JP5194736B2 - filter - Google Patents

Description

The present invention relates to a filter comprising a filter element of a circular sheet, and the element holder for holding the filter element, a.

Conventionally, as this type of filter unit (filter), a filter unit having a circular sheet-like filter element (filter element) and a pair of housing pieces supported at the peripheral edge so as to sandwich the filter element is known. (See Patent Document 1). This filter unit is welded or joined as an integral filter unit by injection molding a sealing member, which is a thermoplastic material, in a substantially outer peripheral portion of the pair of housing members in a state where the pair of housing members are combined with each other. To form. In this filter unit, the sealing color before molding is colored so that the type of the built-in filter element can be recognized from the outside.
JP 2001-137626 A

  In such a conventional filter unit, since the sealing member is a resin molded product, it can be easily colored by mixing a coloring material into the sealing member before molding. However, when a metal member is used, it is colored by applying a coloring material to the surface. In such a case, problems such as dissolution of the color component in the liquid arise. Therefore, coloring itself is not preferable.

The present invention, it is possible to index the attribute information, and an object of the invention to provide a filter that the attribute mark that indicates the attribute information can be easily formed.

The filter of the present invention is a functional layer, a light emitting material of an organic EL device, a filter material of a color filter used for a liquid crystal display device, a fluorescent material of an electron emission device, a fluorescent material of a PDP device, and an electrophoretic body of an electrophoretic display device be any filter that is interposed in the flow path of the material in which a functional layer-forming material discharged Louis inkjet head material, a filter element of a circular sheet, metal ring that holds the filter element An element mark, and an attribute mark indicating its own attribute information is formed on the outer peripheral surface of the element holder, and the attribute information is liquid type identification information indicating the color of the functional layer forming material to be filtered It is characterized by being.

According to this configuration, since the attribute mark indicating the attribute information of the element holder is formed on the outer peripheral surface of the element holder, the attribute information can be visually recognized from the outside, so that the filter can be appropriately attached. it can. Moreover, the end surface of an element holder can be used as a set surface. Furthermore, since the attribute mark is formed only by processing the element holder, it is possible to cope with chemical resistance and the like with the material of the element holder, and it is possible to easily form a filter for indicating attribute information.
In addition, since an attribute mark indicating liquid type identification information is formed, a filter that filters another type of liquid may be installed in a flow path through which one type of liquid flows. Absent. For example, when a filter once used is washed and reused, the type of liquid to be filtered in the filter can be confirmed by visually recognizing the attribute mark. As a result, since a filter that has filtered another type of liquid is not installed in the flow path through which one type of liquid flows, the liquid of a different type remaining after washing becomes the liquid to be filtered. Mixing can be prevented.
In addition, as a functional material, a light emitting material (Electro-Luminescence light emitting layer / hole injection layer) of an organic EL device, a filter material of a color filter used in a liquid crystal display device, an electron emission device (Field)
Emission Display (FED) fluorescent material (phosphor), PDP (plasma display panel) fluorescent material (phosphor), electrophoretic display device electrophoretic material (electrophore), etc. A liquid material that can be discharged by an (inkjet head).

  In this case, the attribute mark is preferably engraved on the outer peripheral surface of the element holder.

  According to this configuration, since the attribute mark does not protrude from the outer peripheral surface, the attribute mark is not damaged, and the attribute mark does not damage another member.

  In this case, the attribute mark is preferably composed of an annular groove that goes around the outer peripheral surface of the element holder.

  According to this configuration, when the element holder is formed by lathe machining, the attribute mark can be simultaneously formed in the lathe machining process (particularly, NC lathe). That is, in one process, the element holder and the attribute mark can be formed.

  In the above-described filter, the attribute mark is preferably configured such that a plurality of types of attribute information can be indicated by a predetermined number including zero of the annular groove.

  According to this configuration, the attribute information can be efficiently indexed by being configured to be able to index a plurality of types of attribute information by a predetermined number including zero of the annular groove. In particular, this is effective when indexing one attribute information among a relatively few types of attribute information.

  In the above-described filter, the outer peripheral surface of the element holder has one or more peripheral areas, and a plurality of types can be selected depending on the combination of the number of one or more peripheral areas and the presence or absence of an annular groove in each peripheral area. It is preferable that the attribute information can be indexed.

  According to this configuration, the attribute information can be indexed by the combination of the number of one or more peripheral areas and the presence / absence of an annular groove in each peripheral area (so-called bit pattern). It can be indexed efficiently. In particular, this is effective when indexing one attribute information among a relatively large number of types of attribute information.

  In these cases, the element holder includes an annular receiving holder having an element mounting step portion having a set surface on which the filter element is set on the inner peripheral surface, and a pressing surface for pressing and fixing the filter element to the set surface. And an annular presser holder having an annular element pressing portion that is press-fitted into the element mounting step portion.

  According to this configuration, the filter can be formed more easily.

In this case, the functional layer forming material introduced into the primary chamber from the inflow port is supplied to the outflow port through the secondary chamber, and the atmospheric pressure is generated by the diaphragm that faces the atmosphere and forms one surface of the secondary chamber. Is preferably incorporated into a joint portion between the inflow port and the inflow joint to which the inflow port is joined, of the pressure regulating valve that opens and closes the communication channel that communicates the primary chamber and the secondary chamber.

  According to this configuration, it is possible to prevent foreign matter from entering the pressure regulating valve by providing the filter at the inflow end of the functional fluid. Thereby, the stability of pressure adjustment can be improved without causing a leak failure. Further, the filter can be appropriately attached by visually recognizing the attribute mark.

  Hereinafter, with reference to the accompanying drawings, a droplet discharge device equipped with a pressure regulating valve having a filter of the present invention will be described. This droplet discharge device is incorporated in a flat panel display production line, and uses, for example, a function droplet discharge head into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced, and the color of a liquid crystal display device A light emitting element or the like to be used for each pixel of a filter or an organic EL device is formed.

  As shown in FIGS. 1, 2 and 3, the droplet discharge device 1 is disposed on an X-axis support base 2 supported by a stone surface plate and extends in the X-axis direction which is the main scanning direction. The X-axis table 11 that moves the workpiece W in the X-axis direction (main scanning direction) and a pair (two) of Ys that are spanned across the X-axis table 11 via a plurality of columns 4 A Y-axis table 12 disposed on the shaft support base 3 and extending in the Y-axis direction serving as the sub-scanning direction, and ten carriage units 51 on which a plurality of functional liquid droplet ejection heads 17 are mounted. The ten carriage units 51 are suspended from the Y-axis table 12 so as to be movable. Further, the droplet discharge device 1 includes a chamber 6 that accommodates these devices in an atmosphere in which temperature and humidity are controlled, and a functional droplet discharge head 17 that passes through the chamber 6 from the outside of the chamber 6 to the inside. And a functional liquid supply unit 7 having three sets of functional liquid supply devices 101 for supplying the functional liquid. The functional liquid droplet discharge head 17 is driven to discharge in synchronization with the driving of the X-axis table 11 and the Y-axis table 12, thereby discharging the R, G, B three-color functional liquid droplets supplied from the functional liquid supply unit 7. A predetermined drawing pattern is drawn on the workpiece W. The XY movement mechanism described in the claims is composed of an X-axis table 11 and a Y-axis table 12.

  The droplet discharge device 1 includes a maintenance device 5 including a flushing unit 14, a suction unit 15, a wiping unit 16, and a discharge performance inspection unit 18, and these units are used for maintenance of the functional droplet discharge head 17. The function of the functional liquid droplet ejection head 17 is maintained and recovered. Of the units constituting the maintenance device 5, the flushing unit 14 and the discharge performance inspection unit 18 are mounted on the X-axis table 11, and the suction unit 15 and the wiping unit 16 extend from the X-axis table 11 at a right angle, In addition, the Y-axis table 12 is disposed on a pedestal disposed at a position where the carriage unit 51 can move (strictly speaking, the discharge performance inspection unit 18 includes a stage unit 77 which will be described later, the X-axis table 11. The camera unit 78 is supported by the Y-axis support base 3).

  The flushing unit 14 includes a pair of pre-drawing flushing units 71 and 71 and a regular flushing unit 72, and is performed immediately before ejection of the functional liquid droplet ejection head 17 or when drawing work is suspended such as when the workpiece W is replaced. Then, the functional liquid droplet ejection head 17 is subjected to the discarded ejection (flushing). The suction unit 15 includes a plurality of divided suction units 74 and forcibly sucks the functional liquid from the discharge nozzle 98 of each functional liquid droplet discharge head 17 and performs capping. The wiping unit 16 has a wiping sheet 75 and wipes the nozzle surface 97 of the functional liquid droplet ejection head 17 after suction. The ejection performance inspection unit 18 includes a stage unit 77 on which an inspection sheet 83 that receives functional droplets ejected from the functional droplet ejection head 17 is mounted, and a camera unit 78 that inspects functional droplets on the stage unit 77 by image recognition. And the ejection performance (the presence / absence of ejection and the flight curve) of the functional droplet ejection head 17 is inspected.

  Next, components of the droplet discharge device 1 will be briefly described. As shown in FIG. 2 or FIG. 3, the X-axis table 11 includes a set table 21 for setting a work W, an X-axis first slider 22 for slidably supporting the set table 21 in the X-axis direction, and the flushing described above. An X-axis second slider 23 that supports the unit 14 and the stage unit 77 slidably in the X-axis direction, and extends in the X-axis direction, and the set table 21 (work W) is moved through the X-axis first slider 22 to the X A pair of left and right X-axis linear motors (not shown) that move in the axial direction and move the flushing unit 14 and the stage unit 77 in the X-axis direction via the X-axis second slider 23, and parallel to the X-axis linear motor A pair of (two) X-axis common support bases 24 for guiding the movement of the X-axis first slider 22 and the X-axis second slider 23. That.

  The set table 21 includes a suction table 31 for sucking and setting the work W, and a θ table 32 for supporting the suction table 31 and correcting the position of the work W set on the suction table 31 in the θ-axis direction. Yes. The pre-drawing flushing unit 71 is attached to each of a pair of sides parallel to the Y-axis direction of the set table 21.

  The Y-axis table 12 includes 10 bridge plates 52 each of which has 10 carriage units 51 suspended therein, 10 sets of Y-axis sliders (not shown) that support the 10 bridge plates 52 in both ends, A pair of Y-axis linear motors (not shown) are provided on the pair of Y-axis support bases 3 and move the bridge plate 52 in the Y-axis direction via 10 sets of Y-axis sliders. Further, the Y-axis table 12 sub-scans the functional liquid droplet ejection head 17 at the time of drawing via each carriage unit 51, and the functional liquid droplet ejection head 17 is exposed to the maintenance device 5 (the suction unit 15 and the wiping unit 16). I will.

  When the pair of Y-axis linear motors are driven (synchronously), each Y-axis slider translates in the Y-axis direction simultaneously with the pair of Y-axis support bases 3 as a guide. As a result, the bridge plate 52 moves in the Y-axis direction, and the carriage unit 51 moves in the Y-axis direction at the same time. In this case, by controlling the driving of the Y-axis linear motor, each carriage unit 51 can be moved independently and individually, or ten carriage units 51 can be moved together. It is.

  Each carriage unit 51 includes a head unit 13 including twelve functional liquid droplet ejection heads 17 and a head plate 53 that supports the twelve functional liquid droplet ejection heads 17 in two groups. (See FIG. 4). Further, each carriage unit 51 supports the head unit 13 via the θ rotation mechanism 61 that supports the head unit 13 so as to be capable of θ correction (θ rotation), and the Y axis table 12 (each bridge plate 52) via the θ rotation mechanism 61. And a suspension member 62 to be supported on. In addition, each carriage unit 51 is provided with a sub-tank 121 (described later on the bridge plate 52) on the upper portion thereof, and each functional liquid droplet is utilized from the sub-tank 121 using natural water heads. A functional liquid is supplied to the discharge head 17.

  As shown in FIG. 5, the functional liquid droplet ejection head 17 is a so-called double type, a functional liquid introduction unit 91 having two connection needles 92, and a dual head substrate that is continuous with the functional liquid introduction unit 91. 93, and a head main body 94 which is connected to the lower side of the functional liquid introducing portion 91 and has an in-head flow path filled with the functional liquid therein. The connection needle 92 is connected to the functional liquid supply unit 7 (functional liquid supply apparatus 101) and supplies the functional liquid to the functional liquid introduction unit 91. The head main body 94 includes a cavity 95 (piezoelectric piezoelectric element) and a nozzle plate 96 having a nozzle surface 97 in which a large number of discharge nozzles 98 are opened. When the functional liquid droplet ejection head 17 is driven to eject (a voltage is applied to the piezoelectric element), functional liquid droplets are ejected from the ejection nozzle 98 by the pump action of the cavity 95.

  The nozzle surface 97 is formed with two nozzle rows 98b composed of a large number of discharge nozzles 98 in parallel with each other. The two nozzle rows 98b are displaced from each other by a half nozzle pitch.

  The chamber 6 is configured to keep the internal temperature and humidity constant. That is, the drawing on the workpiece W by the droplet discharge device 1 is performed in an atmosphere in which the temperature and humidity are controlled to be constant values. A tank cabinet 84 for storing the tank unit 122 is provided in a part of the side wall of the chamber 6. In the case of manufacturing an organic EL device or the like, the chamber 6 is preferably configured in an atmosphere of an inert gas (nitrogen gas).

  Next, the functional liquid supply unit 7 will be described with reference to FIGS. 1 and 6. The functional liquid supply unit 7 includes three sets of functional liquid supply devices (functional liquid supply mechanisms) 101 that supply functional liquids of R, G, and B colors. The functional liquid supply unit 7 includes a nitrogen gas supply facility 85 that supplies compressed nitrogen gas for control to a main tank 151 and the like, which will be described later, and a compressed air supply facility 86 that supplies compressed air for control of various on-off valves. A gas exhaust equipment 87 for exhausting gas from each part and a vacuum equipment 89 connected to a bubble removing unit 135 described later are provided. The three sets of functional liquid supply devices 101 are connected to the functional liquid droplet ejection heads 17 corresponding to the R, G, and B colors, respectively. Liquid is supplied.

  As shown in FIG. 6, the functional liquid supply device 101 for each color includes ten tank units 122 having two main tanks 151 and 151 that constitute a functional liquid supply source, and ten units provided corresponding to each carriage unit 51. Sub-tanks (functional liquid tanks) 121, upstream functional liquid flow paths 126 connecting the tank units 122 and the ten sub-tanks 121, and 10 sets of downstream connecting each sub-tank 121 and each functional liquid droplet ejection head 17. Side functional liquid flow path 127.

  The functional liquid in each main tank 151, 151 is connected to this and pressurized by compressed nitrogen gas from the nitrogen gas supply equipment 85, and is selectively supplied to the ten sub tanks 121 via the upstream functional liquid flow path 126. To be supplied. At that time, various open / close valves are controlled to open and close by the compressed air of the compressed air supply facility 86. At the same time, each sub tank 121 is opened to the atmosphere via the gas exhaust equipment 87 and receives a necessary amount of functional liquid. The functional liquid in each sub tank 121 is supplied to the functional liquid droplet ejection head 17 via the downstream functional liquid flow path 127 while maintaining a predetermined hydraulic head pressure by driving the functional liquid droplet ejection head 17 connected thereto. .

  The tank unit 122 includes a pair of main tanks 151 and 151 serving as a functional liquid supply source, a pair of weight measuring devices 152 and 152 for measuring the weight of the pair of main tanks 151 and 151, and a pair of main tanks 151 and 151, respectively. 151 and a switching mechanism 153 connected to the upstream functional liquid channel 126. Each main tank 151 is connected to a nitrogen gas supply facility 85 and is configured to be capable of pressurization control when the functional liquid is pumped.

  The upstream-side functional liquid channel 126 divides from the upstream side to the tank-side main channel 131 that connects the upstream side to the tank unit 122 and the tank-side main channel 131 via the branch part 132, and the downstream side 10 branch flow paths 133 connected to the sub tank 121. The functional liquid supplied from the tank unit 122 is divided into 10 directions by the branching unit 132 and supplied to each sub tank 121.

  In addition, a bubble removing unit 135, a first on-off valve 136, an air vent unit 137, and a second on-off valve 138 are provided in the tank side main flow path 131 from the upstream side. Furthermore, a third on-off valve 139 is interposed in each branch channel 133 so as to be located in the vicinity of each sub tank 121.

  Each downstream functional liquid channel 127 includes, from the upstream side, a head-side main channel 146 whose upstream side is connected to each sub tank 121, a four-branch channel 147 whose upstream side is connected to the head-side main channel 146, and an upstream side. And a plurality of head side branch channels 148 connected to the four branch channels 147. As a result, the functional liquid branches from each sub tank 121 in four directions, and the respective functional liquid droplet ejection heads 17 are connected. That is, the functional liquid is supplied to 10 × 4 functional liquid droplet ejection heads 17 by 10 branches of the upstream functional liquid flow path 126 and 4 branches of the downstream functional liquid flow path 127. In addition, since the functional liquid supply unit 7 has three sets of functional liquid supply devices 101 of R, G, and B, the functional liquid is supplied to 10 × 12 functional liquid droplet ejection heads 17. Further, a fourth on-off valve 149 and a pressure adjustment valve 150 for adjusting the pressure to the functional liquid droplet ejection head 17 are interposed in the head side main flow path 146. In addition, the functional liquid supply channel referred to in the claims includes a head-side main channel 146 that extends from the sub tank 121 to the pressure regulating valve 150.

  The sub tank 121 stores the functional liquid supplied to each of the four functional liquid droplet ejection heads 17. The sub tank 121 has a liquid level detection mechanism that detects the liquid level of the stored functional liquid, and supplies the functional liquid while maintaining the liquid level at a constant height. When the liquid level of the functional liquid drops to the lower limit liquid level by the ejection drive of the functional liquid droplet ejection head 17 (liquid reduction state), the third on-off valve 139 is opened to supply the functional liquid from the main tank 151, and the main tank When the liquid level of the functional liquid rises to the upper limit liquid level due to the supply from 151, the third on-off valve 139 is closed and the supply from the main tank 151 is stopped.

  Next, the area around the pressure regulating valve 150 will be described with reference to FIGS. As shown in FIGS. 7 and 8, the pressure regulating valve 150 is interposed in the head-side main flow path 146 and is a joint from the upstream side of the head-side main flow path 146 and also has an inflow connector connected to the inflow port 175. (Inflow joint) 161 (union joint) and a joint on the downstream side of the head-side main flow path 146 and connected to the outflow connector 162 (union joint) connected to the outflow port 190.

  The pressure regulating valve 150 includes a pressure regulating valve main body 166, a lid body 168 having a primary chamber 167 formed therein together with the pressure regulating valve main body 166, and a secondary chamber 169 formed therein together with the pressure regulating valve main body 166. It consists of three members, a ring plate 170 for fixing the diaphragm 171 to the valve body 166, and all are made of a corrosion resistant material such as stainless steel. The pressure regulating valve main body 166 has a communication channel 173 that communicates the primary chamber 167 and the secondary chamber 169.

  The lid body 168 and the ring plate 170 are overlapped with the pressure regulating valve main body 166 from the front and the back, and positioned with a plurality of stepped parallel pins (not shown), and then screwed. They are assembled and both have a polygonal (octagonal) or circular appearance that is concentric with an axis passing through the center of the circular diaphragm 171. The lid 168 and the pressure regulating valve main body 166 are butt-joined to each other through a packing 172, and the pressure regulating valve main body 166 and the ring plate 170 are mutually connected with the edge of the diaphragm 171 and the packing 172 interposed therebetween. Airtight butt joint.

  The primary chamber 167 formed by the pressure regulating valve main body 166 and the lid body 168 is formed in a substantially cylindrical shape concentric with the diaphragm 171, and its open end is closed by the lid body 168. Further, an inflow port 175 extending obliquely in the radial direction from the primary chamber 167 is formed on the left side of the upper boss portion formed in the upper portion of the back surface of the pressure regulating valve body 166 on the primary chamber side. The inflow connector 161 is connected to the inflow port 175.

  As shown in FIG. 9, the inflow port 175 includes an inflow port 176 that opens to the outer peripheral surface of the pressure regulating valve main body 166, a filter housing portion 177 that houses the filter 181, and the filter housing portion 177 and the primary chamber 167. The inflow path 178 communicates with the peripheral surface, and the inflow path 178 is formed eccentric to the primary chamber 167 side with respect to the inflow port 176. The inflow connector 161 is screwed into the inflow port 176 (tapered screw). Although details will be described later, a filter 181 is accommodated in the filter accommodating portion 177, and a presser spring 182 of the filter 181 is accommodated between the filter 181 and the inflow connector 161 screwed together.

  The flow path formed inside the inflow connector 161 is widened at the downstream end so that no step portion is generated in the flow path and a large change is not caused in the flow rate of the functional liquid. Similarly, the upstream end of the inflow path 178 has a tapered shape.

  As shown in FIGS. 9 and 10, the secondary chamber 169 is formed into a truncated cone shape having the diaphragm 171 as a bottom surface as a whole by a diaphragm 171 and an inner wall 185 formed in the pressure regulating valve body 166. . The diaphragm 171 is disposed in a vertical posture and constitutes one surface of the secondary chamber 169. Further, the inner wall 185 is configured by each surface except for the surface (one surface) of the diaphragm 171 of the secondary chamber 169.

  In addition, a secondary chamber side opening 186 that is concentric with the diaphragm 171 is opened in an end wall 185 a that is a truncated cone-shaped top surface of the inner wall 185, and a truncated cone-shaped tapered surface of the inner wall 185 An outflow opening 187 of an outflow channel 193, which will be described later, is formed at the upper and lower intermediate portions on the lower slope of the peripheral wall 185b. In this case, the secondary chamber side opening 186 also serves as a spring chamber that houses a pressure receiving plate urging spring 208 described later, and is formed with a larger diameter than the main channel 196 of the communication channel 173.

  As shown in FIG. 10, the outflow port 190 is formed in an inclined boss portion 191 located at the lower portion of the pressure regulating valve main body 166, and an outlet 192 opened at the lower portion of the inclined boss portion 191 and the secondary chamber 169. An outflow opening 187 and an outflow channel 193 communicating these are configured. The outflow channel 193 extends obliquely from the peripheral wall 185 b of the inner wall 185 and communicates with the downward outlet 192. An outflow connector 162 is screwed into the outflow port 192 from the axial direction of the outflow channel 193. The flow path formed inside the outflow connector 162 is widened at the upstream end so that no step is generated in the flow path and a large change in the flow rate of the functional liquid does not occur. The functional liquid flowing out from the secondary chamber 169 flows obliquely from the outflow opening 187 according to the gradient of the outflow channel 193 and flows out to the functional liquid droplet ejection head 17 side.

  As shown in FIGS. 9 and 10, the pressure regulating valve main body 166 is formed with a communication channel 173 that communicates the primary chamber 167 and the secondary chamber 169. The communication flow path 173 includes a main flow path 196 and a secondary chamber side opening 186 connected to the main flow path 196. The primary chamber 167, the secondary chamber 169, and the communication channel 173 all have a circular cross section concentric with the diaphragm 171. However, the main flow path 196 includes a circular cross-section axial insertion section 197 in which a shaft section 203 of a valve body 201 described later is slidably received, and a cross-shaped cross-section flow path extending from the shaft free insertion section 197 in four radial directions. Part 198 (see FIG. 8B).

  The diaphragm 171 includes a diaphragm main body 206 made of a resin film and a resin pressure receiving plate 207 attached to the inside of the diaphragm main body 206. The pressure receiving plate 207 is formed in a disc shape concentric with the diaphragm main body 206 and has a sufficiently small diameter with respect to the diaphragm main body 206, and a shaft portion 203 of a valve body 201 described later contacts the center thereof. The diaphragm main body 206 is configured by laminating heat-resistant PP (polypropylene), special PP, and PET (polyethylene terephthalate) on which silica is vapor-deposited, and is formed in a circular shape having the same diameter as the front surface of the pressure regulating valve main body 166. .

  The valve body 201 includes a disc-shaped valve body main body 202, a shaft portion 203 that extends in one direction so as to form a transverse “T” shape from the center of the valve body main body 202, and a base end side of the shaft portion 203. It is composed of an annular O-ring 204 provided (attached) on the (valve body 202 side). The valve body 202 and the shaft 203 are integrally formed of a corrosion resistant material such as stainless steel. The O-ring 204 is formed in an annular shape with, for example, soft silicon rubber. For this reason, when the valve body 201 is closed, the O-ring 204 is in strong contact with the opening edge of the communication flow path 173 serving as a valve seat, and the communication flow path 173 is liquid-tightly closed from the primary chamber 167 side.

  The shaft portion 203 is slidably fitted into the communication flow path 173 (the main flow path 196), and abuts against the pressure receiving plate 207 of the diaphragm 171 whose front end (front end) is in a neutral position in the valve-closed state. That is, in the positive deformation state where the diaphragm 171 bulges toward the outside, a predetermined gap is generated between the front end of the shaft portion 203 and the pressure receiving plate 207. From this state, the diaphragm 171 is deformed to the negative side. Then, the front end of the shaft portion 203 and the pressure receiving plate 207 come into contact with each other in the neutral state, and when the diaphragm 171 is further deformed negatively, the pressure receiving plate 207 pushes and opens the valve body main body 202 via the shaft portion 203. It will be. Therefore, of the volume of the secondary chamber 169, the functional fluid is supplied without receiving any pressure on the primary chamber 167 side for the volume of the diaphragm 171 that becomes neutral from the plus deformation.

  Between the back surface of the valve body 201 and the wall body 206 of the primary chamber 167, a valve body biasing spring 207 that biases the valve body 201 in the secondary chamber 169 side, that is, the valve closing direction is interposed. . Similarly, a pressure receiving plate urging spring 208 that urges the diaphragm main body 206 toward the outside via the pressure receiving plate 207 is interposed between the pressure receiving plate 207 and the inner wall 185. In this case, the valve body urging spring 207 complements the water head of the sub tank 121 applied to the back surface of the valve body 201, and the valve body 201 is caused by the water head of the sub tank 121 and the spring force of the valve body urging spring 207. It is pressed in the closing direction. On the other hand, the pressure receiving plate biasing spring 208 complements the positive deformation of the diaphragm 171 and acts so that the secondary chamber 169 has a negative pressure with respect to the atmospheric pressure.

  The pressure regulating valve 150 opens and closes when the diaphragm 171 (and the valve body 201 with which the diaphragm 171 abuts) is deformed (advanced / retracted) due to the pressure balance between the atmospheric pressure and the secondary chamber 169 connected to the functional liquid droplet ejection head 17. The chamber 169 side is depressurized to a predetermined pressure. At that time, force acts on the valve body urging spring 207 and the pressure receiving plate urging spring 208 in a distributed manner, and the valve body 201 opens and closes very slowly by the O-ring 204 (elastic force thereof) of soft silicone rubber. For this reason, pressure fluctuation (cavitation) due to opening and closing of the valve body 201 is suppressed, and the ejection drive of the functional liquid droplet ejection head 17 is not affected. Of course, the pulsation and the like generated on the sub tank 121 side (primary chamber 167 side) are also edged by the valve body 201 and can be absorbed (damper function).

  Next, the area around the inflow port 175 will be described with reference to FIG. As described above, the inflow port 175 is configured by the inflow port 176, the filter housing portion 177, and the inflow path 178. The flow path from the sub tank 121 is connected by screwing and connecting the inflow connector 161 which is a union joint to the thread part formed in the inner peripheral surface of the inflow port 176. The filter accommodating portion 177 accommodates a filter 181 that removes (filters) foreign matters mixed in the functional liquid from the upstream side. A presser spring 182 that holds the filter 181 between the filter 181 and the inflow connector 161. Is housed. The filter 181 is configured to be attachable on both the front and back surfaces. That is, the filter 181 has a configuration without liquid passing direction.

  The filter housing portion 177 has a counterbore shape formed in the pressure regulating valve main body 166, and is formed in a cylindrical shape so that the cylindrical filter 181 is engaged therewith. In other words, the outer peripheral surface of the cylindrical filter 181 engages with the inner peripheral surface of the filter housing portion 177 and becomes a stepped portion with respect to the inflow path 178 so that the peripheral edge portion of one end of the cylindrical filter 181 contacts. A peripheral contact portion 177a is formed. By the pressing of the presser spring 182, the filter 181 is brought into contact with the peripheral contact portion 177 a and pressed and fixed.

  The presser spring 182 is configured by a coil spring, and one end abuts on an expanded portion 161 a that is expanded toward the pressure regulating valve body 166 in the internal flow path of the inflow connector 161, and the other end is an end surface of the filter 181. Abut. When the inflow connector 161 is screwed, the filter 181 is pressed against the peripheral contact portion 177a via the presser spring 182 and set.

  As shown in FIGS. 12 and 13, the filter 181 includes a circular sheet-like filter element 211 and a metal ring-shaped element holder 212 that sandwiches the filter element 211. The element holder 212 includes a concave receiving holder 213 for setting the filter element 211 and a convex holding holder 214 for pressing the set filter element 211, and the filter holder 211 is set in the receiving holder 213. On the other hand, the filter 181 is integrated by press-fitting the presser holder 214.

  The filter element 211 is composed of a stainless steel metal sheet having a plurality of openings (holes). The filter element 211 has a thickness of about 15 μm, and each opening is formed so that its circumscribed circle has a diameter of 30 μm or less so that foreign matter of 30 μm or more can be captured. The filter element 211 may be a braided stainless steel fiber or a chemical resistant resinous material.

  The receiving holder 213 is formed in an annular shape, and an element mounting step 216 having a set surface for the filter element 211 is provided on the inner peripheral surface of the end portion on the press holder 214 side. That is, the receiving holder 213 is formed in an annular shape with a concave step. The filter element 211 is set on a set surface formed in an annular shape by the element mounting step 216.

  The presser holder 214 is formed in an annular shape, and has a press-fit portion (element pressing portion) 217 that engages with the element mounting step portion 216 on the receiving holder 213 side, and is flush with the receiving holder 213 on the outer peripheral surface. It has the collar part 218 which becomes. That is, the presser holder 214 is formed in an annular shape having a convex step. When the press-fitting portion 217 is press-fitted, the filter element 211 is pressed and fixed by the set surface and the pressing surface that contacts the end face of the press-fitting portion 217. The filter element 211 is held at the periphery by being fixed to the receiving holder 213 and the presser holder 214. The receiving holder 213 and the presser holder 214 are formed by a lathe process. The receiving holder 213 and the presser holder 214 are both made of a corrosion-resistant metal material such as stainless steel.

  In this manner, the press-fit portion 217 is press-fitted into the element mounting step portion 216, whereby the filter element 211 is pressed and fixed between the set surface and the press surface to form the filter 181. That is, since the filter 181 can be formed only by performing the press-fitting process, the filter 181 can be easily formed, and the filter 181 can have a simple configuration. Further, no foreign matter is generated from the filter 181 itself.

  Since the receiving holder 213 and the presser holder 214 are formed in an annular shape, the receiving holder 213 forms a receiving-side flow path 219 with an inner peripheral surface, and the presser holder 214 has a press-side flow path 220 with an inner peripheral surface. Form and pass the functional fluid. That is, the functional liquid that has flowed in from one of the receiving side flow path 219 and the presser side flow path 220 passes through the filter element 211 and flows out from the other flow path. Thereby, the foreign material in a functional liquid is removed. Further, the receiving-side flow path 219 and the presser-side flow path 220 are formed in a tapered shape in which a liquid passage port 221 facing the filter element 211 is expanded toward the filter element 211 side. Thereby, since the contact area of the filter element 211 becomes large with respect to the liquid (functional liquid) which passes, the removal performance of a foreign material can be improved.

  Further, the end surface on the outer side in the axial direction of the receiving holder 213 and the end surface on the outer side in the axial direction of the presser holder 214 are finished with the same flatness, and the end surfaces on the outer sides of the holders 213 and 214 (both end surfaces of the element holder 212). ) And the peripheral contact portion 177a of the filter housing portion 177 that receives the filter 181 have a flatness that can prevent liquid leakage from each other. Furthermore, it is preferable that each corner portion of the receiving holder 213 and the presser holder 214 excluding the liquid passage port 221 is chamfered so as not to damage other members and generate foreign matters (see FIGS. 12 and 13). Further, the receiving holder 213 and the presser holder 214 are each rough-finished by machine cutting and then electrolytically polished. As a result, foreign matters (fine burrs) generated from the machine-cut rough finish surface can be removed by electrolytic polishing, and generation of fine foreign matters from the holders 213 and 214 can be suppressed.

  As shown in FIGS. 12 and 13, an attribute mark M for indexing the attribute information of the filter 181 is formed on the outer peripheral surface of the receiving holder 213. As shown in both figures, the attribute mark M is composed of an annular groove Ma that circulates around the outer peripheral surface of the receiving holder 213, and the attribute mark M indicates liquid type identification information indicating the type of liquid to be filtered as attribute information. To do. That is, the type of liquid filtered by the filter 181 is indicated by the number of annular grooves Ma formed. For example, the filter 181 that filters the R-color functional liquid has no annular groove Ma, the filter 181 that filters the G-color functional liquid has one annular groove Ma, and the filter 181 that filters the B-color functional liquid has the annular groove Ma. There are two Ma, and the receiving holder 213 is provided with a number of annular grooves Ma (including zero) that match the type of liquid when the receiving holder 213 is formed (the filter 181 in FIGS. , A filter 181) for filtering the B-color functional liquid.

  As described above, since the attribute mark M indicating the attribute information of the receiver holder 213 (element holder 212) is formed on the outer peripheral surface of the receiving holder 213 (element holder 212), the attribute information can be visually recognized from the outside. Can be installed properly. Moreover, the end surface of the element holder 212 can be used as a set surface. Furthermore, since the attribute mark M is formed only by processing the element holder 212, chemical resistance and the like can be handled by the material of the element holder 212, and the filter 181 for indicating attribute information can be easily formed. Can do. In the present embodiment, the attribute mark M is formed on the receiving holder 213 having a wide outer peripheral surface. However, if the outer peripheral surface of the element holder 212, the outer peripheral surface of the presser holder 214 or both of the receiving holder 213 and the presser holder 214 are used. The attribute mark M may be formed over the outer peripheral surface.

  Further, as described above, the attribute mark M is configured such that a plurality of types of attribute information (liquid type) can be indicated by a predetermined number including zero of the annular groove Ma. Thereby, attribute information can be indexed efficiently. Further, the user can easily recognize the attribute information. This indexing method is particularly effective when indexing one attribute information among a relatively small number of types of attribute information.

Here, a modification example of the attribute mark M that is effective when one attribute information is indexed among a relatively large number of types of attribute information (in the case of using a multi-color functional liquid in terms of the type of liquid). (Index method) will be described. As shown in FIG. 14A, in this modification, the outer peripheral surface of the receiving holder 213 has one or more peripheral areas A1, and the attribute mark M includes the number of one or more peripheral areas A1, A plurality of types of attribute information can be indicated by combinations of the presence or absence of the annular groove Ma in each circumferential area A1 (so-called bit pattern). For example, as shown in the figure, if there are three peripheral areas A1, and the presence or absence of the annular groove Ma in each peripheral area A1 corresponds to the type of liquid, 2 ³ = 8 kinds of liquids are indicated. can do. By using such an attribute mark M, the attribute information can be efficiently indexed particularly when one attribute information is indexed among a relatively large number of types of attribute information. In addition, in the modification of FIG. 14A, the circumferential area A1 is set apart from the surrounding area. However, when the annular groove Ma is “present” in the adjacent circumferential area A1 by approaching the circumferential area A1, it is necessary. The annular grooves Ma may be connected to each other.

  In addition, although the said 2 pattern was shown as an index method using the annular groove Ma, it is not restricted to these forms, but attribute information is changed by the width, interval and position of one or more annular grooves Ma, or a combination thereof. It may be an indicator.

  Thus, by forming the attribute mark M with the annular groove Ma, the attribute mark M can be simultaneously formed in the lathe machining process when the receiving holder 213 (element holder 212) is formed by lathe machining. (Especially NC lathe). That is, the receiving holder 213 (element holder 212) and the attribute mark M can be formed in one process.

  In addition, the above effect cannot be obtained. However, if the attribute mark M is engraved on the outer peripheral surface, the annular groove Ma is not used, holes or grooves of any shape are used, and those shapes (numerical numbers) are obtained. , Including characters and symbols), number, arrangement, etc., may be used to index the attribute information. For example, as in the second modification of the attribute mark M shown in FIG. 14B, a plurality of engraving areas for engraving the linear groove Mb using the linear groove Mb extending in the liquid passing direction as the attribute mark M. The attribute information may be indexed by the presence / absence (combination of presence / absence) of the linear groove Mb in each engraving area A2 while having the index region A3 composed of A2. In such a case, the attribute mark M cannot be formed in the same process as the lathe process related to the formation of the receiving holder 213 (element holder 212) like the annular groove Ma. An attribute mark M is formed. Also, an attribute mark M in the form of a barcode may be used.

  The attribute mark M may be provided so as to protrude from the outer peripheral surface of the holder 213 (element holder 212). However, the attribute mark M is formed on the outer peripheral surface so that the attribute mark M is provided on the outer peripheral surface. Therefore, the attribute mark M will not be damaged, and the attribute mark M will not damage another member.

  In the above embodiment, the attribute information is liquid type identification information. That is, an attribute mark M for indicating the liquid type identification information is formed on the element holder 212. Thereby, the filter 181 for filtering another type of liquid is not installed in the flow path through which the one type of liquid passes. For example, when the filter 181 once used is washed and reused, the type of liquid to be filtered in the filter 181 can be confirmed by visually recognizing the attribute mark M. Accordingly, since the filter 181 that has filtered another type of liquid is not installed in the flow path through which one type of liquid flows, the different type of liquid remaining after the cleaning is filtered. Can be prevented from being mixed in.

  However, the attribute information is not limited to the liquid type identification information. For example, the attribute information is element material information that indicates the material of the filter element 211 and element scale information that indicates the scale (mesh size) of the filter element 211. In this case, the element holder 212 is provided with the attribute mark M for indicating the configuration information (element material information or element scale information) of the filter element 211, so that the configuration information of the built-in filter element 211 can be easily obtained. The filter 181 can be installed after recognizing the configuration (material or scale) of the filter element 211.

  Further, the attribute information is manufacturing time information indicating the manufacturing time. In such a case, the element holder 212 is provided with the attribute mark M for indicating the production time information, so that the filter 181 can be installed after recognizing the production time of the filter 181 and is deteriorated and used. There is no filter 181 installed.

  Furthermore, if the filter 181 has liquid flow directionality, the attribute information is flow direction information indicating the liquid flow direction. In such a case, the element holder 212 is provided with the attribute mark M for indicating the flow direction information, so that the filter 181 can be installed after the flow direction of the filter 181 is recognized, and the filter 181 is moved in the front-rear direction. It is never installed in reverse. In this case, as the attribute mark M, for example, an element groove 212 is formed by indicating one annular groove Ma on the liquid flow direction front side, or a triangle or an arrow with the liquid flow direction front side as a tip. An engraved one can be considered.

  As shown in FIG. 14B, these pieces of information may be combined into attribute information. The attribute information is not limited to the above as long as it is unrecognizable from the outside as the information of the filter 181 or the recognition is complicated, and the manufacturing number information, formation accuracy information (formation accuracy rank) and corresponding / non-corresponding It may be liquid type information.

  With the above configuration, the attribute information of the filter 181 can be visually recognized from the outside, and thus the filter 181 can be appropriately attached. Moreover, the end surface of the element holder 212 can be used as a set surface. Furthermore, since the attribute mark M is formed only by processing the element holder 212, chemical resistance and the like can be handled by the material of the element holder 212, and the filter 181 for indicating attribute information can be easily formed. Can do.

  Then, by providing the filter 181 in the pressure regulating valve 150 (the inflow side joining portion thereof) in this way, the contact portion between the O-ring 204 that performs the main function of the pressure regulating valve 150 and the opening edge of the communication channel 173 ( It is possible to prevent foreign matter from biting into the contact portion). As a result, the pressure regulating valve 150 can be stably operated, and as a result, the accuracy of the droplet discharge amount in the functional droplet discharge head 17 can be improved.

  In the present embodiment, a device including the droplet discharge device 1 including ten carriage units 51 is used, but the number of carriage units 51 is arbitrary.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 15 is a flowchart showing the manufacturing process of the color filter, and FIG. 16 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 16B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 16C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming step, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 16 (d), functional droplets are ejected by the functional droplet ejection head 17 to enter each pixel region 507a surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 17 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 17 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 16, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 17 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 17. Further, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 17.

FIG. 18 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 19 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 20 is a cross-sectional view of an essential part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 21, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and an opposing surface. It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 22, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, the organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when forming the functional layer 617 using the functional liquid droplet ejection head 17, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 21 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 24, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 17 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 25, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 26, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 26)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process and the like, the second composition after discharge is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 27, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 17, as shown in FIG. 28, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 29, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 30 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 21 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 17. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 17, and it corresponds. Land in the color discharge chamber 705.

Next, FIG. 31 is a cross-sectional view of an essential part of an electron emission device (also referred to as FED device or SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A lattice-shaped bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 32A, and when these are formed, as shown in FIG. 32B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an inkjet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a perspective view of the droplet discharge device concerning an embodiment. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is a figure of the functional droplet discharge head which comprises a head group. It is an external appearance perspective view of a functional droplet discharge head. It is a piping system diagram of a functional liquid supply device. It is an external appearance perspective view of a pressure control valve. It is the rear view (a) and front view (b) of a pressure regulation valve. It is the longitudinal cross-sectional view which cut | disconnected the pressure regulation valve in the axial direction of the inflow port. It is the longitudinal cross-sectional view which cut | disconnected the pressure regulation valve in the axial direction of the outflow port. It is sectional drawing shown about the inflow port. It is sectional drawing of a filter. It is a disassembled perspective view of a filter. It is the side view shown about the modification of the attribute mark. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1: Droplet discharge device, 11: X-axis table, 12: Y-axis table, 17: Functional droplet discharge head, 101: Functional liquid supply device, 121: Sub tank, 146: Head side main flow path, 150: Pressure adjustment valve 161: Inflow connector, 167: Primary chamber, 169: Secondary chamber, 171: Diaphragm, 173: Communication channel, 175: Inflow port, 181: Filter, 190: Outflow port, 211: Filter element, 212: Element holder 213: Receiving holder, 214: Presser holder, 216: Element mounting step, 217: Press-fit portion, A1: Circumferential area, M: Attribute mark, Ma: Circular groove, W: Workpiece

Claims (7)

Light emitting material for organic EL device, filter material for color filter used for liquid crystal display device, fluorescent material for electron emission device, fluorescent material for PDP device, and electrophoretic material for electrophoretic display device, which is a functional layer a filter interposed in the flow path of the functional layer forming material ejected to Louis inkjet head is,
A circular sheet filter element;
A metal ring-shaped element holder for holding the filter element,
On the outer peripheral surface of the element holder, an attribute mark that indicates its own attribute information is formed,
The filter, wherein the attribute information is liquid type identification information that indicates a color of a functional layer forming material to be filtered.   The filter according to claim 1, wherein the attribute mark is engraved on an outer peripheral surface of the element holder.   The filter according to claim 2, wherein the attribute mark includes an annular groove that circulates around an outer peripheral surface of the element holder.   The filter according to claim 3, wherein the attribute mark is configured to be capable of indicating a plurality of types of the attribute information by a predetermined number including zero of the annular groove. The outer peripheral surface of the element holder has one or more peripheral areas,
The filter according to claim 3, wherein a plurality of types of attribute information can be indicated by a combination of the number of the one or more circumferential areas and the presence or absence of the annular groove in each circumferential area. The element holder has an annular receiving holder in which an element mounting step portion having a set surface on which the filter element is set is provided on the inner peripheral surface;
An annular presser holder having a pressing surface for pressing and fixing the filter element with respect to the set surface and having an annular element pressing portion press-fitted into the element mounting step portion. The filter according to any one of 1 to 5. The functional layer forming material introduced into the primary chamber from the inflow port is supplied to the outflow port through the secondary chamber, and the atmospheric pressure is adjusted by a diaphragm that faces the atmosphere and forms one surface of the secondary chamber. As a reference pressure, a pressure regulating valve that opens and closes a communication flow path that communicates the primary chamber and the secondary chamber is incorporated in a joint portion between the inflow port and the inflow joint to which the inflow port is joined. The filter according to any one of claims 1 to 6.

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