JP5225981B2 - 空中浮遊分析物を空気中で直接検出するための自己励振・自己検出型圧電カンチレバーセンサー - Google Patents
空中浮遊分析物を空気中で直接検出するための自己励振・自己検出型圧電カンチレバーセンサー Download PDFInfo
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- JP5225981B2 JP5225981B2 JP2009509876A JP2009509876A JP5225981B2 JP 5225981 B2 JP5225981 B2 JP 5225981B2 JP 2009509876 A JP2009509876 A JP 2009509876A JP 2009509876 A JP2009509876 A JP 2009509876A JP 5225981 B2 JP5225981 B2 JP 5225981B2
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- piezoelectric
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Classifications
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- G—PHYSICS
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- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0255—(Bio)chemical reactions, e.g. on biosensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
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- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
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- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Micromachines (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US74695106P | 2006-05-10 | 2006-05-10 | |
| US60/746,951 | 2006-05-10 | ||
| US80702006P | 2006-07-11 | 2006-07-11 | |
| US60/807,020 | 2006-07-11 | ||
| PCT/US2007/011402 WO2008020903A2 (en) | 2006-05-10 | 2007-05-10 | Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009536738A JP2009536738A (ja) | 2009-10-15 |
| JP2009536738A5 JP2009536738A5 (https=) | 2011-07-07 |
| JP5225981B2 true JP5225981B2 (ja) | 2013-07-03 |
Family
ID=38683473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009509876A Expired - Fee Related JP5225981B2 (ja) | 2006-05-10 | 2007-05-10 | 空中浮遊分析物を空気中で直接検出するための自己励振・自己検出型圧電カンチレバーセンサー |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP2032976A1 (https=) |
| JP (1) | JP5225981B2 (https=) |
| AU (1) | AU2007284995A1 (https=) |
| CA (1) | CA2651840A1 (https=) |
| WO (1) | WO2008020903A2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101819969B1 (ko) | 2016-04-15 | 2018-01-19 | 전남대학교산학협력단 | 압저항 센서의 신뢰성이 향상된 pdms 폴리머 외팔보 구조체 |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7497133B2 (en) | 2004-05-24 | 2009-03-03 | Drexel University | All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement |
| US8171795B1 (en) | 2006-01-23 | 2012-05-08 | Drexel University | Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air |
| US8481335B2 (en) | 2006-11-27 | 2013-07-09 | Drexel University | Specificity and sensitivity enhancement in cantilever sensing |
| WO2008067386A2 (en) | 2006-11-28 | 2008-06-05 | Drexel University | Piezoelectric microcantilever sensors for biosensing |
| US7992431B2 (en) | 2006-11-28 | 2011-08-09 | Drexel University | Piezoelectric microcantilevers and uses in atomic force microscopy |
| EP2115448A4 (en) | 2007-02-01 | 2013-01-30 | Univ Drexel | PORTABLE PHASE SHIFT DETECTOR FOR SENSOR APPLICATIONS |
| US8241569B2 (en) | 2007-11-23 | 2012-08-14 | Drexel University | Lead-free piezoelectric ceramic films and a method for making thereof |
| US8741663B2 (en) | 2008-03-11 | 2014-06-03 | Drexel University | Enhanced detection sensitivity with piezoelectric sensors |
| WO2009140660A2 (en) | 2008-05-16 | 2009-11-19 | Drexel University | System and method for evaluating tissue |
| JP5463788B2 (ja) * | 2009-08-18 | 2014-04-09 | 富士通株式会社 | イオン分析装置、及びイオン分析方法 |
| US8722427B2 (en) | 2009-10-08 | 2014-05-13 | Drexel University | Determination of dissociation constants using piezoelectric microcantilevers |
| WO2013023215A1 (en) * | 2011-08-11 | 2013-02-14 | William Marsh Rice University | Methods for sensitive and rapid detection of molecules |
| WO2013064157A1 (en) | 2011-11-04 | 2013-05-10 | Danmarks Tekniske Universitet | Resonant fiber based aerosol particle sensor and method |
| JP6150671B2 (ja) * | 2013-08-22 | 2017-06-21 | オリンパス株式会社 | ガスセンサ |
| JP6392679B2 (ja) * | 2015-02-09 | 2018-09-19 | オリンパス株式会社 | ガスセンサ |
| EP3322665B1 (en) | 2015-07-13 | 2023-11-22 | Intrepid Visions Inc. | Systems and methods for micro-cantilever actuation by base excitation |
| BG112997A (bg) | 2019-09-17 | 2021-03-31 | "Амг Технолоджи" Оод | Прибор за мониторинг на газове |
| CN112834571B (zh) * | 2020-12-30 | 2023-07-21 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于他激式压电元件的气液两相检测装置及方法 |
| CN112834570B (zh) * | 2020-12-30 | 2023-09-22 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于自激式压电元件的气液两相检测装置及方法 |
| CN112736187B (zh) * | 2020-12-30 | 2024-02-02 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于自激式压电元件的排气装置及方法 |
| CN113294411B (zh) * | 2021-04-29 | 2023-11-07 | 中国航空工业集团公司金城南京机电液压工程研究中心 | 一种基于音圈元件的排气装置及方法 |
| KR20260016904A (ko) * | 2023-03-07 | 2026-02-04 | 글라이더테크, 인코포레이티드 | 가교 구조 변화 수용체를 갖는 통합된 mems 센서 |
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| JP3545269B2 (ja) * | 1998-09-04 | 2004-07-21 | 日本碍子株式会社 | 質量センサ及び質量検出方法 |
| US7458265B2 (en) * | 2003-10-27 | 2008-12-02 | Drexel University | Piezoelectric cantilever sensors |
| KR100613398B1 (ko) * | 2003-11-25 | 2006-08-17 | 한국과학기술연구원 | 캔틸레버 센서형 분석 시스템, 제조 방법 및 이를 이용한극미세 물질 감지 방법 |
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| KR101819969B1 (ko) | 2016-04-15 | 2018-01-19 | 전남대학교산학협력단 | 압저항 센서의 신뢰성이 향상된 pdms 폴리머 외팔보 구조체 |
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| Publication number | Publication date |
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| JP2009536738A (ja) | 2009-10-15 |
| AU2007284995A1 (en) | 2008-02-21 |
| WO2008020903A2 (en) | 2008-02-21 |
| WO2008020903A3 (en) | 2009-02-05 |
| EP2032976A1 (en) | 2009-03-11 |
| CA2651840A1 (en) | 2008-02-21 |
| AU2007284995A2 (en) | 2009-02-12 |
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