JP5231566B2 - 圧力センサ - Google Patents
圧力センサ Download PDFInfo
- Publication number
- JP5231566B2 JP5231566B2 JP2010533196A JP2010533196A JP5231566B2 JP 5231566 B2 JP5231566 B2 JP 5231566B2 JP 2010533196 A JP2010533196 A JP 2010533196A JP 2010533196 A JP2010533196 A JP 2010533196A JP 5231566 B2 JP5231566 B2 JP 5231566B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- coupled
- pressure sensor
- vertical beam
- flexible diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000000034 method Methods 0.000 claims description 43
- 230000008569 process Effects 0.000 claims description 41
- 239000012530 fluid Substances 0.000 claims description 28
- 238000004891 communication Methods 0.000 claims description 18
- 239000003990 capacitor Substances 0.000 claims description 16
- 230000008859 change Effects 0.000 claims description 9
- 239000007787 solid Substances 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 7
- 230000004044 response Effects 0.000 description 17
- 238000010586 diagram Methods 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000009530 blood pressure measurement Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000006855 networking Effects 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910000701 elgiloys (Co-Cr-Ni Alloy) Inorganic materials 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
- G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Measuring Fluid Pressure (AREA)
Description
工業プロセス環境において非常に有用になってきた一つの装置が、圧力トランスミッタである。圧力トランスミッタは、プロセス容器内の流体圧力を検出して、その圧力を示す電気信号を制御システムに提供する装置である。一般的に、圧力トランスミッタは、差圧または管路の圧力を測定できる圧力センサを有する。差圧は、二つの圧力ポートの間の圧力の差である。管路の圧力は、その圧力ポートのいずれか一つの圧力である。いくつかの場合において、圧力センサは、そこに加えられる圧力に応じて撓む可撓性ダイヤフラムを含み、そのダイヤフラムの上、またはそれに取り付けられ、ダイヤフラムの撓みおよびそれによる圧力に応じてその電気的特性が変動する電気的構造体を有する。静電容量式圧力センサを用いる圧力トランスミッタは、一般的に圧力センサの静電容量値を増加させてセンサ分解能を増加させる誘電性充填流体で充填される。しかしながら、このようなセンサが漏れを起こした場合には、シリコーンオイルである場合もある誘電性充填流体がシステムに流出し、それによって、生成物またはプロセス流体自体を汚染する。
【先行技術文献】
【特許文献】
【特許文献1】 特表2003−522942号公報
図1は、清浄プロセス設備において動作する差圧トランスミッタの概略図である。差圧トランスミッタ10は、一対のプロセス流体圧力導管またはタップ14,16を介してプロセス流体容器(配管12として概略的に図示される)に動作可能に結合する。各タップ14および16は、配管12を通るプロセス流体の流れをある程度狭窄する、流れ狭窄部18の両側に配置され、それによってプロセス流体の流量に関連する、狭窄部18を跨ぐ差圧を生成する。配管として概略的に図示されているが、プロセス流体容器12は、プロセス流体を保存および/または運搬可能な任意の適切なプロセス容器であることができる。加えて、本明細書で用いられるプロセス流体としては、任意のプロセス気体または液体を意味することを意図している。差圧トランスミッタ10は流れ狭窄部18の両側に結合する差圧ポートを有するように図示されているが、差圧トランスミッタのさまざまな他の使用も考慮される。
Claims (12)
- 一対のプロセス流体圧力ポートであって、各ポートが、プロセス流体への露出に適合する可撓性ダイヤフラムを有し、第1の可撓性ダイヤフラムが第1の垂直ビーム部に結合し、第2の可撓性ダイヤフラムが第2の垂直ビーム部に結合するポートと、
各垂直ビーム部に個別に結合する片持ちビーム部と、
圧力センサ内に配置され、各プロセス流体ポート間の差圧によって変動する静電容量値を有する第1可変コンデンサであって、少なくとも一方の可撓性ダイヤフラムに少なくとも一方の垂直ビーム部を介して動作可能に結合する少なくとも一つの静電容量プレートによって形成される第1可変コンデンサと、
圧力センサ内に配置され、管路の圧力によって変動する静電容量値を有する第2可変コンデンサであって、少なくとも一方の可撓性ダイヤフラムに少なくとも一方の垂直ビーム部を介して動作可能に結合する少なくとも一つの静電容量プレートによって形成される第2可変コンデンサと
を含む、圧力センサ。 - 一対の可撓性ダイヤフラムが、互いに軸方向に整列している、請求項1記載の圧力センサ。
- 可撓性ダイヤフラムが、ソリッドな支柱によって互いに結合する、請求項2記載の圧力センサ。
- 一対の可撓性ダイヤフラムが、実質的に同じ平面に配置される、請求項1記載の圧力センサ。
- 可撓性ダイヤフラムが、ソリッドな支柱によって互いに結合する、請求項1記載の圧力センサ。
- 支柱が、過圧撓みを抑制するように構成されるフランジを含む、請求項5記載の圧力センサ。
- 各可撓性ダイヤフラムがそれぞれ垂直ビームに結合しており、横ビームが、そこに従属するパドル部材を有する垂直ビームに跨り、パドル部材が複数の静電容量プレートを有し、各静電容量プレートが異なる可変コンデンサの一部を形成する、請求項1記載の圧力センサ。
- 一対のプロセス流体圧力ポート間の差圧の変化が、パドル部材の回転を生成する、請求項7記載の圧力センサ。
- 各可撓性ダイヤフラムがそれぞれ垂直ビームおよび片持ちビーム部に結合し、各片持ちビーム部が、それぞれ、静電容量プレートを有する傾斜部に結合してその静電容量プレートは傾斜部上に配置され、傾斜部上の静電容量プレートが第1可変コンデンサを形成し、少なくとも一つの片持ちビーム部が、底面に配置される追加の静電容量プレートを有し、可撓性ダイヤフラムに隣接して配置される固定された静電容量プレートと協働して第2可変コンデンサを形成する、請求項1記載の圧力センサ。
- 各可撓性ダイヤフラムがそれぞれ垂直ビームおよび片持ちビーム部に結合し、各片持ちビーム部が下面に静電容量プレートを有するものであって、
一方の垂直ビームが他方の垂直ビームより短いため、片持ちビーム部が互いに重なるものであって、
短い方の垂直ビームに結合する片持ちビーム部が、その上面に静電容量プレートを有して、他方の片持ちビーム部上の静電容量プレートと協働して、第1可変コンデンサを形成し、
静電容量プレートが、可撓性ダイヤフラムに隣接して固定的に搭載されて、短い方の垂直ビームに取り付けられた片持ちビーム部の下面の静電容量プレートと協働して、第2可変コンデンサを形成する、請求項1記載の圧力センサ。 - 請求項1に記載の圧力センサと、
プロセス通信ループに結合可能であって、ループを介して通信するように構成されるループ通信機と、
ループ通信機に結合するコントローラと、
プロセス通信ループを介して、差圧および管路の圧力の表示のうち少なくとも一方を提供するために、コントローラおよび圧力センサに結合する測定回路と
を含む、圧力トランスミッタ。 - プロセス通信ループに結合可能であって、プロセス通信ループから受けるエネルギによって圧力トランスミッタに全面的に電力供給するように構成される、電力モジュールをさらに含む、請求項11記載の圧力トランスミッタ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/983,414 | 2007-11-08 | ||
US11/983,414 US7779698B2 (en) | 2007-11-08 | 2007-11-08 | Pressure sensor |
PCT/US2008/082430 WO2009061782A2 (en) | 2007-11-08 | 2008-11-05 | Pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011503576A JP2011503576A (ja) | 2011-01-27 |
JP5231566B2 true JP5231566B2 (ja) | 2013-07-10 |
Family
ID=40419038
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010533196A Active JP5231566B2 (ja) | 2007-11-08 | 2008-11-05 | 圧力センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US7779698B2 (ja) |
EP (1) | EP2208035B1 (ja) |
JP (1) | JP5231566B2 (ja) |
CN (1) | CN101849170B (ja) |
WO (1) | WO2009061782A2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2340428A1 (en) * | 2008-04-18 | 2011-07-06 | Socovar Societe En Commandite | System for sensing and displaying softness and force |
US8429978B2 (en) | 2010-03-30 | 2013-04-30 | Rosemount Inc. | Resonant frequency based pressure sensor |
US8234927B2 (en) * | 2010-06-08 | 2012-08-07 | Rosemount Inc. | Differential pressure sensor with line pressure measurement |
DE102014200500A1 (de) * | 2014-01-14 | 2015-07-16 | Robert Bosch Gmbh | Mikromechanische Drucksensorvorrichtung und entsprechendes Herstellungsverfahren |
FR3018916B1 (fr) * | 2014-03-19 | 2017-08-25 | Commissariat Energie Atomique | Capteur de mesure de pression differentielle microelectromecanique et/ou nanoelectromecanique |
WO2015153938A1 (en) * | 2014-04-04 | 2015-10-08 | Robert Bosch Gmbh | Membrane-based sensor and method for robust manufacture of a membrane-based sensor |
JP6396868B2 (ja) * | 2015-09-02 | 2018-09-26 | 長野計器株式会社 | 物理量測定装置 |
EP3258235A1 (en) * | 2016-06-16 | 2017-12-20 | Huba Control Ag | Differential pressure transducer |
DE102017205837A1 (de) * | 2017-04-05 | 2018-10-11 | Robert Bosch Gmbh | Sensorelement zur Erfassung mindestens einer Eigenschaft eines fluiden Mediums |
US10598559B2 (en) | 2017-06-29 | 2020-03-24 | Rosemount Inc. | Pressure sensor assembly |
WO2019222598A1 (en) | 2018-05-17 | 2019-11-21 | Rosemount Inc. | Measuring element and measuring device comprising the same |
US11209296B2 (en) * | 2018-09-28 | 2021-12-28 | Rosemount Inc. | Non-intrusive process fluid pressure measurement system |
CN111442875B (zh) * | 2020-03-13 | 2021-03-19 | 北京航空航天大学 | 一种水下压差传感器及制备方法 |
Family Cites Families (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3318153A (en) * | 1962-12-04 | 1967-05-09 | Rosemount Eng Co Ltd | Diode loop capacitor comparative circuit including a pair of transformer windings coupled in phase |
US3461416A (en) | 1967-12-04 | 1969-08-12 | Lockheed Aircraft Corp | Pressure transducer utilizing semiconductor beam |
GB1340703A (en) * | 1970-04-22 | 1973-12-12 | Atomic Energy Authority Uk | Transducers for measuring apparatus |
US4368575A (en) | 1980-07-14 | 1983-01-18 | Data Instruments, Inc. | Pressure transducer--method of making same |
US4295117A (en) | 1980-09-11 | 1981-10-13 | General Motors Corporation | Pressure sensor assembly |
JPS57139633A (en) * | 1981-02-24 | 1982-08-28 | Yokogawa Hokushin Electric Corp | Capacitive pressure-difference converter |
JPS57142534A (en) * | 1981-02-27 | 1982-09-03 | Yokogawa Hokushin Electric Corp | Transmitting device for pressure difference |
US4507973A (en) | 1983-08-31 | 1985-04-02 | Borg-Warner Corporation | Housing for capacitive pressure sensor |
US5056373A (en) | 1987-01-21 | 1991-10-15 | Span Instruments, Inc. | Flow responsive transmitter and indicator |
US4785669A (en) | 1987-05-18 | 1988-11-22 | Mks Instruments, Inc. | Absolute capacitance manometers |
US4932265A (en) | 1987-12-11 | 1990-06-12 | The Babcock & Wilcox Company | Pressure transducer using thick film resistor |
US4875135A (en) | 1988-12-02 | 1989-10-17 | Texas Instruments Incorporated | Pressure sensor |
DE3919411A1 (de) | 1989-03-07 | 1990-12-20 | Pfister Gmbh | Drucksensor und zugehoeriges herstellverfahren |
US5165281A (en) | 1989-09-22 | 1992-11-24 | Bell Robert L | High pressure capacitive transducer |
US5134887A (en) | 1989-09-22 | 1992-08-04 | Bell Robert L | Pressure sensors |
SU1760388A1 (ru) | 1989-12-29 | 1992-09-07 | Конструкторское Бюро Общего Машиностроения | Силомоментный датчик |
US5115676A (en) | 1990-01-10 | 1992-05-26 | Setra Systems, Inc. | Flush-mounted pressure sensor |
US5174014A (en) | 1990-07-27 | 1992-12-29 | Data Instruments, Inc. | Method of manufacturing pressure transducers |
US5125275A (en) | 1991-06-19 | 1992-06-30 | Honeywell Inc. | Pressure sensor package |
US5285690A (en) | 1992-01-24 | 1994-02-15 | The Foxboro Company | Pressure sensor having a laminated substrate |
JPH05340828A (ja) | 1992-05-18 | 1993-12-24 | Fujikura Ltd | 半導体圧力センサ |
JPH05332862A (ja) | 1992-05-27 | 1993-12-17 | Fuji Electric Co Ltd | 圧力センサの組立構造 |
JPH05332866A (ja) | 1992-06-04 | 1993-12-17 | Fuji Electric Co Ltd | 油封入型半導体圧力センサ |
JP3049944B2 (ja) | 1992-06-04 | 2000-06-05 | 富士電機株式会社 | 油封入型半導体圧力センサの組立方法 |
US5449002A (en) | 1992-07-01 | 1995-09-12 | Goldman; Robert J. | Capacitive biofeedback sensor with resilient polyurethane dielectric for rehabilitation |
JPH06174574A (ja) | 1992-12-01 | 1994-06-24 | Nippon M K S Kk | 圧力センサ |
JPH06294691A (ja) | 1993-04-08 | 1994-10-21 | Nippon M K S Kk | 圧力センサ |
US5329819A (en) | 1993-05-06 | 1994-07-19 | Kavlico Corporation | Ultra-high pressure transducer |
US5461922A (en) | 1993-07-27 | 1995-10-31 | Lucas-Novasensor | Pressure sensor isolated within housing having integral diaphragm and method of making same |
US5606513A (en) | 1993-09-20 | 1997-02-25 | Rosemount Inc. | Transmitter having input for receiving a process variable from a remote sensor |
US5542300A (en) | 1994-01-24 | 1996-08-06 | Setra Systems, Inc. | Low cost, center-mounted capacitive pressure sensor |
US5637802A (en) | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
US5731522A (en) | 1997-03-14 | 1998-03-24 | Rosemount Inc. | Transmitter with isolation assembly for pressure sensor |
JP3476199B2 (ja) | 1995-04-28 | 2003-12-10 | ローズマウント インコーポレイテッド | 高圧隔離マウント組立体を有する圧力トランスミッタ |
US5705751A (en) | 1995-06-07 | 1998-01-06 | Setra Systems, Inc. | Magnetic diaphragm pressure transducer with magnetic field shield |
US5661245A (en) | 1995-07-14 | 1997-08-26 | Sensym, Incorporated | Force sensor assembly with integrated rigid, movable interface for transferring force to a responsive medium |
US5693887A (en) | 1995-10-03 | 1997-12-02 | Nt International, Inc. | Pressure sensor module having non-contaminating body and isolation member |
US5596147A (en) | 1995-11-17 | 1997-01-21 | Wilda; Douglas W. | Coplanar pressure sensor mounting for remote sensor |
US5808206A (en) | 1996-01-16 | 1998-09-15 | Mks Instruments, Inc. | Heated pressure transducer assembly |
US5672832A (en) | 1996-02-15 | 1997-09-30 | Nt International, Inc. | Chemically inert flow meter within caustic fluids having non-contaminating body |
WO1997032320A1 (en) | 1996-02-28 | 1997-09-04 | Sigma-Netics, Inc. | Improved strain gauge and method of manufacture |
US5656780A (en) | 1996-03-28 | 1997-08-12 | Kavlico Corporation | Capacitive pressure transducer with an integrally formed front housing and flexible diaphragm |
US5672808A (en) * | 1996-06-11 | 1997-09-30 | Moore Products Co. | Transducer having redundant pressure sensors |
JPH10148591A (ja) | 1996-09-19 | 1998-06-02 | Fuji Koki Corp | 圧力検出装置 |
US5796007A (en) | 1996-09-23 | 1998-08-18 | Data Instruments, Inc. | Differential pressure transducer |
US5811685A (en) | 1996-12-11 | 1998-09-22 | Mks Instruments, Inc. | Fluid pressure sensor with contaminant exclusion system |
TW354371B (en) | 1997-01-09 | 1999-03-11 | Peter B Hutton | A module valve manifold, a valve module and an integral valve manifold/differential pressure transducer/differential pressure transmitter |
US5942692A (en) | 1997-04-10 | 1999-08-24 | Mks Instruments, Inc. | Capacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signals |
US5911162A (en) | 1997-06-20 | 1999-06-08 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
US5965821A (en) | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
US5974893A (en) | 1997-07-24 | 1999-11-02 | Texas Instruments Incorporated | Combined pressure responsive transducer and temperature sensor apparatus |
US6009757A (en) | 1997-07-28 | 2000-01-04 | Texas Instruments Incorporated | Voltage regulated pressure transducer apparatus |
DE19740244A1 (de) * | 1997-09-12 | 1998-02-26 | Klaus Prof Dr Ing Bethe | Beschleunigungs-unempfindlicher, planarer Differenzdruck-Sensor in Mikrotechnik |
US5915281A (en) | 1997-10-03 | 1999-06-22 | Delco Electronics Corporation | Silicon force and displacement sensor |
US5867886A (en) | 1997-10-20 | 1999-02-09 | Delco Electronics Corp. | Method of making a thick film pressure sensor |
US5939639A (en) | 1997-12-04 | 1999-08-17 | Setra Systems, Inc. | Pressure transducer housing with barometric pressure isolation |
US6029525A (en) | 1998-02-04 | 2000-02-29 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
FR2775075B1 (fr) * | 1998-02-18 | 2000-05-05 | Theobald Sa A | Capteur de pression differentielle |
US6295875B1 (en) * | 1999-05-14 | 2001-10-02 | Rosemount Inc. | Process pressure measurement devices with improved error compensation |
CN2390194Y (zh) * | 1999-06-22 | 2000-08-02 | 大连理工大学 | 自举差动电容传感器 |
US6473711B1 (en) | 1999-08-13 | 2002-10-29 | Rosemount Inc. | Interchangeable differential, absolute and gage type of pressure transmitter |
AU2001234961A1 (en) | 2000-02-11 | 2001-08-20 | Rosemount, Inc. | Optical pressure sensor |
US6782754B1 (en) | 2000-07-07 | 2004-08-31 | Rosemount, Inc. | Pressure transmitter for clean environments |
JP2006208225A (ja) * | 2005-01-28 | 2006-08-10 | Nippon M K S Kk | 差圧センサー |
-
2007
- 2007-11-08 US US11/983,414 patent/US7779698B2/en active Active
-
2008
- 2008-11-05 WO PCT/US2008/082430 patent/WO2009061782A2/en active Application Filing
- 2008-11-05 EP EP08846363.3A patent/EP2208035B1/en active Active
- 2008-11-05 CN CN200880114596.0A patent/CN101849170B/zh active Active
- 2008-11-05 JP JP2010533196A patent/JP5231566B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US20090120195A1 (en) | 2009-05-14 |
EP2208035B1 (en) | 2013-07-31 |
WO2009061782A2 (en) | 2009-05-14 |
CN101849170B (zh) | 2014-09-10 |
WO2009061782A3 (en) | 2009-07-30 |
CN101849170A (zh) | 2010-09-29 |
JP2011503576A (ja) | 2011-01-27 |
EP2208035A2 (en) | 2010-07-21 |
US7779698B2 (en) | 2010-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5231566B2 (ja) | 圧力センサ | |
EP2191249B1 (en) | Improved differential pressure sensor isolation in a process fluid pressure transmitter | |
JP5409965B2 (ja) | ライン圧力測定を伴う差圧センサ | |
EP2593766B1 (en) | Differential pressure transmitter with complimentary dual absolute pressure sensors | |
CN107209076B (zh) | 具有超压保护的压力变送器 | |
CN101981425B (zh) | 具有增强的介电填充流体的工业压力传感器 | |
EP2761264B1 (en) | Process fluid pressure transmitter with separated sensor and sensor electronics | |
EP3638998B1 (en) | Pressure sensor module for high working pressure applications | |
US8042401B2 (en) | Isolation system for process pressure measurement | |
EP2132545B1 (en) | Nano-particle modified fill fluid for pressure transmitters | |
US9316553B2 (en) | Span line pressure effect compensation for diaphragm pressure sensor | |
CN110967138A (zh) | 非侵入式过程流体压力测量系统 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120418 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120424 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120720 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120727 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120814 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120821 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120830 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130226 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130321 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160329 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5231566 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |