JP5195597B2 - Filter device and fan filter unit equipped with the same - Google Patents

Description

  The present invention relates to a filter device used in a manufacturing apparatus that requires a clean space, such as a semiconductor, a liquid crystal, and a plasma display panel.

  Conventionally, in this type of filter device, a rectifying unit having a rectifying plate in a direction orthogonal to the filter folding interval is provided on the outlet side in order to prevent turbulence.

JP-A-4-290512

  Conventionally, spacers for maintaining the crease pitch at substantially equal intervals have been arranged in the folds of the filter unit at right angles to the folds in the plurality of rows, and the gas passing through the filter is turbulently flowed by the plurality of rows of spacers. Thus, the wind speed distribution on the blowout surface may be disturbed.

  This invention solves such a conventional subject, and provides the filter apparatus which can improve the turbulent flow which arises at the time of the filter spacer passage by the baffle plate near the filter blowing face, and can adjust the position of the baffle plate. It is aimed.

  In order to achieve the above object, the filter device of the present invention is folded at substantially equal intervals, and a folding filter in which spacers that hold the folding intervals are provided at substantially equal intervals in a direction orthogonal to the folding direction, and the spacing between the spacers, The perforated plate having a plurality of slotted holes arranged at substantially the same interval, and the perforated plate is provided on the outlet side of the filter in a state where the perforation is orthogonal to the folding direction of the filter. Is.

  Further, another means is provided with an outer frame for holding the shape on the outlet side of the folding filter, a rail-shaped slide guide is provided so as to be joined to two opposite sides of the outer frame, , Held on the slide guide.

  Another means is that a plurality of slide guides are provided and a plurality of the perforated plates are mounted.

  In another means, a scale display of the slide position is provided on a part of the perforated plate.

  Another means is that a plurality of slide bolts are mounted with an interval between the filter and the outer frame.

  Another means is that a pin for preventing the slide is inserted at the tip of the slide bolt.

  In another means, the head of the slide bolt is a handle.

  In another means, a positioning bolt for the porous plate is provided on a part of the outer frame.

  In another means, a handle is attached to one side of the perforated plate so as to be easily put in and out by hand.

  According to the present invention, it is possible to obtain a filter device having an effect that it is possible to improve the turbulent flow when passing through the filter by the action of the rectifying plate in the vicinity of the filter blowing surface.

  Further, it is possible to obtain an effect that the position can be changed easily and smoothly if necessary.

  Moreover, the effect that an arbitrary opening area and installation position can be adjusted using a multistage perforated-plate opening overlap by upper and lower installation is acquired.

  In addition, the slide amount can be set finely, and the effect that the adjustment position can be visually confirmed can be obtained.

  Moreover, the effect that the slide frame position can be adjusted to an arbitrary position in the vertical direction is obtained.

  Further, it is possible to prevent the slide bolt from excessively rotating and to prevent the slide frame from falling off.

  Moreover, the effect that it can be rotated manually without using a tool is acquired.

  Moreover, the effect that a perforated panel can be fixed to arbitrary positions is acquired.

  Moreover, the effect that the movement operation | movement of a perforated plate can be performed smoothly and easily is acquired.

(A) longitudinal sectional view, (b) bottom view, (c) wind speed distribution diagram, (d) wind speed distribution diagram of the filter device of Embodiment 1 of the present invention Partial detail drawing of the outer frame A of Embodiment 1 of this invention Partial detail drawing of the outer frame B of Embodiment 1 of this invention Component detailed drawing of the slide bolt of Embodiment 1 of this invention Detailed view of components of slide bolt provided with handle according to embodiment 1 of the present invention Partial detail drawing of the outer frame of Embodiment 1 of this invention Part detailed drawing of the porous plate of Embodiment 1 of the present invention

  The invention according to claim 1 of the present invention is a folding filter in which spacers that are folded at substantially equal intervals and that hold the folding intervals are provided at substantially equal intervals in a direction orthogonal to the folding direction, and approximately the same interval as the interval between the spacers. The perforated plate having a plurality of slot-shaped perforations arranged in a row, and the perforated plate is provided on the outlet side of the filter in a state where the perforation is orthogonal to the folding direction of the filter. In the vicinity of the filter blowing surface, the rectifying plate can act to improve the turbulent flow when passing through the filter.

  According to a second aspect of the present invention, an outer frame for holding the shape is provided on the outlet side of the folding filter, and a rail-shaped slide guide is joined to two opposite sides of the outer frame. The perforated plate is provided on the slide guide, and has a function that the position can be changed smoothly and easily if necessary.

  In the invention according to claim 3 of the present invention, the slide guide is provided in a plurality of stages, and a plurality of the perforated plates are mounted. It has the effect | action that the opening area and installation position of can be adjusted.

  The invention according to claim 4 of the present invention is provided with a scale display of the slide position on a part of the perforated plate, and has an effect that the slide amount can be set finely and the adjustment position can be visually confirmed.

  In the invention according to claim 5 of the present invention, a space between the filter and the outer frame is provided and a plurality of slide bolts are mounted, and the position of the outer frame can be adjusted to an arbitrary position in the vertical direction. It has the action.

  According to a sixth aspect of the present invention, a pin for preventing the slide bolt is inserted at the tip of the slide bolt, the slide bolt is prevented from rotating excessively and the outer frame is prevented from falling off. Has the effect of

  The invention according to claim 7 of the present invention is such that the head of the slide bolt is used as a handle, and has the effect of being manually rotated without using a tool.

  The invention according to claim 8 of the present invention is such that a positioning bolt for the porous plate is provided in a part of the outer frame, and has an effect that the porous plate can be fixed at an arbitrary position.

  The invention according to claim 9 of the present invention is such that a handle for making it easy to put in and out by hand is attached to one side of the perforated plate, and the operation of moving the perforated plate can be performed smoothly and easily. Have

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, in the filter device of the first embodiment, a blower 4 including an impeller 2 and a motor 3 is built in a box-shaped chamber 5. The blower 4 is supported by a support 6 that supports the motor 3 at the center and is supported by the chamber 5. A filter 7 is provided below the blower 4 on the outlet side. The filter 7 is formed by folding a nonwoven fabric for collecting dust into a bellows shape. On the outlet side of the filter 7, spacers 9 for maintaining the crease pitch at substantially equal intervals are arranged orthogonal to the plural rows of creases. Below the filter 7, a perforated plate 8 having a plurality of elongated hole-shaped holes arranged perpendicularly to the folds of the filter 7 and arranged at substantially the same interval P <b> 2 as the interval P <b> 1 of the spacer 9 is arranged. The perforated plate 8 is designed so as to be parallel to the spacer 9 of the filter 7 and the position of the hole of the perforated plate 8 is disposed below the spacer 9 of the filter 7.

  In the above configuration, by operating the blower 4, air is sucked from the suction port 1 and sent into the chamber 5. The airflow blown out from the blower 4 passes through the filter 7. As shown in FIG. 1C, the wind speed distribution at the time of passing through the filter 7 becomes a turbulent flow with a low wind speed below the spacer 9 as shown in FIG. 1C. However, when gas passes through the porous plate 8, it can be rectified into a wind speed distribution as shown in FIG.

  Next, attachment of the porous plate 8 will be described in detail. 2 and 3 show the lower side of the filter 7.

  As shown in FIG. 2, the opposite side is bent inward into an L shape on the lower side, which is the blowout side of the filter 7, and the upper part of the side perpendicular to it is joined to the outer frame of the filter 7 connected by a flat plate. The provided box-shaped outer frame A <b> 11 is provided and fixed with bolts 12. Rail-shaped slide guides 10 are provided inside a pair of L-shaped sides of the outer frame A11 facing each other, and the porous plate 8 is inserted across the pair of slide guides 10.

  In the above configuration, the rectifying action can be adjusted by moving the perforated plate 8 through the turbulent flow after passing through the filter 7.

  Further, as shown in FIG. 3, a plurality of rail-like slide guides 10 may be provided, and a plurality of perforated plates 8 may be inserted across the plurality of slide guides 10.

  In this case, the opening area can be adjusted and the rectifying action can be adjusted by moving a plurality of perforated plates 8 through the turbulent flow after passing through the filter 7.

  Moreover, by sticking the scale 22 to the porous plate 8, the slide amount of the porous plate 8 can be finely adjusted, and the adjustment position can be visually confirmed.

  Further, by providing an interval between the filter 7 and the outer frame B21 and adjusting the interval with the slide bolt 23, the rectification position to the perforated plate 8 after passing through the filter 7 can be arbitrarily set. it can.

  Next, a method for fixing the slide guide 10 will be described with reference to FIGS. 4 and 5. As shown in FIG. 4, a fixing pin 31 is provided at the tip of the slide bolt 23 that fixes the slide guide 10. According to such a configuration, when the slide bolt 23 is rotated and the outer frame B21 is lowered, it can be prevented from being caught by the fixing pin 31 and falling off.

  Further, as shown in FIG. 5, a handle 41 may be provided on the head of the slide bolt 23. According to such a configuration, the slide bolt 23 can be rotated without using a tool, and the height adjustment of the filter 7 and the outer frame B21 can be performed in a short time.

  Further, as shown in FIG. 6, by providing positioning bolts 51 for fixing the porous plate 8 to the outer frame B21, the porous plate 8 can be fixed at an arbitrary position and can be prevented from shifting.

  Further, as shown in FIG. 7, by providing a handle 61 on one side of the porous plate 8, the porous plate 8 can be reliably and smoothly moved, and workability is improved.

  By rectifying the turbulent flow on the filter blowout surface in the vertical and horizontal directions, the best wind speed distribution can be improved, necessitating clean spaces such as semiconductor factories and food factories, and requiring a uniform wind speed distribution. It can be applied to clean rooms and manufacturing equipment.

1 Suction Port 2 Impeller 3 Motor 4 Blower 5 Chamber 6 Support 7 Filter 8 Perforated Plate 9 Spacer 10 Slide Guide 11 Outer Frame A
12 bolt 21 outer frame B
22 Scale 23 Slide bolt 31 Fixing pin 41 Handle 51 Positioning bolt 61 Handle

Claims (10)

A folding filter in which spacers that are folded at substantially equal intervals and that hold the folding intervals are provided at substantially equal intervals in a direction orthogonal to the folding direction, and a plurality of long hole-shaped perforations arranged at approximately the same intervals as the spacers A filter device, wherein the porous plate is provided on the outlet side of the filter in a state in which the perforation is perpendicular to the folding direction of the filter. An outer frame for holding the shape is provided on the outlet side of the folding filter, a rail-shaped slide guide is provided so as to be joined to two opposite sides of the outer frame, and the perforated plate is disposed on the slide guide. The filter device according to claim 1, which is held. The filter device according to claim 2, wherein a plurality of the slide guides are provided, and a plurality of the perforated plates are mounted. The filter device according to claim 2 or 3, wherein a scale display of a slide position is provided on a part of the perforated plate. The filter device according to any one of claims 2 to 4, wherein a space between the filter and the outer frame is provided, and a plurality of slide bolts are mounted. The filter device according to claim 5, wherein a pin for preventing the slide is inserted into a tip portion of the slide bolt. The filter device according to claim 5 or 6, wherein a head of the slide bolt is a handle. The filter device according to claim 1, wherein a positioning bolt for the porous plate is provided in a part of the outer frame. The filter device according to claim 1, wherein a handle for facilitating the insertion and removal by hand is attached to one side of the perforated plate. A fan filter unit equipped with the filter device according to claim 1.

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