JP5301585B2 - 超音波処置具 - Google Patents
超音波処置具 Download PDFInfo
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- JP5301585B2 JP5301585B2 JP2011037502A JP2011037502A JP5301585B2 JP 5301585 B2 JP5301585 B2 JP 5301585B2 JP 2011037502 A JP2011037502 A JP 2011037502A JP 2011037502 A JP2011037502 A JP 2011037502A JP 5301585 B2 JP5301585 B2 JP 5301585B2
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- 238000009210 therapy by ultrasound Methods 0.000 title claims description 32
- 239000010936 titanium Substances 0.000 claims description 11
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 45
- 238000000034 method Methods 0.000 description 18
- 239000007789 gas Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- 239000000203 mixture Substances 0.000 description 7
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 238000007667 floating Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- 230000015271 coagulation Effects 0.000 description 4
- 238000005345 coagulation Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 238000002674 endoscopic surgery Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000001552 radio frequency sputter deposition Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 239000003566 sealing material Substances 0.000 description 4
- 238000001947 vapour-phase growth Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 210000003811 finger Anatomy 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 241000877463 Lanio Species 0.000 description 1
- 229910004121 SrRuO Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 229910000883 Ti6Al4V Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000000443 aerosol Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052789 astatine Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000023597 hemostasis Effects 0.000 description 1
- 238000001027 hydrothermal synthesis Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000029052 metamorphosis Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 210000004400 mucous membrane Anatomy 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000001356 surgical procedure Methods 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B17/00—Surgical instruments, devices or methods, e.g. tourniquets
- A61B17/22—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for
- A61B17/22004—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves
- A61B17/22012—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves in direct contact with, or very close to, the obstruction or concrement
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B17/00—Surgical instruments, devices or methods, e.g. tourniquets
- A61B17/22—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for
- A61B17/22004—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves
- A61B17/22012—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves in direct contact with, or very close to, the obstruction or concrement
- A61B17/2202—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves in direct contact with, or very close to, the obstruction or concrement the ultrasound transducer being inside patient's body at the distal end of the catheter
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B17/00—Surgical instruments, devices or methods, e.g. tourniquets
- A61B17/22—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for
- A61B17/22004—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves
- A61B17/22012—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves in direct contact with, or very close to, the obstruction or concrement
- A61B17/2202—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves in direct contact with, or very close to, the obstruction or concrement the ultrasound transducer being inside patient's body at the distal end of the catheter
- A61B2017/22021—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for using mechanical vibrations, e.g. ultrasonic shock waves in direct contact with, or very close to, the obstruction or concrement the ultrasound transducer being inside patient's body at the distal end of the catheter electric leads passing through the catheter
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B17/00—Surgical instruments, devices or methods, e.g. tourniquets
- A61B17/22—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for
- A61B2017/22072—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for with an instrument channel, e.g. for replacing one instrument by the other
- A61B2017/22074—Implements for squeezing-off ulcers or the like on the inside of inner organs of the body; Implements for scraping-out cavities of body organs, e.g. bones; Calculus removers; Calculus smashing apparatus; Apparatus for removing obstructions in blood vessels, not otherwise provided for with an instrument channel, e.g. for replacing one instrument by the other the instrument being only slidable in a channel, e.g. advancing optical fibre through a channel
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B18/00—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body
- A61B2018/00571—Surgical instruments, devices or methods for transferring non-mechanical forms of energy to or from the body for achieving a particular surgical effect
- A61B2018/00589—Coagulation
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- Health & Medical Sciences (AREA)
- Surgery (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Vascular Medicine (AREA)
- Orthopedic Medicine & Surgery (AREA)
- Mechanical Engineering (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Surgical Instruments (AREA)
- Transducers For Ultrasonic Waves (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
素子と、を有し、前記振動板は、前記圧電素子が形成されている面に対して水平方向に伸
縮振動し、前記振動板のヤング率に対する、前記振動板のヤング率と前記圧電体膜のヤン
グ率との差が20%以内である共振振動子を備えることを特徴とする超音波処置具を提供する。
グ率との差を20%以内、好ましくは10%以内とすることにより、振動板と圧電体膜の
共振振動により振動速度を高くすることができる。
また、振動板を圧電素子が形成されている面に対して水平方向に伸縮振動させているの
で、超音波処置具として使用した場合に、生体の切開作用、コアギュレーションによる止
血作用を得ることができる。
また、高い振動速度を得ることができるので、ホーン部が不要、あるいは、変成比を小さくすることができるので、処置部のサイズを大きくすることができる。したがって、超音波処置具として好適に用いることができる。
図1は、本発明に用いられる共振振動子50の構造の一例を模式的に示す平面図であり、図2は、図1に示す共振振動子50の駆動部56の基板(振動板)52および圧電素子54の構造を模式的に示す断面図である。
次に、本発明の共振振動子50に用いられる圧電素子54について説明する。圧電素子54は、図2に示すように、基板52上に、下部電極64、圧電体膜66、上部電極68が順次積層された素子であり、圧電体膜66に対して、下部電極64と上部電極68とにより厚み方向に電界が印加されるようになっている。圧電体膜66は、電界が印加されると、圧電素子54の電界方向と垂直方向(d31方向)に伸縮するため、基板52の長手方向、すなわち、圧電素子54が形成されている面に対して水平方向に伸縮振動する。
(式中、A:Aサイト元素であり、Pbを含む少なくとも1種の元素、B:Bサイトの元素であり、Ti、Zr、V、Nb、Ta、Cr、Mo、W、Mn、Sc、Co、Cu、In、Sn、Ga、Zn、Cd、Fe、Ni、およびランタニド元素からなる群より選ばれた少なくとも1種の元素、O:酸素原子。a=1.0かつb=1.0である場合が標準であるが、これらの数値はペロブスカイト構造を取り得る範囲内で1.0からずれてもよい。)
下記に示す気相成長法により圧電体膜を成膜することで、1.0≦aであるPb抜けのない組成の圧電体膜を成膜することができ、1.0<aであるPbリッチな組成の圧電体膜を提供することもできる。aの上限は特に制限がなく、1.0≦a≦1.3であれば、圧電性能が良好な圧電膜を得ることができる。
次に圧電体膜の製膜方法について説明する。本発明の圧電体膜は、プラズマを用いる気相成長法により膜を製膜することができ、成膜温度Ts(℃)と、成膜時のプラズマ中のプラズマ電位Vs(V)とフローティング電位Vf(V)との差であるVs−Vf(V)と、成膜される膜の特性との関係に基づいて製膜条件を決定することができる。
上述したような成膜条件を変更し、基板のヤング率に対する基板のヤング率と圧電体膜のヤング率の差を20%以内とすることにより、圧電体膜が振動した時に、基板と圧電膜の界面で働く応力を小さくすることができるため、機械的品質係数Qmを高くすることができる。機械的品質係数Qmは、後述する実施例における周波数と振動速度のグラフから求めることができる。
次に、本発明の共振振動子を用いた超音波処置具の一例について説明する。図4は、超音波処置具の一例として、超音波ナイフを備える超音波処置具の全体構成図である。超音波処置具10は、ESD処置において、針状ナイフや周辺切開および粘膜剥離用ナイフ(以下、「切開剥離ナイフ」ともいう)などの超音波ナイフ(メス)として機能するナイフ部12と、ナイフ部12を超音波ナイフとして機能させるように術者によって操作される操作部本体14とを有し、超音波処置具10は、ナイフ部12に電圧を印加する高周波発生装置16から構成される。この超音波処置具10においては、上述の共振振動子50の基板52に相当するのが刃部18である。
ヤング率が113GPaであるTi合金、Ti−6Al−4V基板で図1に示すような矩形共振振動子を作製した。振動部は固定部を介して支持部に固定されている。基板の厚みは0.3mmであった。
成膜装置:Rfスパッタ装置、
ターゲット:Pb1.3((Zr0.52Ti0.48)0.88Nb0.12)O3焼結体(Bサイト中のNb量:12モル%)、
基板温度:450℃、
基板―ターゲット間距離:60mm、
成膜圧力:0.29Pa、
成膜ガス:Ar/O2=97.5/2.5(モル比)。
Claims (6)
- 振動板と、圧電体膜および上部電極からなる圧電素子と、を有し、
前記振動板は、前記圧電素子が形成されている面に対して水平方向に伸縮振動し、
前記振動板のヤング率に対する、前記振動板のヤング率と前記圧電体膜のヤング率との
差が20%以内である共振振動子を備えることを特徴とする超音波処置具。 - 前記振動板のヤング率に対する、前記振動板のヤング率と前記圧電体膜のヤング率との
差が10%以内であることを特徴とする請求項1に記載の超音波処置具。 - 前記振動板はチタン(Ti)あるいはその合金から形成されていることを特徴とする請
求項1又は2に記載の超音波処置具。 - 前記圧電体膜の膜厚が1μm以上5μm以下であることを特徴とする請求項1から3の
いずれか1項に記載の超音波処置具。 - 機械的品質係数Qmが2000以上であることを特徴とする請求項1から4のいずれか
1項に記載の超音波処置具。 - 機械的品質係数Qmが4000以上であることを特徴とする請求項1から5のいずれか
1項に記載の超音波処置具。
Priority Applications (3)
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JP2011037502A JP5301585B2 (ja) | 2011-02-23 | 2011-02-23 | 超音波処置具 |
US13/348,196 US20120212102A1 (en) | 2011-02-23 | 2012-01-11 | Resonant transducer and ultrasonic treatment device including resonant transducer |
CN201210044487.4A CN102648869B (zh) | 2011-02-23 | 2012-02-23 | 谐振换能器和包括谐振换能器的超声处置装置 |
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JP2011037502A JP5301585B2 (ja) | 2011-02-23 | 2011-02-23 | 超音波処置具 |
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JP5301585B2 true JP5301585B2 (ja) | 2013-09-25 |
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JP5350418B2 (ja) * | 2011-02-28 | 2013-11-27 | 富士フイルム株式会社 | 共振振動子、共振振動子の製造方法およびこの共振振動子を有する超音波処置具 |
CN107113513B (zh) * | 2015-04-27 | 2019-11-08 | 奥林巴斯株式会社 | 超声波振子的制造方法和超声波振子 |
JP2017092097A (ja) * | 2015-11-04 | 2017-05-25 | セイコーエプソン株式会社 | 圧電素子、超音波プローブ、超音波測定装置及び圧電素子の製造方法 |
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JP3265461B2 (ja) * | 1997-02-12 | 2002-03-11 | シャープ株式会社 | 超音波駆動モータ |
JP2000183413A (ja) * | 1998-12-21 | 2000-06-30 | Ricoh Co Ltd | 変位素子及びその作製方法 |
US6909221B2 (en) * | 2002-08-01 | 2005-06-21 | Georgia Tech Research Corporation | Piezoelectric on semiconductor-on-insulator microelectromechanical resonators |
JP2004214275A (ja) * | 2002-12-27 | 2004-07-29 | Canon Inc | 圧電素子 |
JP2004352544A (ja) * | 2003-05-28 | 2004-12-16 | Murata Mfg Co Ltd | 圧電磁器組成物およびそれを用いた圧電デバイス |
JP2005129670A (ja) * | 2003-10-23 | 2005-05-19 | Canon Inc | ユニモルフ型圧電膜素子とその作製方法及びユニモルフ型インクジェットヘッド |
US7113055B2 (en) * | 2003-11-07 | 2006-09-26 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric resonator, method of manufacturing piezoelectric resonator, and filter, duplexer, and communication device using piezoelectric resonator |
JP4909279B2 (ja) * | 2005-10-18 | 2012-04-04 | 株式会社日立製作所 | 超音波探触子 |
JP2007123483A (ja) * | 2005-10-27 | 2007-05-17 | Kyocera Corp | 圧電アクチュエータ及び液体吐出装置 |
JP2007204346A (ja) * | 2006-02-06 | 2007-08-16 | Iai:Kk | 圧電磁器組成物と圧電共振子 |
JP4726133B2 (ja) * | 2006-03-28 | 2011-07-20 | Necトーキン株式会社 | 圧電振動子および圧電振動ジャイロ |
US20080194999A1 (en) * | 2007-02-09 | 2008-08-14 | Norihiro Yamaha | Ultrasonic treatment apparatus and treatment method |
JP2009124640A (ja) * | 2007-11-19 | 2009-06-04 | Hitachi Media Electoronics Co Ltd | 薄膜圧電バルク波共振器およびその製造方法、並びに薄膜圧電バルク波共振器を用いた薄膜圧電バルク波共振器フィルタ |
US7602102B1 (en) * | 2008-04-24 | 2009-10-13 | Skyworks Solutions, Inc. | Bulk acoustic wave resonator with controlled thickness region having controlled electromechanical coupling |
-
2011
- 2011-02-23 JP JP2011037502A patent/JP5301585B2/ja active Active
-
2012
- 2012-01-11 US US13/348,196 patent/US20120212102A1/en not_active Abandoned
- 2012-02-23 CN CN201210044487.4A patent/CN102648869B/zh active Active
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CN102648869B (zh) | 2016-03-23 |
CN102648869A (zh) | 2012-08-29 |
US20120212102A1 (en) | 2012-08-23 |
JP2012174995A (ja) | 2012-09-10 |
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