連結部（２０Ｂ）は、底板（１３Ｃ）の四隅に設けられた延長部（１３Ｄ）の表面上に設けられており、上下に積重する基板搬送用パレット（１０）を保持するものである。 The cover (11) that can be attached to and detached from the stage forms a space between the top plate and the four side surfaces, and covers the laminated body (30) in which a plurality of glass substrates are stacked horizontally.
The side guide (12) fixes four sides of the cover (11). The connecting portion (20B) formed of the cylindrical frame portion is provided on the surface of the extension portion (13D) provided at the four corners of the bottom plate (13C), and the substrate transfer pallet (10) that is stacked up and down is provided. It is to hold.

図６は、図４に符号（Ａ）で囲む、延長部（１３Ｄ）の表面上に設けられた連結部（２０Ｂ）の近傍を拡大して示す平面図である。また、図７は、図５に符号（Ｂ）で囲む、延長部（１３Ｄ）の裏面の近傍を拡大して示す底面図である。
図６と図７は、図４中、右方上端の一隅にある延長部（１３Ｄ）の表面と裏面の関係になる。また、図８は、図６のＸ−Ｘ線での断面図である。 FIG. 6 is an enlarged plan view showing the vicinity of the connecting portion (20B) provided on the surface of the extension portion (13D), which is surrounded by the symbol (A) in FIG. FIG. 7 is an enlarged bottom view showing the vicinity of the back surface of the extension (13D) surrounded by the symbol (B) in FIG.
6 and 7 show the relationship between the front surface and the back surface of the extension (13D) at one corner of the upper right end in FIG. FIG. 8 is a cross-sectional view taken along line XX in FIG.

図６〜図８に示すように、延長部（１３Ｄ）の裏面には連結用穴（１５Ｂ）が設けられている。また、延長部（１３Ｄ）の表面には、裏面の連結用穴（１５Ｂ）に対応し、筒状枠部からなる連結部（２０Ｂ）が設けられている。連結部（２０Ｂ）の中央に連結用穴（１５Ｂ）が位置している。
筒状枠部は、平面視で正方形であり、内寸法は（ａ×ａ）で表される。連結部（２０Ｂ）の底面に相当する部位は、底板（１３Ｃ）の延長部（１３Ｄ）の表面である。 As shown in FIGS. 6-8, the connection hole (15B) is provided in the back surface of the extension part (13D). Moreover, the connection part (20B) which consists of a cylindrical frame part is provided in the surface of the extension part (13D) corresponding to the connection hole (15B) of a back surface. A connecting hole (15B) is located at the center of the connecting portion (20B).
The cylindrical frame portion is square in plan view, and the inner dimension is represented by (a × a). The site corresponding to the bottom surface of the connecting portion (20B) is the surface of the extension (13D) of the bottom plate (13C).

図９（ａ）、（ｂ）は、基板搬送用パレット（１０）を積重する際に用いる積重用部材（４０Ｂ）の一例の平面図及び側面図である。積重用部材（４０Ｂ）は、平面視で正方形であり、外寸法は（ａ’×ａ’）で表される。図８に点線で示すように、積重用部材（４０Ｂ）は筒状枠部からなる連結部（２０Ｂ）内に、隙間なく良好に装着されるようになっている（ａ’＜ａ）。積重用部材（４０Ｂ）は、その上部に連結用突起（４５Ｂ）を有している。
積重用部材（４０Ｂ）の高さ（ｃ’）は、積重用部材（４０Ｂ）を連結部（２０Ｂ）内に装着した際に、ガラス基板の積層体を覆うカバー（１１）よりも、積重用部材（４０Ｂ）の上部（ｊ）が高くなる高さである。 FIGS. 9A and 9B are a plan view and a side view of an example of a stacking member (40B) used when stacking the substrate carrying pallet (10). The stacking member (40B) is square in plan view, and the outer dimension is represented by (a ′ × a ′). As shown by a dotted line in FIG. 8, the stacking member (40B) can be satisfactorily mounted without any gap in the connecting portion (20B) formed of the cylindrical frame portion (a ′ <a). The stacking member (40B) has a connecting projection (45B) on the top thereof.
The height (c ′) of the stacking member (40B) is higher than that of the cover (11) that covers the laminated body of the glass substrates when the stacking member (40B) is mounted in the connecting portion (20B). It is the height which the upper part (j) of a member (40B) becomes high.

図１０は、積重用部材（４０Ｂ）を連結部（２０Ｂ）内に装着し、基板搬送用パレット（１０）を積重した状態の部分を表したものである。基板搬送用パレットを積重する際には、先ず、下方にある基板搬送用パレットの筒状枠部からなる連結部（２０Ｂ）内に、上部に連結用突起（４５Ｂ）を有する積重用部材（４０Ｂ）を装着する。次に、積重する基板搬送用パレットの、底板の延長部（１３Ｄ）の裏面に設けられた連結用穴（１５Ｂ）を、下方にある積重用部材の連結用突起（４５Ｂ）に嵌合して積重を行う。   FIG. 10 shows a portion where the stacking member (40B) is mounted in the connecting portion (20B) and the substrate carrying pallet (10) is stacked. When stacking the substrate transport pallet, first, a stacking member (45B) having a connection projection (45B) on the upper side in a connection portion (20B) formed of a cylindrical frame portion of the substrate transport pallet below ( 40B) is installed. Next, the connecting hole (15B) provided on the back surface of the extension (13D) of the bottom plate of the stacking board conveying pallet is fitted into the connecting protrusion (45B) of the stacking member below. To pile up.

これにより、底板の延長部の表面上の連結部（２０Ｂ）と積重用部材（４０Ｂ）とで、積重する基板搬送用パレット（１０）を保持することになる。
図１１は、１基の基板搬送用パレット（１０）上に、２基の基板搬送用パレット（１０）が積重された状態を示す側断面図である。 As a result, the substrate transport pallet (10) to be stacked is held by the connecting portion (20B) and the stacking member (40B) on the surface of the extension of the bottom plate.
FIG. 11 is a side sectional view showing a state in which two substrate transfer pallets (10) are stacked on one substrate transfer pallet (10).

上記のように、本発明による基板搬送用パレットはガラス基板を水平に積載した、積重が可能な基板搬送用パレットであって、水平に積載したガラス基板を保護するための上蓋が軽量で安価な基板搬送用パレットとなり、設備のコストは低減されたものとなる。   As described above, the substrate transfer pallet according to the present invention is a substrate transfer pallet in which glass substrates are horizontally stacked and can be stacked, and the upper lid for protecting the horizontally stacked glass substrates is lightweight and inexpensive. Thus, the pallet for transporting the substrate is reduced, and the cost of the equipment is reduced.

また、本発明は、延長部の表面上に設けられた連結部（２０）が筒状枠部（２３）内の一部に座台（２２）を有しており、ガラス基板積載時の基板搬送用パレット（１０）を積重する際には、先ず、積重用部材（４０）を筒状枠部内の座台（２２）上に装着して、積重用部材（４０）上部の高さをカバー（１１）より高い状態とし、次に、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴（１５）を、下方にある基板搬送用パレットの積重用部材の連結用突起（４５）に嵌合する。
また、空の基板搬送用パレット（１０）を積重する際には、先ず、積重用部材（４０）
を筒状枠部（２３）内の延長部の表面上に装着して、積重用部材（４０）上部の高さをステージの上板（１３Ａ）より高い状態とし、次に、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴（１５）を、下方にある基板搬送用パレットの積重用部材の連結用突起（４５）に嵌合することを特徴としている。 Further, according to the present invention, the connecting portion (20) provided on the surface of the extension portion has a seat (22) in a part of the cylindrical frame portion (23), and the substrate when the glass substrate is loaded. When stacking the transport pallet (10), first, the stacking member (40) is mounted on the pedestal (22) in the cylindrical frame, and the height of the stacking member (40) is increased. The connection hole (15) provided on the back surface of the extension part of the bottom plate of the substrate transport pallet to be stacked next to the cover (11) is placed on the stacking member of the substrate transport pallet below. To the connecting projection (45).
When stacking empty substrate carrying pallets (10), first, the stacking member (40)
Is mounted on the surface of the extension portion in the cylindrical frame portion (23) so that the height of the upper portion of the stacking member (40) is higher than that of the upper plate (13A) of the stage, and then stacked. The connection hole (15) provided on the back surface of the extension of the bottom plate of the transport pallet is fitted to the connection protrusion (45) of the stacking member of the substrate transport pallet below. .

これは、特に、空の基板搬送用パレット（１０）を積重する際には、ガラス基板積載時の基板搬送用パレット（１０）を積重する際よりも高密度、すなわち、より多数の基板搬送用パレットを上下に積重すること目的としたものである。   This is because, in particular, when stacking empty substrate transport pallets (10), the density is higher than when stacking substrate transport pallets (10) when loading glass substrates, that is, a larger number of substrates. The purpose is to stack the transport pallets vertically.

図１２は、連結部の筒状枠部内に設ける座台の例を示す平面図である。図１２（ａ）は、平面視で正方形の筒状枠部（２３Ｃ）内の、右半部に座台（２２Ｃ）が設けられた例であり、空の基板搬送用パレットを積重する際には、筒状枠部（２３Ｃ）内の左半部の、矩形状（Ｔ３）の延長部（１３Ｄ）の表面上に積重用部材を装着する。装着する積重用部材の形状は、符号（Ｔ３）で示す平面視で矩形である。   FIG. 12 is a plan view showing an example of a pedestal provided in the cylindrical frame portion of the connecting portion. FIG. 12A is an example in which a base (22C) is provided in the right half of the square cylindrical frame (23C) in plan view, and when stacking empty substrate carrying pallets. Is mounted on the surface of the rectangular (T3) extension (13D) in the left half of the cylindrical frame (23C). The shape of the stacking member to be mounted is a rectangle in plan view indicated by reference numeral (T3).

また、ガラス基板積載時の基板搬送用パレットを積重する際には、筒状枠部（２３Ｃ）内の右半部の、矩形状（Ｔ４）の座台（２２Ｃ）上に同一の積重用部材を装着する。座台（２２Ｃ）の形状は、符号（Ｔ４）で示す平面視で矩形である（Ｔ３＝Ｔ４）。   Further, when stacking the substrate transfer pallets when loading the glass substrates, the same stacking is performed on the rectangular (T4) seat (22C) in the right half of the cylindrical frame (23C). Mount the member. The shape of the pedestal (22C) is a rectangle (T3 = T4) in a plan view indicated by reference numeral (T4).

図１２（ｂ）は、平面視で十字状の筒状枠部（２３Ｄ）内の、左右部に座台（２２Ｄ）が設けられた例であり、空の基板搬送用パレットを積重する際には、筒状枠部（２３Ｄ）内の左右中央部の、延長部（１３Ｄ）の表面上の矩形状（Ｔ５）の部分に積重用部材を装着する。装着する積重用部材の形状は、符号（Ｔ５）で示す平面視で矩形であり、矩形の長手の辺をＹ軸と平行としている。   FIG. 12B is an example in which seats (22D) are provided on the left and right sides in the cross-shaped cylindrical frame portion (23D) in plan view, and when stacking empty substrate transfer pallets. In this case, the stacking member is attached to the rectangular (T5) portion on the surface of the extension portion (13D) at the left and right central portions in the cylindrical frame portion (23D). The shape of the stacking member to be mounted is rectangular in a plan view indicated by reference numeral (T5), and the long side of the rectangle is parallel to the Y axis.

また、ガラス基板積載時の基板搬送用パレットを積重する際には、筒状枠部（２３Ｃ）内の左右部の、座台（２２Ｄ）上の矩形状（Ｔ６）の面に同一の積重用部材を装着する。装着する矩形状の積重用部材は、その長手の辺をＸ軸と平行としている。   Further, when stacking the substrate transfer pallets when loading the glass substrates, the same product is placed on the rectangular (T6) surface on the pedestal (22D) of the left and right sides in the cylindrical frame portion (23C). A heavy member is attached. The rectangular stacking member to be mounted has its long side parallel to the X axis.

図１３〜図１６は、連結部（２０）が筒状枠部（２３）内の一部に座台（２２）を有している他の例を示す平面図、底面図、及び断面図である。図１３と図１４は、図４中、右方上端の一隅にある延長部（１３Ｄ）の表面と裏面を拡大して表したものである。また、図１５は図１３のＸ−Ｘ線での断面図、図１６は図１３のＹ−Ｙ線での断面図である。
図１３〜図１６に示すように、延長部（１３Ｄ）の裏面には４個の連結用穴（１５）が設けられている。また、延長部（１３Ｄ）の表面には、裏面の４個の連結用穴（１５）に対応し、筒状枠部（２３）と座台（２２）からなる連結部（２０）が設けられている。 13 to 16 are a plan view, a bottom view, and a sectional view showing another example in which the connecting portion (20) has a seat (22) in a part of the cylindrical frame portion (23). is there. FIGS. 13 and 14 are enlarged views of the front and back surfaces of the extension (13D) at one corner of the right upper end in FIG. 15 is a cross-sectional view taken along line XX of FIG. 13, and FIG. 16 is a cross-sectional view taken along line YY of FIG.
As shown in FIGS. 13 to 16, four connecting holes (15) are provided on the back surface of the extension (13 </ b> D). Further, on the front surface of the extension portion (13D), a connection portion (20) including a cylindrical frame portion (23) and a seat (22) is provided corresponding to the four connection holes (15) on the back surface. ing.

連結部（２０）の筒状枠部（２３）は平面視で逆さ凸の字状であり、この逆さ凸の字状の、筒状枠部（２３）内の上半部左右に座台（２２）が設けられている。連結部（２０）の底面に相当する部位は、底板（１３Ｃ）の延長部（１３Ｄ）の表面である。
連結部（２０）の底面の平面視の形状は、図１７に符号（Ｔ１）で示すように、（ｅ×ｆ）で表される矩形である。この矩形は、その長辺（ｅ）をＹ軸と平行にしている。 The cylindrical frame portion (23) of the connecting portion (20) has an upside-down convex shape in plan view, and a seat ( 22). The site corresponding to the bottom surface of the connecting portion (20) is the surface of the extension portion (13D) of the bottom plate (13C).
The shape of the bottom surface of the connecting portion (20) in plan view is a rectangle represented by (e × f), as indicated by reference numeral (T1) in FIG. This rectangle has its long side (e) parallel to the Y axis.

また、この底面に装着される積重用部材（４０）と同一の積重用部材が、上半部左右の座台（２２）上にも装着されるので、積重用部材が座台（２２）上で装着される面（Ｔ２）は、図１８に符号（Ｔ２）で示すように、同じく（ｅ×ｆ）で表される矩形となっている。この矩形は、その長辺（ｅ）をＸ軸と平行にしている。   Further, since the same stacking member as the stacking member (40) mounted on the bottom surface is mounted on the left and right pedestals (22), the stacking member is mounted on the pedestal (22). The surface (T2) to be attached is a rectangle represented by (e × f), as indicated by reference numeral (T2) in FIG. This rectangle has its long side (e) parallel to the X axis.

図１９は、基板搬送用パレット（１０）を積重する際に用いられる積重用部材（４０）の平面図、正面図、及び側面図である。積重用部材（４０）は、平面視で矩形であり、外
寸法は（ｅ’×ｆ’）で表される。図１７に示す連結部（２０）の底面（延長部（１３Ｄ）の表面）に、図１６に点線で示すように、隙間なく良好に装着されるようになっている（ｅ’＜ｅ、ｆ’＜ｆ）。積重用部材（４０）は、その長手方向（ｅ’）をＹ軸と平行にして延長部（１３Ｄ）の表面（連結部（２０）の底面）上に装着される。 FIG. 19 is a plan view, a front view, and a side view of the stacking member (40) used when stacking the substrate carrying pallets (10). The stacking member (40) is rectangular in plan view, and the outer dimension is represented by (e ′ × f ′). As shown by a dotted line in FIG. 16, the bottom of the connecting portion (20) shown in FIG. 17 (the surface of the extension portion (13D)) can be satisfactorily mounted without any gap (e ′ <e, f '<F). The stacking member (40) is mounted on the surface of the extension portion (13D) (the bottom surface of the connecting portion (20)) with its longitudinal direction (e ') parallel to the Y axis.

積重用部材（４０）は、その上部に連結用突起（４５）を有している。積重用部材（４０）の高さ（ｇ’）は、積重用部材（４０）を延長部（１３Ｄ）の表面上に装着した際に、ステージの上板（１３Ａ）の高さよりも、積重用部材（４０）の上部（ｋ）が高くなる高さである。   The stacking member (40) has a connecting projection (45) on its upper part. The height (g ′) of the stacking member (40) is greater than the height of the upper plate (13A) of the stage when the stacking member (40) is mounted on the surface of the extension (13D). It is the height which the upper part (k) of a member (40) becomes high.

また、図１８に示すように、積重用部材（４０）は、積重用部材が座台（２２）上にて装着される面（Ｔ２）に、図１５に点線で示すように、隙間なく良好に装着されるようになっている。積重用部材（４０）は、その長手方向（ｅ’）をＸ軸と平行にして座台（２２）上に装着される。
積重用部材（４０）の上部（ｌ）の高さは、積重用部材を座台（２２）上に装着した際に、ガラス基板の積層体を覆うカバー（１１）よりも、高くなる高さである。座台（２２）の高さ（ｈ’）は、積重用部材（４０）の上部（ｌ）の高さがカバー（１１）よりも高くなるように設定される。 Also, as shown in FIG. 18, the stacking member (40) is good with no gap on the surface (T2) on which the stacking member is mounted on the seat (22), as shown by the dotted line in FIG. It comes to be attached to. The stacking member (40) is mounted on the seat (22) with its longitudinal direction (e ') parallel to the X axis.
The height of the upper part (l) of the stacking member (40) is higher than the cover (11) covering the laminated body of glass substrates when the stacking member is mounted on the seat (22). It is. The height (h ′) of the seat (22) is set so that the height of the upper part (l) of the stacking member (40) is higher than that of the cover (11).

図２０は、１基の空の基板搬送用パレット（１０）上に、２基の空の基板搬送用パレット（１０）が積重された状態を表した側断面図である。図１１に示す、積重した基板搬送用パレットの高さ（Ｈ１）と対比して、本発明による空の基板搬送用パレットを積重した高さ（Ｈ２）は、著しく低いことが示されている（Ｈ２＜Ｈ１）。   FIG. 20 is a side sectional view showing a state in which two empty substrate transfer pallets (10) are stacked on one empty substrate transfer pallet (10). In contrast to the height (H1) of the stacked substrate transfer pallets shown in FIG. 11, the height (H2) of stacked empty substrate transfer pallets according to the present invention is shown to be significantly lower. (H2 <H1).

上記のように、本発明による基板搬送用パレットは、連結部の筒状枠部が平面視で逆さ凸の字状であり、筒状枠部内の上半部左右に座台を設け、直方体の積重用部材を装着する連結部の底面の矩形形状と、座台上に装着するための面の矩形形状を同一とし、基板積載時の基板搬送用パレットを積重する際には、積重用部材を座台上に装着し、空の基板搬送用パレットを積重する際には、積重用部材を延長部に装着するので、空の基板搬送用パレットを積重する際には、高密度に積重でき、基板搬送用パレットの輸送費用を低減させることができる。   As described above, in the substrate carrying pallet according to the present invention, the cylindrical frame portion of the connecting portion has an inverted convex shape in plan view, and the base is provided on the left and right sides of the upper half of the cylindrical frame portion. When stacking the substrate transport pallet when loading the substrate, the rectangular shape of the bottom surface of the connecting portion for mounting the stacking member is the same as the rectangular shape of the surface for mounting on the pedestal. When stacking empty substrate transfer pallets, stack the stacking members on the extension when stacking empty substrate transfer pallets. Stacking can be achieved, and the transportation cost of the substrate carrying pallet can be reduced.

図２１は、請求項４に係わる発明による基板搬送用パレットの一例の概略を示す側断面図である。図２１に示すように、基板搬送用パレット（１０’）は、ガラス基板を水平に積載するステージ（１６）、ステージに対し着脱可能なカバー（１１）、カバーの４辺を固定する側面ガイド（１２）、基板搬送用パレットを積重するための連結部（５０）で構成されている。基板搬送用パレット（１０’）は、平面視で正方形である。   FIG. 21 is a side sectional view showing an outline of an example of a substrate carrying pallet according to the invention of claim 4. As shown in FIG. 21, the substrate transport pallet (10 ′) includes a stage (16) for horizontally loading glass substrates, a cover (11) that can be attached to and detached from the stage, and a side guide (4) that fixes four sides of the cover. 12) It is comprised by the connection part (50) for stacking the board | substrate conveyance pallet. The substrate carrying pallet (10 ') is square in plan view.

ガラス基板を水平に積載するステージ（１６）は、上板（１６Ａ）、桟（１６Ｂ）、底板（１６Ｃ）で構成され、ステージ（１６）は、その四隅側面に無蓋箱状の連結部（５０）を有している。また、フォークリフトのフォークを受けるためのフォークリフト用穴（１４）がステージ（１６）の上記四隅側面とは異なる側面に設けられる。   The stage (16) for horizontally loading the glass substrates is composed of an upper plate (16A), a crosspiece (16B), and a bottom plate (16C), and the stage (16) is connected to a box-shaped connecting portion (50 )have. Further, a forklift hole (14) for receiving a fork of the forklift is provided on a side surface different from the four side surfaces of the stage (16).

ステージに対し着脱可能なカバー（１１）は、天板と４側面とで空間を形成し、ガラス基板の複数枚を水平に積載した積層体（３０）を覆うようになっている。
側面ガイド（１２）は、カバー（１１）の４辺を固定している。連結部（５０Ｂ）は、ステージ（１６）の四隅側面に設けられており、上下に積重する基板搬送用パレット（１０’）を保持するものである。 The cover (11) that can be attached to and detached from the stage forms a space between the top plate and the four side surfaces, and covers the laminated body (30) in which a plurality of glass substrates are stacked horizontally.
The side guide (12) fixes four sides of the cover (11). The connecting portion (50B) is provided on the four corner side surfaces of the stage (16), and holds the substrate carrying pallet (10 ′) stacked vertically.

図２２は、図２１に示すステージ（１６）の一隅側面に設けられた連結部（５０Ｂ）の
近傍を拡大して示す平面図である。また、図２３は、この連結部（５０Ｂ）の裏面の近傍を拡大して示す底面図である。
図２２と図２３は、ステージ（１６）の一隅にある連結部（５０Ｂ）の表面と裏面の関係になる。また、図２４は、図２２のＸ−Ｘ線での断面図である。 FIG. 22 is an enlarged plan view showing the vicinity of the connecting portion (50B) provided on one corner side surface of the stage (16) shown in FIG. FIG. 23 is an enlarged bottom view showing the vicinity of the back surface of the connecting portion (50B).
22 and 23 show the relationship between the front and back surfaces of the connecting portion (50B) at one corner of the stage (16). FIG. 24 is a cross-sectional view taken along line XX in FIG.

図２２〜図２４に示すように、連結部（５０Ｂ）は、側板（５３Ｂ）と底板（５４Ｂ）で構成され、上部には天板を有しない無蓋箱状である。連結部（５０Ｂ）は、ステージ（１６）の四隅の側面（１６Ｅ）に設けられている。また、連結部（５０Ｂ）の底板（５４Ｂ）の裏面には連結用穴（１５Ｂ）が設けられている。連結部（５０Ｂ）の中央に連結用穴（１５Ｂ）が位置している。連結部（５０Ｂ）は、平面視で正方形であり、内寸法は（ａ×ａ）で表される。   As shown in FIGS. 22-24, a connection part (50B) is comprised with a side plate (53B) and a bottom plate (54B), and is a lidless box shape which does not have a top plate in the upper part. The connecting portion (50B) is provided on the side surfaces (16E) at the four corners of the stage (16). Further, a connecting hole (15B) is provided on the back surface of the bottom plate (54B) of the connecting portion (50B). A connecting hole (15B) is located at the center of the connecting portion (50B). The connecting portion (50B) is square in plan view, and the inner dimension is represented by (a × a).

前記図９（ａ）、（ｂ）は、基板搬送用パレット（１０’）を積重する際に用いる積重用部材（４０Ｂ）の一例の平面図及び側面図である。積重用部材（４０Ｂ）は、平面視で正方形であり、外寸法は（ａ’×ａ’）で表される。図２４に点線で示すように、積重用部材（４０Ｂ）は連結部（５０Ｂ）の側板（５３Ｂ）内に、隙間なく良好に装着されるようになっている（ａ’＜ａ）。積重用部材（４０Ｂ）は、その上部に連結用突起（４５Ｂ）を有している。
積重用部材（４０Ｂ）の高さ（ｃ’）は、積重用部材（４０Ｂ）を連結部（５０Ｂ）内に装着した際に、ガラス基板の積層体を覆うカバー（１１）よりも、積重用部材（４０Ｂ）の上部（ｊ）が高くなる高さである。 FIGS. 9A and 9B are a plan view and a side view of an example of a stacking member (40B) used when stacking the substrate carrying pallets (10 ′). The stacking member (40B) is square in plan view, and the outer dimension is represented by (a ′ × a ′). As shown by a dotted line in FIG. 24, the stacking member (40B) is favorably mounted in the side plate (53B) of the connecting portion (50B) without a gap (a ′ <a). The stacking member (40B) has a connecting projection (45B) on the top thereof.
The height (c ′) of the stacking member (40B) is higher than that of the cover (11) covering the laminated body of glass substrates when the stacking member (40B) is mounted in the connecting portion (50B). It is the height which the upper part (j) of a member (40B) becomes high.

図２５は、積重用部材（４０Ｂ）を連結部（５０Ｂ）内に装着し、基板搬送用パレット（１０’）を積重した状態の部分を表したものである。基板搬送用パレットを積重する際には、先ず、下方にある基板搬送用パレットの連結部（５０Ｂ）内に、上部に連結用突起（４５Ｂ）を有する積重用部材（４０Ｂ）を装着する。次に、積重する基板搬送用パレットの、連結部（５０Ｂ）の底板（５４Ｂ）の裏面に設けられた連結用穴（１５Ｂ）を、下方にある積重用部材の連結用突起（４５Ｂ）に嵌合して積重を行う。   FIG. 25 shows a portion where the stacking member (40B) is mounted in the connecting portion (50B) and the substrate carrying pallet (10 ') is stacked. When stacking the substrate transport pallets, first, a stacking member (40B) having a connection projection (45B) on the upper portion is mounted in the connection portion (50B) of the substrate transport pallet located below. Next, the connecting hole (15B) provided on the back surface of the bottom plate (54B) of the connecting portion (50B) of the stacking substrate transport pallet is connected to the connecting protrusion (45B) of the stacking member below. Fit and stack.

これにより、連結部（５０Ｂ）と積重用部材（４０Ｂ）とで、積重する基板搬送用パレット（１０’）を保持することになる。
上記のように、本発明による基板搬送用パレットはガラス基板を水平に積載した、積重が可能な基板搬送用パレットであって、水平に積載したガラス基板を保護するための上蓋が軽量で安価な基板搬送用パレットとなり、設備のコストは低減されたものとなる。 Thereby, the board | substrate conveyance pallet (10 ') to accumulate is hold | maintained by the connection part (50B) and the member for stacking (40B).
As described above, the substrate transfer pallet according to the present invention is a substrate transfer pallet in which glass substrates are horizontally stacked and can be stacked, and the upper lid for protecting the horizontally stacked glass substrates is lightweight and inexpensive. Thus, the pallet for transporting the substrate is reduced, and the cost of the equipment is reduced.

図２６は、請求項５に係わる発明における連結部内に設ける座台の一例を示す平面図である。図２６は、平面視で正方形の側板（５３Ｃ）内の、右半部に座台（５２Ｃ）が設けられた例であり、空の基板搬送用パレットを積重する際には、側板（５３Ｃ）内の左半部の、矩形状（Ｔ３）の底板（５４Ｃ）上に積重用部材を装着する。装着する積重用部材の形状は、符号（Ｔ３）で示す平面視で矩形である。   FIG. 26 is a plan view showing an example of a seat provided in the connecting portion in the invention according to claim 5. FIG. 26 shows an example in which a pedestal (52C) is provided in the right half of the square side plate (53C) in plan view. When stacking empty substrate transfer pallets, the side plate (53C) is shown. The stacking member is mounted on the rectangular (T3) bottom plate (54C) in the left half of the bracket. The shape of the stacking member to be mounted is a rectangle in plan view indicated by reference numeral (T3).

また、ガラス基板積載時の基板搬送用パレットを積重する際には、側板（５３Ｃ）内の右半部の、矩形状（Ｔ４）の座台（５２Ｃ）上に同一の積重用部材を装着する。座台（５２Ｃ）の形状は、符号（Ｔ４）で示す平面視で矩形である（Ｔ３＝Ｔ４）。   In addition, when stacking the substrate transfer pallet when loading glass substrates, the same stacking member is mounted on the rectangular (T4) base (52C) in the right half of the side plate (53C). To do. The shape of the pedestal (52C) is a rectangle (T3 = T4) in a plan view indicated by reference numeral (T4).

図２７〜図３０は、請求項６に係わる発明を説明する図であり、連結部（５０）内の一部に座台（５２）を有している他の例を示す平面図、底面図、及び断面図である。図２７と図２８は、図２２と同様に、ステージ（１６）の一隅にある連結部の表面と裏面を拡大して表したものである。また、図２９は図２７のＸ−Ｘ線での断面図、図３０は図２７のＹ−Ｙ線での断面図である。   27 to 30 are views for explaining the invention according to claim 6 and are a plan view and a bottom view showing another example having a seat (52) in a part of the connecting portion (50). And FIG. 27 and 28 are enlarged views of the front and back surfaces of the connecting portion at one corner of the stage (16), as in FIG. 29 is a cross-sectional view taken along line XX in FIG. 27, and FIG. 30 is a cross-sectional view taken along line YY in FIG.

図２７〜図３０に示すように、連結部（５０）は、側板（５３Ｃ）と底板（５４Ｃ）と座台（５２Ｃ）で構成され、上部には天板を有しない無蓋箱状である。連結部（５０）は、ステージ（１６）の四隅側面（１６Ｅ）に設けられている。また、連結部（５０）の底板（５４Ｃ）の裏面には４個の連結用穴（１５）が設けられている。   As shown in FIGS. 27-30, the connection part (50) is comprised with a side plate (53C), a bottom plate (54C), and a pedestal (52C), and is a lidless box shape which does not have a top plate in the upper part. The connecting portion (50) is provided on the four corner side surfaces (16E) of the stage (16). Further, four connecting holes (15) are provided on the back surface of the bottom plate (54C) of the connecting portion (50).

連結部（５０）は平面視で逆さ凸の字状であり、この逆さ凸の字状の、側板（５３Ｃ）内の上半部左右に座台（５２）が設けられている。
連結部（５０）の底面の平面視の形状は、図３１に符号（Ｔ１）で示すように、（ｅ×ｆ）で表される矩形である。この矩形は、その長辺（ｅ）をＹ軸と平行にしている。 The connecting portion (50) has an inverted convex shape in plan view, and seats (52) are provided on the left and right sides of the upper half in the side plate (53C).
The shape of the bottom surface of the connecting portion (50) in plan view is a rectangle represented by (e × f), as indicated by reference numeral (T1) in FIG. This rectangle has its long side (e) parallel to the Y axis.

また、この底面に装着される積重用部材（４０）と同一の積重用部材が、上半部左右の座台（５２）上にも装着されるので、積重用部材が座台（５２）上で装着される面（Ｔ２）は、図３２に符号（Ｔ２）で示すように、同じく（ｅ×ｆ）で表される矩形となっている。この矩形は、その長辺（ｅ）をＸ軸と平行にしている。   Further, the same stacking member as the stacking member (40) mounted on the bottom surface is mounted on the left and right pedestals (52), so the stacking member is mounted on the pedestal (52). The surface (T2) to be mounted is a rectangle represented by (e × f), as indicated by reference numeral (T2) in FIG. This rectangle has its long side (e) parallel to the X axis.

前記図１９は、基板搬送用パレット（１０’）を積重する際に用いられる積重用部材（４０）の平面図、正面図、及び側面図である。積重用部材（４０）は、平面視で矩形であり、外寸法は（ｅ’×ｆ’）で表される。図３１に示す連結部（５０）の底面に、図３０に点線で示すように、隙間なく良好に装着されるようになっている（ｅ’＜ｅ、ｆ’＜ｆ）。積重用部材（４０）は、その長手方向（ｅ’）をＹ軸と平行にして連結部（５０）の底板（５４）上に装着される。   FIG. 19 is a plan view, a front view, and a side view of the stacking member (40) used when stacking the substrate carrying pallets (10 '). The stacking member (40) is rectangular in plan view, and the outer dimension is represented by (e ′ × f ′). As shown by a dotted line in FIG. 30, the connecting portion (50) shown in FIG. 31 is satisfactorily mounted without a gap (e ′ <e, f ′ <f). The stacking member (40) is mounted on the bottom plate (54) of the connecting portion (50) with its longitudinal direction (e ') parallel to the Y axis.

積重用部材（４０）は、その上部に連結用突起（４５）を有している。積重用部材（４０）の高さ（ｇ’）は、積重用部材（４０）を底板（５４）上に装着した際に、ステージの上板（１６Ａ）の高さよりも、積重用部材（４０）の上部（ｋ）が高くなる高さである。   The stacking member (40) has a connecting projection (45) on its upper part. The height (g ′) of the stacking member (40) is greater than the height of the top plate (16A) of the stage when the stacking member (40) is mounted on the bottom plate (54). ) Is the height at which the upper part (k) becomes higher.

また、図３２に示すように、積重用部材（４０）は、積重用部材が座台（５２）上にて装着される面（Ｔ２）に、図２９に点線で示すように、隙間なく良好に装着されるようになっている。積重用部材（４０）は、その長手方向（ｅ’）をＸ軸と平行にして座台（２２）上に装着される。
積重用部材（４０）の上部（ｌ）の高さは、積重用部材を座台（５２）上に装着した際に、ガラス基板の積層体を覆うカバー（１１）よりも、高くなる高さである。座台（５２）の高さ（ｈ’）は、積重用部材（４０）の上部（ｌ）の高さがカバー（１１）よりも高くなるように設定される。 Further, as shown in FIG. 32, the stacking member (40) is good with no gap on the surface (T2) on which the stacking member is mounted on the seat (52) as shown by the dotted line in FIG. It comes to be attached to. The stacking member (40) is mounted on the seat (22) with its longitudinal direction (e ') parallel to the X axis.
The height of the upper part (l) of the stacking member (40) is higher than the cover (11) covering the laminated body of glass substrates when the stacking member is mounted on the seat (52). It is. The height (h ′) of the seat (52) is set so that the height of the upper part (l) of the stacking member (40) is higher than that of the cover (11).

上記のように、本発明による基板搬送用パレットは、連結部が平面視で逆さ凸の字状であり、連結部内の上半部左右に座台を設け、直方体の積重用部材を装着する連結部の底面の矩形形状と、座台上に装着するための面の矩形形状を同一とし、基板積載時の基板搬送用パレットを積重する際には、積重用部材を座台上に装着し、空の基板搬送用パレットを積重する際には、積重用部材を底面に装着するので、空の基板搬送用パレットを積重する際には、高密度に積重でき、基板搬送用パレットの輸送費用を低減させることができる。   As described above, in the substrate carrying pallet according to the present invention, the connecting portion has an inverted convex shape in plan view, and the base is provided with seats on the left and right of the upper half of the connecting portion, and the connecting member is mounted with a rectangular parallelepiped stacking member. The rectangular shape of the bottom surface of the unit and the rectangular shape of the surface for mounting on the pedestal are the same, and when stacking the substrate transfer pallet when loading the substrate, the stacking member is mounted on the pedestal When stacking empty substrate transfer pallets, stacking members are attached to the bottom surface, so when stacking empty substrate transfer pallets, they can be stacked at high density. The transportation cost can be reduced.

１・・・基板搬送用パレット
２・・・上蓋
３・・・台座
４・・・ガラス基板
５・・・押さえ具
６Ａ、６Ｂ・・・嵌合部
１０、１０’・・・本発明による基板搬送用パレット
１１・・・着脱可能なカバー
１２・・・側面ガイド
１３、１６・・・ガラス基板を水平に積載するステージ
１３Ａ、１６Ａ・・・ステージの上板
１３Ｂ、１６Ｂ・・・ステージの桟
１３Ｃ、１６Ｃ・・・ステージの底板
１３Ｄ・・・底板の延長部
１５、１５Ｂ、４５、４５Ｂ・・・連結用穴
１６Ｅ・・・ステージの側面
２０、２０Ｂ、５０、５０Ｂ・・・パレットを積重するための連結部
２２、２２Ｃ、５２、５２Ｃ・・・座台
２３、２３Ｃ・・・筒状枠部
４０、４０Ｂ・・・積重用部材
５３、５３Ｂ、５３Ｃ・・・側板
５４、５４Ｂ、５４Ｃ・・・底板
Ｔ１〜Ｔ６・・・積重用部材を装着する延長部又は座台の矩形状 DESCRIPTION OF SYMBOLS 1 ... Substrate conveyance pallet 2 ... Upper lid 3 ... Base 4 ... Glass substrate 5 ... Presser 6A, 6B ... Fitting part 10, 10 '... Substrate by this invention Pallet for transport 11 ... Removable cover 12 ... Side guides 13 and 16 ... Stages 13A, 16A for placing glass substrates horizontally ... Upper plates 13B and 16B for stages ... 13C, 16C: Stage bottom plate 13D: Bottom plate extensions 15, 15B, 45, 45B ... Connection holes 16E ... Stage side surfaces 20, 20B, 50, 50B ... Pallet loaded Connecting portions 22, 22 C, 52, 52 C for overlapping, 23, 23 C, cylindrical frame portions 40, 40 B, stacking members 53, 53 B, 53 C, side plates 54, 54 B, 54C ... Bottom plate T1-T6 ... Rectangle shape of extension or seat for mounting stacking members

Claims (4)

ガラス基板を水平に積載したパレットを積重して搬送する基板搬送用パレットにおいて、
１）前記基板搬送用パレットは、少なくとも、ガラス基板を水平に積載するステージ、該ステージに対し着脱可能なカバー、パレットを積重するための連結部で構成され、
２）前記ステージの底板は、その四隅に底板の延長部を有し、該延長部の裏面には連結用穴が設けられ、該連結用穴に対応した底板の延長部の表面上には、筒状枠部からなる連結部が設けられており、
３）基板搬送用パレットを積重する際には、その上部に連結用突起を有する積重用部材を上記筒状枠部内に装着し、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴を、上記筒状枠部内に装着した積重用部材の連結用突起に嵌合し、
底板の延長部の表面上の連結部と積重用部材とで積重する基板搬送用パレットを保持し、前記連結部は筒状枠部内の一部に座台を有し、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、積重用部材を筒状枠部内の座台上に装着して積重用部材上部の高さをカバーより高くし、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合し、Ｂ）空の基板搬送用パレットを積重する際には、積重用部材を筒状枠部内の延長部の表面上に装着して積重用部材上部の高さをステージの上板より高くし、積重する基板搬送用パレットの、底板の延長部の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合することを特徴とする基板搬送用パレット。 In the substrate transport pallet that stacks and transports the pallets loaded with glass substrates horizontally,
1) The substrate transport pallet includes at least a stage for horizontally loading glass substrates, a cover that can be attached to and detached from the stage, and a connecting portion for stacking the pallets.
2) The bottom plate of the stage has an extension of the bottom plate at its four corners, a connection hole is provided on the back surface of the extension, and on the surface of the extension of the bottom plate corresponding to the connection hole, A connecting part consisting of a cylindrical frame part is provided,
3) When stacking the substrate transport pallet, a stacking member having a connection projection on the top is mounted in the cylindrical frame portion, and the back surface of the bottom plate extension of the substrate transport pallet to be stacked Fitting the connecting hole provided in the stacking member of the stacking member mounted in the cylindrical frame,
Holding the substrate transport pallet that stacks with the connecting part on the surface of the extension part of the bottom plate and the stacking member , the connecting part has a pedestal in a part of the cylindrical frame part,
A) When stacking the substrate transfer pallet when loading the glass substrate, the stacking member is mounted on the seat in the cylindrical frame so that the height of the upper portion of the stacking member is higher than the cover. Fit the connection hole provided on the back surface of the extension of the bottom plate of the substrate transport pallet to be connected to the connection protrusion of the stacking member, and B) When stacking empty substrate transport pallets, A heavy member is mounted on the surface of the extension in the cylindrical frame so that the height of the upper part of the stacking member is higher than the top plate of the stage, and is provided on the back of the extension of the bottom plate of the stacking board pallet A pallet for transporting a substrate, wherein the coupling hole thus fitted is fitted into a coupling projection of a stacking member . 前記連結部の筒状枠部が平面視で逆さ凸の字状であり、
１）該逆さ凸の字状の、筒状枠部内の上半部左右に座台を設け、
２）直方体の積重用部材を延長部の表面上に装着するための連結部の底面の矩形形状と、直方体の積重用部材を座台上に装着するための面の矩形形状を同一の矩形形状とし、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、直方体の積重用部材を上記座台上に装着し、
Ｂ）空の基板搬送用パレットを積重する際には、直方体の積重用部材を上記延長部の表面上に装着することを特徴とする請求項１記載の基板搬送用パレット。 The cylindrical frame portion of the connecting portion is an upside-down convex shape in plan view,
1) A seat is provided on the left and right sides of the upper half of the upside-down cylindrical shape of the inverted convex shape,
2) The rectangular shape of the bottom surface of the connecting portion for mounting the cuboid stacking member on the surface of the extension portion and the rectangular shape of the surface for mounting the cuboid stacking member on the seat are the same rectangular shape age,
A) When stacking the substrate transfer pallet when the glass substrate is loaded, a rectangular parallelepiped stacking member is mounted on the pedestal,
B) Empty the substrate conveying pallet when stacked is claim 1 substrate conveying pallet according to a rectangular parallelepiped product duty member, characterized in that mounted on the surface of the extension portion. ガラス基板を水平に積載したパレットを積重して搬送する基板搬送用パレットにおいて、
１）前記基板搬送用パレットは、少なくとも、ガラス基板を水平に積載するステージ、該
ステージに対し着脱可能なカバー、パレットを積重するための連結部で構成され、
２）前記ステージは、その四隅側面に無蓋箱状の連結部を有し、該連結部の底板の裏面には連結用穴が設けられており、
３）基板搬送用パレットを積重する際には、その上部に連結用突起を有する積重用部材を上記無蓋箱状の連結部内に装着し、積重する基板搬送用パレットの、連結部の底板の裏面に設けられた連結用穴を、上記無蓋箱状の連結部内に装着した積重用部材の連結用突起に嵌合し、
ステージの四隅側面の連結部と積重用部材とで積重する基板搬送用パレットを保持し、
前記無蓋箱状の連結部内の一部に座台を有し、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、積重用部材を連結部内の座台上に装着して積重用部材上部の高さをカバーより高くし、積重する基板搬送用パレットの、連結部の底板の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合し、
Ｂ）空の基板搬送用パレットを積重する際には、積重用部材を連結部内の底板の表面上に装着して積重用部材上部の高さをステージの上板より高くし、積重する基板搬送用パレットの、連結部の底板の裏面に設けられた連結用穴を積重用部材の連結用突起に嵌合することを特徴とする基板搬送用パレット。 In the substrate transport pallet that stacks and transports the pallets loaded with glass substrates horizontally,
1) The substrate transport pallet includes at least a stage for horizontally loading glass substrates, a cover that can be attached to and detached from the stage, and a connecting portion for stacking the pallets.
2) The stage has an open box-like connecting portion on the four corner side surfaces, and a connecting hole is provided on the back surface of the bottom plate of the connecting portion,
3) When stacking the substrate transfer pallets, a stacking member having a connection protrusion on the top is mounted in the above-mentioned lidless box-shaped connection portion, and the bottom plate of the connection portion of the substrate transfer pallet to be stacked The connecting hole provided on the back surface of the fitting is fitted to the connecting protrusion of the stacking member mounted in the open box-like connecting portion,
Holds the substrate transfer pallet that stacks with the connecting parts on the four corner sides of the stage and the stacking member ,
It has a pedestal in a part of the lidless box-like connection part,
A) When stacking the substrate transfer pallet when loading the glass substrate, the stacking member is mounted on the pedestal in the connecting portion so that the height of the upper portion of the stacking member is higher than the cover, and the stacked substrates Fit the connection hole provided on the back surface of the bottom plate of the connection part of the transport pallet to the connection protrusion of the stacking member,
B) When stacking empty substrate transfer pallets, the stacking member is mounted on the surface of the bottom plate in the connecting portion so that the height of the upper portion of the stacking member is higher than that of the upper plate of the stage. A substrate transport pallet, wherein a connection hole provided on a back surface of a bottom plate of a connection portion of the substrate transport pallet is fitted to a connection protrusion of a stacking member . 前記無蓋箱状の連結部が平面視で逆さ凸の字状であり、
１）該逆さ凸の字状の、連結部内の上半部左右に座台を設け、
２）直方体の積重用部材を底板の表面上に装着するための連結部の底面の矩形形状と、直方体の積重用部材を座台上に装着するための面の矩形形状を同一の矩形形状とし、
Ａ）ガラス基板積載時の基板搬送用パレットを積重する際には、直方体の積重用部材を上記座台上に装着し、
Ｂ）空の基板搬送用パレットを積重する際には、直方体の積重用部材を上記底板の表面上に装着することを特徴とする請求項３記載の基板搬送用パレット。
The lidless box-like connecting part is an upside-down convex shape in plan view,
1) A seat is provided on the left and right of the upper half in the connecting portion of the inverted convex shape,
2) The rectangular shape of the bottom surface of the connecting portion for mounting the rectangular parallelepiped stacking member on the surface of the bottom plate and the rectangular shape of the surface for mounting the rectangular parallelepiped stacking member on the seat are the same rectangular shape. ,
A) When stacking the substrate transfer pallet when the glass substrate is loaded, a rectangular parallelepiped stacking member is mounted on the pedestal,
B) When stacking the empty substrate carrying pallets, claim 3 substrate conveying pallet according to a rectangular parallelepiped product duty member, characterized in that mounted on the surface of the bottom plate.
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