JP2002368061A - Device for opening/closing storage container and storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent contaminants from intruding into a storage container and a local cleaned environmental space when the cover of the storage container is opened. SOLUTION: A buffer space 40 for preventing the intrusion of contaminants is provided between an outer peripheral region on the opening 221 side of a box 22 of a storage container 20 facing to the opening 32, of a closing member 31 covering the surface opposite to the storage container 20 of the local cleaned environmental space 10, through which a semiconductor is loaded or unloaded and the closing member 31 and an end surface on the opening 221 side of the box 22 opposite thereto. This buffer space 40 is maintained, by cleaned gas introduced from the local cleaned environmental space 10, in the same atmosphere as the local cleaned environmental space 10 and a cover 24 of the storage container 20 is opened or closed in synchronization with an opening/closing door 33 on the local cleaned environmental space 10 side with the opening portion of the box 22 of the storage container 20 faced to the buffer space 40.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage container opening and closing device for storing semiconductor wafers and a storage container, and more particularly, to a local cleaning environment (mini environment) between a processing section of a semiconductor manufacturing apparatus and the storage container. When a semiconductor wafer in the storage container is taken in and out of the storage container through the local clean environment space, when the lid of the storage container is opened, contaminants are prevented from entering the storage container and the local clean environment space. The present invention relates to a storage container opening / closing device and a storage container which can be prevented in a short time.

[0002]

2. Description of the Related Art In a semiconductor manufacturing apparatus, a storage container is used for transporting and storing a semiconductor wafer (semiconductor product material) with each processing section, thereby isolating the semiconductor wafer from a contamination source. . This type of storage container includes:
Generally, a container called a FOUP (Front Opening Unified Pod) is used. Various processing sections of the semiconductor manufacturing apparatus A high-cleanliness space is provided locally in close proximity to the processing section, and an automatic opening / closing device is provided in this local clean environment space, and the storage container is provided by the automatic opening / closing device. Is opened so that the semiconductor wafer in the storage container can be taken in and out of the processing unit through the local clean environment space.

A conventional storage container opening / closing device will be described with reference to FIGS. 11 and 12. FIG. In FIG. 11, 1
Reference numeral 00 denotes a local clean environment space. The local clean environment space 100 is formed to face a semiconductor wafer loading / unloading part of a processing unit (not shown) in a semiconductor manufacturing apparatus. An opening / closing device 300 is provided on a surface of the local clean environment space 100 facing the storage container 200.

The opening / closing device 300 includes a closing member 3 for covering a surface of the local clean environment space 100 facing the storage container 200.
01, an opening / closing door 303 for opening / closing a semiconductor wafer opening / closing opening 302 formed in the closing member 301 with a small gap d therebetween, a driving unit 304 for opening / closing the opening / closing door 303, and an outer surface of the closing member 301. A storage container mounting portion 305 protruding horizontally from the opening 302 is provided. The storage container 200 includes a housing 2 for housing a semiconductor wafer.
01 and a lid 20 for opening and closing the front opening of the housing 201
The lid 202 is configured to be able to be sucked by a suction means (not shown) provided on the opening / closing door 303 of the opening / closing device 300.
03, the drive unit 30 of the opening / closing device 300
4, the door is opened and closed in conjunction with the opening and closing operation of the opening and closing door 303.

In such a conventional storage container opening / closing device, when the lid 202 of the storage container 200 is opened, as shown in FIG.
Then, the entire storage container 200 is moved until the lid 202 of the storage container 200 comes into contact with the opening / closing door 303 of the opening / closing device 300. In this state, the drive unit 304 is operated to cause the opening / closing door 303 to be attracted to the lid 202, and the opening / closing door 303 is retracted in the arrow X direction shown in FIG. After that, the opening / closing door 303 is moved by the driving unit 304 as shown in FIG.
It is lowered in the direction of arrow Y shown in FIG. Thereby, the front opening of the storage container 200 is opened so as to face the opening 302 of the local clean environment space 100. At this time, since the inside of the local clean environment space 100 is at a positive pressure, the clean air in the local clean environment space 100 passes through the gap d formed between the opening 302 and the outer peripheral surface of the housing 201 as shown in FIG. As shown by the arrow, the air flows out, thereby suppressing the outside air from entering the local clean environment space 100.

[0006]

By the way, the storage container 2
00 is stored in a place with a relatively large amount of contaminants, so that the semiconductor wafer inside can be protected from contaminants by adopting a structure with good sealing properties. However, the surface of the housing 201 and the surface of the lid 202 can be protected. Have deposited or attached contaminants. Therefore, the lid 202 of the storage container 200
Is opened by the opening and closing device 300 so that the clean air in the local clean environment space 100 in the positive pressure state is
2, the contaminants deposited or adhered to the surface of the housing 201 and the surface of the lid 202 are scattered, and a part of the contaminants is in the local clean environment space 100 or the storage container 200.
In addition, there is a problem that contaminants entering the storage container 200 adversely affect the semiconductor wafer in addition to contaminating the local clean environment space 100 and affecting the semiconductor wafer. In the conventional storage container 200,
There is a problem that when the lid 202 is opened and the inside of the housing 201 is decompressed, outside air containing contaminants enters.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems. When the lid of the storage container is opened, the intrusion of contaminants into the storage container and the local clean environment space is prevented. It is an object of the present invention to provide a storage container opening / closing device that can prevent such a problem from occurring.

[0008]

According to the present invention, there is provided a storage container opening / closing apparatus for opening a cover for closing an opening of a housing for accommodating a semiconductor wafer. A placing section to be placed, a local clean environment space surrounding a predetermined area facing the opening of the housing of the storage container placed on the placing section to form an atmosphere of high cleanliness, and the local cleaning A closing member provided to cover a surface of the environmental space opposite to the opening of the housing, and an opening / closing door for opening and closing a semiconductor wafer access opening / closing opening formed at a location of the closing member facing the opening of the housing. Driving means for opening and closing the opening / closing door and opening and closing the lid in conjunction with opening and closing of the opening / closing door; and placing the storage container on a mounting portion so that the lid faces the semiconductor wafer loading / unloading opening. The lid and the closing member And a buffer space for preventing intrusion of contaminants, which is kept in the same atmosphere as the local clean environment space by a clean gas introduced from the local clean environment space, around the opening side outer periphery of the housing. It is characterized by.

Further, the present invention provides a housing for accommodating a semiconductor wafer, an opening provided at a front portion of the housing, and an opening provided with a slight gap between the housing and the opening. A lid that closes the opening in a combined state, wherein an exhaust port communicating the gap and the outer surface of the housing is provided in a state where the opening is closed by the lid. It is characterized by being.

In the storage container and the opening / closing device of the present invention, the opening of the housing of the storage container faces a buffer space for preventing intrusion of contaminants, and a clean gas introduced from a local clean environment space in the buffer space. Accordingly, the same atmosphere as that of the local clean environment space can be maintained, so that intrusion of contaminants into the storage container and the local clean environment space can be prevented.

[0011]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 shows an embodiment of a storage container opening / closing device according to the present invention. FIG. 1 (A) is a side view showing the overall configuration of the storage container opening / closing device, and FIG. 1 (B) is a front view thereof. FIG. 2 is an enlarged view of a buffer space portion for preventing contaminant intrusion of the storage container opening / closing device according to the embodiment of the present invention.
(B) is a front view thereof. FIG. 3 is a side view showing an arrangement relationship between a buffer space and a storage container of the storage container opening / closing device according to the embodiment of the present invention. FIG. FIG. 5 is a side view of a storage container according to an embodiment of the present invention, FIG. 6 (A) is an enlarged sectional view of a portion A in FIG. 5, and FIG. 6 (B) is FIG. FIG. 3A is a front view as viewed from an arrow B direction.

In FIG. 1, reference numeral 10 denotes a local clean environment space for isolating a semiconductor wafer as a product from contaminants to form an atmosphere space of high cleanliness. This local clean environment space 10 is a processing unit in a semiconductor manufacturing apparatus. It is formed to face a semiconductor wafer loading / unloading portion (not shown). An opening / closing device 30 is provided on a surface of the local clean environment space 10 facing the storage container 20.

As shown in FIGS. 1A, 5 and 6, the storage container 20 includes a housing 22 for housing a semiconductor wafer, an opening 221 provided at a front portion of the housing 22, and A lid 24 is provided in the opening 221 so as to be fitted with a slight gap 22A therebetween, and closes the opening 221 in a state fitted in the opening 221. The lid 24 is
As shown in FIG. 6A, the housing 22 is hermetically engaged with an opening 221 via a seal member 26. As shown in FIG. In a state where the opening 221 is closed by the body 22, a plurality of exhaust ports 222 communicating the gap 22 </ b> A and the outer surface of the housing 22 are provided at predetermined intervals over the entire periphery of the housing 22.

In the exhaust port 222, the casing 22
In order to prevent intrusion of contaminants from the outside due to reduced pressure during the opening operation of the lid 24, the flow path of the exhaust port 222 is made as long as possible, and the cross-sectional area of the exhaust port 222 is made smaller from the entrance to the exit. To be.

As shown in FIGS. 1 to 4, the opening / closing device 30 includes a plate-shaped closing member 31 provided so as to cover the surface of the local clean environment space 10 facing the storage container 20; An opening / closing door 33 that opens and closes a semiconductor wafer access opening 32 formed at 31 with a small gap d corresponding to the outer shape of the housing 221 on the side of the opening 221 side, and a connecting member 34 connected to the opening / closing door 33. It is provided with a driving unit 35 connected to open and close the opening / closing door 33 and a storage container mounting unit 36 protruding horizontally from the semiconductor wafer loading / unloading opening 32 on the outer surface of the closing member 31. In addition, the door 33
A known suction means (not shown) is provided on a surface of the storage container 20 facing the storage container 20.
When the opening / closing door 33 is adsorbed and the opening / closing door 33 is driven to open / close by the drive unit 35, the lid 24
It can be opened and closed.

The storage container 20 placed on the mounting portion 36
The outer surface of the closing member 31 facing the lid 24 side of FIG.
As shown in FIG. 4, a buffer space 40 for preventing intrusion of contaminants is provided between the surface of the storage container 20 on the lid 24 side and the closing member 31 and the outer periphery of the housing 22 on the side of the opening 221. The inside of the buffer space 40 is maintained in the same atmosphere as the local clean environment space 10 by the clean gas introduced from the local clean environment space 10.

As shown in FIG. 2, the buffer space 40 has a side peripheral wall 42 projecting at right angles to the closing member 31 so as to surround the outer periphery of the opening 221 side of the housing 22, and a leading edge of the side peripheral wall 42. And a frame-shaped front wall 44 connected inward at a right angle from the leading edge to the entire length of the side peripheral wall 42. The frame-shaped front wall 44 corresponds to the outer peripheral shape of the housing 22 on the side of the opening 221. An opening 46 is provided, and between the opening 46 and the outer peripheral surface on the side of the opening 221 of the housing 22 facing the opening 46, the clean gas in the buffer space 40 is passed through the opening 2 of the housing 22.
A gap d1 for discharging along the outer peripheral surface on the 21 side is formed.

FIGS. 3, 5, and 6 show that the dimension of the gap d1 is kept constant from the position where the opening 221 side of the housing 22 faces the buffer space 40 to the position where it contacts the opening / closing door 33. As shown, the outer periphery 221A of the housing 22 on the opening 221 side is formed of a flat surface. This flat surface
The storage container 20 is parallel to the direction in which the storage container 20 is moved toward the opening / closing door 33 of the opening / closing device 30, and in the present embodiment, also extends parallel to the direction in which the lid 24 is removed from the opening 221. are doing.

FIG. 2A shows the closing member 31.
As shown in FIG. 3, the local clean environment space 10 and the buffer space 4
A plurality of clean gas inlets 311 communicating between the inlet and outlet are formed along the periphery of the semiconductor wafer access opening 32. As shown in FIG. 2B, the frame-shaped front wall 44 has a plurality of exhaust ports 441 communicating with the outside in the buffer space 40 at predetermined intervals over the entire length of the front wall 44. Have been. The gap d1 and the exhaust port 441
So that the flow rate of the clean gas introduced from the introduction port 311 is larger than the flow rate flowing out from the introduction port 311.
The entire opening area is larger than the gap d1 and the opening area of the exhaust port 441.

As shown in FIG. 4, the door 33 has
A pressurized gas outlet 331 is formed. The outlet 331 removes contaminants adhering to the lid 24 of the housing 22 and the end face of the housing 22 on the side of the opening 221 facing the buffer space 40. Pressurized gas supply source 50 is connected. The pressurized gas supply source 50 includes an air supply pump 52, a switching valve 54 connected to the discharge side of the air supply pump 52, the switching valve 54 and the outlet 331.
And a filter 56 interposed therebetween.

Next, the operation of the storage container opening / closing device according to the present embodiment configured as described above will be described with reference to the drawings. When opening the lid 24 of the storage container 20,
First, as shown in FIG. 7, the storage container 20 is mounted on the mounting portion 36 via the pedestal 60, and the lid 24 side thereof faces the opening 46 of the buffer space 40. In this state, the storage container 20 is moved to the buffer space 40 side, and the opening 2 of the housing 22 is opened.
8 is inserted into the opening 46 of the buffer space 40, and FIG.
As shown in (2), the lid 24 of the housing 22 is moved closer to the opening / closing door 33. In this state, by operating the switching valve 54 of the pressurized gas supply source 50 shown in FIG. 4, clean pressurized gas from the pressurized gas supply source 50 is ejected into the buffer space 40 through the outlet 331. Along with this, the pressurized gas from the outlet 331 flows in the direction shown by the arrow in the gap formed between the end face of the housing 22 on the lid 24 side and the door 33 as shown in FIG. Exhaust port 222 of housing 22
The gas is discharged out of the buffer space 40 through the gap d1 and the exhaust port 441 of the buffer space 40. Thus, contaminants (particles) adhering to the surface of the lid 24 and the end surface of the housing 22 on the side of the opening 221 are removed.

In this case, since the inside of the local clean environment space 10 is at a positive pressure, the clean gas in the local clean environment space 10 is supplied with the minute gap d between the semiconductor wafer access opening 32 and the opening / closing door 33 and the inlet 311. Through buffer space 40
Spilled into. Therefore, the pressurized gas blown out from the outlet 331 into the buffer space 40 does not flow back into the local clean environment space 10.

When the pressurized gas blowing process shown in FIG. 8 is completed after a predetermined time has elapsed, the supply of the pressurized gas from the pressurized gas supply source 50 is stopped, and as shown in FIG. The storage container 20 is retracted to a position where the lid 24 side of the housing 22 slightly faces the opening 46 of the buffer space 40, and waits at this position for a predetermined time. Thereby, the inside of the buffer space 40 is separated from the local clean environment space 10 by the inlet 31.
1 and filled with a clean gas flowing out through a minute gap d between the semiconductor wafer loading / unloading opening 32 and the opening / closing door 33, and the inside of the buffer space 40 is shifted to the same atmosphere as the local clean environment space 10. In this case, buffer space 4
As shown by the arrow in FIG.
1. The outside is discharged through the gap d1 and the exhaust port 222 of the housing 22. Thereby, the inside of the buffer space 40 is promptly replaced with the same atmosphere as the local clean environment space.

The buffer space 40 has a locally clean environment space 1
When the atmosphere is shifted to the same atmosphere as 0, the lid 24 of the storage container 20 contacts the opening / closing door 33 and the opening-side end surface of the housing 22 contacts the closing member 31, as shown in FIG. Move to the position. Thereafter, the known suction means incorporated in the opening / closing door 33 is operated to operate the lid 2 of the storage container 20.
Adsorb 4. In this state, by operating the drive unit 35 of the opening and closing device 30 shown in FIG. 1, the opening and closing door 33 is opened and the lid 24 of the storage container 20 is opened. At this time,
The space surrounded by the outer peripheral surface on the opening side of the housing 22, the closing member 31, the side peripheral wall 42, and the frame-shaped front wall 44 is maintained in the same atmosphere as the local clean environment space 10, and the clean gas in this space is exhausted. Since the air flows out to the outside through the opening 441 and the outer circumferential side gap d1 of the housing 22, external air containing pollutants does not enter the space.

According to the present embodiment, the opening 221 of the housing 22 of the storage container 20 facing the semiconductor wafer loading / unloading opening 32 of the closing member 31 that covers the surface of the local clean environment space 10 facing the storage container 20. Outer perimeter and closing member 3
1 and a buffer space 40 for preventing intrusion of contaminants between the end face of the housing 221 and the opening 221 facing the housing 22, and the inside of the buffer space 40 is cleaned by a clean gas introduced from the local clean environment space 10. The lid 24 of the storage container 20 is maintained in the same atmosphere as the space 10, with the housing opening of the storage container 20 facing the buffer space 40.
Can be opened and closed in conjunction with the opening / closing door 33 of the local clean environment space 10, so that intrusion of contaminants into the storage container 20 and the local clean environment space 10 can be prevented.

Further, according to the present embodiment, the inlet for introducing clean air from the local clean environment space 10 to the buffer space at the location of the closing member 31 facing the outer periphery on the opening 221 side of the housing 22. Since the buffer space 311 is provided, the inside of the buffer space 40 can be promptly shifted to the same atmosphere as the local clean environment space 10, and the time for introducing the atmosphere into the buffer space 40 can be reduced. Further, according to the present embodiment, since the frame-shaped front wall 44 constituting the buffer space 40 is provided with the exhaust port 441 communicating with the outside,
The atmosphere inside the buffer space 40 can be quickly replaced with the same atmosphere as the local clean environment space 10, and the atmosphere replacement time in the buffer space 40 can be shortened.

Further, according to the present embodiment, the gap d is formed between the opening 46 of the frame-shaped front wall 44 constituting the buffer space 40 and the outer peripheral surface of the housing 22 facing the opening 221.
1 is formed, and the gap d1 is configured to be kept constant from a position where the opening 221 side of the housing 22 faces the buffer space 40 to a position where it contacts the opening / closing door 33, so that the clean gas in the buffer space 40 is Is generated from the gap d1 to the outside along the outer peripheral surface of the housing 22 on the side of the opening 221 so that the contaminants adhering or accumulating on the surface of the housing 22 can be removed by the gas flow. Can be discharged out of the buffer space 40 together with the buffer space 4.
0 can be kept in a clean atmosphere.

According to the present embodiment, the lid 24 is configured to be fitted into the opening 221 of the housing 22 via the seal member 26, and the housing 22 is connected to the opening 221 of the housing 22.
Exhaust port 2 penetrating from the side end surface toward the outer peripheral surface of housing 22
22 is provided, contaminants adhering or accumulating in the gap between the housing 22 and the lid 24 are removed from the buffer space 4.
The clean gas flowing out from the exhaust port 222 through the exhaust port 222 can be discharged to the outside of the buffer space 40, and the inside of the buffer space 40 can be maintained in a clean atmosphere.

Further, according to the present embodiment, the opening / closing door 33
A pressurized gas blowout port 331 is formed on the surface of the lid 22 of the housing 22 through which the pressurized gas supply source 50 presses the pressurized gas through the blowout port 331 into the buffer space 40. , Surface of lid 24 and housing 2
The contaminants adhering to the end face of the second opening 221 side can be removed by blowing off, and can be discharged out of the buffer space 40 through the exhaust port 222 of the housing 22 and the exhaust port 441 of the buffer space 40.

When the opening area of the clean gas inlet 311 in the buffer space 40 is increased, the pressure in the local clean environment space 10 may decrease. Therefore, in the present invention, a shutter is provided in the clean gas inlet 311 so as to be opened only when the lid 24 is opened, or a separate fan filter unit is added to the clean gas inlet 311. .

[0031]

As described above, according to the storage container and the opening / closing device for the same according to the present invention, the buffer space for blocking the intrusion of contaminants into the region of the storage container facing the semiconductor wafer loading / unloading opening of the local clean environment space is provided. The buffer space is configured to be able to maintain the same atmosphere as the local clean environment space by the clean gas introduced from the local clean environment space, so that intrusion of contaminants into the storage container and the local clean environment space is prevented. It can be prevented beforehand.

Further, according to the present invention, since the inlet for introducing clean air from the local clean environment space to the buffer space is provided at the position of the closing member facing the outer periphery of the opening side of the storage container, The atmosphere in the buffer space can be quickly shifted to the same atmosphere as the local clean environment space, and the time for introducing the atmosphere in the buffer space can be reduced. Further, according to the present invention, since the exhaust space communicating with the outside is provided in the buffer space, the buffer space can be quickly replaced with the same atmosphere as the local clean environment space, and the atmosphere replacement time in the buffer space can be reduced. Can be shortened.

According to the present invention, a gap is formed around the opening side of the storage container facing the buffer space, and the gap is constant from a position where the opening side of the housing faces the buffer space to a position where it contacts the opening / closing door. It is configured so that the clean gas in the buffer space is caused to flow to the outside along the surface around the opening side of the storage container through the gap to thereby keep the storage space in the storage space. Contaminants adhering or accumulating on the surface can be discharged out of the buffer space together with the gas flow, and the inside of the buffer space can be maintained in a clean atmosphere. Further, according to the present invention, the lid of the storage container is configured to be fitted to the opening of the storage container via the sealing member, and the exhaust gas penetrates the storage container from the opening side end surface toward the outer surface of the storage container. Since the opening is provided, the contaminants attached or deposited in the gap between the storage container and the lid can be discharged out of the buffer space by the clean gas flowing out from the buffer space through the exhaust port,
The buffer space can be kept in a clean atmosphere.

Further, according to the present invention, a pressurized gas outlet is formed in the opening / closing door, and the lid of the storage container lid through which the pressurized gas is supplied from the pressurized gas supply source into the buffer space through the outlet. Since it is configured to spray on the surface, the contaminants adhering to the surface of the lid body and the opening side end face of the storage container are removed by blowing off, and discharged to the outside of the buffer space through the storage container exhaust port and the buffer space exhaust port. Can be.

[Brief description of the drawings]

FIG. 1 shows an embodiment of a storage container opening / closing device according to the present invention, in which (A) is a side view showing the entire configuration of the storage container opening / closing device, and (B) is a front view thereof.

FIG. 2 is an enlarged view showing a buffer space portion for preventing intrusion of contaminants of the storage container opening / closing device according to the embodiment of the present invention, where (A) is a longitudinal side view and (B) is a front view thereof. .

FIG. 3 is a side view showing an arrangement relationship between a buffer space and a storage container of the storage container opening / closing device according to the embodiment of the present invention.

FIG. 4 is a configuration explanatory view of a mechanism for blowing a pressurized gas to a buffer space of the storage container opening / closing device according to the embodiment of the present invention.

FIG. 5 is a side view of the storage container according to the embodiment of the present invention.

6A is an enlarged cross-sectional view of a portion A in FIG. 5, and FIG. 6B is a front view of FIG.

FIG. 7 is an explanatory diagram showing an operation process when opening the lid of the storage container in the embodiment of the present invention.

FIG. 8 is an explanatory diagram showing an operation process when the lid of the storage container is opened according to the embodiment of the present invention.

FIG. 9 is an explanatory diagram showing an operation process when opening the lid of the storage container according to the embodiment of the present invention.

FIG. 10 is an explanatory diagram showing an operation process when opening the lid of the storage container in the embodiment of the present invention.

FIG. 11 is a side view showing the overall configuration of a conventional storage container opening / closing device.

FIG. 12 is an explanatory view showing an operation process when the cover of the storage container is opened in the related art.

[Explanation of symbols]

10 ... local clean environment space, 20 ... storage container, 22 ...
... housing, 22A ... gap, 221 ... opening, 222 ...
Exhaust port, 24 ... lid, 26 ... seal member, 30 ...
Opening / closing device, 31 Closing member, 32 Semiconductor wafer loading / unloading opening, 33 Opening / closing door, 35 Drive unit, 36
... Storage container mounting portion, 311... Introduction port, 331... Blowout port, 40... Buffer space, 46.
1 ... exhaust port, 50 ... pressurized gas supply source.

Continued on front page F term (reference) 3E067 AA13 AB40 AC01 AC14 BA07A CA04 CA17 EA17 EB27 FA01 FB11 FC01 5F031 CA02 DA08 DA20 EA12 EA14 FA01 FA12 NA02 NA04 NA09 NA10 NA15 NA20 PA26

Claims (12)

[Claims] 1. A storage container opening / closing device for opening a lid for closing an opening of a housing for accommodating a semiconductor wafer, wherein the storage container is mounted on a mounting portion on which the storage container is mounted and on a mounting portion. A local clean environment space surrounding a predetermined area facing the opening of the housing of the storage container and forming an atmosphere of high cleanliness; and covering a surface of the local clean environment space facing the opening of the housing. A closing member provided, an opening / closing door for opening / closing a semiconductor wafer access opening / closing opening formed at a position of the closing member facing the opening of the housing; A drive unit for opening and closing the lid, and a space between the lid and the closing member and the housing when the storage container is placed on a mounting portion and the lid is opposed to the semiconductor wafer loading / unloading opening. The local cleaning ring around the outside of the opening side of the A buffer space for preventing intrusion of contaminants which is maintained in the same atmosphere as the local clean environment space by a clean gas introduced from the boundary space. 2. The location of the closing member facing the outer periphery of the opening side of the housing so that the inside of the buffer space is promptly shifted to the same atmosphere as the local cleaning environment space. 2. An inlet for introducing clean air into the buffer space is provided.
An opening and closing device for a storage container as described in the above. 3. The storage container opening and closing device according to claim 2, wherein the inlet is configured to be opened and closed by a shutter. 4. The storage container opening / closing device according to claim 2, wherein a fan filter unit is provided at the inlet. 5. An exhaust port for discharging a clean gas introduced into the buffer space out of the buffer space so that the buffer space is promptly replaced with the same atmosphere as the local clean environment space. The storage container opening / closing device according to claim 1, further comprising: 6. A gap is formed around the opening side of the housing facing the buffer space so that the clean gas introduced into the buffer space is discharged along the surface around the opening side. The storage container opening / closing device according to claim 1, characterized in that: 7. The outer periphery of the housing on the opening side is flat so that the size of the gap is kept constant from a position where the opening side of the housing faces the buffer space to a position where the opening contacts the opening / closing door. 7. The opening and closing device for a storage container according to claim 6, wherein the opening and closing device is formed of: 8. The lid is fitted into an opening of the housing via a seal member, and the housing is provided with an exhaust port penetrating from an opening-side end surface of the housing toward an outer surface of the housing. The opening / closing device for a storage container according to claim 1, wherein: 9. A pressurized gas outlet is formed in the opening / closing door, a pressurized gas supply source is connected to the outlet, and pressurized gas from the pressurized gas supply source is passed through the outlet through the buffer space. 2. The apparatus according to claim 1, wherein a contaminant adhered to an opening-side end surface of the lid and the housing is removed by spraying the surface of the lid of the housing facing the inside. Storage container opening and closing device. 10. A housing for accommodating a semiconductor wafer, an opening provided in a front portion of the housing, and provided so as to be fitted with a slight gap in the opening, and in a state fitted in the opening. A storage container provided with a lid closing the opening, wherein an exhaust port communicating the gap and an outer surface of the housing is provided in a state where the opening is closed by the lid. And storage container. 11. The storage container according to claim 10, wherein the lid is configured to be fitted into an opening of the housing via a seal member. 12. The storage container according to claim 10, wherein the outer periphery of the housing on the opening side is formed as a flat surface.