JP5270285B2 - Substrate processing equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate processor easily determining a processing state of each substrate and a processing state in each processing unit when a plurality of processing units execute processing of substrates. <P>SOLUTION: A Gantt chart 85c shows a schedule of processing to be executed to a substrate by lot in each processing unit as a plurality of bar graphs 90 extending in the direction of time axis ta. Each bar graph 90 is arranged along the direction of the time axis ta in each corresponding processing unit. The each bar graph 90 also has an upper bar graph 91 and a lower bar graph 92. On the upper bar graph 91, identification information of a lot to be processed is displayed, and on the lower bar graph 92, a schedule of a process constituting substrate processing is shown in each process. Thus, a user can easily determines flow of the substrate processing to be executed to each lot and the schedule of the process to be executed in each processing unit on the basis of information displayed on a displaying part 85a. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a substrate processing apparatus for processing a semiconductor substrate, a glass substrate for a liquid crystal display device, a glass substrate for a photomask, a substrate for an optical disk (hereinafter simply referred to as “substrate”), The present invention relates to a technique for displaying the flow of processing performed on a substrate

  Conventionally, a technique for displaying a production schedule of products or parts produced on a plurality of production lines using a Gantt chart is known (for example, Patent Documents 1 and 2).

JP 2006-040221 A Japanese Patent Laid-Open No. 05-120296

  However, from the Gantt charts of Patent Documents 1 and 2, it is not possible to grasp what assembly processing is being performed on each production line. Also, when checking the processing status of the assembly process executed in each production line, the operator of the apparatus switches the screen on which the Gantt chart is displayed to another screen to display information on the target assembly process. It will be necessary.

  Therefore, in order to confirm which assembly process has not been executed normally in the case where an assembly process is not normally executed in any of the plurality of production lines and a failure occurs in the production line, It is necessary to display a screen different from the Gantt chart and identify the assembly process that caused the failure. That is, when a malfunction of the production line is specified using the conventional Gantt chart, there arises a problem that an operator's work load increases.

  This problem similarly occurs when a substrate processing process that causes a defect is specified in a substrate processing apparatus that performs processing on a substrate by a plurality of processing units.

  Therefore, an object of the present invention is to provide a substrate processing apparatus that can easily grasp the processing status of each substrate and the processing status in each processing unit when processing a substrate by a plurality of processing units. .

In order to solve the above-described problems, the invention of claim 1 is a substrate processing apparatus, wherein a plurality of processing units that perform processing on a substrate, and a schedule of processing that is performed on the substrate in each processing unit are arranged on a time axis. Along with the execution of the process, a creation unit that creates a graphic element extending in the direction, a first determination unit that determines whether or not a time measurement result of a process that constitutes a process executed on the substrate is within an allowable range, and A second determination unit that determines whether or not a measurement result of the execution parameter is within a warning range, and a display unit that displays a graphic element created by the creation unit on a screen, includes a storage unit, and as before Symbol graphic elements are arranged along the time direction for each corresponding processing unit, determines the arrangement of the graphic element, (a) the creation unit, the substrate identification The graphic element having the first graphic element indicating the information and the second graphic element indicating the schedule of the process for each process is created, and the time determination result is out of an allowable range by the first determination unit. A first notification element is added to the corresponding graphic element, and if the measurement result is determined to be within the warning range, a second is added to the corresponding graphic element. (B) The display unit displays the graphic element with the notification element added to the graphic element to which the notification element has been added in the creation unit, and the creation unit For the graphic element to which the notification element is not added, the graphic element is simply displayed .

According to a second aspect of the present invention, in the substrate processing apparatus, a plurality of processing units that perform processing on the substrate and a schedule of processing performed on the substrate in each processing unit are represented as graphic elements extending in the time axis direction. A creation unit to create, a first determination unit for judging whether or not a time measurement result of a process constituting a process to be executed on the substrate is within an allowable range, and an execution parameter of a device that operates along with the execution of the process A second determination unit that determines whether the measurement result of the execution parameter falls within the abnormal range, a display unit that displays the graphic element created by the creation unit on a screen, and a storage unit. And determining the arrangement of each graphic element so that the graphic element is arranged along the time direction for each corresponding processing unit, and (a) the creation unit is a first graphic indicating the identification information of the substrate Essential And creating the graphic element having a second graphic element indicating the schedule of the process for each process, and when the first determination unit determines that the timing result is outside the allowable range, A first notification element is added to the corresponding graphic element, and when the second determination unit determines that the measurement result falls within the abnormal range, a second notification element is added to the corresponding graphic element, b) The display unit displays the graphic element with the notification element added to the graphic element to which the notification element has been added in the creation unit, and the notification element is added to the creation unit. For the graphic elements that are not present, the graphic elements are simply displayed .

According to a third aspect of the present invention, in the substrate processing apparatus of the first or second aspect, the creating unit adds the first notification element to at least the second graphic element among the graphic elements. It is characterized by that.

According to a fourth aspect of the present invention, in the substrate processing apparatus according to the first or second aspect, the creation unit adds the first notification element to each of the first and second graphic elements. Features.

  According to a fifth aspect of the present invention, in the substrate processing apparatus according to the third or fourth aspect, the second graphic element to which the first notification element is added is generated by a first designated operation from the operation unit. A first extraction unit that, when specified, extracts first related information corresponding to the specified second graphic element from a plurality of execution timing related information stored in the storage unit; The unit further creates a first display area for arranging the first related information extracted by the first extraction unit, and the display unit performs the creation by the creation unit according to the first designation operation. The created first display area is further displayed.

The invention according to claim 6 is the substrate processing apparatus according to any one of claims 1 to 5 , wherein the creation unit includes at least the second graphic element corresponding to the second graphic element among the graphic elements. 2 Announcing elements are added.

According to a seventh aspect of the present invention, in the substrate processing apparatus according to any one of the first to fifth aspects, the creation unit adds the second notification element to the first and second graphic elements. It is characterized by.

According to an eighth aspect of the present invention, in the substrate processing apparatus of the sixth or seventh aspect , the second graphic element to which the second notification element is added is designated by a second designated operation from the operation unit. A second extraction unit that extracts second related information corresponding to the designated second graphic element from a plurality of execution parameter related information stored in the storage unit, and the creation unit Further creates a second display area for arranging the second related information extracted by the second extraction unit, and the display unit is created by the creation unit according to the second designation operation The second display area thus displayed is further displayed.

According to the first to eighth aspects of the present invention, the substrate processing schedule executed in each processing unit is displayed on the display unit as a graphic element extending in the time axis direction. Each graphic element is arranged for each corresponding processing unit, and includes a first graphic element indicating the identification information of the substrate and a second graphic element indicating the schedule of the process constituting the process for each process. Have. When it is determined that the time measurement result of the process is out of the allowable range, the first notification element is added to the graphic element corresponding to this process. Further, when the measurement result of the execution parameter falls within the warning range or the abnormal range, the second notification element is added to the graphic element corresponding to this process.

Accordingly, the user of the substrate processing apparatus finds the graphic element having the same identification information from the plurality of graphic elements displayed on the display unit, thereby determining the processing status of the substrate processed across the processing units. Easy to grasp. Further, the user of the substrate processing apparatus can easily grasp the processing status in each processing unit by checking a plurality of graphic elements arranged for each processing unit. Further, the user of the substrate processing apparatus can easily grasp whether or not each process has been normally executed according to the set schedule by determining the presence or absence of the first notification element. Further, the user of the substrate processing apparatus can easily grasp whether or not each process has been normally executed according to the set value of the execution parameter by determining the presence or absence of the second notification element.

As described above, according to the first to eighth aspects of the present invention, the user of the substrate processing apparatus can execute the flow of processing performed on each substrate and the schedule of processes performed on each processing unit. At the same time. Furthermore, it is possible to easily grasp whether each process has been normally executed according to the set schedule and whether each process has been normally executed according to the set value of the execution parameter.

  In particular, according to the invention described in claim 5, when the graphic element to which the first notification element is added is designated, the execution timing related information (first related information) according to the designated graphic element is: It is extracted and further displayed on the screen of the display unit. Therefore, the user of the substrate processing apparatus can easily confirm detailed information of the process whose time measurement result is outside the allowable range.

In particular, according to the invention described in claim 8, when the graphic element to which the second notification element is added is designated, the execution parameter related information (second related information) corresponding to the designated graphic element is: It is extracted and further displayed on the screen of the display unit. Therefore, the user of the substrate processing apparatus can easily confirm detailed information of the process in which the measurement result of the execution parameter is outside the allowable range (for example, within the warning range or the abnormal range).

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<1. Overall configuration of substrate processing apparatus>
FIG. 1 is a diagram showing an example of the overall configuration of a substrate processing apparatus 1 according to an embodiment of the present invention. Here, the substrate processing apparatus 1 is a so-called batch type apparatus, and each substrate is immersed in a stored chemical solution or pure water (hereinafter also referred to as “processing solution”) by immersing a plurality of substrates belonging to the same lot. The substrate processing is performed collectively. As shown in FIG. 1, the substrate processing apparatus 1 mainly includes a plurality of processing units 10 (10a, 10b), 100, a transfer robot 15, a control unit 80, a display unit 85a, and an operation unit 87. Have.

  The transfer robot 15 is a transfer mechanism that transfers the substrate W between the processing units 10 (10a, 10b) and 100 while holding a plurality of substrates W. As shown in FIG. 1, the transfer robot 15 moves above each processing unit 10 (10a, 10b), 100 along the arrangement direction (arrow AR1 direction) of each processing unit 10 (10a, 10b), 100. To do.

  The chemical processing unit 10 (10a, 10b) is a multi-functional processing unit that executes chemical processing with various chemicals and washing with pure water in a single processing tank 30. As shown in FIG. 1, the chemical processing unit 10 (10a, 10b) mainly includes an outer tank 20, a processing tank 30, a lifter 31, a supply pipe 50, a circulation path 61, and drainage pipes 66 and 71. And have.

  As shown in FIG. 1, the chemical processing units 10a and 10b are different in the chemicals that can be supplied to the processing tank 30 (the chemical processing unit 10a is the chemicals C1 and C2, and the chemical processing unit 10b is the chemicals C3 and C4. Except for each of which can be supplied). Therefore, in the following, the chemical solution processing unit 10a will be mainly described.

  The outer tub 20 is a recovery unit provided so as to surround the vicinity of the upper end of the processing tank 30. The processing liquid overflowing from the upper end of the processing tank 30 is collected in the outer tank 20. The processing tank 30 is a storage tank that stores chemical liquids C1 and C2 (in the case of the chemical liquid processing unit 10b, chemical liquids C3 and C4) or pure water W1. Accordingly, when a plurality of substrates W (substrate group) belonging to the same lot are immersed in the processing liquid in the processing tank 30, the chemical processing or the water washing processing is executed in lot units.

  The lifter 31 is an elevating mechanism that can be raised and lowered between a substrate delivery position above the processing tank 30 and an immersion position in which the substrate W is immersed in the processing liquid in the processing tank 30. A plurality (three in this embodiment) of holding rods 32 are attached in the vicinity of the lower end of the lifter 31 and are rod-like bodies extending in the direction perpendicular to the paper surface. Each holding bar 32 is provided with a plurality of holding grooves (not shown). When the outer edge portion of each substrate W is fitted into the corresponding holding groove, each substrate W is held in a standing posture with respect to the holding rod 32.

  Therefore, when the lifter 31 is raised to the substrate delivery position, the substrate W is delivered between the holding rod 32 and the transfer robot 15. On the other hand, when the lifter 31 is lowered to the dipping position while the substrate W is held by the holding rod 32, the substrate W is subjected to a chemical solution process or a water washing process.

  The supply pipe 50 is a pipe that communicates with the bottom side of the processing tank 30. The supply pipe 50 selectively supplies the chemical liquids C1 and C2 (chemical liquids C3 and C4 in the case of the chemical liquid processing unit 10b) and the pure water W1 into the processing tank 30 depending on the open / close state of the valves 51 to 53. To do. For example, when the valve 51 is opened and the valves 52 and 53 are closed, the chemical C1 is supplied to the processing tank 30.

  The temperature adjustment unit 54 adjusts the temperature of the chemical liquid C2 (chemical liquid C4 in the case of the chemical liquid processing unit 10b) supplied to the processing tank 30 through the valve 52 and the supply pipe 50 to a desired liquid temperature. Accordingly, the processing tank 30 is supplied with the chemical C2 maintained at a desired temperature (in the case of the chemical processing unit 10b, the chemical C4).

  The circulation path 61 is a pipe that circulates and supplies the processing liquid collected in the outer tank 20 to the processing tank 30. As shown in FIG. 1, one end of the circulation path 61 communicates with the bottom side of the outer tank 20, and the other end communicates with the bottom side of the processing tank 30. The circulation path 61 is provided with a valve 62, a pump 63, and a filter 64 in this order from the outer tank 20 side to the processing tank 30 side.

  The drainage pipe 66 is a pipe that discharges the processing liquid collected in the outer tub 20 to the drainage drain. As shown in FIG. 1, one end of the drainage pipe 66 communicates with the circulation path 61 and the other end communicates with the drainage drain side.

  Therefore, in the present embodiment, by controlling the open / close state of the valve 62 and the valve 67, it is possible to switch between circulation supply to the treatment tank 30 and discharge to the drainage drain side. For example, when the valve 62 is opened, the valve 67 is closed, and the pump 63 is operated, the processing liquid collected in the outer tank 20 is circulated and supplied into the processing tank 30 via the circulation path 61. . On the other hand, when the valve 62 is closed and the valve 67 is opened, the processing liquid collected in the outer tub 20 is discharged to the drainage drain.

  Here, as shown in FIG. 1, the processing liquid supplied to the processing tank 30 via the circulation path 61 passes through the filter 64. Therefore, impurities such as particles contained in the circulated and supplied processing liquid are filtered by the filter 64 and removed.

  The drainage pipe 71 is a pipe that discharges the processing liquid stored in the processing tank 30 to the drainage drain side. When the valve 72 is opened, the processing liquid in the processing tank 30 is discharged to the drainage drain side.

  The pure water treatment unit 100 is a water washing unit that performs a water washing treatment with pure water stored in the treatment tank 130. As shown in FIG. 1, the pure water treatment unit 100 mainly includes an outer tank 120, a treatment tank 130, a lifter 131, a supply pipe 150, and drainage pipes 166 and 171.

  The outer tank 120 is a collection unit provided so as to surround the vicinity of the upper end of the processing tank 130. Pure water overflowing from the upper end of the treatment tank 130 is collected in the outer tank 120. The processing tank 130 is a pure water tank that stores the pure water W1. When a plurality of substrates W belonging to the same lot are immersed in pure water in the processing tank 130, a water washing process is executed in lot units.

  Similarly to the lifter 31, the lifter 131 is an elevating mechanism that can be raised and lowered between a substrate delivery position above the processing tank 130 and an immersion position in which the substrate W is immersed in pure water in the processing tank 130. . A plurality of (three in this embodiment) holding rods 132 are attached in the vicinity of the lower end of the lifter 131 and are rod-shaped bodies extending in the vertical direction on the paper surface. The holding bar 132 holds each substrate W in an upright posture, similarly to the holding bar 32.

  Therefore, when the lifter 131 is raised to the substrate delivery position, the substrate W is delivered between the holding rod 132 and the transfer robot 15. On the other hand, when the lifter 131 is lowered to the immersion position in a state where the substrate W is held by the holding rod 132, the substrate W is subjected to a water washing process with pure water.

  As shown in FIG. 1, the supply pipe 150 is a pipe communicating with the bottom side of the processing tank 130. When the valve 153 is opened, the supply pipe 150 supplies pure water W <b> 1 into the treatment tank 130. The drainage pipe 166 is a pipe that discharges the pure water collected in the outer tank 120 to the drainage drain. As shown in FIG. 1, one end of the drainage pipe 166 communicates with the bottom side of the outer tub 120 and the other end communicates with the drainage drain side. Therefore, when the valve 167 is opened, the pure water collected in the outer tub 120 is discharged to the drainage drain. The drainage pipe 171 is a pipe that discharges pure water stored in the treatment tank 130 to the drainage drain side. Therefore, when the valve 172 is opened, the pure water in the treatment tank 130 is discharged to the drainage drain side.

  The control unit 80 controls the operation of each component (for example, movement control of the transfer robot 15, lifting / lowering control of the lifters 31, 131, opening / closing control of the valves 51-53, 62, 67, 72, 153, 167, 172, and Liquid temperature control by the temperature control unit 54) and data calculation are realized. The detailed configuration of the control unit 80 will be described later.

  The display unit 85 a is configured by a so-called liquid crystal display, and displays characters and figures on the screen based on the video signal transmitted from the control unit 80. The operation unit 87 is an input unit configured by a so-called keyboard and mouse. A user of the substrate processing apparatus 1 (hereinafter, also simply referred to as “user”) causes the substrate processing apparatus 1 to perform a predetermined operation by performing an input operation based on the display content of the display unit 85a. be able to.

  As the display unit 85a, a display unit having a “touch panel” function that can specify a position on the screen by touching the screen with a finger or a dedicated pen may be used. Accordingly, the user can cause the substrate processing apparatus 1 to execute a predetermined operation by giving an instruction using the “touch panel” function of the display unit 85a based on the content displayed on the display unit 85a. it can. In this case, the display unit 85a can realize not only a display function but also an input function similar to the operation unit, and is also used as an input unit.

<2. Configuration of control unit>
FIG. 2 is a block diagram illustrating an example of the configuration of the control unit 80. As shown in FIG. 2, the control unit 80 mainly includes a RAM 81, a ROM 82, a large capacity storage unit 83, a CPU 84, a display processing unit 85, and an input / output unit 86. Here, each of the RAM 81, ROM 82, large-capacity storage unit 83, CPU 84, display processing unit 85, and input / output unit 86 is electrically connected via a signal line 88.

  A RAM (Random Access Memory) 81 is a volatile storage unit and stores, for example, data used in the calculation of the CPU 84. A ROM (Read Only Memory) 82 is a so-called nonvolatile storage unit, and stores, for example, a program 82a. As the ROM 82, a flash memory that is a readable / writable nonvolatile memory may be used.

  The large-capacity storage unit 83 is a storage unit configured by an element having a larger storage capacity than the RAM 81, such as a silicon disk drive or a hard disk drive, and exchanges data with the RAM 81 as necessary. . As shown in FIG. 2, the large-capacity storage unit 83 can store a recipe table 83a, a child recipe table 83b, a time measurement result storage table 83c, and an execution parameter storage table 83d. Details of the tables 83a to 83d will be described later.

  A CPU (Central Processing Unit) 84 executes operation control and data processing according to the program 82 a of the ROM 82. 2 is implemented by the CPU 84. The arithmetic functions corresponding to the blocks (indicated by reference numerals 84a to 84f, respectively) described in the CPU 84 in FIG. In addition, the calculation function corresponding to each block 84a-84f is mentioned later.

  The display processing unit 85 is configured by a so-called video controller, and is electrically connected to the display unit 85a via a signal line 85b. The display processing unit 85 displays characters, graphics, and the like on the screen of the display unit 85a by executing a drawing process.

  The input / output unit 86 is configured by a so-called I / O port (Input / Output Port), and devices outside the control unit 80 (for example, the transfer robot 15, the lifter 31, the temperature control unit 54, and the like) via the signal line 86a. Electrically connected to the operation unit 87 and the like). Therefore, the input / output unit 86 is used for input / output of data exchanged between the control unit 80 and the external device.

<3. Data structure of each table>
3 to 6 are diagrams showing examples of data structures of the recipe table 83a, the child recipe table 83b, the timing result storage table 83c, and the execution parameter storage table 83d, respectively. Here, the data structure of each table 83a-83d memorize | stored in the mass storage part 83 is demonstrated.

  The recipe table 83a stores in advance data related to the schedule of the substrate processing executed in each processing unit 10 (10a, 10b), 100 prior to the execution of the substrate processing. As shown in FIG. 3, the recipe table 83a mainly includes “recipe NO”, “unit name”, “board identification NO”, “board identification name”, “start time”, “end time”, and “child recipe”. Each field (column) of “NO” is included.

  The “recipe NO” field stores a value for uniquely identifying each record (each row) registered in the recipe table 83a. That is, for each record in the recipe table 83a, a value corresponding to a desired substrate process is extracted by searching for a value stored in “recipe NO”.

  Here, each substrate processing specified by “recipe NO” has one or a plurality of steps. For example, when the substrate processing specified by “Recipe NO” is “Washing processing” executed in the pure water processing unit 100 (see FIG. 1), this substrate processing includes “into the processing tank 130” as one of the steps. A step of supplying pure water ”.

  In the “unit name” field, the name of the processing unit on which the substrate processing is executed is stored as character string data. In the “substrate identification NO” field, a value for uniquely identifying a lot to be processed by each processing unit 10 (10a, 10b), 100 is stored. In the “substrate identification name” field, the name of each lot designated by “substrate identification NO” is stored as character string data.

  In the “start time” and “end time” fields, when the lot specified by “substrate identification NO” is processed by the processing unit specified by “unit name”, the start time and end time of the processing are displayed. Stored. Therefore, the schedule of each substrate processing can be grasped by the “start time” and “end time” stored in advance in the recipe table 83a. In the “child recipe NO” field, one of the values stored in the “child recipe NO” field of the child recipe table 83b is stored.

  The child recipe table 83b stores in advance data related to the schedule of the steps constituting each substrate processing prior to the execution of the substrate processing. As shown in FIG. 4, the child recipe table 83b mainly includes “child recipe NO”, “child recipe name”, “start time”, “end time”, “parameter name”, “allowable lower limit value”, “allowable value”. Each field includes an “upper limit value”, a “warning lower limit value”, and a “warning upper limit value”.

  The “child recipe NO” field stores a value for uniquely identifying each record registered in the child recipe table 83b. In the “child recipe name” field, the name of the process designated by “child recipe NO” is stored as character string data.

  In the “start time” and “end time” fields, the start time and end time of the process designated by “child recipe NO” are stored. Therefore, the schedule of each process can be grasped by the “start time” and “end time” stored in advance in the child recipe table 83b.

  In the “parameter name”, the components of the substrate processing apparatus 1 (for example, devices such as the valve 51 and the temperature control unit 54) that operate in accordance with the execution of the target process for the target process specified by “child recipe NO”. ) Is stored as character string data.

  Here, the execution parameter is a parameter for setting the operation of the equipment constituting the substrate processing apparatus 1. For example, for the temperature adjustment unit 54 (see FIG. 1), “chemical temperature” is set as one of the execution parameters.

  The “allowable lower limit value” and “allowable upper limit value” fields store the lower limit value and upper limit value that define the allowable range of this “actual value” for the “actual value” of the execution parameter specified by “parameter name”. Has been. Therefore, if the “actual value” of the execution parameter is within the allowable range (“allowable lower limit value” ≦ “actual value” ≦ “allowable upper limit value”), the device corresponding to this execution parameter is operating normally, It is determined that the process corresponding to this execution parameter is being executed normally.

  In the “Warning lower limit value” and “Warning upper limit value” fields, the values that specify the warning range and abnormal range of this “actual value” are stored for the “actual value” of the execution parameter specified by “parameter name”. ing.

  Here, the warning range is expressed as “allowable upper limit value” <“actual value” ≦ “warning upper limit value” or “warning lower limit value” ≦ “actual value” <“allowable lower limit value”. When the “actual value” of the execution parameter falls within the warning range, the user can determine that the corresponding process is in the warning state.

  Then, the user may determine that a substrate processing defect has occurred, stop this process, and perform an operation of removing the lot that was the target of this process from the processing unit. On the other hand, since the warning range is not included in the abnormal range described later, the user may continue the process in the warning state and the subsequent processes. In addition, the user may perform maintenance work such as adjustment or replacement of the device causing the warning regardless of whether or not the process in the warning state is continued.

  The abnormal range is represented as “warning upper limit value” <“actual value” or “actual value” <“warning lower limit value”. When the “actual value” of the execution parameter falls within the abnormal range, the user can determine that an abnormality has occurred in the corresponding process.

  Then, the user may determine that a substrate processing defect has occurred, stop this process, and perform an operation of removing the lot that was the target of this process from the processing unit. In addition, the user may perform maintenance work such as adjustment or replacement of the device causing the abnormality.

  Here, as described above, the “child recipe NO” field of the recipe table 83a stores one of the values stored in the “child recipe NO” field of the child recipe table 83b. The “child recipe NO” fields of both tables 83a and 83b are associated with each other.

  Therefore, when the “recipe NO” of the target substrate processing is known, a record corresponding to the target substrate processing is extracted from the recipe table 83a, and the “child recipe NO” of the process constituting the target substrate processing can be acquired from the extracted record. . Then, by extracting a record having the same value as the acquired “child recipe NO” from the child recipe table 83b, it is possible to acquire the schedule of each process constituting the target substrate process.

  The time measurement result storage table 83c stores the execution timing of the actually executed process. As shown in FIG. 5, the time measurement result storage table 83c mainly has fields of “execution timing storage ID”, “child recipe NO”, “start time”, and “end time”.

  The “execution timing storage ID” field stores a value for uniquely identifying each record registered in the time measurement result storage table 83c. Further, in the “child recipe NO” field, one of the values stored in the “child recipe NO” field of the child recipe table 83b is stored, and “child recipes” in both tables 83b and 83c are stored. The “NO” field is associated. Further, the “start time” and “end time” fields store the time when the corresponding process is actually started and the time when the corresponding process is ended.

  Therefore, when the “child recipe NO” of the process of interest is known, a record having the same value as this “child recipe NO” is extracted from the timing result storage table 83c, thereby executing the execution timing of the process of interest (that is, the timing result storage table). 83c “start time” and “end time”).

  The execution parameter storage table 83d stores measurement results (actual measurement values) of execution parameters set for each process. As shown in FIG. 6, the execution parameter storage table 83d mainly has fields of “execution parameter storage ID”, “child recipe NO”, “time”, “parameter name”, and “parameter value”. Yes.

  The “execution parameter storage ID” field stores a value for uniquely identifying each record registered in the execution parameter storage table 83d. Similarly to the time measurement result storage table 83c, the “child recipe NO” field stores one of the values stored in the “child recipe NO” of the child recipe table 83b. The “child recipe NO” fields of the tables 83b and 83d are associated with each other.

  The “time” field stores the time at which the measurement result of the execution parameter becomes the warning range or the abnormal range in the process specified by “child recipe NO”. Further, the “parameter name” stores the name of the execution parameter that has become the warning range or the abnormal range. Further, the “parameter value” stores the measurement result of the execution parameter that is in the warning range or the abnormal range.

  Therefore, when the “child recipe NO” of the target process is known, a record having the same value as this “child recipe NO” is extracted from the execution parameter storage table 83d, so that the target process becomes a warning state or abnormal in the target process. As well as the name and measurement result of the execution parameter that caused the warning or abnormality.

<4. CPU functional configuration>
Here, an arithmetic function realized by the CPU 84 (see FIG. 2) will be described. In FIG. 2, arithmetic functions realized by the CPU 84 are illustrated as blocks 84 a to 84 f in the CPU 84.

  The time measurement result storage processing unit 84a registers information related to the time measurement result of each process in the time measurement result storage table 83c every time each process is executed in each of the chemical solution processing units 10 (10a, 10b), 100.

  Specifically, when the process of interest specified by “child recipe NO” is executed, the time measurement result storage processing unit 84a adds a new record to the time measurement result storage table 83c. Then, the time measurement result storage processing unit 84a displays a value for uniquely identifying the process of interest and the time when the process is actually started and ended in the “child recipe NO.” Of the record added to the time measurement result storage table 83c. ”,“ Start time ”, and“ end time ”fields.

  The execution parameter storage processing unit 84b registers information related to the warning state or abnormality occurrence in the execution parameter storage table 83d when the attention process is in a warning state or an abnormality occurs in the attention process.

  Specifically, when the target process is in a warning state or an abnormality occurs in the target process, the execution parameter storage processing unit 84b adds a new record to the execution parameter storage table 83d. Then, the execution parameter storage processing unit 84b sets a value for uniquely identifying the target process in the “child recipe NO” field of the added record, and the time when the warning state is set in the “time” field, or an abnormality occurs. In the “Parameter Name” field, the name of the execution parameter of the component that caused the warning condition or abnormality, and in the “Parameter Value” field the measurement result of the execution parameter specified by “Parameter Name”. Store.

  The timing determination unit 84c (first determination unit) schedules the process of interest stored in the child recipe table 83b (specifically, the values of “start time” and “end time” in the child recipe table 83b correspond) Are compared with the time measurement results of the target process when actually executed (specifically, the values of “start time” and “end time” in the time measurement result storage table 83c correspond), and the time measurement results of each process Is determined to be within the allowable range.

  For example, the timing determination unit 84c sets the value obtained by subtracting the “start time” from the “end time” in the child recipe table 83b (set value for the required time), and the “start time” from the “end time” in the time measurement result storage table 83c. The value obtained by subtracting (the result of measuring the required time) is calculated.

  When the value obtained by subtracting the set value from the measurement result of the required time falls within the allowable range, it is determined that the process of interest is being executed at the correct timing. On the other hand, when the value obtained by subtracting the set value from the measurement result of the required time falls outside the allowable range (for example, the required time is insufficient or exceeded), the timing determination unit 84c determines that the target process is the child recipe table 83b. It is determined that it has left the timing specified by, and is not being executed normally.

  The parameter determination unit 84d (second determination unit) determines whether or not the measurement result of the execution parameter is within the warning range for the execution parameter of the device that operates along with the execution of the process of interest, and within the abnormal range. To determine whether or not. This determination is made based on the “allowable lower limit value”, “allowable upper limit value”, “warning lower limit value”, and “warning upper limit value” stored in the child recipe table 83b as described above.

  For example, among the records registered in the child recipe table 83b, for the record where “child recipe NO” = “1101”, “parameter temperature” is “chemical solution temperature” and “allowable lower limit value” is “20”. “30” is stored in “Allowable upper limit value”, “15” is stored in “Warning lower limit value”, and “35” is stored in “Warning upper limit value”.

  Therefore, in the process specified by “child recipe NO” = “1101”, when the measurement result of “chemical solution temperature” is “25”, “32”, and “12”, the measurement result is within the allowable range. In the warning range and in the abnormal range.

  The Gantt chart creation unit 84e creates a Gantt chart (see FIG. 7) that displays the schedule of each substrate process and each process based on the data stored in each table 83a to 83d. The detailed configuration of the Gantt chart will be described later.

  The detailed information extraction unit 84f is configured to record a plurality of records registered in the child recipe table 83b and the time measurement result storage table 83c in order to acquire information related to the execution timing when the target process is designated according to the input from the operation unit 87. From this, the process of extracting the record corresponding to the process of interest is executed (corresponding to the first extraction unit). In addition, the detailed information extraction unit 84f acquires a record corresponding to the target process from a plurality of records registered in the child recipe table 83b and the execution parameter storage table 83d in order to acquire information on the execution parameter of the specified target process. Is executed (corresponding to the second extraction unit). In addition, designation | designated of an attention process may be performed by using the touch-panel function of the display part 85a.

<5. Gantt chart configuration>
FIG. 7 is a diagram illustrating an example of a Gantt chart 85c displayed on the display unit 85a when all substrate processing and processes are normally performed. Here, the configuration of the Gantt chart 85c of the present embodiment will be described with reference to FIG.

  As shown in FIG. 7, the Gantt chart 85c is a plurality of band graphs 90 (90a to 90a) extending in a time axis ta direction of a substrate processing schedule executed in units of lots in each processing unit 10 (10a, 10b), 100. 90e) (graphic element) is displayed on the screen of the display unit 85a.

  Each band graph 90 (90a to 90e) is arranged along the time axis ta for each corresponding processing unit. For example, the band graphs 90a and 90b of the substrate processing executed by the same chemical solution processing unit 10a are arranged on a straight line along the time axis ta as shown in FIG.

  As shown in FIG. 7, each band graph 90 (90a to 90e) has an upper band graph 91 (91a to 91e) and a lower band graph 92 (92a to 92h). In the following description, the band graphs 90a to 90e are collectively referred to as the band graph 90, the upper band graphs 91a to 91e are collectively referred to as the upper band graph 91, and the lower band graphs 92a to 92h are collectively referred to as the lower band graph 92, Also called.

  The upper band graph 91 (first graphic element) is a rectangular body arranged on the screen of the display unit 85a, and is created based on the record extracted from the recipe table 83a. That is, the arrangement and size of each upper band graph 91 are determined based on the “unit name”, “start time”, and “end time” of the recipe table 83a. On the upper band graph 91, the character string data stored in the “substrate identification name” of the recipe table 83a is displayed as the identification information of the lot to be processed.

  For example, a record of “recipe NO” = “1100” (see FIG. 3) corresponds to the upper band graph 91a. Further, as shown in FIG. 7, “lot A1” stored in “substrate identification name” of the recipe table 83a is displayed on the upper band graph 91a. Note that “substrate identification NO” of the recipe table 83a may be used as the identification information of each lot given to the upper band graph 91.

  Similarly to the upper band graph 91, the lower band graph 92 (second graphic element) is a rectangle disposed on the screen of the display unit 85a, and is disposed immediately below the corresponding upper band graph 91. The lower band graph 92 is created based on the recipe table 83a and the child recipe table 83b.

  That is, among the records registered in the recipe table 83a, “child recipe NO” is acquired from the record corresponding to the upper upper strip graph 91. Subsequently, a record corresponding to the acquired “child recipe NO” is extracted from the child recipe table 83b.

  Then, the arrangement and size of the lower band graph 92 include the “unit name” of the record corresponding to the upper band graph 91 immediately above, the “start time” and “end time” of the record extracted from the child recipe table 83b. , Based on. On the lower band graph 92, a character string stored in “child recipe name” of the child recipe table 83b is displayed as identification information of each process.

  For example, a record of “child recipe NO” = “1101” (see FIG. 4) corresponds to the lower band graph 92a displayed immediately below the upper band graph 91a. Further, as shown in FIG. 7, “Process A11” stored in “Child Recipe Name” of the child recipe table 83b is displayed on the lower band graph 92a.

  As described above, the Gantt chart 85c has the same screen of the display unit 85a as a plurality of band graphs 90 extending in the direction of the time axis ta, with the schedule of processing executed in each lot in each processing unit 10 (10a, 10b), 100. It is displayed inside. Each band graph 90 is arranged along the time axis ta direction for each corresponding processing unit 10 (10a, 10b), 100. Further, each band graph 90 includes an upper band graph 91 indicating identification information of a lot processed by the corresponding processing unit, and a lower band graph 92 indicating a schedule of processes constituting the substrate processing for each process. Have.

  Thereby, the user finds the band graph 90 in which the same lot is the processing target from among the plurality of band graphs 90 displayed on the display unit 85a, so that the lot processed across the processing units is processed. It is possible to easily grasp the processing status (for example, when and which processing unit executed what process). In addition, the user can easily grasp the execution status of the process executed in each chemical solution processing unit 10 (10a, 10b), 100 from each band graph 90 displayed on the display unit 85a.

  Therefore, the user can easily grasp the flow of the substrate processing executed for each lot and the schedule of the steps executed in each processing unit 10 (10a, 10b), 100 from the display of the display unit 85a. it can.

<6. Gantt chart creation procedure>
FIG. 8 shows the configuration of the Gantt chart 85c displayed on the display unit 85a when the process of interest departs from the normal execution timing and when the measurement result of the execution parameter of the process of interest falls within the warning or abnormal range. It is a figure which shows an example. Here, with reference to FIG. 8, a procedure for creating each band graph 90 constituting the Gantt chart 85c will be described.

  First, a procedure for creating the band graph 90 in the case where the execution status of all the processes included in the substrate processing is normal will be described.

  For example, for the process specified by “child recipe NO” = “1201” (corresponding to the lower band graph 92c), the “start time” and “end time” of the child recipe table 83b and the time measurement result storage table 83c are the same. Yes, it is running normally according to the set schedule. Further, in the execution parameter storage table 83d, the measurement result of the execution parameter of the process designated by “child recipe NO” = “1201” is not stored. That is, the process designated by “child recipe NO” = “1201” is normally executed according to the set value of the execution parameter. Therefore, in the case where a substrate having a “substrate identification name” = “lot A2” is processed by a processing unit having “unit name” = “chemical solution processing unit 10a”, all of this substrate processing (corresponding to the band graph 90b) is performed. The execution status of this process is normal.

  In this case, the Gantt chart creating unit 84e (1) “unit name”, “start time” and “end time” of the record registered in the recipe table 83a and having “recipe NO” = “1200” ( 3), (2) based on the “start time” and “end time” (see FIG. 4) of the record registered in the child recipe table 83b with “child recipe NO” = “1201”. A graph 91b and a lower band graph 92c are created.

  For example, the Gantt chart creation unit 84e includes the upper band graph 91b and the upper band graph 91b so that the character string “chemical solution processing unit 10a” arranged on the left side of each band graph 90 and the band graph 90b are arranged in a straight line. The position (coordinates in the screen of the display unit 85a) in the height direction (direction perpendicular to the time axis ta) of the lower band graph 92c is determined.

  Further, regarding the position and size of the upper band graph 91b and the lower band graph 92c along the time axis ta, the Gantt chart creation unit 84e is based on the “start time” and “end time” of both tables 83a and 83b. decide.

  Then, the display processing unit 85 displays the upper band graph 91b and the lower band graph 92c on the screen of the display unit 85a based on the position and size determined by the Gantt chart creation unit 84e.

  Next, a procedure for creating the band graph 90 when the process of interest has departed from the normal execution timing will be described.

  For example, for the process specified by “child recipe NO” = “3201” (corresponding to the lower band graph 92h: see FIG. 8), the “start time” is subtracted from the “end time” stored in the child recipe table 83b. Required value (set value of required time) and the value obtained by subtracting “start time” from “end time” stored in time measurement result storage table 83c (time measurement result of required time) The timing result is smaller than the set value. Therefore, when the value obtained by subtracting the set value from the result of measuring the required time falls outside the allowable range, the timing determination unit 84c leaves the process designated by “child recipe NO” = “3201” from the normal execution timing. It is determined that the measurement result of the time required for this process is insufficient with respect to the installation value.

  When the band graph 90e including the process specified by “child recipe NO” = “3201” is created, the Gantt chart creating unit 84e (1) “recipe NO” = registered in the recipe table 83a = Based on the record “3200” (see FIG. 3) and (2) the record “see child recipe NO” = “3201” (see FIG. 4) registered in the child recipe table 83b, the upper band graph 91e. And the lower strip graph 92h is created.

  That is, the Gantt chart creating unit 84e is based on the “unit name”, “start time”, and “end time” of the recipe table 83a, and “start time” and “end time” of the child recipe table 83b. The positions and sizes of the upper band graph 91e and the lower band graph 92h are determined.

Further, the timing determination unit 84c determines that the time measurement result of the time required for the process specified by “child recipe NO” = “3201” is insufficient with respect to the set value (that is, out of the allowable range). Therefore, the Gantt chart creation unit 84e adds an element (first notification element) for notifying that the measurement result of the time required for the process is insufficient to the corresponding upper band graph 91e and lower band graph 92h. . Then, the band graph 90e to which the notification element is added is displayed on the display unit 85a.
In the present embodiment, hatching with a downward slanting diagonal line is adopted as an element for notifying the shortage.

  Next, a procedure for creating the band graph 90 when the measurement result of the execution parameter of the process of interest falls within the abnormal range will be described.

  For example, when the parameter determination unit 84d determines that the measurement result of the execution parameter of the process specified by “child recipe NO” = “1102” (corresponding to the lower band graph 92b: see FIG. 8) is in the abnormal range, Prior to the creation of the band graph 90a, the execution parameter storage processing unit 84b registers information related to the execution parameters in the abnormal range in the execution parameter storage table 83d.

  Thereafter, when the band graph 90a including the process designated by “child recipe NO” = “1102” is created, the Gantt chart creation unit 84e is registered in the recipe table 83a (1) “recipe NO”. = "1100" record (see Fig. 3), (2) registered in the child recipe table 83b, and "child recipe NO" = "1101", "1102" in the two records (see Fig. 4) Based on this, an upper band graph 91a and lower band graphs 92a and 92b are created.

  That is, the Gantt chart creation unit 84e, like the band graph 90e, “unit name”, “start time”, and “end time” in the recipe table 83a, and “start time” and “ Based on the “end time”, the positions and sizes of the upper band graph 91a and the lower band graphs 92a and 92b are determined.

  Here, the parameter determination unit 84d is registered in the (3) execution parameter storage table 83d, and the “parameter value” (see FIG. 6) of the record with “execution parameter storage ID” = “2101101” (4) ) “Allowable lower limit value”, “Allowable upper limit value”, “Warning lower limit value”, and “Warning upper limit value” of the record registered in the child recipe table 83b and having “child recipe NO” = “1102”, Therefore, it is determined that an abnormality has occurred in the process specified by “child recipe NO” = “1102” (corresponding to the lower band graph 92b).

  Therefore, the Gantt chart creation unit 84e adds an element (second notification element) for notifying the occurrence of abnormality to the corresponding upper band graph 91a and lower band graph 92b based on the determination result of the parameter determination unit 84d. Then, the band graph 90a to which the notification element is added is displayed on the display unit 85a. In the present embodiment, a notification symbol (not only a character string but also a mark) in which “×” is displayed in a circle is adopted as an element for notifying the occurrence of an abnormality.

  Next, a procedure for creating the band graph 90 will be described in the case where the target process has departed from the normal execution timing and the measurement result of the execution parameter of the target process is within the warning range.

  For example, when the parameter determination unit 84d determines that the measurement result of the execution parameter of the process specified by “child recipe NO” = “2102” (corresponding to the lower band graph 92e: see FIG. 8) is within the warning range. The execution parameter storage processing unit 84b registers, in the execution parameter storage table 83d, information related to the execution parameters that are within the warning range prior to the creation of the band graph 90c.

  Thereafter, when the band graph 90c including the process specified by “child recipe NO” = “2102” is created, the Gantt chart creating unit 84e (1) “recipe NO” = registered in the recipe table 83a = Based on the record “2100” (see FIG. 3) and (2) the two records “child recipe NO” = “2101” and “2102” registered in the child recipe table 83b (see FIG. 4). The upper band graph 91a and the lower band graphs 92a and 92b are created.

  That is, the Gantt chart creation unit 84e, like the band graphs 90a and 90e, “unit name”, “start time”, and “end time” in the recipe table 83a and “start time” in the child recipe table 83b. Based on the “end time”, the position and size of the upper band graph 91c and the lower band graphs 92d and 92e are determined.

  Here, for the process specified by “child recipe NO” = “2102” (corresponding to the lower band graph 92e), a value obtained by subtracting “start time” from “end time” stored in advance in the child recipe table 83b. And the value obtained by subtracting the “start time” from the “end time” in the time measurement result storage table 83c, the time measurement result of the required time is larger than the set value. Therefore, when the value obtained by subtracting the set value from the result of measuring the required time falls outside the allowable range, the timing determination unit 84c leaves the process designated by “child recipe NO” = “2102” from the normal execution timing. Therefore, it is determined that the time measurement result of this process exceeds the set value.

  Further, the parameter determination unit 84d is (3) registered in the execution parameter storage table 83d, and the “parameter value” (see FIG. 6) of the record with “execution parameter storage ID” = “2101102” (4) From the “allowable lower limit value”, “allowable upper limit value”, “warning lower limit value”, and “warning upper limit value” of the record registered in the child recipe table 83b and having “child recipe NO” = “2102” , It is determined that the process designated by “child recipe NO” = “2102” (corresponding to the lower band graph 92e) is in a warning state.

  Therefore, the Gantt chart creation unit 84e exceeds the measurement result of the time required for the process in the corresponding upper band graph 91c and lower band graph 92e based on the determination results of the timing determination unit 84c and the parameter determination unit 84d. An element for notifying (first notification element) and an element for notifying that the process is in a warning state (second notification element) are added. Then, the band graph 90c to which the notification element is added is displayed on the display unit 85a.

  In the present embodiment, hatching with an upward-sloping diagonal line is adopted as an element for notifying excess. As an element for notifying a warning state, a notification symbol displaying “!” In a rounded triangle is adopted.

  As described above, when the target process leaves the normal execution timing (that is, the time measurement result of the required time is insufficient or exceeded), or the measurement result of the execution parameter of the target process is within the warning range or the abnormal range. In the case, the notification elements such as hatching and notification symbols are added to the upper band graph 91 and the lower band graph 92 corresponding to the process of interest. Therefore, the user can easily grasp whether or not the execution status of each process is normal by determining the presence or absence of the notification element.

<7. Detailed information display area creation procedure>
9 to 11 are diagrams showing an example of the detailed information display area 93 (93a to 93c) for displaying the execution status of the process of interest. Here, a procedure for creating the detailed information display area 93 (93a to 93b) displayed in an overlapping manner on the Gantt chart 85c will be described with reference to FIGS.

  Here, the detailed information display area 93a (second display area) is designated among the information (execution parameter related information) related to a plurality of execution parameters stored in the child recipe table 83b and the execution parameter storage table 83d. It is a dialog box that displays information (second related information) corresponding to a process. On the other hand, the detailed information display area 93b (first display area) is a specified process among information related to a plurality of execution timings (execution timing related information) stored in the child recipe table 83b and the timing result storage table 83c. Is a dialog box for displaying information (first related information) corresponding to.

  In the following description, the detailed information display areas 93a and 93b are also collectively referred to as a detailed information display area 93.

  First, an example of a procedure for creating the detailed information display area 93a corresponding to the target process when the measurement result of the execution parameter of the target process is within the abnormal range will be described.

  As shown in FIG. 9, a notification symbol for notifying the occurrence of abnormality is added to the lower band graph 92b. In this case, when the user operates the operation unit 87 and designates the lower band graph 92b with the pointer P displayed on the screen (second designation operation), the control unit 80 corresponds to the lower band graph 92b. “Child recipe NO” (= “1102”) is input.

  Here, in the present embodiment, the movement of the pointer P may be performed by the mouse or keyboard of the operation unit 87, or may be performed by another input device.

  Subsequently, the detailed information extraction unit 84f extracts a record that is the same as the input “child recipe NO” from the child recipe table 83b (see FIG. 4) and the execution parameter storage table 83d (see FIG. 6). As a result, a record with “child recipe NO” = “1102” is extracted from the child recipe table 83b, and a record with “execution parameter storage ID” = “2101101” is extracted from the execution parameter storage table 83d.

  Subsequently, the Gantt chart creation unit 84e obtains the values of “time”, “parameter name”, and “parameter value” from the record extracted from the execution parameter storage table 83d from the record extracted from the child recipe table 83b. Each value of “allowable lower limit value”, “allowable upper limit value”, “warning lower limit value”, and “warning upper limit value” is acquired.

  Subsequently, the parameter determination unit 84d determines the notification level based on each acquired value. In this case, since the acquired “parameter value” is within the abnormal range, the parameter determination unit 84d determines that the notification level is “abnormal occurrence”.

  Subsequently, the Gantt chart creation unit 84e is arranged such that the values acquired from the child recipe table 83b and the execution parameter storage table 83d and the notification level acquired as a determination result of the parameter determination unit 84d are arranged at predetermined positions. Then, a detailed information display area 93a is created. Then, the detailed information display area 93a created by the Gantt chart creating unit 84e is displayed on the display unit 85a by the drawing processing of the display processing unit 85 (see FIG. 9).

  Next, an example of a procedure for creating the detailed information display area 93b corresponding to the target process when the time required for the target process is insufficient will be described.

  As shown in FIG. 10, hatching indicating that the time required for the process of interest is insufficient is added to the lower band graph 92h. In this case, when the user operates the operation unit 87 and designates the lower band graph 92h with the pointer P displayed on the screen (first designation operation), the control unit 80 corresponds to the lower band graph 92h. “Child recipe NO” (= “3201”) is input.

  Subsequently, the detailed information extraction unit 84f extracts a record that is the same as the input “child recipe NO” from the child recipe table 83b (see FIG. 4) and the timing result storage table 83c (see FIG. 5). As a result, a record “child recipe NO” = “3201” is extracted from the child recipe table 83b, and a record “execution timing storage ID” = “1101108” is extracted from the time measurement result storage table 83c.

  Subsequently, the Gantt chart creation unit 84e obtains the values of “start time” and “end time” from the record extracted from the child recipe table 83b, and “start time” and “value from the record extracted from the time measurement result storage table 83c. Each value of “end time” is acquired.

  Further, the Gantt chart creation unit 84e subtracts the “start time” from the “end time” extracted from the child recipe table 83b to obtain a set value for the required time. Similarly, the Gantt chart creation unit 84e subtracts the “start time” from the “end time” extracted from the time measurement result storage table 83c to obtain the time measurement result of the required time.

  Subsequently, the timing determination unit 84c determines the separation status based on the set value of the required time and the time measurement result. In this case, the timing determination unit 84c determines that the timing determination unit 84c is in the disengagement state because the time measurement result is smaller than the set value and the value obtained by subtracting the set value from the time measurement result is outside the allowable range. Is determined to be “insufficient”.

  Subsequently, the Gantt chart creation unit 84e sets the “start time” and “end time” values acquired from the time measurement result storage table 83c, the set values and time measurement results of the required time, and the determination result of the time measurement result storage table 83c. The detailed information display area 93b is created so that the disengagement status acquired as is placed at a predetermined position.

  Then, the detailed information display area 93b created by the Gantt chart creating unit 84e is displayed on the display unit 85a by the drawing process of the display processing unit 85, as with the detailed information display area 93a (see FIG. 10).

  Subsequently, when the measurement result of the execution parameter of the target process is within the warning range and the time measurement result of the required time of the target process is insufficient with respect to the set value, the detailed information display area 93a corresponding to the target process is displayed. An example of the creation procedure of 93b will be described.

  As shown in FIG. 11, the lower band graph 92e is added with a notification symbol for notifying that a warning state has been established and hatching indicating that the time required for the process of interest has been exceeded. In this case, when the user operates the operation unit 87 and designates the lower band graph 92e with the pointer P displayed on the screen (first and second designation operations), the control unit 80 has the lower band graph 92e. “Child recipe NO” (= “2102”) is input.

  Subsequently, the detailed information extraction unit 84f records the same record as the input “child recipe NO”, the child recipe table 83b (see FIG. 4), the time measurement result storage table 83c (see FIG. 5), and the execution parameter storage. Extracted from the table 83d (see FIG. 6). As a result, a record with “child recipe NO” = “2102” from the child recipe table 83b and a record with “execution timing storage ID” = “1101107” from the timing result storage table 83c are stored in the execution parameter storage table 83d. Records from which “execution parameter storage ID” = “2101102” is extracted.

  Subsequently, the Gantt chart creation unit 84e obtains each value of “start time” and “end time” from the record extracted from the time measurement result storage table 83c, and “start time” and “value from the record extracted from the child recipe table 83b. Each value of “end time” is acquired.

  Further, the Gantt chart creation unit 84e subtracts the “start time” from the “end time” extracted from the child recipe table 83b to obtain a set value for the required time. Similarly, the Gantt chart creation unit 84e subtracts the “start time” from the “end time” extracted from the time measurement result storage table 83c to obtain the time measurement result of the required time.

  Furthermore, the Gantt chart creation unit 84e obtains the values of “time”, “parameter name”, and “parameter value” from the record extracted from the execution parameter storage table 83d, from the record extracted from the child recipe table 83b. Each value of “allowable lower limit value”, “allowable upper limit value”, “warning lower limit value”, and “warning upper limit value” is acquired.

  Subsequently, the timing determination unit 84c determines the departure state based on the set value of the calculated required time and the time measurement result. In this case, the time measurement result of the required time is larger than the set value, and the value obtained by subtracting the set value from the time measurement result of the required time is out of the allowable range. It is determined that it is “excess”.

  Subsequently, the parameter determination unit 84d determines the notification level based on each acquired value. In this case, since the acquired “parameter value” falls within the warning range, the parameter determination unit 84d determines that the notification level is “warning state”.

  Subsequently, the Gantt chart creation unit 84e is arranged such that the values acquired from the child recipe table 83b and the execution parameter storage table 83d and the notification level acquired as a determination result of the parameter determination unit 84d are arranged at predetermined positions. Then, a detailed information display area 93a is created.

  In addition, the Gantt chart creation unit 84e sets the “start time” and “end time” values acquired from the time measurement result storage table 83c, the set values and time measurement results of the required time, and the determination results of the time measurement result storage table 83c. The detailed information display area 93b is created so that the acquired withdrawal situation is arranged at a predetermined position.

  Then, the detailed information display areas 93a and 93b created by the Gantt chart creation unit 84e are displayed on the display unit 85a by the drawing processing of the display processing unit 85 (see FIG. 11).

  As described above, when the hatched lower band graph 92 is designated by the designation operation (first designation operation) from the operation unit 87, the child recipe table 83b and time count stored in the large-capacity storage unit 83 are designated. Detailed information corresponding to the designated process is extracted from the result storage table 83c. Then, the Gantt chart creating unit 84e creates a detailed information display area 93a that displays detailed information (first related information) in accordance with the designated operation.

  When the lower band graph 92 to which the notification symbol is added is designated by the designation operation (second designation operation) from the operation unit 87, the child recipe table 83b and the execution parameter stored in the large-capacity storage unit 83 are specified. Detailed information corresponding to the designated process is extracted from the storage table 83d. Then, the Gantt chart creation unit 84e creates a detailed information display area 93b that displays detailed information (second related information) in accordance with the designated operation.

  Furthermore, when the lower band graph 92 to which the notice symbol and the hatching are added is designated, the Gantt chart creating unit 84e creates detailed information display areas 93a and 93b.

  As a result, as shown in FIGS. 9 to 11, a detailed information display area is superimposed on the Gantt chart 85c on the display unit 85a in accordance with the designated operation (first and / or second designated operation). 93 is displayed. For this reason, the user can easily obtain detailed information on processes whose timing results are out of the allowable range or processes whose execution parameters are within the warning range or abnormal range without switching to another screen. Can be confirmed.

<8. Advantages of the substrate processing apparatus of the present embodiment>
As described above, the user of the substrate processing apparatus 1 according to the present embodiment finds the band graph 90 in which the same lot is the processing target from the plurality of band graphs 90 displayed on the display unit 85a. be able to. In addition, the user can easily grasp the execution status of the process executed in each chemical solution processing unit 10 (10a, 10b), 100 from each band graph 90 displayed on the display unit 85a. Therefore, the user can perform the same screen without switching between the substrate processing flow executed for each lot and the process schedule executed in each processing unit 10 (10a, 10b), 100. Can be grasped from.

<9. Modification>
Although the embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, and various modifications can be made.

  (1) In the present embodiment, each processing unit 10 (10a, 10b), 100 is a so-called batch type substrate processing unit, and is collectively applied to each lot (a substrate group composed of a plurality of substrates). However, the present invention is not limited to this. For example, as the processing unit, a so-called single-wafer type (a method of processing substrates one by one) may be used. In this case, the upper band graph 91 (see FIGS. 7 to 11) displays not the identification information of each lot but the identification information of each substrate. In other words, the identification information displayed on the upper band graph 91 may be information for identifying a single substrate or information for identifying a substrate group composed of a plurality of substrates.

  (2) Also, in the present embodiment, when the execution timing is in the disconnected state or the execution parameter measurement result is outside the allowable range (within the warning range or above), the corresponding upper band graph 91 (first graphic) In the above description, the notification element is added to each of the element) and the lower band graph 92 (second graphic element), but the object to which the notification element is added is not limited to this. If at least a notification element is added to the lower band graph 92, the user can grasp the execution status of each process.

  (3) In the present embodiment, the Gantt chart creation unit 84e displays the detailed information when the lower band graph 92 with a hatched line or the lower band graph 92 with a notice symbol added is designated. Although the description has been given assuming that the region 93 is created, the present invention is not limited to this. The detailed information display area 93 may be displayed even when the lower band graph 92 to which both the notice symbol and the hatching are added is designated. In this case, unnecessary items such as the notification level of the detailed information display area 93a and the leaving status of the detailed information display area 93b are excluded from the display targets.

  (4) In the present embodiment, the recipe table 83a, the child recipe table 83b, the time measurement result storage table 83c, and the execution parameter storage table 83d have been described as being stored in the large-capacity storage unit 83. The place where the tables 83a to 83d are stored is not limited to this.

  For example, when a sufficient storage capacity can be ensured, each table 83 a to 83 d is copied from the large capacity storage unit 83 to the RAM 81 when the substrate processing apparatus 1 is started, and subsequent data access is performed by the RAM 81 instead of the large capacity storage unit 83. May be performed. Further, when a readable / writable nonvolatile memory is used as the ROM 82 and a sufficient storage capacity can be secured, the tables 83 a to 83 d may be stored in the ROM 82.

  (5) In the present embodiment, the tables 83a to 83d are stored in the same storage unit (large-capacity storage unit 83), and data access to the same storage unit (large-capacity storage unit 83) is performed. However, the present invention is not limited to this. For example, when reading / writing the recipe table 83a and the child recipe table 83b, when reading / writing the execution parameter storage table 83d in the large-capacity storage unit 83, when reading / writing the timing result storage table 83c, May access the ROM 82 respectively.

  (6) In the present embodiment, the “time” field of the execution parameter storage table 83d has been described as storing the time when the measurement result of the execution parameter is within the warning range or the abnormal range. However, the present invention is not limited to this. For example, the time when the record is registered may be stored in the execution parameter storage table 83d.

  (7) Further, in the present embodiment, the function of storing data in the time measurement result storage table 83c and the execution parameter storage table 83d by the time measurement result storage processing unit 84a and the execution parameter storage processing unit 84b, the schedule determination unit 84c and the parameter determination The determination function by the unit 84d, the function of creating a graphic element by the Gantt chart creation unit 84e, and the function of extracting data by the detailed information extraction unit 84f have been described as being implemented by software by the CPU 84. It is not limited to. For example, these functions may be realized by hardware such as an electronic circuit.

It is a figure which shows an example of the whole structure of the substrate processing apparatus in embodiment of this invention. It is a block diagram which shows an example of a structure of a control unit. It is a figure which shows an example of the data structure of a recipe table. It is a figure which shows an example of the data structure of a child recipe table. It is a figure which shows an example of the data structure of a time measurement result storage table. It is a figure which shows an example of the data structure of an execution parameter storage table. It is a figure which shows an example of a structure of a Gantt chart. It is a figure which shows an example of a structure of a Gantt chart. It is a figure which shows an example of a detailed information display area. It is a figure which shows an example of a detailed information display area. It is a figure which shows an example of a detailed information display area.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 10 (10a, 10b) Chemical solution processing unit 80 Control unit 83 Mass storage part 83a Recipe table 83b Child recipe table 83c Timekeeping result storage table 83d Execution parameter storage table 84 CPU
84a Time measurement result storage processing unit 84b Execution parameter storage processing unit 84c Timing determination unit (first determination unit)
84d Parameter determination unit (second determination unit)
84e Gantt chart creation part (creation part)
84f Detailed information extraction unit (first and second extraction units)
85a Display unit 87 Operation unit 90 Band graph 91 (91a to 91e) Upper band graph 92 (92a to 92h) Lower band graph 93 (93a, 93b) Detailed information display area 100 Pure water treatment unit W substrate

Claims (8)

In substrate processing equipment,
A plurality of processing units for performing processing on a substrate;
A creation unit that creates a schedule of processing performed on a substrate in each processing unit as a graphic element extending in the time axis direction;
A first determination unit for determining whether or not a time measurement result of a process constituting a process executed on the substrate is within an allowable range;
A second determination unit that determines whether or not the measurement result of the execution parameter is within a warning range for the execution parameter of the device that operates along with the execution of the step;
A display unit for displaying the graphic element created by the creation unit on a screen;
A storage unit;
Equipped with a,
As before Symbol graphic elements are arranged along the time for each corresponding processing unit direction, determine the placement of each graphic element,
(A) The creation unit
A first graphic element indicating identification information of the substrate;
A second graphic element indicating the schedule of the process for each process;
And creating the graphic element having
When it is determined by the first determination unit that the time measurement result is outside the allowable range, a first notification element is added to the corresponding graphic element,
When the second determination unit determines that the measurement result falls within the warning range, a second notification element is added to the corresponding graphic element,
(B) The display unit
For the graphic element to which the notification element is added in the creation unit, the graphic element is displayed in a state in which the notification element is added,
The substrate processing apparatus , wherein the graphic element is simply displayed for the graphic element to which the notification element is not added in the creation unit . In substrate processing equipment,
A plurality of processing units for performing processing on a substrate;
A creation unit that creates a schedule of processing performed on a substrate in each processing unit as a graphic element extending in the time axis direction;
A first determination unit for determining whether or not a time measurement result of a process constituting a process executed on the substrate is within an allowable range;
A second determination unit that determines whether or not the measurement result of the execution parameter is within an abnormal range for the execution parameter of the device that operates along with the execution of the step;
A display unit for displaying the graphic element created by the creation unit on a screen;
A storage unit;
With
Determining the arrangement of each graphic element so that the graphic element is arranged along the time direction for each corresponding processing unit;
(A) The creation unit
A first graphic element indicating identification information of the substrate;
A second graphic element indicating the schedule of the process for each process;
And creating the graphic element having
When it is determined by the first determination unit that the time measurement result is outside the allowable range, a first notification element is added to the corresponding graphic element,
When the second determination unit determines that the measurement result falls within the abnormal range, a second notification element is added to the corresponding graphic element,
(B) The display unit
For the graphic element to which the notification element is added in the creation unit, the graphic element is displayed in a state in which the notification element is added,
The substrate processing apparatus, wherein the graphic element is simply displayed for the graphic element to which the notification element is not added in the creation unit. In the substrate processing apparatus of Claim 1 or Claim 2,
The creating unit adds the first notification element to at least the second graphic element of the graphic elements. In the substrate processing apparatus of Claim 1 or Claim 2,
The said processing part adds the said 1st notification element to each of the said 1st and 2nd figure element, The substrate processing apparatus characterized by the above-mentioned. In the substrate processing apparatus of Claim 3 or Claim 4,
When the second graphic element to which the first notification element is added is designated by the first designation operation from the operation unit, it is designated from a plurality of execution timing related information stored in the storage unit. A first extraction unit for extracting first related information corresponding to the second graphic element;
Further comprising
The creation unit further creates a first display area for arranging the first related information extracted by the first extraction unit,
The substrate processing apparatus, wherein the display unit further displays the first display area created by the creation unit in accordance with the first designation operation. The substrate processing apparatus according to claim 1 , wherein:
The said preparation part adds the said 2nd notification element to the said 2nd graphical element corresponding at least among the said graphic elements, The substrate processing apparatus characterized by the above-mentioned. The substrate processing apparatus according to claim 1 , wherein:
The said processing part adds the said 2nd notification element to the said 1st and 2nd graphic element, The substrate processing apparatus characterized by the above-mentioned. In the substrate processing apparatus of Claim 6 or Claim 7 ,
When the second graphic element to which the second notification element is added is designated by the second designation operation from the operation unit, the designated one is specified from a plurality of execution parameter related information stored in the storage unit. A second extraction unit for extracting second related information corresponding to the second graphic element;
Further comprising
The creating unit further creates a second display area for arranging the second related information extracted by the second extracting unit;
The substrate processing apparatus, wherein the display unit further displays the second display area created by the creation unit in accordance with the second designation operation.

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