JP5298792B2 - Alignment mark detection method - Google Patents

Abstract

This invention provides a testing method for an alignment mark and a device thereof capable of performing correct workpiece mark testing even when the representations of workpiece marks projected onto the photographic element of an alignment microscope are different. The solution uses an alignment microscope (10) to carry out surface image collection of a workpiece (W), such that a plurality of different figures of representations (shape, darkness/brightness, or color tone) which should be registered as the workpiece marks (WAM) are used as workpiece marks (WAM1-n) for registry to the memory part (11b) of the control part (11). During the testing of the workpiece marks, the workpiece marks (WAM1~n) are used to search the figure in the search area to compare the points of consistency between the figure in the search area and the registered workpiece marks (WAM1-n). When the points exceed a predetermined value, the figure is determined as the workpiece marks (WAM) on the workpiece (W). The positioning control part (11e) uses the workpiece marks (WAM) to position the mask (M) and the workpiece (W).

Description

The present invention detects a mask alignment mark (mask mark) formed on a mask and a work alignment mark (work mark) formed on a workpiece so that the two are in a preset positional relationship. perform positioning (alignment), an exposure apparatus that irradiates light to the workpiece through the mask relates to the detection of how to detect the workpiece alignment marks.

An exposure apparatus is used in a process of manufacturing a pattern of a semiconductor element, a printed circuit board, a liquid crystal substrate or the like by photolithography. The exposure apparatus aligns the mask on which the mask pattern is formed and the work to which the pattern is transferred in a predetermined positional relationship, and then irradiates light including exposure light through the mask. As a result, the mask pattern is transferred (exposed) to the workpiece.
The alignment of the mask and the workpiece in the exposure apparatus is generally performed as follows.
A mask mark formed on the mask and a work mark formed on the workpiece are detected by an alignment microscope. The detection data is subjected to image processing, the respective position coordinates are obtained, and the mask or workpiece is moved so that the positions of the two are in a preset positional relationship. The mask and workpiece must be aligned in two directions (X direction and Y direction) and in the rotational direction (θ direction) in the plane. Therefore, two or more mask marks and work marks are formed.

FIG. 9 shows a schematic configuration of the alignment microscope 10 that detects a workpiece mark. As described above, two or more mask marks and work marks are formed, and accordingly, two or more alignment microscopes 10 are provided accordingly. In the figure, only one (one) is shown. ing. The alignment microscope 10 includes a half mirror 10a, lenses L1 and L2, and a CCD camera 10b.
Reference numeral 11 denotes a control unit that performs image processing and the like, 12 denotes a monitor, and W denotes a work on which a work mark WAM is formed. In the figure, the work mark WAM is detected (pattern search) as follows.

A) Registration of Work Mark Prior to detection of the work mark WAM, first, a work mark pattern to be detected is registered in the control unit 11.
As the work mark WAM, for example, a cross-shaped mark shown in FIG. 10A is used, and as shown in FIG. 10B, the control unit 11 has a cross-shaped work in units of one pixel of the monitor. It is registered as one pattern including the mark and its background. That is, in order to facilitate the description in FIG. 5, the number of pixels is 5 × 5, but a pattern is registered in which 5 pixels at the center of the screen are black in a cross shape and 20 pixels around the pixel are white.
Specifically, a sample substrate on which a work mark WAM to be detected is formed is placed under an alignment microscope and illuminated with illumination light.
The registered work mark WAM is detected by an alignment microscope (for example, 3 times magnification) 10. On the monitor 12, a range (for example, a range of 15 mm × 15 mm as shown in FIG. 11) that can be captured by the alignment microscope 10 and processed by the control unit 11 is displayed.

Next, the work mark WAM is surrounded on the monitor 12 by a virtual line for work mark registration (dotted line in FIG. 11) on the monitor 12 so that the entire work mark WAM to be registered enters, and the work mark WAM is registered in the control unit 11. The control unit 11 stores the work mark WAM based on the contrast in units of pixels surrounded by the virtual line. Thereby, the registration work of the work mark WAM is completed.
The size of the workpiece mark WAM varies depending on the type of workpiece, user, and process. For example, it is often used that the size of the virtual line surrounding the workpiece mark WAM is 200 μm to 700 μm as shown in FIG. Is called.
The shape of the work mark WAM also varies for the same reason as described above, and is not limited to the cross shape as shown in FIG. There are many such as a round shape as shown in FIG. 12A and a set of regular patterns as an alignment mark as shown in FIG. In any case, the registration range is set so that the entire pattern of one work mark is included.

B) Pattern search Next, an actual work mark WAM is detected. The sample substrate used for the work mark pattern registration is removed from under the alignment microscope, and the substrate (work) on which the pattern is actually formed is placed. The magnification of the microscope is the same magnification (3 times) that the pattern is registered above.
As shown in FIG. 9, illumination light is irradiated onto the work mark WAM on the work W via the half mirror 10a of the alignment unit 10, and the work mark WAM is received by the CCD camera 10b. Then, the image of the work mark WAM displayed on the monitor 12 is input to the control unit 11 and converted into coordinate data in units of pixels of the monitor 12.
The control unit 11 compares the registered pattern with the image of the received work mark WAM. For example, when the received image (detection pattern) of the work mark WAM is the detection pattern A shown in FIG. 10C, it is recognized as a score (correlation value) 60 because it matches 60% with the registered pattern.
Similarly, when the image (detection pattern) of the received work mark WAM is the detection pattern B shown in FIG. 10D, it is recognized as a score 80 because it matches 80% with the registered pattern. Furthermore, in the case of the detection pattern C shown in FIG. 10E, the received image of the work mark WAM is 100% identical, so that it is recognized as a score of 100.

As described above, a pattern search is performed on the entire area displayed on the monitor, and the position having the closest score (the highest) to 100 is recognized as the position of the work mark WAM (the position where the work mark WAM is detected). The position coordinates are stored as the position coordinates of the work mark.
Specifically, the vicinity of the workpiece mark WAM on the workpiece W is observed by the alignment unit 10. FIG. 13 is a diagram showing an actual work area projected by the monitor 12 at that time. As described above, the magnification of the alignment microscope is three times the same as the magnification when the work mark pattern is registered.
Therefore, the same range as FIG. 11 (range of 15 mm × 15 mm) is projected on the monitor 12. This range is moved (scanned) pixel by pixel, and the score is obtained at each position.
A pattern other than the work mark may be formed as shown in (B), for example, in the region (15 mm × 15 mm range) for searching for the work mark in FIG. 13, or as shown in (C). There is also a case where dust is attached to the surface. Sometimes the pattern or the shape of the garbage resembles a registered work mark pattern. In such a case, a plurality of positions with relatively high scores may be detected in the image processing area.

However, as described above, the control unit 11 stores the work mark WAM based on the contrast in units of pixels surrounded by virtual lines. Therefore, if the work mark WAM exists in the area of FIG. 13, the score at the position (A) is the highest. Accordingly, the position where the highest score is detected is set to be detected as the position of the work mark.
Various methods for comparing the input image as described above with a template image prepared in advance and determining the degree of similarity are known. For example, refer to Non-Patent Document 1 if necessary.
Supervised by Masashi Ejiri, “Image processing industry application overview, first volume, (Basic and system technology)”, published on January 17, 1994, Fuji Techno System Co., Ltd., first edition, p26-p27, p50-p52 JP-A-9-82615

In a semiconductor wafer exposure apparatus, a work mark formed on a wafer, which is a workpiece, is often formed by photolithography in the same manner as a circuit pattern formed on the same surface.
On the other hand, in an exposure apparatus for a printed circuit board, a hole (dent) having a diameter of about 100 μm that is formed in the printed circuit board by machining such as laser irradiation or drilling may be used as a work mark.
An illumination method called dark field illumination is used to detect such holes formed in the substrate. In dark field illumination, illumination light is irradiated obliquely onto a substrate, and an image sensor is disposed above the substrate. Holes are difficult to detect with illumination from directly above.
FIG. 14A is a diagram schematically showing a state in which the hole 101 formed in the substrate 100 is imaged by dark field illumination with the alignment microscope of FIG. In the figure, the illumination light 103 is shown only from the right side and the left side of the drawing, but actually, the hole 101 is illuminated from all directions of 360 °.

The illumination light 103 is incident on the printed circuit board 100 at an angle. The surface of the printed circuit board 100 is a diffusing surface, and the illumination light 103 applied to the surface of the substrate or the bottom of the hole is diffused and reflected, and a part of the illumination light 103 is reflected by the reflecting mirror 102 and is reflected by the image sensor (CCD). , (Not shown).
On the other hand, the light incident on the wall surface of the hole 101 is diffused and reflected, but the light reflected on the wall surface does not directly enter the image sensor (CCD).
Therefore, the hole 101 appears in the image sensor with different brightness between the wall portion and the other portions (the surface of the printed circuit board and the bottom portion of the hole). For example, as shown in FIG. 14B, the wall portion may appear in a ring shape with a black edge, and the bottom portion of the hole may appear gray like the substrate surface.
Therefore, when the hole with the bottom is ideally formed, a ring-shaped pattern as shown in FIG. 14B is registered as a registered image of the work mark WAM.

However, for example, even when holes having the same shape are processed, when they are detected by an alignment microscope, the appearance (shape, brightness, and color tone) of the imaging means (CCD) may be different.
One reason for this is when the shape of the finished holes accidentally changes.
FIG. 15 shows an example of the shape of a hole formed by processing a printed board with a laser or a drill. This figure is a sectional view of the hole.
FIG. 15A shows an ideal hole shape. However, depending on the shape of the tip of the laser or drill, as shown in FIG. 15B, the wall of the hole may be slanted (in a mortar shape). Further, as shown in FIG. 15C, burrs 104 may be formed at the edge portions of the holes.
As described above, the holes formed by machining in the printed circuit board 100 may vary in shape. Therefore, when such a hole is detected with an alignment microscope as a work mark, the appearance on the imaging means (CCD) is different.

Another reason why the appearance of the imaging means (CCD) is different is due to the processing performed after the hole formation.
For example, as shown in FIG. 15D, the printed board may be plated with a metal foil such as copper 105 on the surface, and the inside of the hole is also plated. Since the reflectance of the surface is changed by metal plating, the appearance on the imaging means (CCD) varies depending on the presence or absence of plating.
Moreover, as shown in FIG.15 (e), a resist film may be affixed on the metal plated. The resist film 106 has a thickness of several tens of μm. When the resist film 106 is pasted, the resist film 106 cannot be pasted along the side surface or the bottom surface of the hole, and the opening of the hole is blocked.
Therefore, in the hole portion, the reflectance of illumination light and the direction in which the light is reflected change depending on the resist film, and how the imaging means (CCD) looks when the resist film is not applied and when the resist film is applied. Is different.
For example, as shown in FIG. 15E, when a resist film is applied, the shape of the hole detected by the alignment microscope may appear as a black circle as a whole.
In addition, depending on how the resist film is applied, the degree of sag of the film in the hole also changes, so that the appearance on the imaging means (CCD) differs.

If the appearance of the work mark is different, the actually picked-up work mark image is different from the work mark image stored in the control unit. When this happens, the score at the position where the work mark exists becomes low, and the work mark cannot be detected correctly.
This will be described with reference to FIG. The ring-shaped pattern shown in FIG. 16A is an image of a work mark registered in the control unit.
FIG. 16B shows a case where the work mark exists in the area where the work mark on the substrate is searched (searched) and looks almost the same as the registered image. In this case, the registration marks in FIG. 16A almost coincide with each other at the positions enclosed by the squares in FIG. 16B, and the score is, for example, 9000 points (10,000 full marks).
FIG. 16C shows a case where this is a problem of this case. This is a case where a work mark exists in the area to be searched, but looks different from the registered mark due to the above-mentioned causes, and looks like a black circle. The center of the ring is white, but the black circle is black in the center. Therefore, the score at the position surrounded by the square in FIG. 16C is low, for example, about 2000 points.

FIG. 16D shows a case where a black square outline pattern such as wiring that is not a work mark exists in the search area. In this case, although the shapes are different, the light and dark pattern that the middle is black and the peripheral part is white is similar, so the score at the position surrounded by the square in FIG. 16D is higher than in the case of FIG. For example, it may be 5000 points.
Although FIG. 16C looks different from the registered mark, it must be detected because it is a work mark. However, since FIG. 16D is not a work mark, it should not be detected as a work mark.
However, in order to detect FIG. 16 (c) as a work mark, for example, if the control unit is set to “use a work mark if the score is 2000 points or more”, FIG. It will be detected as a mark. On the other hand, in order not to detect FIG. 16D as a work mark, if “is set as a work mark when the score is 6000 points or more” is set, FIG. 16C cannot be detected as a work mark.
Therefore, the work mark cannot be detected correctly.

As described above, the work marks formed on the work having the same shape differ in the appearance (shape, brightness, darkness, and color tone) projected by the image pickup device depending on the processing conditions of the work mark and the processing in the printed circuit board manufacturing process. Sometimes. In this case, even if an actual work mark is detected with the registered work mark, it may not be detected.
The present invention has been made to solve the above-described problems, and an object of the present invention is to correctly detect a work mark even if the work mark projected on the image sensor of the alignment microscope is different. it is to provide a detection how the work mark that can.

When the workpiece alignment mark (work mark) formed on the workpiece as a protrusion or dent (including through-holes) is observed with an alignment microscope, it has the same outline, but some parts are missing, color tone, color density, A plurality of patterns with different appearances such as different brightness are observed. Among such a plurality of patterns, a plurality of patterns to be detected as work / alignment marks having the same contour and different color tone / color density / brightness / darkness are registered in the storage unit.
Then, when detecting a work mark formed on the work, the plurality of registered patterns to be detected as work alignment marks are read one by one, and the received pattern on the work is compared with the read registered pattern. And the degree of coincidence between the two is evaluated.
That is, first, the search area is searched with the registered first pattern, and the score is obtained by comparing with the pattern on the workpiece. Next, the search area is searched with the second pattern registered in the same manner to obtain a score. This process is repeated, and when a registered pattern showing a score higher than a preset value is detected, this registered pattern is adopted as a pattern corresponding to the work mark. Alternatively, when the above comparison is repeated and a registered pattern showing the highest score is detected, this registered pattern may be adopted as a pattern corresponding to the work mark.
If a registered pattern with the highest degree of coincidence as described above or a registered pattern with a degree of coincidence equal to or higher than a preset value is found, an image receiving pattern with a high degree of coincidence with the registered pattern is obtained as a work alignment. It detects as a mark and stores its position.
In an exposure apparatus such as a projection exposure apparatus, the mask and the work are aligned using the pattern detected as described above as a work mark, and the mask pattern formed on the mask is transferred onto the work.
In the alignment of the mask and the workpiece, the workpiece stage is moved in the XY directions so that the detected coordinate position of the workpiece mark coincides with, for example, the positional coordinate of the mask alignment mark (mask mark) detected and registered in advance. And rotating around an axis perpendicular to the XY plane.

In the present invention, a plurality of registered patterns to be detected as workpiece alignment marks are compared with the received pattern on the workpiece, the degree of coincidence is evaluated, and the received pattern on the workpiece is determined based on the evaluation result. Since it is detected as a work alignment mark, the work mark can be removed even if parts of the same shape may appear differently because some parts are missing or the color density and brightness are different. It can be detected reliably.
For this reason, even if the work mark is formed on the work as a protrusion or a dent, the work mark can be reliably detected and alignment can be performed with high accuracy.

FIG. 1 is a diagram showing a configuration example of a projection exposure apparatus which is one of application targets of the present invention.
In the figure, MS is a mask stage. On the mask stage MS, a mask M on which a mask mark MAM and a mask pattern MP are formed is placed and held.
Exposure light is emitted from the light irradiation device 1. The emitted exposure light is irradiated onto the workpiece W placed on the workpiece stage WS via the mask M and the projection lens 2, and the mask pattern MP is projected onto the workpiece W and exposed.
Between the projection lens 2 and the workpiece W, there are two alignment microscopes 10 that can move in the direction of the arrow in FIG. Before the mask pattern MP is exposed on the workpiece W, the alignment microscope 10 is inserted into the position shown in the figure, the mask mark MAM and the workpiece mark WAM formed on the workpiece are detected, and the mask M and the workpiece W are aligned. I do. After the alignment, the alignment microscope 10 is retracted from the workpiece W. In FIG. 1, only one of the two alignment microscopes provided is shown.
As described above, the alignment microscope 10 includes the half mirror 10a, the lenses L1 and L2, and the CCD camera 10b. In order to perform the dark field illumination shown in FIG. 14, the alignment microscope 10 is provided with an illuminating means 10c for irradiating illumination light obliquely to the substrate.

The mask mark MAM image, work mark image, etc. received by the CCD camera 10 b of the alignment microscope 10 are sent to the control unit 11.
The control unit 11 includes an image processing unit 11a that processes an image received by the CCD camera, and a storage unit 11b that stores a plurality of registered patterns to be detected as work marks, positional coordinate information such as mask marks, various parameters, and the like. .
Further, the control unit 11 compares the pattern image received by the CCD camera 10b and processed by the image processing unit 11a with the pattern image registered in the storage unit 11b to obtain a degree of coincidence, thereby calculating a score. Based on the degree of coincidence obtained by the unit 11c and the comparison / evaluation unit 11c, a determination unit 11d for determining whether the received pattern on the workpiece is a pattern to be detected as a workpiece mark, and a pattern detected as the workpiece mark An alignment control unit 11e that moves the work stage WS and / or the mask stage MS so that the position coordinates coincide with the position coordinates of the mask mark image stored in the storage unit 11b, and a workpiece according to instructions from the operator. A registration unit 11f for registering a mark or the like in the storage unit 11b is provided.
The work stage WS or the mask stage MS is driven by the work stage drive mechanism 4 and the mask stage drive mechanism 3 controlled by the alignment control unit 11e, and in the XY directions (X, Y: mask stage MS, work stage WS surface) And move around an axis perpendicular to the XY plane.
A monitor 12 is connected to the control unit 11, and an image processed by the image processing unit 11 a is displayed on the screen of the monitor 12.

In FIG. 1, the alignment of the mask M and the workpiece W is performed as follows.
Illumination light is irradiated onto the mask M from the light irradiation device 1 or an alignment light source (not shown), and the mask mark MAM image is received by the CCD camera 10 b of the alignment microscope 10 and sent to the control unit 11. The image processing unit 11a of the control unit 11 converts the mask mark MAM image into position coordinates and stores it in the storage unit 11b.
Various methods for detecting a mask mark have been proposed. For example, refer to Patent Document 1 if necessary.
Next, the illumination light is irradiated onto the workpiece W from the illumination means 10c of the alignment microscope 10, the pattern search is performed as described above, the workpiece mark WAM on the workpiece W is detected, and the control unit 11 obtains the position coordinates.
The control unit 11 moves the work stage WS (or the mask stage MS or both) so that the stored position coordinates of the mask mark MAM and the position coordinates of the detected work mark WAM have a predetermined positional relationship. Then, the mask M and the workpiece W are aligned.

Next, the work mark detection procedure and the alignment with the mask will be described in detail with reference to FIGS.
(1) First, the position of the mask mark MAM is detected. Therefore, as shown in FIG. 2A, the position coordinates (xm1, ym2) of the mask mark MAM within the field of view (within the viewing angle range) of the alignment microscope 10 are obtained.
That is, the image captured by the CCD camera 10b of the alignment microscope 10 is processed by the image processing unit 11a of the control unit 11, and the position coordinates (xm1, ym2) of the mask mark MAM are obtained and stored in the storage unit 11b.
(2) Register the work mark in the storage unit 11 b of the control unit 11. This registration is performed visually by the operator as follows.
The actual workpiece W1 is placed on the workpiece stage WS, and the surface image of the workpiece W1 is received using the alignment microscope 10 and processed by the image processing unit 11a, so that the surface of the workpiece W1 is displayed on the monitor 12.
The alignment microscope 10 at this time is the same alignment microscope 10 as when the workpiece mark WAM is actually detected, and the magnification of the alignment microscope 10 is the same as when the workpiece mark WAM is actually detected (for example, 3 times). is there. Moreover, the alignment microscope 10 is kept at the same position as the position when the mask mark is detected, and the visual field (viewing angle) of the alignment microscope 10 is also the same.

The worker looks at the projected image of the workpiece W1 and searches for the workpiece mark WAM. If a pattern to be registered as the work mark WAM is found, as in the description of “work mark registration” above, as shown in FIG. Then, the work mark WAM is surrounded by a virtual line for registering the work mark, for example, the center position is visually identified, and a mark such as + is attached.
For example, when the work mark WAM is a circle, an image observed with the alignment microscope 10 may appear as a circle or a black circle as shown in FIG. 3B-2, for example. A pattern to be registered as a work mark WAM is selected from the patterns.
Then, for the pattern to be registered as the work mark WAM, the pattern is surrounded by a virtual line for registering the work mark, and the area surrounded by the virtual line is stored as a pattern image of the work mark WAM1 by giving a registration instruction to the registration unit 11f. Register in the section 11b.
Also, the center position of the pattern is visually identified, and the distances dx and dy from the upper left corner of the square formed by the virtual line to the center position of the pattern are registered in the storage unit 11b as the pattern position coordinates.
Here, as shown in FIG. 3B-3, if the center position of the pattern is not set correctly, the incorrect position (+ position) is registered as the work mark position.
Various methods for automatically obtaining the center position of a pattern by calculation or the like are conventionally known. The setting of the center position of a pattern is not automatically determined by visual observation but by image processing by the image processing unit 11a. It may be.

Conventionally, as described above, the registration of the work mark WAM has been completed by registering only one work mark. However, in the present invention, a plurality of patterns having different appearances to be registered as work marks are registered as work marks.
For this reason, when registering a work mark continuously, the current work W1 is taken down from the work stage WS, and another second work W2 that should have the same shape of the work mark WAM is formed on the work stage WS. Place.
In the same manner as described above, the surface of the workpiece W2 is projected on the monitor 12 by the alignment microscope 10 to search for the workpiece mark WAM. If the found work mark WAM is different from the previously registered work mark WAM in appearance (shape, brightness, color tone), it is surrounded by a virtual line for work mark registration in the same manner as described above, and the second work mark WAM2 Is registered in the storage unit 11b of the control unit 11.

Subsequently, the workpiece W2 is lowered from the workpiece stage WS, and the third workpiece W3 is placed on the workpiece stage WS. Using the alignment microscope 10, the surface of the workpiece W3 is copied onto the monitor 12, and the workpiece mark WAM is searched. If the found work mark WAM differs from the work marks WAM1 and WAM2 registered so far in appearance (shape, brightness, and color tone), the work mark WAM is surrounded by a virtual line for registering the work mark in the same manner as described above. The work mark WAM3 is registered in the storage unit 11b of the control unit 11.
Thereafter, this is repeated, and all patterns having different appearances of the work mark WAM are registered in the storage unit 11b of the control unit 11, respectively.

(3) Next, the registered work mark is compared with the pattern on the work to detect the work mark on the work W.
When detecting a work mark, a pattern in the search area is searched (searched) using all the work marks WAM1 to WAMn registered in the storage unit 11b of the control unit 11. The comparison / evaluation unit 11c compares the registered work marks WAM1 to WAMn with the pattern in the search area to obtain a score of coincidence. The determination unit 11d adopts the work mark from among the registered work marks WAM1 to n when the score exceeds a certain value, for example, or is the highest score.
Then, a pattern in the search area corresponding to the work mark with the highest degree of coincidence or the work mark with a degree of coincidence equal to or higher than a preset value is detected as a work mark on the work W, and Remember the position.
For example, if there are two types of work mark appearance, the first work mark WAM1 is a ring-shaped pattern, and the second work mark WAM2 is a black circle pattern, the two work marks WAM1 and WAM2 Use to search.
That is, first, the search area is searched with the first work mark WAM1 to obtain a score. Next, the search area is searched with the second work mark WAM2 to obtain a score. Then, the alignment control unit 11e performs alignment between the mask and the workpiece using a work mark having a score equal to or higher than a preset value or using a work mark having the highest score.

The work mark search is performed as shown in FIG. 4, for example.
For example, assume that a rectangular area P shown in FIG. 4C-1 is registered in the storage unit 11b as a work mark to be searched.
To search for a work mark, as shown in FIG. 4C-2, within the field of the alignment microscope 10, for example, from the upper left corner of the field of view, the work mark WAM shown in FIG. The vertical Y and horizontal X rectangular areas P including the pattern are overlapped while being gradually shifted to find a place with a high degree of coincidence.
Then, when a region having a high degree of coincidence is searched within the field of view of the alignment microscope, the coordinates (x1, y1) of the upper left corner of the rectangular region P at that time are obtained, and the center position of the pattern in the region P is indicated. By adding (dx, dy), (x1 + dx, y1 + dy) is set as the position coordinates (xw1, yw1) of the detected work mark.
(4) When the position coordinates of the work mark are detected as described above, the alignment control unit 11e determines that the position coordinates (xw1, yw1) of the detected work mark WAM are as shown in FIG. Then, the work stage WS or the mask stage MS (or both) is moved so as to coincide with the position coordinates (xm1, ym1) of the mask mark stored in advance, and both are made coincident.

In the above description, a case has been described in which a plurality of work marks WAM are registered at once and a search area is searched (searched) using these work marks WAM1 to WAM. When a pattern to be registered as a work mark is detected while aligning the workpiece W, the pattern may be registered as a work mark each time.
That is, first, the first work mark WAM is registered, the work mark on the work W is detected using the registered work mark, and alignment is performed using the detected work mark. In the process of detecting the work mark, when a pattern to be newly registered as a work mark that looks differently is detected, this pattern is registered in the storage unit 11b as the work mark WAM as described above.
In the detection of the next work mark, the work mark is detected using the pattern to be registered as the previously registered work mark and the newly registered pattern.

Next, the detection of a work mark will be described in detail with reference to the flowcharts of FIGS.
Here, the registered work mark patterns (registered marks) are two (n = 2), WAM1 and WAM2, and the first registered mark WAM1 is a ring-shaped pattern as shown in FIG. 5 (a). The second registration mark WAM2 has a black circle pattern as shown in FIG.
(1) When there is a work mark that looks like a ring in the work mark search area, as shown in FIG.
(i) Start search. First, the search area is searched with i = 1st registration pattern, that is, the first registration pattern WAM1 (steps S1 and S2 in FIG. 6). If the pattern of FIG.5 (c) is detected, the comparison / evaluation part 11c of the control part 11 will compare and evaluate the 1st registration pattern WAM1 and the pattern of FIG.5 (c), and will obtain | require a score.
Since the pattern of the first registration mark WAM1 substantially matches the work mark of FIG. 5C that is actually seen, a high score, for example, 9000 points can be obtained. This value is stored in the storage unit 11b of the control unit 11 as a score of the first registration mark WAM1 (step S3).

(ii) Go to step S4, add 1 to i, and set i = 2. Since n = 2 and i> n is not satisfied, the search area is searched with the second registration mark WAM2 where i = 2 (steps S1 and S2).
(iii) Whereas the second registered pattern WAM2 is a black circle, when the visible mark pattern is the ring shown in FIG. 5C, the score is low, for example, 2000 points. This value is stored in the storage unit 11b as the score of the second registration mark WAM2 (step S3).
(iv) Go to step S4, add 1 to i, and set i = 3. Since the i> n, the determination unit 11d of the control unit 11, a first score 9000 points registration marks WAM _1, and a score 2000 points of the second registration mark WAM2 to compare. And the 1st registration mark WAM1 with which the high score was obtained is employ | adopted as a work mark in the workpiece | work which has the pattern of FIG.5 (c). This completes the search.

(2) As shown in FIG. 5D, when the work mark looks like a black circle, the following occurs. Note that the description of the same parts as described above is omitted.
(i) First, the search area is searched with the first registered pattern WAM1. The pattern of both is not similar, and the score is 2000 points low. This value is stored in the storage unit 11b as the score of the first registration mark WM1.
(ii) Next, the search area is searched with the second registration mark WAM2. Since the second registration mark WAM is similar in pattern to the visible work mark, a high score (9000 points) can be obtained. This value is stored in the storage unit 11b as the score of the second registration mark WAM2. (iii) The determination unit 11d of the control unit 11 compares the score of 2000 of the first registration mark WAM1 with the score of 9000 of the second registration mark WAM2. Then, the second registration mark WAM2 from which a high score is obtained is adopted as a work mark in the work of FIG.

(3) A case where work patterns that are not black square ring-shaped work marks such as wiring shown in FIG. 5 (e) are mixed together with the work marks of FIG. 5 (c) and FIG. 5 (d). Even in such a case, the work mark can be detected correctly. This will be described below.
(A) When the ring-shaped work mark of FIG. 5C and the black square ring-shaped work pattern of FIG.
(i) First, the search area is searched with the first registered pattern WAM1. The score for the pattern of FIG. 5 (e) is 5000 points, and the score for the pattern of FIG. 5 (c) is 9000 points. The comparison / evaluation unit 11c of the control unit 11 stores the higher score of 9000 points in the storage unit 11b as the score of the first registration mark WAM1.
(ii) Next, the search area is searched with the second registered pattern WAM2. The score for the pattern of FIG. 5 (e) is 1500 points, and the score for the pattern of FIG. 5 (c) is 2000 points. The comparison / evaluation unit 11c stores a high score of 2000 points in the storage unit 11b as the score of the second registration mark WAM1.
(iii) The determination unit 11d of the control unit 11 compares the score 9000 points of the first registration mark WAM1 with the score 2000 points of the second registration mark WAM2. Then, the pattern shown in FIG. 5C, which is a search result by the first registration mark WAM1 with a high score, is adopted as a work mark.

(B) The case where the black circle work mark in FIG. 5D and the black square ring-shaped work pattern in FIG. 5E are mixed.
(i) Search the search area with the first registered pattern WAM1. The score for the pattern of FIG. 5 (e) is 5000 points, and the score for the pattern of FIG. 5 (d) is 2000 points. The comparison / evaluation unit 11c stores the higher score of 5000 points in the storage unit 11d as the score of the first registration mark WAM1.
(ii) Search the search area with the second registered pattern WAM2. The score for the pattern of FIG. 5 (e) is 1500 points, and the score for the pattern of FIG. 5 (d) is 9000 points. The comparison / evaluation unit 11c stores the higher score of 9000 points in the storage unit 11d as the score of the second registration mark WAM1.
(iii) The determination unit 11d compares the score of 5000 of the first registration mark WAM1 with the score of 9000 of the second registration mark WAM2. Then, the pattern shown in FIG. 5D, which is a search result by the second registration mark WAM2 with a high score, is employed as a work mark.

As described above, if the control unit 11 is set so that the registration mark with the highest score is adopted as a work mark, for example, a black square ring-shaped pattern as described above is mistakenly generated. It is not detected as a work mark.
If no work mark actually exists in the search area (no black circle or ring), it is conceivable that a black work pattern with a score of 5000 points is erroneously detected as a work mark. As a countermeasure, for example, it may be set in the control unit 11 as “adopt as a work mark only when the score is 9000 points or more”.

As described above, when the appearance (shape, brightness / darkness, and color tone) of the work mark is variously different, all patterns having different appearances are registered.
However, when the number of registered patterns (registered marks) increases, the exposure apparatus searches for all registered marks until the processing shown in the flowchart of FIG. If the operation is performed and the score is determined), it takes time to detect the work mark, and as a result, the exposure processing time becomes longer as a whole. That is, the throughput is deteriorated.
Therefore, for example, when a score more than a preset score is obtained with the registration mark i (i-th registration mark), the search is terminated at that stage, and the search with the next i + 1-th registration mark is skipped. It is conceivable to set to proceed to the next procedure (work mark position detection and mask / work position alignment).
The score value that prevents the search from proceeding with the next registration mark is referred to as an “interruption threshold value”.

FIG. 7 shows a flowchart of the above-mentioned “process for terminating the search at that stage when a score equal to or higher than the preset score is obtained”.
In FIG. 7, the work mark detection process is performed as follows.
Here, n work mark patterns (registered marks) are registered in advance. An interruption threshold value (for example, 9000 points) is set in advance in the storage unit 11b of the control unit 11. The interruption threshold is a score value that should be able to detect the work mark correctly, and is obtained in advance by an experiment or the like.
(i) Start search. The search area is searched with the first registration pattern WAM1 which is i = 1st registration pattern (steps S1 and S2). The comparison / evaluation unit 11c stores the highest score searched in the storage unit 11b as the score of the pattern detected by the first registration mark WAM1 (step S3).
(ii) The determination unit 11d compares the score of the pattern detected by the stored first registration mark WAM1 with an interruption threshold value (for example, 9000 points) (step S4).
If the score of the first registration mark WAM1 is 9000 points or more, the pattern detected by the first registration mark WAM1 is adopted as a work mark without performing the search by the _second registration mark WAM2 and the subsequent search. Is finished (step S6).

(iii) If the score of the first registration mark WAM1 is less than 9000, go to step S5, add 1 to i, and search for the search area with the second registration mark WAM2 with i = 2 (step S1, S2).
The highest score searched is stored in the storage unit 11b as the score of the pattern detected by the second registration mark WAM2 (step S3).
(iv) The determination unit 11d compares the stored score of the pattern detected by the second registration mark WAM2 with the interruption threshold value (9000 points) (step S4). If the score of the pattern detected by the second registration mark WAM2 is 9000 points or more, the pattern detected by the second registration mark WAM2 is adopted as a work mark without performing the search by the third registration mark WAM3 or later. The search is terminated (step S6).

(v) If the score of the pattern detected by the second registration mark WAM2 is also less than 9000, the search area is searched by the third registration mark WAM3.
This is repeated until i = n, and if a pattern exceeding the interruption threshold is detected, the pattern is adopted as a work mark (step S6).
If there is no pattern exceeding the interruption threshold, the scores of the patterns detected by the first registration mark WAM1 to the nth registration mark WAMn are compared. The pattern detected by the i-th registration mark WAMi with the highest score is adopted as a work mark (step S7), and the search is terminated.

If the interruption threshold is set in this way, the search for all registered patterns is not performed every time the mask and the workpiece are aligned, so that the work mark detection time can be shortened.
In addition to setting the interruption threshold, the number of times of use of each registered mark is accumulated so that searches can be performed in order from the registered mark with the highest number of times used, or from the most recently used mark. If a learning function is added to the control unit 11 such as performing a search in order, the possibility that a high-score registration mark can be found earlier increases, so the work mark detection time can be shortened. be able to.

In the present invention, when a bottomed hole (recess, dent) formed in the substrate is used as a work alignment mark (work mark), the hole is plated or a resist film is attached to the hole by an alignment microscope. An example has been described in which the appearance (shape, brightness, and color tone) of the detected work mark is different.
However, not only in the case of holes, even when the protrusions 107 (projections, bulges) formed on the substrate 100 are used as work alignment marks as shown in FIG. Change, the present invention can be applied.
For example, as shown in FIG. 8B, the surface reflectance may change depending on the presence or absence of plating of copper 105 or the like, and the appearance may change.
Furthermore, when the resist film 106 is attached to the protrusion as shown in FIG. 8C, the resist film 106 cannot be attached along the side face of the protrusion, and a space is formed on the side face of the protrusion. Therefore, the reflectance of the illumination light and the direction in which the light is reflected change, and the appearance on the imaging means (CCD) differs depending on whether the resist film is not applied or not.
Furthermore, depending on how the resist film is applied, the slackness of the film also changes, so that the appearance changes, but the present invention can also be applied to these cases.

It is a figure which shows the structural example of the projection exposure apparatus which is one of the application objects of this invention. It is a figure (1) explaining the detection procedure of the work mark of the Example of this invention, and alignment of a mask and a workpiece | work. It is FIG. (2) explaining the detection procedure of the work mark of the Example of this invention, and the alignment of a mask and a workpiece | work. It is FIG. (3) explaining the detection procedure of the work mark of the Example of this invention, and the alignment of a mask and a workpiece | work. It is a figure which shows the example of the input image imaged with the registered work mark and the alignment microscope. It is a flowchart which shows the detection process procedure of a work mark. It is a flowchart which shows the other detection processing procedure of a work mark. It is a figure which shows the other example from which the appearance of a work mark differs. It is a figure which shows schematic structure of an alignment microscope. It is a figure which shows an example of a registration pattern and a detection pattern. It is a figure which shows an example of the image displayed on a monitor. It is a figure which shows the example of a shape of a work mark. It is a figure explaining a pattern search. It is the figure which showed typically a mode that the hole formed in the board | substrate was imaged with dark field illumination with an alignment microscope. It is a figure which shows the example of the shape of the hole formed in the printed circuit board by processing with a laser or a drill. It is a figure which shows the example of the registered work mark and the image of a search area.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light irradiation apparatus 2 Projection lens 3 Mask stage drive mechanism 4 Work stage drive mechanism 10 Alignment microscope 10a Half mirror 10b CCD camera 10c Illumination means 11 Control part 11a Image processing part 11b Storage part 11c Comparison / evaluation part 11d Judgment part 11e Position alignment Control unit
11f Registration unit 12 Monitor L1, L2 Lens M Mask MAM Mask alignment mark (Mask mark)
MS mask stage W work WAM work alignment mark (work mark)
WS Work stage

Claims (1)

A method for detecting a work alignment mark formed on a work as a protrusion or a dent,
A workpiece alignment mark formed on an actual workpiece is received, and from the received workpiece alignment mark image, a plurality of workpiece alignment mark patterns having different appearances and the center of the workpiece alignment mark pattern are received. A first step of registering the position coordinates of the position in the storage unit in advance as a registration pattern;
A second step of receiving a pattern on the workpiece;
The storage unit one by one read out the registered multiple of the registration pattern into compares the pattern on the image-receiving Work, and a registration pattern read the third step of evaluating both the degree of coincidence When,
Adopting the pattern on the received workpiece and the registered pattern that obtained the highest degree of coincidence, or the registration pattern that obtained a degree of coincidence equal to or higher than a preset value,
The degree of coincidence is high receiving pattern of the adopted registered pattern, and a fourth step of detecting a work alignment marks,
A work alignment mark detection method comprising a fifth step of determining the position coordinates of the received pattern on the workpiece based on the center position coordinates of the registered pattern employed.

Images