JP5287273B2 - Wafer mounting method and wafer mounting apparatus - Google Patents

Description

  The present invention relates to a wafer mounting method and a wafer mounting apparatus for adhering a wafer on which a semiconductor device or an electronic component is formed to an adhesive sheet used during processing or conveyance.

  Wafers on which semiconductor devices and electronic components are formed are cut from ingots, and then transferred between processing devices suitable for various processes such as grinding, polishing, device formation, probing, dicing, and die bonding. It is conveyed by hand and processed to be individual semiconductor devices and electronic components.

  Particularly in the dicing process and die bonding process, the wafer is attached to an adhesive sheet having an adhesive layer formed on one side during the processing process and during transfer between processing devices, and the wafer is mounted on a frame or the like via the adhesive sheet. Is done. Accordingly, the wafer can be easily thinned or separated into pieces without moving during processing, and the processed wafer can be easily transported.

The sticking of the pressure-sensitive adhesive sheet to such a wafer is conventionally performed by placing the wafer W on a flat table such as the mount table 10 as shown in FIG. The sheet 12 was pressed and stuck (for example, refer to Patent Document 1).
JP 2005-332931 A

  In recent years, with the progress of miniaturization of semiconductor manufacturing technology and mechatronics technology, DMD (Digital Micromirror Device), which is a kind of optical element of projector, and micro nozzle, pressure sensor, acceleration sensor, flow rate in the head part of inkjet printer There is an increasing demand for MEMS (Micro-Electro-Mechanical Systems) wafers equipped with microelectromechanical elements used for various sensors such as sensors.

  Since a microelectromechanical element is formed on a MEMS wafer, the wafer surface has an uneven shape. When a pressure-sensitive adhesive sheet is pasted on a surface having such a concavo-convex shape with a roller as in the past, the concave portion does not come into contact with the pressure-sensitive adhesive layer, so that the adhesion area is reduced and the adhesion fixing force is reduced. If the wafer is transported or processed in a state where the adhesive fixing force is reduced, a serious problem occurs such that the wafer is peeled off during the transport or processing.

  The present invention has been made in view of such a situation, and provides a wafer mounting method and a wafer mounting apparatus that exhibit a high adhesive fixing force even on a wafer having a concavo-convex shape on the surface thereof, such as a MEMS wafer. The purpose is to do.

In order to achieve the above object, the present invention is a plate-like member having a concavo-convex shape on at least one surface, and a hole through which air can pass is formed between one surface and the other surface. The one surface of the wafer is placed on an adhesive sheet provided with an adhesive layer, and the other surface is pressed with a pressing plate provided with a seal member on the outer peripheral portion, and suction means provided on the pressing plate, The wafer is stuck to the pressure-sensitive adhesive sheet by sucking air between the one surface and the pressure-sensitive adhesive layer.

  Further, the present invention is characterized in that, in the above-mentioned invention, the wafer is a wafer provided with a microelectromechanical element.

  According to the present invention, a pressure-sensitive adhesive sheet provided with a pressure-sensitive adhesive layer is placed on a mount table, and is a plate-like member having a concavo-convex shape on at least one surface, and an air between one surface and the other surface. One surface of a wafer such as a MEMS or the like in which holes capable of passing through are formed is placed on the adhesive sheet. The other side of the wafer opposite to the one side to which the adhesive sheet is attached is pressed by the pressing plate to attach the adhesive sheet.

  At this time, a seal member such as an O-ring is attached to the outer peripheral portion of the pressing plate, and the space between the pressing plate and the other surface of the wafer is hermetically sealed. In this state, the air between the one surface and the adhesive layer is discharged from the hole formed in the wafer by sucking air by the suction means provided on the holding plate, and the adhesive layer is sucked to the wafer side. It is drawn into the concave shape. Thereby, the pressure-sensitive adhesive layer is adhered even inside the concave portion, the adhesion area is increased, and the adhesion fixing force can be increased.

  As described above, according to the wafer mounting method and the wafer mounting apparatus of the present invention, the pressure-sensitive adhesive layer is drawn into the recess and bonded by pressing while sucking, thereby increasing the bonding area and increasing the adhesive fixing force. It becomes possible.

  Preferred embodiments of a wafer mounting method and a wafer mounting apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 2 is a side view showing the configuration of the wafer mounting apparatus and the wafer mounting method according to the present invention.

  First, the configuration of the wafer mount apparatus according to the present invention will be described. A wafer mount apparatus 1 according to the present invention is composed of a wafer table 2 and a pressing plate 3 that presses the wafer W.

  The wafer table 2 is flat and has a larger area than the wafer W to be mounted. The adhesive sheet T is placed on the wafer table 2, and the wafer W is placed on the adhesive sheet T. The surface of the wafer table 2 on which the adhesive sheet T is placed is formed with a plurality of grooves and porous surfaces, and has a mechanism for sucking and adsorbing the adhesive sheet T by a vacuum generation source communicating with the wafer table 2. Also good.

  The pressure-sensitive adhesive sheet T has a pressure-sensitive adhesive layer TB formed on a film-like substrate TA formed of a resin or the like. The pressure-sensitive adhesive sheet T is unrolled in a roll shape, or is circularly cut as shown in FIG. 2A and is attached to a ring-shaped frame F and placed on the wafer table 2. Is done.

  The wafer W is a plate-like member having an uneven shape on at least one surface, and a hole 4 through which air can pass is formed between one surface and the other surface. As the wafer W, a wafer such as a DMD or a MEMS wafer provided with a micro electromechanical element used for various sensors such as a micro nozzle of an ink jet printer, a pressure sensor, an acceleration sensor, and a flow sensor is used.

  The pressing plate 3 is a plate-like member having an O-ring 5 made of an elastic material such as rubber as a seal member on the outer peripheral portion, and a suction pipe 6 communicating with suction means (not shown) is provided at the center. The holding plate 3 can be moved in the direction of the arrow Z by a moving mechanism (not shown), and moves onto the wafer W placed on the pressure-sensitive adhesive sheet T with the concavo-convex surface in contact as shown in FIG. Then, the O-ring 5 is brought into contact with the wafer W, the space between the pressing plate 3 and the wafer W is sealed, and the wafer W is pressed against the adhesive sheet T.

  In this embodiment, the pressing plate 3 includes only the O-ring 5 on the outer peripheral portion. However, the present invention is not limited to this, and a column that supports the pressing plate 3 is provided inside the O-ring 5 of the pressing plate 3. Alternatively, the entire surface or part of the wafer W may be pressed by the O-ring 5 and the support column and pressed to the adhesive sheet T.

  Next, the wafer mounting method according to the present invention will be described. In the wafer mounting method according to the present invention, first, the pressure-sensitive adhesive sheet T is placed on the wafer table so that the base material TA comes into contact therewith. On the adhesive layer TB of the adhesive sheet T, as shown in FIG.

  Subsequently, as shown in FIG. 2B, the pressing plate 3 moves in the direction of arrow Z, and the O-ring 5 is brought into contact with the wafer W so that the space between the pressing plate 3 and the wafer W is sealed. The pressing plate 3 further moves toward the wafer W and presses the wafer W against the adhesive sheet T.

  The pressing plate 3 discharges air from a suction pipe 6 communicating with suction means (not shown) as shown in FIG. 2C in a state where the wafer W is pressed against the adhesive sheet T.

  Thereby, the air between the wafer W and the adhesive layer TB is discharged from the hole 4 formed in the wafer W, and the adhesive layer TB is sucked toward the wafer W and drawn into the concave shape. The pressure-sensitive adhesive layer TB drawn into the concave portion is bonded even inside the concave portion, the adhesion area is increased, and the adhesion fixing force can be increased.

  As described above, according to the wafer mounting method and the wafer mounting apparatus according to the present invention, the pressure-sensitive adhesive layer is drawn into the concave portion and bonded by being pressed onto the pressure-sensitive adhesive sheet while being sucked by the pressure plate. It becomes possible to increase the area and increase the adhesive fixing force.

The perspective view which showed the conventional wafer mounting method. The side view which showed the structure of the wafer mounting apparatus concerning this invention, and the wafer mounting method.

DESCRIPTION OF SYMBOLS 1 ... Wafer mounting apparatus, 2 ... Wafer table, 3 ... Holding plate, 4 ... Hole, 5 ... O-ring (seal member), 6 ... Suction pipe, 11 ... Roller, 12, T ... Adhesive sheet, F ... Frame, TA: base material, TB: adhesive layer, W: wafer

Claims (3)

An adhesive layer is formed on the one surface of the wafer, which is a plate-like member having an uneven shape on at least one surface and in which a hole through which air can pass is formed between the one surface and the other surface. Placed on the pressure-sensitive adhesive sheet provided, presses the other surface with a pressure plate provided with a seal member on the outer periphery, and between the one surface and the pressure-sensitive adhesive layer by suction means provided on the pressure plate. A wafer mounting method, wherein the wafer is attached to the pressure-sensitive adhesive sheet by sucking the air.   The wafer mounting method according to claim 1, wherein the wafer is a wafer including a microelectromechanical element. A pressure-sensitive adhesive sheet provided with a pressure-sensitive adhesive layer is placed, and is a plate-like member having a concavo-convex shape on at least one surface, and a hole through which air can pass is formed between one surface and the other surface. A mounting table on which the one surface of the wafer is placed on the adhesive sheet;
A pressing plate that includes a sealing member on an outer peripheral portion and presses the other surface of the wafer via the sealing member;
A wafer mounting apparatus comprising: a suction unit that is provided on the pressing plate and sucks air between the one surface and the adhesive layer.

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