JP4687933B2

JP4687933B2 - High vacuum drawing method and apparatus by press machine

Info

Publication number: JP4687933B2
Application number: JP2000282873A
Authority: JP
Inventors: 英敏伊藤
Original assignee: Mikado Technos Co Ltd
Current assignee: Mikado Technos Co Ltd
Priority date: 2000-09-19
Filing date: 2000-09-19
Publication date: 2011-05-25
Anticipated expiration: 2020-09-19
Also published as: JP2002096199A

Description

【０００１】
【発明の属する技術分野】
本発明は、あらかじめ固定設置された真空隔室を備えた大型の真空設備を必要とせず、プレス装置の作動により隔室を形成して、該隔室内を低真空は勿論のこと、高真空を実現して所定のプレス加工を行なうことができるようにした簡易な高真空引き加工方法とその装置に関するものである。
【０００２】
【従来の技術】
例えば、ＩＣカードやプリント回路基板、ＤＶＤディスク、偏光レンズなどの貼り合せをする場合、少しでも気泡が混入すると酸化による腐食や透明度の低下等の問題が生じるため、高真空下で迅速に完全脱気を行なって貼り合せを行なう必要がある。
【０００３】
従来、高真空下でプレス加工を行なう場合には、固定設置した真空隔室にグリス入りシールパッキンを設けた気密な開閉扉を取付け、隔室の天井板に高気密に嵌合するプレス装置のピストンロッドを摺動させるようにしているが、プレス加工用の金型の取付けや治具の微調節、製品の装入・取出しなど全て開閉扉を通じて行なう必要があるため、隔室内に広い空間が必要となり、高真空となるまでの時間がかかると共に、大きな真空ポンプが必要となって、設備も高価となる。また、フィルム基板の貼り着け等のためにヒータを使用する場合には、上下ヒータ間に製品を装入するので、暗い隔室内では危険な作業を伴うことにもなる。
【０００４】
そこで、本出願人は先に特開平９−１８２９９７号公報で、あらかじめ真空隔室を固定設置しておくのではなく、プレス装置のロッド先端に箱型の上治具を取付け、これを降下させることによって加工すべき製品を載設した下治具に被せ、上下両治具の嵌合によって形成される隔室内を真空引きしてから、あるいは真空引きしながら、更にロッドを降下させて所定のプレス加工を行なう方法と装置を提案した。
【０００５】
しかし、この方法は隔室を高真空度、例えば1.333 ×１０^- ^１ｋＰａ（１トール
）以上とすることを想定しておらず、真空隔室の形成方法として、上・下治具の分離状態から上治具の降下によって下治具外周面に上治具内周面を嵌合摺動させるようにしているため、摺動面のパッキンシール溝部分を精密な高圧縮寸法に狭めると、上下治具の嵌合摺動時にシールパッキンの損傷や摩耗変形が生じやすく、シール部分の真空シール用グリスを多量に消費してしまうことともなり、高真空を実現することが非常に困難であり、しかも隔室の形成とプレス加工とをプレス用シリンダ１台のみで行なうため、被加工製品を損傷しないような低圧プレス加工を行なうことも困難となっていた。
【０００６】
【発明が解決しようとする課題】
本発明は、本出願人が先に提案した上記方法と装置を改良し、上下治具の結合によって形成される隔室内を容易に高真空とすることができ、プレス加工する前の被加工製品中の完全脱気を迅速に行なうと共に、真空シール用グリスも溝外に逃がすことがなく、シールパッキンの損耗等の問題も解決し、しかも高真空下での低圧プレス加工も可能としたプレス装置による簡易な高真空引き加工方法とその装置を提案するものである。
【０００７】
【課題を解決するための手段】
そこで、本発明では、真空隔室を形成するために上・下治具を結合させるためのシリンダと該隔室内で所定のプレス加工を行なうシリンダとを別のものとし、上下治具の結合は突合せ即ち水平面接合により行ない、その状態で真空引きを行なって高真空下で上治具を降下させることにより、所定のプレス加工を行なうようにしたものである。
【０００８】
即ち、第１に、本発明は、下方に配置した押上げシリンダにより複数本の連結杆を介して上下動する筒型の摺動枠体を被加工製品を載設する受け台の外周側面に密に摺動自在に嵌合し、上方のプレス用シリンダのロッドには箱蓋型の上治具を取付けてなり、まず上記摺動枠体を摺動上昇させてその上端面を上方の上治具下端面に突合密着させることにより気密な隔室を形成し、次いで上記枠体、受け台あるいは上治具に形成した導管を介して上記隔室内を真空引きし、所定の真空圧に上げてから又は上げながら上治具を上記枠体と共に降下させることにより受け台上の被加工製品に対して高真空下で所定の加工を行なうことを特徴とするプレス装置による高真空引き加工方法と装置に関するものである。
【０００９】
この場合、各連結杆はその中間部が基台上に設置されたテーブルを上下に貫通して、その上端は前記摺動枠体下端に固定され、その下端は前記押上げシリンダのロッドに水平に取付け固定された押上げ板に固定する。
【００１０】
あるいは、各連結杆の下端が押上げシリンダのロッド引込み端においては該ロッドに水平に取付け固定された押上げ板に非接触であり、該押上げ板の上昇により該連結杆下端と接して押し上げられるようにしてもよい。
【００１１】
また、各連結杆上端部には圧縮コイルスプリングが巻装されて上側に固定された摺動枠体を上方移動するように賦勢され、かつ該連結杆中間部は基台上に設置されたテーブルを遊貫して、その下端は押上げシリンダのロッドに水平に取付け固定された押上げ板に離脱不能に遊嵌するようにしてもよい。
【００１２】
さらに、押上げシリンダのロッドには各連結杆下端を固定した押上げ板を揺動自在に遊嵌し、該ロッドには圧縮コイルスプリングを巻装して上記押上げ板を該ロッド先端へ向かって押し付けるよう賦勢し、各連結杆中間部は基台上に設置したテーブルを遊貫するように構成することもできる。
【００１３】
また、本発明は第２に、上方に配置したプレス用シリンダのロッド下端には押圧用ブロックを下側に取付けた取付板を吊り杆を介して吊持する支持板が取付け固定され、該支持板下面には押下げシリンダが下向きに固定され、上記押圧ブロックの外周面には上記押下げシリンダのロッド下端に取付けた押下げ板に上端を固定されて垂設された複数本の連結杆に吊持されて密に上下摺動自在の筒型の摺動枠体が嵌着されてなり、まず上記押下げシリンダにより摺動枠体だけを降下させ、その下端面を被加工製品を載設する受け台の上面外周部に突合密着させることにより気密な隔室を形成し、次いで上記受け台、枠体又は押圧ブロックに形成した導管を通じて該隔室内を真空引きし、所定の真空圧に上げてから又は上げながら上記プレス用シリンダの駆動で押圧ブロックを降下させることにより受け台上の被加工製品に対して高真空下で所定の加工を行なうプレス装置による高真空引き加工方法と装置をも提案する。
以下、本発明の方法と装置の実施形態を図により説明する。
【００１４】
【発明の実施の形態】
図１〜４は、本発明方法を実施するための装置全体の一例を示すもので、１はフレーム２上方に下向きに固定されたプレス装置のシリンダ、３は基台４に上向きに固定された押上げシリンダで、両シリンダ１、３のロッド５、６はその軸心が合致するように互いに対向する。
【００１５】
７はプリント基板やＤＶＤディスク等を構成する熱圧着すべき積層シート等の被加工製品２０を載せる受け台で、該受け台７は基台４上に設置されたテーブル８上に下ヒータ板９を介して固定されている。
【００１６】
この受け台７の外周側面にはその形状にならった円筒形（厚肉ドーナツ型）あるいは角筒形の厚肉な摺動枠体１０が密に上下摺動自在に嵌合している。この枠体１０は後記するように上昇すると真空隔室２１の一部を構成する。１１は下端を上記押上げシリンダ３のロッド６先端に水平に取付け固定された押上げ板１２に固定され、中間部は上記テーブル８を上下に貫通してその上端は上記摺動枠体１０下端に固定してなる複数本（図では２本図示されているが、３本以上が好ましい）の連結杆であり、押上げシリンダ３の駆動により、該連結杆１１を介して摺動枠体１０を受け台７周側面に沿って上昇又は下降させる。
【００１７】
一方、上方のプレスシリンダ１のロッド５下端に水平に取付け固定された取付板１３の下側には上ヒータ板１４を介して周側部が上記摺動枠体１０にならった形状を有する箱蓋型の上治具１５が固定されている。この上治具１５の周側面は上記摺動枠体１０の周側面に合致する外径を有するが、その肉厚は該枠体１０よりも薄く、あるいは同じ肉厚であっても上治具１５の内径の方が枠体１０の内径よりも大として、少なくとも上治具１５下端面と枠体１０上端面とが突合接触したときに、枠体１０上面の内周部側が露呈するようにする。１６は箱蓋型の上治具１５の上底面に固定した押し板である。
【００１８】
１７は上記摺動枠体１０の内周側に寄せて上面に一方の端口を形成した一又は複数の導管で、該導管１７は該枠体１０の肉厚中を通って側面の他方端口に至り、その他方の端口はオイルポンプ等の真空ポンプ（図示せず）に接続されている。
【００１９】
１８、１９は摺動枠体１０の上面及び内周側面に取付けたＯリングのシールパッキンで、このパッキン１８、１９には真空シール用のグリスが充填封入されている。
【００２０】
しかして、受け台７上に載設した例えば熱圧着すべきプリント基板等の積層シートによりなる被加工製品２０を高真空下で熱圧着する場合、まず下方の押上げシリンダ３を作動させて押上げ板１２、連結杆１１を介して受け台７外周面に嵌合する筒型の摺動枠体１０を摺動上昇させて行き（図２参照）、上方の上治具１５下端面に突合させる（図３参照）。なお、枠体１０は受け台７との嵌合から離脱してまで上昇するものではなく、押上げシリンダ３にはそのようなストローク長しか有していない。
【００２１】
上記のようにして枠体１０上端面と上治具１５下端面とが突合して水平面接合すると、受け台７上には摺動枠体１０内周面と上治具１５内面とによって囲まれる気密な隔室２１が形成されることになる（図３参照）。
【００２２】
そこで、枠体１０の一部に開孔した導管１７を通じてオイルポンプ等の真空ポンプにより上記隔室２１内の真空引きを行なう（図３参照）。そして、この隔室２１内の真空度を例えば1.333 ×１０^- ^１ｋＰａ（１トール）以上の高真空度に上げてから、あるいは上げながら、今度は上方のプレスシリンダ１を作動させて上治具１５を降下させて行く（図４参照）。隔室２１内を高真空度に上げると、枠体１０上面と上治具１５下端面とは強固に密着して簡単に分離するようなことはなく、上治具１５の降下の際には、押上げシリンダ３を開放し、又は押上げ用エアを微量排気するようにする。
【００２３】
これにより、隔室２１内は高真空を保持したまま、上治具１５が降下すると共にこれに密着している摺動枠体１０も受け台７外周面を摺動しながら降下して、隔室２１も上下に小さくなって行き、上治具１５上底面の押し板１６が受け台７上の製品２０に圧接する。前記のように、上治具１５及び受け台７はヒータ板１４、９を備えており、該ヒータ板により加熱された上治具１５の押し板１６と受け台７間で加熱加圧された積層シート等の製品２０は高真空下で熱圧着されることにより、気泡を全く残すことなく貼り合せが行なわれることとなる（図４参照）。
【００２４】
このようにして製品２０の貼り合せが完了したら、隔室２１内を大気圧に戻し、しかる後にプレスシリンダ１を逆作動させて上治具１５を上昇させることにより摺動枠体１０との接合を解き、元位置（図２参照）に復帰させて、次の製品の貼り合せのために待機する。
【００２５】
なお、図では隔室２１内を真空引きするための導管１７を摺動枠体１０内に形成しているが、該導管１７はその吸引端口が隔室２１内に臨むものであれば、受け台７あるいは上治具１５内に形成するようにしてもよい。
【００２６】
また、上下のヒータ板１４、９は熱加工する場合に使用するものであるので、熱加工を行なわないときには、該ヒータ板１４、９は不要となる。
【００２７】
図５は、受け台（下治具）７側の機構の他の実施例を示すものである。図１〜４により説明した例では、摺動枠体１０下端に垂設固定した複数本の連結杆１１は、その下端を上下駆動される押上げ板１２に固定するようにして、常に押上げ板１２と共に一体的に上下動させているが、押上げ板１２の主たる目的は、連結杆１１を介して摺動枠体１０を上方摺動させることにより、上方の上治具１５と突合させて真空隔室２１を形成することにある。従って、各連結杆１１下端は押上げ板１２に必ずしも固定する必要はなく、図５に示すように押上げ板１２下降端において連結杆１１下端が押上げ板１２から若干離間していても差支えない。この場合の押上げシリンダ３は摺動枠体１０の上方摺動にのみ使用され、枠体１０の下方移動には何ら寄与せず、枠体１０は真空隔室２１が大気圧に戻ったときに、その自重で自然降下する。
【００２８】
また、図６は更に他の実施例を示すもので、複数本の各連結杆１１の上端部は圧縮コイルスプリング２２が巻装されていて、上側の摺動枠体１０を常に上方移動するように賦勢してある。前記したように、摺動枠体１０を上方移動させて上方にある上治具１５に水平面で突合させることにより隔室２１を形成してから真空引きするのであるが、上記突合に際して、精密かつ正確に水平面で突合しないで、いずれか一方でもわずかな傾きがあると、突合部分に隙間が生じて隔室２１内を真空引きしても、大気を巻き込んで高真空度に上げることもできず、製品２０自体にも悪影響を及ぼすこととなる。
【００２９】
そこで、図６の実施例では、押上げシリンダ３の駆動により摺動枠体１０を摺動上昇させたときに、何らかの理由で該枠体１０上端面にわずかな傾斜が生じても、上治具１５下端面への突合に際しては、即座になじんで均等な押し圧で密着するように、各連結杆１１に枠体１０を押上げる圧縮コイルスプリング２２を設けているのである。これにより、枠体１０と上治具１５が突合したときに、そのシール面の一部にわずかな間隙が生じようとしても、該スプリング２２の押付け力によって即座に密着する。そして、この場合、枠体１０の上治具１５への密着のための補正機能を助けるため、枠体１０下端に固定する連結杆１１の中間部はテーブル８及びその上側の下ヒータ板９に遊び２３をもって貫挿され、また連結杆１１下端は押上げ板１２に強固に固定されることなく、多少ガタを持たせるように離脱不能に遊嵌２４してある。
【００３０】
図７は、図６と同目的のための他の手段を示すもので、この場合には摺動枠体１０を常に上方移動するよう賦勢しておくために、押上げ板１２を押上げシリンダ３のロッド６に固定することなく、遊び２５を持たせて揺動自在にロッド６上端部に嵌合させ、該押上げ板１２の下側のロッド６部分（図７では、ロッド６先端に同軸で細径の短軸２６を一体形成して、該短軸２６に）に圧縮コイルスプリング２７を巻装し、該スプリング２７により押上げ板１３をロッド６（短軸２６）先端に螺合した押上げ板１３の抜け出し防止用ナット２８に向けて常に押し付けるように賦勢してある。
【００３１】
なお、図７の場合、連結杆１１の下端は押上げ板１２に強固に固定するが、その中間部は自由度を持たせる必要があるため、図６の場合と同様にテーブル８や下ヒータ板９中を遊貫して摺動枠体１０下端に固定される（ただし、図７では図示せず）。
【００３２】
以上の実施例では、いずれも摺動枠体１０を下治具側に設け、下方の押上げシリンダの駆動により該枠体１０を上方摺動させて上治具に突合密着させ、真空室となる隔室を形成するようにしたが、この摺動枠体１０を上治具側に取付け、該枠体１０を下方摺動させることにより下治具に突合させて真空隔室を形成するようにしてもよい。
【００３３】
図８は、かかる実施例を示すものである。この場合、下治具側には駆動部は存在しない。図８においては、被加工製品２０を載せる受け台７の肉厚中に真空引きする導管１７が形成されており、その一方端口が受け台７上面に開口してある。
【００３４】
プレスシリンダ１のロッド５下端には、上ヒータ板１４及び上治具としての押圧ブロック２９を下側に固定した取付板１３を吊り杆３０を介して吊持する支持板３１が水平に取付け固定され、該支持板３１の下面中心部には摺動枠体１０駆動用の押下げシリンダ３２がプレスシリンダ１とその軸心を同じくして下向きに取付け固定されている。
【００３５】
摺動枠体１０は上記押圧ブロック２９外周面に密に上下摺動自在に嵌着され、該枠体１０は複数本（少なくとも３本）の連結杆１１に吊持されており、各連結杆１１はその中間部が上ヒータ板１４及びヒータ取付板１３を貫挿して、その上端は押下げシリンダ３２のロッド３３の先端に水平に取付け固定した押下げ板３４に固定してある。
【００３６】
しかして、図８に示す装置によるときは、まず押下げシリンダ３２を駆動して摺動枠体１０を降下させ、その下端面を受け台７の外周部に近い上面に突合密着させて気密な隔室を形成し、次いで該隔室内を受け台７の導管１７を通じて真空引きし、しかる後にプレスシリンダ１を作動させて押圧ブロック２９を受け台７上の製品２０に圧接させるのである。
【００３７】
このように、摺動枠体１０と押圧ブロック２９を上方から別駆動により２段階で降下させることによって、前記と同様に高真空下で気泡等を残すことなく製品に対する貼り合わせ等の加工を行なうことができるのである。３５及び３６は受け台７上面の摺動枠体１０との突合面ならびに摺動枠体１０の押圧ブロック２９外周との摺動面にそれぞれ設けられたＯリングのシールパッキングで、該パッキン３５、３６には真空シール用のグリスが充填封入されていることは前述と同様である。
【００３８】
なお、図８の装置においても、図６に示す場合と同様に（上下逆であるが）、各連結杆１１の摺動枠体１０上側部分に圧縮コイルスプリングを巻装して、該枠体１０を下方移動するよう賦勢しておいたり、図７に示すと同様に（上下逆であるが）、押下げシリンダ３２のロッド３３先端を押下げ板３４軸心部に離脱不能に遊挿して該押下げ板３４が多少揺動できるようにし、かつロッド３３には圧縮コイルスプリングを巻装して押下げ板３４をロッド３３先端方向へ押付けておき、これにより摺動枠体１０下端面が受け台７上面に均等な押し圧で密着し易くなるように構成してもよいことは勿論である。
【００３９】
【発明の効果】
本発明の方法と装置は上述のようにしてなり、次のような効果を有する。
(1) 従来のような互いに離間した上治具を下治具に被せることにより真空隔室を形成する方法とは異なり、別駆動により移動する摺動枠体と押圧用治具（上治具あるいは押圧ブロック）とを水平面で突合密着させることにより高真空隔室を形成するので、摺動面のパッキンシール溝部分を精密な高圧縮寸法に狭めてもシール用グリスが逃げることがなく、シールパッキンの損耗や変形等を生じることもない。また、上・下治具の圧接により簡単に高気密を実現することができるので、隔室内を迅速に高真空度に上げて製品中の完全脱気を行なうことができる。
(2) 隔室形成前は上・下治具間に広い作業空間が得られるので、上下治具の交換や治具の微調節、被加工製品の装入・取出しが容易となると共に、下治具全てをスライドテーブル等に取り付けて移動させることが可能となるので、被加工製品を保持したまま下治具をこのプレス装置から別の位置に移動させ、他の装置への被加工製品の自動装入や自動取り出しが可能となり、より高能率な全自動化も可能となる。
である。
(3) ＩＣカード、ＤＶＤディスク、プリント回路基板、偏光レンズなど、気泡が全く入らない完全貼り付けが可能となり、またフィルムの成型、ＤＶＤディスク上の微細なエンボス加工、粉体の脱気加圧成型、液体の脱気混合等の高真空プレス加工も可能となる。
(4) 上・下治具の圧接による高真空隔室形成のための圧接用シリンダとプレス加工用シリンダが異なるため、例えばプレス用シリンダを圧接用シリンダより低圧にして、ＩＣカード内に内蔵しているＩＣ等を損傷することなく低圧密着による貼り付けをするような加工も可能となる。
(5) 装置の構造が簡単であり、小型の装置で短時間に高真空隔室が形成でき、高真空を確実に保持したまま種々のプレス加工を行なうことができる。
【図面の簡単な説明】
【図１】本発明装置の正面説明図である。
【図２】図１の装置の作用説明図であり、隔室形成前の状態を示している。
【図３】図１の装置の作用説明図であり、隔室形成直後の状態を示している。
【図４】図１の装置の作用説明図であり、真空隔室を形成した状態でプレス加工を行なっている状態を示している。
【図５】本発明による下治具側の他の実施例を示す正面説明図である。
【図６】本発明による下治具側の更に他の実施例を示す正面説明図である。
【図７】本発明による下治具側の更に他の実施例を示す正面説明図である。
【図８】本発明装置の更に他の実施例を示す正面説明図である。
【符号の説明】
１−プレス用シリンダ
２−フレーム
３−押上げシリンダ
４−基台
５−ロッド
６−ロッド
７−受け台
８−テーブル
９−下ヒータ板
１０−摺動枠体
１１−連結杆
１２−押上げ板
１３−取付板
１４−上ヒータ板
１５−上治具
１６−押し板
１７−導管
１８−シールパッキン
１９−シールパッキン
２０−被加工製品
２１−真空隔室
２２−圧縮コイルスプリング
２３−遊び
２４−遊嵌部
２５−遊び
２６−短軸
２７−圧縮コイルスプリング
２８−ナット
２９−押圧ブロック
３０−吊り杆
３１−支持板
３２−押下げシリンダ
３３−ロッド
３４−押下げ板
３５−シールパッキン
３６−シールパッキン [0001]
BACKGROUND OF THE INVENTION
The present invention does not require a large-scale vacuum facility equipped with a vacuum compartment fixedly installed in advance, and the compartment is formed by the operation of a press device. The present invention relates to a simple high-vacuum processing method and apparatus which can be realized and can perform predetermined pressing.
[0002]
[Prior art]
For example, when attaching IC cards, printed circuit boards, DVD discs, polarizing lenses, etc., if even a small amount of air bubbles are mixed, problems such as corrosion due to oxidation and a decrease in transparency occur. Careful pasting is required.
[0003]
Conventionally, when press working under high vacuum, an airtight door with grease-sealed seal packing is attached to a fixed vacuum compartment and a press device that fits the ceiling plate of the compartment in a highly airtight manner. Although the piston rod is slid, it is necessary to perform all the operations such as attaching the press mold, finely adjusting the jig, and loading / unloading the product through the open / close door. It is necessary and it takes time until a high vacuum is achieved, and a large vacuum pump is required, and the equipment becomes expensive. In addition, when a heater is used for attaching a film substrate or the like, since the product is inserted between the upper and lower heaters, dangerous work is involved in a dark compartment.
[0004]
Therefore, the applicant of the present invention previously disclosed in Japanese Patent Application Laid-Open No. 9-182997, a vacuum chamber is not fixedly installed in advance, but a box-shaped upper jig is attached to the tip of the rod of the press device and lowered. Then, the product to be processed is put on the lower jig, and the chamber formed by the fitting of the upper and lower jigs is evacuated, or while evacuating, the rod is further lowered to lower the predetermined jig. A method and apparatus for pressing were proposed.
[0005]
However, this method is a high degree of vacuum compartments, for example, 1.333 × 10 - ¹ ^kPa not assumed to be (1 Torr) or more, as a method for forming the vacuum compartment, the upper and lower jigs isolated state Since the upper jig inner peripheral surface is fitted and slid to the lower jig outer peripheral surface by lowering the upper jig from the upper jig, if the packing seal groove part of the sliding surface is narrowed to a precise high compression dimension, Damage and wear deformation of the seal packing are likely to occur during fitting and sliding of the jig, and a large amount of vacuum seal grease is consumed at the seal part, making it very difficult to achieve high vacuum, In addition, since the formation of the compartment and the press work are performed with only one press cylinder, it has been difficult to perform the low pressure press work so as not to damage the workpiece.
[0006]
[Problems to be solved by the invention]
The present invention improves the above-mentioned method and apparatus previously proposed by the present applicant, and can easily create a high vacuum in the compartment formed by the coupling of the upper and lower jigs, and the workpiece before pressing. Press machine that can quickly deaerate the inside, prevent the grease for vacuum sealing from escaping from the groove, solve problems such as wear on the seal packing, and enable low-pressure pressing under high vacuum We propose a simple high-vacuum processing method and apparatus therefor.
[0007]
[Means for Solving the Problems]
Therefore, in the present invention, a cylinder for connecting the upper and lower jigs to form a vacuum compartment and a cylinder for performing a predetermined pressing process in the compartments are different, and the upper and lower jigs are joined together. A predetermined press working is performed by performing butt-joining, that is, horizontal plane joining, and evacuating in that state and lowering the upper jig under high vacuum.
[0008]
That is, firstly, the present invention provides a cylindrical sliding frame that moves up and down via a plurality of connecting rods by a push-up cylinder disposed below, on the outer peripheral side surface of a cradle on which a workpiece is placed. It is closely slidably fitted, and a box cover type upper jig is attached to the upper press cylinder rod. First, the sliding frame body is slid up and the upper end surface is moved upward. An airtight compartment is formed by butt contact with the lower end surface of the jig, and the compartment is then evacuated through a conduit formed in the frame, cradle, or upper jig, and raised to a predetermined vacuum pressure. A high-vacuum processing method using a press device, wherein a predetermined processing is performed under high vacuum on a workpiece on a pedestal by lowering the upper jig together with the frame while raising or lowering It relates to the device.
[0009]
In this case, each connecting rod vertically passes through a table whose intermediate portion is installed on the base, its upper end is fixed to the lower end of the sliding frame body, and its lower end is horizontal to the rod of the push-up cylinder. And fixed to the lifting plate fixed to.
[0010]
Alternatively, the lower end of each connecting rod is in non-contact with the push-up plate mounted horizontally and fixed to the rod at the rod retracting end of the push-up cylinder. You may be made to do.
[0011]
Further, compression coil springs are wound around the upper ends of the connecting rods and are urged to move upward on the sliding frame fixed on the upper side, and the intermediate portions of the connecting rods are installed on the base. The table may be loosely passed, and the lower end of the table may be loosely fitted to a push-up plate that is horizontally attached and fixed to the rod of the push-up cylinder.
[0012]
Furthermore, a push-up plate with the bottom end of each connecting rod fixed to the rod of the push-up cylinder is swingably fitted. A compression coil spring is wound around the rod so that the push-up plate faces the tip of the rod. It is also possible to configure so that each connecting rod intermediate portion penetrates a table installed on the base.
[0013]
In addition, according to the second aspect of the present invention, a support plate is attached and fixed to a lower end of a rod of a press cylinder disposed above, and a mounting plate having a pressing block attached to the lower side is suspended via a hanging rod. A push-down cylinder is fixed downward on the lower surface of the plate, and on the outer peripheral surface of the push block, there are a plurality of connecting rods suspended from the push-down plate attached to the lower end of the rod of the push-down cylinder. A cylindrical sliding frame that is suspended and densely slid up and down is fitted. First, only the sliding frame is lowered by the push-down cylinder, and the product to be processed is placed on the lower end of the sliding frame. An airtight compartment is formed by abutting and closely contacting the outer peripheral portion of the upper surface of the cradle, and then the evacuation chamber is evacuated through a conduit formed in the cradle, frame or pressing block, and raised to a predetermined vacuum pressure. The above-mentioned press Also it proposes a device with high vacuum processing method according to a press apparatus for performing predetermined processing under high vacuum with respect to the processed product on cradle by lowering the press block at da drive.
Embodiments of the method and apparatus of the present invention will be described below with reference to the drawings.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
1 to 4 show an example of the entire apparatus for carrying out the method of the present invention, wherein 1 is a cylinder of a press device fixed downward above the frame 2, and 3 is fixed upward on a base 4. In the push-up cylinder, the rods 5 and 6 of both cylinders 1 and 3 face each other so that their axial centers coincide.
[0015]
Reference numeral 7 denotes a cradle for placing a workpiece 20 such as a laminated sheet to be thermocompression-bonded which constitutes a printed circuit board or a DVD disk. The cradle 7 is placed on a table 8 installed on the base 4 on a lower heater plate 9. It is fixed through.
[0016]
A cylindrical (thick donut-shaped) or square cylindrical thick sliding frame 10 is closely fitted on the outer peripheral side surface of the cradle 7 so as to be slidable in the vertical direction. When the frame 10 is raised as described later, it constitutes a part of the vacuum compartment 21. 11 is fixed to a push-up plate 12 whose lower end is horizontally attached and fixed to the tip of the rod 6 of the push-up cylinder 3, the intermediate part vertically penetrates the table 8, and the upper end is the lower end of the sliding frame 10. A plurality of connecting rods (two are shown in the figure, but three or more are preferable) fixed to the sliding frame body 10 through the connecting rod 11 by driving the push-up cylinder 3. The cradle 7 is raised or lowered along the side surface of the circumference.
[0017]
On the other hand, a box having a shape in which the peripheral side portion is shaped like the sliding frame 10 via the upper heater plate 14 below the mounting plate 13 that is horizontally mounted and fixed to the lower end of the rod 5 of the upper press cylinder 1. A lid-type upper jig 15 is fixed. Although the peripheral side surface of the upper jig 15 has an outer diameter that matches the peripheral side surface of the sliding frame body 10, the thickness of the upper jig 15 is smaller than that of the frame body 10 or the same thickness. 15 is larger than the inner diameter of the frame 10, and at least when the lower end surface of the upper jig 15 and the upper end surface of the frame 10 are brought into contact with each other, the inner peripheral side of the upper surface of the frame 10 is exposed. To do. Reference numeral 16 denotes a pressing plate fixed to the upper bottom surface of the box-lid upper jig 15.
[0018]
Reference numeral 17 denotes one or a plurality of conduits having one end opening formed on the upper surface of the sliding frame body 10 toward the inner peripheral side. The conduit 17 passes through the thickness of the frame body 10 to the other end opening on the side surface. The other end is connected to a vacuum pump (not shown) such as an oil pump.
[0019]
Reference numerals 18 and 19 denote O-ring seal packings attached to the upper surface and inner peripheral side surface of the sliding frame 10, and the packings 18 and 19 are filled and sealed with grease for vacuum sealing.
[0020]
Therefore, when the workpiece 20 made of a laminated sheet such as a printed circuit board to be thermocompression-bonded mounted on the cradle 7 is thermocompression bonded under high vacuum, first, the push-up cylinder 3 below is operated to push the product. The cylindrical sliding frame 10 fitted to the outer peripheral surface of the cradle 7 is slid and raised through the raising plate 12 and the connecting rod 11 (see FIG. 2), and is brought into contact with the lower end surface of the upper upper jig 15. (See FIG. 3). The frame 10 does not rise until it is detached from the fitting with the cradle 7, and the push-up cylinder 3 has only such a stroke length.
[0021]
When the upper end surface of the frame body 10 and the lower end surface of the upper jig 15 are abutted and joined in a horizontal plane as described above, the airtightness surrounded by the inner peripheral surface of the sliding frame body 10 and the inner surface of the upper jig 15 is placed on the cradle 7. A separate compartment 21 is formed (see FIG. 3).
[0022]
Therefore, the inside of the compartment 21 is evacuated by a vacuum pump such as an oil pump through a conduit 17 opened in a part of the frame 10 (see FIG. 3). Then, the degree of vacuum in the compartment 21 for example 1.333 × 10 - from raised to ¹ ^kPa (1 Torr) or more high vacuum or while raising upper jig and turn actuates the upper press cylinder 1 15 is lowered (see FIG. 4). When the inside of the compartment 21 is raised to a high degree of vacuum, the upper surface of the frame body 10 and the lower end surface of the upper jig 15 do not come into close contact with each other and are not easily separated. Then, the push-up cylinder 3 is opened, or a small amount of push-up air is exhausted.
[0023]
As a result, the upper jig 15 is lowered while the inside of the compartment 21 is kept at a high vacuum, and the sliding frame body 10 that is in close contact with the upper jig 15 is also lowered while sliding on the outer peripheral surface of the cradle 7, The chamber 21 also becomes smaller in the vertical direction, and the pressing plate 16 on the bottom surface of the upper jig 15 comes into pressure contact with the product 20 on the cradle 7. As described above, the upper jig 15 and the pedestal 7 are provided with the heater plates 14 and 9 and are heated and pressed between the pressing plate 16 of the upper jig 15 and the pedestal 7 heated by the heater plate. The product 20 such as a laminated sheet is bonded by thermocompression bonding under high vacuum without leaving any bubbles (see FIG. 4).
[0024]
When the bonding of the product 20 is completed in this way, the inside of the compartment 21 is returned to atmospheric pressure, and then the press cylinder 1 is reversely operated to raise the upper jig 15 to join the sliding frame 10. , And return to the original position (see FIG. 2) and wait for the next product to be bonded.
[0025]
In the figure, a conduit 17 for evacuating the compartment 21 is formed in the sliding frame 10, but the conduit 17 can be received if its suction end faces the compartment 21. It may be formed in the table 7 or the upper jig 15.
[0026]
Further, since the upper and lower heater plates 14 and 9 are used when heat processing is performed, the heater plates 14 and 9 are not required when the heat processing is not performed.
[0027]
FIG. 5 shows another embodiment of the mechanism on the cradle (lower jig) 7 side. In the example described with reference to FIGS. 1 to 4, the plurality of connecting rods 11 suspended and fixed to the lower end of the sliding frame body 10 are always pushed up by fixing the lower ends thereof to the push-up plate 12 driven up and down. Although the plate 12 is moved up and down integrally with the plate 12, the main purpose of the push-up plate 12 is to make the sliding frame 10 slide upward through the connecting rod 11 so as to abut the upper upper jig 15. Thus, the vacuum chamber 21 is formed. Therefore, it is not always necessary to fix the lower ends of the connecting rods 11 to the push-up plate 12. Even if the lower ends of the connecting rods 11 are slightly separated from the push-up plate 12 as shown in FIG. Absent. The push-up cylinder 3 in this case is used only for upward sliding of the sliding frame body 10 and does not contribute to the downward movement of the frame body 10, and the frame body 10 is used when the vacuum compartment 21 returns to atmospheric pressure. In addition, it falls naturally with its own weight.
[0028]
FIG. 6 shows still another embodiment. A compression coil spring 22 is wound around the upper end of each of the plurality of connecting rods 11 so that the upper sliding frame 10 is always moved upward. Is energized. As described above, the compartment 21 is formed by moving the sliding frame 10 upward and causing it to abut against the upper jig 15 located on the horizontal plane, and then vacuuming is performed. If there is a slight inclination in either one of the two surfaces without accurately colliding in the horizontal plane, even if a gap is generated in the abutting portion and the inside of the compartment 21 is evacuated, the atmosphere cannot be involved and the degree of vacuum cannot be increased. The product 20 itself is also adversely affected.
[0029]
Therefore, in the embodiment shown in FIG. 6, when the sliding frame 10 is slid and raised by driving the push-up cylinder 3, even if a slight inclination occurs on the upper end surface of the frame 10 for some reason, The compression coil springs 22 that push up the frame body 10 are provided on the connecting rods 11 so that they are immediately adapted and brought into close contact with a uniform pressing force when they are brought into contact with the lower end surface of the tool 15. As a result, when the frame 10 and the upper jig 15 abut each other, even if a slight gap is generated in a part of the seal surface, the frame 10 and the upper jig 15 are immediately brought into close contact by the pressing force of the spring 22. In this case, the intermediate portion of the connecting rod 11 fixed to the lower end of the frame body 10 is attached to the table 8 and the lower heater plate 9 above the frame body 10 in order to assist the correction function for the close contact with the upper jig 15 of the frame body 10. It is inserted with play 23, and the lower end of the connecting rod 11 is not fixed firmly to the push-up plate 12, but is loosely fitted 24 so as to be somewhat loose so as to have some backlash.
[0030]
FIG. 7 shows another means for the same purpose as FIG. 6. In this case, the push-up plate 12 is pushed up to keep the sliding frame body 10 always moved upward. Without being fixed to the rod 6 of the cylinder 3, the play 25 is provided and the rod 6 is pivotably fitted to the upper end of the rod 6, and the lower rod 6 portion of the push-up plate 12 (in FIG. A short shaft 26 that is coaxial and has a small diameter is integrally formed, and a compression coil spring 27 is wound around the short shaft 26, and the push-up plate 13 is screwed to the tip of the rod 6 (short shaft 26) by the spring 27. It is energized so as to always press the combined push-up plate 13 toward the pull-out prevention nut 28.
[0031]
In the case of FIG. 7, the lower end of the connecting rod 11 is firmly fixed to the push-up plate 12, but since the intermediate portion needs to have a degree of freedom, the table 8 and the lower heater are the same as in the case of FIG. 6. It passes through the plate 9 and is fixed to the lower end of the sliding frame 10 (however, not shown in FIG. 7).
[0032]
In each of the above embodiments, the sliding frame 10 is provided on the lower jig side, and the frame 10 is slid upward by driving the lower push-up cylinder to butt-contact with the upper jig, The sliding frame body 10 is attached to the upper jig side, and the frame body 10 is slid downward to abut against the lower jig to form a vacuum chamber. It may be.
[0033]
FIG. 8 shows such an embodiment. In this case, there is no drive unit on the lower jig side. In FIG. 8, a conduit 17 for evacuating is formed in the thickness of the cradle 7 on which the workpiece 20 is placed, and one end of the conduit 17 is opened on the upper surface of the cradle 7.
[0034]
At the lower end of the rod 5 of the press cylinder 1, a support plate 31 is mounted and fixed horizontally, which suspends an attachment plate 13, which has an upper heater plate 14 and a pressing block 29 as an upper jig fixed to the lower side, via a suspension rod 30. A push-down cylinder 32 for driving the sliding frame 10 is mounted and fixed downward at the center of the lower surface of the support plate 31 with the press cylinder 1 and the axis thereof being the same.
[0035]
The sliding frame body 10 is closely fitted to the outer peripheral surface of the pressing block 29 so as to freely slide up and down, and the frame body 10 is suspended by a plurality of (at least three) connecting rods 11. 11 has an intermediate portion inserted through the upper heater plate 14 and the heater mounting plate 13, and an upper end thereof is fixed to a pressing plate 34 that is horizontally mounted and fixed to the tip of the rod 33 of the pressing cylinder 32.
[0036]
Therefore, when the apparatus shown in FIG. 8 is used, first, the push-down cylinder 32 is driven to lower the sliding frame 10, and the lower end surface thereof is abutted and brought into close contact with the upper surface near the outer peripheral portion of the pedestal 7, thereby being airtight. A compartment is formed, and the compartment is then evacuated through the conduit 17 of the cradle 7, and then the press cylinder 1 is operated to press the pressure block 29 against the product 20 on the cradle 7.
[0037]
As described above, the sliding frame 10 and the pressing block 29 are lowered in two steps by separate driving from above, and processing such as bonding to the product is performed without leaving bubbles or the like under high vacuum as described above. It can be done. Reference numerals 35 and 36 denote O-ring seal packings provided on the abutting surface of the upper surface of the cradle 7 with the sliding frame body 10 and the sliding surface of the sliding frame body 10 with the outer periphery of the pressing block 29, respectively. 36 is filled with a vacuum sealing grease in the same manner as described above.
[0038]
In the apparatus shown in FIG. 8, as in the case shown in FIG. 6 (upside down), a compression coil spring is wound around the upper part of the sliding frame 10 of each connecting rod 11, and the frame 10 is biased to move downward, or the tip of the rod 33 of the push-down cylinder 32 is loosely inserted into the axis of the push-down plate 34 in the same manner as shown in FIG. Thus, the push-down plate 34 can be slightly swung, and a compression coil spring is wound around the rod 33 so that the push-down plate 34 is pressed toward the distal end of the rod 33. Needless to say, it may be configured to easily adhere to the upper surface of the cradle 7 with an equal pressing pressure.
[0039]
【The invention's effect】
The method and apparatus of the present invention are as described above and have the following effects.
(1) Unlike the conventional method of forming the vacuum compartment by placing the upper jig separated from each other on the lower jig, the sliding frame and the pressing jig (upper jig) that are moved by separate driving are used. Alternatively, a high vacuum compartment is formed by butt-contacting the pressure block with a horizontal plane, so that the seal grease does not escape even if the packing seal groove portion of the sliding surface is narrowed to a precise high compression dimension. There is no wear or deformation of the packing. Further, since the high airtightness can be easily realized by the pressure contact of the upper and lower jigs, the compartment can be quickly raised to a high degree of vacuum to completely deaerate the product.
(2) Since a large working space is obtained between the upper and lower jigs before the compartment is formed, it is easy to replace the upper and lower jigs, fine-tune the jigs, and load and unload workpieces. Since all the jigs can be attached to the slide table and moved, the lower jig is moved from this press device to another position while holding the processed product, and the processed product is transferred to other devices. Automatic loading and unloading are possible, and more efficient full automation is possible.
It is.
(3) IC card, DVD disk, printed circuit board, polarizing lens, etc. can be completely attached without any bubbles, and film molding, fine embossing on DVD disk, degassing pressurization of powder High vacuum pressing such as molding and liquid degassing / mixing is also possible.
(4) Because the pressure welding cylinder for pressurizing the upper and lower jigs and the press working cylinder are different from each other, the pressing cylinder is made lower than the pressure welding cylinder and built in the IC card. It is also possible to perform a process of attaching by low-pressure adhesion without damaging the IC or the like.
(5) The structure of the apparatus is simple, a high-vacuum compartment can be formed in a short time with a small-sized apparatus, and various pressing processes can be performed while reliably maintaining a high vacuum.
[Brief description of the drawings]
FIG. 1 is an explanatory front view of a device of the present invention.
FIG. 2 is an operation explanatory view of the apparatus of FIG. 1, showing a state before a compartment is formed.
FIG. 3 is an operation explanatory view of the apparatus of FIG. 1 and shows a state immediately after forming a compartment.
4 is an operation explanatory view of the apparatus of FIG. 1, showing a state in which press working is performed in a state where a vacuum compartment is formed.
FIG. 5 is a front explanatory view showing another embodiment of the lower jig side according to the present invention.
FIG. 6 is a front explanatory view showing still another embodiment of the lower jig side according to the present invention.
FIG. 7 is a front explanatory view showing still another embodiment of the lower jig side according to the present invention.
FIG. 8 is a front explanatory view showing still another embodiment of the device of the present invention.
[Explanation of symbols]
1-Cylinder for Press 2-Frame 3-Push-up Cylinder 4-Base 5-Rod 6-Rod 7-Receiver 8-Table 9-Lower Heater Plate 10-Sliding Frame 11-Connecting Rod 12-Push-up Plate 13-Mounting plate 14-Upper heater plate 15-Upper jig 16-Push plate 17-Conduit 18-Seal packing 19-Seal packing 20-Product 21-Vacuum compartment 22-Compression coil spring 23-Play 24-Play Fitting 25-Play 26-Short shaft 27-Compression coil spring 28-Nut 29-Pressing block 30-Suspension rod 31-Support plate 32-Pushing cylinder 33-Rod 34- Pushing plate 35-Seal packing
36-seal packing

Claims

A cylindrical sliding frame body that moves up and down via a plurality of connecting rods by a push-up cylinder disposed below is closely fitted to the outer peripheral side surface of the cradle on which the product to be processed is placed, so as to freely move up and down. An upper press cylinder rod has a box-lid type upper cover that can form an airtight compartment together with the frame by abutting and closely contacting the lower end of the slide frame when the sliding frame is raised. A fitting is provided, and in the frame body, cradle or upper jig, a conduit for evacuating is provided so that an end port faces the compartment when the compartment is formed. , The middle part vertically penetrates the table installed on the base, the upper end thereof is fixed to the lower end of the sliding frame body, and the lower end is pushed up and fixed horizontally to the rod of the push-up cylinder A high-vacuum processing device using a press device, which is fixed to a plate.

A cylindrical sliding frame body that moves up and down via a plurality of connecting rods by a push-up cylinder disposed below is closely fitted to the outer peripheral side surface of the cradle on which the product to be processed is placed, so as to freely move up and down. An upper press cylinder rod has a box-lid type upper cover that can form an airtight compartment together with the frame by abutting and closely contacting the lower end of the slide frame when the sliding frame is raised. A tool is attached to the frame body, cradle, or upper jig, and a conduit for evacuating is provided so that an end port faces the compartment when the compartment is formed. The lower end is configured such that at the rod retracting end of the push-up cylinder, there is no contact with the push-up plate that is horizontally attached and fixed to the rod, and the push-up plate is pushed up by being brought into contact with the lower end of the connecting rod. A high-vacuum processing device using a press device.

A compression coil spring is wound around the upper end of each connecting rod and biased to move upward on a sliding frame fixed on the upper side, and the intermediate portion of the connecting rod is installed on a base. 2. A high-vacuum processing apparatus using a press apparatus according to claim 1, wherein the lower end is loosely fitted to a push-up plate that is horizontally attached and fixed to the rod of the push-up cylinder.

A push-up plate fixed to the lower end of each connecting rod is loosely fitted to the rod of the push-up cylinder, and a compression coil spring is wound around the rod so that the push-up plate faces the tip of the rod. 2. A high-vacuum processing apparatus using a press apparatus according to claim 1, wherein each connecting rod intermediate portion is urged to be pressed and loosely penetrates a table installed on the base.

A support plate is attached and fixed to the lower end of the rod of the press cylinder arranged above, and a mounting plate with a pressing block attached to the lower side is suspended via a suspension rod. The upper end of the pressing block is fixed to the lower end of the rod of the pressing cylinder, and the upper end is fixed to a plurality of connecting rods suspended from the lower end of the pressing cylinder. A free cylindrical sliding frame is fitted, and only the sliding frame is lowered by the push-down cylinder, and the lower end of the sliding frame is brought into contact with the outer periphery of the upper surface of the cradle for mounting the workpiece. An airtight compartment is formed by close contact, and then the guide formed on the cradle, frame or pressing block is formed.
The chamber is evacuated through a tube, and the pressure block is lowered by driving the press cylinder while raising or raising the pressure to a predetermined vacuum pressure. A high-vacuum processing method using a press device, characterized in that

A support plate is attached and fixed to the lower end of the rod of the press cylinder arranged above, and a mounting plate with a pressing block attached to the lower side is suspended via a suspension rod. The upper end of the pressing block is fixed to the lower end of the rod of the pressing cylinder, and the upper end is fixed to a plurality of connecting rods suspended from the lower end of the pressing cylinder. A high-vacuum processing device using a press device, wherein a free cylindrical sliding frame is fitted.