JP5373633B2 - カーボンナノチューブ機器及びその製造方法 - Google Patents
カーボンナノチューブ機器及びその製造方法 Download PDFInfo
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- JP5373633B2 JP5373633B2 JP2009548380A JP2009548380A JP5373633B2 JP 5373633 B2 JP5373633 B2 JP 5373633B2 JP 2009548380 A JP2009548380 A JP 2009548380A JP 2009548380 A JP2009548380 A JP 2009548380A JP 5373633 B2 JP5373633 B2 JP 5373633B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62844—Coating fibres
- C04B35/62847—Coating fibres with oxide ceramics
- C04B35/62849—Silica or silicates
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62884—Coating the powders or the macroscopic reinforcing agents by gas phase techniques
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/628—Coating the powders or the macroscopic reinforcing agents
- C04B35/62889—Coating the powders or the macroscopic reinforcing agents with a discontinuous coating layer
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5284—Hollow fibers, e.g. nanotubes
- C04B2235/5288—Carbon nanotubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
- Y10S977/743—Carbon nanotubes, CNTs having specified tube end structure, e.g. close-ended shell or open-ended tube
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24893—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including particulate material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
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- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Nanotechnology (AREA)
- Structural Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Carbon And Carbon Compounds (AREA)
- Microscoopes, Condenser (AREA)
- Chemical Vapour Deposition (AREA)
Description
Claims (16)
- カーボンナノチューブ(CNT)機器の製造方法であって、
第1熱化学気相蒸着工程を用いて基材上のCNT構造を所定長さに成長させ、第1熱CVD工程を用いて成長させられるCNT構造がグラファイトの単一又は複数壁チューブを含み、
CNT構造が第1端部及び第2端部を有し、第1端部がCNT探針を形成し、第2端部が基材の表面に付着し、
第2熱CVD工程を用いてCNT構造を覆う保護層を形成し、
保護層の制御された部分を取り除いてCNT構造の第1端部の所定長さを露出させる製造方法。 - カーボンナノチューブ(CNT)機器が原子間力顕微鏡(AFM)プローブとして形成される請求項1に記載の製造方法。
- 基材とAFMプローブの第2端部とに電位をかけ、第1端部を探針表面に融着させることを含む請求項2に記載の製造方法。
- 前記CNT構造の露出長さが高アスペクト比画像化に適している請求項1に記載の製造方法。
- 前記CNT構造の露出長さが電気化学的な目的に適している請求項1に記載の製造方法。
- 複数のCNT機器を含み、基材上の複数のCNT機器を用途に応じて配列する請求項1に記載の製造方法。
- 第1端部の所定長さが、成長中に決定される様々な形状となる請求項1に記載の製造方法。
- 前記保護層の形成が、前記基材を覆うSiO 2 層を形成させることを含む請求項1に記載の製造方法。
- 前記SiO 2 層の形成が、前記CNT及び前記基材を覆う、第2熱CVD工程を用いたオルトケイ酸テトラエチル(TEOS)の熱化学気相蒸着(CVD)を含む請求項8に記載の製造方法。
- 前記SiO 2 層の形成が、500mtorr及び725℃でオルトケイ酸テトラエチル前駆体を用いることを含む請求項9に記載の製造方法。
- 前記第1端部の所定長さを露出させるための前記保護層の一部除去が、前記保護層のエッチングを含む請求項1に記載の製造方法。
- 前記エッチングが、イオンビームエッチング、反応イオンエッチング、及びウェットエッチングのうちの少なくとも1種を含む請求項11に記載の製造方法。
- 前記エッチングが、材料の塊部分を取り除く前記イオンビームエッチングを含み、且つ、清浄をおこなう前記反応イオンエッチング及び前記ウェットエッチングのうちの少なくとも一種を含む請求項12に記載の製造方法。
- 前記基材上での前記CNTの形成が、前記基材から離れて前記CNTを形成すること、続いて前記CNTの前記第2端部を前記基材に付着させることを含む請求項1に記載の製造方法。
- 前記基材上での前記CNTの形成が、前記CNTの前記第2端部が前記基材に結合するように前記基材から前記CNTを成長させることを含む請求項1記載の製造方法。
- 前記露出長さが前記CNT機器の特定用途によって決定される請求項1に記載の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/669,037 | 2007-01-30 | ||
US11/669,037 US7601650B2 (en) | 2007-01-30 | 2007-01-30 | Carbon nanotube device and process for manufacturing same |
PCT/US2008/052231 WO2008094870A2 (en) | 2007-01-30 | 2008-01-28 | Carbon nanotube device and process for manufacturing same |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010516620A JP2010516620A (ja) | 2010-05-20 |
JP2010516620A5 JP2010516620A5 (ja) | 2011-03-24 |
JP5373633B2 true JP5373633B2 (ja) | 2013-12-18 |
Family
ID=39668338
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009548380A Active JP5373633B2 (ja) | 2007-01-30 | 2008-01-28 | カーボンナノチューブ機器及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7601650B2 (ja) |
EP (1) | EP2118637A4 (ja) |
JP (1) | JP5373633B2 (ja) |
WO (1) | WO2008094870A2 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
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US7628972B2 (en) * | 2004-10-01 | 2009-12-08 | Eloret Corporation | Nanostructure devices and fabrication method |
US7601650B2 (en) * | 2007-01-30 | 2009-10-13 | Carbon Design Innovations, Inc. | Carbon nanotube device and process for manufacturing same |
WO2008112713A1 (en) * | 2007-03-13 | 2008-09-18 | Nanoink, Inc. | Nanolithography with use of viewports |
US8081361B2 (en) * | 2007-04-11 | 2011-12-20 | Carbon Design Innovations, Inc. | Carbon nanotube signal modulator and photonic transmission device |
US7997002B2 (en) * | 2007-11-01 | 2011-08-16 | International Business Machines Corporation | Dual carbon nanotubes for critical dimension metrology on high aspect ratio semiconductor wafer patterns |
US7927905B2 (en) * | 2007-12-21 | 2011-04-19 | Palo Alto Research Center Incorporated | Method of producing microsprings having nanowire tip structures |
WO2011068999A2 (en) * | 2009-12-02 | 2011-06-09 | Carbon Design Innovations, Inc. | Carbon nanotube based composite surface enhanced raman scattering (sers) probe |
KR101265776B1 (ko) * | 2011-10-24 | 2013-05-20 | 포항공과대학교 산학협력단 | 나노 전극 및 그 제조 방법 |
CN103288033B (zh) * | 2012-02-23 | 2016-02-17 | 清华大学 | 碳纳米管微尖结构的制备方法 |
CN102530850A (zh) * | 2012-03-14 | 2012-07-04 | 哈尔滨工业大学 | 一种采用afm探针纳米刻划加工毫米尺寸微纳结构的方法 |
WO2014039509A2 (en) | 2012-09-04 | 2014-03-13 | Ocv Intellectual Capital, Llc | Dispersion of carbon enhanced reinforcement fibers in aqueous or non-aqueous media |
EP2835654A1 (en) * | 2013-08-09 | 2015-02-11 | Université de Genève | Insulator coated conductive probe and method of production thereof |
US10919220B2 (en) | 2016-03-11 | 2021-02-16 | Carbon Design Innovations, Inc. | Directed ink deposition of additive material using a needle brush |
CN114057467B (zh) * | 2021-11-29 | 2023-05-16 | 佛山欧神诺陶瓷有限公司 | 一种高强度的陶瓷砖及其制备方法 |
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US6018184A (en) * | 1998-01-22 | 2000-01-25 | Micron Technology, Inc. | Semiconductor structure useful in a self-aligned contact having multiple insulation layers of non-uniform thickness |
US6827979B2 (en) * | 1999-01-07 | 2004-12-07 | Northwestern University | Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
US6755956B2 (en) * | 2000-10-24 | 2004-06-29 | Ut-Battelle, Llc | Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires |
JP2002162337A (ja) * | 2000-11-26 | 2002-06-07 | Yoshikazu Nakayama | 集束イオンビーム加工による走査型顕微鏡用プローブ |
US6589835B2 (en) * | 2001-03-22 | 2003-07-08 | Macronix International Co., Ltd. | Method of manufacturing flash memory |
US6982519B2 (en) * | 2001-09-18 | 2006-01-03 | Ut-Battelle Llc | Individually electrically addressable vertically aligned carbon nanofibers on insulating substrates |
GB2384008B (en) * | 2001-12-12 | 2005-07-20 | Electrovac | Method of synthesising carbon nano tubes |
WO2005034206A2 (en) * | 2003-02-21 | 2005-04-14 | California Institute Of Technology | Selective functionalization of carbon nanotube tips allowing fabrication of new classes of nanoscale sensing and manipulation tools |
US20050208304A1 (en) * | 2003-02-21 | 2005-09-22 | California Institute Of Technology | Coatings for carbon nanotubes |
WO2004087570A1 (ja) * | 2003-03-31 | 2004-10-14 | Fujitsu Limited | カーボンナノチューブ製造方法 |
JP4811020B2 (ja) * | 2003-12-03 | 2011-11-09 | 旭硝子株式会社 | 空間光変調素子及び空間光変調方法 |
JP4539817B2 (ja) * | 2004-02-26 | 2010-09-08 | 国立大学法人 名古屋工業大学 | 炭素ナノ構造体の製造方法 |
US20050260355A1 (en) * | 2004-05-20 | 2005-11-24 | Jan Weber | Medical devices and methods of making the same |
US7628972B2 (en) * | 2004-10-01 | 2009-12-08 | Eloret Corporation | Nanostructure devices and fabrication method |
WO2006098026A1 (ja) * | 2005-03-17 | 2006-09-21 | Fujitsu Limited | 接続機構、半導体パッケージ、およびその製造方法 |
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US7976815B2 (en) * | 2005-10-25 | 2011-07-12 | Massachusetts Institute Of Technology | Shape controlled growth of nanostructured films and objects |
US7601650B2 (en) * | 2007-01-30 | 2009-10-13 | Carbon Design Innovations, Inc. | Carbon nanotube device and process for manufacturing same |
-
2007
- 2007-01-30 US US11/669,037 patent/US7601650B2/en active Active
-
2008
- 2008-01-28 EP EP08728424A patent/EP2118637A4/en not_active Withdrawn
- 2008-01-28 WO PCT/US2008/052231 patent/WO2008094870A2/en active Application Filing
- 2008-01-28 JP JP2009548380A patent/JP5373633B2/ja active Active
-
2009
- 2009-08-26 US US12/548,400 patent/US20100003500A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2008094870A3 (en) | 2008-10-02 |
WO2008094870A2 (en) | 2008-08-07 |
JP2010516620A (ja) | 2010-05-20 |
US20100003500A1 (en) | 2010-01-07 |
US7601650B2 (en) | 2009-10-13 |
US20080182089A1 (en) | 2008-07-31 |
EP2118637A4 (en) | 2012-10-24 |
EP2118637A2 (en) | 2009-11-18 |
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