JP5264049B2 - Work transfer device and work inspection device - Google Patents

Work transfer device and work inspection device Download PDF

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JP5264049B2
JP5264049B2 JP2005203781A JP2005203781A JP5264049B2 JP 5264049 B2 JP5264049 B2 JP 5264049B2 JP 2005203781 A JP2005203781 A JP 2005203781A JP 2005203781 A JP2005203781 A JP 2005203781A JP 5264049 B2 JP5264049 B2 JP 5264049B2
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workpiece
rotary table
gap
fixed table
inspection
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JP2007022697A (en
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邦秀 芦澤
英樹 若杉
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AUTEC MECHANICAL CO., LTD.
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AUTEC MECHANICAL CO., LTD.
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Abstract

<P>PROBLEM TO BE SOLVED: To prevent a chip part from being thrown out of a rotary table even if the rotary table is rotated at high speed when sliding the chip part, which is positioned on the rotary table, to convey it on a fixed table with rotation of the rotary table. <P>SOLUTION: This workpiece conveying device is provided with the fixed table 24, the rotary table 13 rotatably arranged between the fixed table 24, a clearance part 26 formed between opposite surfaces of the rotary table 13 and the fixed table 24, and a workpiece positioning fixture hole 31 opened in the rotary table 13. A workpiece 12 positioned in the fixture hole 31 is sucked to the fixed table 24 by the air sucked to the clearance part 26, and in this condition, the rotary table 13 is rotated to slide the workpiece 12 to convey it on the fixed table 24. <P>COPYRIGHT: (C)2007,JPO&amp;INPIT

Description

本発明は、微小ワークを高速で搬送するためのワーク搬送装置及び高速搬送されたワークを検査するためのワーク検査装置に関するものである。   The present invention relates to a workpiece transfer device for transferring a minute workpiece at a high speed and a workpiece inspection device for inspecting a workpiece transferred at a high speed.

微小の電子部品、例えばチップ状の抵抗器やコンデンサ、発光ダイオードなどを一個ずつ搬送してその特性を検査する装置として、例えば特許文献1に記載の部品検査装置が知られている。この部品検査装置は、パーツフィーダから無振動トラフに供給されるチップ部品を吸引ノズルによって吸引し、前記無振動トラフと吸引ノズルとの間に配置されたCCDカメラによって飛走中のチップ部品を撮像し、その映像を画像処理することでチップ部品の外観検査を行なうものである。   For example, a component inspection apparatus described in Patent Document 1 is known as an apparatus for inspecting characteristics of a minute electronic component such as a chip-shaped resistor, capacitor, or light-emitting diode that is conveyed one by one. This component inspection apparatus sucks a chip component supplied from a parts feeder to a vibration-free trough with a suction nozzle, and images a flying chip component with a CCD camera disposed between the vibration-free trough and the suction nozzle. The visual inspection of the chip component is performed by image processing the video.

一方、チップ部品の電気的特性を検査する手段としては、例えば、パーツフィーダから供給されるチップ部品を回転テーブル上で位置決めし、回転テーブルの回転に伴って搬送されるチップ部品に対して、一個ずつプローブを押し当てて導通させ、その時の電気特性を検査するものがある。   On the other hand, as a means for inspecting the electrical characteristics of the chip component, for example, the chip component supplied from the parts feeder is positioned on the rotary table, and one chip component is conveyed with the rotation of the rotary table. There is one that presses the probe one by one to make it conductive and inspects the electrical characteristics at that time.

しかしながら、チップ部品の電気的特性の検査を高速処理するためには、回転テーブルを高速回転させて、チップ部品を高速で搬送させる必要があるが、回転時の遠心力などによってチップ部品が回転テーブルから振り飛ばされるおそれがある。特に、プローブと接触する電極が下面側に設けられているタイプのチップ部品では、チップ部品の下面を吸引によって位置決めできないので、このような問題が発生し易くなる。そのために、回転テーブルを高速で回転させることができず、結果的に電気的特性の検査を高速処理することができないことになる。
特開2002−28578
However, in order to process the inspection of the electrical characteristics of the chip parts at a high speed, it is necessary to rotate the rotary table at a high speed and transport the chip parts at a high speed. There is a risk of being shaken off. In particular, in a chip component of a type in which an electrode that contacts the probe is provided on the lower surface side, such a problem is likely to occur because the lower surface of the chip component cannot be positioned by suction. For this reason, the rotary table cannot be rotated at a high speed, and as a result, the inspection of electrical characteristics cannot be performed at a high speed.
JP 2002-28578 A

そこで、本発明が解決しようとする課題は、回転テーブルにおけるチップ部品の位置決めを確実なものとして、回転テーブルを高速回転させてもチップ部品が回転テーブルから振り飛ばされないようにしたワーク搬送装置を提供することである。   Accordingly, the problem to be solved by the present invention is to provide a workpiece transfer device that ensures the positioning of the chip component on the rotary table and prevents the chip component from being shaken off the rotary table even if the rotary table is rotated at a high speed. It is to be.

また、本発明が解決しようとする他の課題は、前記ワーク搬送装置を利用することで、チップ部品の電気的特性の検査を高速で処理できるようにしたワーク検査装置を提供することである。   Another problem to be solved by the present invention is to provide a workpiece inspection apparatus which can process the inspection of electrical characteristics of chip parts at a high speed by using the workpiece conveying apparatus.

かかる目的を達成するために、本発明に係るワーク搬送装置は、固定テーブルと、この固定テーブルの上面との間で回転可能に配置される回転テーブルと、この回転テーブルと前記固定テーブルとが対向する面同士の間に形成される空隙部と、この空隙部と連通し、前記回転テーブルに開設されたワーク位置決め用の治具孔と、前記空隙部の隙間幅を一定に保つために前記固定テーブルと回転テーブルとの間に配置されるボールベアリングと、前記空隙部の隙間幅を常に一定に確保するために回転テーブルを介してボールベアリングに一定の力を加えるスプリングと、を備え、前記治具孔はワークの外形形状とほぼ同一形状に形成され、この治具孔の内周縁と治具孔に位置決めされたワークの外周縁との隙間及び固定テーブルと回転テーブルとの外周縁から前記空隙部内に気体を吸引し、さらに空隙部内の気体を吸引し空隙部内を負圧状態とすることによって前記治具孔に位置決めしたワークの下面を固定テーブルの上面に吸着させ、その状態で回転テーブルを回転することによってワークを固定テーブルの上面上でスライド搬送することを特徴とする。 In order to achieve such an object, a workpiece transfer device according to the present invention includes a fixed table, a rotary table that is rotatably disposed between the upper surface of the fixed table, and the rotary table and the fixed table facing each other. A gap formed between the surfaces to be fixed, a jig hole for positioning a workpiece opened in the rotary table, and the fixed in order to keep the gap width of the gap constant. It includes a ball bearing disposed between the table and the turntable, and a spring applying a constant force to the ball bearing through the rotating table in order to always ensure a constant gap width of the void portion, the jig The tool hole is formed in substantially the same shape as the outer shape of the workpiece. The clearance between the inner peripheral edge of the jig hole and the outer peripheral edge of the work positioned in the jig hole, the fixed table and the rotary table The gas sucked from the outer periphery into the gap portion of the, adsorbed lower surface of the workpiece has been positioned in the jig holes on the upper surface of the stationary table by further negative pressure state a gap portion gas was suction in the gap portion The workpiece is slid and conveyed on the upper surface of the fixed table by rotating the rotary table in this state.

また、本発明に係るワーク検査装置は、前記のワーク搬送装置と、このワーク搬送手段によって搬送されるワークを検査するための検査手段とを備えることを特徴とする。   A workpiece inspection apparatus according to the present invention includes the workpiece conveyance device and an inspection unit for inspecting a workpiece conveyed by the workpiece conveyance unit.

本発明のワーク搬送装置は、ワークが固定テーブルに吸着された状態で位置決めされるので、回転テーブルを高速回転させてもワークが回転テーブルから振り飛ばされることがなく、ワークを高速でスライド搬送することが可能となった。   Since the workpiece transfer device of the present invention is positioned in a state where the workpiece is attracted to the fixed table, the workpiece is not shaken off from the rotary table even if the rotary table is rotated at high speed, and the workpiece is slid and transferred at high speed It became possible.

また、本発明のワーク検査装置は、前記ワーク搬送装置によって高速搬送されるワークに対応して、その電気的特性の検査を高速で処理することができる。   In addition, the workpiece inspection apparatus of the present invention can process the inspection of the electrical characteristics at a high speed corresponding to the workpiece conveyed at high speed by the workpiece conveyance apparatus.

以下、添付図面に基づいて、本発明に係るワーク搬送装置及びワーク検査装置の実施形態を詳細に説明する。図1には本発明に係るワーク搬送装置10と、このワーク搬送装置10を組み込んだワーク検査装置11が示されている。ワーク検査装置11は、例えば微小の電子部品であるチップ抵抗器やチップコンデンサあるいはチップLEDなどのワーク12の電気的特性を検査するために用いられ、ワーク搬送装置10の回転テーブル13上にワーク12を一個ずつ供給するためのパーツフィーダ14、回転テーブル13によって搬送されるワーク12の電気的特性を検査する検査手段15、検査済のワーク12を特性毎に分類して回収するワーク振分手段16などを備える。   Hereinafter, embodiments of a workpiece transfer device and a workpiece inspection device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 shows a workpiece transfer apparatus 10 according to the present invention and a workpiece inspection apparatus 11 incorporating the workpiece transfer apparatus 10. The workpiece inspection device 11 is used for inspecting the electrical characteristics of a workpiece 12 such as a chip resistor, a chip capacitor, or a chip LED, which are minute electronic components, and the workpiece 12 is placed on the rotary table 13 of the workpiece conveyance device 10. Parts feeder 14 for supplying the workpieces one by one, inspection means 15 for inspecting the electrical characteristics of the workpieces 12 conveyed by the rotary table 13, and workpiece distribution means 16 for classifying and collecting the inspected workpieces 12 according to their characteristics. Etc.

前記ワーク搬送装置10は、図2乃至図4に示されるように、基台17の上面に回転可能に配置される回転軸18と、この回転軸18にベアリング19を介して支持される固定部材20と、前記回転軸18の上端部にカラー21を介して固定される回転テーブル13とを備える。回転軸18の上端には前記カラー21及び回転テーブル13の中心部を貫通する首部40が設けられ、この首部40に膨出部41を有する頭部42がねじ込み固定されている。また、前記回転軸18の中心部には中空部22が形成されており、この中空部22は回転軸18の下部に連結された吸引管23に連通している。なお、吸引管23の先端は図示外の吸引装置に接続されている。   As shown in FIGS. 2 to 4, the work transfer device 10 includes a rotary shaft 18 rotatably disposed on the upper surface of the base 17, and a fixing member supported on the rotary shaft 18 via a bearing 19. 20 and a rotary table 13 fixed to the upper end portion of the rotary shaft 18 via a collar 21. At the upper end of the rotary shaft 18, a neck portion 40 penetrating the central portion of the collar 21 and the rotary table 13 is provided, and a head portion 42 having a bulging portion 41 is screwed and fixed to the neck portion 40. A hollow portion 22 is formed at the center of the rotating shaft 18, and the hollow portion 22 communicates with a suction pipe 23 connected to the lower portion of the rotating shaft 18. Note that the tip of the suction tube 23 is connected to a suction device (not shown).

前記固定部材20は、上部に円盤状の固定テーブル24を備えており、この固定テーブル24の上面には例えばセラミックスのような硬質の絶縁材料からなるワーク載置部25がリング状に形成されている。また、固定テーブル24と前記カラー21との間及びカラー21には、前記回転軸18の中空部22に連通するそれぞれの空気通路27,28が形成されている。   The fixing member 20 includes a disk-shaped fixing table 24 at the top, and a work mounting portion 25 made of a hard insulating material such as ceramic is formed in a ring shape on the upper surface of the fixing table 24. Yes. Air passages 27 and 28 communicating with the hollow portion 22 of the rotary shaft 18 are formed between the fixed table 24 and the collar 21 and in the collar 21.

一方、前記固定テーブル24の上方には、該固定テーブル24の外形形状と略同一形状からなる前記回転テーブル13が配置される。この回転テーブル13は、前記回転軸18の上端に連結されているカラー21にピン43より回転トルクのみを伝達しており、回転軸18の回転に伴ってカラー21と共に固定テーブル24上を回転する。この回転テーブル13の下面と固定テーブル24のワーク載置面25との間には僅かな空隙部26が形成されている。この空隙部26は、回転テーブル13とワーク載置面25とが対向する全面に亘って設けられており、固定テーブル24とカラー21との間及びカラー21に設けられた空気通路27,28を通じて前記回転軸18の中空部22に連通している。   On the other hand, above the fixed table 24, the rotary table 13 having substantially the same shape as the outer shape of the fixed table 24 is disposed. The rotary table 13 transmits only the rotational torque from the pin 43 to the collar 21 connected to the upper end of the rotary shaft 18, and rotates on the fixed table 24 together with the collar 21 as the rotary shaft 18 rotates. . A slight gap 26 is formed between the lower surface of the rotary table 13 and the work placement surface 25 of the fixed table 24. The gap 26 is provided over the entire surface where the rotary table 13 and the work placement surface 25 face each other, and is provided between the fixed table 24 and the collar 21 and through air passages 27 and 28 provided in the collar 21. The rotary shaft 18 communicates with the hollow portion 22.

また、前記固定テーブル24と回転テーブル13との間には、固定テーブル24の上面の凹溝に保持されたボールベアリング29が、ワーク載置面25の内周に沿って配置されている。このボールベアリング29が回転テーブル13の全周に亘って配置されることで、空隙部26の隙間幅が一定に保たれると共に、ワーク載置面25の上面での回転テーブル13のスムーズな回転がボールベアリング29の自転によって確保される。さらに、この実施形態では前記回転テーブル13の上部に設けられた頭部42と回転テーブル13の上面との間にスプリング30が配置されている。このスプリング30によって回転テーブル13が押圧され、ボールベアリング29に一定の力が加わることで、前記回転テーブル13の回転時にも空隙部26の隙間幅が常に一定に確保されることになる。前記回転テーブル13の押圧力は、頭部42のねじ込み量を加減したりスプリング30の強さを変えることで調整される。なお、上記の実施形態では空隙部26の隙間幅を一定に保つための保持手段としてールベアリング29を、またールベアリング29に一定の力を加える加重手段としてスプリング30をそれぞれ用いた場合について説明したが、本発明では同様の作用効果を奏するものであれば、これらールベアリング29及びスプリング30に限定されないことは勿論である。
Further, a ball bearing 29 held in a concave groove on the upper surface of the fixed table 24 is disposed between the fixed table 24 and the rotary table 13 along the inner periphery of the workpiece mounting surface 25. By arranging the ball bearing 29 over the entire circumference of the turntable 13, the gap width of the gap portion 26 is kept constant, and the turntable 13 rotates smoothly on the upper surface of the work placement surface 25. Is ensured by the rotation of the ball bearing 29. Further, in this embodiment, a spring 30 is disposed between a head 42 provided on the upper part of the rotary table 13 and the upper surface of the rotary table 13. The rotary table 13 is pressed by the spring 30 and a constant force is applied to the ball bearing 29, so that the gap width of the gap 26 is always kept constant even when the rotary table 13 is rotated. The pressing force of the rotary table 13 is adjusted by adjusting the screwing amount of the head 42 or changing the strength of the spring 30. Incidentally, there has been described a case where the baud bearings 29 as a holding means for maintaining the gap width of the void portion 26 in a fixed, also with a spring 30, respectively as a weighted means for applying a constant force to the baud bearings 29 in the above embodiment but as long as the present invention provides the same effects, it is of course not limited to baud bearings 29 and spring 30.

前記回転テーブル13にはワーク12を位置決めするための治具孔31が開設されている。この治具孔31は、回転テーブル13の外周に沿って一定間隔毎に複数個設けられており、この実施形態では、図1に示されるように、同一形状の治具孔31が回転テーブル13の全周に10個設けられている。この治具孔31の個数は、回転テーブル13の大きさや搬送スピード、前記検査手段15での処理能力などによって決定される。前記治具孔31は、一つの例では図4及び図5に示されるように、回転テーブル13の回転方向と直交する方向の両側に配置された一対のセラミックス片32a,32bを有し、ワーク12の側面電極33a,33bとの絶縁性を確保している。なお、ワーク12の下面電極34a,34bは、セラミックスなどで形成されたワーク載置部25との間で絶縁性が保たれている。   The rotary table 13 is provided with a jig hole 31 for positioning the workpiece 12. A plurality of jig holes 31 are provided at regular intervals along the outer periphery of the rotary table 13. In this embodiment, as shown in FIG. 1, the jig holes 31 having the same shape are formed on the rotary table 13. Ten are provided on the entire circumference. The number of the jig holes 31 is determined by the size of the rotary table 13, the conveyance speed, the processing capability of the inspection means 15, and the like. In one example, the jig hole 31 has a pair of ceramic pieces 32a and 32b arranged on both sides in a direction orthogonal to the rotation direction of the rotary table 13, as shown in FIGS. Insulation with the 12 side electrodes 33a and 33b is ensured. The lower surface electrodes 34a and 34b of the workpiece 12 are kept insulative with the workpiece mounting portion 25 formed of ceramics or the like.

前記治具孔31は、回転テーブル13を上下に貫通して設けられており、ワーク12の形状にほぼ対応した開口部からなる。この実施形態では四角形のワーク12の形状に対応して開口部の形状がほぼ同じ大きさの四角形であり、ワーク12をその開口部内に収容して位置決めしたときに、ワーク12の周囲に僅かな隙間36が出来る程度である。左右のセラミックス片32a,32bは開口部に面した側にテーパ35a,35bが形成されており、治具孔31にワーク12を収容する際のガイドの役目をする。   The jig hole 31 is provided through the rotary table 13 in the vertical direction, and includes an opening that substantially corresponds to the shape of the workpiece 12. In this embodiment, the shape of the opening is substantially the same size corresponding to the shape of the quadrangular workpiece 12, and when the workpiece 12 is accommodated and positioned in the opening, a slight amount is formed around the workpiece 12. It is a grade which the clearance gap 36 is made. The left and right ceramic pieces 32 a and 32 b are formed with tapers 35 a and 35 b on the side facing the opening, and serve as a guide when the workpiece 12 is accommodated in the jig hole 31.

上記構成からなるワーク搬送装置10にあっては、吸引装置を作動させることで、固定テーブル24と回転テーブル13との間の空隙部26に外部の空気が吸引され、さらにこの吸引された空気が空気通路27,28を通じて前記回転軸18の中空部22及び吸引管23内に吸引される。前記空隙部26に吸引される空気は、主に固定テーブル24と回転テーブル13との外周縁37から吸い込まれるものであるが、治具孔31に収容されたワーク12の外周部の隙間36から吸い込まれる外部の空気も一部に含まれる。前記空隙部26内の空気を吸引することで空隙部26内が負圧状態となるために、前記治具孔31にワーク12を収容した場合、ワーク12が固定テーブル24のワーク載置面25に吸着されることになる。その結果、回転テーブル13を回転させた時には、ワーク12はワーク載置面25に吸着された状態で固定テーブル24の上面をスライド移動するので、仮に回転テーブル13を高スピードで回転させてワーク12を高速搬送したとしても、ワーク12が治具孔31から飛び出してしまうといったことがない。   In the work transfer device 10 having the above-described configuration, by operating the suction device, external air is sucked into the gap portion 26 between the fixed table 24 and the rotary table 13, and the sucked air is further absorbed. The air is sucked into the hollow portion 22 and the suction pipe 23 of the rotary shaft 18 through the air passages 27 and 28. The air sucked into the gap portion 26 is mainly sucked from the outer peripheral edge 37 of the fixed table 24 and the rotary table 13, but from the gap 36 at the outer peripheral portion of the work 12 accommodated in the jig hole 31. Some of the air that is sucked in is also included. Since the air in the space 26 is sucked into the space 26 to be in a negative pressure state, when the work 12 is accommodated in the jig hole 31, the work 12 is mounted on the work placement surface 25 of the fixed table 24. Will be absorbed. As a result, when the rotary table 13 is rotated, the workpiece 12 slides on the upper surface of the fixed table 24 while being attracted to the workpiece placement surface 25. Therefore, the rotary table 13 is temporarily rotated at a high speed. Even if the workpiece 12 is conveyed at a high speed, the workpiece 12 does not jump out of the jig hole 31.

ワーク12が図4に示したようなLEDチップの場合には、基板12aが非常に薄いために、空隙部26の隙間幅が広いと基板12aが空隙部26に入り込むおそれがある。一方、基板12aが入り込まないように隙間幅を狭くすると吸着力が低下してしまう。このように、搬送するワーク12が微小になればなるほど、空隙部26の隙間幅の精度管理が難しくなるが、本発明では上述したように保持手段としてのボールベアリング29を用いることで、さらには加重手段としてのスプリング30を一緒に用いることで、そのような場合でも空隙部26の精度管理を容易かつ確実に実行できる。また、ワーク12のワーク載置面25での吸着力は、前記隙間幅の大きさに加えて吸引力を変えることによっても調整することができる。   When the workpiece 12 is an LED chip as shown in FIG. 4, the substrate 12 a is very thin. Therefore, if the gap width of the gap portion 26 is wide, the substrate 12 a may enter the gap portion 26. On the other hand, if the gap width is narrowed so that the substrate 12a does not enter, the suction force is reduced. As described above, the smaller the workpiece 12 to be conveyed, the more difficult it is to manage the accuracy of the gap width of the gap portion 26. However, in the present invention, by using the ball bearing 29 as the holding means as described above, By using the spring 30 as the weighting means together, the accuracy control of the gap 26 can be easily and reliably executed even in such a case. Further, the suction force of the workpiece 12 on the workpiece placement surface 25 can be adjusted by changing the suction force in addition to the size of the gap width.

上記回転テーブル13の回転によって固定テーブル24上をスライド搬送されたワーク12は、検査手段15によって電気的特性が検査される。ここでの検査では、例えばワーク12が発光ダイオードの場合を例にとると、ワーク12に通電して発光させ、その時の明るさや発光色などを電気的特性として検査する。検査方法の一手段としては、ワーク12を治具孔31に位置決めした状態で検査する方法がある。この方法は、検査時にワーク12が治具孔31から浮き上がらないようにするためにワーク12の上面を何らかの押え手段で押え、この状態で固定テーブル24の下方から貫通させたプローブ(図示せず)をワーク12の下面電極34a,34bに押し当てて電気的導通を図るものである。ワーク12の電気的特性の検査が終了したら、プローブを下面電極34a,34bから離して下方に移動させると同時に、押え手段をワーク12の上面から取り除く。その後、回転テーブル13が再び回転してワーク12を固定テーブル24上でスライド搬送させ、部品振分手段16の位置まで搬送した後、ワーク12を吸引して前記電気的特性にしたがって振り分ける。   The workpiece 12 slid and conveyed on the fixed table 24 by the rotation of the rotary table 13 is inspected for electrical characteristics by the inspection means 15. In this inspection, for example, when the work 12 is a light emitting diode, the work 12 is energized to emit light, and the brightness and emission color at that time are inspected as electrical characteristics. As one means of the inspection method, there is a method of inspecting the workpiece 12 in a state where the workpiece 12 is positioned in the jig hole 31. In this method, in order to prevent the workpiece 12 from floating from the jig hole 31 during the inspection, the upper surface of the workpiece 12 is pressed by some pressing means, and in this state, a probe (not shown) penetrated from below the fixed table 24. Is pressed against the lower surface electrodes 34a and 34b of the workpiece 12 to achieve electrical conduction. When the inspection of the electrical characteristics of the workpiece 12 is completed, the probe is moved downward away from the lower surface electrodes 34a and 34b, and at the same time, the pressing means is removed from the upper surface of the workpiece 12. Thereafter, the rotary table 13 is rotated again, the work 12 is slid and conveyed on the fixed table 24, conveyed to the position of the component sorting means 16, and then the work 12 is sucked and distributed according to the electrical characteristics.

本発明に係るワーク検査装置を示す平面図である。It is a top view which shows the workpiece | work inspection apparatus which concerns on this invention. 本発明に係るワーク搬送装置の全体形状を示す縦断面図である。It is a longitudinal cross-sectional view which shows the whole shape of the workpiece conveyance apparatus which concerns on this invention. 本発明に係るワーク搬送装置の要部の断面図である。It is sectional drawing of the principal part of the workpiece conveyance apparatus which concerns on this invention. 図3におけるA部の拡大図である。It is an enlarged view of the A section in FIG. 本発明に係るワーク搬送装置の治具孔の拡大平面図である。It is an enlarged plan view of the jig hole of the workpiece transfer apparatus according to the present invention.

符号の説明Explanation of symbols

10 ワーク搬送装置
11 ワーク検査装置
12 ワーク
13 回転テーブル
15 検査手段
24 固定テーブル
26 空隙部
29 ボールベアリング(保持手段)
30 スプリング(加重手段)
31 治具孔
33a,33b 側面電極(電極端子)
34a,34b 下面電極(電極端子)
36 隙間
37 外周縁
DESCRIPTION OF SYMBOLS 10 Work conveying apparatus 11 Work inspection apparatus 12 Work 13 Rotary table 15 Inspection means 24 Fixed table 26 Gap part 29 Ball bearing (holding means)
30 Spring (weighting means)
31 Jig hole 33a, 33b Side electrode (electrode terminal)
34a, 34b Bottom electrode (electrode terminal)
36 Clearance 37 Outer edge

Claims (5)

固定テーブルと、
この固定テーブルの上面との間で回転可能に配置される回転テーブルと、
この回転テーブルと前記固定テーブルとが対向する面同士の間に形成される空隙部と、
この空隙部と連通し、前記回転テーブルに開設されたワーク位置決め用の治具孔と
前記空隙部の隙間幅を一定に保つために前記固定テーブルと回転テーブルとの間に配置されるボールベアリングと、
空隙部の隙間幅を常に一定に確保するために回転テーブルを介してボールベアリングに一定の力を加えるスプリングと、
を備え、
前記治具孔はワークの外形形状とほぼ同一形状に形成され、この治具孔の内周縁と治具孔に位置決めされたワークの外周縁との隙間及び固定テーブルと回転テーブルとの外周縁から前記空隙部内に気体を吸引し、さらに前記空隙部内の気体を吸引し空隙部内を負圧状態とすることによって前記治具孔に位置決めしたワークの下面を固定テーブルの上面に吸着させ、その状態で回転テーブルを回転することによってワークを固定テーブルの上面上でスライド搬送することを特徴とするワーク搬送装置。
A fixed table;
A rotary table that is rotatably arranged between the upper surface of the fixed table;
A gap formed between surfaces of the rotary table and the fixed table facing each other;
Communicating with this gap, a jig hole for positioning the workpiece established in the rotary table ,
A ball bearing disposed between the fixed table and the rotary table in order to keep the gap width of the gap portion constant;
A spring that applies a constant force to the ball bearing via the rotary table in order to ensure a constant gap width of the gap,
With
The jig hole is formed in substantially the same shape as the outer shape of the work. A state in which the lower surface of the workpiece positioned in the jig hole is attracted to the upper surface of the fixed table by sucking the gas into the gap and further sucking the gas in the gap to bring the inside of the gap to a negative pressure state. A workpiece transfer apparatus characterized in that the workpiece is slid and transferred on the upper surface of the fixed table by rotating the rotary table.
前記空隙部は固定テーブルと回転テーブルとが対向する全面にほぼ一定の隙間幅で形成され、これら両テーブルの外周縁から空隙部内に気体を吸引する請求項1記載のワーク搬送装置。 2. The workpiece transfer apparatus according to claim 1, wherein the gap is formed with a substantially constant gap width across the entire surface where the fixed table and the rotary table face each other, and gas is sucked into the gap from the outer peripheral edges of both tables. 前記請求項1のワーク搬送装置と、このワーク搬送手段によって搬送されるワークを検査するためのワーク検査手段とを備えることを特徴とするワーク検査装置。 A workpiece inspection apparatus comprising: the workpiece conveyance device according to claim 1; and a workpiece inspection unit for inspecting a workpiece conveyed by the workpiece conveyance unit. 前記ワークが電極端子を備えた電子部品である請求項記載のワーク検査装置。 The workpiece inspection apparatus according to claim 3 , wherein the workpiece is an electronic component having an electrode terminal. 前記ワーク検査手段は、前記電子部品の下面の設けられた電極端子に検査針を押し当てて検査する請求項記載のワーク検査装置。 The workpiece inspection apparatus according to claim 3 , wherein the workpiece inspection means inspects by pressing an inspection needle against an electrode terminal provided on a lower surface of the electronic component.
JP2005203781A 2005-07-13 2005-07-13 Work transfer device and work inspection device Expired - Fee Related JP5264049B2 (en)

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