JP5298491B2 - Transparent conductive film - Google Patents
Transparent conductive film Download PDFInfo
- Publication number
- JP5298491B2 JP5298491B2 JP2007258471A JP2007258471A JP5298491B2 JP 5298491 B2 JP5298491 B2 JP 5298491B2 JP 2007258471 A JP2007258471 A JP 2007258471A JP 2007258471 A JP2007258471 A JP 2007258471A JP 5298491 B2 JP5298491 B2 JP 5298491B2
- Authority
- JP
- Japan
- Prior art keywords
- silver
- conductive
- transparent
- film
- silver halide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- -1 silver halide Chemical class 0.000 claims abstract description 99
- 229910052709 silver Inorganic materials 0.000 claims abstract description 98
- 239000004332 silver Substances 0.000 claims abstract description 98
- 150000001875 compounds Chemical class 0.000 claims abstract description 38
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229920001940 conductive polymer Polymers 0.000 claims abstract description 32
- 238000011161 development Methods 0.000 claims abstract description 32
- 238000012545 processing Methods 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 239000011230 binding agent Substances 0.000 claims description 15
- 229920000767 polyaniline Polymers 0.000 claims description 9
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 claims description 8
- 229910021607 Silver chloride Inorganic materials 0.000 claims description 7
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 claims description 7
- SJOOOZPMQAWAOP-UHFFFAOYSA-N [Ag].BrCl Chemical compound [Ag].BrCl SJOOOZPMQAWAOP-UHFFFAOYSA-N 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 5
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 abstract description 11
- 239000002184 metal Substances 0.000 abstract description 11
- 239000002245 particle Substances 0.000 abstract description 10
- 238000005452 bending Methods 0.000 abstract description 8
- 239000012528 membrane Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 86
- 238000000034 method Methods 0.000 description 40
- 239000000243 solution Substances 0.000 description 38
- 230000018109 developmental process Effects 0.000 description 29
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 26
- 239000010410 layer Substances 0.000 description 22
- 239000000839 emulsion Substances 0.000 description 17
- 230000008569 process Effects 0.000 description 14
- 108010010803 Gelatin Proteins 0.000 description 13
- 229920000159 gelatin Polymers 0.000 description 13
- 239000008273 gelatin Substances 0.000 description 13
- 235000019322 gelatine Nutrition 0.000 description 13
- 235000011852 gelatine desserts Nutrition 0.000 description 13
- 238000012822 chemical development Methods 0.000 description 12
- 239000000975 dye Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- 238000007747 plating Methods 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 206010070834 Sensitisation Diseases 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 230000008313 sensitization Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 9
- 239000007788 liquid Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 238000002834 transmittance Methods 0.000 description 9
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 229920000139 polyethylene terephthalate Polymers 0.000 description 8
- 239000005020 polyethylene terephthalate Substances 0.000 description 8
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 7
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 7
- 239000002019 doping agent Substances 0.000 description 7
- CIWBSHSKHKDKBQ-JLAZNSOCSA-N Ascorbic acid Chemical compound OC[C@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-JLAZNSOCSA-N 0.000 description 6
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 238000001035 drying Methods 0.000 description 6
- 229910052736 halogen Inorganic materials 0.000 description 6
- DZVCFNFOPIZQKX-LTHRDKTGSA-M merocyanine Chemical compound [Na+].O=C1N(CCCC)C(=O)N(CCCC)C(=O)C1=C\C=C\C=C/1N(CCCS([O-])(=O)=O)C2=CC=CC=C2O\1 DZVCFNFOPIZQKX-LTHRDKTGSA-M 0.000 description 6
- IOLCXVTUBQKXJR-UHFFFAOYSA-M potassium bromide Chemical compound [K+].[Br-] IOLCXVTUBQKXJR-UHFFFAOYSA-M 0.000 description 6
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 6
- 238000005406 washing Methods 0.000 description 6
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 5
- 229910006404 SnO 2 Inorganic materials 0.000 description 5
- 239000003513 alkali Substances 0.000 description 5
- 229910021645 metal ion Inorganic materials 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 5
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 description 5
- 235000019345 sodium thiosulphate Nutrition 0.000 description 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 238000004040 coloring Methods 0.000 description 4
- 239000012153 distilled water Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- 230000001235 sensitizing effect Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 4
- GGZHVNZHFYCSEV-UHFFFAOYSA-N 1-Phenyl-5-mercaptotetrazole Chemical compound SC1=NN=NN1C1=CC=CC=C1 GGZHVNZHFYCSEV-UHFFFAOYSA-N 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
- 229920002284 Cellulose triacetate Polymers 0.000 description 3
- 239000002841 Lewis acid Substances 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 3
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 3
- 150000001342 alkaline earth metals Chemical class 0.000 description 3
- 235000011114 ammonium hydroxide Nutrition 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 229910001961 silver nitrate Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000004094 surface-active agent Substances 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- 150000003623 transition metal compounds Chemical class 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- XBYRMPXUBGMOJC-UHFFFAOYSA-N 1,2-dihydropyrazol-3-one Chemical class OC=1C=CNN=1 XBYRMPXUBGMOJC-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- CIWBSHSKHKDKBQ-DUZGATOHSA-N D-isoascorbic acid Chemical compound OC[C@@H](O)[C@H]1OC(=O)C(O)=C1O CIWBSHSKHKDKBQ-DUZGATOHSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229940101006 anhydrous sodium sulfite Drugs 0.000 description 2
- 235000010323 ascorbic acid Nutrition 0.000 description 2
- 239000011668 ascorbic acid Substances 0.000 description 2
- 229960005070 ascorbic acid Drugs 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 238000003851 corona treatment Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 235000010350 erythorbic acid Nutrition 0.000 description 2
- 125000001033 ether group Chemical group 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 229910003472 fullerene Inorganic materials 0.000 description 2
- 150000002430 hydrocarbons Chemical group 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 229940026239 isoascorbic acid Drugs 0.000 description 2
- HJOVHMDZYOCNQW-UHFFFAOYSA-N isophorone Chemical compound CC1=CC(=O)CC(C)(C)C1 HJOVHMDZYOCNQW-UHFFFAOYSA-N 0.000 description 2
- 150000007517 lewis acids Chemical class 0.000 description 2
- 239000003446 ligand Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 2
- 229920002492 poly(sulfone) Polymers 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- 239000004848 polyfunctional curative Substances 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229940005642 polystyrene sulfonic acid Drugs 0.000 description 2
- 229920000123 polythiophene Polymers 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- BHZRJJOHZFYXTO-UHFFFAOYSA-L potassium sulfite Chemical compound [K+].[K+].[O-]S([O-])=O BHZRJJOHZFYXTO-UHFFFAOYSA-L 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000003755 preservative agent Substances 0.000 description 2
- 230000002335 preservative effect Effects 0.000 description 2
- YPFDHNVEDLHUCE-UHFFFAOYSA-N propane-1,3-diol Chemical compound OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
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- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 125000003375 sulfoxide group Chemical group 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229920003169 water-soluble polymer Polymers 0.000 description 2
- 125000006569 (C5-C6) heterocyclic group Chemical group 0.000 description 1
- AIGNCQCMONAWOL-UHFFFAOYSA-N 1,3-benzoselenazole Chemical class C1=CC=C2[se]C=NC2=C1 AIGNCQCMONAWOL-UHFFFAOYSA-N 0.000 description 1
- BCMCBBGGLRIHSE-UHFFFAOYSA-N 1,3-benzoxazole Chemical class C1=CC=C2OC=NC2=C1 BCMCBBGGLRIHSE-UHFFFAOYSA-N 0.000 description 1
- CFSGUMFOSQULCJ-UHFFFAOYSA-N 1,3-bis(ethenylsulfonyl)-2,2-bis(ethenylsulfonylmethyl)propane Chemical compound C=CS(=O)(=O)CC(CS(=O)(=O)C=C)(CS(=O)(=O)C=C)CS(=O)(=O)C=C CFSGUMFOSQULCJ-UHFFFAOYSA-N 0.000 description 1
- YHMYGUUIMTVXNW-UHFFFAOYSA-N 1,3-dihydrobenzimidazole-2-thione Chemical compound C1=CC=C2NC(S)=NC2=C1 YHMYGUUIMTVXNW-UHFFFAOYSA-N 0.000 description 1
- ODIRBFFBCSTPTO-UHFFFAOYSA-N 1,3-selenazole Chemical class C1=C[se]C=N1 ODIRBFFBCSTPTO-UHFFFAOYSA-N 0.000 description 1
- 150000005208 1,4-dihydroxybenzenes Chemical class 0.000 description 1
- HOWGOXCXIUWXSG-UHFFFAOYSA-N 1-(diethylamino)propane-1,1-diol Chemical compound CCN(CC)C(O)(O)CC HOWGOXCXIUWXSG-UHFFFAOYSA-N 0.000 description 1
- MPAGPTVGKNCYOW-UHFFFAOYSA-N 1-fluoropropan-1-ol Chemical compound CCC(O)F MPAGPTVGKNCYOW-UHFFFAOYSA-N 0.000 description 1
- QBDAFARLDLCWAT-UHFFFAOYSA-N 2,3-dihydropyran-6-one Chemical compound O=C1OCCC=C1 QBDAFARLDLCWAT-UHFFFAOYSA-N 0.000 description 1
- 150000001473 2,4-thiazolidinediones Chemical class 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- WBIQQQGBSDOWNP-UHFFFAOYSA-N 2-dodecylbenzenesulfonic acid Chemical compound CCCCCCCCCCCCC1=CC=CC=C1S(O)(=O)=O WBIQQQGBSDOWNP-UHFFFAOYSA-N 0.000 description 1
- QCDWFXQBSFUVSP-UHFFFAOYSA-N 2-phenoxyethanol Chemical compound OCCOC1=CC=CC=C1 QCDWFXQBSFUVSP-UHFFFAOYSA-N 0.000 description 1
- UGWULZWUXSCWPX-UHFFFAOYSA-N 2-sulfanylideneimidazolidin-4-one Chemical class O=C1CNC(=S)N1 UGWULZWUXSCWPX-UHFFFAOYSA-N 0.000 description 1
- RVBUGGBMJDPOST-UHFFFAOYSA-N 2-thiobarbituric acid Chemical class O=C1CC(=O)NC(=S)N1 RVBUGGBMJDPOST-UHFFFAOYSA-N 0.000 description 1
- SJSJAWHHGDPBOC-UHFFFAOYSA-N 4,4-dimethyl-1-phenylpyrazolidin-3-one Chemical compound N1C(=O)C(C)(C)CN1C1=CC=CC=C1 SJSJAWHHGDPBOC-UHFFFAOYSA-N 0.000 description 1
- DSVIHYOAKPVFEH-UHFFFAOYSA-N 4-(hydroxymethyl)-4-methyl-1-phenylpyrazolidin-3-one Chemical compound N1C(=O)C(C)(CO)CN1C1=CC=CC=C1 DSVIHYOAKPVFEH-UHFFFAOYSA-N 0.000 description 1
- RHPUJHQBPORFGV-UHFFFAOYSA-N 4-chloro-2-methylphenol Chemical compound CC1=CC(Cl)=CC=C1O RHPUJHQBPORFGV-UHFFFAOYSA-N 0.000 description 1
- ZZEYCGJAYIHIAZ-UHFFFAOYSA-N 4-methyl-1-phenylpyrazolidin-3-one Chemical compound N1C(=O)C(C)CN1C1=CC=CC=C1 ZZEYCGJAYIHIAZ-UHFFFAOYSA-N 0.000 description 1
- ZVNPWFOVUDMGRP-UHFFFAOYSA-N 4-methylaminophenol sulfate Chemical compound OS(O)(=O)=O.CNC1=CC=C(O)C=C1.CNC1=CC=C(O)C=C1 ZVNPWFOVUDMGRP-UHFFFAOYSA-N 0.000 description 1
- LRUDIIUSNGCQKF-UHFFFAOYSA-N 5-methyl-1H-benzotriazole Chemical compound C1=C(C)C=CC2=NNN=C21 LRUDIIUSNGCQKF-UHFFFAOYSA-N 0.000 description 1
- 229920003026 Acene Polymers 0.000 description 1
- 229910016292 BiF 5 Inorganic materials 0.000 description 1
- LVDKZNITIUWNER-UHFFFAOYSA-N Bronopol Chemical compound OCC(Br)(CO)[N+]([O-])=O LVDKZNITIUWNER-UHFFFAOYSA-N 0.000 description 1
- UJOBWOGCFQCDNV-UHFFFAOYSA-N Carbazole Natural products C1=CC=C2C3=CC=CC=C3NC2=C1 UJOBWOGCFQCDNV-UHFFFAOYSA-N 0.000 description 1
- FGHHBEZSBZFDJN-UHFFFAOYSA-N Cc1nc2nccc(O)n2n1 Chemical compound Cc1nc2nccc(O)n2n1 FGHHBEZSBZFDJN-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- YASYEJJMZJALEJ-UHFFFAOYSA-N Citric acid monohydrate Chemical compound O.OC(=O)CC(O)(C(O)=O)CC(O)=O YASYEJJMZJALEJ-UHFFFAOYSA-N 0.000 description 1
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- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
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- 150000001556 benzimidazoles Chemical class 0.000 description 1
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- 238000001246 colloidal dispersion Methods 0.000 description 1
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- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000010908 decantation Methods 0.000 description 1
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- 238000011033 desalting Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- BTVWZWFKMIUSGS-UHFFFAOYSA-N dimethylethyleneglycol Natural products CC(C)(O)CO BTVWZWFKMIUSGS-UHFFFAOYSA-N 0.000 description 1
- FGRVOLIFQGXPCT-UHFFFAOYSA-L dipotassium;dioxido-oxo-sulfanylidene-$l^{6}-sulfane Chemical compound [K+].[K+].[O-]S([O-])(=O)=S FGRVOLIFQGXPCT-UHFFFAOYSA-L 0.000 description 1
- BNIILDVGGAEEIG-UHFFFAOYSA-L disodium hydrogen phosphate Chemical compound [Na+].[Na+].OP([O-])([O-])=O BNIILDVGGAEEIG-UHFFFAOYSA-L 0.000 description 1
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 1
- 229940060296 dodecylbenzenesulfonic acid Drugs 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000004318 erythorbic acid Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000002573 ethenylidene group Chemical group [*]=C=C([H])[H] 0.000 description 1
- CJMZLCRLBNZJQR-UHFFFAOYSA-N ethyl 2-amino-4-(4-fluorophenyl)thiophene-3-carboxylate Chemical compound CCOC(=O)C1=C(N)SC=C1C1=CC=C(F)C=C1 CJMZLCRLBNZJQR-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
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- 230000006870 function Effects 0.000 description 1
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- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229920000578 graft copolymer Polymers 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- QTNLQPHXMVHGBA-UHFFFAOYSA-H hexachlororhodium Chemical compound Cl[Rh](Cl)(Cl)(Cl)(Cl)Cl QTNLQPHXMVHGBA-UHFFFAOYSA-H 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- ZMZDMBWJUHKJPS-UHFFFAOYSA-N hydrogen thiocyanate Natural products SC#N ZMZDMBWJUHKJPS-UHFFFAOYSA-N 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 description 1
- 150000002460 imidazoles Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- RKJUIXBNRJVNHR-UHFFFAOYSA-N indolenine group Chemical group N1=CCC2=CC=CC=C12 RKJUIXBNRJVNHR-UHFFFAOYSA-N 0.000 description 1
- 150000002475 indoles Chemical class 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- BEGLCMHJXHIJLR-UHFFFAOYSA-N methylisothiazolinone Chemical compound CN1SC=CC1=O BEGLCMHJXHIJLR-UHFFFAOYSA-N 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 150000007523 nucleic acids Chemical class 0.000 description 1
- 108020004707 nucleic acids Chemical class 0.000 description 1
- 102000039446 nucleic acids Human genes 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- 150000002898 organic sulfur compounds Chemical class 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 150000002916 oxazoles Chemical class 0.000 description 1
- 150000002918 oxazolines Chemical class 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- 125000005342 perphosphate group Chemical group 0.000 description 1
- CMCWWLVWPDLCRM-UHFFFAOYSA-N phenidone Chemical compound N1C(=O)CCN1C1=CC=CC=C1 CMCWWLVWPDLCRM-UHFFFAOYSA-N 0.000 description 1
- 229960005323 phenoxyethanol Drugs 0.000 description 1
- QWYZFXLSWMXLDM-UHFFFAOYSA-M pinacyanol iodide Chemical compound [I-].C1=CC2=CC=CC=C2N(CC)C1=CC=CC1=CC=C(C=CC=C2)C2=[N+]1CC QWYZFXLSWMXLDM-UHFFFAOYSA-M 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920001197 polyacetylene Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000323 polyazulene Polymers 0.000 description 1
- 229920001088 polycarbazole Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000414 polyfuran Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- GRLPQNLYRHEGIJ-UHFFFAOYSA-J potassium aluminium sulfate Chemical compound [Al+3].[K+].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O GRLPQNLYRHEGIJ-UHFFFAOYSA-J 0.000 description 1
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 1
- 235000019252 potassium sulphite Nutrition 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 102000004169 proteins and genes Human genes 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- 150000003233 pyrroles Chemical class 0.000 description 1
- 150000003236 pyrrolines Chemical class 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- KIWUVOGUEXMXSV-UHFFFAOYSA-N rhodanine Chemical class O=C1CSC(=S)N1 KIWUVOGUEXMXSV-UHFFFAOYSA-N 0.000 description 1
- 230000005070 ripening Effects 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- ZUNKMNLKJXRCDM-UHFFFAOYSA-N silver bromoiodide Chemical compound [Ag].IBr ZUNKMNLKJXRCDM-UHFFFAOYSA-N 0.000 description 1
- UTXIVEZZTQLQDT-UHFFFAOYSA-N silver nitric acid nitrate Chemical compound [N+](=O)(O)[O-].[N+](=O)([O-])[O-].[Ag+] UTXIVEZZTQLQDT-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- UKLNMMHNWFDKNT-UHFFFAOYSA-M sodium chlorite Chemical compound [Na+].[O-]Cl=O UKLNMMHNWFDKNT-UHFFFAOYSA-M 0.000 description 1
- 229960002218 sodium chlorite Drugs 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229940001482 sodium sulfite Drugs 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- 239000004328 sodium tetraborate Substances 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- KICVIQZBYBXLQD-UHFFFAOYSA-M sodium;2,5-dihydroxybenzenesulfonate Chemical compound [Na+].OC1=CC=C(O)C(S([O-])(=O)=O)=C1 KICVIQZBYBXLQD-UHFFFAOYSA-M 0.000 description 1
- MWNQXXOSWHCCOZ-UHFFFAOYSA-L sodium;oxido carbonate Chemical compound [Na+].[O-]OC([O-])=O MWNQXXOSWHCCOZ-UHFFFAOYSA-L 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 150000003536 tetrazoles Chemical class 0.000 description 1
- 150000003557 thiazoles Chemical class 0.000 description 1
- 150000003549 thiazolines Chemical class 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- 229910001428 transition metal ion Inorganic materials 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229910000406 trisodium phosphate Inorganic materials 0.000 description 1
- 235000019801 trisodium phosphate Nutrition 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229920003176 water-insoluble polymer Polymers 0.000 description 1
Abstract
Description
本発明は大面積用のフレキシブルな透明電極に用いられる透明導電フィルム関し、より詳しくは、大面積においてもロスが小さく、また、フィルムの色が問題とならず、かつ、屈曲に強く、NOx、SOx等の腐食性ガスに対する耐性も高い、フレキシブルな透明電極に好適な透明導電フィルムに関する。 The present invention relates to a transparent conductive film used for a flexible transparent electrode for a large area. More specifically, the loss is small even in a large area, the color of the film is not a problem, and the film is resistant to bending. The present invention relates to a transparent conductive film suitable for a flexible transparent electrode, which has high resistance to corrosive gases such as SOx.
透明導電フィルムは、液晶ディスプレイ、エレクトロルミネッセンスディスプレイ、プラズマディスプレイ、エレクトロクロミックディスプレイ、太陽電池、タッチパネルなどの透明電極、ならびに電磁波シールド材などに用いられている。広く応用されている透明導電膜フィルムとしては、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)等の透明フィルムの表面の少なくとも一方に、インジウム−スズの複合酸化物(ITO)を真空蒸着法やスパッタリング法等のドライプロセスにて製膜する方法(例えば、特許文献1参照)である。しかしながら、ITOを真空蒸着法やスパッタリング法等のドライプロセスにて製膜する方法は、成膜に高温が必要であるとか、成膜コストが高いという問題点がある。また、塗布成膜法によるITO膜も、成膜に高温が必要であり、その導電性はITOの分散度に左右され、ヘイズ値も低くない。さらにいずれの製法においても、ITO膜はフィルムの曲げに弱く、クラックが入り導電性が損なわれる問題があった。 Transparent conductive films are used for liquid crystal displays, electroluminescence displays, plasma displays, electrochromic displays, transparent electrodes such as solar cells and touch panels, and electromagnetic shielding materials. As a transparent conductive film widely applied, an indium-tin composite oxide (ITO) is deposited on at least one surface of a transparent film such as polyethylene terephthalate (PET) or polyethylene naphthalate (PEN) by vacuum deposition or This is a method of forming a film by a dry process such as a sputtering method (for example, see Patent Document 1). However, a method of forming ITO by a dry process such as a vacuum evaporation method or a sputtering method has a problem that a high temperature is required for film formation or a film formation cost is high. In addition, an ITO film formed by a coating film formation method also requires a high temperature for film formation, and its conductivity depends on the degree of dispersion of ITO, and the haze value is not low. Further, in any of the production methods, the ITO film is weak against bending of the film, and there is a problem that the conductivity is impaired due to cracks.
一方、導電性高分子を透明フィルムに製膜した透明導電フィルムが提案されている。導電性高分子により形成される透明導電性層は、膜自体に柔軟性があるため、クラックなどの問題を生じにくいが、ITO膜並の導電性を得ることは困難であった。 On the other hand, a transparent conductive film in which a conductive polymer is formed on a transparent film has been proposed. A transparent conductive layer formed of a conductive polymer has flexibility in the film itself, and thus hardly causes problems such as cracks, but it has been difficult to obtain conductivity equivalent to that of an ITO film.
さらに、大面積の電極では電極の長さが長くなりその抵抗値が問題となる。例えば、太陽電池などではせっかく得られた起電力が電極部分の電圧降下でロスしてしまう。導電性優位のITOでさえも大面積に対しては導電性が不十分である。 Furthermore, in the case of an electrode having a large area, the length of the electrode becomes long and its resistance value becomes a problem. For example, an electromotive force obtained with a solar cell or the like is lost due to a voltage drop at the electrode portion. Even ITO with superior conductivity is insufficient in conductivity for a large area.
また、プラズマテレビなどの電磁波遮蔽として導電性メッシュフィルムが知られており、例えば、銅薄膜をフォトリソグラフィー法を利用したエッチング処理により加工する方法や、メッキ触媒を印刷法でパターン印刷した後に銅メッキする方法などが知られている。 In addition, conductive mesh films are known as electromagnetic shielding for plasma televisions. For example, copper plating is performed after a copper thin film is processed by an etching process using a photolithography method or after a plating catalyst is pattern printed by a printing method. The method of doing is known.
さらにこうした導電性メッシュとITOなどの透明導電膜を組み合わせる技術は知られて(例えば、特許文献2〜6参照)いる。しかしながら、ITOとの組み合わせではITO起因の前述の課題がそのまま問題となる。導電性メッシュ部についても、銅を用いる場合は着色が問題となる。また、銅の着色を改善する方法として黒化処理をすることも知れているが、処理が煩雑になるだけでなく、接着性が劣化したり、さらには、電磁遮蔽材料であれば、導電材内部の電子移動がポイントとなるので問題とならないが、導電膜と組み合わせて使用する場合、黒化処理によってメッシュと導電膜の接触部の抵抗や黒化処理部の仕事関数の関係からロスを生じることがある。 Furthermore, a technique for combining such a conductive mesh and a transparent conductive film such as ITO is known (for example, see Patent Documents 2 to 6). However, in the case of combination with ITO, the above-mentioned problem caused by ITO becomes a problem as it is. As for the conductive mesh portion, coloring is a problem when copper is used. In addition, it is also known that blackening treatment is performed as a method for improving copper coloring. However, not only is the treatment complicated, but also the adhesiveness is deteriorated. There is no problem because the internal electron transfer becomes a point, but when used in combination with a conductive film, the blackening treatment causes a loss due to the resistance of the contact portion between the mesh and the conductive film and the work function of the blackening treatment portion Sometimes.
また、銅メッキをしていない銀メッシュについても例えば特許文献5には記載されているが、さらに検討をしたところ、銀メッシュはNOx、SOx等に対する耐性が悪く導電性が劣化することが分かってきた。 Further, although a silver mesh not plated with copper is also described in Patent Document 5, for example, further studies have revealed that the silver mesh has poor resistance to NOx, SOx, etc., and the conductivity is deteriorated. It was.
なお、特許文献5には、銀塩含有層を有する感光材料を露光し現像処理し、更に物理現像および/またはメッキ処理を行うことにより製造した導電性パターン材料と透明導電膜とを含む導電性面を有することを特徴とする透光性導電性シート、さらには、透光性導電性フィルムが透明な金属酸化物および/または有機物の導電性膜と網目状金属細線を有することを特徴とするエレクトロルミネッセンス素子について開示がある。 In Patent Document 5, a conductive material including a conductive pattern material and a transparent conductive film produced by exposing and developing a photosensitive material having a silver salt-containing layer, and further performing physical development and / or plating. A translucent conductive sheet characterized by having a surface, and further, the translucent conductive film has a transparent metal oxide and / or organic conductive film and a mesh metal thin wire There is a disclosure of electroluminescent elements.
しかしながら、特許文献5には本発明の課題とする屈曲耐性についてや、銀を含有することで黒化処理をフリー化して導電製膜との界面ロスを低減すること、メッキ処理をフリー化して銀を含有することで銅などのメッキ金属の色の問題を解消する際に、NOx、SOx等の腐食性ガスに対する耐性が劣化すること、さらに導電性高分子化合物によるこうした性能の改善については示唆されていない。
本発明の目的は、大面積においてもロスが小さく、また、導電フィルムの色が問題とならず、かつ、屈曲に強く、NOx、SOx等の腐食性ガスに対する耐性も高い、フレキシブルな透明電極に好適な導電フィルムを提供することにある。 The purpose of the present invention is to provide a flexible transparent electrode that has a small loss even in a large area, is not problematic in the color of the conductive film, is strong against bending, and has high resistance to corrosive gases such as NOx and SOx. The object is to provide a suitable conductive film.
本発明の上記課題解決には、銅を用いたフォトリソグラフィー法や銅メッキ処理を用いることなく、銀を含有する導電性パターンと導電性高分子化合物からなる透明導電膜とを基材に近い側からこの順に隣接して設けることが重要であり、より詳しくは、以下の構成により達成される。 In order to solve the above-mentioned problems of the present invention, a conductive pattern containing silver and a transparent conductive film made of a conductive polymer compound are provided on the side close to the substrate without using a photolithography method using copper or a copper plating process. It is important to provide them adjacent to each other in this order, and more specifically, this is achieved by the following configuration.
1.透明フィルム基材上に、該透明フィルム基材に近い側から、銀を含有する導電性パターンと、その上に導電性高分子化合物からなる透明導電膜とが隣接して設けられている透明導電フィルムにおいて、該導電性パターンが該透明フィルム基材上にハロゲン化銀粒子を含有する層を設け、かつ、所望するパターンで露光、現像処理することにより、所望するパターンの金属銀部を形成し、さらに物理現像処理することにより形成され、
導電性高分子化合物がポリエチレンジオキシチオフェン系またはポリアニリン系の導電性高分子化合物であり、
前記ハロゲン化銀粒子を含有する層におけるバインダー付き量が0.05g/m 2 以上0.25g/m 2 以下であり、
露光前の前記ハロゲン化銀粒子を含有する層におけるAg/バインダー比率が体積比で0.3以上0.8以下であることを特徴とする透明導電フィルム。
1. A transparent conductive material in which a conductive pattern containing silver and a transparent conductive film made of a conductive polymer compound are adjacently provided on the transparent film substrate from the side close to the transparent film substrate. In the film, the conductive pattern is provided with a layer containing silver halide grains on the transparent film substrate, and exposed and developed with the desired pattern to form a metallic silver portion of the desired pattern. Formed by further physical development processing ,
The conductive polymer compound is a polyethylenedioxythiophene-based or polyaniline-based conductive polymer compound,
Amount with the binder in the layer containing said silver halide grains is at 0.05 g / m 2 or more 0.25 g / m 2 or less,
A transparent conductive film , wherein the Ag / binder ratio in the layer containing the silver halide grains before exposure is 0.3 to 0.8 in volume ratio .
2.前記ハロゲン化銀粒子が塩臭化銀粒子であり、かつ、塩化銀含有率が55モル%以上95モル%以下で、臭化銀含有率が5モル%以上45モル%以下であることを特徴とする前記1記載の透明導電フィルム。 2 . The silver halide grains are silver chlorobromide grains, the silver chloride content is 55 mol% or more and 95 mol% or less, and the silver bromide content is 5 mol% or more and 45 mol% or less. 2. The transparent conductive film according to 1 above.
本発明によれば、大面積においてもロスが小さく、また、導電フィルムの色が問題とならず、かつ、屈曲に強く、NOx、SOx等の腐食性ガスに対する耐性も高い、フレキシブルな透明電極に好適な導電フィルムを提供することができる。 According to the present invention, a flexible transparent electrode that has a small loss even in a large area, has no problem with the color of the conductive film, is resistant to bending, and has high resistance to corrosive gases such as NOx and SOx. A suitable conductive film can be provided.
本発明を更に詳しく説明する。 The present invention will be described in more detail.
本発明者らは、上記課題に鑑み鋭意検討を行った結果、透明フィルム基材上に銀を含有する導電性パターンおよび導電性高分子化合物からなる透明導電膜を該基材に近い側からこの順に該導電性パターンと該透明導電膜とが隣接して設けられ、該導電性パターンが透明フィルム基材上にハロゲン化銀粒子を含有する層を設け、所望するパターンで露光、現像処理することにより、所望するパターンの金属銀部を形成し、さらに物理現像処理することにより形成されることによって、大面積においてもロスが小さく、また、導電フィルムの色が問題とならず、かつ、屈曲に強く、NOx、SOx等の腐食性ガスに対する耐性も高い、フレキシブルな導電フィルムが得られることを見出し、本発明に至った次第である。 As a result of intensive studies in view of the above problems, the present inventors have found that a transparent conductive film composed of a conductive pattern containing silver and a conductive polymer compound on a transparent film substrate from the side close to the substrate. In order, the conductive pattern and the transparent conductive film are provided adjacent to each other, the conductive pattern is provided with a layer containing silver halide grains on a transparent film substrate, and is exposed and developed with a desired pattern. By forming a metal silver portion of a desired pattern and further by physical development processing, the loss is small even in a large area, the color of the conductive film is not a problem, and it is bent It has been found that a flexible conductive film that is strong and has high resistance to corrosive gases such as NOx and SOx can be obtained, and the present invention has been achieved.
以下、本発明を実施するための最良の形態について説明するが、本発明はこれにより限定されるものではない。 Hereinafter, the best mode for carrying out the present invention will be described, but the present invention is not limited thereto.
(導電性パターン)
本発明の銀を含有する導電性パターンにおいては、導電性を持った構成成分の7割以上が銀であることが好ましく、9割以上が銀であることがより好ましい。主成分を銀とすることにより、導電膜と併用する際に弊害のある黒化処理をしなくても、メッシュ部の着色を防ぐことが可能となる。パターン形状としては特に制限はないが、例えば、三角形、正方形、長方形、菱形、平行四辺形、台形等の四角形、(正)六角形、(正)八角形等を組み合わせた幾何学図形からなるメッシュ状のパターンを上げることができる。
(Conductive pattern)
In the conductive pattern containing silver of the present invention, 70% or more of the conductive constituent components are preferably silver, and more preferably 90% or more are silver. By using silver as the main component, it is possible to prevent the mesh portion from being colored without having a harmful blackening treatment when used in combination with the conductive film. There are no particular restrictions on the pattern shape, but for example, a mesh consisting of geometric figures combining triangles, squares, rectangles, rhombuses, parallelograms, trapezoids, etc., (positive) hexagons, (positive) octagons, etc. Pattern can be raised.
導電性パターンは導電性高分子化合物からなる透明導電膜を併用しない、単独のフィルムで50Ω/□以下の導電性を有することが好ましく、10Ω/□以下であることが最も好ましい。50Ω/□を超える導電性パターンでは導電性高分子化合物からなる透明導電膜単独に対する導電性改善効果が小さい。 The conductive pattern preferably has a conductivity of 50Ω / □ or less, and most preferably 10Ω / □ or less, as a single film without using a transparent conductive film composed of a conductive polymer compound. In the conductive pattern exceeding 50Ω / □, the effect of improving the conductivity with respect to the transparent conductive film alone made of the conductive polymer compound is small.
こうした導電性パターンを形成する方法としては、ハロゲン化銀粒子を含有する層を設け、所望するパターンで露光、現像処理することにより、所望するパターンの金属銀部を形成し、さらに物理現像処理する方法を用いる。この方法により、容易に所望するパターンの金属銀部を形成することが可能であり、また、印刷法などで問題となる交点太りによる透過率の低下も生じない。さらに物理現像処理する方法により、透明基材の平滑性を劣化させる後加熱処理や着色が問題となる追加の銅メッキ処理を用いなくても、銀の緻密なラインが形成可能となり、前述の好ましい導電性を確保できる。 As a method for forming such a conductive pattern, a layer containing silver halide grains is provided, and a metal silver portion having a desired pattern is formed by exposing and developing with a desired pattern, followed by further physical development processing. Use the method. By this method, it is possible to easily form a metal silver portion having a desired pattern, and the transmittance does not decrease due to thickening of the intersection, which is a problem in the printing method or the like. Furthermore, by the method of physical development treatment, it becomes possible to form a dense silver line without using an additional copper plating treatment in which the post-heating treatment or coloring which deteriorates the smoothness of the transparent base material becomes a problem. Conductivity can be ensured.
(導電性高分子化合物)
本発明においては、前述の導電性パターンに隣接して、基材から遠い側に導電性高分子化合物からなる透明導電膜を設ける。
(Conductive polymer compound)
In the present invention, a transparent conductive film made of a conductive polymer compound is provided on the side far from the substrate adjacent to the above-described conductive pattern.
これによって、大面積にしてもロスの少ない面電極にすることが可能で、かつ、ITOなどの無機系導電膜に比べて屈曲に強い導電性フィルムとすることができる。さらに、主たる成分が銀からなる導電性パターンのNOx、SOx等の腐食性ガスに対する耐性も改善することができる。この改善効果は導電性高分子化合物がポリアニリン系の場合に、特に顕著であった。ポリアニリン系の導電性高分子化合物は一般に防錆作用のあることが知られているが、そうした効果が本発明においても有効に働いているのかもしれない。 Thereby, even if it is a large area, it can be set as a surface electrode with few losses, and can be set as a conductive film strong against bending compared with inorganic type electrically conductive films, such as ITO. Furthermore, the resistance to corrosive gases such as NOx and SOx of the conductive pattern whose main component is silver can also be improved. This improvement effect was particularly remarkable when the conductive polymer compound was polyaniline-based. Polyaniline-based conductive polymer compounds are generally known to have a rust-preventing action, but such effects may also work effectively in the present invention.
次に本発明における導電性高分子について説明する。 Next, the conductive polymer in the present invention will be described.
導電性高分子としては、特に限定されず、ポリピロール、ポリインドール、ポリカルバゾール、ポリチオフェン(基本のポリチオフェンを含む、以下同様)系、ポリアニリン系、ポリアセチレン系、ポリフラン系、ポリパラフェニレンビニレン系、ポリアズレン系、ポリパラフェニレン系、ポリパラフェニレンサルファイド系、ポリイソチアナフテン系、ポリチアジル等の鎖状導電性ポリマーや、ポリアセン系導電性ポリマーも利用することができる。中でも、導電性、透明性等の観点からポリエチレンジオキシチオフェンやポリアニリン系が好ましく、前述の腐食性ガスに対する耐性の観点も考慮するとポリアニリン系の導電性高分子であることが最も好ましい。 The conductive polymer is not particularly limited, and polypyrrole, polyindole, polycarbazole, polythiophene (including basic polythiophene, the same applies hereinafter), polyaniline, polyacetylene, polyfuran, polyparaphenylene vinylene, polyazulene A chain conductive polymer such as polyparaphenylene, polyparaphenylene sulfide, polyisothianaphthene, and polythiazyl, and a polyacene conductive polymer can also be used. Of these, polyethylenedioxythiophene and polyaniline are preferable from the viewpoint of conductivity, transparency, and the like, and polyaniline-based conductive polymers are most preferable in view of the above-described resistance to corrosive gas.
また、本発明においては、上記導電性高分子の導電性をより高めるために、ドーピング処理を施すことが好ましい。導電性高分子に対するドーパントとしては、例えば、炭素数が6〜30の炭化水素基を有するスルホン酸(以下「長鎖スルホン酸」ともいう。)あるいはその重合体(例えば、ポリスチレンスルホン酸)、ハロゲン、ルイス酸、プロトン酸、遷移金属ハロゲン化物、遷移金属化合物、アルカリ金属、アルカリ土類金属、MClO4(M=Li+、Na+)、R4N+(R=CH3、C4H9、C5H11)、またはR4P+(R=CH3、C4H9、C5H11)からなる群から選ばれる少なくとも1種が挙げられる。なかでも、上記長鎖スルホン酸が好ましい。 Moreover, in this invention, in order to raise the electroconductivity of the said conductive polymer more, it is preferable to perform a doping process. As a dopant for the conductive polymer, for example, a sulfonic acid having a hydrocarbon group having 6 to 30 carbon atoms (hereinafter also referred to as “long-chain sulfonic acid”) or a polymer thereof (for example, polystyrene sulfonic acid), halogen Lewis acid, proton acid, transition metal halide, transition metal compound, alkali metal, alkaline earth metal, MClO 4 (M = Li + , Na + ), R 4 N + (R = CH 3 , C 4 H 9 , C 5 H 11 ), or R 4 P + (R═CH 3 , C 4 H 9 , C 5 H 11 ). Of these, the long-chain sulfonic acid is preferable.
長鎖スルホン酸としては、ジノニルナフタレンジスルホン酸、ジノニルナフタレンスルホン酸、ドデシルベンゼンスルホン酸等が挙げられる。ハロゲンとしては、Cl2、Br2、I2、ICl3、IBr、IF5等が挙げられる。ルイス酸としては、PF5、AsF5、SbF5、BF3、BCl3、BBr3、SO3、GaCl3等が挙げられる。プロトン酸としては、HF、HCl、HNO3、H2SO4、HBF4、HClO4、FSO3H、ClSO3H、CF3SO3H等が挙げられる。遷移金属ハロゲン化物としては、NbF5、TaF5、MoF5、WF5、RuF5、BiF5、TiCl4、ZrCl4、MoCl5、MoCl3、WCl5、FeCl3、TeCl4、SnCl4、SeCl4、FeBr3、SnI5等が挙げられる。遷移金属化合物としては、AgClO4、AgBF4、La(NO3)3、Sm(NO3)3等が挙げられる。アルカリ金属としては、Li、Na、K、Rb、Cs等が挙げられる。アルカリ土類金属としては、Be、Mg、Ca、Sc、Ba等が挙げられる。 Examples of the long chain sulfonic acid include dinonyl naphthalene disulfonic acid, dinonyl naphthalene sulfonic acid, and dodecylbenzene sulfonic acid. Examples of the halogen include Cl 2 , Br 2 , I 2 , ICl 3 , IBr, IF 5 and the like. Examples of the Lewis acid include PF 5 , AsF 5 , SbF 5 , BF 3 , BCl 3 , BBr 3 , SO 3 , and GaCl 3 . Examples of the protonic acid include HF, HCl, HNO 3 , H 2 SO 4 , HBF 4 , HClO 4 , FSO 3 H, ClSO 3 H, CF 3 SO 3 H, and the like. The transition metal halide, NbF 5, TaF 5, MoF 5, WF 5, RuF 5, BiF 5, TiCl 4, ZrCl 4, MoCl 5, MoCl 3, WCl 5, FeCl 3, TeCl 4, SnCl 4, SeCl 4 , FeBr 3 , SnI 5 and the like. The transition metal compound, AgClO 4, AgBF 4, La (NO 3) 3, Sm (NO 3) 3 and the like. Examples of the alkali metal include Li, Na, K, Rb, and Cs. Examples of the alkaline earth metal include Be, Mg, Ca, Sc, and Ba.
また、導電性高分子に対するドーパントは、水素化フラーレン、水酸化フラーレン、スルホン酸化フラーレンなどのフラーレン類に導入されていてもよい。本発明の透明導電材料及び透明導電素子において、上記ドーパントは、導電性高分子100質量部に対して、0.001質量部以上含まれていることが好ましい。さらには、0.5質量部以上含まれていることがより好ましい。尚、本実施形態の透明導電性フィルムは、長鎖スルホン酸、長鎖スルホン酸の重合体(例えば、ポリスチレンスルホン酸)、ハロゲン、ルイス酸、プロトン酸、遷移金属ハロゲン化物、遷移金属化合物、アルカリ金属、アルカリ土類金属、MClO4、R4N+、およびR4P+からなる群から選ばれる少なくとも1種のドーパントと、フラーレン類との双方を含んでいてもよい。 The dopant for the conductive polymer may be introduced into fullerenes such as hydrogenated fullerene, hydroxylated fullerene, and sulfonated fullerene. In the transparent conductive material and the transparent conductive element of the present invention, the dopant is preferably contained in an amount of 0.001 part by mass or more with respect to 100 parts by mass of the conductive polymer. Furthermore, it is more preferable that 0.5 mass part or more is contained. The transparent conductive film of the present embodiment includes a long-chain sulfonic acid, a polymer of long-chain sulfonic acid (for example, polystyrene sulfonic acid), halogen, Lewis acid, proton acid, transition metal halide, transition metal compound, alkali Both at least one dopant selected from the group consisting of metals, alkaline earth metals, MClO 4 , R 4 N + , and R 4 P + and fullerenes may be included.
本発明の透明導電フィルムは、2nd.ドーパントとして水溶性有機化合物を含有してもよい。本発明で用いることができる水溶性有機化合物には特に制限はなく、公知のものの中から適宜選択することができ、例えば、酸素含有化合物が好適に挙げられる。前記酸素含有化合物としては、酸素を含有する限り特に制限はなく、例えば、水酸基含有化合物、カルボニル基含有化合物、エーテル基含有化合物、スルホキシド基含有化合物などが挙げられる。前記水酸基含有化合物としては、例えば、エチレングリコール、ジエチレングリコール、プロピレングリコール、トリメチレングリコール、1,4−ブタンジオール、グリセリンなどが挙げられ、これらの中でも、エチレングリコール、ジエチレングリコールが好ましい。前記カルボニル基含有化合物としては、例えば、イソホロン、プロピレンカーボネート、シクロヘキサノン、γ−ブチロラクトンなどが挙げられる。前記エーテル基含有化合物としては、例えば、ジエチレングリコールモノエチルエーテル、などが挙げられる。前記スルホキシド基含有化合物としては、例えば、ジメチルスルホキシドなどが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよいが、ジメチルスルホキシド、エチレングリコール、ジエチレングリコールから選ばれる少なくとも1種を用いることが特に好ましい。
本発明の透明導電材料及び透明導電素子において、導電性高分子100質量部に対する上記2nd.ドーパントの含有量は0.001質量部以上が好ましく、0.01〜50質量がより好ましく、0.01〜10質量部が特に好ましい。
The transparent conductive film of the present invention has 2nd. A water-soluble organic compound may be contained as a dopant. There is no restriction | limiting in particular in the water-soluble organic compound which can be used by this invention, It can select suitably from well-known things, For example, an oxygen containing compound is mentioned suitably. The oxygen-containing compound is not particularly limited as long as it contains oxygen, and examples thereof include a hydroxyl group-containing compound, a carbonyl group-containing compound, an ether group-containing compound, and a sulfoxide group-containing compound. Examples of the hydroxyl group-containing compound include ethylene glycol, diethylene glycol, propylene glycol, trimethylene glycol, 1,4-butanediol, and glycerin. Among these, ethylene glycol and diethylene glycol are preferable. Examples of the carbonyl group-containing compound include isophorone, propylene carbonate, cyclohexanone, and γ-butyrolactone. Examples of the ether group-containing compound include diethylene glycol monoethyl ether. Examples of the sulfoxide group-containing compound include dimethyl sulfoxide. These may be used alone or in combination of two or more, but it is particularly preferable to use at least one selected from dimethyl sulfoxide, ethylene glycol, and diethylene glycol.
In the transparent conductive material and the transparent conductive element of the present invention, the 2nd. The content of the dopant is preferably 0.001 parts by mass or more, more preferably 0.01 to 50 parts by mass, and particularly preferably 0.01 to 10 parts by mass.
[透明フィルム基材]
本発明に用いられる透明フィルム基材としては、プラスチックフィルムを用いることができる。
[Transparent film substrate]
A plastic film can be used as the transparent film substrate used in the present invention.
プラスチックフィルムの原料としては、例えば、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレートなどのポリエステル類、ポリエチレン(PE)、ポリプロピレン(PP)、ポリスチレン、環状オレフィン系樹脂などのポリオレフィン類、ポリ塩化ビニル、ポリ塩化ビニリデンなどのビニル系樹脂、ポリエーテルエーテルケトン(PEEK)、ポリサルホン(PSF)、ポリエーテルサルホン(PES)、ポリカーボネート(PC)、ポリアミド、ポリイミド、アクリル樹脂、トリアセチルセルロース(TAC)などを用いることができる。 Examples of the raw material for the plastic film include polyesters such as polyethylene terephthalate (PET) and polyethylene naphthalate, polyolefins such as polyethylene (PE), polypropylene (PP), polystyrene, and cyclic olefin resins, polyvinyl chloride, and polychlorinated chloride. Use vinyl resins such as vinylidene, polyether ether ketone (PEEK), polysulfone (PSF), polyether sulfone (PES), polycarbonate (PC), polyamide, polyimide, acrylic resin, triacetyl cellulose (TAC), etc. Can do.
中でも透明性、耐熱性、取り扱いやすさ及びコストの点から、二軸延伸ポリエチレンテレフタレートフィルム、アクリル樹脂フィルム、トリアセチルセルロースフィルムであることが好ましく、二軸延伸ポリエチレンテレフタレートフィルムであることが最も好ましい。 Of these, a biaxially stretched polyethylene terephthalate film, an acrylic resin film, and a triacetylcellulose film are preferable, and a biaxially stretched polyethylene terephthalate film is most preferable in terms of transparency, heat resistance, ease of handling, and cost.
透明フィルム基材は塗布液の濡れ性や接着性を確保するために、表面処理や易接着層を設けることが好ましい。表面処理や易接着層については従来公知の技術を使用できるが、透明フィルム基材が二軸延伸ポリエチレンテレフタレートフィルムである場合は、フィルムに隣接する易接着層の屈折率が1.57〜1.63とすることで、フィルム基材と易接着層との界面反射を低減して透過率を向上させることができるのでより好ましい。屈折率を調整する方法としては、酸化スズゾルや酸化セリウムゾルなどの比較的屈折率の高い酸化物ゾルとバインダー樹脂との比率を適宜調整して塗設することで作製できる。易接着層は単層でも良いが、接着性を向上させるためには2層以上の構成にしても良い。 The transparent film substrate is preferably provided with a surface treatment or an easy-adhesion layer in order to ensure wettability and adhesion of the coating solution. Conventionally known techniques can be used for the surface treatment and the easy-adhesion layer, but when the transparent film substrate is a biaxially stretched polyethylene terephthalate film, the refractive index of the easy-adhesion layer adjacent to the film is 1.57-1. By setting it to 63, the interface reflection between the film substrate and the easy adhesion layer can be reduced and the transmittance can be improved, which is more preferable. As a method for adjusting the refractive index, the refractive index can be prepared by appropriately adjusting the ratio of the oxide sol having a relatively high refractive index such as tin oxide sol or cerium oxide sol and the binder resin. The easy-adhesion layer may be a single layer, but in order to improve the adhesiveness, it may be composed of two or more layers.
本発明において、透明フィルム基材とは透過率が85%以上のものをいい、好ましくは90%以上である。 In the present invention, the transparent film substrate means a material having a transmittance of 85% or more, preferably 90% or more.
〔ハロゲン化銀粒子含有層〕
本発明に係るハロゲン化銀粒子含有層において、ハロゲン化銀粒子を均一に分散させ、かつハロゲン化銀粒子を支持体上に担持し、ハロゲン化銀粒子乳剤含有層と支持体の接着性を確保する目的でバインダーを用いる。本発明に用いることができるバインダーには、特に制限がなく、非水溶性ポリマー及び水溶性ポリマーのいずれも用いることができるが、現像性向上の観点からは、水溶性ポリマーを用いることが好ましい。
[Silver halide grain containing layer]
In the silver halide grain-containing layer according to the present invention, the silver halide grains are uniformly dispersed, and the silver halide grains are supported on the support to ensure adhesion between the silver halide grain emulsion-containing layer and the support. A binder is used for the purpose. The binder that can be used in the present invention is not particularly limited, and any of a water-insoluble polymer and a water-soluble polymer can be used. From the viewpoint of improving developability, it is preferable to use a water-soluble polymer.
本発明に係る感光材料には、バインダーとしてゼラチンを用いることが有利であるが、必要に応じてゼラチン誘導体、ゼラチンと他の高分子のグラフトポリマー、ゼラチン以外のタンパク質、糖誘導体、セルロース誘導体、単一あるいは共重合体のごとき合成親水性高分子物質等の親水性コロイドも用いることができる。 In the light-sensitive material according to the present invention, it is advantageous to use gelatin as a binder, but if necessary, gelatin derivatives, graft polymers of gelatin and other polymers, proteins other than gelatin, sugar derivatives, cellulose derivatives, simple substances. Hydrophilic colloids such as synthetic hydrophilic polymer materials such as mono- or copolymers can also be used.
本発明においては、後述する感光性ハロゲン化銀粒子及びバインダーを含有するハロゲン化銀粒子含有層が透明フィルム基材上に設けられるが、ハロゲン化銀粒子乳剤含有層は、この他に、硬膜剤、硬調化剤、活性剤等を含有することができる。 In the present invention, a photosensitive silver halide grain and a silver halide grain-containing layer containing a binder, which will be described later, are provided on a transparent film substrate. Agents, contrast enhancers, activators, and the like.
本発明において、露光前の感光性ハロゲン化銀粒子含有層のハロゲン化銀粒子の銀/バインダー体積比は0.3以上0.8以下であることが好ましく、0.4以上0.7以下であることが最も好ましい。0.3よりも小さいと物理現像を施しても十分な導電性を得ることが難しくなり、また0.8より大きいと、バインダーがハロゲン化銀粒子を十分に保持することが出来なくなり、塗布液においてはハロゲン化銀粒子の凝集が発生したり、パターン形成後はパターン保持性が劣りパターンの剥がれを生じたりするため好ましくない。 In the present invention, the silver / binder volume ratio of the silver halide grains in the photosensitive silver halide grain-containing layer before exposure is preferably 0.3 or more and 0.8 or less, and is 0.4 or more and 0.7 or less. Most preferably it is. If it is less than 0.3, it will be difficult to obtain sufficient conductivity even if physical development is carried out, and if it is more than 0.8, the binder will not be able to hold silver halide grains sufficiently, and the coating solution In the case of silver halide grains, aggregation of silver halide grains occurs, and after pattern formation, pattern retention is poor and pattern peeling occurs, which is not preferable.
本発明において、感光性ハロゲン化銀粒子含有層の付き量としては、バインダー量が、0.05g/m2以上0.25g/m2以下であることが好ましい。0.05g/m2より小さいと十分な導電性を得ることが難しくなり、0.25g/m2より大きいとパターン部の基材に近い側に導電性に寄与しない現像銀粒子が多数存在するようになって(基材に近い側では露光の光が減衰していたり、物理現像がかかりにくくなるためと推察)同じ導電性のフィルムで比較した場合にヘイズが上昇したり、また、湿度によりバインダー膜が収縮/伸張してカールを生じやすくなる為好ましくない。 In the present invention, the amount per the photosensitive silver halide grain-containing layer binder amount is preferably not 0.05 g / m 2 or more 0.25 g / m 2 or less. It is difficult to obtain 0.05 g / m 2 less than a sufficient conductivity, developed silver particles are present many that do not contribute to the conductivity on the side closer to the substrate of 0.25 g / m 2 larger than the pattern portion (Estimated because the exposure light is attenuated on the side closer to the substrate or physical development is less likely to occur) When compared with the same conductive film, the haze increases, The binder film shrinks / extends and tends to cause curling, which is not preferable.
〔ハロゲン化銀粒子〕
本発明で用いられるハロゲン化銀粒子の組成は、塩化銀、臭化銀、塩臭化銀、沃臭化銀、塩沃臭化銀、塩沃化銀等任意のハロゲン組成を有するものであってもよいが、本発明の効果を得るには、ハロゲン化銀粒子の組成が塩臭化銀であり、塩化銀含有率が55モル%以上であって、かつ、臭化銀含有率が5から45モル%であることが好ましく、塩化銀含有率が70モル%以上であって、かつ、臭化銀含有率が10から30モル%であることが更に好ましい。塩化銀が55モル%未満では感度、硬調化の点で、物理現像に適した銀濃度を得ることが難しく、臭化銀が5モル%未満では現像銀のフィラメント構造が広がらないために、現像銀粒子間の距離が遠くなり、物理現像がうまくかからないために、望ましい導電性が得にくくなる。
[Silver halide grains]
The composition of the silver halide grains used in the present invention has an arbitrary halogen composition such as silver chloride, silver bromide, silver chlorobromide, silver iodobromide, silver chloroiodobromide and silver chloroiodide. However, in order to obtain the effect of the present invention, the composition of the silver halide grains is silver chlorobromide, the silver chloride content is 55 mol% or more, and the silver bromide content is 5 To 45 mol%, more preferably the silver chloride content is 70 mol% or more, and the silver bromide content is 10 to 30 mol%. If the silver chloride is less than 55 mol%, it is difficult to obtain a silver concentration suitable for physical development in terms of sensitivity and contrast, and if the silver bromide is less than 5 mol%, the filament structure of the developed silver does not spread. Since the distance between the silver particles is increased and physical development is not successful, it is difficult to obtain desirable conductivity.
ハロゲン化銀粒子が現像され金属銀粒子になった後の表面比抵抗を下げるためには、現像銀粒子同士の接触面積ができるだけ大きくなる必要がある。そのためには表面積比を高めるためにハロゲン化銀粒子サイズが小さい程よいが、小さすぎる粒子は凝集して大きな塊状になりやすく、その場合接触面積は逆に少なくなってしまうので最適な粒子径が存在する。本発明において、ハロゲン化銀粒子の平均粒子サイズは、立方体換算径で0.01〜0.5μmが好ましく、より好ましくは0.03〜0.3μmである。なお、ハロゲン化銀粒子の立方体換算径とは、個々の粒子の体積と等しい体積を立方体に換算したときの一辺の長さを表す。ハロゲン化銀粒子の平均粒子サイズは、ハロゲン化銀粒子の調製時の温度、pAg、pH、銀イオン溶液とハロゲン溶液の添加速度、粒子径コントロール剤(例えば、1−フェニル−5−メルカプトテトラゾール、2−メルカプトベンズイミダゾール、ベンズトリアゾール、テトラザインデン化合物類、核酸誘導体類、チオエーテル化合物類等)を適宜組み合わせて制御することができる。 In order to reduce the surface specific resistance after the silver halide grains are developed into metal silver grains, the contact area between the developed silver grains needs to be as large as possible. For this purpose, a smaller silver halide grain size is better to increase the surface area ratio, but too small grains tend to agglomerate into large agglomerates, in which case the contact area will be reduced, so there is an optimum grain size. To do. In the present invention, the average grain size of silver halide grains is preferably from 0.01 to 0.5 μm, more preferably from 0.03 to 0.3 μm, in terms of cubic equivalent diameter. The cubic equivalent diameter of silver halide grains represents the length of one side when a volume equal to the volume of each grain is converted into a cube. The average grain size of silver halide grains is the temperature at the time of preparation of silver halide grains, pAg, pH, addition rate of silver ion solution and halogen solution, grain size control agent (for example, 1-phenyl-5-mercaptotetrazole, 2-mercaptobenzimidazole, benztriazole, tetrazaindene compounds, nucleic acid derivatives, thioether compounds, etc.) can be appropriately combined and controlled.
本発明においては、ハロゲン化銀粒子の形状は特に限定されず、例えば、球状、立方体状、平板状(6角平板状、3角形平板状、4角形平板状等)、8面体状、14面体状等、さまざまな形状であることができる。粒子サイズの分布には特に限定はないが、露光によるパターン形成時に、パターンの輪郭をシャープに再現させ、高い導電性を維持しながら透明性を高めるという観点からは、狭い分布が好ましい。本発明に係る感光材料に用いられるハロゲン化銀粒子の粒径分布は、好ましくは変動係数が0.22以下、さらに好ましくは0.15以下の単分散ハロゲン化銀粒子である。ここで変動係数は、粒径分布の広さを表す係数であり、次式によって定義される。 In the present invention, the shape of the silver halide grains is not particularly limited, and for example, spherical, cubic, flat plate (hexagonal flat plate, triangular flat plate, tetragonal flat plate, etc.), octahedron, tetrahedron It can be in various shapes such as shapes. The particle size distribution is not particularly limited, but a narrow distribution is preferable from the viewpoint of enhancing the transparency while sharply reproducing the outline of the pattern and maintaining high conductivity during pattern formation by exposure. The particle size distribution of the silver halide grains used in the light-sensitive material according to the present invention is preferably monodispersed silver halide grains having a coefficient of variation of 0.22 or less, more preferably 0.15 or less. Here, the variation coefficient is a coefficient representing the breadth of the particle size distribution, and is defined by the following equation.
変動係数=S/R
(式中、Sは粒径分布の標準偏差、Rは平均粒径を表す。)
本発明で用いられるハロゲン化銀粒子は、さらに他の元素を含有していてもよい。例えば、写真乳剤において、硬調な乳剤を得るために用いられる金属イオンをドープすることも有用である。特に鉄イオン、ロジウムイオン、ルテニウムイオンやイリジウムイオン等の第8〜10族金属イオンは、金属銀像の生成の際に露光部と未露光部の差が明確に生じやすくなるため好ましく用いられる。
Coefficient of variation = S / R
(In the formula, S represents the standard deviation of the particle size distribution, and R represents the average particle size.)
The silver halide grains used in the present invention may further contain other elements. For example, in a photographic emulsion, it is also useful to dope metal ions used to obtain a high-contrast emulsion. In particular, Group 8-10 metal ions such as iron ion, rhodium ion, ruthenium ion and iridium ion are preferably used because the difference between the exposed portion and the unexposed portion tends to be clearly generated when the metal silver image is generated.
これらの金属イオンは、塩や錯塩の形でハロゲン化銀粒子乳剤に添加することができる。ロジウムイオン、イリジウムイオンに代表される遷移金属イオンは、各種の配位子を有する化合物であることもできる。そのような配位子としては、例えば、シアン化物イオンやハロゲンイオン、チオシアナートイオン、ニトロシルイオン、水、水酸化物イオン等を挙げることができる。具体的な化合物の例としては、臭化ロジウム酸カリウムやイリジウム酸カリウム等が挙げられる。 These metal ions can be added to the silver halide grain emulsion in the form of a salt or a complex salt. Transition metal ions represented by rhodium ions and iridium ions can also be compounds having various ligands. Examples of such a ligand include cyanide ions, halogen ions, thiocyanate ions, nitrosyl ions, water, hydroxide ions, and the like. Specific examples of the compound include potassium bromide rhodate and potassium iridate.
本発明において、ハロゲン化銀粒子に含有される前記金属イオン化合物の含有率は、ハロゲン化銀1モル当たり、10-10〜10-2モル/モルAgであることが好ましく、10-9〜10-3モル/モルAgであることがさらに好ましい。 In the present invention, the content of the metal ion compound contained in the silver halide grains, per mol of silver halide is preferably 10 -10 to 10 -2 mol / mol Ag, 10 -9 to 10 More preferably, it is −3 mol / mol Ag.
ハロゲン化銀粒子に上述の金属イオンを含有させるためには、該金属化合物をハロゲン化銀粒子の形成前、ハロゲン化銀粒子の形成中、ハロゲン化銀粒子の形成後等、物理熟成中の各工程における任意の場所で添加すればよい。また、添加においては、重金属化合物の溶液を粒子形成工程の全体あるいは一部にわたって連続的に行うことができる。 In order for silver halide grains to contain the above-described metal ions, the metal compound is subjected to physical ripening before formation of silver halide grains, during formation of silver halide grains, after formation of silver halide grains, etc. What is necessary is just to add in the arbitrary places in a process. Moreover, in addition, the solution of a heavy metal compound can be continuously performed over the whole or a part of particle formation process.
本発明では、感度を向上させるため、写真乳剤で行われる化学増感を施すことが好ましい。化学増感としては、例えば、金、パラジウム、白金増感等の貴金属増感、無機イオウ、または有機イオウ化合物によるイオウ増感等のカルコゲン増感、塩化錫、ヒドラジン等還元増感等を利用することができる。 In the present invention, it is preferable to perform chemical sensitization performed on a photographic emulsion in order to improve sensitivity. As chemical sensitization, for example, noble metal sensitization such as gold, palladium and platinum sensitization, chalcogen sensitization such as sulfur sensitization with inorganic sulfur or organic sulfur compounds, reduction sensitization such as tin chloride and hydrazine, etc. are used. be able to.
また、ハロゲン化銀粒子には分光増感を施すことが好ましい。好ましい分光増感色素としては、シアニン、カルボシアニン、ジカルボシアニン、複合シアニン、ヘミシアニン、スチリル色素、メロシアニン、複合メロシアニン、ホロポーラー色素等を挙げることができ、当業界で用いられている分光増感色素を単用あるいは併用して使用することができる。 The silver halide grains are preferably subjected to spectral sensitization. Preferred spectral sensitizing dyes include cyanine, carbocyanine, dicarbocyanine, complex cyanine, hemicyanine, styryl dye, merocyanine, complex merocyanine, holopolar dye, and the like. Can be used alone or in combination.
特に有用な色素は、シアニン色素、メロシアニン色素、及び複合メロシアニン色素である。これらの色素類には、その塩基性異節環核として、シアニン色素類に通常利用される核の何れをも通用できる。すなわち、ピロリン核、オキサゾリン核、チアゾリン核、ピロール核、オキサゾール核、チアゾール核、セレナゾール核、イミダゾール核、テトラゾール核、ピリジン核及びこれらの核に脂環式炭化水素環が融合した核、及びこれらの核に芳香族炭化水素環が融合した核、即ち、インドレニン核、ベンズインドレニン核、インドール核、ベンズオキサゾール核、ナフトオキサゾール核、ベンゾチアゾール核、ナフトチアゾール核、ベンゾセレナゾール核、ベンズイミダゾール核、キノリン核等である。これらの核は、炭素原子上で置換されてもよい。 Particularly useful dyes are cyanine dyes, merocyanine dyes, and complex merocyanine dyes. For these dyes, any of the nuclei commonly used for cyanine dyes can be used as the basic heterocyclic ring nucleus. That is, a pyrroline nucleus, an oxazoline nucleus, a thiazoline nucleus, a pyrrole nucleus, an oxazole nucleus, a thiazole nucleus, a selenazole nucleus, an imidazole nucleus, a tetrazole nucleus, a pyridine nucleus, and a nucleus in which an alicyclic hydrocarbon ring is fused to these nuclei, and these Nucleus fused with aromatic hydrocarbon ring, ie, indolenine nucleus, benzindolenin nucleus, indole nucleus, benzoxazole nucleus, naphthoxazole nucleus, benzothiazole nucleus, naphthothiazole nucleus, benzoselenazole nucleus, benzimidazole nucleus Quinoline nuclei and the like. These nuclei may be substituted on carbon atoms.
メロシアニン色素または複合メロシアニン色素には、ケトメチレン構造を有する核として、ピラゾリン−5−オン核、チオヒダントイン核、2−チオオキサゾリジン−2,4−ジオン核、チアゾリジン−2,4−ジオン核、ローダニン核、チオバルビツール酸核等の5から6員異節環核を適用することができる。 The merocyanine dye or the complex merocyanine dye includes a pyrazoline-5-one nucleus, a thiohydantoin nucleus, a 2-thiooxazolidine-2,4-dione nucleus, a thiazolidine-2,4-dione nucleus, and a rhodanine nucleus as a nucleus having a ketomethylene structure. A 5- to 6-membered heterocyclic nucleus such as a thiobarbituric acid nucleus can be applied.
これらの増感色素は単独に用いてもよいが、それらの組み合わせを用いてもよい。増感色素の組み合わせは特に、強色増感の目的でしばしば用いられる。 These sensitizing dyes may be used alone or in combination. A combination of sensitizing dyes is often used for the purpose of supersensitization.
これらの増感色素をハロゲン化銀粒子乳剤中に含有せしめるには、それらを直接乳剤中に分散してもよいし、あるいは水、メタノール、プロパノール、メチルセロソルブ、2,2,3,3−テトラフルオロプロパノール等の溶媒の単独もしくは混合溶媒に溶解して乳剤へ添加してもよい。また、特公昭44−23389号、同44−27555号、同57−22089号公報等に記載のように、酸または塩基を共存させて水溶液としたり、米国特許第3,822,135号、同第4,006,025号明細書等に記載のようにドデシルベンゼンスルホン酸ナトリウム等の界面活性剤を共存させて水溶液あるいはコロイド分散物としたものを乳剤へ添加してもよい。また、フェノキシエタノール等の実質上水と非混和性の溶媒に溶解した後、水または親水性コロイド分散したものを乳剤に添加してもよい。特開昭53−102733号、同58−105141号公報に記載のように親水性コロイド中に直接分散させ、その分散物を乳剤に添加してもよい。 In order to incorporate these sensitizing dyes in a silver halide grain emulsion, they may be dispersed directly in the emulsion, or water, methanol, propanol, methyl cellosolve, 2,2,3,3-tetra A solvent such as fluoropropanol may be dissolved alone or in a mixed solvent and added to the emulsion. Further, as described in JP-B Nos. 44-23389, 44-27555, 57-22089, etc., an acid or a base is allowed to coexist to form an aqueous solution, US Pat. No. 3,822,135, As described in US Pat. No. 4,006,025 and the like, an aqueous solution or colloidal dispersion prepared by coexisting a surfactant such as sodium dodecylbenzenesulfonate may be added to the emulsion. Further, after dissolving in a substantially immiscible solvent such as phenoxyethanol, water or a hydrophilic colloid dispersion may be added to the emulsion. As described in JP-A Nos. 53-102733 and 58-105141, the dispersion may be directly dispersed in a hydrophilic colloid, and the dispersion may be added to the emulsion.
〔露光〕
本発明では、支持体上に設けられた銀塩含有層に、所望の導電性金属パターンが得られるよう露光を行う。
〔exposure〕
In the present invention, the silver salt-containing layer provided on the support is exposed so that a desired conductive metal pattern is obtained.
露光は、電磁波を用いて行うことができる。電磁波としては、例えば、可視光線、紫外線等の光、X線等の放射線等が挙げられる。さらに露光には波長分布を有する光源を利用してもよく、特定の波長の光源を用いてもよい。 The exposure can be performed using electromagnetic waves. Examples of the electromagnetic wave include light such as visible light and ultraviolet light, and radiation such as X-rays. Furthermore, a light source having a wavelength distribution may be used for exposure, or a light source having a specific wavelength may be used.
上記光源としては、例えば、陰極線(CRT)を用いた走査露光を挙げることができる。陰極線管露光装置は、レーザーを用いた装置に比べて、簡便でかつコンパクトであり、低コストになる。また、光軸や色の調整も容易である。画像露光に用いる陰極線管には、必要に応じてスペクトル領域に発光を示す各種発光体が用いられる。例えば、赤色発光体、緑色発光体、青色発光体のいずれか1種または2種以上が混合されて用いられる。スペクトル領域は、上記の赤色、緑色及び青色に限定されず、黄色、橙色、紫色あるいは赤外領域に発光する蛍光体も用いられる。特に、これらの発光体を混合して白色に発光する陰極線管がしばしば用いられる。また、紫外線ランプも好ましく、水銀ランプのg線、水銀ランプのi線等も利用される。 Examples of the light source include scanning exposure using a cathode ray (CRT). The cathode ray tube exposure apparatus is simpler and more compact and less expensive than an apparatus using a laser. Also, the adjustment of the optical axis and color is easy. As the cathode ray tube used for image exposure, various light emitters that emit light in the spectral region are used as necessary. For example, one or more of a red light emitter, a green light emitter, and a blue light emitter are mixed and used. The spectral region is not limited to the above red, green, and blue, and phosphors that emit light in the yellow, orange, purple, or infrared region are also used. In particular, a cathode ray tube that emits white light by mixing these light emitters is often used. An ultraviolet lamp is also preferable, and g-line of a mercury lamp, i-line of a mercury lamp, etc. are also used.
また、本発明では、露光は種々のレーザービームを用いて行うことができる。例えば、ガスレーザー、発光ダイオード、半導体レーザー、半導体レーザーまたは半導体レーザーを励起光源に用いた固体レーザーと非線形光学結晶を組合わせた第二高調波発光光源(SHG)等の単色高密度光を用いた走査露光方式を好ましく用いることができ、さらにKrFエキシマレーザー、ArFエキシマレーザー、F2レーザー等も用いることができる。システムをコンパクトで、安価なものにするために、露光は、半導体レーザー、半導体レーザーあるいは固体レーザーと非線形光学結晶を組合わせた第二高調波発生光源(SHG)を用いて行うことが好ましい。特にコンパクトで、安価、さらに寿命が長く、安定性が高い装置を設計するためには、露光は半導体レーザーを用いて行うことが好ましい。 In the present invention, exposure can be performed using various laser beams. For example, a monochromatic high-density light such as a gas laser, a light emitting diode, a semiconductor laser, a semiconductor laser, or a second harmonic light source (SHG) that combines a nonlinear laser and a solid state laser using a semiconductor laser as an excitation light source was used. A scanning exposure method can be preferably used, and a KrF excimer laser, an ArF excimer laser, an F 2 laser, or the like can also be used. In order to make the system compact and inexpensive, the exposure is preferably performed using a semiconductor laser, a semiconductor laser, or a second harmonic generation light source (SHG) that combines a solid-state laser and a nonlinear optical crystal. In order to design an apparatus that is particularly compact, inexpensive, long-life, and highly stable, it is preferable to perform exposure using a semiconductor laser.
レーザー光源としては、具体的には、波長430〜460nmの青色半導体レーザー(2001年3月の第48回応用物理学関係連合講演会で日亜化学発表)、半導体レーザー(発振波長約1060nm)を導波路状の反転ドメイン構造を有するLiNbO3のSHG結晶により波長変換して取り出した約530nmの緑色レーザー、波長約685nmの赤色半導体レーザー(日立タイプNo.HL6738MG)、波長約650nmの赤色半導体レーザー(日立タイプNo.HL6501MG)等が好ましく用いられる。 Specifically, as a laser light source, a blue semiconductor laser with a wavelength of 430 to 460 nm (announced by Nichia Chemical at the 48th Applied Physics Related Conference in March 2001), a semiconductor laser (oscillation wavelength of about 1060 nm) is used. About 530 nm green laser, wavelength about 685 nm red semiconductor laser (Hitachi type No. HL6738MG), wavelength about 650 nm red semiconductor laser (wavelength converted by LiNbO 3 SHG crystal with waveguide inversion domain structure) Hitachi type No. HL6501MG) is preferably used.
銀塩含有層をパターン状に露光する方法は、フォトマスクを利用した面露光で行ってもよいし、レーザービームによる走査露光で行ってもよい。この際、レンズを用いた屈折式露光でも反射鏡を用いた反射式露光でもよく、コンタクト露光、プロキシミティー露光、縮小投影露光、反射投影露光等の露光方式を用いることができる。 The method for exposing the silver salt-containing layer in a pattern may be performed by surface exposure using a photomask or by scanning exposure using a laser beam. At this time, refractive exposure using a lens or reflection exposure using a reflecting mirror may be used, and exposure methods such as contact exposure, proximity exposure, reduced projection exposure, and reflection projection exposure can be used.
〔化学現像処理〕
本発明では、感光材料を露光した後、化学現像処理(単に「化学現像」ともいう。)が行われる。化学現像処理は、発色現像主薬を含有しない、いわゆる黒白現像処理であることが好ましい。
[Chemical development]
In the present invention, after the photosensitive material is exposed, chemical development processing (also simply referred to as “chemical development”) is performed. The chemical development process is preferably a so-called black and white development process that does not contain a color developing agent.
化学現像処理液としては、現像主薬としてハイドロキノン、ハイドロキノンスルホン酸ナトリウム、クロルハイドロキノン等のハイドロキノン類の他に、1−フェニル−3−ピラゾリドン、1−フェニル−4,4−ジメチル−3−ピラゾリドン、1−フェニル−4−メチル−4−ヒドロキシメチル−3−ピラゾリドン、1−フェニル−4−メチル−3−ピラゾリドン等のピラゾリドン類及びN−メチルパラアミノフェノール硫酸塩等の超加成性現像主薬と併用することができる。また、ハイドロキノンを使用しないでアスコルビン酸やイソアスコルビン酸等レダクトン類化合物を上記超加成性現像主薬と併用することが好ましい。 As a chemical developing solution, in addition to hydroquinones such as hydroquinone, sodium hydroquinone sulfonate, chlorohydroquinone and the like as developing agents, 1-phenyl-3-pyrazolidone, 1-phenyl-4,4-dimethyl-3-pyrazolidone, 1 -Pyrazolidones such as phenyl-4-methyl-4-hydroxymethyl-3-pyrazolidone and 1-phenyl-4-methyl-3-pyrazolidone and superadditive developing agents such as N-methylparaaminophenol sulfate be able to. Further, it is preferable to use a reductone compound such as ascorbic acid or isoascorbic acid in combination with the superadditive developing agent without using hydroquinone.
また、化学現像処理液には保恒剤として亜硫酸ナトリウム塩や亜硫酸カリウム塩、緩衝剤として炭酸ナトリウム塩や炭酸カリウム塩、現像促進剤としてジエタノールアミン、トリエタノールアミン、ジエチルアミノプロパンジオール等を適宜使用できる。 Further, sodium sulfite salt or potassium sulfite salt as a preservative, sodium carbonate salt or potassium carbonate salt as a buffering agent, diethanolamine, triethanolamine, diethylaminopropanediol or the like as a development accelerator can be appropriately used in the chemical developing solution.
化学現像処理で用いられる現像処理液は、画質を向上させる目的で、画質向上剤を含有することができる。画質向上剤としては、例えば、1−フェニル−5−メルカプトテトラゾール、5−メチルベンゾトリアゾール等の含窒素へテロ環化合物を挙げることができる。 The development processing solution used in the chemical development processing can contain an image quality improving agent for the purpose of improving the image quality. Examples of the image quality improver include nitrogen-containing heterocyclic compounds such as 1-phenyl-5-mercaptotetrazole and 5-methylbenzotriazole.
本発明における化学現像処理においては、化学現像後に、未露光部分のハロゲン化銀粒子を除去して安定化させる目的で行われる定着処理を行う。本発明における定着処理は、ハロゲン化銀粒子を用いた写真フィルムや印画紙等で用いられる定着液処方を用いることができる。定着処理で使用する定着液は、定着剤としてチオ硫酸ナトリウム、チオ硫酸カリウム、チオ硫酸アンモニウム等を使用することができる。定着時の硬膜剤として硫酸アルミウム、硫酸クロミウム等を使用することができる。定着剤の保恒剤としては、化学現像処理液で述べた亜硫酸ナトリウム、亜硫酸カリウム、アスコルビン酸、エリソルビン酸等を使用することができ、その他にクエン酸、蓚酸等を使用することができる。 In the chemical development processing in the present invention, after the chemical development, fixing processing is performed for the purpose of removing and stabilizing unexposed silver halide grains. For the fixing treatment in the present invention, a fixer formulation used for photographic films, photographic papers and the like using silver halide grains can be used. The fixing solution used in the fixing process may use sodium thiosulfate, potassium thiosulfate, ammonium thiosulfate, or the like as a fixing agent. Aluminum sulfate, chromium sulfate, or the like can be used as a hardener for fixing. As the preservative for the fixing agent, sodium sulfite, potassium sulfite, ascorbic acid, erythorbic acid and the like described in the chemical developing solution can be used, and citric acid, oxalic acid and the like can be used.
更に、定着処理後、水洗処理を行うことが好ましい。本発明に使用する水洗水には、防黴剤としてN−メチル−イソチアゾール−3−オン、N−メチル−イソチアゾール−5−クロロ−3−オン、N−メチル−イソチアゾール−4,5−ジクロロ−3−オン、2−ニトロ−2−ブロム−3−ヒドロキシプロパノール,2−メチル−4−クロロフェノール、過酸化水素等を使用することができる。 Furthermore, it is preferable to perform a water washing treatment after the fixing treatment. The washing water used in the present invention includes N-methyl-isothiazol-3-one, N-methyl-isothiazol-5-chloro-3-one, and N-methyl-isothiazole-4,5 as antifungal agents. -Dichloro-3-one, 2-nitro-2-bromo-3-hydroxypropanol, 2-methyl-4-chlorophenol, hydrogen peroxide and the like can be used.
〔物理現像処理〕
本発明においては、主たる成分が銀からなる導電性パターンに好ましい導電性を付与するために、化学現像処理後、物理現像処理(単に「物理現像」ともいう)を行う。本発明でいう「物理現像処理」とは、化学現像処理により感光性材料中のハロゲン化銀粒子から生成された現像銀以外に、新たに外部から銀イオンを供給し、化学現像処理で生される現像銀を補強するプロセスのことを示す。物理現像処理液から銀イオンを供給するための具体的な方法としては、例えば予め物理現像処理液中に硝酸銀等を溶解しておき銀イオンを溶かしておく方法、あるいは物理現像処理液中に、チオ硫酸ナトリウム、チオシアン酸アンモニウム等のようなハロゲン化銀溶剤を溶解しておき、現像時に未露光部のハロゲン化銀粒子を溶解させ、潜像を有するハロゲン化銀粒子の現像を補力する方法等が挙げられるが、本発明においては、前者であることが好ましい。
[Physical development processing]
In the present invention, a physical development process (also simply referred to as “physical development”) is performed after the chemical development process in order to impart a preferable conductivity to a conductive pattern whose main component is silver. In the present invention, “physical development processing” refers to newly developed silver ions supplied from the outside in addition to developed silver produced from silver halide grains in a photosensitive material by chemical development processing, and is generated by chemical development processing. This refers to the process of reinforcing developed silver. As a specific method for supplying silver ions from the physical development processing solution, for example, a method in which silver nitrate or the like is dissolved in advance in the physical development processing solution, or silver ions are dissolved, or in the physical development processing solution, A method for enhancing development of silver halide grains having a latent image by dissolving a silver halide solvent such as sodium thiosulfate, ammonium thiocyanate, etc., and dissolving silver halide grains in an unexposed area during development. In the present invention, the former is preferable.
なお、本発明においては従来技術で用いられるような、さらなる追加のメッキ処理やメッキ後に実施される黒化処理は実施しない。 In the present invention, further additional plating treatment and blackening treatment performed after plating as used in the prior art are not performed.
〔酸化処理〕
本発明においては、化学現像処理後、または/及び物理現像処理後に酸化処理を行ってもよい。酸化処理により、不要な金属成分をイオン化して溶解除去することが可能となり、フィルムの透過率をより高めることが可能となる。
[Oxidation treatment]
In the present invention, oxidation treatment may be performed after chemical development processing and / or after physical development processing. By the oxidation treatment, unnecessary metal components can be ionized and dissolved and removed, and the transmittance of the film can be further increased.
酸化処理に用いる処理液としては、例えばFe(III)イオンを含む水溶液を用いて処理する方法、あるいは過酸化水素、過硫酸塩、過硼酸塩、過燐酸塩、過炭酸塩、過ハロゲン酸塩、次亜ハロゲン酸塩、ハロゲン酸塩、有機過酸化物等の過酸化物を含む水溶液を用いて処理する方法など、従来公知の酸化剤を含有する処理液を用いることができる。酸化処理は、化学現像処理終了後から、物理現像処理終了後までのどのタイミングで実施しても良いが、好ましくは、物理現像処理終了後に行う。 As the treatment liquid used for the oxidation treatment, for example, a treatment method using an aqueous solution containing Fe (III) ions, or hydrogen peroxide, persulfate, perborate, perphosphate, percarbonate, perhalogenate. A treatment solution containing a conventionally known oxidant such as a method of treatment using an aqueous solution containing a peroxide such as hypohalite, halogenate, or organic peroxide can be used. The oxidation treatment may be performed at any timing from the end of the chemical development process to the end of the physical development process, but is preferably performed after the end of the physical development process.
以下、実施例により本発明を具体的に説明するが、本発明はこれにより限定されるものではない。なお、実施例において「%」の表示を用いるが、特に断りがない限り「質量%」を表す。 EXAMPLES Hereinafter, the present invention will be specifically described with reference to examples, but the present invention is not limited thereto. In addition, although the display of "%" is used in an Example, unless otherwise indicated, "mass%" is represented.
(下引き済みPETフィルム支持体)
100μmの二軸延伸PET支持体の両面に12W・min/m2のコロナ放電処理を施し、それぞれの面に下引き塗布液B−1を乾燥膜厚0.1μmになるように塗布し、さらに、それぞれの面のB−1乾燥膜上に12W・min/m2のコロナ放電処理を施し、下引き塗布液B−2を乾燥膜厚0.06μmになるように塗布した。その後、120℃で1.5分の熱処理を実施し、下引き済みPETフィルム支持体を得た。
(Underdrawn PET film support)
A biaxially stretched PET support of 100 μm is subjected to a corona discharge treatment of 12 W · min / m 2, and an undercoating solution B-1 is applied to each surface to a dry film thickness of 0.1 μm. Then, a corona discharge treatment of 12 W · min / m 2 was performed on the B-1 dry film on each surface, and the undercoating liquid B-2 was applied so as to have a dry film thickness of 0.06 μm. Thereafter, heat treatment was performed at 120 ° C. for 1.5 minutes to obtain an underdrawn PET film support.
〈下引き塗布液B−1〉
スチレン20質量部、グリシジルメタクリレート40質量部、ブチルアクリレート40質量部の共重合体ラテックス液(固形分質量30%) 50g
SnO2ゾル(A) 440g
化合物(UL−1) 0.2g
水で仕上げる 1000ml
〈下引き塗布液B−2〉
ゼラチン 10g
化合物(UL−1) 0.2g
化合物(UL−2) 0.2g
シリカ粒子(平均粒径3μm) 0.1g
硬膜剤(UL−3) 1g
水で仕上げる 1000ml
<Undercoat coating liquid B-1>
Copolymer latex liquid of 20 parts by mass of styrene, 40 parts by mass of glycidyl methacrylate and 40 parts by mass of butyl acrylate (solid content: 30%) 50 g
SnO 2 sol (A) 440g
Compound (UL-1) 0.2g
Finish with water 1000ml
<Undercoat coating liquid B-2>
10g gelatin
Compound (UL-1) 0.2g
Compound (UL-2) 0.2g
Silica particles (average particle size 3μm) 0.1g
Hardener (UL-3) 1g
Finish with water 1000ml
SnO2ゾル(A)
(SnO2ゾル(A)の合成例)
SnCl4・5H2O 65gを蒸留水2000mlに溶解して均一溶液とし、次いでこれを煮沸し沈澱物を得た。生成した沈澱物をデカンテーションにより取り出し、蒸留水にて何度も水洗する。沈澱を水洗した蒸留水中に硝酸銀を滴下し、塩素イオンの反応がないことを確認後、洗浄した沈澱物に蒸留水を添加し全量を2000mlとする。これに30%アンモニア水40mlを加え加温することにより、均一なゾルを得た。更に、アンモニア水を添加しながらSnO2の固型分濃度が8.3質量%になるまで加熱濃縮し、SnO2ゾル(A)を得た。
SnO 2 sol (A)
(Synthesis example of SnO 2 sol (A))
65 g of SnCl 4 .5H 2 O was dissolved in 2000 ml of distilled water to obtain a homogeneous solution, which was then boiled to obtain a precipitate. The produced precipitate is taken out by decantation and washed with distilled water many times. Silver nitrate is added dropwise to distilled water in which the precipitate has been washed, and after confirming that there is no reaction of chlorine ions, distilled water is added to the washed precipitate to make a total volume of 2000 ml. To this, 40 ml of 30% aqueous ammonia was added and heated to obtain a uniform sol. Further, while adding ammonia water, the solution was concentrated by heating until the solid content concentration of SnO 2 reached 8.3% by mass to obtain SnO 2 sol (A).
〔ハロゲン化銀微粒子乳剤1の調製〕
反応容器内で下記溶液Aを34℃に保ち、特開昭62−160128号公報記載の混合撹拌装置を用いて高速に撹拌しながら、硝酸(濃度6%)を用いてpHを2.95に調整した。引き続き、ダブルジェット法を用いて下記溶液Bと下記溶液Cを一定の流量で8分6秒間かけて添加した。添加終了後に、炭酸ナトリウム(濃度5%)を用いてpHを5.90に調整し、続いて下記溶液Dと溶液Eを添加した。
[Preparation of silver halide fine grain emulsion 1]
The following solution A was kept at 34 ° C. in a reaction vessel, and the pH was adjusted to 2.95 using nitric acid (concentration 6%) while stirring at high speed using a mixing and stirring device described in JP-A-62-2160128. It was adjusted. Subsequently, the following solution B and the following solution C were added at a constant flow rate over 8 minutes and 6 seconds using the double jet method. After completion of the addition, the pH was adjusted to 5.90 using sodium carbonate (concentration 5%), and then the following solution D and solution E were added.
(溶液A)
アルカリ処理不活性ゼラチン(平均分子量10万) 18.7g
塩化ナトリウム 0.31g
溶液I(下記) 1.59ml
純水 1246ml
(溶液B)
硝酸銀 169.9g
硝酸(濃度6%) 5.89ml
純水にて317.1mlに仕上げる
(溶液C)
アルカリ処理不活性ゼラチン(平均分子量10万) 5.66g
塩化ナトリウム 58.8g
臭化カリウム 13.3g
溶液I(下記) 0.85ml
溶液II(下記) 2.72ml
純水にて317.1mlに仕上げる
(溶液D)
2−メチル−4ヒドロキシ−1,3,3a,7−テトラアザインデン 0.56g
純水 112.1ml
(溶液E)
アルカリ処理不活性ゼラチン(平均分子量10万) 3.96g
溶液I(下記) 0.40ml
純水 128.5ml
(溶液I)
界面活性剤:ポリイソプロピレンポリエチレンオキシジコハク酸エステルナトリウム塩の10質量%メタノール溶液
(溶液II)
六塩化ロジウム錯体の10質量%水溶液
上記操作終了後に、常法に従い40℃にてフロキュレーション法を用いて脱塩及び水洗処理を施し、溶液Fと防バイ剤を加えて60℃でよく分散し、40℃にてpHを5.90に調整して、最終的に臭化銀を10モル%含む平均粒子径0.09μm、変動係数10%の塩臭化銀立方体粒子乳剤を得た。
(Solution A)
Alkali-treated inert gelatin (average molecular weight 100,000) 18.7g
Sodium chloride 0.31g
Solution I (below) 1.59ml
Pure water 1246ml
(Solution B)
169.9g of silver nitrate
Nitric acid (concentration 6%) 5.89ml
Finish to 317.1 ml with pure water (Solution C)
Alkali-treated inert gelatin (average molecular weight 100,000) 5.66 g
Sodium chloride 58.8g
13.3 g of potassium bromide
Solution I (below) 0.85ml
Solution II (below) 2.72 ml
Finish to 317.1 ml with pure water (Solution D)
2-Methyl-4hydroxy-1,3,3a, 7-tetraazaindene 0.56 g
112.1 ml of pure water
(Solution E)
Alkali-treated inert gelatin (average molecular weight 100,000) 3.96 g
Solution I (below) 0.40ml
128.5 ml of pure water
(Solution I)
Surfactant: 10% by weight methanol solution of polyisopropylene polyethylene oxydisuccinate sodium salt (Solution II)
10% by weight aqueous solution of rhodium hexachloride complex After the above operation is completed, desalting and water washing are performed using a flocculation method at 40 ° C. according to a conventional method. The pH was adjusted to 5.90 at 40 ° C., and finally a silver chlorobromide cubic grain emulsion containing 10 mol% of silver bromide and having an average grain size of 0.09 μm and a coefficient of variation of 10% was obtained.
(溶液F)
アルカリ処理不活性ゼラチン(平均分子量10万) 16.5g
純水 139.8ml
上記ハロゲン化銀乳剤に対し、チオ硫酸ナトリウムをハロゲン化銀1モル当たり20mg用い、40℃にて80分間化学増感を行い、化学増感終了後に4−ヒドロキシ−6−メチル−1,3,3a,7−テトラザインデン(TAI)をハロゲン化銀1モル当たり500mg、1−フェニル−5−メルカプトテトラゾールをハロゲン化銀1モル当たり150mg添加して、ハロゲン化銀乳剤EM−1を得た。このハロゲン化銀乳剤EM−1のハロゲン化銀粒子とゼラチンの体積比(ハロゲン化銀粒子/ゼラチン)は0.625であった。さらに硬膜剤(H−1:テトラキス(ビニルスルホニルメチル)メタン)をゼラチン1g当たり200mgの比率となるようにして添加し、また塗布助剤として、界面活性剤(SU−2:スルホ琥珀酸ジ(2−エチルヘキシル)・ナトリウム)を添加し、表面張力を調整した。こうして得られた塗布液を、ゼラチンの付き量が表1記載量となるように上記易接着ポリエステルフィルム支持体の片方の面上に塗布した後、50℃、24時間のキュア処理を実施した。
(Solution F)
Alkali-treated inert gelatin (average molecular weight 100,000) 16.5g
Pure water 139.8ml
The silver halide emulsion was subjected to chemical sensitization at 40 ° C. for 80 minutes using 20 mg of sodium thiosulfate per mole of silver halide, and 4-hydroxy-6-methyl-1,3, after completion of chemical sensitization. 500 mg of 3a, 7-tetrazaindene (TAI) per 1 mol of silver halide and 150 mg of 1-phenyl-5-mercaptotetrazole per 1 mol of silver halide were added to obtain silver halide emulsion EM-1. In this silver halide emulsion EM-1, the volume ratio of silver halide grains to gelatin (silver halide grains / gelatin) was 0.625. Further, a hardening agent (H-1: tetrakis (vinylsulfonylmethyl) methane) was added at a ratio of 200 mg per 1 g of gelatin, and a surfactant (SU-2: sulfosuccinate disulfate) was applied as a coating aid. (2-ethylhexyl) .sodium) was added to adjust the surface tension. The coating solution thus obtained was applied on one surface of the above-mentioned easily adhesive polyester film support so that the amount of gelatin applied was as described in Table 1, followed by curing at 50 ° C. for 24 hours.
上述のようにして作製したフィルムに対して、ライン幅が6μm、ライン同士の間隔が244μmの格子状のフォトマスクを介して、紫外線ランプを用いて露光を行い、下記現像液(DEV−1)を用いて25℃で60秒間現像処理を行った後、下記定着液(FIX−1)を用いて25℃で120秒間の定着処理を行った。さらに、下記物理現像液(PDEV−1)を用いて25℃で10分間物理現像を行った後、水洗、乾燥処理を行った。 The film produced as described above is exposed using an ultraviolet lamp through a grid-like photomask having a line width of 6 μm and a distance between lines of 244 μm, and the following developer (DEV-1) Then, development processing was performed at 25 ° C. for 60 seconds, and then fixing processing was performed at 25 ° C. for 120 seconds using the following fixing solution (FIX-1). Further, physical development was performed at 25 ° C. for 10 minutes using the following physical developer (PDEV-1), followed by washing with water and drying.
(DEV−1)
純水 500ml
メトール 2g
無水亜硫酸ナトリウム 80g
ハイドロキノン 4g
ホウ砂 4g
チオ硫酸ナトリウム 10g
臭化カリウム 0.5g
水を加えて全量を1リットルとする
(FIX−1)
純水 750ml
チオ硫酸ナトリウム 250g
無水亜硫酸ナトリウム 15g
氷酢酸 15ml
カリミョウバン 15g
水を加えて全量を1リットルとする
(PDEV−1)
下記A液、B液を処理の直前に混合する
(A液)
純水 400ml
クエン酸 10g
リン酸水素2ナトリウム 1g
アンモニア水(28%水溶液) 1.2ml
ハイドロキノン 3g
(B液)
純水 10ml
硝酸銀 0.4g
(水洗処理及び乾燥処理)
水洗処理は、水道水で10分間洗い流した。また乾燥処理は、乾燥風(50℃)を用いてドライ状態になるまで乾燥した。
(DEV-1)
500 ml of pure water
Metol 2g
80 g of anhydrous sodium sulfite
Hydroquinone 4g
4g borax
Sodium thiosulfate 10g
Potassium bromide 0.5g
Add water to bring the total volume to 1 liter (FIX-1)
750 ml of pure water
Sodium thiosulfate 250g
Anhydrous sodium sulfite 15g
Glacial acetic acid 15ml
Potash alum 15g
Add water to bring the total volume to 1 liter (PDEV-1)
The following A liquid and B liquid are mixed immediately before processing (A liquid).
400ml of pure water
Citric acid 10g
Disodium hydrogen phosphate 1g
Ammonia water (28% aqueous solution) 1.2ml
Hydroquinone 3g
(Liquid B)
10 ml of pure water
0.4 g of silver nitrate
(Washing treatment and drying treatment)
The washing process was performed with tap water for 10 minutes. Moreover, the drying process was dried until it became a dry state using drying air (50 degreeC).
(透明導電膜)
導電性高分子化合物として、スルホン酸系ドーパントを含有する導電性ポリアニリンの分散液ORMECON D1033(ドイツ オルメコン社製)を用いて、乾燥膜厚が130nmとなるように作製した銀メッシュ上に塗布し、本発明の透明導電フィルム101を作製した。
(Transparent conductive film)
Using a conductive polyaniline dispersion ORMECON D1033 (manufactured by Olmecon, Germany) containing a sulfonic acid-based dopant as a conductive polymer compound, it was applied on a silver mesh prepared to have a dry film thickness of 130 nm. A transparent conductive film 101 of the present invention was produced.
AgBr/AgCl比、Ag/バインダー比、バインダー付き量が表1記載となるように変更した以外は同様にして本発明の透明導電フィルム102から117を、さらに、導電性高分子化合物としてPEDOT:PSS=1:2.5の分散液であるBaytron PH510(H.C.Starck社製)にジメチルスルホキシドを5質量%添加した液に変更した以外は透明導電フィルム101と同様にして本発明の透明導電フィルム118を作製した。 Similarly, except that the AgBr / AgCl ratio, the Ag / binder ratio, and the amount with the binder were changed as shown in Table 1, the transparent conductive films 102 to 117 of the present invention were further converted into PEDOT: PSS as the conductive polymer compound. = 1: 2.5 The transparent conductive film of the present invention was prepared in the same manner as the transparent conductive film 101 except that Baytron PH510 (manufactured by HC Starck) was added to 5% by mass of dimethyl sulfoxide. A film 118 was produced.
さらに、導電性高分子化合物として導電性ポリアニリンの分散液ORMECON NXC001X(ドイツ オルメコン社製)を用いた以外は透明導電フィルム101と同様にして本発明の透明導電フィルム119を作製した。 Further, a transparent conductive film 119 of the present invention was produced in the same manner as the transparent conductive film 101 except that a conductive polyaniline dispersion ORMECON NXC001X (made by Olmecon, Germany) was used as the conductive polymer compound.
(比較試料)
比較試料として以下の試料を準備した。
(Comparative sample)
The following samples were prepared as comparative samples.
試料201;試料101の物理現像後、導電性高分子化合物を塗布していない試料
試料202;易接着済み支持体上にハロゲン化銀乳剤層を設けず、直接ORMECON D1033(ドイツ オルメコン社製)を塗布した試料
試料203;試料101の物理現像後下記メッキ液(PL−1)を用いて25℃で5分間の条件で電解銅メッキ処理をした後、ORMECON D1033(ドイツ オルメコン社製)を塗布した試料
試料204;4試料203のメッキ処理後、下記黒化処理液(BK−1)を用いて80℃で1分間の条件で黒化処理を施した後にORMECON D1033(ドイツ オルメコン社製)を塗布した試料
試料205;試料101のORMECON D1033(ドイツ オルメコン社製)の代わりにITO膜を蒸着した試料
(PL−1)
純水 1000ml
硫酸銅 200g
硫酸 50g
(BK−1)
純水 1000ml
亜塩素酸ナトリウム 31g
水酸化ナトリウム 15g
リン酸三ナトリウム 12g
各試料について以下の評価を行った。結果を表1に示す。
Sample 201: Sample without applying conductive polymer compound after physical development of sample 101 Sample 202: Without a silver halide emulsion layer on an easily-adhered support, ORMECON D1033 (manufactured by Olmecon, Germany) Applied Sample Specimen 203; After physical development of Sample 101, the following plating solution (PL-1) was used for electrolytic copper plating treatment at 25 ° C. for 5 minutes, and then ORMECON D1033 (manufactured by Olmecon, Germany) was applied. Sample Sample 204; After plating of Sample 203, after applying blackening treatment at 80 ° C. for 1 minute using the following blackening solution (BK-1), ORMECON D1033 (made by Olmecon, Germany) is applied. Sample 205; Sample obtained by depositing ITO film instead of ORMECON D1033 (manufactured by Olmecon, Germany) of Sample 101 (PL-1)
1000ml of pure water
200 g of copper sulfate
50g of sulfuric acid
(BK-1)
1000ml of pure water
Sodium chlorite 31g
Sodium hydroxide 15g
Trisodium phosphate 12g
The following evaluation was performed for each sample. The results are shown in Table 1.
(表面比抵抗の測定)
抵抗率計(ロレスタGP(MCP−T610型):(株)ダイヤインスツルメンツ社製)を用いて表面比抵抗を測定した。なお、本発明の試料については導電性高分子化合物を塗布する前の物理現像後の試料についても表面比抵抗を測定した。
(Measurement of surface resistivity)
The surface resistivity was measured using a resistivity meter (Loresta GP (MCP-T610 type): manufactured by Dia Instruments Co., Ltd.). In addition, about the sample of this invention, the surface specific resistance was measured also about the sample after physical development before apply | coating a conductive polymer compound.
× 100Ω/□以上
△× 50Ω/□以上100Ω/□未満
△ 30Ω/□以上50Ω/□未満
○△ 10Ω/□以上30Ω/□未満
○ 10Ω/□未満。
× 100Ω / □ or more △ × 50Ω / □ or more and less than 100Ω / □ △ 30Ω / □ or more and less than 50Ω / □ ○ △ 10Ω / □ or more and less than 30Ω / □ ○ Less than 10Ω / □.
(透過率の測定)
分光光度計(日立分光光度計U−3210:(株)日立製作所製)を用いて透過率を測定した。
(Measurement of transmittance)
The transmittance was measured using a spectrophotometer (Hitachi spectrophotometer U-3210: manufactured by Hitachi, Ltd.).
○ 80%以上
○△ 75%以上80%未満
△ 70%以上75%未満
△× 65%以上70%未満
× 65%未満。
○ 80% or more ○ △ 75% or more and less than 80% △ 70% or more and less than 75% △ × 65% or more and less than 70% × less than 65%.
(屈曲耐性)
10cm×10cmに切り出した試料を直径3cmの円筒状に丸め、指で断面が∞のような形状になるように10回押し込みを繰り返して、ひび割れが発生するかを確認した。
(Bending resistance)
A sample cut out to 10 cm × 10 cm was rounded into a cylindrical shape with a diameter of 3 cm, and it was repeatedly pushed with a finger 10 times so that the cross-section had a shape of ∞, and it was confirmed whether cracks occurred.
○ 発生なし
× ひび割れ発生
(ガス耐性)
JIS C0048 環境試験方法 −電気・電子− 混合ガス流腐食試験 試験方法4に準拠した方法で、10日間ガス環境下に保存した試料の表面比抵抗を保存前後で比較した。保存条件の詳細は表2参照。
保存後の表面比抵抗値が保存前に対して
× 10倍以上に上昇
△× 5倍以上10倍未満
△ 3倍以上5倍未満
○△ 2倍以上3倍未満
○ 2倍未満
とした。
○ No generation × Crack generation (gas resistance)
JIS C0048 Environmental Test Method -Electric / Electronic- Mixed Gas Flow Corrosion Test The surface specific resistance of samples stored in a gas environment for 10 days was compared before and after storage in accordance with Test Method 4. See Table 2 for details of storage conditions.
Surface specific resistance value after storage rises to 10 times or more compared with before storage Δ × 5 times or more and less than 10 times Δ 3 times or more and less than 5 times ○ Δ 2 times or more and less than 3 times ○ Set to less than 2 times.
(ヘイズ)
東京電色 TURBIDITY METER T−2600DA型により評価した。
(Haze)
Evaluation was performed by using Tokyo Denshoku TURBIDITY METER T-2600DA.
○ 2%未満
○△ 2%以上3%未満
△ 3%以上5%未満
△× 5%以上8%未満
× 8%以上。
○ Less than 2% ○ △ 2% or more and less than 3% △ 3% or more and less than 5% △ × 5% or more and less than 8% × 8% or more.
(着色)
試料を目視で観察した。
(Coloring)
The sample was observed visually.
× 明らかにメッシュの色が分かる
○ メッシュの色が気にならない。
× You can clearly see the color of the mesh ○ I don't care about the color of the mesh.
(接着性)
メッシュに対して45度の角度で1mm×1mmで10個×10個=100個の升目の切込みをカミソリ刃を使って入れる。この升目部に日東電工製セロハンテープNo.29を貼り、力強く剥離した際の残存升数をカウントした。
(Adhesiveness)
Use a razor blade to cut 10 × 10 = 100 square mesh cuts at an angle of 45 ° to the mesh at 1 mm × 1 mm. Nitto Denko's cellophane tape no. No. 29 was attached, and the number of remaining pieces when it was peeled strongly was counted.
○ 90個以上
○△ 70個以上90個未満
△ 50個以上70個未満
△× 30個以上50個未満
× 30個未満。
○ 90 or more ○ △ 70 or more and less than 90 △ 50 or more and less than 70 △ × 30 or more and less than 50 × less than 30
(カール)
試料を3.5cm×15cmで切り出し、23℃で20%RH、80%RHの各環境下で3時間放置した際にそれぞれカールの様子を観察した。
(curl)
When the sample was cut out at 3.5 cm × 15 cm and left at 23 ° C. in each environment of 20% RH and 80% RH for 3 hours, the state of curling was observed.
○ いずれの環境においてもカールなし
△ わずかにカール発生するが取り扱いには問題なし
× 強いカールが発生。
○ No curl in any environment △ Slightly curl but no problem in handling × Strong curl occurs.
表1の通り、全てのサンプルにおいて電磁波遮蔽能の指標である表面抵抗率は満足行く値が得られたが、ディスプレイ前面フィルター用として非常に重要な透明性に関して、本発明においては汚れのない高品質でかつ透過率の高い透光性導電性膜が得られたが、比較例においては汚れの付着が認められ、ムラとなって視認されるだけでなく透過率も低く満足のいくものは得られなかった。 As shown in Table 1, satisfactory values were obtained for the surface resistivity, which is an index of electromagnetic wave shielding ability, in all the samples. However, in the present invention, the transparency which is very important for the display front filter is high in the present invention. A translucent conductive film with high quality and high transmittance was obtained, but in the comparative example, adhesion of dirt was recognized, and not only was it seen as unevenness, but also a satisfactory transmittance was obtained with low transmittance. I couldn't.
Claims (2)
導電性高分子化合物がポリエチレンジオキシチオフェン系またはポリアニリン系の導電性高分子化合物であり、
前記ハロゲン化銀粒子を含有する層におけるバインダー付き量が0.05g/m 2 以上0.25g/m 2 以下であり、
露光前の前記ハロゲン化銀粒子を含有する層におけるAg/バインダー比率が体積比で0.3以上0.8以下であることを特徴とする透明導電フィルム。 A transparent conductive material in which a conductive pattern containing silver and a transparent conductive film made of a conductive polymer compound are adjacently provided on the transparent film substrate from the side close to the transparent film substrate. In the film, the conductive pattern is provided with a layer containing silver halide grains on the transparent film substrate, and exposed and developed with the desired pattern to form a metallic silver portion of the desired pattern. Formed by further physical development processing ,
The conductive polymer compound is a polyethylenedioxythiophene-based or polyaniline-based conductive polymer compound,
Amount with the binder in the layer containing said silver halide grains is at 0.05 g / m 2 or more 0.25 g / m 2 or less,
A transparent conductive film , wherein the Ag / binder ratio in the layer containing the silver halide grains before exposure is 0.3 to 0.8 in volume ratio .
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US9608226B2 (en) | 2012-02-29 | 2017-03-28 | Konica Minolta, Inc. | Method for manufacturing transparent electrode |
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