JP5366787B2 - Continuous vertical transfer plating equipment - Google Patents

Continuous vertical transfer plating equipment Download PDF

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JP5366787B2
JP5366787B2 JP2009287777A JP2009287777A JP5366787B2 JP 5366787 B2 JP5366787 B2 JP 5366787B2 JP 2009287777 A JP2009287777 A JP 2009287777A JP 2009287777 A JP2009287777 A JP 2009287777A JP 5366787 B2 JP5366787 B2 JP 5366787B2
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plating
workpiece
auxiliary
power supply
anode
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JP2011127193A (en
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崇 小崎
裕満 堀田
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Chuo Seisakusho KK
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Chuo Seisakusho KK
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Description

本発明は、垂直な姿勢で保持したフープ材やプリント基板のような平板状のワークを連続的に搬送してめっきする、連続垂直搬送式めっき装置に関するものである。   The present invention relates to a continuous vertical conveyance type plating apparatus for continuously conveying and plating a flat workpiece such as a hoop material or a printed board held in a vertical posture.

フープ材やプリント基板のような平板状のワークを垂直に搬送してめっきする連続垂直搬送式めっき装置としては、例えば特許文献1に示されるようなものが実用化されており、ワークは上部が給電グリップにより保持され、給電グリップを通して上部から給電されている。通常めっき液の液面は給電グリップの下端とほぼ同一高さに調整されており、めっき液の液面より上になるワークの給電グリップで保持されている部分がめっきされないのは当然であるが、めっき液の液面に近いワークの上部ではめっき膜厚が薄くなる傾向があった。   As a continuous vertical conveyance type plating apparatus that vertically conveys a plate-like workpiece such as a hoop material or a printed circuit board, one as shown in Patent Document 1, for example, has been put into practical use, and the workpiece has an upper portion. It is held by a power feeding grip and is fed from above through the power feeding grip. Normally, the liquid level of the plating solution is adjusted to almost the same height as the lower end of the power supply grip, and it is natural that the part held by the power supply grip of the workpiece above the liquid level of the plating solution is not plated. In the upper part of the workpiece close to the plating solution level, the plating film thickness tended to be thin.

連続垂直搬送式めっき装置でめっきされるこのようなワークのめっきは銅めっきであることが多く、均一電着性向上のために添加剤が加えられているが、めっき液の液面に近いワークの上部では電流密度が低くなり、ワークの他の部分に比べてめっき膜厚が薄くなる傾向は解消されず、従来こうしためっきがされない部分とめっき膜厚の薄い部分は切断して廃棄されていた。これに対し、資源の有効活用、コスト削減といった観点からワークの上端近くまで均一なめっき膜厚でめっきできるようにして、廃棄部分を少なくすることが強く求められるようになっている。   The plating of such workpieces to be plated by a continuous vertical transfer plating machine is often copper plating, and additives are added to improve uniform electrodeposition, but the workpiece is close to the plating solution level. The current density is lower in the upper part of the plate, and the tendency for the plating film thickness to become thinner than other parts of the workpiece is not eliminated. Conventionally, the parts that are not plated and the parts with the thin plating film thickness are cut and discarded. . On the other hand, from the viewpoint of effective use of resources and cost reduction, there is a strong demand to reduce the number of discarded parts so that plating can be performed with a uniform plating film thickness near the upper end of the workpiece.

特開2004−277783号公報JP 2004-277783 A

以上述べたように、給電グリップを通してワークに上部から給電される連続垂直搬送式めっき装置では、めっき液の液面に近いワークの上部のめっき膜厚が薄くなり、その部分が有効に使用できないという問題があった。このめっき液の液面に近いワークの上部のめっき膜厚をワークの他の部分と均一にする方法は現在のところ実用化されておらず、そのような文献も見出すことができていない。   As described above, in the continuous vertical transfer plating machine that feeds power to the work from the top through the power supply grip, the plating film thickness on the top of the work close to the surface of the plating solution becomes thin, and that part cannot be used effectively. There was a problem. A method of making the plating film thickness of the upper part of the workpiece close to the plating solution level uniform with other parts of the workpiece has not been put into practical use at present, and such a document cannot be found.

本発明は上記の問題点を解決しようとするものであり、めっき液の液面に近いワークの上部にもワークの他の部分と均一なめっき膜厚でめっきすることができる、連続垂直搬送式めっき装置を実現することを目的とするものである。   The present invention is intended to solve the above problems, and can be plated with a uniform plating film thickness on the upper part of the work near the liquid surface of the plating solution with other parts of the work. The object is to realize a plating apparatus.

そして、本発明は上記目的を達成するために、平板状のワークを垂直な姿勢で連続的に搬送してめっきする連続垂直搬送式めっき装置において、ワークの両面の上部と対向する位置にワーク及びめっき液の液面と平行にワークの進行方向に長く延びる補助陽極を設け、補助陽極を補助直流電源装置のプラス極に接続し、補助直流電源装置のマイナス極をワークに接続し、補助直流電源装置の出力電流をアノードからワークに流れるめっき電流の1%ないし10%に設定したものである。ここにおいて、補助陽極を成型した棒材により構成した不溶性電極とすることが好ましい。 In order to achieve the above object, the present invention provides a continuous vertical transport plating apparatus for continuously transporting a plate-shaped workpiece in a vertical posture and plating it in a position facing the upper portions of both surfaces of the workpiece. Provide an auxiliary anode that extends in the direction of the workpiece in parallel with the plating solution surface, connect the auxiliary anode to the positive electrode of the auxiliary DC power supply, connect the negative electrode of the auxiliary DC power supply to the workpiece, and supply the auxiliary DC power supply. The output current of the apparatus is set to 1% to 10% of the plating current flowing from the anode to the workpiece. Here, it is preferable that the auxiliary anode is an insoluble electrode constituted by a molded rod.

上記の課題解決手段による作用は次の通りである。すなわち、ワークの上部ではアノードからのめっき電流がワークの他の部分に比べて小さくなるが、小さくなった分のめっき電流が補助陽極から流れ、ワークの上部でも充分なめっき電流が流れてめっき膜厚が薄くなることがなくなるものである。補助陽極を成型した棒材により構成した不溶性電極とした場合には、補助陽極の加工が容易で補助陽極によってアノードからのめっき電流が遮られることがなく、また、既設の連続垂直搬送式めっき装置にも容易に設けることができる利点がある。   The operation of the above problem solving means is as follows. That is, the plating current from the anode is smaller at the upper part of the work than the other parts of the work, but the reduced plating current flows from the auxiliary anode, and a sufficient plating current also flows from the upper part of the work. The thickness is never reduced. When the auxiliary anode is an insoluble electrode composed of a molded rod, the auxiliary anode is easy to process, and the auxiliary anode does not block the plating current from the anode, and the existing continuous vertical conveyance plating apparatus There is also an advantage that can be easily provided.

以上述べたように、本発明の連続垂直搬送式めっき装置は、アノードからのめっき電流がワークの他の部分に比べて小さくなるワークの上部において、小さくなった分のめっき電流が補助陽極から流れるので、ワークの上部でも充分なめっき電流が流れ、めっき膜厚が薄くなることがない効果がある。   As described above, in the continuous vertical conveyance plating apparatus of the present invention, the reduced plating current flows from the auxiliary anode in the upper part of the work where the plating current from the anode is smaller than that in the other parts of the work. Therefore, there is an effect that a sufficient plating current flows even at the upper part of the work and the plating film thickness is not reduced.

本発明の実施形態を示す要部の縦断面図である。It is a longitudinal cross-sectional view of the principal part which shows embodiment of this invention. 本発明の実施形態を示す要部の平面図である。It is a top view of the principal part which shows embodiment of this invention.

以下、本発明の実施の形態を図に基づいて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図において1はめっき槽であって、要求されるめっき厚みに応じて長さ方向の寸法が定められており、ワークWはめっき槽1の中央を搬送される。図1はワークの進行方向前方から見ためっき槽1の縦断面図、図2はめっき槽1の出口側の部分を示す平面図であり、ワークWは図1では中央部を紙面奥から手前に進行し、図2では矢印で示すように上から下へ進行する。図2では図示していないが、ワークWは複数の給電グリップ2によって保持されており、めっき槽1の上部には給電グリップ2を支持するレール3と、給電グリップ2を移動させてワークを搬送する図示しない搬送装置とが設けられている。また、図示していないが、めっき槽1の前端及び後端の側壁には従来の連続垂直搬送式めっき装置と同様の液漏れ防止装置が設けられている。   In the figure, reference numeral 1 denotes a plating tank, the dimension in the length direction is determined according to the required plating thickness, and the workpiece W is conveyed in the center of the plating tank 1. FIG. 1 is a longitudinal sectional view of the plating tank 1 as seen from the front of the workpiece in the traveling direction. FIG. 2 is a plan view showing a part on the outlet side of the plating tank 1. In FIG. The process proceeds from top to bottom as shown by the arrows in FIG. Although not shown in FIG. 2, the workpiece W is held by a plurality of power feeding grips 2. A rail 3 that supports the power feeding grip 2 and a power feeding grip 2 are moved to the upper part of the plating tank 1 to convey the workpiece. And a conveying device (not shown). Moreover, although not shown in figure, the liquid leakage prevention apparatus similar to the conventional continuous vertical conveyance type plating apparatus is provided in the side wall of the front end and rear end of the plating tank 1. FIG.

めっき槽1にはワークWに向けてめっき液を噴射する多数のノズル4、4が上下方向及びワークの進行方向に並べて設けられている。該多数のノズル4、4は内部にめっき液供給路が設けられた柱状のノズル取り付け基盤5、5に取り付けられており、ノズル取り付け基盤5、5はめっき槽1の底部から立ち上がる形で設けられている。このノズル取り付け基盤5、5にはめっき液が供給されており、めっき液はノズル取り付け基盤5、5を経てノズル4、4からワークWに向けて噴射されることになる。   The plating tank 1 is provided with a large number of nozzles 4, 4 for injecting a plating solution toward the workpiece W side by side in the vertical direction and the traveling direction of the workpiece. The large number of nozzles 4 and 4 are attached to columnar nozzle mounting bases 5 and 5 each provided with a plating solution supply path. The nozzle mounting bases 5 and 5 are provided so as to rise from the bottom of the plating tank 1. ing. A plating solution is supplied to the nozzle mounting bases 5 and 5, and the plating solution is sprayed from the nozzles 4 and 4 toward the work W through the nozzle mounting bases 5 and 5.

ノズル4、4とワークWとの間には多数の垂直方向のガイド軸6、6がワークの進行方向に並べて設けられており、各ガイド軸6、6にはそれぞれ複数のガイド円盤7、7が回転自在に軸着されている。また、ノズル取り付け基盤5、5の外側には複数のアノード8、8がワークWの進行方向に並べて設けられている。前記ノズル4、4、ノズル取り付け基盤5、5、ガイド軸6、6、ガイド円盤7、7及びアノード8、8はワークWを中心として対称に配置されており、めっき液はノズル4、4からワークWの両面に噴射される。また、ワークWはガイド円盤7、7により挟まれて振れないように誘導され、アノード8、8からめっき電流が供給される。   A large number of vertical guide shafts 6, 6 are arranged in the moving direction of the workpiece between the nozzles 4, 4 and the workpiece W, and each guide shaft 6, 6 has a plurality of guide disks 7, 7. Is rotatably mounted on the shaft. A plurality of anodes 8, 8 are arranged outside the nozzle mounting bases 5, 5 in the direction in which the workpiece W travels. The nozzles 4 and 4, the nozzle mounting bases 5 and 5, the guide shafts 6 and 6, the guide disks 7 and 7, and the anodes 8 and 8 are arranged symmetrically around the workpiece W, and the plating solution is supplied from the nozzles 4 and 4. Sprayed on both sides of the workpiece W. Further, the workpiece W is guided by the guide disks 7 and 7 so as not to swing, and a plating current is supplied from the anodes 8 and 8.

ワークW両面の上部のワークWと対向する位置には、それぞれワークWの進行方向に長い補助陽極9、9がワークW及びめっき液の液面と平行に設けられている。補助陽極9は例えばチタン材に白金めっきを施した棒状の不溶性電極とすることが好ましく、めっき液の液面から30mm以内でワークから20mmないし50mm離れた位置に設けることが好ましい。また、補助陽極9はめっき槽1の全長の3分の1以上の長さとすることが好ましい。図示したものは曲げ加工した直径6mm程度のチタン材の丸棒に白金めっきしたもので、ノズル取り付け基盤5、5に取り付けられた絶縁材からなる補助陽極保持具10、10に曲げ加工した両端が取り付けられている。   Auxiliary anodes 9, 9 that are long in the traveling direction of the workpiece W are provided in parallel to the workpiece W and the liquid surface of the plating solution, respectively, at positions facing the workpieces W on both sides of the workpiece W. The auxiliary anode 9 is preferably a rod-like insoluble electrode obtained by plating a titanium material with platinum, for example, and is preferably provided at a position within 30 mm from the surface of the plating solution and 20 mm to 50 mm away from the workpiece. Moreover, it is preferable that the auxiliary anode 9 has a length of one third or more of the entire length of the plating tank 1. The illustrated one is a platinum-plated titanium bar with a diameter of about 6 mm that has been bent. Both ends of the auxiliary anode holders 10 and 10 made of an insulating material attached to the nozzle mounting bases 5 and 5 are bent. It is attached.

アノード8、8は従来の連続垂直搬送式めっき装置と同様、ワークWの進行方向に連続するいくつかが一つの組となっており、めっき槽1の全長に対していくつかの組に分割された形となっている。アノード8、8はそれぞれの組ごとに一括して組の数と同数設けられた図示しないめっき用直流電源装置のプラス極にそれぞれ接続されている。補助陽極9はそれぞれアノード8、8の各組の長さとほぼ同じ長さのものとなっており、補助陽極9と同数設けられた図示しない補助直流電源装置のプラス極にそれぞれ接続されている。   As with the conventional continuous vertical conveyance type plating apparatus, the anodes 8 and 8 are several sets that are continuous in the moving direction of the workpiece W, and are divided into several sets with respect to the entire length of the plating tank 1. It has become a shape. The anodes 8 and 8 are respectively connected to positive electrodes of a plating DC power supply device (not shown) provided in the same number as the number of sets for each set. Each of the auxiliary anodes 9 has a length substantially the same as the length of each set of the anodes 8 and 8 and is connected to a positive electrode of an auxiliary DC power supply device (not shown) provided in the same number as the auxiliary anodes 9.

補助陽極9は各アノード8、8の組の全てに対応して設けることができ、また、アノード8、8の組の一部に対応して設けることができる。アノード8、8の組の一部に対応して設ける場合には、めっき槽1の出口側に近いアノード8、8の組に対応して設けることが好ましい。めっき用直流電源装置及び補助直流電源装置のマイナス極はいずれもレール3に接続されている。図示したものはアノード8、8を3組に分割し、補助陽極9はめっき槽1の出口側のアノード8、8の組とほぼ同じ長さとしてめっき槽1の出口側に設けたものである。   The auxiliary anode 9 can be provided corresponding to all the sets of the anodes 8 and 8, and can be provided corresponding to a part of the set of the anodes 8 and 8. When provided corresponding to a part of the set of anodes 8, 8, it is preferably provided corresponding to the set of anodes 8, 8 close to the outlet side of the plating tank 1. The negative poles of the plating DC power supply and the auxiliary DC power supply are both connected to the rail 3. In the figure, the anodes 8 and 8 are divided into three sets, and the auxiliary anode 9 is provided on the outlet side of the plating tank 1 so as to have substantially the same length as the set of the anodes 8 and 8 on the outlet side of the plating tank 1. .

したがって、この図示したものの場合、めっき用直流電源装置は3台、補助直流電源装置は1台それぞれ設けられることになる。めっき用直流電源装置及び補助直流電源装置はいずれも定電流制御されるものであり、めっき用電源装置の電流はワークWの進行に従って各組のアノード8、8と対向するワークWの面積に比例した値に設定される。また、補助直流電源装置の電流は、補助直流電源装置の電流の総和がめっき用電源装置の電流の総和の1ないし10%の範囲の値に設定され、実際にめっきをしてめっき膜厚の計測を行なった結果を見ながらワークWの上部のめっき膜厚と他の部分のめっき膜厚との差が小さくなるように調整される。   Therefore, in the case of this illustrated one, three DC power supply devices for plating and one auxiliary DC power supply device are provided. The plating DC power supply device and the auxiliary DC power supply device are both controlled at a constant current, and the current of the plating power supply device is proportional to the area of the work W facing each set of anodes 8 and 8 as the work W progresses. Is set to the specified value. Further, the current of the auxiliary DC power supply device is set such that the sum of the currents of the auxiliary DC power supply device is in a range of 1 to 10% of the total current of the power supply device for plating. The difference between the plating film thickness of the upper part of the workpiece W and the plating film thickness of the other part is adjusted while observing the measurement result.

このように構成された本発明の連続垂直搬送式めっき装置において、ワークWは従来の連続垂直搬送式めっき装置と同様に上端を給電グリップ2、2により保持され、搬送装置によって給電グリップ2、2が移動することによりめっき槽1内を搬送される。また、ノズル4、4からワークWの両面にめっき液が噴射されてめっき槽1内はめっき液で満たされる。給電グリップ2、2はレール3に支持されているので、ワークWは電気的にめっき用直流電源装置及び補助直流電源装置のマイナス極につながることになる。これによりアノード8、8を通してめっき用直流電源装置からワークW全体にめっき電流が流れ、それに加えて補助陽極9を通して補助直流電源装置からワークW上部にめっき電流が流れてワークWがめっきされることになる。   In the continuous vertical conveying plating apparatus of the present invention configured as described above, the workpiece W is held by the power feeding grips 2 and 2 similarly to the conventional continuous vertical conveying plating apparatus, and the feeding grips 2 and 2 are held by the conveying device. Is moved in the plating tank 1 by moving. Further, the plating solution is sprayed from the nozzles 4 and 4 onto both surfaces of the workpiece W, and the plating tank 1 is filled with the plating solution. Since the power feeding grips 2 and 2 are supported by the rail 3, the work W is electrically connected to the negative pole of the plating DC power supply device and the auxiliary DC power supply device. As a result, a plating current flows from the plating DC power supply device to the entire workpiece W through the anodes 8 and 8, and in addition, a plating current flows from the auxiliary DC power supply device to the upper portion of the workpiece W through the auxiliary anode 9. become.

したがって、ワークWの上部ではアノード8、8からのめっき電流に加えて補助陽極9からのめっき電流が流れ、ワークWの他の部分に比べて小さくなるアノード8、8からのめっき電流が補助陽極9からのめっき電流で補われるので、充分な電流が流れることによりワークWの上部のめっき膜厚が薄くなるということがなくなる。なお、前記実施の形態において、補助陽極をチタン材の丸棒に白金めっきしたものとしているが、角棒でもよいことは言うまでもなく、また、アノードからワークへのめっき電流を遮蔽しないような形状とすることができれば、ラス網、板等とすることも可能である。   Therefore, in addition to the plating current from the anodes 8 and 8, the plating current from the auxiliary anode 9 flows in the upper part of the work W, and the plating current from the anodes 8 and 8 that is smaller than the other parts of the work W is the auxiliary anode. 9 is compensated by the plating current from 9, the plating film thickness on the upper portion of the workpiece W is not reduced by a sufficient current flow. In the above embodiment, the auxiliary anode is platinum plated on a titanium rod, but it goes without saying that it may be a square bar and has a shape that does not shield the plating current from the anode to the workpiece. If possible, a lath net, a plate, or the like can be used.

高さ方向330mmのプリント基板を従来の連続垂直搬送式めっき装置によりめっき膜厚25μmの銅めっきをしたところ、めっき液の液面から下方30mmの範囲のめっき膜厚は23μmないし20μmであった。これに対し、直径6mmのチタン材の丸棒に白金めっきした補助陽極を、その断面中心がめっき液の液面から3mm下方でワークから30mm離れた位置に位置するようにしてめっき槽全長にわたって設け、補助陽極にめっき電流の2%の電流を流したところ、めっき液の液面から下方5mmから30mmの範囲のめっき膜厚も25μmとなった。   When a copper substrate having a plating film thickness of 25 μm was plated on a printed board having a height direction of 330 mm by a conventional continuous vertical conveyance plating apparatus, the plating film thickness in the range of 30 mm below the plating solution was 23 μm to 20 μm. On the other hand, an auxiliary anode plated with platinum on a 6 mm diameter titanium rod is provided over the entire length of the plating tank so that the center of the cross section is located 3 mm below the surface of the plating solution and 30 mm away from the workpiece. When a current of 2% of the plating current was passed through the auxiliary anode, the plating film thickness in the range from 5 mm to 30 mm below the plating solution level was also 25 μm.

1 めっき槽
2 給電グリップ
3 レール
4 ノズル
5 ノズル取り付け基盤
6 ガイド軸
7 ガイド円盤
8 アノード
9 補助陽極
10 補助陽極保持具
DESCRIPTION OF SYMBOLS 1 Plating tank 2 Feeding grip 3 Rail 4 Nozzle 5 Nozzle mounting base 6 Guide shaft 7 Guide disk 8 Anode 9 Auxiliary anode 10 Auxiliary anode holder

Claims (2)

平板状のワークを垂直な姿勢で連続的に搬送してめっきする連続垂直搬送式めっき装置において、ワークの両面の上部と対向する位置にワーク及びめっき液の液面と平行にワークの進行方向に長く延びる補助陽極を設け、補助陽極を補助直流電源装置のプラス極に接続し、補助直流電源装置のマイナス極をワークに接続し、補助直流電源装置の出力電流をアノードからワークに流れるめっき電流の1%ないし10%に設定したことを特徴とする連続垂直搬送式めっき装置。 In a continuous vertical transport plating machine that continuously transports flat workpieces in a vertical position and plating them, the workpiece is placed in a direction facing the top of both sides of the workpiece and parallel to the surface of the plating solution. A long auxiliary anode is provided, the auxiliary anode is connected to the positive electrode of the auxiliary DC power supply, the negative electrode of the auxiliary DC power supply is connected to the work, and the output current of the auxiliary DC power supply flows from the anode to the work. A continuous vertical transfer plating apparatus characterized by being set to 1% to 10%. 補助陽極を成型した棒材により構成した不溶性電極としたことを特徴とする請求項1に記載の連続垂直搬送式めっき装置。   2. The continuous vertical conveyance type plating apparatus according to claim 1, wherein the auxiliary anode is an insoluble electrode composed of a molded bar.
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JPS5628074U (en) * 1979-08-06 1981-03-16
JPS5827027U (en) * 1981-08-14 1983-02-21 日産車体株式会社 Sliding work setting device
JPS637396A (en) * 1986-06-27 1988-01-13 Fujitsu Ltd Plating device and its clamping jig
JP3062911B2 (en) * 1994-03-14 2000-07-12 富士通株式会社 Plating equipment
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