JP5263590B2 - Closed container lid opening and closing system and lid opening and closing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an FIMS system preventing dust or the like adhering to the lid or the like of a pod from being carried in a mini-environment, in an FIMS system. <P>SOLUTION: A gas nozzle for supplying a clean gas to a space region present between a pod and an opening is arranged adjacently to an opposite side to the pod side opening of this FIMS system. At least two nozzle openings formed in the gas nozzle are arranged in a plane orthogonal to the extension direction of the gas nozzle, and are continuously formed in the extension direction as well by keeping the positional relationship. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a so-called FIMS (Front-Opening Interface Mechanical Standard) system used when a wafer internally held in a transfer container called a pod is transferred between semiconductor processing apparatuses in a semiconductor manufacturing process or the like. More specifically, a so-called FOUP (Front-Opening Unified Pod) used in the FIMS system, which is a hermetically sealed container for accommodating a wafer, and a wafer is transferred to the pod by opening and closing the lid of the pod. The present invention relates to a lid opening / closing system as a FIMS system.

  In recent years, the semiconductor manufacturing process keeps the inside of a processing apparatus, a pod (wafer sealed container), and a very small space for transferring a substrate from the pod to the processing apparatus in a highly clean state, and the cleanliness of other spaces is to some extent. Has been done to maintain the level. The pod has a substantially cubic body having a shelf that can hold a plurality of wafers in parallel and spaced apart from each other, and an opening used for loading and unloading the wafer on one of the surfaces constituting the outer surface. And a lid that closes the opening. The pod where the opening is formed is not the bottom surface of the pod but on one side surface (the surface facing the minute space) and is collectively referred to as FOUP.

  In addition, the above-described minute space enters the inside of the pod through the opening facing the opening of the pod, the door for closing the opening, the other opening on the side of the processing apparatus provided on the semiconductor processing apparatus side, and the opening. And a transfer robot that holds the wafer and passes the other opening on the processing apparatus side to convey the wafer to the processing apparatus side. Moreover, the structure which forms minute space has the mounting base which supports a pod so that a pod opening may face in front of a door. On the upper surface of the mounting table, a positioning pin that is fitted into a positioning hole provided on the lower surface of the pod and defines the mounting position of the pod, and a clamped portion provided on the lower surface of the pod are engaged with the pod. A clamp unit that is fixed to the mounting table is disposed. Usually, the mounting table can move back and forth a predetermined distance with respect to the door direction. When the wafer in the pod is transferred to the processing apparatus, the pod is moved with the pod being placed until the lid of the pod comes into contact with the door, and after the contact, the lid is removed from the pod opening by the door. . By these operations, the inside of the pod and the inside of the processing apparatus communicate with each other through a minute space, and the wafer transfer operation is repeated thereafter. The mounting table, the door, the opening, the opening / closing mechanism of the door, the wall forming a part of the minute space in which the opening is formed, and the like are collectively referred to as the FIMS system described above (see Patent Document 1).

Patent No. 3581310

  In these FMIS systems, from the viewpoint of preventing the diffusion of dust from the external space to which the pod or the like is conveyed to the above-described minute space, as disclosed in Patent Document 1, the pressure inside the minute space is changed from the pressure of the outer space. The air flow from the minute space to the external space is generated. However, since it is usually transported in a space with poor cleanliness, dust adhering in the space or, for example, hydrocarbon contained in the outside air is adsorbed on the outer peripheral surface of the pod body and the surface of the lid. These should be prevented as much as possible from being brought into the micro space in the semiconductor manufacturing process. However, these dusts are moved from the minute gap between the surface of the lid and the surface of the door into the minute space where the downflow is formed before diffusing outside the gap. For this reason, the diffusion of the dust into the minute space or the pod has not reached the level considered as a problem, and no countermeasure has been particularly taken against the dust. In addition, for example, a conventional pod lid is provided with a claw that can be expanded and contracted outward from the outer periphery of the lid, and each state of engagement and release of the pod body-lid is obtained by expansion and contraction of the claw. The expansion and contraction of the claw is performed by fitting a so-called key member from the outside of the lid surface to an operated part that is connected to the claw and disposed at a predetermined position in the central region of the lid. Has been done. The above-mentioned dust is also generated by such contact, rotation, sliding, and the like. The dust generated from these key members and the like was also considered to have a suitably functioning effect of downflow.

  Here, semiconductor devices have been gradually improved in functionality and size. For this reason, the wiring width, design rule, etc. used for the element are narrowed, and it has become necessary to pay attention to the presence of smaller dust that was not a problem in the past. Unlike the dust for which countermeasures have been conventionally prepared, such extremely fine dust moves in the space by operations different from the conventional one, such as so-called Brownian motion and the influence of minute static electricity. Specifically, even if such extremely fine dust is pushed down the minute space by the downflow described above and further exhausted to the outside space, it is not simply flowed by the air current but drifts into the minute space. there is a possibility. There is also a request at the semiconductor manufacturing factory to lower the level of cleanliness of the space for transporting pods and the like from the present level. Therefore, the amount of dust that adheres to the lid and the like and reaches the inside of the FIMS system will increase in the future. For this reason, future pods or FIMS systems are required to deal with dust adhering to the lid, and dust that increases and is difficult to deal with only by downflow.

  The present invention has been made in view of the above situation, suppresses the influence of extremely fine dust adhering to the surface of the lid that closes the pod opening, and generates dust when the lid is opened and closed. And a lid opening / closing system and a lid opening / closing method corresponding to the sealed container. The pod is a sealed container that suppresses the diffusion of generated dust into the minute space or inside the pod.

  In order to solve the above-described problems, a lid opening / closing system according to the present invention includes a substantially box-shaped main body that can accommodate an object to be accommodated therein and has an opening on one side, and can be separated from the main body to close the opening. And a lid that forms a sealed space with the main body. And a micro space that is disposed adjacent to the mounting table and accommodates a mechanism for transporting the object to be stored by managing dust, and a wall that defines a part of the micro space adjacent to the mounting table Formed in a substantially rectangular opening provided in an arrangement capable of facing the opening in the sealed container placed on the mounting table, and capable of holding the lid and substantially closing the opening, Open the opening by holding the lid and opening the opening. A gas nozzle disposed on the surface of the wall on the side of the mounting table and adjacent to at least the opposite side of the opening, the gas nozzle facing the opening forming surface and the opening in the sealed container It has the nozzle opening which can eject a clean gas in the direction which spread | diffuses with respect to each inside the space area | region made into.

  In the lid opening / closing system described above, the nozzle opening has a fan-shaped outflow pattern in which the outflow range of the clean gas extends from the vicinity of the gas nozzle to the far side in a plane perpendicular to the extending direction of the gas nozzle. Preferably it is formed. Alternatively, it is preferable that a plurality of nozzle openings are formed so as to face different points inside the space region in a plane perpendicular to the extending direction of the gas nozzle. Furthermore, the opposite sides described above are more preferably the left side and the right side of the opening. Further, it is more preferable that the gas nozzle is disposed also on one side of the opposite side different from the opposite side.

  In order to solve the above-mentioned problem, the lid opening / closing method according to the present invention includes a substantially box-shaped main body having an opening on one side and capable of accommodating an object to be contained therein, and being separable from the main body. A lid that forms a sealed space together with the main body, and a lid opening / closing method that allows the object to be inserted and removed by opening the opening by removing the lid from the sealed container. A mounting table that is mounted and capable of moving the sealed container to the open / close position of the lid; a micro space that is disposed adjacent to the mounting table and that accommodates a mechanism for managing the dust and transporting the object; and A substantially rectangular opening formed on a wall that defines a part of the minute space adjacent to the mounting table and arranged in a position that can face the opening in the sealed container mounted on the mounting table, and a lid It can be held and the opening can be substantially closed, and the opening can be held by holding the lid. A door that allows the opening and the opening to communicate with each other by being opened, and a gas nozzle that is disposed on at least the opposite side of the opening on the surface of the wall on the mounting table side, and the gas nozzle is hermetically sealed In the lid opening and closing device having a nozzle opening capable of injecting clean gas in the direction of diffusing in the space region facing the opening forming surface and the opening in the container, the sealed container is placed on the mounting table, The mounting table moves the sealed container to the open / close position of the lid, the door holds the lid at the open / close position of the lid, and the door removes the lid from the closed container, thereby opening the closed container opening and closing the closed container and the minute space. This is a communication method, characterized in that a clean gas is sprayed from the gas nozzle to the sealed container when the sealed container is moved by the mounting table to reach the lid open / close position.

  According to the present invention, when the pod is moved to the lid opening / closing position, clean gas is sprayed onto the lid surface, so that dust or the like adhering to the lid surface before the lid opening / closing operation is removed. Is done. As a result, the total amount of dust attached to the lid, which will be considered as a problem in the future, is reduced, or the amount of dust attached to the lid at a level that could not have been previously achieved by being transported through the unclean space Suppression is done. Accordingly, even when the lid is brought into the minute space, the total amount of dust and the like brought in can be suppressed because the dust and the like held by the lid itself is reduced. Further, according to the present invention, a clean gas is supplied to the space between the door and the lid, and when the lid and the door are brought into contact with each other, the inside of these sandwiching spaces is not the ambient so-called outside air but is clean. The lid is brought into the minute space in a state filled with gas. Therefore, even if the gas held in the holding space diffuses into the minute space, the possibility that the minute space is contaminated by the outside air is significantly reduced compared to the case of the conventional configuration. .

  Further, according to the present invention, the clean gas is sprayed onto the pod lid from a different direction with respect to the direction in which the pod advances and retreats with respect to the FIMS opening, and the region in which the opening end surface of the pod advances and retreats with the clean gas. The space is almost covered. Accordingly, it is possible to clean the pod advance / retreat region and effectively suppress the adhesion of dust or the like to the periphery of the end surface of the pod opening when the pod is moved from the placement position to the lid opening / closing position. It is also possible to employ a configuration in which the clean gas is sprayed from at least two different directions and the spray gas collides in a space region sandwiched between the FIMS opening and the pod. By adopting such a configuration, a diffused airflow is generated from the center of the surface of the pod lid toward the outside of the space region, and dust and the like can be effectively and quickly removed from the space region. . In addition, the flow of clean gas reduces the possibility of diffusion of dust and the like to the FIMS opening, and eliminates the supply of clean gas from the lower side of the opening, so that the clean gas from the inside of the minute space and the It is also possible to adopt a configuration that causes dust or the like placed on clean gas to flow out. According to this configuration, a curtain effect by clean gas is obtained for the upper side, left side, and right side regions of the opening, and gas flows out from the inside of the so-called positive pressure microspace to the outer space in the lower side region. It will be. Thereby, it becomes possible to make the opening part external air side into the area | region filled with the clean gas effectively, without preventing the outflow of the excessive clean gas from the inside of micro space.

  Next, an embodiment of the present invention will be described below with reference to the drawings. 1A and 1B schematically show a main part configuration of a FIMS that is a lid opening / closing system of a closed container and a pod that is a closed container according to an embodiment of the present invention in a cross-sectional view, and FIG. 1A is a so-called load position. 1B shows a state where the pod is conveyed to the lid opening / closing position and the lid is removed by the door. A pod 1 shown in FIG. 1A includes a pod body 2 and a lid 3. The pod body 2 has a substantially cubic shape, and has an accommodation space 2b for accommodating a wafer and the like, and an opening 2a communicating with the accommodation space 2b on one side surface of the cube shape. A flange portion 2c is further formed on the one side surface so as to surround the periphery of the opening 2a. The flange portion 2c has a side end surface parallel to the one side surface, and the side end surface opposes a peripheral wall of the opening portion of the load port which is a lid opening / closing system described later.

  The FIMS system 101 includes a housing 105 that forms a minute space 103 and a pod placement unit 121 that is disposed adjacent to the housing 105. The housing 105 further includes a fan 107, a first opening 111, and a door system 115. The fan 107 is arranged at the upper part of the minute space 103 by the casing 105, introduces a gas existing in the outer space of the casing 105 into the minute space, and is a so-called gas flow that flows from the upper side to the lower side inside the minute space 103. A downflow 107a is generated. The fan 107 is accompanied by a filter that removes contaminants such as dust from the gas introduced from the space according to the cleanliness of the external space. A structure that allows the downflow 107a to flow out is disposed at the lower part of the housing 105, and dust generated in the minute space 103 is carried to the downflow 107a and is transferred from the lower part of the housing 105 to the external space. To be discharged. Although the first opening 111 is seemingly closed by the door 115a in the door system 115, a gap is formed between the outer periphery of the door 115a and the inner peripheral surface of the first opening 111. The door 115a is described as being capable of substantially closing the first opening 111. On the surface of the door 115a (the surface facing the lid 3 of the pod 1), a latch key drive mechanism 115f that is disposed inside the lid 3 and operates a latch mechanism (not shown) that fixes the lid 3 to the pod body 2 is disposed. . A suction pad 115k, which will be described later, is disposed on the door 115a, and the lid 3 is sucked and held by the door 115a by the suction pad 115k.

  The pod placement unit 121 includes a docking plate 123, a pod fixing system 125, and a docking plate drive system 127. The upper surface of the docking plate 123 is substantially flat, and a part of the pod fixing system 125 is disposed on the upper surface. The pod 1 according to the present invention is placed on the upper surface of the docking plate 123, and engages with a part of the pod fixing system 125, specifically, an engaged portion arranged on the lower surface of the pod 1. Is fixed at a predetermined position on the docking plate 123. The docking plate 123 is arranged so that the main body opening 2a of the pod 1 faces the first opening 111 described above when the pod 1 is placed on the upper surface. The docking plate drive system 127 drives the pod 1 fixed at a predetermined position on the docking plate 123 in the direction toward and away from the first opening 111 together with the docking plate 123.

  In the present embodiment, the upper and lower sides of the first opening 111 on the first outer wall surface 105a of the housing 105 in which the first opening 111 is formed, dry nitrogen, dry air, etc., dust, inclusion A gas nozzle 10 capable of ejecting a clean gas whose water content and the like are controlled to the external space is disposed. The gas nozzle 10 includes a substantially pipe-shaped main body extending in parallel to the upper and lower sides of the first opening 111, or the left and right sides as will be described later, and a main body provided on the main body. And an ejection port (nozzle opening) for ejecting the clean gas supplied to the inside of the unit to the external space. With respect to the gas nozzle 10, the entire area of the space existing between the pod 1 placed on the docking plate 123 in the initial position and the first opening 111 facing the pod 1 is cleaned. A clean gas ejection port is formed so that the gas can be supplied. That is, the gas nozzle can eject clean gas in the direction of diffusion into the substantially rectangular parallelepiped space region facing the formation surface of the opening 2a and the first opening 111 in the pod body 2 at the initial position. Nozzle opening. The flow direction of the clean gas ejected from the nozzle opening is a so-called fan-shaped aggregate of the vectors when all the flow directions are shown as vectors in a plane perpendicular to the extending direction of the main body of the gas nozzle 10. The nozzle openings are formed so as to form More specifically, it includes a horizontal plane obtained by connecting a horizontal line passing through the center of the lid 3 at the so-called initial position when the pod is placed and a horizontal line passing through the center of the first opening 111, and the above-described fan shape. The sector shape is formed so that a part of the vector described above points to an arbitrary point on the intersection line with the plane. It is more preferable that the tip of the vector toward the point from the first opening 111 is closer to the surface of the door 115a on this intersection line, in other words, in a direction parallel to the door 115a. Moreover, it is preferable that what goes to the position farthest from the 1st opening part 111 in this vector goes to the flange part 2c of the pod 1 which exists in an initial position.

  The nozzle opening is arranged so that the clean gas has such a fan-shaped flow direction, and the gas nozzle 10 is arranged on two opposite sides of the first opening 111, whereby the pod 1 and the first opening are arranged. It becomes possible to maintain the space area between the two in a state where the concentration of the clean gas is increased. In addition, by disposing the gas nozzle 10 closer to the first opening 111, it is possible to increase the flow rate per unit area of the clean gas sprayed on the surface of the lid 3. In this case, by moving the pod 1 so as to approach the first opening 111, the flow rate of the clean gas sprayed per unit area is increased, and dust attached to the surface of the lid 3 is more effective. Can be eliminated. Further, as in the present embodiment, for example, it is preferable not to arrange the gas nozzles on the left side and the right side of the first opening 111, or to arrange the gas nozzles only on one side. By adopting this arrangement, it is possible to secure an outflow portion of the clean gas supplied to the space region, and it is possible to more effectively remove dust and the like removed from the surface of the lid 3 using the outflow portion. In addition, it can be quickly discharged into the external space. That is, the gas nozzle 10 is preferably disposed adjacent to the corresponding contact portion (or adjacent portion) without preventing the pod body 2 from coming into contact with or closest to the first outer wall surface 105a of the FIMS. . In this case, the gas nozzle 10 is preferably arranged so that the end of the clean gas ejected in a fan shape from the gas nozzle 10 generates a gas flow along the outer surface of the pod body 2. In addition, about the jet direction of the clean gas in a nozzle opening, it passes through the center of the surface which faces the 1st opening part 111 in the lid | cover 3, and the center of the 1st opening part 111, and is on the opposite side where the gas nozzle 10 is arrange | positioned. It is preferable that there are at least two different directions with respect to a plane sandwiched and parallel to the opposite side. Further, when the two directions described here are indicated as vectors, it is preferable that the end points of the vectors are within the advance / retreat range of the pod 1 and are shifted along the advance / retreat direction.

  When moving the pod 1 shown in FIGS. 1A to 1B, the supply of the clean gas from the gas nozzle 10 is started from the stage where the pod 1 is placed on the docking plate 123 or the stage before that. As the pod 1 moves to the first opening 111, the density of the clean gas sprayed from the gas nozzle 10 to the surface of the lid 3 and the surface of the flange portion 2c increases, and the flow velocity itself approaches the gas nozzle 10. Is also relatively large. Accordingly, it is possible to remove dust and the like firmly fixed on the surface of the lid 3 and the like. Moreover, the gas nozzle 10 supplies clean gas also along the outer surface of the pod main body 2 on the relationship of the arrangement | positioning. As a result, the possibility that dust or the like existing on the outer surface of the pod body 2 wraps around and reaches the surface of the lid 3 is also reduced. In the region where the pod 1 is in close proximity to the first opening 111, a region in which the apparent pressure is increased between the pod 1 and the door 115a is formed by the supplied clean gas. However, since the gas outflow portion is provided as described above, the retention of the clean gas in the region is prevented, and the reattachment of dust and the like that can occur with the retention is also prevented. Thereafter, the flange portion 2c comes into contact with the first outer wall surface 105a or maintains a predetermined interval, and the operation of removing the lid 3 from the pod body 2 by the door 115a is performed. After removing the lid 3, the door 115a moves together with the lid 3 into the minute space 103, and moves downward along the flow of the downflow 107a. Thereby, as shown to FIG. 1B, the pod opening 2a and the 1st opening part 111 will be in the state connected.

  For example, it is conceivable that the clean gas is ejected from a single nozzle opening provided in the gas nozzle 10 with only one direction. When the purpose is to remove dust at a specific position on the surface of the lid 3, the form is considered to be efficient. However, when a specific directionality is given and gas is ejected into a space having a certain size, the generated airflow involves entrainment of surrounding gas, generation of so-called convection in a more easily flowing direction, etc. There is a fear. Such entrainment, convection, and the like have the possibility of causing dust once removed from the lid or the like to reattach to other parts or creating a place like dust accumulation. In the present invention, the nozzle opening is formed so as to generate a gas flow in a fan shape, and the nozzle opening is continuously formed in the extending direction of the gas nozzle, so that the clean gas has a certain extent. It is supposed to be sprayed on the subject. In addition, it provides a specific outlet for the sprayed clean gas. As a result, it is possible to suppress the generation of the above-described entrainment, convection, etc., or to arrange such that the entrainment or the like cannot affect the space area where it is desired to maintain the cleanliness even if it is generated. Therefore, unlike the case where clean gas is supplied in a single direction, it is possible to eliminate dust and the like while effectively suppressing reattachment of dust and the like. In the above-described embodiment, the clean gas ejected from the nozzle opening provided in the gas nozzle forms a fan shape in a plane perpendicular to the extending direction of the gas nozzle. However, the aspect of the present invention is not limited to this form, and the gas nozzle is disposed in a plane perpendicular to the extending direction of the gas nozzle with respect to the space region existing between the pod 1 and the first opening 111. It suffices if the clean gas can be ejected so as to spread over a specific range centered. Moreover, the said range should just be a range including the inside of the said space area | region from the outer periphery of the pod 1. FIG. The nozzle openings are preferably provided continuously in the extending direction of the gas nozzle (may be a slit extending in the extending direction).

  Next, further embodiments of the present invention will be described. In the following embodiment, since the arrangement of the gas nozzle 10 is mainly different from the above-described embodiment, the following drawings based on the field of view that facilitates understanding of the arrangement are referred to. FIG. 2 is a form in which the gas nozzles 10 are arranged on the left side and the right side of the first opening 111, unlike the form shown in FIG. 1A and the like. In the figure, the main configuration in a so-called plan view of the door 115a, the pod 1, and the gas nozzle 10 as seen from above is shown. In this embodiment, a plurality of clean gas ejection directions exist and a plane perpendicular to the extending direction of the gas nozzle 10 is formed so that the plurality of ejection directions form a sector shape centered on the gas nozzle 10. A plurality of nozzle openings are formed. Thereby, similarly to the above-described embodiment, removal of dust and the like from the space region between the pod 1 and the first opening 111 and the filling of the space with the clean gas are ensured. FIG. 3 shows a further gas nozzle 10 embodiment in a manner similar to FIG. Unlike the embodiment shown in FIG. 2, in the present embodiment, the shape from the internal space of the gas nozzle 10 to the vicinity of the ejection opening of the nozzle opening is formed into a fan shape that widens from a fine hole to a predetermined plane. The shape of the clean gas ejected from the nozzle opening is a fan shape. In the embodiment shown in FIG. 2, the flow direction with respect to the clean gas is excellent, but there is a region where the gas flow does not reach, so there is a risk that the dust removal efficiency in the region is poor. On the other hand, in the embodiment shown in FIG. 3, the directivity of the flow of the clean gas is inferior, so that the removal efficiency of dust and the like at a predetermined site may be inferior, but it is always equal to the surface of the lid 3. Since the cleaning gas is sprayed on the entire surface, it is possible to perform uniform cleaning over the entire surface.

  Next, an embodiment of the gas nozzle 10 shown in FIG. 2 will be described with reference to the drawings with regard to a more detailed and specific form. FIG. 4 shows a schematic configuration in which the first opening 111 substantially closed by the door 115a and the configuration in the vicinity thereof are viewed from the position where the pod 1 is placed. In the same figure, the gas nozzle 10 is arrange | positioned so that the circumference | surroundings of the 1st opening part 111 in the 1st outer wall surface 105a may be enclosed. The gas nozzle 10 is formed by deforming a so-called punching metal formed by forming a through hole 10b in a metal plate into a tubular shape. The through hole acts as the nozzle opening described above, and the clean gas can be ejected in a plurality of directions by arranging the formation region of the through hole 10b on the convex surface of the pipe. Unlike FIG. 4, FIG. 5 arrange | positions the slit 10c extended in the direction which this gas nozzle 10 extends with respect to the tubular gas nozzle 10. In FIG. The slit 10c is formed so that the width (width in the short direction) of the slit 10c increases as it approaches the outside from the inside of the tube, and the slit 10c is also arranged on the convex surface of the tube. Thereby, the fan-shaped ejection of clean gas is obtained. 4 and 5, the gas nozzle 10 has a shape that surrounds the entire first opening 111. In this way, by forming a so-called gas curtain that isolates the space region between the pod and the first opening by the clean gas supplied from the gas nozzle 10, diffusion of dust and the like from the outside air to the space region is prevented. Effect is also obtained.

However, in a specific configuration, for example, the gas nozzle 10 on the lower side of the first opening 111 is removed, or each corner portion of the gas nozzle 10 arranged in a mouth shape is eliminated, and the gas is supplied at a portion corresponding to the region. It is good also as securing the outflow route of clean gal. With this configuration, it is possible to quickly remove dust and the like removed from the lid and the like by the formation of the gas curtain and the spray of clean gas in the space area covered by the curtain. That is, the gas nozzle 10 according to the present invention is arranged so as to surround the first opening 111, and by removing a predetermined portion, an ejection clean gas outflow path is obtained in a region corresponding to the deleted portion. It is preferable to do. According to this configuration, the upper opening, the left opening, and the right opening of the first opening 111 have a curtain effect with clean gas, and the lower opening holds a so-called positive pressure with respect to the external space. The gas will flow out from the inside. Accordingly, it is possible to effectively make the vicinity of the outside side of the first opening a region filled with clean gas without hindering the flow of excess clean gas from the inside of the minute space.
Further, by arranging the gas nozzles 10 on the two opposite sides, specifically, the upper side and the lower side or the left side and the right side in the first opening 111, the clean gas ejected from the individual gas nozzles once. It can be expected to have an effect of flowing further away from each other. Thereby, the airflow which goes to the external space from the said area | region can be easily produced | generated within the space area | region between the pod 1-1st opening part 111. FIG. Generation of the airflow makes it possible to effectively release dust and the like floating in the space area to the external space.

  Next, a specific configuration of the closed container lid opening / closing system according to an embodiment of the present invention will be described below. FIG. 6 is a side sectional view of the system showing a schematic configuration, and FIG. 7 is an enlarged view of the pod placement portion, door, pod, lid, and the like in the system 101 in a similar manner. FIG. 7 is a diagram schematically showing the pod placement portion, the door, and the like in a state where the opening of the pod is closed by the lid. The FIMS system 101 includes a housing 105 that forms a minute space 103 and a pod placement unit 121 that is disposed adjacent to the housing 105. The housing 105 further includes a fan 107, a robot 109, a first opening 111, a second opening 113, and a door system 115. In addition, description here is abbreviate | omitted about the thing which was individual structure and described the detail previously. The robot arm 109a in the robot 109 can project outside the minute space through the first opening 111 and the second opening 113. Although the first opening 111 is seemingly closed by the door 115a in the door system 115, a gap is formed between the outer periphery of the door 115a and the inner peripheral surface of the first opening 111. The door 115a is described as being capable of substantially closing the first opening 111. Although the second opening 113 is connected to the inside of the wafer processing apparatus 117, the details of the wafer processing apparatus 117 are not directly related to the present invention, and thus the description in this specification is omitted. .

  The docking plate drive system 127 uses the guide rail 127a and the drive cylinder 127b to drive the pod 1 fixed at the predetermined position together with the docking plate 123 in a direction toward the first opening 111 and a direction away from the first opening 111. One end of the driving cylinder 127b is fixed to the mounting table main body 121a, and the extending and contracting cylinder end serving as the other end is fixed to the docking plate 123. The docking plate 123 is slidably supported with respect to the guide rail 127a, and slides on the guide rail 127a according to the expansion and contraction of the cylinder end portion of the drive cylinder 127b. Here, the docking plate 123 has a position where the pod 1 is mounted (loaded) or removed (unloaded) from the outside on the docking plate 123 at a position farthest from the micro space 103. The position where the lid 3 is removed is the position closest to the minute space 103.

  The suction pad 115k is in contact with the lid 3 and sucks the lid 3 by supplying negative pressure from a negative pressure supply source 108 (see FIG. 8) through a pipe (not shown), and the lid 3 is attached by the door 115a. It is possible to hold. The door system 115 includes a door arm 115b, a door opening / closing actuator 115c, and a door up / down mechanism 115d. The door arm 115b is made of a rod-shaped member, supports the door 115a at one end, and is connected to the door opening / closing actuator 115c at the other end, and is pivotally supported around the position at an appropriate position in the intermediate portion. . The door arm 115b is rotated about the rotation center by the door opening / closing actuator 115c, and one end of the door arm 115b and the door 115a supported by the door arm 115b move toward or away from the first opening 111. The door up-and-down mechanism 115d supports the door opening / closing actuator 115c and the rotating shaft of the door arm 115b described above, and the actuator and the door arm 115b and the door 115a supported by the actuator along a guide extending in the vertical direction by the vertical movement actuator. Is driven vertically.

  FIG. 8 shows a configuration of the FIMS system 101 as a block diagram. The above-described fan 107, robot 109, door system 115, pod fixing system 125, and docking plate drive system 127 are controlled by the control device 102, respectively. The door system 115 can independently control the latch key driving mechanism 115f, the door opening / closing actuator 115c, and the door up-and-down mechanism 115d. In practice, however, each of these components operates according to a series of time charts. Control these configurations. Note that the control device 102 performs operations of supplying negative pressure from the negative pressure supply source 108 to the suction pad 115k and stopping supply (breaking of negative pressure). The docking plate drive system 127 turns on and off the drive of the drive cylinder 127b. The operation of the drive cylinder 127 ensures that the docking plate 123 exists at two predetermined positions, that is, when the pod 1 is loaded. It is necessary to detect the case where the wafer exists at the dock position where the wafer can be inserted and removed. For this reason, it is confirmed that the pod 1 is placed on the docking plate 123 and that the docking plate 123 exists at the position where the pod 1 should be loaded / unloaded with respect to the docking plate 123, that is, at the initial position described above. A load sensor 127d to be detected is connected to the docking plate drive system 127. In addition, a dock sensor 127 c that detects whether or not the docking plate 123 is present at the dock position described above is also connected to the docking plate drive system 127. The control device 102 is further connected to a clean gas supply source 126 that supplies clean gas to the gas nozzle 10, and the control device 102 controls whether or not the clean gas is ejected from the gas nozzle 10, the amount of ejection, and the like. .

  Here, the operation of the FIMS system 101 when actually performing the wafer processing operation will be described. In the wafer processing operation, the pod 1 containing a predetermined number of wafers and filled with a clean gas is placed on the docking plate 123. When placing the docking plate 123, the pod fixing system 125 operates to set the placement position of the pod 1 relative to the docking plate 123 to a predetermined one. At that time, the control device 102 may stop the gas ejection from the gas nozzle 10 from the viewpoint of reducing the amount of clean gas used, and a small amount of gas is ejected from the viewpoint of cleaning the mounting position. May be. By carrying out such a jet of clean gas, it is possible to reduce the existence probability of dust and the like in the front area of the door 115a and the first opening 111, and to optimize the environment of the placement space of the pod 1 in advance. It is. Subsequently, the docking plate drive system 127 is operated to drive the pod 1 toward the first opening 111. Specifically, the drive cylinder 127 b moves the pod 1 integrated with the docking plate 123 by the pod fixing system 125 in a manner through the docking plate 123. At that time, the door 115a stops at a position where the first opening 111 is substantially closed. At the time of the operation, the control device 102 causes the clean gas supply source 126 to supply gas to the gas nozzle 10 and to eject clean gas at a predetermined flow rate. The driving operation ends when the lid 3 of the pod 1 comes into contact with the contact surface of the door 115a and the docking plate 123 and the first opening 111 are in a predetermined positional relationship. The supply of clean gas may be stopped at this stage, but from the viewpoint of removing dust or the like from the outer periphery of the pod 1 or preventing diffusion, supply a flow rate that does not hinder the outflow of gas from the micro space 113. It may be implemented. At this time, the latch key drive mechanism 115f operates to release the fixation of the lid 3 to the pod body 2. At the same time, the suction pad 115k sucks the lid 3, and the lid 3 is held by the door 115a.

  From this state, the door opening / closing actuator 115 c starts operating, and the door arm 115 b rotates to carry the door 115 a holding the lid 3 from the first opening 111 toward the inside of the minute space 103. After the door arm 115b stops rotating at a predetermined angle, the door up-and-down mechanism 115d starts operating, and moves the door 115a together with the door opening / closing actuator 115c. By this operation, the first opening 111 is fully opened, and the minute space 103 is in communication with the inside of the pod main body 2 through the first opening 111. In this state, the robot 109 starts operating, and the wafer 4 is transferred from the inside of the pod 1 to the wafer processing apparatus 117 through the second opening 113 by the robot arm 109a. Further, while maintaining this state, the robot 109 transports the wafer that has been subjected to the predetermined processing in the wafer processing apparatus 117 to the pod 1. When the lid 3 is attached to the pod 1 and the pod 1 can be removed from the FIMS system 101, these operations are basically performed in reverse.

  By using the FIMS system, which is the lid opening / closing system described above, the dust that adheres to the surface of the lid before the lid that closes the pod opening is held by the door is reduced. Can be prevented from being brought into the pod. More specifically, the gas in a plane parallel to the first opening with respect to the space with respect to the space region between the pod and the first opening existing at the initial position as the loading position of the pod. Supply. As a result, a so-called gas curtain covering the space area is generated to prevent entry of dust and the like from the external space. In addition, in the plane, a flow from the space area toward the external space is also generated. By generating the flow of the clean gas as described above, it is possible to remove dust and the like attached to the internal structure of the space region from the adherend, and to effectively and quickly remove the removed dust and the like from the space region. Removal is possible. In addition, although arrangement | positioning of the gas nozzle 10 is described in embodiment mentioned above, the form explained in full detail is an illustration to the last, The said gas nozzle increases / decreases suitably according to the supply amount, flow velocity, etc. of the clean gas calculated | required, change of arrangement | positioning, etc. Preferably it is done. Further, the drive system may be arranged so that the gas nozzles arranged according to the respective sides are individually separated and can be rotated about the extending direction. In this case, the control device 102 rotates the gas nozzle 10 as the pod 1 is driven, so that the clean gas is ejected in the space region between the pod and the first opening or the lid surface of the pod. It becomes possible to supply clean gas efficiently.

  In the embodiments described above, the present invention is mainly described with respect to the FIMS system for wafers. However, the application target of the present invention is not limited to the system, and can be applied to, for example, a sealed container that accommodates a display panel, an optical disk, or the like. In addition, the gas nozzle described above is described as a characteristic element for configuring a lid opening / closing system. However, the configuration including the gas nozzle and a control device that drives or operates the gas nozzle if necessary includes a FIMS system. It can also be regarded as an invention as an independent device as an external space purge unit.

It is a figure which shows typically schematic structure of the lid | cover opening / closing system which concerns on one Embodiment of this invention. FIG. 1B is a schematic diagram of the lid opening / closing system shown in FIG. 1A, showing a state where the pod is connected to the opening and the lid is removed from the pod. It is a figure which shows the main structures of the state which looked at the pod, the gas nozzle, etc. from the upper surface about one Embodiment of a gas nozzle. FIG. 3 shows a further configuration of the gas nozzle in the same manner as in FIG. It is a figure which shows the main structures of the state which looked at the 1st opening part, the gas nozzle, etc. from the mounting position of the pod about the further form of a gas nozzle. It is a figure which shows the other form of a gas nozzle in the same manner as FIG. It is a sectional side view showing the schematic structure of the load port device concerning one embodiment of the present invention. It is an expanded sectional side view which shows the principal part schematic structure of the load port apparatus which concerns on one Embodiment of this invention in the style similar to FIG. It is a block diagram which shows schematic structure of the FIMS system which concerns on one Embodiment of this invention.

Explanation of symbols

1: Pod, 2: Pod body, 3: Cover, 4: Wafer, 10: Gas nozzle, 101: Load port device, 102: Control device, 103: Micro space, 105: Housing, 107: Fan, 108: Negative pressure Supply source 109: Robot, 111: First opening, 113: Second opening, 115: Door system, 117: Wafer processing apparatus, 121: Pod placement unit, 123: Docking plate, 125: Pod fixing system 126: Clean gas supply source, 127: Docking plate drive system,

Claims (8)

An airtight container comprising: a box-shaped main body capable of accommodating an object to be contained therein and having an opening on one side; and a lid which is separable from the main body and closes the opening to form a sealed space together with the main body. The lid opening and closing system that enables the insertion and removal of the object to be stored by removing the lid from the opening,
A mounting table on which the sealed container is mounted;
A minute space disposed adjacent to the mounting table, in which dust is controlled and a mechanism for transporting the object to be stored is stored;
A rectangular opening that is formed on a wall that defines a part of the micro space adjacent to the mounting table, and that can be directly opposed to the opening in the sealed container mounted on the mounting table. And
A door capable of holding the lid and closing the opening, and holding the lid and opening the opening to communicate the opening and the opening;
A plurality of gas nozzles on the surface of the mounting table side of the wall, each extending along a side of the opening, and arranged adjacent to at least the opposite side of the opening;
The gas nozzle is disposed along the side and has a nozzle opening capable of ejecting a clean gas in a direction in which the gas nozzle diffuses into a space region facing the opening forming surface and the opening in the sealed container. ,
A lid opening / closing system for a sealed container, wherein at least one side of the four sides of the opening is an area excluding the gas nozzle from which the clean gas supplied from the gas nozzle flows out. The mounting table is capable of moving the sealed container to the open / close position of the lid of the sealed container,
In response to the placement of the sealed container on the mounting table or the movement of the sealed container by the mounting table, supply of a predetermined flow rate of the clean gas by the gas nozzle is started, and the lid is applied to the door. The lid opening / closing system according to claim 1, further comprising a control device that stops the supply of the clean gas or reduces the predetermined flow rate in response to the stop of the mounting table due to contact.   The nozzle opening is formed to have a fan-shaped outflow pattern in which the outflow range of the clean gas expands from the vicinity of the gas nozzle to the far side in a plane perpendicular to the extending direction of the gas nozzle. The lid opening / closing system according to claim 1 or 2, characterized in that   In the clean gas outflow range, the fan-shaped outer flow direction is an outer peripheral portion facing the gas nozzle in the sealed container and parallel to the outer flow direction of the clean gas supplied from the gas nozzle on the opposite side. The lid opening / closing system according to claim 3, wherein the inside of the fan shape has a flow direction in the center of the lid in a state where the sealed container is close to the door. The said nozzle opening is formed in multiple numbers so that it may face in the different point inside the said space area | region in the plane perpendicular | vertical to the extension direction of the said gas nozzle. Lid opening / closing system .   The lid opening / closing system according to claim 1, wherein the opposite sides are a left side and a right side of the opening.   The lid opening / closing system according to any one of claims 1 to 6, wherein the gas nozzle is disposed also on one side of an opposite side different from the opposite side. An airtight container comprising: a box-shaped main body capable of accommodating an object to be contained therein and having an opening on one side; and a lid which is separable from the main body and closes the opening to form a sealed space together with the main body. The opening and closing method of the lid, wherein the opening is opened by detaching the lid from and the insertion and removal of the object to be accommodated is possible.
A mounting table on which the closed container is mounted and the closed container is movable to an open / close position of a lid;
A minute space disposed adjacent to the mounting table, in which dust is controlled and a mechanism for transporting the object to be stored is stored;
A rectangular opening that is formed on a wall that defines a part of the micro space adjacent to the mounting table, and that can be directly opposed to the opening in the sealed container mounted on the mounting table. And
A door capable of holding the lid and closing the opening, and holding the lid and opening the opening to communicate the opening and the opening;
A plurality of gas nozzles on the surface of the mounting table side of the wall, each extending along a side of the opening, and arranged adjacent to at least the opposite side of the opening;
The gas nozzle is disposed along the side and has a nozzle opening capable of ejecting a clean gas in a direction in which the gas nozzle diffuses into a space region facing the opening forming surface and the opening in the sealed container. ,
In the lid opening and closing device, wherein at least one side of the four sides of the opening is a region excluding the gas nozzle for the clean gas supplied from the gas nozzle to flow out,
Place the sealed container on the mounting table,
The mounting table moves the sealed container to the open / close position of the lid,
The door holds the lid at the open / close position of the lid,
The door opens the sealed container opening by removing the lid from the sealed container to allow the sealed container and the minute space to communicate with each other.
When the sealed container is placed on the mounting table and moved by the mounting table to reach the open / close position of the lid, the sealed nozzle is sealed from the gas nozzle in response to the placement of the sealed container or the start of movement of the sealed container. The supply of the clean gas is stopped or the predetermined flow rate is decreased in response to the start of spraying of the clean gas at a predetermined flow rate on the container and the movement being stopped by the contact of the lid with the door. A method for opening and closing the lid of a sealed container.

Images