JP5304896B2 - Actuator, drive device, imaging device, and method of manufacturing actuator - Google Patents

Abstract

An actuator, a drive device, and an image-capturing device which are small sized and have sufficient amount of displacement. The actuator is provided with first and second reference sections having a fixed relative positional relationship, and also with a first movement section which moves relative to the first and second reference sections. Also, the actuator is provided with: a movable section which consists of a shape memory alloy, is bridged from the first reference section to the second reference section, is affixed to the first movement section at portions in the middle of the bridge route from the first reference section to the second reference section, and deforms in response to heat generation caused by electricity conduction; and an elastic member for applying a force in a predetermined direction to the first movement section against the tensile force by the movable section. In the actuator, the portions at which the movable section is affixed to the first movement section are separated from an imaginary plane in the direction normal to the imaginary plane, said imaginary plane being a plane which includes a straight line extending in a predetermined direction and also includes a straight line for connecting a first fixation portion of the first reference section, said first fixation portion being that to which the movable section is affixed, and a second fixation portion of the second reference section, said second fixation portion being that to which the movable section is affixed.

Description

The present invention relates to an actuator, a drive device , an imaging device , and a method for manufacturing the actuator .

  In recent years, camera modules are often mounted on small electronic devices such as mobile phones, and further miniaturization of camera modules is aimed at.

  With regard to this camera module, conventionally, a lens barrel and a lens holder that support a lens, a holder that supports an infrared (IR) cut filter, a substrate, an image sensor, and an optical element, and a housing that holds the stack. There is a need for a body and a resin for sealing the laminate. Therefore, it is not easy to produce a camera module by accurately combining a large number of components while reducing the size of the large number of components.

  Therefore, a laminated member is formed by pasting a substrate, a semiconductor sheet on which a large number of imaging elements are formed, and a lens array sheet on which a large number of imaging lenses are formed via a resin layer, and the laminated member is diced. A technique for completing individual camera modules has been proposed (for example, Patent Document 1). With this technology, it is possible to cut out several hundred camera modules from a single wafer-like laminated member, and matching with a fine processing process is also good. For this reason, it is considered that the camera module greatly contributes to miniaturization, thinning, and cost reduction.

  However, in the technique disclosed in Patent Document 1, it is difficult to dispose an actuator that forms a part (movable part) for moving the imaging lens, such as a voice coil motor, because wafer-like members are stacked. Accordingly, it has been difficult to incorporate autofocus and zoom functions into a small camera module.

  By the way, as an actuator that can be applied to a small camera module, a so-called unimorph type actuator using a piezoelectric element, a thin film actuator using a shape memory alloy (SMA) or a so-called bimetal, and the like can be considered (for example, Patent Document 2).

  Among such small actuators, an actuator using SMA can obtain a very large force even if it is small. Furthermore, since the response ratio, which is a general problem, is improved by increasing the ratio of the surface area to the volume as the SMA is miniaturized, the actuator using the SMA has good matching with a small camera module.

JP 2007-12995 A JP 2008-19751 A

  In Patent Document 2, a moving unit is disposed between two fixed units, and a plurality of SMAs are installed between one fixed unit and the moving unit and between the other fixed unit and the moving unit. An example is disclosed. Considering the application of such a configuration to a small camera module, a configuration in which a fixed portion is provided in the main body portion of the camera and a portion that supports the lens or the lens is a moving portion is conceivable.

  However, in this configuration, since the lens occupies a large space in the center of the camera module, it is difficult to set the length of the SMA installation path to be long. Therefore, it is difficult to ensure the amount of lens displacement necessary for autofocus control.

  Such a problem is common in the technology in which SMA is arranged in a limited space to move a moving object.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an actuator, a driving device, and an imaging device that are small and have a sufficient amount of displacement.

In order to solve the above problems, an actuator according to the first aspect, and beauty second reference portion Oyo first reference portion is disposed with a space interposed therebetween, the first reference portion and the second reference portion a first moving unit which relatively moves against, is composed of a shape memory alloy layer, secured to said electrode portion of the first reference portion and is bridged by the first reference portion or al the second reference portion or While being fixed to the electrode part of the second reference part, the first moving part is fixed at a fixed position in the middle of the construction path from the first reference part to the second reference part, An actuator layer having one or more movable parts that deform in response to heat generation and apply tension to the first moving part, and against the first moving part against the tension of the one or more movable parts. and an elastic layer having an elastic member for applying a force in a predetermined direction Te, before When the first moving unit is viewed in plan from the actuator layer, the first moving unit is disposed in the space between the first reference unit and the second reference unit, and the fixed portion is the first reference unit. A straight line connecting the first fixed part to which the movable part is fixed and the second fixed part of the second reference part to which the movable part is fixed, and a straight line extending in the predetermined direction. The virtual plane is separated from the virtual plane in the normal direction of the virtual plane, and the actuator layer and the elastic layer are laminated.

An actuator according to a second aspect is the actuator according to the first aspect, wherein the actuator layer includes the first reference part, the second reference part, and the first moving part, and the movable part. It is formed by laminating a layer having a portion .

The actuator according to a third aspect, an actuator according to the first or second aspect, the one or more moving parts, one which is bridged from the first reference portion to the second reference part It includes a first movable portion membranous, and a second movable part one membranous being bridged separately from the first reference portion of the second reference portion to the first movable portion, the first A moving part is included in a portion of the first movable part that is provided between the first reference part and the second reference part, and from both the first reference part and the second reference part. a first fixing portion which is fixed to the first movable portion in the fixing points that are spaced apart, are installed between the first reference portion and the second reference portion of said second movable portion The fixed portion that is included in the portion and is separated from both the first reference portion and the second reference portion It has a second fixing portion fixed to the Oite the second movable portion, and a connecting portion which connects the second fixing portion and the first fixing part.

An actuator according to a fourth aspect is the actuator according to any one of the first to third aspects, wherein the actuator layer moves relative to the first reference portion and the second reference portion. to, further comprising a second moving part which is remote from it and the first moving portion separate from the first mobile unit, each of the movable part, before Symbol the second reference portion of the first reference portion one first and fixation locations Oite the first moving part in the middle of a construction path is fixed, the second moving portion is fixed in the middle of the one erection path, said first fixation locations leading to And a second fixed location different from the above.

The actuator which concerns on a 5th aspect is an actuator which concerns on a 4th aspect, Comprising: The said 1st moving part and the said 2nd moving part are formed as a different body in the same layer.

Sixth driving apparatus according to the embodiment of the laminated actuator according to a third one of the aspects from the first, a layer having a moving object being in contact or fixed to the first moving unit, the Configured.

Seventh drive device according to embodiments of the actuator according to the fourth or fifth aspect, it is constructed by laminating a layer having a moving object being in contact or fixed to the second moving portion ing.
Drive apparatus according to an eighth aspect, there is provided a driving apparatus according to the sixth or seventh aspect, recognizes the displacement of the one or more movable portion by detecting the electrical resistance of said one or more movable portions A recognition unit is further provided.

An imaging apparatus according to a ninth aspect includes an actuator according to any one of the first to fifth aspects, a layer having an imaging element, a layer having an optical system that guides light from a subject to the imaging element, And at least one of the image sensor and the optical system is moved relative to the first reference portion and the second reference portion by deformation of the one or more movable portions. .

In the method of manufacturing the actuator according to a tenth aspect of the relative movement, the first reference portion and the second reference portion that is disposed across a space with respect to the first reference portion and the second reference portion a first moving unit which is composed of a shape memory alloy film, of the fixed to the electrode portion of the first reference portion and is bridged by the first reference portion or al the second reference section or the second reference portion In addition to being fixed to the electrode part, the first moving part is fixed at a fixed location in the middle of the installation path from the first reference part to the second reference part, and deforms in response to heat generated by energization. the actuator layer is formed with one or more movable portion that applies tension to the first moving portion Te, with respect to the first moving unit, the one or more in a predetermined direction against the tension by moving part Forming an elastic layer having an elastic member for applying force; To produce the actuator by laminating the data layer and said elastic layer, in case of forming the actuator layer, in plan view of the actuator layer, between the second reference portion and the first reference part The first moving part is arranged in the space, and further, the first fixed part where the movable part of the first reference part is fixed and the movable part of the second reference part are fixed. With reference to a virtual plane including a straight line connecting the second fixed portion and a straight line extending in the predetermined direction, the fixed portion is arranged so as to be separated from the virtual plane in the normal direction of the virtual plane. Ru is.

The actuator manufacturing method according to an eleventh aspect is the actuator manufacturing method according to the tenth aspect, wherein the actuator layer includes the first reference portion, the second reference portion, and the first moving portion. And a layer having one or more movable parts.

In the actuator manufacturing method according to the twelfth aspect, in the actuator manufacturing method according to the tenth or eleventh aspect, the electrode section is formed on a substrate that is not a conductor by coating or vapor deposition using a printing technique. The shape memory alloy film formed on the substrate by a film forming method is subjected to a heat treatment for storing the shape so as to shrink when heated at a high temperature, the one or more movable parts are formed by a photolithography method, and the substrate is etched. The first reference portion, the second reference portion, and the first moving portion are formed by processing using a method.

According to the present invention, the first reference part having the electrode part and the second reference part having the electrode part, the first moving part moving relative to the first reference part and the second reference part, and the shape memory It is made of an alloy film, and extends from the electrode part of the first reference part to the electrode part of the second reference part, and at the fixed location in the middle of the installation path from the first reference part to the second reference part. An actuator layer that is fixed to the moving part and deforms in response to heat generated by energization and applies tension to the first moving part, and resists tension by the moving part against the first moving part. an elastic layer having an elastic member for applying a force in a predetermined direction, and are stacked by the actuator is formed, FIG Ritsutsu miniaturization while securing the displacement amount, while the combination accurately multiple parts , greatly contributes Actuator to cost reduction Over motor drive unit, it is possible to provide a manufacturing method of an imaging device and the actuator.

FIG. 1 is a schematic diagram showing a schematic configuration of a mobile phone equipped with a camera module according to an embodiment. FIG. 2 is a schematic cross-sectional view focusing on the first housing according to the embodiment. FIG. 3 is a schematic plan view of a camera module according to an embodiment. FIG. 4 is a schematic cross-sectional view of a camera module according to an embodiment. FIG. 5 is a schematic cross-sectional view of a camera module according to an embodiment. FIG. 6 is a plan external view of the image sensor layer. FIG. 7 is a plan external view of the image sensor holding layer. FIG. 8 is a plan external view of the spacer layer. FIG. 9 is a plan external view of the actuator layer. FIG. 10 is a plan external view of the first and second parallel spring layers. FIG. 11 is a plan external view of the imaging lens layer. FIG. 12 is a plan external view of the lid layer. FIG. 13 is a diagram illustrating a relative arrangement relationship between the actuator layer and the lens unit. FIG. 14 is a diagram for explaining the operation of the lens unit due to the deformation of the SMA. FIG. 15 is a diagram for explaining the operation of the lens unit due to the deformation of the SMA. FIG. 16 is a diagram for explaining the functions of the first and second parallel spring layers. FIG. 17 is a diagram for explaining the functions of the first and second parallel spring layers. FIG. 18 is a flowchart illustrating an example of the manufacturing process of the camera module. FIG. 19 is a diagram for explaining a manufacturing process of the camera module. FIG. 20 is a schematic cross-sectional view of a camera module according to a modification. FIG. 21 is a schematic cross-sectional view of a camera module according to a modification. FIG. 22 is a schematic diagram illustrating a configuration example of an actuator layer according to a modification. FIG. 23 is a plan external view of an imaging lens layer according to a modification. FIG. 24 is a diagram illustrating a relative arrangement relationship between an actuator layer and a lens unit according to a modification. FIG. 25 is a diagram for explaining the operation of the actuator layer according to a modified example. FIG. 26 is a diagram illustrating a configuration for moving an image sensor according to a modification.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

<(1) Schematic configuration of mobile phone>
FIG. 1 is a schematic diagram showing a schematic configuration of a mobile phone 100 equipped with a camera module 500 according to an embodiment of the present invention. In FIG. 1 and the drawings after FIG. 1, three axes XYZ orthogonal to each other are appropriately attached in order to clarify the orientation relationship.

  As shown in FIG. 1, the mobile phone 100 is configured as a foldable mobile phone, and includes a first housing 200, a second housing 300, and a hinge part 400. Each of the first casing 200 and the second casing 300 has a plate-like substantially rectangular parallelepiped shape and serves as a casing for storing various electronic members. Specifically, the first casing 200 includes a camera module 500 and a display, and the second casing 300 includes a control unit that electrically controls the mobile phone 100 and an operation member such as a button. Have. In addition, the hinge part 400 connects the 1st housing | casing 200 and the 2nd housing | casing 300 so that rotation is possible. For this reason, the mobile phone 100 can be folded.

  In addition, the current supply driver 600, the electric resistance detection unit 700, and the contrast detection unit 800 are mounted on the first casing 200. The current supply driver 600 controls the supply of current to the shape memory alloy (SMA) film 43 (FIG. 9) of the camera module 500. The electric resistance detector 700 detects the electric resistance in the SMA film 43. The contrast detection unit 800 detects the contrast of the image signal obtained by the image sensor 11 (FIG. 4) of the camera module 500. In addition, a focusing control unit 310 is mounted on the second casing 300. The focus control unit 310 controls the amount of current supplied to the SMA film 43 via the current supply driver 600 in accordance with the input of signals from the electrical resistance detection unit 700 and the contrast detection unit 800, so that the camera module Auto focus control for adjusting the in-focus state of 500 is performed.

  FIG. 2 is a schematic cross-sectional view focusing on the first casing 200 of the mobile phone 100. As shown in FIG. 1 and FIG. 2, the camera module 500 is a small imaging device, so-called micro camera unit, having an XY cross-section of about 5 mm square and a thickness (depth in the Z direction) of about several mm. (MCU).

  Hereinafter, the configuration of the camera module 500 and the manufacturing process of the camera module 500 will be sequentially described.

<(2) Configuration of camera module>
<(2-1) Overview of camera module configuration>
FIG. 3 is a schematic plan view of the camera module 500. FIG. 4 is a schematic cross-sectional view of the camera module 500 according to the cut surface indicated by the straight line IV-IV in FIG. FIG. 5 is a schematic cross-sectional view of the camera module 500 according to the cut surface indicated by the straight line VV in FIG.

  As shown in FIGS. 4 and 5, the camera module 500 includes an imaging element layer 10, an imaging element holding layer 20, a spacer layer 30, an actuator layer 40, a first parallel spring layer 50, an imaging lens layer 60, and a second parallel. The eight layers including the spring layer 70 and the lid layer 80 are laminated in this order. Since the two adjacent layers included in the eight layers are joined by a resin such as an epoxy resin, the resin is interposed between the layers.

  Each of the layers 10 to 80 has a substantially identical rectangular shape (here, a square having a side of about 5 mm) on the surface in the ± Z direction. As will be described later, for the imaging lens layer 60, during the manufacturing of the camera module 500, for example, connecting portions 631a and 631b for connecting the fixed frame body 61 (FIG. 11) and the protruding portion 63 (FIG. 11) are provided. The fixed frame body 61 is separated from the lens unit 60U configured to include the optical lens unit 62, the projecting unit 63, and the lens holding units 64a and 64b.

  In the camera module 500, the lens unit 60 </ b> U is moved by the actuator layer 40 in the direction along the optical axis PL of the optical lens unit 62 (here, ± Z direction), so that the imaging element 11 and the lens of the imaging element layer 10 are moved. The distance from the unit 60U is changed. By changing the distance, autofocus control in which the in-focus state of the camera module 500 is adjusted is realized.

  The camera module 500 is configured in detail as follows.

  An image sensor holding layer 20 for holding the image sensor layer 10 is disposed on the upper surface (+ Z side surface) of the image sensor layer 10, and a spacer is provided on the upper surface (+ Z side surface) of the image sensor layer 20. Layer 30 is disposed. The spacer layer 30 has a function of securing a space in which the SMA film 43 of the actuator layer 40 undergoes elastic deformation when the lens unit 60U is pushed down in the −Z direction by the first and second parallel spring layers 50 and 70.

  In addition, the actuator layer 40, the first parallel spring layer 50, the imaging lens layer 60, and the second parallel spring layer 70 are stacked in this order on the upper surface of the spacer layer 30, thereby moving the optical lens unit 62. Mechanism (moving mechanism) is configured.

  In this moving mechanism, the lens holding portions 64a and 64b of the lens unit 60U are sandwiched from the ± Z direction by the first parallel spring layer 50 and the second parallel spring layer 70, so that the lens unit 60U is placed on the optical axis PL. A mechanism (parallel link mechanism) that is supported so as to be movable in the direction along it is configured. For this reason, the lens unit 60U does not tilt relative to the fixed frame 61 due to the movement in the ± Z direction. In addition, a portion (lower end portion) disposed at the −Z side end portion of the projecting portion 63 of the lens unit 60 </ b> U comes into contact with the moving member 42 supported by the SMA film 43 of the actuator layer 40. Therefore, a driving device is formed in which the lens unit 60U is moved in the direction along the optical axis PL in accordance with the deformation of the SMA film 43.

  A lid layer 80 made of a transparent material such as glass is disposed on the upper surface of the second parallel spring layer 70.

  And as above-mentioned, the eight layers 10-80 are mutually joined by adhesive agents, such as an epoxy resin, in an outer peripheral part. Therefore, the camera module 500 forms a sealed space that includes a space in which the optical lens unit 62 moves. The camera module 500 is manufactured, for example, in a clean room or a clean bench, and is maintained so that dust and dust do not enter the sealed space formed by the camera module 500. As a result, it is possible to suppress the problem that dust or dust adheres to the moving mechanism having a fine gap and the occurrence of air convection in the sealed space. As a result, variation in load on the drive mechanism is reduced, and the movement accuracy of the optical lens unit 62 is improved.

  In the camera module 500, the image sensor holding layer 20, the spacer layer 30, and the actuator layer 40 are sequentially formed from the upper surface (+ Z side surface) of the image sensor layer 10 to the upper surface of the actuator layer 40 (+ Z side surface). Holes (through-holes) CVa and CVb that pass through are provided. The inner diameters of the minute through holes CVa and CVb are set to about several tens of μm, for example. The through holes CVa and CVb are filled with a conductive material, and the imaging element layer 10 and the SMA film 43 of the actuator layer 40 are electrically connected.

<(2-2) About each functional layer>
Below, the detail of each functional layer which comprises the camera module 500 is demonstrated. 6 to 12 are configuration examples of the imaging element layer 10, the imaging element holding layer 20, the spacer layer 30, the actuator layer 40, the first and second parallel spring layers 50 and 70, the imaging lens layer 60, and the lid layer 80. FIG. For each functional layer, the −Z side surface is referred to as one main surface, and the + Z side surface is referred to as the other main surface.

<(2-2-1) Image sensor layer>
As illustrated in FIG. 6, the imaging element layer 10 is a chip including an imaging element 11 formed by, for example, a COMS sensor or a CCD sensor, a peripheral circuit thereof, and an outer peripheral portion 12 surrounding the imaging element 11. Although not shown here, wiring for applying a signal to the image sensor 11 and reading a signal from the image sensor 11 is provided on the back surface (the surface on the −Z side) of the image sensor layer 10. Various terminals for connecting are provided.

  For example, the back surface of the imaging element layer 10 is soldered by a reflow method using a solder ball, so that the imaging element layer 10, the current supply driver 600, the electric resistance detection unit 700, the contrast detection unit 800, etc. Are connected so as to be conductive or capable of transmitting and receiving data.

<(2-2-2) Image sensor holding layer>
The imaging element holding layer 20 is a chip that holds the imaging element layer 10 that is formed of a material such as a resin and attached by bonding.

Specifically, as shown in FIG. 7, an opening 20H having a substantially square cross section is provided along the Z direction at a substantially center of the image sensor holding layer 20, and the cross section of the opening 20H goes to the + Z side. It gets smaller as Note that the quadrangle drawn with a broken line in FIG. 7 indicates the outer edge of the opening 20H on the surface on the −Z side. In addition, minute holes (through holes) CV _2a and CV _2b penetrating along the Z direction are provided at two predetermined positions located in the vicinity of two opposing corners of the outer peripheral portion of the image sensor holding layer 20. The through holes CV _2a and CV _2b are filled with a conductive material. The opening 20H and the through holes CV _2a and CV _2b are formed by, for example, embossing.

  Furthermore, one main surface and the other main surface of the image sensor holding layer 20 are substantially flat, and the one main surface and the other main surface are in a substantially parallel relationship. One main surface of the outer peripheral portion of the image sensor holding layer 20 is bonded to the adjacent image sensor layer 10, and the other main surface of the outer peripheral portion is bonded to the adjacent spacer layer 30.

<(2-2-3) Spacer layer>
The spacer layer 30 is a chip that is formed of, for example, a material such as resin and secures a moving space for the lens unit 60U.

Specifically, as shown in FIG. 8, each of the outer edge and the inner edge has an annular shape having a rectangular shape, and has a hollow portion 30 </ b> H penetrating in the Z direction. Similarly to the image sensor holding layer 20, minute holes (through holes) CV _3a , CV penetrating along the Z direction are provided at two predetermined positions located near the two corners facing the spacer layer 30. _3b is provided, and the through holes CV _3a and CV _3b are filled with a conductive material. The hollow portion 30H and the through holes CV _3a and CV _3b are formed by, for example, embossing.

  Further, one main surface and the other main surface of the spacer layer 30 are substantially flat, and the one main surface and the other main surface are in a substantially parallel relationship. Then, one main surface of the spacer layer 30 is bonded to the adjacent image sensor holding layer 20, and the other main surface is bonded to the adjacent actuator layer 40.

<(2-2-4) Actuator layer>
As shown in FIG. 9, the actuator layer 40 includes a fixed frame 41, a moving member 42, an SMA film 43, and electrode portions 44a and 44b.

  The fixed frame 41 is a plate-like member formed of a material that is not a conductor, such as silicon. The fixed frame body 41 has an annular shape in which the outer edge and the inner edge are each rectangular, and has a hollow portion 41H penetrating in the Z direction. From another viewpoint, the fixed frame 41 includes plate-like portions (plate-like portions) 411 and 413 that extend in the Y direction and face each other, and plates that extend in the X direction and face each other. Shaped portions (plate-like portions) 412 and 414. The fixed frame 41 has a shape such that the four plate-like portions 411 to 414 are connected in this order.

  In the fixed frame body 41, a portion where the plate-like portion 411 and the plate-like portion 414 are connected protrudes toward the hollow portion 41H, and a portion where the plate-like portion 412 and the plate-like portion 413 are connected is provided. It protrudes toward the hollow portion 41H. The fixed frame 41 constitutes the outer peripheral portion of the camera module 500 and functions as a fixing member in the camera module 500.

In addition, the imaging element holding layer 20 and the spacer layer 30 are provided at a total of two locations, that is, a portion where the plate-like portion 411 and the plate-like portion 414 are connected and a portion where the plate-like portion 412 and the plate-like portion 413 are connected. In the same manner as described above, minute holes (through holes) CV _4a and CV _4b penetrating along the Z direction are provided, and the through holes CV _4a and CV _4b are filled with a conductive material. Here, the through holes CV _4a and CV _4b and the hollow portion 41H are formed by various etchings or the like.

Here, the conductive material filled in the through hole CV _4a is electrically connected to the conductive material filled in the through holes CV _2a and CV _3a , and the conductive material filled in the through hole CV _4b is the through hole CV. _2b and CV _3b are electrically connected to the conductive material filled. Specifically, the through hole CVa is formed by the through holes CV _{2a to} CV _4a , and the through hole CVb is formed by the through holes CV _{2b to} CV _4b . The through holes CVa and CVb are filled with a conductive material, whereby through wirings are formed. The imaging element layer 10 and the actuator layer 40 are electrically connected by the through wiring. The electrical connection between the imaging element layer 10 and the actuator layer 40 can also be realized by providing wiring on the side surface of the camera module 500 using a printing technique or the like.

  The electrode portion 44a is mainly provided on the other main surface of the portion protruding to the hollow portion 41H side in the portion where the plate-like portion 411 and the plate-like portion 414 are connected. The electrode portion 44b is mainly provided on the other main surface of the portion protruding toward the hollow portion 41H among the portions where the plate-like portion 412 and the plate-like portion 413 are connected. Here, the electrode portion 44a is provided on the other main surface of the through hole CV4a, and the electrode portion 44b is provided on the other main surface of the through hole CV4b.

  Similar to the fixed frame 41, the moving member 42 is a plate-like member formed of a material that is not a conductor, such as silicon. The moving member 42 is disposed in the hollow portion 41 </ b> H so as to be separated from the fixed frame body 41, and is provided to be movable relative to the fixed frame body 41. The moving member 42 has a plate-like form, and includes an annular portion 421, relay portions 422a and 422b, and plate-like portions 423a and 423b.

  The annular portion 421 has an annular shape in which the outer edge and the inner edge are substantially circular, respectively, and has a hollow portion 42H penetrating in the Z direction. The relay portion 422a is a plate-like portion that is disposed in the vicinity of a portion where the plate-like portion 411 and the plate-like portion 412 are connected, and has a rectangular outer edge. The relay portion 422b is a plate-like portion that is disposed in the vicinity of a portion where the plate-like portion 413 and the plate-like portion 414 are connected, and has a rectangular outer edge like the relay portion 422a. The plate-like portion 423a is a portion that connects the annular portion 421 and the relay portion 422a. The plate-like portion 423b is a portion that connects the annular portion 421 and the relay portion 422b. As described above, in the moving member 42, the relay portion 422a and the relay portion 422b are connected by the connecting portion configured in the order of the plate-like portion 423a, the annular portion 421, and the plate-like portion 423b.

  The SMA film 43 is configured using a shape memory alloy (SMA). This SMA film | membrane 43 has the 1st movable part 43a and the 2nd movable part 43b. The first movable portion 43a includes a first beam portion 431 and a second beam portion 432, and the second movable portion 43b includes a third beam portion 433 and a fourth beam portion 434. That is, the SMA film 43 has a configuration in which the first beam portion 431, the second beam portion 432, the third beam portion 433, and the fourth beam portion 434 are annularly connected in this order.

  Specifically, one end portion of the first beam portion 431 is electrically connected to the electrode portion 44a by being fixed on the other main surface of the electrode portion 44a. The first beam portion 431 extends in the direction along the Y axis, and the other end portion of the first beam portion 431 is fixed on the other main surface of the relay portion 422a and the second beam portion 432 is provided. It is electrically connected to the other end portion. Moreover, the one end part of the 2nd beam part 432 is electrically connected with respect to the electrode part 44b by being fixed on the other main surface of the electrode part 44b. The second beam portion 432 extends in a direction along the X axis, and the other end portion of the second beam portion 432 is fixed on the other main surface of the relay portion 422a, and the first beam portion 431 is provided. It is electrically connected to the other end portion.

  That is, one end of the first movable portion 43a is fixed to a portion in the vicinity of the inner edge of the corner of the fixed frame body 41 via the electrode portion 44a, and the other end of the first movable portion 43a is interposed via the electrode portion 44b. The fixed frame body 41 is fixed to a portion in the vicinity of the inner edge of the corner portion, and the substantially central portion of the first movable portion 43a is fixed to the other main surface of the relay portion 422a. That is, the 1st movable part 43a is fixed with respect to the relay part 422a in the location (it is also called a to-be-fixed location) in the middle of the construction path | route from the electrode part 44a to the electrode part 44b. In other words, the first movable portion 43a is fixed to the electrode portion 44a, the moving member 42, and the electrode portion 44b in this order, so that the first movable portion 43a is a fixed frame on which the electrode portion 44a is provided. It is constructed between a portion in the vicinity of the inner edge of the corner of the body and a portion in the vicinity of the inner edge of the corner of the fixed frame provided with the electrode portion 44b. Thereby, the moving member 42 is supported by the 1st movable part 43a.

  Here, the relay portion 422a as a portion of the moving member 42 to which the first movable portion 43a is fixed, the portion of the electrode portion 44a to which the first movable portion 43a is fixed, and the portion of the electrode portion 44b. It arrange | positions in the position which remove | deviated from the straight line (it also calls a 1st straight line) which connects the part to which the 1st movable part 43a is fixed. More specifically, an imaginary plane (also referred to as a first imaginary plane) including a first straight line and a straight line extending in a predetermined direction (here, the −Z direction) is used as a reference, and the first movable portion 43a has a reference. The to-be-fixed location currently fixed to the relay part 422a is spaced apart from this 1st virtual plane in the direction (it is also called a normal line direction) along the normal line of this 1st virtual plane. And the attitude | position of the 1st movable part 43a is controlled by the construction form via the moving member 42 in the state constructed in L shape seeing from the other main surface side.

  Due to the restriction of the shape of the first movable part 43a by the moving member 42, the length of the construction path of the first movable part 43a between the electrode part 44a and the electrode part 44b is the first movable part of the electrode part 44a. The distance between the portion where the portion 43a is fixed and the portion of the electrode portion 44b where the first movable portion 43a is fixed is set to be relatively longer.

  Here, the relative positional relationship between the electrode portion 44a as the first reference portion and the electrode portion 44b as the second reference portion is fixed.

  In addition, one end portion of the third beam portion 433 is electrically connected to the electrode portion 44b by being fixed on the other main surface of the electrode portion 44b. The third beam portion 433 extends in a direction along the Y axis, and the other end portion of the third beam portion 433 is fixed on the other main surface of the relay portion 422b, and the fourth beam portion 434 is provided. It is electrically connected to the other end portion. In addition, one end of the fourth beam portion 434 is electrically connected to the electrode portion 44a by being fixed on the other main surface of the electrode portion 44a. The fourth beam portion 434 extends in the direction along the X axis, and the other end portion of the fourth beam portion 434 is fixed on the other main surface of the relay portion 422b, and the third beam portion 433 is provided. It is electrically connected to the other end portion.

  That is, one end of the second movable portion 43b is fixed to a portion near the inner edge of the corner portion of the fixed frame 41 via the electrode portion 44a, and the other end of the second movable portion 43b is interposed via the electrode portion 44b. The fixed frame body 41 is fixed to a portion near the inner edge of the corner portion, and the substantially central portion of the second movable portion 43b is fixed to the other main surface of the relay portion 422b. That is, the 2nd movable part 43b is fixed with respect to the relay part 422b in the location (it is also called a to-be-fixed location) in the middle of the construction path | route from the electrode part 44a to the electrode part 44b. In other words, the second movable portion 43b is fixed to the electrode portion 44a, the moving member 42, and the electrode portion 44b in this order, so that the second movable portion 43b is a fixed frame provided with the electrode portion 44a. It is constructed between a portion in the vicinity of the inner edge of the corner of the body and a portion in the vicinity of the inner edge of the corner of the fixed frame provided with the electrode portion 44b. Thereby, the moving member 42 is supported by the 2nd movable part 43b.

  Here, the relay part 422b as the part to which the second movable part 43b of the moving member 42 is fixed is the same as the part of the electrode part 44a to which the second movable part 43b is fixed and the electrode part 44b. It arrange | positions in the position which remove | deviated from the straight line (it also calls a 2nd straight line) which ties the part to which the 2nd movable part 43b is fixed. More specifically, a virtual plane (also referred to as a second virtual plane) including the second straight line and a straight line extending in a predetermined direction (here, the −Z direction) is used as a reference, and the second movable portion 43b The to-be-fixed location currently fixed to the relay part 422b is spaced apart from this 2nd virtual plane in the direction (it is also called a normal line direction) along the normal line of this 2nd virtual plane. And the attitude | position of the 2nd movable part 43b is controlled by the installation form via the moving member 42 in the state installed in L shape seeing from the other main surface side.

  Due to the restriction of the shape of the second movable part 43b by the moving member 42, the length of the construction path of the second movable part 43b between the electrode part 44a and the electrode part 44b is the second movable part of the electrode part 44a. The distance between the portion where the portion 43b is fixed and the portion where the second movable portion 43b of the electrode portion 44b is fixed is set to be relatively longer.

  In the actuator layer 40 having such a configuration, a voltage is applied between the electrode portion 44a and the electrode portion 44b by applying a voltage from the outside to the through wirings of the through holes CVa and CVb. A current flows through the film 43. At this time, the first and second movable portions 43a and 43b generate heat due to Joule heat, and the first and second movable portions 43a and 43b are deformed according to the generated heat. As a result of the deformation, the moving member 42 moves relative to the fixed frame 41 provided with the electrode portions 44a and 44b. The movement of the moving member 42 due to the deformation of the first and second movable parts 43a and 43b will be further described later.

  Further, the one main surface and the other main surface of the fixed frame 41 are substantially flat, and the one main surface and the other main surface are in a substantially parallel relationship. Then, one main surface of the fixed frame body 41 is bonded to the adjacent spacer layer 30, and the other main surface is bonded to the fixed frame body 51 (FIG. 10) of the adjacent first parallel spring layer 50. In addition, between the actuator layer 40 and the first parallel spring layer 50, a resin or the like used for bonding is interposed, so that the electrode portions 44a and 44b and the SMA film 43 and the first parallel spring layer 50 are interposed. It is configured so as not to cause a short circuit. However, from the viewpoint of preventing a short circuit between the electrode portions 44a and 44b and the SMA film 43 and the first parallel spring layer 50, the first parallel spring layer 50 of the other main surface of the actuator layer 40 is joined. It is preferable that an insulating film is formed on the portion.

<(2-2-5) First and second parallel spring layers>
Since the first and second parallel spring layers 50 and 70 have the same configuration, the first parallel spring layer 50 will be specifically described here as an example.

  As shown in FIG. 10, the first parallel spring layer 50 is an elastic member having a fixed frame 51 and an elastic portion 52, and is a layer (elastic layer) that forms a spring mechanism. As a material of the first parallel spring layer 50, for example, a metal material such as stainless steel, phosphor bronze, or the like is employed.

  The fixed frame 51 constitutes the outer peripheral portion of the first parallel spring layer 50.

  The elastic portion 52 includes connection portions 51a and 51b with the fixed frame 51 and joint portions 52a and 52b with the lens unit 60U, and the connection portions 51a and 51b and the joint portions 52a and 52b are plate-like members 50EB. Connected with The first parallel spring layer 50 is bonded to the lens holding portions 64a and 64b of the lens unit 60U at the bonding portions 52a and 52b. Here, the projecting portion 63 of the lens unit 60 </ b> U passes through the hollow portion formed inside the elastic portion 52 without contacting the first parallel spring layer 50, and other than the annular portion 421 of the actuator layer 40. Abuts against the main surface.

  As the lens unit 60U is moved in the + Z direction with respect to the fixed frame 51, the positions of the connecting portions 51a and 51b and the joint portions 52a and 52b in the Z direction are shifted, and the plate member 50EB is bent and deformed (deflection). Deformation) and bends. That is, the first parallel spring layer 50 can be elastically deformed in the optical axis direction (± Z direction) of the optical lens portion 62 by elastic deformation of the plate-like member 50EB, and functions as a spring mechanism.

  Further, one main surface and the other main surface of the fixed frame 51 are each configured to be substantially flat, and the one main surface and the other main surface are configured to be substantially parallel to each other. Then, one main surface of the fixed frame 51 is joined to the fixed frame 41 of the adjacent actuator layer 40, and the fixed frame 61 of the imaging lens layer 60 where the other main surface of the fixed frame 51 is adjacent (FIG. 11). It is joined with one main surface.

  Incidentally, as shown in FIG. 10, the second parallel spring layer 70 has a fixed frame body 51, an elastic portion 52, connection portions 51 a and 51 b, joint portions 52 a and 52 b, as compared with the first parallel spring layer 50. The plate-like member 50EB is changed to a fixed frame 71, an elastic portion 72, connection portions 71a and 71b, joint portions 72a and 72b, and a plate-like member 70EB each having the same configuration. That is, the second parallel spring layer 70 is also a layer (elastic layer) forming a spring mechanism. However, in the second parallel spring layer 70, one main surface of the fixed frame 71 is joined to the other main surface of the fixed frame 61 (FIG. 11) of the adjacent imaging lens layer 60, and the other main surface of the fixed frame 71. The surface is bonded to one main surface of the outer peripheral portion of the adjacent lid layer 80.

<(2-2-6) Imaging lens layer>
As shown in FIG. 11, the imaging lens layer 60 includes a fixed frame body 61 and a lens unit 60U. Examples of the material constituting the imaging lens layer 60 include phenolic resins and acrylic resins.

  The fixed frame 61 constitutes the outer peripheral portion of the imaging lens layer 60, and has a thickness corresponding to the thickness of the lens unit 60U in the Z direction. Specifically, the fixed frame 61 has an annular shape in which the outer edge and the inner edge are each rectangular, and has a hollow portion 60H penetrating in the Z direction. The one main surface and the other main surface of the fixed frame 61 are configured to be substantially flat, and the one main surface and the other main surface are configured to be substantially parallel to each other. Then, one main surface of the fixed frame body 61 is joined to the other main surface of the fixed frame body 51 of the adjacent first parallel spring layer 50, and the other main surface of the fixed frame body 61 is adjacent to the second parallel spring layer 70. It is joined to one main surface of the fixed frame 71.

  The lens unit 60U is disposed in the hollow portion 60H and includes an optical lens portion 62, a projecting portion 63, and lens holding portions 64a and 64b.

  The optical lens unit 62 is an optical system that guides light from a subject to the image sensor 11 and has positive lens power.

Projecting portion 63 is et provided to the side of the periphery of the optical lens portion 62 has a substantially cylindrical shape around axis the optical axis of the optical lens unit 62. One main surface of the projecting portion 63 abuts on the annular portion 421 of the moving member 42.

  In this manner, the protruding unit 63 causes the lens unit 60U, which is a moving object, to abut against the moving member 42 that is moved by the first and second movable parts 43a and 43b. One main surface of the protruding portion 63 may be fixed to the annular portion 421 with an adhesive or the like.

  The lens holding portion 64 a is a portion that protrudes along the diagonal line of the fixed frame 61 from the side surface of the protruding portion 63. The front end portion of the lens holding portion 64a has a shape protruding in each of the + Z direction and the −Z direction, and one main surface and the other main surface of the front end portion are configured to be substantially flat, and the one main surface and the other The main surface is configured substantially parallel. Then, one main surface of the tip portion of the lens holding portion 64a is bonded to the bonding portion 52a of the first parallel spring layer 50, and the other main surface of the tip portion of the lens holding portion 64a is the second parallel spring layer 70. It joins with respect to the joining part 72a.

  The lens holding portion 64 b is a portion that protrudes along the diagonal line of the fixed frame 61 from the side surface of the protruding portion 63 that is substantially opposite to the surface on which the lens holding portion 64 a is protruded. Similar to the lens holding portion 64a, the tip portion of the lens holding portion 64b has a shape protruding in each of the + Z direction and the −Z direction, and one main surface and the other main surface of the tip portion are configured to be substantially flat. The one main surface and the other main surface are configured to be substantially parallel. Then, one main surface of the tip portion of the lens holding portion 64b is bonded to the bonding portion 52b of the first parallel spring layer 50, and the other main surface of the tip portion of the lens holding portion 64b is the second parallel spring layer 70. Are joined to the joint 72b.

  For the imaging lens layer 60, for example, when the lens holding portions 64a and 64b are joined to the second parallel spring layer 70, the connecting portions 631a and 631b (FIG. 11) drawn in broken lines are femtoseconds. The fixed frame 61 and the lens unit 60U are separated by cutting with a laser or the like.

<(2-2-7) Lid layer>
As shown in FIG. 12, the lid layer 80 is a plate-like member having a board surface whose outer edge in the XY section is substantially square and substantially parallel to the XY plane. The lid layer 80 is made of a transparent material such as a resin, plays a role of introducing light from the subject into the camera module 500, and seals the inside of the camera module 500 so that the inside of the camera module 500 is sealed. It plays a role to prevent dust and dust from entering. In addition, one main surface of the outer peripheral portion of the lid layer 80 is joined to the fixed frame 71 of the second parallel spring layer 70.

<(2-3) Movement of lens unit>
FIG. 13 is a schematic diagram showing a relative arrangement relationship between the actuator layer 40 and the lens unit 60U. FIG. 13 shows a configuration focusing on the actuator layer 40 and only the lens unit 60U of the imaging lens layer 60, and other layers such as the first and second parallel spring layers 50 and 70 are as follows. The illustration is omitted.

  As shown in FIG. 13, the actuator layer 40 has a pair of movable parts (specifically, first and second movable parts 43 a and 43 b) across the optical axis of the optical lens part 62. In the first movable portion 43a, the first beam portion 431 and the second beam portion 432 are electrically connected in series, and in the second movable portion 43b, the third beam portion 433 and the fourth beam portion 434 are connected. In addition to being electrically connected in series, the first and second movable parts 43a and 43b are electrically connected in parallel between the electrode part 44a and the electrode part 44b.

  Further, as shown in FIG. 13, a power source PW is connected between the electrode portions 44a and 44b from the outside, and the electrode portion 44a and the electrode portion 44b are connected according to the opening / closing of the switch SW in the current supply driver 600. A voltage is applied between them. Thereby, each movable part 43a, 43b is heated by generation | occurrence | production of the Joule heat by electricity supply, and deform | transforms in the direction which becomes flat. Moreover, each movable part 43a, 43b deform | transforms so that a center part may be pushed down by being cooled (here air cooling) from the state heated by completion | finish of electricity supply. The deformation of each of the movable parts 43a and 43b and the movement of the lens unit 60U will be specifically described below.

  14 and 15 are schematic views for explaining the operation of the lens unit 60U due to the deformation of the SMA film 43. FIG. 14 and 15 show a configuration in which attention is paid to the actuator layer 40, the first parallel spring layer 50, and the lens unit 60U.

  As shown in FIGS. 14 and 15, the protruding portion 63 of the lens unit 60 </ b> U comes into contact with the moving member 42 supported by the first and second movable portions 43 a and 43 b.

  Here, in a state where the first and second movable parts 43a and 43b are not heated by energization (non-driven state), as shown in FIG. 14, the plate-like shape of the first and second parallel spring layers 50 and 70 is obtained. Due to the elastic force of the members 50EB and 70EB becoming flat, a force to push down the lens unit 60U in the −Z direction is applied. At this time, when the moving member 42 is pushed down in the −Z direction by the protruding portion 63, the substantially central portions of the first and second movable portions 43a and 43b are pushed down in the −Z direction by the relay portions 422a and 422b. The first and second movable parts 43a and 43b bend. That is, the first and second parallel spring layers 50 and 70 are directed to the moving member 42 in a predetermined direction (here, the resistance against the tension by the first and second movable portions 43a and 43b via the lens unit 60U. -Z direction). At this time, the actuator layer 40 is precharged by the first and second parallel spring layers 50 and 70.

  Further, when the first and second movable parts 43a and 43b are shifted from the non-driven state to a state where the first and second movable parts 43a and 43b are heated by energization (drive state), as shown in FIG. 43b is deformed from a bent state to a flattened direction. That is, the first and second movable parts 43a and 43b are deformed so as to reduce the amount of bending. At this time, a force that pushes up the lens unit 60U by the first and second movable portions 43a and 43b against the elastic force of the plate-like members 50EB and 70EB is applied, and the lens unit 60U moves in the + Z direction.

  Further, when the first and second movable parts 43a, 43b are shifted from the driving state to a state where the first and second movable parts 43a, 43b are not heated by energization (non-driving state), the position of the lens unit 60U is the original position shown in FIG. Return to position.

Here, in the non-driving state, if the substantially central portions of the first and second movable portions 43a and 43b are pushed down by the distance δ _{0 in the} −Z direction, in the driving state, the optical axis of the optical lens portion 62 is aligned. Accordingly, it is possible to move the lens unit 60U in the + Z direction within a range up to the distance δ ₀ with reference to the initial position.

  As described above, in the actuator layer 40, the first movable portion 43 a is not installed in a substantially linear shape, but sequentially in the direction along the inner edge of the plate-like portion 411 and the inner edge of the plate-like portion 412 of the fixed frame 41. By being installed, it is installed in an L-shape, and the second movable portion 43b is not installed in a substantially linear shape, but in a direction along the inner edge of the plate-like portion 413 and the inner edge of the plate-like portion 414 of the fixed frame body 41. It is erected in an L shape by being erected sequentially.

Thereby, in the limited space in the hollow portion 41H of the actuator layer 40, the installation path of the first and second movable parts 43a and 43b becomes longer than the case where the movable part is simply installed in a straight line. . For this reason, an increase in the distance δ ₀ that can push down the substantially central part of the first and second movable parts 43a, 43b in the −Z direction while elastically deforming the first and second movable parts 43a, 43b is achieved. It is done. As a result, it is possible to increase the distance by which the lens unit 60U that is the moving object can be displaced along the Z axis.

Further, if the installation path of the first and second movable parts 43a and 43b becomes longer, the force required to push the distance δ ₀ downward in the −Z direction by approximately the center part of the first and second movable parts 43a and 43b is reduced. I'll do it. For this reason, the rigidity of the structure (here, the fixed frame 41 and the like) to which both ends of the first and second movable parts 43a and 43b are fixed can be reduced. As a result, the camera module 500 can be reduced in size and weight.

  16 and 17 are schematic views for explaining the functions of the first and second parallel spring layers 50 and 70. FIG. 16 and 17 are schematic views of the lens unit 60U and the elastic portions 52 and 72 as viewed from the side. As shown in FIGS. 16 and 17, the elastic portions 52 and 72 are joined to the lens unit 60U at the joint portions 52a, 52b, 72a, and 72b, respectively, thereby sandwiching the lens unit 60U. FIG. 16 shows a state where the elastic portions 52 and 72 are hardly deformed (initial state), and FIG. 17 shows a state where the elastic portions 52 and 72 are deformed to some extent (deformed state). Yes.

  As described above, the elastic portions 52 and 72 have the same configuration, and are similarly fixed to the fixed frame bodies 51 and 71 at two locations (connection portions 51a and 51b and connection portions 71a and 71b). Is done. Similarly, the elastic portions 52 and 72 are joined to the lens unit 60U at two locations (joining portions 52a and 52b and joining portions 72a and 72b).

  Then, due to the deformation of the first and second movable parts 43a and 43b, as shown in FIG. 17, when the lens unit 60U is pushed up in the + Z direction, the elastic parts 52 and 72 undergo substantially the same deformation. For this reason, the optical lens unit 62 included in the lens unit 60U moves in the vertical direction (here, the direction along the Z axis) without the optical axis being inclined. That is, the distance between the optical lens unit 62 and the image sensor 11 is changed without shifting the direction of the optical axis of the optical lens unit 62. As a result, the distance between the image sensor 11 and the optical lens unit 62 is changed, and autofocus control for performing focus adjustment is executed.

<(2-4) Autofocus control in camera module>
The autofocus control in the camera module 500 is realized by the current supply driver 600, the electric resistance detection unit 700, the contrast detection unit 800, and the focus control unit 310 shown in FIG.

  Specifically, the electrical resistance detection unit 700 detects the electrical resistance of the SMA film 43 and outputs a signal indicating the electrical resistance to the focusing control unit 310. The focusing control unit 310 detects deformation of the SMA film 43 (specifically, displacement of the central portions of the first and second movable parts 43a and 43b) based on the electrical resistance of the SMA film 43. That is, the electrical resistance detection unit 700 and the focus control unit 310 detect the electrical resistances related to the first and second movable parts 43a and 43b, so that the displacements related to the first and second movable parts 43a and 43b are changed. Be recognized. And here, the displacement of the center part of the 1st and 2nd movable parts 43a and 43b turns into the displacement of the lens unit 60U.

  Regarding the detection of the displacement of the central part of the first and second movable parts 43a, 43b, the relationship between the shape and the electrical resistance in the SMA film 43 (specifically, the first and second movable parts 43a, 43b) is unambiguous. Is determined and used. With such a configuration, the displacement relating to the first and second movable parts 43a and 43b is easily detected.

  Here, the focus control unit 310 controls the supply of current to the SMA film 43 via the current supply driver 600 while detecting the displacement of the central portions of the first and second movable units 43a and 43b. Thus, the deformation amount of the first and second movable parts 43a and 43b, that is, the displacement of the central part of the first and second movable parts 43a and 43b is controlled. At this time, the moving member 42 is pulled up by the central portion, and the lens unit 60U is pushed up by the moving member 42. Then, when the lens unit 60U is moved in the + Z direction, the separation distance between the optical lens unit 62 and the image sensor 11 is changed, and the focus position is changed.

  Further, the contrast detection unit 800 detects the contrast of the image signal obtained by the image sensor 11. For example, a numerical value obtained by accumulating differences in gradation values between adjacent pixels for the entire image is detected as an evaluation value indicating contrast. A signal indicating the evaluation value indicating the contrast is output to the focus control unit 310.

  When autofocus control is performed, first, the separation distance between the lens unit 60U and the image sensor 11 is sequentially set to a preset multi-step separation distance under the control of the focusing control unit 310, and each separation distance is set. An image signal is acquired by the imaging device 11 in a state where the lens unit 60U and the imaging device 11 are set to the distance. In other words, the extension position of the lens unit 60U in the + Z direction is set to a preset multi-stage position, and an image signal is output by the imaging device 11 at the time when the lens unit 60U is disposed at each extension position. To be acquired. At this time, the focus control unit 310 controls the supply of current to the SMA film 43 via the current supply driver 600 while monitoring the electrical resistance of the SMA film 43 detected by the electrical resistance detection unit 700. Thus, the feeding position of the lens unit 60U is changed.

  Next, the focus control unit 310 detects a feeding position at which the evaluation value indicating the contrast is maximum based on the evaluation value indicating the contrast detected for each feeding position by the contrast detection unit 800. The state in which the lens unit 60U is disposed at the extended position where the evaluation value indicating the contrast is maximum corresponds to the state in which the subject is in focus. Then, under the control of the focus control unit 310, the lens unit 60U is moved to the extended position where the evaluation value indicating the contrast is maximized, thereby achieving focusing on the subject in the camera module 500. That is, autofocus control is realized.

<(3) Camera module manufacturing process>
FIG. 18 is a flowchart illustrating the procedure of the manufacturing process of the camera module 500. As shown in FIG. 18, (Process A) preparation of a plurality of sheets (Step S1), (Process B) joining of a plurality of sheets (Step S2), and (Process C) dicing (Step S3) are sequentially performed. As a result, the camera module 500 is manufactured. Hereinafter, each step will be described.

<(3-1) Preparation of a plurality of sheets (Process A)>
As shown in FIG. 19, the imaging element layer sheet U10, the imaging element holding layer sheet U20, the spacer layer sheet U30, the actuator layer sheet U40, the first parallel spring layer sheet U50, the imaging lens layer sheet U60, the second parallel spring layer. A sheet U70 and a lid layer sheet U80 are prepared. Here, an example in which each sheet has a disk shape will be described.

  The imaging element layer sheet U10 is a sheet in which a large number of chips corresponding to the imaging element layer 10 are formed in a matrix-like predetermined arrangement. The imaging element layer sheet U10 is manufactured, for example, by forming the imaging element 11 and various circuits on a disk-shaped silicon substrate.

The imaging element holding layer sheet U20 is a sheet in which a large number of chips corresponding to the imaging element holding layer 20 are formed in a matrix-like predetermined arrangement. The image pickup element holding layer sheet U20, for example, with respect to the material disc-like wafer which is formed by a resin or the like, the opening 20H and the through hole CV _2a by embossing or the like, CV _2b is formed, the through hole CV _2a , CV _2b is manufactured by being filled with a conductive material by metal plating or the like.

The spacer layer sheet U30 is a sheet in which a large number of chips corresponding to the spacer layer 30 are formed in a matrix-like predetermined arrangement. In the spacer layer sheet U30, for example, a hollow portion 30H and through holes CV _3a and CV _3b are formed by stamping or the like on a disk-shaped wafer formed of a material such as a resin, and the through holes CV _3a , The CV _3b is manufactured by being filled with a conductive material by metal plating or the like.

The actuator layer sheet U40 is a sheet in which a large number of chips corresponding to the actuator layer 40 are formed in a matrix-like predetermined arrangement. The actuator layer sheet U40, for example, the following step (I) ~ (VII I) is manufactured by sequentially performed.

(I) A silicon substrate is prepared. (II) Through holes CV4a and CV4b are formed in the silicon substrate by etching or the like using a photolithography technique. The through holes CV _4a and CV _4b may be formed by etching such as DRIE (Deep Reactive Ion Etching). (III) The through holes CV _4a and CV _4b are filled with a conductive material by metal plating or the like. (IV) The electrode portions 44a and 44b are formed at positions covering the through holes CV _4a and CV _4b of the silicon substrate by coating or vapor deposition using a printing technique. (V) A thin film of shape memory alloy is formed on the silicon substrate by sputtering or the like. (VI) The shape memory alloy thin film is subjected to a heat treatment (memory heat treatment) for memorizing the shape so that it shrinks during high temperature heating. Here, the thin film of shape memory alloy memorizes a planar shape. (VII) The SMA film 43 having the shapes of the first and second movable portions 43a and 43b is formed by etching the shape memory alloy thin film using a photolithography technique or the like. (VIII) The hollow portions 41H and 42H are formed by subjecting the silicon substrate to selective etching using hydrofluoric acid, which is a mixed liquid of hydrofluoric acid and nitric acid. At this time, a lattice-shaped portion constituting the fixed frame body 41 and a moving member 42 disposed in each lattice-shaped hollow portion 41H are formed. Accordingly, the first movable portion 43a is installed between the electrode portion 44a and the electrode portion 44b so as to pass through the relay portion 422a, and the second movable portion 43b is connected to the electrode portion so as to pass through the relay portion 422b. It will be in the state constructed between 44a and the electrode part 44b.

  The first parallel spring layer sheet U50 is a sheet in which a number of chips corresponding to the first parallel spring layer 50 are formed in a matrix-like predetermined arrangement. For example, the first parallel spring layer sheet U50 is formed by applying a resist in the shape of a parallel spring on a metal material by photolithography on a disk-shaped wafer formed of a metal material such as stainless steel or a material such as phosphor bronze. A pattern of parallel springs is formed by performing wet etching by immersing in an iron chloride-based etching solution.

  The imaging lens layer sheet U60 is a sheet in which a large number of chips corresponding to the imaging lens layer 60 are formed in a matrix-like predetermined arrangement. However, in the imaging lens layer sheet U60, in each chip, the fixed frame 61 and the protruding portion 63 are connected by the connecting portions 631a and 631b. The imaging lens layer sheet U60 is manufactured, for example, by resin molding.

  The second parallel spring layer sheet U70 is a sheet in which a number of chips corresponding to the second parallel spring layer 70 are formed in a matrix-like predetermined arrangement. The second parallel spring layer sheet U70 is manufactured in the same process as the first parallel spring layer sheet U50.

  The lid layer sheet U80 is a sheet in which a large number of chips corresponding to the lid layer 80 are formed in a matrix-like predetermined arrangement. The lid layer sheet U80 is manufactured, for example, by resin molding. In addition, when the shape of the cover layer 80 may be a simple flat plate, the cover layer sheet U80 may be flat glass.

  The eight sheets U10 to U80 prepared in step A are provided with marks (alignment marks) for alignment in the sheet joining step at substantially the same position. Examples of the alignment mark include a cross mark, and the like, and are preferably provided at two or more positions in the vicinity of the outer peripheral portion of the upper surface of each of the sheets U10 to U80.

<(3-2) Joining of multiple sheets (Process B)>
As shown in FIG. 19, the eight sheets U10 to U80 prepared in the process A are sequentially stacked and joined.

  First, alignment (alignment) is performed with the sheet shape so that the chips of the second parallel spring layer sheet U70 and the imaging lens layer sheet U60 are arranged and stacked immediately above each other.

  Specifically, first, the second parallel spring layer sheet U70 and the imaging lens layer sheet U60 are set in a known aligner device, and alignment is performed using a previously formed alignment mark. At this time, a so-called epoxy resin adhesive or ultraviolet curable adhesive is applied in advance to the surface (joint surface) to which the second parallel spring layer sheet U70 and the imaging lens layer sheet U60 are joined, Both sheets U60 and U70 are joined. Alternatively, a method may be used in which the joining surfaces are activated by irradiating the joining surfaces with O2 plasma and both sheets U60 and U70 are directly joined.

  At this time, each lens holding portion 64a of the imaging lens layer sheet U60 is bonded to each bonding portion 72a of the second parallel spring layer sheet U70, and each lens holding portion 64b of the imaging lens layer sheet U60 is second parallel. It joins with respect to each joining part 72b of the spring layer sheet | seat U70.

  In addition, in the state in which the imaging lens layer sheet U60 is bonded onto the second parallel spring layer sheet U70, the connecting portions 631a and 631b that connect the fixed frame body 61 and the projecting portion 63 are cut, thereby fixing the fixed frame. The body 61 and the projecting portion 63 are separated.

  Subsequently, an imaging element layer sheet U10, an imaging element holding layer sheet U20, a spacer layer sheet U30, an actuator layer sheet U40, a first layer are formed on the upper and lower surfaces of a laminate formed by laminating two sheets U60 and U70. The parallel spring layer sheet U50 and the lid layer sheet U80 are aligned (aligned) while maintaining the sheet shape. At this time, the chips of the eight sheets U10 to U80 are arranged and stacked immediately above each other.

  Specifically, the first parallel spring layer sheet U50 is joined on the imaging lens layer sheet U60 by the same alignment and joining method as described above, and then the actuator layer sheet U40 is placed on the first parallel spring layer sheet U50. Next, the spacer layer sheet U30 is bonded onto the actuator layer sheet U40. Further, by the same alignment and joining method as described above, the imaging element holding layer sheet U20 is joined on the spacer layer sheet U30, and then the imaging element layer sheet U10 is joined on the imaging element holding layer sheet U20. Finally, the lid layer sheet U80 is bonded onto the second parallel spring layer sheet U70 by the same alignment and bonding method as described above.

  When the first parallel spring layer sheet U50 is bonded onto the imaging lens layer sheet U60, each lens holding portion 64a of the imaging lens layer sheet U60 is connected to each bonding portion 52a of the first parallel spring layer sheet U50. At the same time, the lens holding portions 64b of the imaging lens layer sheet U60 are joined to the joint portions 52b of the first parallel spring layer sheet U50. Further, the actuator layer sheet U40 is bonded onto the first parallel spring layer sheet U50, so that each protruding portion 63 of the imaging lens layer sheet U60 comes into contact with the annular portion 421 of the moving member 42.

In addition, here, the three sheets U20 to U40 are joined, so that the conductive materials filled in the through holes CV _{2a to} CV _4a are electrically connected to each other, thereby forming the through holes CVa. A through wiring is formed. Further, the conductive material filled in the through holes CV _{2b to} CV _4b is electrically connected to each other, thereby forming a through wiring formed by the through hole CVb.

<(3-3) Dicing (Process C)>
The laminated member formed by laminating the eight sheets U10 to U80 is separated for each chip by the dicing apparatus, and a large number of camera modules 500 in which the eight layers 10 to 80 are laminated are generated. That is, the camera module 500 is completed.

  As described above, in the mobile phone 100 equipped with the camera module 500 according to the embodiment, the first movable portion 43a is not provided in a straight line in the actuator layer 40, and the electrode portion is interposed via the relay portion 422a. It is installed between 44a and the electrode part 44b. The second movable part 43b is installed between the electrode part 44a and the electrode part 44b via the relay part 422b without being installed in a straight line. For this reason, it sets so that the length of the construction path | route of 1st and 2nd movable part 43a, 43b may become long in the limited space. As a result, the actuator layer 40 and thus the camera module 500 can be reduced in size while ensuring the amount of displacement associated with the first and second movable parts 43a and 43b.

<(4) Modification>
It should be noted that the present invention is not limited to the above-described embodiment, and various changes and improvements can be made without departing from the gist of the present invention.

  For example, in the above-described embodiment, the first and second movable parts 43a and 43b are respectively installed between the electrode part 44a and the electrode part 44b via one moving member 42. However, the present invention is not limited to this. Absent. For example, each movable part 43a, 43b may be constructed in the hollow portion of the fixed frame body through two or more moving members sequentially.

  Hereinafter, a camera module 500A which is a specific embodiment of such a configuration will be described with reference to FIGS.

○ Outline of the configuration of the camera module according to one modification:
20 is a schematic cross-sectional view of a cut surface indicated by a straight line XX-XX in FIG. 3 in a camera module 500A according to a modification. FIG. 21 is a schematic cross-sectional view of the camera module 500A according to the cut surface indicated by the straight line XXI-XXI in FIG.

  In this modification, instead of the image sensor holding layer 20, the spacer layer 30, the actuator layer 40, and the image pickup lens layer 60 constituting the camera module 500 according to the embodiment, the image sensor holding layer 20A, the spacer layer 30A, A description will be given assuming that the mobile phone 100A having the first housing 200A on which the camera module 500A is mounted is configured by employing the actuator layer 40A and the imaging lens layer 60A. Here, in the cellular phone 100A and the camera module 500A according to this modification, the same parts as those in the cellular phone 100 and the camera module 500 according to the above embodiment are denoted by the same reference numerals and the description thereof is omitted. The different parts will be described.

  20 and 21, the camera module 500A includes an image sensor layer 10, an image sensor holding layer 20A, a spacer layer 30A, an actuator layer 40A, a first parallel spring layer 50, an image pickup lens layer 60A, and a second parallel. The eight layers including the spring layer 70 and the lid layer 80 are laminated in this order. For the imaging lens layer 60A, during the manufacturing of the camera module 500A, for example, the connecting portions 631aA and 631bA that connect the fixed frame 61 (FIG. 23) and the projecting portion 63A (FIG. 23) are cut, and the optical The lens unit 60UA configured to include the lens portion 62A, the projecting portion 63A, and the lens holding portions 64aA and 64bA is separated from the fixed frame body 61.

  Further, the actuator layer 40A, the first parallel spring layer 50, the imaging lens layer 60A, and the second parallel spring layer 70 are laminated in this order on the upper surface of the spacer layer 30A, thereby moving the optical lens portion 62A. The mechanism (movement mechanism) is configured.

  In this moving mechanism, the lens holding portions 64aA and 64bA of the lens unit 60UA are sandwiched from the ± Z direction by the first parallel spring layer 50 and the second parallel spring layer 70, and thus in the direction along the optical axis PL. The mechanism (parallel link mechanism) supported so that a movement is possible is comprised. For this reason, the lens unit 60UA does not tilt relative to the fixed frame 61 due to the movement in the ± Z direction. Further, a portion (lower end portion) arranged at the −Z side end portion of the protruding portion 63A of the lens unit 60UA abuts against the moving member 42A supported by the SMA film 43A of the actuator layer 40A. For this reason, a driving device is formed in which the lens unit 60UA is moved in the direction along the optical axis PL in accordance with the deformation of the SMA film 43A.

Here, the image sensor holding layer 20 </ _b> A according to the modification is obtained by changing the positions of the through holes CV _{2 a} and CV _{2 b} as compared with the image sensor holding layer 20 according to the embodiment. In addition, the spacer layer 30A according to the modification is obtained by changing the positions of the through holes CV _3a and CV _3b as compared with the spacer layer 30 according to the embodiment. The arrangement positions of the through holes CV _2a , CV _2b , CV _3a , CV _3b will be described later.

○ Actuator layer according to one modification:
As shown in FIG. 22, the actuator layer 40A according to the modification includes a fixed frame 41A, two moving members 42A and 45, an SMA film 43A, electrode portions 441a, 441b, 444a, and 444b, and a wiring portion 442a, 442b, 443a, 445a, 445b, 446b.

  The fixed frame body 41A is a plate-like member formed of a material that is not a conductor, such as silicon, for example, similarly to the fixed frame body 41 according to the above-described embodiment. The fixed frame body 41A has an annular shape whose outer edge and inner edge are each rectangular, and has a hollow portion 41HA penetrating in the Z direction. From another viewpoint, the fixed frame body 41A includes plate-like portions (plate-like portions) 411A and 413A that extend in the Y direction and face each other, and plates that extend in the X direction and face each other. Shaped portions (plate-like portions) 412A and 414A. And 41 A of fixed frames have a shape where the four plate-shaped parts 411A-414A are connected in this order.

  In the fixed frame 41A, a portion where the plate-like portion 411A and the plate-like portion 414A are connected protrudes toward the hollow portion 41HA, and a portion where the plate-like portion 412A and the plate-like portion 413A are connected is provided. It protrudes toward the hollow portion 41HA. The fixed frame body 41A constitutes the outer peripheral portion of the camera module 500A and functions as a fixing member in the camera module 500A.

  Although illustration is omitted, imaging is performed at a total of two locations including a portion where the plate-like portion 411A and the plate-like portion 412A are connected and a portion where the plate-like portion 413A and the plate-like portion 414A are connected. Similar to the element holding layer 20A and the spacer layer 30A, a minute hole is provided from one main surface along the Z direction, and the through hole is filled with a conductive material. Here, the through hole and the hollow portion 41HA are formed by various etchings or the like.

In the actuator layer 40A, the conductive material filled in the through hole CV _4a is electrically connected to the conductive material filled in the through holes CV _2a and CV _3a to form a through wiring, and is filled in the through hole CV _4b. The conductive material is electrically connected to the conductive material filled in the through holes CV _2b and CV _3b to form a through wiring. Here, the wiring portion 443a is provided on the other main surface of the portion where the plate-like portion 411A and the plate-like portion 412A are connected, and the through holes CV _2a , CV _3a , CV _4a are formed directly below the wiring portion 443a. Such a through wiring is formed. In addition, a wiring portion 446b is provided on the other main surface of the portion where the plate-like portion 413A and the plate-like portion 414A are connected, and the through-wiring associated with the through holes CV _2b , CV _3b , CV _4b is provided directly below the wiring portion 446b Is formed.

  The electrode portion 441a is provided on the other main surface in the vicinity of the end connected to the plate-like portion 414A of the plate-like portion 411A. The electrode portion 441a is provided on the other main surface of the portion of the fixed frame 41A that protrudes toward the hollow portion 41HA. The electrode portion 441b is provided on the other main surface in the vicinity of the end connected to the plate-like portion 413A of the plate-like portion 412A. The electrode portion 441b is provided on the other main surface of the portion of the fixed frame 41A that protrudes toward the hollow portion 41HA. The electrode portion 444a is provided on the other main surface in the vicinity of the end connected to the plate-like portion 411A of the plate-like portion 414A. The electrode portion 444a is provided on the other main surface of the portion of the fixed frame body 41A that protrudes toward the hollow portion 41HA. Furthermore, the electrode portion 444b is provided on the other main surface in the vicinity of the end connected to the plate-like portion 412A of the plate-like portion 413A. The electrode portion 444b is provided on the other main surface of the portion protruding to the hollow portion 41HA side of the fixed frame body 41A.

  The wiring portion 442a extends along the extending direction of the plate-like portion 411A on the other main surface of the plate-like portion 411A, and electrically connects the electrode portion 441a and the wiring portion 443a. The wiring part 442b extends along the extending direction of the plate-like part 412A on the other main surface of the plate-like part 412A, and electrically connects the electrode part 441b and the wiring part 443a. The wiring portion 445a extends along the extending direction of the plate-like portion 414A on the other main surface of the plate-like portion 414A, and electrically connects the electrode portion 444a and the wiring portion 446b. The wiring portion 445b extends along the extending direction of the plate-like portion 413A on the other main surface of the plate-like portion 413A, and electrically connects the electrode portion 444b and the wiring portion 446b.

  The moving member 45 is a plate-like member formed of a material that is not a conductor, such as silicon, for example, like the fixed frame body 41A. The moving member 45 is disposed in the hollow portion 41HA so as to be separated from the fixed frame body 41A, and is provided so as to be movable relative to the fixed frame body 41A. The moving member 45 has a plate-like form and includes relay portions 451a and 451b and L-shaped plate-like connecting portions 452a and 452b.

  The relay portion 451a is a plate-like portion that is disposed in the vicinity of a portion where the plate-like portion 411A and the plate-like portion 412A are connected, and has a rectangular outer edge. The relay portion 451b is a plate-like portion that is disposed in the vicinity of the portion where the plate-like portion 413A and the plate-like portion 414A are connected, and has a rectangular outer edge, like the relay portion 451a. The L-shaped plate-like connecting portion 452a extends from the relay portion 451a to the relay portion 451b via the space near the inner edge of the connecting portion between the plate-like portion 411A and the plate-like portion 414A. An L-shaped plate-like connecting part 452a connects the relay part 451a and the relay part 451b. Further, the L-shaped plate-like connecting portion 452b extends from the relay portion 451a to the relay portion 451b via a space near the inner edge of the connecting portion between the plate-like portion 412A and the plate-like portion 413A. The L-shaped plate-like connecting portion 452b connects the relay portion 451a and the relay portion 451b. With such a configuration, the moving member 45 forms the hollow portion 45H.

  Similarly to the fixed frame body 41A and the moving member 45, the moving member 42A is a plate-like member formed of a material that is not a conductor, such as silicon. The moving member 42 </ b> A is disposed in the hollow portion 45 </ b> H so as to be separated from the moving member 45, and is provided to be movable relative to the fixed frame body 41 </ b> A and the moving member 45. The moving member 42A has a plate-like form and includes an annular portion 421A, relay portions 422aA and 422bA, and plate-like portions 423aA and 423bA.

  The annular portion 421A has an annular shape in which the outer edge and the inner edge are each substantially circular, and has a hollow portion 42HA penetrating in the Z direction. The relay portion 422aA is a plate-like portion that is disposed in the vicinity of the inner edge of the corner portion where the L-shaped plate-like connecting portion 452a is bent and whose outer edge is rectangular. The relay portion 422bA is a plate-like portion that is disposed in the vicinity of the inner edge of the corner where the L-shaped plate-like connecting portion 452b bends and the outer edge is rectangular. The plate-like portion 423aA is a portion that connects the annular portion 421A and the relay portion 422aA. The plate-like portion 423bA is a portion that connects the annular portion 421A and the relay portion 422bA. Thus, in the moving member 42A, the relay portion 422aA and the relay portion 422bA are connected by the connecting portion configured in the order of the plate-like portion 423aA, the annular portion 421A, and the plate-like portion 423bA.

  The SMA film 43A is configured using a shape memory alloy (SMA). The SMA film 43A includes a first movable portion 43aA and a second movable portion 43bA that are not in contact with each other. The first movable portion 43aA has first to fourth beam portions 431a to 434a, and the second movable portion 43bA has fifth to eighth beam portions 431b to 434b.

  Specifically, one end portion of the first beam portion 431a is electrically connected to the electrode portion 441a by being fixed on the other main surface of the electrode portion 441a. The first beam portion 431a extends in a direction along the Y axis, and the other end portion of the first beam portion 431a is fixed on the other main surface of the relay portion 451a, and the other main surface of the relay portion 451a. The upper part is electrically connected to one end of the second beam part 432a. The second beam portion 432a extends in the direction along the Y axis, and the other end of the second beam portion 432a is fixed on the other main surface of the relay portion 422aA, and the other main surface of the relay portion 422aA. The upper part is electrically connected to one end of the third beam part 433a. The third beam portion 433a extends in a direction along the X axis, and the other end portion of the third beam portion 433a is fixed on the other main surface of the relay portion 451b, and the other main surface of the relay portion 451b. The top is electrically connected to one end of the fourth beam portion 434a. The fourth beam portion 434a extends in the direction along the X axis, and the other end portion of the fourth beam portion 434a is fixed on the other main surface of the electrode portion 444a. It is electrically connected to 444a.

  That is, the first movable portion 43aA is fixed to the electrode portion 441a, the moving member 45, the moving member 42A, the moving member 45, and the electrode portion 444a in this order, so that the first movable portion 43aA becomes the electrode portion 441a. Is installed between a portion in the vicinity of the inner edge of the corner portion of the fixed frame body 41A provided with a portion and a portion in the vicinity of the inner edge of the corner portion of the fixed frame body 41A in which the electrode portion 444a is provided. From another point of view, the first movable portion 43aA has the relay portion 451a, the relay portion 422aA, and the relay portion 451b at three locations (also referred to as fixed locations) in the middle of the installation path from the electrode portion 441a to the electrode portion 444a. And are fixed in order. Thereby, the moving members 42A and 45 are supported by the first movable portion 43aA.

  Here, the relay portions 422aA, 451a, and 451b as the portions to which the first movable portion 43aA of the moving members 42A and 45 are respectively fixed are the portions where the first movable portion 43aA of the electrode portion 441a is fixed. The electrode portion 444a is disposed at a position deviating from a straight line (also referred to as a third straight line) connecting the portion to which the first movable portion 43aA is fixed. More specifically, a virtual plane (also referred to as a third virtual plane) including a third straight line and a straight line extending in a predetermined direction (here, the −Z direction) is used as a reference, and the first movable portion 43aA is used as a reference. Three to-be-fixed locations respectively fixed to the relay portions 422aA, 451a, and 451b are separated from the third virtual plane in a direction along the normal line of the third virtual plane (also referred to as a normal direction). ing. And after the posture of 1st movable part 43aA is constructed in the direction along the inner edge of plate-shaped part 411A by the installation form via moving members 42A and 45, the inner edge of plate-shaped part 411A and plate-shaped part 414A Are constructed in order in the direction along the L, and are constructed in an L shape, and are further regulated in a state in which they are constructed in the direction along the inner edge of the plate-like portion 414A. That is, the first movable portion 43aA is constructed so as to be arranged a plurality of times (here, twice) in the direction along the same inner edge portion of the fixed frame body 41A.

  Due to the restriction of the shape of the first movable portion 43aA by the moving members 42A and 45, the length of the construction path of the first movable portion 43aA between the electrode portion 441a and the electrode portion 444a is the first of the electrode portions 441a. The distance between the portion where the first movable portion 43aA is fixed and the portion of the electrode portion 444a where the first movable portion 43aA is fixed is set to be relatively longer. In addition, here, the length of the installation path of the first movable portion 43aA is relatively longer than the extending distance of the inner edge of any of the four plate-like portions 411A to 414A.

  In addition, one end portion of the fifth beam portion 431b is fixed on the other main surface of the electrode portion 441b, thereby being electrically connected to the electrode portion 441b. The fifth beam portion 431b extends in the direction along the X axis, and the other end portion of the fifth beam portion 431b is fixed on the other main surface of the relay portion 451a, and the other main surface of the relay portion 451a. The top is electrically connected to one end of the sixth beam portion 432b. The sixth beam portion 432b extends in the direction along the X axis, and the other end portion of the sixth beam portion 432b is fixed on the other main surface of the relay portion 422bA, and the other main surface of the relay portion 422bA. The top is electrically connected to one end of the seventh beam portion 433b. The seventh beam portion 433b extends in a direction along the Y axis, and the other end of the seventh beam portion 433b is fixed on the other main surface of the relay portion 451b, and the other main surface of the relay portion 451b. The upper portion is electrically connected to one end portion of the eighth beam portion 434b. Then, the eighth beam portion 434b extends in the direction along the Y axis, and the other end portion of the eighth beam portion 434b is fixed on the other main surface of the electrode portion 444b, whereby the electrode portion It is electrically connected to 444b.

  That is, the second movable portion 43bA is fixed to the electrode portion 441b, the moving member 45, the moving member 42A, the moving member 45, and the electrode portion 444b in this order, so that the second movable portion 43bA becomes the electrode portion 441b. Is installed between a portion in the vicinity of the inner edge of the corner of the fixed frame 41A provided with a portion and a portion in the vicinity of the inner edge of the corner of the fixed frame 41A provided with the electrode portion 444b. From another point of view, the second movable portion 43bA is connected to the relay portion 451a, the relay portion 422bA, and the relay portion 451b at three locations (also referred to as fixed locations) along the construction path from the electrode portion 441b to the electrode portion 444b. And fixed against. Thereby, the moving members 42A and 45 are supported by the second movable portion 43bA.

  Here, the relay portions 422bA, 451a, 451b as the portions to which the second movable portion 43bA of the moving members 42A, 45 are respectively fixed are the portions where the second movable portion 43bA of the electrode portion 441b is fixed. The electrode portion 444b is disposed at a position deviating from a straight line (also referred to as a fourth straight line) connecting the portion to which the second movable portion 43bA is fixed. More specifically, a virtual plane (also referred to as a fourth virtual plane) including a fourth straight line and a straight line extending in a predetermined direction (here, the −Z direction) is used as a reference, and the second movable portion 43bA is used as a reference. Three to-be-fixed locations respectively fixed to the relay portions 422bA, 451a, and 451b are separated from the fourth virtual plane in a direction along the normal line of the fourth virtual plane (also referred to as a normal direction). ing. Then, the second movable portion 43bA is installed in the direction along the inner edge of the plate-like portion 412A, and then the inner edges of the plate-like portion 412A and the plate-like portion 413A by the installation form via the moving members 42A and 45. Are constructed in an L-shape by being sequentially constructed in a direction along the direction of the plate, and are further restricted to a state of being constructed in a direction along the inner edge of the plate-like portion 414A. That is, the second movable portion 43bA is constructed so as to be arranged a plurality of times (here, twice) in the direction along the same inner edge portion of the fixed frame body 41A.

  Due to the restriction of the shape of the second movable portion 43bA by the moving members 42A and 45, the length of the construction path of the second movable portion 43bA between the electrode portion 441b and the electrode portion 444b is the first of the electrode portions 441b. The distance between the portion where the second movable portion 43bA is fixed and the portion where the second movable portion 43bA of the electrode portion 444b is fixed is set relatively longer. Further, the length of the installation path of the second movable portion 43bA is relatively longer than the extending distance of the inner edge of any plate-like portion of the four plate-like portions 411A to 414A.

  Here, the portion near the corner of the fixed frame 41A including the electrode portions 441a and 444a as the first reference portion and the corner of the fixed frame 41A including the electrode portions 441b and 444b as the second reference portion. The relative positional relationship with the neighboring parts is fixed.

  In the actuator layer 40A having such a configuration, the first and second movable parts 43aA and 43bA are electrically connected in parallel between the wiring part 443a and the wiring part 446b, and are connected to the two through wirings. When a voltage is applied from the outside, a voltage is applied between the wiring portion 443a and the wiring portion 446b. At this time, a current flows through the SMA film 43A, the first and second movable parts 43aA, 43bA generate heat due to Joule heat, and the first and second movable parts 43aA, 43bA are deformed according to the generated heat. As a result of the deformation, the two moving members 42A, 45 move relative to the fixed frame 41A provided with the electrode portions 441a, 441b, 444a, 444b, respectively. The movement of the moving members 42A and 45 due to the deformation of the first and second movable parts 43aA and 43bA will be described later.

  Further, the one main surface and the other main surface of the fixed frame 41A are substantially flat, and the one main surface and the other main surface are in a substantially parallel relationship. Then, one main surface of the fixed frame body 41A is bonded to the adjacent spacer layer 30A, and the other main surface is bonded to the fixed frame body 51 (FIG. 10) of the adjacent first parallel spring layer 50. It should be noted that a resin or the like used for bonding is interposed between the actuator layer 40A and the first parallel spring layer 50, so that the electrode portions 441a, 441b, 444a, 444b, the SMA film 43A, and the wiring portions 442a, 442b. , 443a, 445a, 445b, 446b and the first parallel spring layer 50 are configured so as not to be short-circuited. However, from the viewpoint of preventing a short circuit between the electrode portions 441a, 441b, 444a, 444b, the SMA film 43A, and the wiring portions 442a, 442b, 443a, 445a, 445b, 446b and the first parallel spring layer 50, It is preferable that an insulating film is formed on a portion of the other main surface of the actuator layer 40A that is joined to the first parallel spring layer 50.

○ Image pickup lens layer according to one modification:
As shown in FIG. 23, the imaging lens layer 60A according to the present modification is similar to the imaging lens layer 60 according to the above-described embodiment in that the lens unit 60U has a similar configuration but a different size. It has been changed to 60UA. Specifically, in the imaging lens layer 60A according to the present modification, the optical lens portion 62, the protruding portion 63, and the lens holding portions 64a and 64b in the imaging lens layer 60 according to the above embodiment have the same configuration. However, the optical lens portion 62A, the projecting portion 63A, and the lens holding portions 64aA and 64bA having different dimensions are changed. In this modification, the connecting portions 631a and 631b that are cut in the manufacturing process of the camera module 500A are also connecting portions 631aA and 631bA having different lengths.

  Then, one main surface of the protruding portion 63A comes into contact with the annular portion 421A of the moving member 42A. For this reason, the lens unit 60UA which is a moving object comes into contact with the moving member 42A moved by the first and second movable portions 43aA and 43bA by the protruding portion 63A. One main surface of the protruding portion 63A may be fixed to the annular portion 421A with an adhesive or the like.

○ About moving the lens unit:
FIG. 24 is a schematic diagram showing a relative arrangement relationship between the actuator layer 40A and the lens unit 60UA. In FIG. 24, a configuration focusing on the actuator layer 40A and only the lens unit 60UA of the imaging lens layer 60A is shown, and other layers such as the first and second parallel spring layers 50 and 70 are as follows. The illustration is omitted.

  As shown in FIG. 24, the actuator layer 40A has a pair of movable parts (specifically, first and second movable parts 43aA and 43bA) across the optical axis of the optical lens part 62A. In the first movable portion 43aA, the first to fourth beam portions 431a to 434a are electrically connected in series, and in the second movable portion 43bA, the fifth to eighth beam portions 431b to 434b are electrically connected in series. In addition, the first and second movable parts 43aA and 43bA are electrically connected in parallel between the wiring part 443a and the wiring part 446b.

  Further, as shown in FIG. 24, a power supply PW is connected between the wiring portion 443a and the wiring portion 446b from the outside, and the wiring portion 443a and the wiring portion 446b according to the opening / closing of the switch SW in the current supply driver 600. A voltage is applied between the two. Thereby, each movable part 43aA and 43bA is heated by generation | occurrence | production of the Joule heat by electricity supply, and deform | transforms in the direction which becomes flat. Moreover, each movable part 43aA and 43bA deform | transforms so that it may extend in the extending direction by being cooled (here air cooling) from the state heated by completion | finish of electricity supply. At this time, similarly to the above-described embodiment, the lens unit 60UA is pushed down in the −Z direction by the pushing-down force in the −Z direction by the elastic force of the first and second parallel spring layers 50 and 70, and the first and first 2 The substantially central part of the movable parts 43aA and 43bA is pushed down in the -Z direction. Specifically, the first and second parallel spring layers 50 and 70 are in a predetermined direction (here, −Z direction) with respect to the moving member 42A against the tension by the movable portions 43aA and 43bA via the lens unit 60UA. ).

  FIG. 25 is a schematic diagram for explaining the operation of the actuator layer 40A according to a modification. As shown in FIG. 25, in the non-driving state in which the energization to each of the movable parts 43aA and 43bA is completed, the pressing force in the −Z direction by the elastic force of the first and second parallel spring layers 50 and 70 The moving member 42A is pushed down in the −Z direction via the lens unit 60UA. At this time, the substantially central portions of the first and second movable portions 43aA and 43bA are pushed down, and the substantially central portions of the first and second movable portions 43aA and 43bA out of the first and second movable portions 43aA and 43bA. , −Z direction is the most depressed state.

  Specifically, in both the first and second movable portions 43aA and 43bA, the portion fixed to the moving member 42A is displaced more in the −Z direction than the portion fixed to the moving member 45. . In other words, the moving member 45 is displaced in the −Z direction with the fixed frame body 41 </ b> A as a reference, and the moving member 42 </ b> A is further displaced in the −Z direction than the moving member 45.

  As described above, in the mobile phone 100A in which the camera module 500A according to the present modification is mounted, the relay unit 422aA, 451a, 451b is not provided on the actuator layer 40A without the first movable unit 43aA being installed in a straight line. Between the electrode portion 441a and the electrode portion 444a. Further, the second movable portion 43bA is installed between the electrode portion 441b and the electrode portion 444b via the relay portions 422bA, 451a, and 451b without being installed in a straight line. That is, the first and second movable parts 43aA and 43bA are installed along the plate-like parts 411A to 414A via the two moving members 42A and 45. For this reason, the first and second movable portions 43aA and 43bA according to the modification are installed so as to go further than the first and second movable portions 43a and 43b according to the above-described embodiment. As a result, in the limited space, the length of the construction path of the first and second movable parts 43aA, 43bA is longer than the length of the construction path of the first and second movable parts 43a, 43b according to the embodiment. become longer. Accordingly, the displacement amount of the first and second movable portions 43aA and 43bA is further increased while aiming to reduce the size of the actuator layer 40A and consequently the camera module 500A.

  In the first modification, the first and second movable parts 43aA and 43bA are installed so as to pass through the moving member 45 twice, but the present invention is not limited to this. For example, the arrangement of the wiring and the electrode part may be changed, and the first and second movable parts may be installed so as to pass through each of the two moving members once.

  In the above embodiment, the relay member 422a and the relay member 422b are connected to each other in the moving member 42. In the above modification, the relay member 422aA and the relay member 422bA are connected to each other in the moving member 42A. Not limited to. For example, the relay unit 422a and the relay unit 422b may be directly coupled to the lens unit 60U, or the relay unit 422aA and the relay unit 422bA may be directly coupled to the lens unit 60UA. In addition, by slightly changing the shape of the lens units 60U and 60UA, the first and second movable parts are installed via a part of the lens unit as a moving object instead of the relay part. You may implement | achieve the same effect as the case where it constructs via a relay part.

  Even when such a configuration is adopted, the posture of the lens unit is maintained by the first and second parallel spring layers 50 and 70, and thus the shapes of the first and second movable parts are restricted. Further, the displacement of the moving object is ensured while the configuration is simplified and the increase in the number of parts is suppressed. For this reason, it is possible to reduce the size of the driving device and increase the degree of design freedom by effectively using the space. When such a configuration is adopted, one of the two first and second movable parts may be removed.

  In the above-described embodiment and the above-described modification, the layered actuator layers 40 and 40A are employed. However, the present invention is not limited to this. For example, an actuator having a certain thickness may be used.

  In the above-described embodiment and the above-described modification, the moving object is the lens units 60U and 60UA including the optical lens portions 62 and 62A, but is not limited thereto. For example, other members such as an image sensor may be used as the moving object. For example, the optical lens unit corresponding to the optical system that guides light from the subject to the image sensor is fixed, and the image sensor layer is arranged in the Z direction by a configuration similar to the configuration in which the lens units 60U and 60UA are moved in the one embodiment or the modified example. It may be moved to.

  FIG. 26 is a diagram illustrating a conceptual diagram of an aspect in which the optical lens unit 62B is fixed and the imaging element layer 10B is moved back and forth in a direction along the optical axis Ax of the optical lens unit 62B. FIG. 26 illustrates an actuator AC that moves the imaging element layer 10B back and forth along the optical axis Ax. In such a configuration, the image sensor layer 10B is moved back and forth along the optical axis Ax in accordance with the operation of the actuator AC, and the distance between the optical lens unit 62B and the image sensor layer 10B is changed. Focus control is realized. As described above, when at least one of the image sensor and the optical system is moved according to the deformation of the SMA films 43 and 43A, the autofocus control is realized. Therefore, a drive device that can ensure a wide variation in the separation distance between the imaging element and the optical system without increasing the size of the device is realized.

  Moreover, the target object (moving target object) moved by the actuator is not limited to an element constituting the imaging apparatus such as an optical system or an imaging element. For example, the moving object may be another object such as an objective lens of an optical pickup lens. That is, the present invention can be applied to an actuator configured using SMA and a driving device in which a moving object is moved in accordance with deformation of the SMA.

  Of course, it is needless to say that all or a part of the configurations of the above-described embodiment and various modifications can be combined as appropriate within a consistent range.

10, 10B Image sensor layer 11 Image sensor 40, 40A Actuator layer 41, 41A Fixed frame body 42, 42A, 45 Moving member 43, 43A SMA film 43a, 43aA, 43b, 43bA Movable part 442a, 442b, 443a, 445a, 445b , 446b Wiring part 44a, 44b, 441a, 441b, 444a, 444b Electrode part 60, 60A Imaging lens layer 60U, 60UA Lens unit 62, 62A, 62B Optical lens part 63, 63A Projecting part 64a, 64aA, 64b, 64bA Lens Holding part 100, 100A Mobile phone 411-414, 411A-414A Plate-like part 421, 421A Annular part 431, 432, 431a-434a, 431b-434b Beam part 422a, 422b, 422aA, 422bA, 451a, 51b relay unit 452a, 452b L-shaped plate-shaped connecting portion 500,500A camera module 631a, 631aA, 631b, 631bA connecting portion 700 the electrical resistance detecting unit AC actuator

Claims (12)

A first reference portion and the second reference portion are arranged with a space interposed therebetween, a first moving unit which moves relative to the first reference portion and the second reference portion, the shape memory alloy film in the configuration, and is secured fixed to said electrode portion of the first reference portion and is bridged by the first reference portion or al the second reference portion or the electrode portion of the second reference portion, said first The first moving part is fixed at a fixed location in the middle of the installation path from the first reference part to the second reference part, and deforms according to heat generated by energization to apply tension to the first moving part. An actuator layer having one or more movable parts;
An elastic layer having an elastic member that applies a force in a predetermined direction against the tension by the one or more movable parts to the first moving part,
The first moving unit is
When the actuator layer is viewed in plan, it is disposed in the space between the first reference portion and the second reference portion,
The fixed part is
A straight line connecting a first fixed portion of the first reference portion where the movable portion is fixed and a second fixed portion of the second reference portion where the movable portion is fixed, and the predetermined direction With respect to a virtual plane including a straight line extending in the direction from the virtual plane in the normal direction of the virtual plane,
An actuator characterized by being formed by laminating the actuator layer and the elastic layer. The actuator according to claim 1,
The actuator layer is
An actuator formed by laminating a layer having the first reference portion, the second reference portion, and the first moving portion, and a layer having the movable portion. The actuator according to claim 1 or 2,
The one or more movable parts are
One and the first movable portion membranous of being bridged from the first reference portion to the second reference portion is bridged separately from the first movable portion from the first reference portion to the second reference part and a single layer shaped second movable portion has,
The first moving unit is
The first movable portion is included in a portion extending between the first reference portion and the second reference portion, and is separated from both the first reference portion and the second reference portion. included in the part that is installed between the said and the first first fixing portion which is fixed to the movable portion, wherein the first reference portion and the second reference portion of the second movable portion in the fixing portion Re and said second fixing portion which is fixed to the second movable portion in the fixing points that are spaced from both the first reference portion and the second reference portion, the second fixing and the first fixing portion A connecting part connecting the parts,
An actuator comprising: The actuator according to any one of claims 1 to 3, wherein
The actuator layer is
A second moving part that moves relative to the first reference part and the second reference part, is separate from the first moving part and is separated from the first moving part ;
Each said movable part is
A first fixation locations Oite the first moving part in developing one erection path before Symbol first reference portion reaching the second reference portion is fixed, the second movement in the middle of the one erection path An actuator having a second fixed location different from the first fixed location to which the portion is fixed . The actuator according to claim 4, wherein
The actuator, wherein the first moving unit and the second moving unit are formed as separate bodies in the same layer. The actuator according to any one of claims 1 to 3, and
A layer having a moving object being in contact or fixed to the first moving unit,
A drive device characterized by being laminated. An actuator according to claim 4 or 5, and
A layer having a moving object being in contact or fixed to the second moving unit,
A drive device characterized by being laminated. The drive device according to claim 6 or 7,
Driving device characterized by further comprising a recognition unit recognizing a displacement of the one or more movable portion by detecting the electrical resistance of said one or more movable parts. The actuator according to any one of claims 1 to 5,
A layer having an image sensor;
A layer having an optical system for guiding light from a subject to the image sensor, and
At least one of the image sensor and the optical system is moved relative to the first reference part and the second reference part by deformation of the one or more movable parts. . A first reference portion and the second reference portion is disposed with a space interposed therebetween,
A first moving part that moves relative to the first reference part and the second reference part;
Consists of a shape memory alloy film is fixed the first is fixed to the electrode portion of the reference portion and is bridged by the first reference portion or al the second reference portion or the electrode portion of the second reference portion At the same time, the first moving part is fixed at a fixed position in the middle of the installation path from the first reference part to the second reference part, and is deformed according to heat generated by energization and is transformed into the first moving part. Forming an actuator layer having one or more movable parts for applying tension;
Forming an elastic layer having an elastic member that applies a force in a predetermined direction against the tension of the one or more movable parts to the first moving part;
An actuator is manufactured by laminating the actuator layer and the elastic layer ,
When forming the actuator layer, when the actuator layer is viewed in plan, the first moving part is disposed in the space between the first reference part and the second reference part, and A straight line connecting a first fixed portion of the first reference portion to which the movable portion is fixed and a second fixed portion of the second reference portion to which the movable portion is fixed, and extends in the predetermined direction. relative to the virtual plane including the straight line, from said virtual plane in the normal direction of the virtual plane, the manufacturing method of the actuator, characterized in Rukoto disposed to the fixed portion are spaced apart. It is a manufacturing method of the actuator according to claim 10,
The actuator layer is
A method for manufacturing an actuator, comprising: a layer having the first reference part, the second reference part, and the first moving part; and a layer having the one or more movable parts. . A manufacturing method of the actuator according to claim 10 or 11,
On the substrate that is not a conductor, the electrode part is formed by coating or vapor deposition using a printing technique,
The shape memory alloy film formed on the substrate by a film forming method is subjected to a heat treatment for storing the shape so as to shrink when heated at a high temperature, and the one or more movable parts are formed by a photolithography method,
A method of manufacturing an actuator, wherein the first reference portion, the second reference portion, and the first moving portion are formed by processing the substrate using an etching method.

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