JP5257131B2 - 光学素子の製造方法、ならびに光学素子の作製用原盤およびその製造方法 - Google Patents
光学素子の製造方法、ならびに光学素子の作製用原盤およびその製造方法 Download PDFInfo
- Publication number
- JP5257131B2 JP5257131B2 JP2009040027A JP2009040027A JP5257131B2 JP 5257131 B2 JP5257131 B2 JP 5257131B2 JP 2009040027 A JP2009040027 A JP 2009040027A JP 2009040027 A JP2009040027 A JP 2009040027A JP 5257131 B2 JP5257131 B2 JP 5257131B2
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- Japan
- Prior art keywords
- master
- optical element
- wavelength
- substrate
- resist layer
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009040027A JP5257131B2 (ja) | 2009-02-23 | 2009-02-23 | 光学素子の製造方法、ならびに光学素子の作製用原盤およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009040027A JP5257131B2 (ja) | 2009-02-23 | 2009-02-23 | 光学素子の製造方法、ならびに光学素子の作製用原盤およびその製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007009628A Division JP4539657B2 (ja) | 2007-01-18 | 2007-01-18 | 反射防止用光学素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009199086A JP2009199086A (ja) | 2009-09-03 |
| JP2009199086A5 JP2009199086A5 (enExample) | 2010-03-04 |
| JP5257131B2 true JP5257131B2 (ja) | 2013-08-07 |
Family
ID=41142555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009040027A Expired - Fee Related JP5257131B2 (ja) | 2009-02-23 | 2009-02-23 | 光学素子の製造方法、ならびに光学素子の作製用原盤およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5257131B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8747683B2 (en) | 2009-11-27 | 2014-06-10 | Sharp Kabushiki Kaisha | Die for moth-eye, and method for producing die for moth-eye and moth-eye structure |
| JP2012020389A (ja) * | 2010-07-16 | 2012-02-02 | Oji Paper Co Ltd | 単粒子膜被覆ロールの製造方法、凹凸形成ロールの製造方法、凹凸形成フィルムの製造方法および単粒子膜被覆装置 |
| KR101351596B1 (ko) * | 2013-03-12 | 2014-01-15 | 주식회사 탑나노임프린팅 | 반사 방지재 |
| JP5848320B2 (ja) * | 2013-12-20 | 2016-01-27 | デクセリアルズ株式会社 | 円筒基材、原盤、及び原盤の製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003131390A (ja) * | 2001-03-22 | 2003-05-09 | Seiko Epson Corp | 微細構造体の製造方法、電子装置の製造方法及び製造装置 |
| JP2003187459A (ja) * | 2001-12-19 | 2003-07-04 | Sony Corp | ディスク記録媒体 |
| JP4197100B2 (ja) * | 2002-02-20 | 2008-12-17 | 大日本印刷株式会社 | 反射防止物品 |
| JP4393042B2 (ja) * | 2002-08-05 | 2010-01-06 | 大日本印刷株式会社 | 防眩性反射防止部材、及び光学部材 |
| JP2006251318A (ja) * | 2005-03-10 | 2006-09-21 | Matsushita Electric Ind Co Ltd | 反射防止構造体を有する部材の製造方法 |
| JP4539657B2 (ja) * | 2007-01-18 | 2010-09-08 | ソニー株式会社 | 反射防止用光学素子 |
-
2009
- 2009-02-23 JP JP2009040027A patent/JP5257131B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009199086A (ja) | 2009-09-03 |
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