JP5266964B2 - 基板搬送システム、半導体製造装置および基板位置算出方法 - Google Patents

基板搬送システム、半導体製造装置および基板位置算出方法 Download PDF

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JP5266964B2
JP5266964B2 JP2008217130A JP2008217130A JP5266964B2 JP 5266964 B2 JP5266964 B2 JP 5266964B2 JP 2008217130 A JP2008217130 A JP 2008217130A JP 2008217130 A JP2008217130 A JP 2008217130A JP 5266964 B2 JP5266964 B2 JP 5266964B2
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substrate
data
encoder
sensor signal
motor
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JP2010056161A5 (enExample
JP2010056161A (ja
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正道 稲永
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2008217130A 2008-08-26 2008-08-26 基板搬送システム、半導体製造装置および基板位置算出方法 Active JP5266964B2 (ja)

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JP2008217130A JP5266964B2 (ja) 2008-08-26 2008-08-26 基板搬送システム、半導体製造装置および基板位置算出方法

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JP2010056161A5 JP2010056161A5 (enExample) 2012-01-19
JP5266964B2 true JP5266964B2 (ja) 2013-08-21

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6710518B2 (ja) 2015-12-03 2020-06-17 東京エレクトロン株式会社 搬送装置及び補正方法
JP6581145B2 (ja) 2017-05-01 2019-09-25 ファナック株式会社 システムおよびコネクタ
JP6958338B2 (ja) * 2017-12-22 2021-11-02 東京エレクトロン株式会社 基板処理装置及び基板処理装置の運転方法
JP7559073B2 (ja) * 2020-09-03 2024-10-01 川崎重工業株式会社 基板搬送ロボットシステム
JP7670575B2 (ja) * 2021-08-03 2025-04-30 株式会社日立産機システム サーボシステムおよびサーボシステムの制御方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63139687A (ja) * 1986-11-28 1988-06-11 株式会社日立製作所 産業用ロボツトの位置検出方式
JPH05314610A (ja) * 1992-05-08 1993-11-26 Fujitsu Ten Ltd ディスク状記録媒体自動交換装置の制御方法
JPH09148403A (ja) * 1995-11-22 1997-06-06 Dainippon Screen Mfg Co Ltd カセット内基板検出装置
US5980194A (en) * 1996-07-15 1999-11-09 Applied Materials, Inc. Wafer position error detection and correction system
JP2005051705A (ja) * 2003-07-31 2005-02-24 Olympus Corp チャタリング除去回路及びこの回路を備えたデジタルカメラ並びに電子機器
JP2006174604A (ja) * 2004-12-16 2006-06-29 Canon Inc モータ制御装置
JP4961895B2 (ja) * 2006-08-25 2012-06-27 東京エレクトロン株式会社 ウェハ搬送装置、ウェハ搬送方法及び記憶媒体

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