JP5264055B2 - 電界放射チップ - Google Patents
電界放射チップ Download PDFInfo
- Publication number
- JP5264055B2 JP5264055B2 JP2006004635A JP2006004635A JP5264055B2 JP 5264055 B2 JP5264055 B2 JP 5264055B2 JP 2006004635 A JP2006004635 A JP 2006004635A JP 2006004635 A JP2006004635 A JP 2006004635A JP 5264055 B2 JP5264055 B2 JP 5264055B2
- Authority
- JP
- Japan
- Prior art keywords
- field emission
- carbon
- substrate
- cathode substrate
- carbon structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 82
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 70
- 229910052799 carbon Inorganic materials 0.000 claims description 15
- 238000004519 manufacturing process Methods 0.000 description 15
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 15
- 238000000034 method Methods 0.000 description 14
- 238000010894 electron beam technology Methods 0.000 description 13
- 150000001721 carbon Chemical class 0.000 description 12
- 239000007789 gas Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 238000001093 holography Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000002134 carbon nanofiber Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Carbon And Carbon Compounds (AREA)
Description
真空チャンバ2内に水素ガスを導入する。
真空チャンバ2内に水素ガスとメタンガスとを導入する。
水素ガス流量、メタンガス流量、圧力は第2工程と同じである。
水素ガス流量は第3工程と同じである。
水素ガス流量は第4工程と同じである。
4 第1平板電極
6 第2平板電極
8 直流電源
10 陰極基板
12 治具
14 炭素構造体
16 電界放射チップ
Claims (3)
- 陰極基板の表面に炭素核が形成され、この炭素核の表面にナノメートルサイズの網目状のウォール状物と、このウォール状物よりも高さが高い微細突起を備えて全体がボール形状になっている炭素構造体が形成されていることを特徴とする電界放射チップ。
- 前記陰極基板は、ディスク形状の基板面を有する、請求項1に記載の電界放射チップ。
- 前記陰極基板は、円柱状の基板である、請求項2に記載の電界放射チップ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006004635A JP5264055B2 (ja) | 2006-01-12 | 2006-01-12 | 電界放射チップ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006004635A JP5264055B2 (ja) | 2006-01-12 | 2006-01-12 | 電界放射チップ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007186368A JP2007186368A (ja) | 2007-07-26 |
JP5264055B2 true JP5264055B2 (ja) | 2013-08-14 |
Family
ID=38341801
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006004635A Expired - Fee Related JP5264055B2 (ja) | 2006-01-12 | 2006-01-12 | 電界放射チップ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5264055B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5036465B2 (ja) * | 2007-09-14 | 2012-09-26 | 義久 石黒 | 中空陰極の製造用治具と製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001076612A (ja) * | 1999-09-03 | 2001-03-23 | Noritake Co Ltd | 電界電子放出装置 |
JP4370903B2 (ja) * | 2003-12-24 | 2009-11-25 | Jfeエンジニアリング株式会社 | カーボンナノチューブ設置基板 |
JP2005219950A (ja) * | 2004-02-04 | 2005-08-18 | Nikon Corp | 炭素材料、炭素材料の製造方法、ガス吸着装置及び複合材料 |
JP5544503B2 (ja) * | 2004-05-24 | 2014-07-09 | 独立行政法人物質・材料研究機構 | マリモカーボン及びその製造方法並びにその製造装置 |
-
2006
- 2006-01-12 JP JP2006004635A patent/JP5264055B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2007186368A (ja) | 2007-07-26 |
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