JP5274972B2 - Precision press machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a precision press device capable of reducing a size of a vacuum chamber, shortening vacuum arrival time in pressing working in the vacuum chamber, and carrying out highly accurate pressure control, and also to provide a press load control method used for the same. <P>SOLUTION: In order to reduce the size of the chamber 16 to be vacuumed, a pressure sensor is installed outside the chamber 16, and a cylinder chamber 17 where a cylindrical plunger 7 is protruded and retracted using the cylindrical shape of the chamber 16 is formed. Force mutually attracting a pressure receiving part 2 and a pressurization part 1 by negative pressure 22 in the chamber 16 is generated, but the attracting force is canceled by pressurizing force 20 from the plunger 7, since pressure 19 of a fluid to be equalized is applied into the cylinder chamber 17 from a reverse direction to push out the cylindrical plunger 7 so that the pressurizing force 20 is generated in the cylindrical plunger 7. Load to a substrate or the like which is transferred at a press stage is highly accurately controlled based on driving force by a drive part. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to a precision press apparatus capable of transferring a fine structure with a high degree of flatness, and more particularly, a substrate (a transfer object) to which a master plate (a fine structure transfer mold) having a fine uneven pattern formed on the surface is transferred. pressed against) relates to precision press equipment to be applied to the microstructure transfer mold and microstructure transfer device for transferring and forming fine concavo-convex pattern on the substrate surface.

  Currently, a relatively inexpensive nano-level imprint apparatus is on sale for the fine structure transfer apparatus. Microstructure transfer devices can perform nano-level transfer, and these devices are generally called nanoimprint devices. Resin and glass are mainly used as the material of the transfer object, and there are two main types of nanoimprinting methods, the optical nanoimprinting device using ultraviolet rays and the thermal nanoimprinting device using heat, depending on the characteristics of these materials. It is classified. Examples of the transfer method include a parallel plate method using the principle of a general press device, a roller type sheet nano device, and the like.

  Here, in the parallel plate type nanoimprint apparatus, it is particularly important to improve the flatness and parallelism of the press stage when transferring to a transfer object, and also to ensure uniformity of heat and pressure. ing. In addition, there is a possibility that air bubbles may be generated due to press processing on a flat surface, and in order to avoid air bubbles from being mixed into the transfer object in both optical nanoprints and thermal nanoprints, transfer is now performed under vacuum. It is common. As a device for performing a vacuum press that can be seen at present, a method of performing a press in a vacuum BOX as shown in FIG. 4 or a spring or an O-ring in the vicinity of a press stage as described in Patent Document 1 is used. There is a method of mounting a sealing function and vacuuming only the press stage and the pressurizing part, or a method of pressing the upper and lower housings in a vacuum state and pressing with an internal mechanism as described in Patent Document 2. is there.

  In recent years, in parallel plate type, as well as downsizing, low cost, and high task of equipment, there are equipment that can cope with transfer of various sizes and material types from small (□ 20mm) to large (φ300mm). It has been demanded.

  As a press method, an apparatus using an air cylinder can be seen, but a servo press that can easily perform advanced control has become common. The nanoimprint apparatus itself is a class mainly handled in the semiconductor field, and is generally used in a clean room. Therefore, there are not many places that adopt a hydraulic cylinder in terms of dust generation and contamination.

  In the case of a nanoimprint apparatus capable of transferring a large size (φ300), there is a problem that the use of a vacuum BOX increases the size. Here, when considering miniaturization, it is considered effective to have a sealing function near the press plate. Here, let us consider the pressure fluctuation generated in the chamber during vacuum. In an apparatus capable of transferring a large size of φ300, assuming that the size of the chamber for vacuuming is φ300 and the pressure difference between the atmosphere and the vacuum is about 0.1 MPa, the chamber is loaded until the press plate comes into contact. A negative pressure of about 720 kg is generated.

  Further, in this large transferable apparatus, only a negative pressure of about 4 kg is generated when a small (□ 20 mm) transfer is performed. Negative pressure is no longer generated for the area where the transferred material is in contact, but the negative pressure is generated for the area where the transferred object is not in contact in the vacuum chamber, so a load of about 716 kg is small (□ 20 mm). ). When the vacuum BOX is used and the sliding shaft diameter is set to φ60 mm, a negative pressure of about 29 kg is generated. Here, even if the repulsive force of the O-ring or the spring is used to try to suspend it with the negative pressure, it cannot be used because the size and thickness of the transfer object are different.

Here, in the nanoimprint apparatus, a pressure sensor is attached inside or outside the vacuum chamber in order to feedback-control the pressure. However, since there is always a boundary between the chamber and the movable shaft, there is a problem in that a suction pressure in a vacuum state corresponding to the shaft diameter or the chamber diameter is generated as a negative pressure on the pressure shaft. Further, the method of installing the pressure sensor in the vacuum chamber has a problem that the chamber portion becomes large and complicated. Further, as the press stage and the shaft diameter are larger, the negative pressure increases, and further, there is a problem that the pressure at the time of press working is also affected by the size of the transfer object.
Japanese Patent Laid-Open No. 10-156943 JP 2003-181697 A

  In view of the above technical problems, an object of the present invention is to provide a fine structure transfer device that is easy in structure and capable of high-precision pressure control in nanoprinting, which is a pattern transfer technique for forming a fine-shaped structure. (Nanoimprint apparatus).

  The inventor of the present invention has focused on a small and highly accurate pressure control mechanism, and has reached the present invention. In consideration of miniaturization, the present invention has a sealing mechanism that becomes a vacuum chamber in the vicinity of the press plate, and in order to cancel the negative pressure during vacuum, the chamber itself is equipped with a cylinder function, and fluid supply to the cylinder By controlling the pressure, a negative pressure in a vacuum and a pressure by a cylinder are suspended to provide a device that is not affected by the vacuum. In addition, since a cylinder stroke can be used, a precision vacuum press mechanism that is not affected by the thickness direction of the transfer object is provided.

  The precision press device according to the present invention is attached to a pressure receiving portion, a pressure portion that faces the pressure receiving portion and is disposed so as to be movable back and forth with respect to the pressure receiving portion, and each facing surface of the pressure receiving portion and the pressure portion. A pressing stage, a driving unit that drives the pressing unit, and a cylindrical wall that surrounds the press stage in a sealed state between the pressure receiving unit and the pressing unit when the pressure receiving unit and the pressing unit are in proximity to each other A precision press apparatus comprising a chamber having a fluid actuating part that cancels out the force that pulls the pressure receiving part and the pressurizing part that are generated based on the negative pressure in the chamber. To do.

Further, in the precision press device according to the present invention , the fluid operating part constitutes the cylindrical wall and is provided with a cylinder provided in at least one of the pressure receiving part and the pressurizing part, and a fluid pressure in the cylinder. A cylindrical plunger provided so as to be movable back and forth based on the other, and the cylindrical plunger configured to control the fluid pressure in the cylinder to cancel the force to draw the pressure receiving portion and the pressurizing portion together A pressure control unit to be generated, and at the tip of the cylindrical plunger is provided with a seal member for maintaining the chamber in vacuum by contacting the other of the pressure receiving unit and the pressurizing unit in the advanced state, The cylinder is a cylindrical cylinder attached to the opposing surface on the one of the pressure receiving portion and the pressurizing portion, and the cylindrical plunger is sealed inside the cylindrical cylinder. It is and wherein the from the tubular cylinder tip is provided so as to be retractable toward the other of the pressing and the pressure receiving portion.

According to the precision press equipment according to the present invention, negative pressure due to each other pull forces the pressure receiving portion and the pressure portion to occur, but pressure in the tubular plunger on the basis of the fluid pressure in the cylinder chamber Since the pulling force and the applied pressure can be suspended and canceled, the load on the substrate or the like transferred by the press stage can be controlled with high accuracy based on the driving force by the driving unit.

  According to the present invention, it is possible to realize a precision press apparatus capable of controlling a good vacuum state and high-accuracy pressure with a simple and inexpensive structure, and press load control in the precision press apparatus. In addition, when the precision vacuum press apparatus according to the present invention is applied to a fine structure transfer apparatus, it is possible to easily cope with a change in the thickness of a material to be transferred.

  Hereinafter, an embodiment of a precision press apparatus according to the present invention will be described with reference to FIGS. 1 and 2. The embodiment of this precision press apparatus is applied as a fine structure transfer apparatus (nanoimprint apparatus) that performs press molding of an extremely fine pattern. The precision press apparatus shown in FIG. 1 basically has one end portion of a plurality of guide posts 3a, 3b (hereinafter, the symbol 3 is used as a general term, and the same applies to other components) arranged in parallel to each other. A fixed pressure receiving portion 2, a pressurizing portion 1 that is disposed so as to face the pressure receiving portion 2, and that is slidable on the guide post 3 so as to be able to advance and retreat with respect to the pressure receiving portion 2. A driving unit 11 that drives the pressurizing unit 1 toward the pressure receiving unit 2 through a bearing 10 is provided. By providing three or more guide posts 3, uniform pressing of the pressure unit 1 is possible. If the parallelism between the guides 3 can be ensured, it is possible to use only two guide posts 3.

  The pressurizing unit 1 is disposed so as to be slidable with respect to the guide post 3 via a cage 4. The pressurizing unit 1 is formed with a sliding hole through which each guide post 3 is inserted. As the cage 4, for example, a linear motion guide bearing or the like can be used, and high alignment can be provided until the mold and the transfer object come into contact with each other. The cage 4 is formed in a cylindrical shape having a flange portion provided at one end thereof, and the flange portion is positioned in contact with the pressurizing unit 1. The guide post 3 is inserted into the cylindrical shape of the cage 4, and the cage 4 can slide on the guide post 3, and as a result, the pressurizing unit 1 is guided through the cage 4 to the guide post 4. It can slide on.

  Press stages 5a and 5b are provided on the opposing surface sides of the pressurizing unit 1 and the pressure receiving unit 2, respectively. On the press stages 5a and 5b, an original plate having a microfabrication formed on the surface is arranged on one side, and a substrate is arranged on the other side. The substrate and the original plate are pressed against each other at the time of pressing. The fine processing of the original plate is transferred.

  A drive unit 11 that drives the pressurizing unit 1 presses the pressurizing unit 1 via a free bearing 10. The tip of the free bearing 10 has a spherical surface, and the pressurizing unit 1 and the pressure receiving unit 2 follow the press operation, that is, even when press stages 7a and 7b described later follow the pressurizing unit 1. It is possible to apply a load at a single point. Therefore, the copying of the pressure unit 1 and the pressure receiving unit 2 is maintained, a uniform load acts on the press stage 7, and press molding can be performed with high flatness accuracy.

  The pressurizing unit 1 and the drive unit 11 are not fixed by bolts, are attached in a state where they can swing to some extent, such as stripper bolts, dampers, or springs, and are mounted on a free bearing 10. In addition, although the free bearing 10 is used as the interposition means for contacting the drive unit 11 and the pressurizing unit 1, it can be replaced with a free joint having a spherical bearing in which a spherical body and a spherical surface are combined. is there.

  In this precision press apparatus, a servo motor, an air cylinder, a hydraulic cylinder, or the like can be used as a drive source of the drive unit 11.

  In this precision press apparatus, the contact portion where the free bearing 10 contacts the pressurizing unit 1 when the drive unit 11 presses the pressurizing unit 1 is a single point, but a plurality of points are evenly arranged. It can also be configured. Even when a plurality of points are arranged, since the respective points are arranged uniformly, a load is applied uniformly to the pressurizing unit 1 and the press stage 5b.

  In this precision press apparatus, the chamber 6 has a shape surrounding the press stage 5 in a minimum range. The chamber 6 is disposed on each of the pressurizing unit 1 side and the pressure receiving unit 2 side (that is, two on the upper and lower sides) or on at least one side. In the example shown in the figure, the chamber 6 is a cylindrical cylinder type chamber that is provided with a cylindrical plunger 7 that slides in fluid so that it can slide in and out on the pressure receiving unit 2 side, and the pressurizing unit 1 on the other side. On the side, it consists of a ring 8 with a fixed height. A cylindrical cylinder type chamber similar to the chamber 6 can be used instead of the ring 8 on the pressurizing unit 1 side. On the surface of the chamber 6, that is, on the end surface that abuts against the opposing surface of the pressurizing unit 1 and the pressure receiving unit 2, when the inside of the chamber 6 is evacuated, a ring-shaped elastic body 9 for holding the vacuum. There is at least one installed.

  The pressure 19 of the fluid entering the cylinder chamber 17 can be controlled. During pressing, the inside of the chamber 6 is sucked to a so-called vacuum state. Due to the negative pressure 22 generated in the chamber 16, a force attracting each other due to the pressure of the outside air acts on the pressurizing unit 1 and the pressure receiving unit 2. When the fluid is put into the cylinder chamber 17 from the pressurizing port 12, the plunger 7 is pushed down, and a pressing force 20 is generated in a direction to separate the pressurizing unit 1 and the pressure receiving unit 2, and the above-described pulling force based on the negative pressure 22 is generated. Can be countered.

  The timing for performing pressure adjustment includes three steps A, B, and C as shown in FIG. 7, and pressure control is possible according to each situation. A control block diagram of such a precision press apparatus and flowcharts of steps in pressure control are shown in FIGS.

  According to the control block diagram of the precision press apparatus shown in FIG. 8, the precision press apparatus includes a control unit 30, a sensor unit 40, and a mechanical unit 50. The sensor unit 40 includes a load manometer 41 that detects a press load and a vacuum manometer 42 that detects a pressure in the chamber 16. The control unit 30 includes a PLC (programmable controller) 31 to which the detection output from each of the pressure gauges from the sensor unit 40 is input, and a control unit to control devices such as an actuator that configure the drive unit 11 by receiving the output of the PLC 31. 32 and a controller 33 for pneumatic control equipment for controlling the fluid pressure into the cylinder chamber 17. In the PLC 31, the control content of each step A, B, C is written as a program. The PLC 31 controls a vacuum pump 53 that changes and controls the pressure in the chamber 6. The mechanical unit 50 includes a power source 51 such as the drive unit 11, a fluid operation unit (vacuum chamber) 52 including a cylinder chamber 17 that moves the plunger 7 of the chamber 6 in and out, and a vacuum pump 53.

  In Step A, as shown in the upper diagram of FIG. 7, the pressurizing unit 1 is pushed through the free bearing 10 by the drive of the driving unit 11 and moves to a position where vacuuming is possible, and then vacuuming 21 is performed. In order to cancel the negative pressure 22 generated in the chamber 6 at this time, the pressure 20 of the fluid is generated by introducing the fluid pressure 19 from the pressurizing port 12 to the cylinder chamber 17. FIG. 9 is a flowchart showing the control contents of step A. FIG. 9 shows the movement of the pressure unit 1 to a position where vacuuming is possible and the subsequent vacuuming 21 steps. That is, by driving the drive unit 11, the pressurizing unit 1 is moved in the direction of the pressure receiving unit 2, and the plunger 7 is pushed out (step 1, abbreviated as “S 1”). The chamber 6 surrounding the press stage 5 is formed by the cylinder, the plunger 7 and the ring 8. When reaching the evacuable position (S2), the movement of the plunger 7 by the actuator action for the cylinder is stopped, the operation of the vacuum pump 53 is turned on and the evacuation is started (S3). In step 7, if the load is 0 and the degree of vacuum is equal to or less than the set value, step A is completed and the process proceeds to the next step B. If not, the process returns to step 4 and the load The pressure decreases (S5) or increases (S6) according to plus or minus.

  Next, in step B, as shown in the middle diagram of FIG. 7, in order to cancel the sliding resistance 23 of the plunger 7 that occurs when the pressurizing unit 1 moves to the transfer position of the transfer object 18 after completion of evacuation. Adjust the pressure 20. FIG. 10 is a flowchart showing the control content of step B. FIG. 10 shows a step of adjusting the pressing force 20 in order to cancel the sliding resistance 23 of the plunger 7. That is, the pressurizing unit 1 moves in the direction toward the pressure receiving unit 2 (S11), and it is determined whether or not the sliding friction resistance is equal to or lower than the natural value (S12). Decrease (S14), and determine whether the load is 0 (S15). If the determination result is Yes, Step B is completed and the process proceeds to Step C in the next stage. Returning to step 14, the air pressure control is repeated. If the determination result in S12 is No, error processing (S13) is performed. At this time, since it is a frictional force when the plunger 7 moves, it is a unique value obtained from the moving speed, the contact area, and the friction coefficient, and an error process is performed to cope with an external force that exceeds that value. (S13) is incorporated. This step is performed in a very short time because the transfer object 18 is performed before contacting the surface of the press plate 5. Further, as described above, since the sliding resistance 23 is an eigenvalue, by omitting the value from the detected value of the load + in step 22 in step C, step B is omitted and from step A to step C. It is also possible to go.

  Finally, in step C, as shown in the lower diagram of FIG. 7, when the transfer object 18 comes into contact with the surface of the press stage 5, the area to be evacuated changes (area reduction), and thus pressure fluctuation occurs. (Attractive force decreased). In order to cancel the change in the negative pressure 22, control is performed to adjust the applied pressure 20. FIG. 11 is a flowchart showing the control contents of step C. FIG. 11 shows a step of adjusting the pressurizing force 20 for canceling the pulling force fluctuation caused by the change in the vacuum drawing area. That is, when the pressurizing unit 1 moves in the direction of the pressure receiving unit 2 (S21) and the transferred object 18 contacts the surface of the press stage 5 as described above, the negative pressure 22 decreases, but the applied pressure 20 is In order to maintain the force as it is, the force balance is lost and the detected pressure (load) increases rapidly (S22). When the force is detected, the pressurizing unit 1 stops moving, the applied pressure 20 is decreased (S23), the pressure is balanced with the negative pressure 22, and control is performed so that the load becomes 0 (S24). Step C is completed when 0 is reached.

Here, the pressure calculation values are as follows.
Applied pressure 20 = Area of the plunger 7 (or an inner diameter of a cylinder attached separately) × Pressure 19 of the fluid
Negative pressure 22 at step A = Cylinder inner area × Difference from external atmospheric pressure (about 0.1 MPa)
Negative pressure 22 at step B = negative pressure 22a−sliding resistance 23 of plunger 7
Negative pressure 22 at step C = (inner cylinder area−contact area of transferred object 18) × difference from external pressure (approximately 0.1 MPa

  In this precision press apparatus, air, gas, oil, water, and other fluids can be used as the fluid for pressurizing the cylinder 17.

  In this precision press apparatus, an O-ring or an alternative resin (urethane, silicon, polyimide, fluorine, polyethylene, etc.) can be used as the elastic body 9 forming the sealing portion.

  In this precision press apparatus, instead of canceling the vacuum negative pressure 22 by the cylinder mechanism (pressure introduction to the cylinder chamber 17) applied to the chamber 6, as shown in FIG. Cylinders 24a and 24b can be separately installed between the two, and the negative pressure 22 in the chamber 6 can be repelled by the applied pressure 20 of the cylinders 24a and 24b. Alternatively, as shown in FIG. 6, cylinders 25 a and 25 b can be installed on the back side of the pressurizing unit 1, and the negative pressure 22 can be canceled by the pulling force 20.

  In this precision press apparatus, the cylindrical tube wall of the chamber 6 can have a shape that can be provided with a cylinder mechanism such as a square, polygon, or ellipse in cross section other than the cylindrical shape.

  In this precision press apparatus, even if the pressurizing unit 1 and the pressure receiving unit 2 are arranged upside down, they can be established as an apparatus.

  In this precision press apparatus, as shown in FIG. 3, an annular groove is formed on the opposing surface of the pressure receiving portion 2 or the pressurizing portion 1 to form an annular cylinder chamber, and a cylindrical plunger 7 is embedded in the annular cylinder chamber. A cylinder mechanism can be configured.

  In this precision press apparatus, as shown in FIG. 3, at least one of the pressurizing unit 1 and the pressure receiving unit 2 has a cylindrical shape, but the other side (in this example, the pressurizing unit 1 side) has a chamber 6. Also, the ring 8 can be removed and the opposing surface itself can be pressed.

  In this precision press apparatus, as shown in FIG. 2, at least one end plate 26 as a stopper that can be engaged with the plunger 7 is provided on the cylinder side of the chamber 6 so that the plunger 7 does not come off the chamber 6. Can be provided. In this case, the plunger 7 can be formed with a groove as a region that does not interfere with the end plate 26 in order to allow the thickness of the substrate or the like. Further, the pressurizing port 12 communicating with the cylinder chamber 17 can be formed to open to the outside of the cylinder. Further, in order to prevent vacuum leakage, a groove for accommodating the O-rings 9 and 9a is formed on the distal end surface of the cylindrical plunger 7 and the upper end surface of the cylinder. Further, in order to prevent fluid leakage in the cylinder chamber 17, O-rings for sealing with the cylinder chamber 17 are accommodated in circumferential grooves formed on the inner and outer cylinder surfaces of the cylindrical plunger 7.

  FIG. 12 shows a front view of a nanoprint apparatus to which the precision press apparatus according to the present invention is applied. In FIG. 12, 101 is a pressure receiving portion fixed to the guide post 104, 102 is a pressurizing portion that is slidably guided to the guide post 104 through a cage, 103 is an adjustment nut, and is higher than the guide post 104. Fixed to be adjustable. Reference numeral 105 denotes a cage, and 116 denotes an operation panel, which is used to increase / decrease the pressure of the pressurizing unit and the pressure receiving unit in the chamber, to increase / decrease the temperature, to control the vacuum of the chamber, and to provide menus and recipes. Set automatic temperature control. 117 is a heater temperature controller for the pressure receiving unit and the pressurizing unit, 118 is a pressure indicator for displaying the pressure of the pressurizing unit, and 119 is a display for displaying the degree of vacuum in the chamber. Reference numeral 120 denotes a vacuum chamber, which is a chamber in which the interior is evacuated to transfer from the original plate to the substrate. Reference numeral 121 denotes a frame or cover that prevents dust and the like from entering the apparatus. A caster 122 is used when moving the entire apparatus. An adjuster 123 adjusts the height in order to obtain a level when the apparatus is installed. Reference numeral 124 denotes an anchor seat, which is fixed to the base when the levelness is adjusted by adjusting the height of the adjuster. Reference numeral 125 denotes an operation button, which has a power ON / OFF function.

13 and 14 show the structure of the press stage of the apparatus of the present invention, FIG. 13 is a sectional view of the press stage, and FIG. 14 is a perspective view.
In FIG. 13, 110 is a top plate, 11 is a cooling / heating plate, and a heater 115 and a cooling passage are installed inside the cooling / heating plate 11. A heat insulating material 112 is connected to the cooling and heating plate 111 so that the heat heated by the heater 115 is not dissipated. In addition, a cooling hole is provided in the heat insulating material 112, and the cooling refrigerant returns from another hole provided in the heat insulating material 112 again via the cooling and heating plate 111. In FIG. 13, reference numeral 113 denotes a cooling medium inlet, and 114 denotes a cooling medium outlet. Examples of the cooling medium include air, gas, water, and oil.

  The heaters 115 are arranged on the cooling and heating plate 111 at approximately equal intervals, and cooling passages (tubes) are also arranged at substantially equal intervals between the heaters. By arranging them at regular intervals in this way, there is an effect of making the heat distribution on the top plate uniform, that is, an effect of eliminating temperature unevenness. Further, as shown in FIG. 14, the heater 115 uses a linear heater, is connected to a power supply line from one side, and controls temperature rise and fall by turning on and off the power supply.

  In addition, the top plate 110 and the cooling and heating plate 111 have been made of stainless steel, but since the thermal conductivity is high by adopting a Cu alloy, the temperature of the press stage can be controlled in a short time, and the transfer time can be shortened. Can be shortened, and the efficiency is improved.

  FIG. 15 shows a plan view of the cooling and heating plate 111 of the press stage of the apparatus of the present invention. In FIG. 15, reference numeral 115 denotes a heater, 113 and 114 which are blank portions indicate cooling passages, 113 indicates a cooling medium inlet, and 114 indicates a cooling medium outlet. The cooling medium is inserted from the upper left cooling medium inlet, the medium exiting from the upper right cooling medium outlet is inserted from the right side of the second stage cooling passage, and the refrigerant discharged from the left side of the second stage cooling path is cooled by the third stage. In this configuration, the cooling medium is sent in the cooling passage sequentially. With such a configuration, it is possible to cool the top plate uniformly and in a short time.

  FIG. 16 shows another embodiment in which the flow of the cooling medium is changed. The configuration of FIG. 16 includes, from the left side, a first-stage cooling passage (blank portion in the figure), a third-stage cooling passage (blank portion in the figure), and a fifth-stage cooling passage (blank portion in the figure). The coolant flows, and the cooling medium flows from the right side to the second-stage cooling passage (blank portion in the figure), the fourth-stage cooling passage (blank portion in the figure), and the sixth-stage cooling passage (blank portion in the figure). It is the structure which flows in. Thus, the cooling effect of the press stage can be enhanced by flowing the cooling refrigerant from the left and right. In addition, there is an effect of reducing the temperature unevenness of the top plate.

The apparatus of the present invention has been researched and developed as a technique of thermal nanoimprint and optical nanoimprint, which is a technique for forming a concavo-convex pattern of nanoscale (nanometer is one billionth of a meter). The thermal nanoimprinting device related to this development has improved the heating / cooling mechanism to suppress the temperature variation in the surface of the transfer stage, while greatly reducing the 120 ° temperature rise / fall time to 4 minutes, as well as the device structure and components. As a result, the nanoimprint device of the same level has been reduced in size and price. By using this apparatus, a nanoscale structure can be formed within 10 minutes for workpiece sizes up to Φ150 mm. The specifications of this nanoimprinting device are as follows.

  Nanoimprint technology, which is attracting attention as one of the next generation microfabrication technologies, has been researched and developed for practical application mainly in Japan, the US and Europe. Nanoimprinting is a processing technique for forming a concavo-convex pattern by pressing a mold (also referred to as a mold, a stamper, or a template) formed with a nanoscale concavo-convex pattern against a transfer material such as a polymer. Development of semiconductors, optical devices, next-generation storage devices, biodevices, and the like has been promoted using this technology, and improvement of productivity has become an issue for practical use. In particular, thermal nanoimprinting is a technique for pressing a mold onto a material to be softened by heating to a glass transition temperature or higher, so that the temperature rise / fall time is a bottleneck for high throughput.

  Against this background, a new thermal nanoimprinting device was developed with the goal of increasing throughput. A significant review of the heater structure and components based on thermal analysis has prevented temperature variations during heating and shortened heating time. Furthermore, the cooling time has been significantly shortened by utilizing the cooling control technology that has been cultivated in the mold for injection-molded optical disks. In addition, by redesigning the vacuum chamber structure of the conventional machine, the internal volume of the chamber can be reduced, and the apparatus can be downsized and the deaeration time can be greatly shortened.

  Further, by making full use of the precision processing technology of the plastic molding mold possessed by the present applicant, the transfer stage surface is a high-precision stage with a flatness of several μm and a surface accuracy of several nm. Furthermore, in consideration of work such as mold setting work and transfer stage exchange, the work take-out portion is made larger than that of the conventional machine, thereby improving maintainability.

  The feature of the apparatus of the present invention is that the heating / cooling mechanism is improved, and the industry's top class heating / cooling time 4 (60 ° → 180 ° → 60 °) is realized. Furthermore, the device structure and parts have been reviewed, and the device of the same level (Φ6 inch) has become smaller and less expensive. Regarding the transfer size (width, length, sheet thickness), this apparatus is compatible with max 6 inch Φ. The sheet thickness is not questioned. In addition, double-sided transfer is possible. The transfer material can be transferred to a thermoplastic resin such as PS (polystyrene), PC (polycarbonate), or PMMA (PMME) or a thermosetting resin.

  The maximum heating temperature is 300 ° C. The cooling method employs two methods of water cooling (rapid cooling) and N2 (nitrogen) gas cooling (removal cooling) in order to perform temperature adjustment with high accuracy. The degree of vacuum is 1.33 kPa (10 Torr) or less. The maximum load of this device is 98 kN (10 t). Although the transfer speed depends on the pattern shape to be transferred, the transfer can be performed in 10 minutes or less in the basic process. Further shortening is possible by optimizing process conditions.

  As a pressurizing method, a two-stage pressure control method is employed in order to transfer a fine nanostructure with high accuracy. The two-stage pressurization is a pressurization method in which the first pressurization is performed by torque control of the servo motor accompanying the stage ascending, and then the main pressurization is performed.

  For transfer to a large area, this apparatus is compatible with a maximum of Φ6 inch, but in the development of the apparatus by the present applicant so far, there is a record of transfer to a maximum Φ12 inch. The transfer with a high aspect ratio is usually a transfer with an aspect ratio of 2 or less. As the minimum transfer size, there is a record of transferring a dot pattern of Φ70 nm and H110 nm as the minimum transfer size. In general, it is considered that the through hole cannot be processed using a nanoimprint technique. Since the transfer accuracy may be lowered due to the temperature distribution of the material to be transferred and the influence of bubble accumulation on the mold-shaped concave pattern, this apparatus uses a vacuum atmosphere. In addition, an automatic peeling mechanism can be provided by providing an automatic peeling mechanism as an option.

  The transfer material can be a thermoplastic material or a thermosetting resin, but a crystalline resin can be transferred although it is difficult to transfer. As for the transfer to the resin applied on the substrate, it is possible to apply a thermoplastic resin or a thermosetting resin to a Si (silicon) substrate or a glass substrate and transfer it. The mold material is Si (silicon), Ni (nickel), quartz, or the like. The mold can be manufactured using a semiconductor manufacturing technique such as photolithography or an electron beam direct drawing method.

  This precision press machine is a device that performs vacuum press processing and can be applied to equipment that requires high-precision pressure control on the transfer object, especially for manufacturing optical devices, display devices, biodevices, storage media, etc. In the process, it is useful as an apparatus for transferring a fine structure.

BRIEF DESCRIPTION OF THE DRAWINGS The cross-sectional schematic diagram which shows one Example of the precision press apparatus by this invention. The bird's-eye view and sectional drawing of the chamber of the precision press apparatus shown in FIG. The cross-sectional schematic diagram of the vacuum holding mechanism for precision presses at the time of shape change. The apparatus schematic diagram at the time of using the conventional vacuum BOX. The apparatus outline figure at the time of cylinder 24 installation separately. The apparatus outline figure at the time of cylinder 25 installation separately. The schematic diagram of each step operation at the time of vacuum press. The control block diagram of the precision press apparatus by this invention. The flowchart at the time of step A. The flowchart at the time of step B. The flowchart at the time of step C. 1 is a schematic view of a main body of a nanoprint apparatus according to the present invention. The schematic of the pre-stage of the precision press apparatus by this invention. The bird's-eye view of the prestige of the precision press apparatus by this invention. The top view of the press stage of this invention. The top view of another press stage of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Pressurization part 2 Pressure receiving part 3 Guide post 4 Cage 5 Press stage 6 Cylinder 7 Plunger 8 Ring 9 O-ring (seal material) 10 Pressure sensor 11 Movable part 12 Pressurizing port 13 Vacuuming port 14 Vacuum BOX 14 Vacuum BOX
DESCRIPTION OF SYMBOLS 15 Handle and door 16 Chamber 17 Cylinder chamber 18 Transfer object and mold 19 Fluid pressure 20 Pressurization pressure 21 Vacuum pulling 22 Negative pressure (by vacuuming) 23 Plunger sliding resistance 24 Pressing cylinder 25 Pulling pressure cylinder 26 End plate 101 Pressure receiving part 102 Pressurizing part 103 Adjustment nut 104 Guide post 105 Cage 110 Top plate 111 Heating / cooling plate 112 Heat insulating material 113 Cooling medium inlet 114 Cooling medium outlet 115 Heater 116 Operation panel 117 Heater temperature controller 118 Pressure display device 119 Vacuum indicator 120 Vacuum chamber 121 Frame 122 Caster 123 Adjuster 124 Anchor seat 125 Operation button

Claims (6)

A pressure receiving unit, a pressurizing unit facing the pressure receiving unit and arranged to be movable back and forth with respect to the pressure receiving unit, a press stage mounted on each facing surface of the pressure receiving unit and the pressurizing unit, and the pressurizing unit And a precision press comprising a chamber having a cylindrical wall that encloses the press stage in a sealed state between the pressure receiving portion and the pressurizing portion when the pressure receiving portion and the pressurizing portion are in proximity to each other In the device
A fluid actuating part that cancels the force that draws the pressure receiving part and the pressurizing part generated based on the negative pressure in the chamber ;
The fluid actuating part is configured to constitute the cylindrical wall and to be provided in a cylinder provided in at least one of the pressure receiving part and the pressurizing part, and to be able to advance and retract toward the other based on the fluid pressure in the cylinder. And a pressure control unit that controls the fluid pressure in the cylinder to generate a pressure force on the cylindrical plunger that cancels the force that draws the pressure receiving unit and the pressurizing unit together ,
At the distal end of the cylindrical plunger, provided with a seal member for maintaining the vacuum of the chamber in contact with the other of the pressure receiving portion and the pressurizing portion in the advanced state ,
The cylinder is a cylindrical cylinder attached to the opposing surface on the one of the pressure receiving portion and the pressure portion ,
The cylindrical plunger is housed in a sealed state inside the cylindrical cylinder, and is provided so as to be able to advance and retreat from the tip of the cylindrical cylinder toward the other of the pressure receiving portion and the pressurizing portion. Precision press device. In the precision press apparatus of Claim 1,
The precision press apparatus characterized in that the fluid actuating unit sequentially steps the following three steps A, B, and C as the timing of pressure adjustment .
In step A, the pressurizing unit is moved to a position where evacuation is possible, and a pressurizing force is generated to cancel the negative pressure generated when evacuation is performed.
In step B, the pressurizing force is adjusted in order to cancel out the sliding resistance of the fluid actuating unit that occurs when the pressurizing unit moves to the transfer position of the transfer object after completion of evacuation.
In step C, the pressure is adjusted in order to cope with a pressure fluctuation caused by a change in the area to be evacuated when the transfer object contacts the press plate surface. In the precision press apparatus of Claim 1 or 2,
A precision press apparatus characterized in that the press stage has heating and cooling capabilities . In the precision press apparatus as described in any one of Claims 1-3 ,
Precision press apparatus characterized to have access to the negative pressure generated in the vacuum as a pressure. In the precision press apparatus as described in any one of Claims 1-4 ,
A precision press apparatus having at least one pressurizing port in the chamber . In the precision press apparatus as described in any one of Claims 1-5,
The precision press apparatus characterized in that the cylindrical wall of the chamber is formed in a cylindrical shape such as a cylindrical shape, a rectangular cylindrical shape, a polygonal cylindrical shape or the like .

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