JP5186583B2 - Method and system for liquid dispensing with headspace degassing - Google Patents

Abstract

A liquid dispensing method and system for dispensing from a container including an outer container and an inner container, a portion of the inner container occupied by the liquid, a remainder of the inner container occupied by a headspace gas. The system includes a probe having a flow passage therein and a gas passage communicating between the interior of the inner container and an exterior of the outer container. Fluid (such as air or nitrogen) is caused to flow under pressure into a space between inner walls of the outer container and the inner container to force the headspace gas out of the inner container via the gas passage and to force liquid out of the inner container through the flow passage in the probe to a manufacturing process.

Description

  The present invention relates to a storage and dispensing system for storing and dispensing liquids. In particular, the present invention relates to a method and system for dispensing a liquid from a container containing a headspace gas to a manufacturing process.

  Certain manufacturing processes require the use of liquid chemicals such as acids, solvents, bases, photoresists, dopants, inorganic solutions, organic solutions, biological solutions, pharmaceuticals and radioactive chemicals. The storage and dispensing system allows alternative containers to be used to deliver liquid chemicals to the manufacturing process at specific times. These treated liquids are typically dispensed from pressurized storage and dispensing containers by a dedicated dispensing pump.

  After filling these containers at the filling facility, the containers are typically transported to a location for use in the manufacturing process. Once transferred to the manufacturing process facility, these containers can be stored for long periods of time before being connected to the manufacturing process. However, the purity of some of the above chemicals tends to decay when stored over time. For example, in the manufacture of thin film transistor flat panel displays, the color filter chemicals used tend to decay. This is because free radicals in the color filter chemical are released during transport and storage as a result of temperature fluctuations. To avoid this happening, the empty space of the container, called the upper space, is filled with the gas in the upper space. The gas in the upper space prevents liquid chemicals from decaying by inhibiting chemical reactions from occurring in the liquid during storage. For example, in the case of a color filter chemical, an upper space gas containing oxygen is introduced into the container at the filling facility. This is because when released, oxygen tends to remove free radicals in the chemical, thereby preventing the decay of the color filter chemical.

  If the container is to be connected to a manufacturing process, the headspace gas is no longer needed or desired. Thus, the headspace gas must be removed prior to dispensing the liquid into the manufacturing process. However, care must be taken to avoid stirring the container or extruding the headspace gas into liquid chemicals while venting the headspace gas. Introducing a gas into a liquid chemical can result in the formation of bubbles in the chemical, which can make the liquid chemical incomplete for use in the manufacturing process.

  Furthermore, it may be desirable to leave a small amount of gas in the container after the headspace gas is removed. When all the liquid has been dispensed from the container, this small amount of empty detect gas is detected by the dispenser to indicate that the container is empty. In conventional systems, the amount left in the gas container to detect emptyness cannot be easily controlled.

  Thus, it is easy to remove the headspace gas and, if desired, easily adjust the amount left in the gas container to detect emptiness after the headspace gas is removed. A system that can do this is desirable.

(Summary of the Invention)
The present invention is a method and system for dispensing a liquid chemical from a container comprising an outer container and an inner container to a manufacturing process, wherein a portion of the inner container is occupied by a liquid chemical. And the remainder of the inner container is occupied by the gas in the top space. The system comprises a probe having a fluid path therein and insertable into the interior of the inner container and a gas passage communicating between the interior of the inner container and the exterior of the outer container. The system further comprises means for fluid communication with the space between the inner wall of the outer container and the inner container, which means that, under pressure, the fluid passes between the inner wall of the outer container and the inner container. Through the gas passage to push the upper space gas from the inner container to the upper space gas exhaust and through the fluid passage in the probe, the liquid is removed from the inner container. Push into the manufacturing process.

  In a preferred embodiment, the system further comprises an exhaust valve connected between the upper space gas exhaust pipe and the gas passage. The exhaust valve has an open position that is selectable to allow the gas in the upper space to be discharged through the gas passageway to the gas exhaust pipe in the upper space. The exhaust valve also has a selectable closed position when the headspace gas is exhausted from the interior of the inner container. The system also preferably includes a liquid sensor connected between the gas passage and the upper space gas exhaust pipe, the liquid sensor detecting when liquid chemicals begin to flow into the gas passage. Detected to indicate that the gas in the upper space has been exhausted from the inside of the inner container.

The system also preferably comprises means for detecting the sky to detect when the liquid chemical is discharged from the inner container. In one embodiment, the means for detecting sky is a gas sensor for detecting that it is empty. In use, just before dispensing the liquid chemical into the manufacturing process, a small amount of gas for detecting emptyness is introduced into the inner container. The gas sensor for detecting the empty state detects the gas for detecting the empty state when the liquid chemical substance is discharged from the container. When the gas for detecting the empty state is detected by the gas sensor for detecting the empty state, the liquid distribution to the manufacturing process is finished. In another embodiment, the means for detecting the sky comprises a scale for measuring the weight of the fluid container while the liquid is dispensed into the manufacturing process, so that if measured by this scale In addition, when the fluid container reaches a predetermined empty weight, the liquid distribution is finished.
(Item 1)
A method of dispensing a liquid, the method comprising:
Providing a fluid container comprising an outer container and an inner container, wherein a portion of the inner container is occupied by a liquid, and the remaining portion of the inner container is occupied by a gas in the upper space. A process;
Discharging the gas in the upper space from the inner container;
Supplying pressure to the inner container to push liquid from the inner container into the manufacturing process
Including the method.
(Item 2)
The step of supplying pressure to the inner container is as follows:
Supplying fluid under pressure between the inner container and the outer container to distribute liquid from the inner container to the manufacturing process;
The method according to item 1, comprising:
(Item 3)
Item 2. The method of item 1, wherein the method further comprises:
Attaching a connector to the fluid container, the connector comprising a probe having a fluid passage therein, the connector further communicating between the interior of the inner container and the exterior of the outer container A process comprising a gas passage
Including the method.
(Item 4)
The process of discharging the gas in the upper space is as follows:
Connecting a drain valve between the gas exhaust pipe in the upper space and the gas passage;
Opening the exhaust valve to exhaust the gas in the upper space through the gas passageway to an exhaust pipe for the gas in the upper space; and
Closing the exhaust valve when liquid begins to flow into the gas passage
4. The method according to item 3, comprising:
(Item 5)
Item 5. The method of item 4, wherein the method further comprises:
A step of supplying a fluid under pressure between the inner container and the outer container to push the gas in the upper space from the inner container to the gas exhaust pipe in the upper space through the gas passage.
The method according to item 4, comprising:
(Item 6)
Item 4. The method according to item 4, wherein:
Connecting a liquid sensor between the gas passage and the gas exhaust pipe in the upper space to detect when the liquid starts to flow into the gas path;
Including the method.
(Item 7)
2. A method according to item 1, wherein the method further comprises the following before supplying fluid under pressure between the inner and outer containers:
Introducing a certain amount of gas into the inner container for detecting emptyness
Including the method.
(Item 8)
The step of introducing a certain amount of gas into the inner container for detecting emptyness is as follows:
Connecting a first block valve, a gas amount control device, and a second block valve between a gas supply source for detecting being empty and the gas passage;
Opening the first block valve to cause the gas for detecting the empty state to flow from the gas supply source for detecting the empty state to the gas amount control device;

Closing the first block when a gas for detecting a certain amount of empty fills the gas quantity control device; and
Opening the second block valve and allowing the gas for detecting the vacancy to flow from the gas amount control device into the inside of the inner container through the gas passage.
The method according to item 7, comprising:
(Item 9)
The step of closing the first block when the gas for detecting that the fixed amount is empty fills the gas amount control device is as follows:
When the gas for detecting the empty state is introduced into the gas amount control device, the gas for detecting the empty state is used to adjust the pressure in the gas amount control device. Connecting a pressure regulation gauge between the source of the gas and the gas restriction device; and
A step of closing the first block valve when a gas for detecting that the fixed amount of air is empty is introduced into the gas amount control device based on the pressure in the gas amount control device.
The method according to item 8, comprising:
(Item 10)
Item 8. The method according to Item 7, further comprising:
Detecting the gas for detecting that the liquid is empty when the liquid is discharged from the inner container; and
A step of ending distribution of the liquid to the manufacturing process when a gas for detecting that it is empty is detected
Including the method.
(Item 11)
The method according to item 1, wherein the method further comprises:
Weighing the fluid container while the liquid is dispensed into the manufacturing process;
Ending dispensing of the liquid into the manufacturing process when the fluid container reaches an empty weight
Including the method.
(Item 12)
A system for dispensing liquid from a container comprising an outer container and an inner container to a manufacturing process, the inner container being occupied by the liquid and headspace gas, the system comprising:
A probe insertable into the inner container, the probe having a fluid passage therein;
A gas passage communicating between the interior of the inner container and the exterior of the outer container;
Liquid is pumped from the inner vessel through the gas passage to the upper space gas exhaust pipe and into the manufacturing process through the fluid passage in the probe. Means to extrude
A system comprising:
(Item 13)
13. The system according to item 12, further comprising:
An exhaust valve connected between the gas exhaust pipe of the upper space and the gas passage, wherein the exhaust valve passes the gas of the upper space through the gas passage. An exhaust valve having an open position selectable for exhausting into the exhaust pipe and a closed position selectable when gas in the upper space is exhausted from the interior of the inner container
A system comprising:
(Item 14)
Item 14. The system of item 13, further comprising:
A liquid sensor connected between the gas passage and a gas exhaust pipe in the upper space, wherein the sensor detects when liquid begins to flow into the gas passage; A liquid sensor for indicating that the gas in the space has been discharged from the inside of the inner container.
A system comprising:
(Item 15)
13. The system according to item 12, further comprising:
Means for detecting that the liquid is empty for detecting when the liquid is discharged from the inner container
A system comprising:
(Item 16)
The means for detecting that it is empty is a gas sensor for detecting that it is empty, and the gas sensor for detecting that it is empty means that the liquid is used in the manufacturing process. 16. The system according to item 15, wherein the system detects gas for detecting emptyness introduced into the inside of the inner container immediately before dispensing.
(Item 17)
The system of item 16, wherein the system further comprises:
Gas volume control device;
A first block valve connected between a gas supply source for detecting that it is empty and the gas amount control device, wherein the first block valve is for detecting that it is empty An open position selectable to allow gas to flow into the gas quantity control device from a gas source for detecting that it is empty, and a certain amount of sky. A first block valve having a selectable closed position when gas for detection is introduced into the gas quantity control device; and
A second block valve connected between the gas amount control device and the inside of the inner container, wherein the gas for detecting that the second block valve is empty is the gas amount control device. An open position selectable to allow flow into the interior of the inner container and when a gas for detecting a certain amount of empty is exhausted from the gas quantity control device A second block valve having a selectable closed position
A system comprising:
(Item 18)
The system of item 17, wherein the system further includes:
A pressure adjustment gauge connected between the gas supply source for detecting that the air is empty and the gas amount control device, wherein the pressure adjustment gauge adjusts the pressure in the gas amount control device. Based on this, when the gas for detecting that the fixed amount is empty is introduced into the gas amount control device, the empty is detected so that the first block valve is closed. A pressure adjustment gauge for adjusting the pressure in the gas amount control device when a gas for introduction is introduced into the gas amount control device
A system comprising:
(Item 19)
The system of item 17, wherein the system further includes:
A selection valve having a port connected to the interior of the block valve, the upper space gas exhaust pipe, and the inner vessel, the selection valve comprising the block valve and the upper space gas exhaust pipe; A selection valve that allows a selectable fluid connection to the interior of the inner container
A system comprising:
(Item 20)
When the means for detecting the emptiness is measured by a measuring instrument, the liquid is removed from the manufacturing process so that the dispensing of the liquid is terminated when the fluid container reaches a predetermined weight. 16. The system of item 15, comprising a meter for weighing the fluid container while being dispensed.
(Item 21)
Liquid handling system, which:
A container, the following:
An outer container; and
An inner container having an inner side;
A portion of the inner container occupied by the liquid, and a remaining portion of the inner container occupied by a gas in the upper space;
A connector attachable to the container, the connector comprising a probe insertable into the inner container and having a fluid passage therein; the connector further comprising an interior of the inner container; A connector comprising a gas passage communicating with the exterior of the outer container; and
Liquid is pumped from the inner container to the manufacturing process through the gas passage to push the upper space gas from the inner container to an upper space gas exhaust pipe and through the fluid passage in the probe. In fluid communication with the space between the inner wall of the outer container and the inner container for extruding fluid under pressure into the space between the inner wall of the outer container and the inner container Fluid air source
A system comprising:
(Item 22)
The system of item 21, wherein the system further comprises:
A liquid sensor connected between the gas passage and a gas exhaust pipe in the upper space, the sensor detecting when liquid begins to flow into the gas passage, A system comprising a liquid sensor for indicating that gas has been discharged from the inside of the inner container.
(Item 23)
The system of item 21, wherein the system further comprises:
Means for detecting emptyness for detecting when the liquid is drained from the inner container
A system comprising:

FIG. 1 is a schematic diagram of a system according to a preferred embodiment of the present invention for dispensing liquid from a container to a manufacturing process. The container comprises a headspace gas provided to stabilize the liquid during shipping and storage of the container. FIG. 2 is also a schematic diagram of a system according to another preferred embodiment of the present invention for dispensing liquid from a container to a manufacturing process. The container comprises a headspace gas provided to stabilize the liquid during shipping and storage of the container.

(Detailed explanation)
FIG. 1 is a schematic diagram of a system 10 according to a preferred embodiment of the present invention for dispensing liquid 12 from a container 14 comprising an upper space 16 filled with an upper space gas 18 to a manufacturing process 13. The container 16 includes a flexible inner container 20 and a rigid outer container 22. The system 10 further includes a compressed air or nitrogen source 30, a compressed air passage 32, an upper space gas passage 34, an exhaust valve 36, a liquid sensor 38, an upper space gas exhaust pipe 40, a fluid passage 42, a container. Scale 44 and system control 46.

  The compressed gas supply source 30 is connected to a compressed space 31 (that is, a space between the inner wall of the outer container 22 and the outer surface of the inner container 20) via a compressed air passage 32. The inside of the inner container 20 is connected to a gas exhaust pipe 40 in the upper space via a gas passage 34. The exhaust valve 36 and the liquid sensor 38 are connected along the gas passage 34 between the inside of the inner container 20 and the gas exhaust pipe 40 in the upper space. Finally, the inside of the inner container 20 is in fluid communication with the manufacturing process 13 via a fluid passage 42.

  The gas passage 34 and the fluid passage 42 are preferably contained within a single connector package so that the interior of the inner container 20 is connected to the upper space gas exhaust 40 and the manufacturing process 13 in one connection. In fluid communication. A fluid passageway 42 is typically provided in the probe that can be inserted through the port of the container and into the inner container 20 to provide fluid communication between the liquid 12 and the manufacturing process 13.

  The outer container 22 is the mechanical support required by the flexible inner container 20 (eg, flexible polymer bag) during filling, shipping, processing, and dispensing. And provide protection. The outer container 22 is typically constructed from metal, but other materials (including plastic materials) may also be used, depending on government regulatory standards for the treatment of the particular liquid contained within the container 14. Can be used. Preferably, the container 14 is a container as shown in US Pat. No. 5,335,821 issued Aug. 9, 1994 to Osgar (incorporated herein by reference).

  The system control 46 is preferably a microprocessor based control system that is connected to a source 30 of compressed air, an exhaust valve 36, a liquid sensor 38 and a container scale 44. System control 46 controls the operation of system 10 based on signals received from various components of system 10.

  Prior to attachment to the manufacturing process 13, the container 14 is filled at a filling facility. During filling, the inner container 20 is first expanded with a gas such as nitrogen. Liquid 12 is then introduced through a port in container 14 to fill inner container 20 in outer container 22.

  The purity of some chemicals tends to decay when stored over time, especially when subjected to temperature fluctuations. For example, in the manufacture of thin film transistor flat panel displays, the color filter chemicals used tend to attenuate or crosslink. This is because free radicals in the color filter chemicals are released during transport and storage. To prevent this from happening, the empty portion of the container, the upper space 16, is filled with the gas 18 in the upper space. The headspace gas 18 prevents the liquid 12 from decaying by preventing chemical reactions from occurring in the liquid 12 during transport and storage of the container 14. For example, in the case of a color filter chemical, the headspace gas 18 containing oxygen is introduced into the inner container 20 at the filling facility. This is because when released, oxygen tends to remove free radicals in the chemical, thereby preventing the decay and cross-linking of the color filter chemical.

  If the container 14 is to be connected to the manufacturing process 13, the headspace gas 18 is no longer needed or desired. Thus, the headspace gas 18 must be removed prior to dispensing the liquid 12 into the manufacturing process 13. First, the compressed air passage 32, the gas passage 34, and the fluid passage 42 are connected to the container 14. A signal is then sent by the system control 46 (preferably a microprocessor based system) to open the exhaust valve 36. This creates fluid communication between the interior of the inner container 20 and the gas exhaust pipe 40 in the upper space. A pressurized fluid (preferably compressed air or nitrogen) is then supplied to the compression space 31 by a compressed air source 30 and through a liquid sensor 38 via a gas passage 34. Then, the gas 18 in the upper space is pushed out to the gas exhaust pipe 40 in the upper space. As the headspace gas 18 is withdrawn from the inner container 20 of the container 14, air can enter the compression space 31, thereby collapsing the flexible inner container 20. The inner container 20 is preferably crushed by pressurized air, but any means (hydraulic or mechanical based device) that can collapse the inner container 20 to push the headspace gas 18 through the gas passage 34. Can be used. Alternatively, a pump connected to the gas passage 34 can draw the upper space gas 18 from the container 14.

  After the headspace gas 18 is exhausted from the inner container 20, the liquid 12 begins to flow into the gas passage 34. This is because the compressed air supply source 30 continues to supply air to the compressed space 31. When the liquid 12 reaches the liquid sensor 38, a signal is sent to the system control 46 and the exhaust valve 36 is closed. Thereby, the connection between the inside of the inner container 20 and the gas exhaust pipe 40 in the upper space is completed. Alternatively, the user of the system 10 visually determines when the liquid 12 has begun to flow into the gas passage 34 and manually shuts the exhaust valve 36 to connect the upper space gas to the exhaust pipe 40. Can be terminated.

  When the connection between the inside of the inner container 20 and the gas exhaust pipe 40 in the upper space is terminated, the liquid 12 is pushed out through the fluid passage 42. This is because the compressed air continues to be supplied to the compressed space 31 by the compressed air supply source 30. As the liquid 12 is withdrawn from the flexible inner container 20 of the container 14, air can enter the compression space 31, thereby collapsing the inner container 20. The inner container 20 is preferably crushed by pressurized air, but any means (including hydraulic or mechanical based devices) that can collapse the inner container 20 and push liquid through the fluid passage 42 can be used. . Alternatively, a pump or venturi connected to the fluid passage 42 can draw the liquid 12 from the container 14.

  Note that if the headspace gas 18 is removed before dispensing the liquid 12 into the manufacturing process 13, the headspace gas 18 begins to dissolve in the solution according to Henry's law. is important. Henry's law states that at a constant temperature, the amount of gas dissolved in the solution is directly proportional to the pressure of the gas at the top of the solution. Thus, as the inner container 20 is crushed by the compressed air source 30, pushing the liquid 12 out of the inner container 20, the pressure of the headspace gas 18 is increased during this process. This causes the headspace gas 18 to dissolve into the liquid 12, thereby creating harmful bubble formation when the liquid 12 is transported to the process 13.

  As the liquid 12 is dispensed into the manufacturing process 13, the weight of the container 14 decreases. The container scale 44 continuously measures the weight of the container 14 as the liquid 12 is being dispensed into the manufacturing process 13 to determine when the container 14 has reached a predetermined empty weight. The empty weight of the container 14 is the weight of the outer container 22 where the inner container 20 inside is empty. Determination of the empty weight by the container scale 44 ensures that all the liquid 12 has been dispensed from the inner container 20.

  When the container scale 44 determines that the container 14 is empty, the system control 46 sends a signal to turn off the source 30 of compressed air. The compressed air passage 32, gas passage 34, and fluid passage 42 are then disconnected from the empty container 14, the empty container 14 is removed from the system 10, and the liquid 12 and headspace gas A new container 14 containing 18 is connected to the system 10. The dispensing of the liquid 12 from the container 14 then resumes.

  FIG. 2 is a schematic diagram of a system 50 according to another preferred embodiment of the present invention for dispensing liquid 12 from container 14 to manufacturing process 13. The container 14 includes a headspace gas 18 that is provided to stabilize the liquid 12 during transport and storage of the container 14. Similar to the system 10 shown in FIG. 1, the system 50 includes a compressed air source 30, a compressed air passage 32, an upper space gas passage 34, a liquid sensor 38, an upper space gas exhaust 40, a fluid. A passage 42 and a system control 46 are provided. Further, the system 50 includes a gas supply source 52, a regulator gauge 54, a first block valve 55, a gas quantity controller 56, a second block valve 58, a selection valve for detecting emptyness. 60 and a gas sensor 62 for detecting that it is empty.

  The compressed air supply source 30 is connected to the compressed space 31 via a compressed air passage 32. The selection valve 60 is connected to the device connected to the selection valve port 60a or the selection valve port 60b depending on the position state of the selection valve 60 (via the gas passage 34), and connects to the inside of the inner container 20 with three ports. It is a valve. More specifically, in the first position, the selection valve 60 is between the interior of the inner container 20 and the device connected to the port 60a (ie, the liquid sensor 38 and the upper space gas exhaust pipe 40). Provide fluid communication. The liquid sensor 38 is connected between the selection valve 60 and the gas exhaust pipe 40 in the upper space. In the second position, the selector valve 60 is connected to the interior of the inner container 20 and the device connected to the port 60b (ie, the gas source 52 for detecting emptyness, the regulator gauge 54, the first block). A fluid connection is provided between the valve 55, the gas control device 56 and the second block valve 58). The regulator gauge 54, the first block valve 55, the gas amount control device 56, and the second block valve 58 are connected between the gas supply source 52 for detecting that it is empty and the selection valve 60. . Finally, the interior of the inner container 20 is in fluid communication with the manufacturing process 13 via the fluid passage 42. A gas sensor 62 for detecting emptyness is connected along the fluid passage 42.

  The gas passage 34, fluid passage 42, and selection valve 60 are preferably combined in a single connector package so that the interior of the inner container 20 is empty in the upper space gas exhaust 40, empty. It is connected to the gas supply source 52 for detection and the manufacturing process 13 through one connection. A fluid passageway 42 is typically provided in the probe that can be inserted through the port of the container and into the inner container 20 to provide fluid communication between the liquid 12 and the manufacturing process 13.

  In the embodiment shown in FIG. 2, the system control 46 is a compressed air source 30, a liquid sensor 38, a regulator gauge 54, a first block valve 55, a second block valve 58, a selection valve 60, and empty. Is connected to a gas sensor 62 for detecting. System control 46 controls the operation of system 50 based on signals received from the various components of system 50.

  As noted above, if the container 14 is to be connected to the manufacturing process 13, the headspace gas 18 is no longer needed or desired. Thus, the headspace gas 18 must be removed prior to dispensing the liquid 12 into the manufacturing process 13. The procedure for removing the headspace gas 18 from the container 14 in the system 50 is similar to the same process in the system 10. First, the compressed air passage 32, the gas passage 34, and the fluid passage 42 are connected to the container 14. The system control 46 then sends a signal to the selection valve 60 to return the valve to the first position (via the selection valve port 60a) between the interior of the inner vessel 20 and the upper space gas exhaust line 40. A fluid connection is created between them. The user of the system 50 can also manually return the selection valve 60 to its first position. Thereafter, a pressurized fluid (preferably compressed air or nitrogen) is supplied to the compression space 31 by a source 30 of compressed air, and the gas 18 in the upper space passes through the gas passage 34 to the liquid sensor. 38 and then into the gas exhaust pipe 40 in the upper space. As the headspace gas 18 is withdrawn from the inner container 20 of the container 14, air can enter the compressed space 31, thereby collapsing the flexible inner container 20. The inner container 20 is preferably crushed by pressurized gas, but any means that can collapse the inner container 20 and push the headspace gas 18 through the gas passageway 34 (including hydraulic or mechanical based devices). ) Can be used. Alternatively, a pump or venturi connected to the gas passage 34 can draw the headspace gas 18 from the container 14.

  After the headspace gas 18 is exhausted from the inner container 20, the liquid 12 begins to flow into the gas passage 34. This is because the compressed air supply source 30 continues to supply air to the compressed space 31. When the liquid 12 reaches the liquid sensor 38, the system control 46 responds by moving the selection valve 60 to the second position. This terminates the communication between the inside of the inner container 20 and the gas exhaust pipe 40 in the upper space, and opens the connection between the inside of the inner container 20 and the selection valve port 60b. Alternatively, the user of the system 50 visually determines when the liquid 12 has begun to flow into the gas passage 34 and manually moves the selection valve 60 to the second position so that the gas in the upper space can be The connection to the exhaust pipe 40 can be terminated.

  Note that if the headspace gas 18 is removed before dispensing the liquid 12 into the manufacturing process 13, the headspace gas 18 begins to dissolve in the solution according to Henry's law. is important. As the inner container 20 is crushed by the compressed air source 30, pushing the liquid 12 out of the inner container 20, the pressure of the headspace gas 18 is increased during this process. This causes the headspace gas 18 to dissolve into the liquid 12, thereby resulting in the formation of harmful bubbles in the liquid 12 as the liquid 12 is carried to the process 13.

  In many liquid dispensing systems, it is desirable to leave a small amount of gas in the container 14 after the headspace gas 18 has been removed. When all the liquid 12 has been dispensed from the container 14, this small amount of gas (referred to as gas for detecting emptyness) is used as a sensor (eg, gas for detecting emptyness in FIG. 2). Sensor 62) indicating that the container is empty. In conventional systems, the amount remaining in the gas container 14 for detecting emptyness is not easily adjustable. This is because the amount of gas discharged to the gas exhaust pipe 40 in the upper space cannot be easily measured.

  In the system 50, the addition of the gas for detecting that it is empty into the inner container 20 includes the gas supply source 52 for detecting that it is empty, the regulator gauge 54, the first block valve 55, the gas. It is controlled by a quantity control device 56 and a second block valve 58. First, the system control 46 opens the first block valve 55 to create a fluid connection between the gas source 52 and the gas quantity controller 56 for detecting that it is empty. Next, the gas for detecting that it is empty begins to flow into the gas amount control device 56 from the gas supply source 52 for detecting that it is empty. When the gas amount control device 56 is filled with a gas for detecting that the gas amount control device 56 is empty, the pressure in the gas amount control device 56 increases. The pressure is regulated by a regulator gauge 54 and can be measured by a pressure transducer integrated within the gas volume controller 56. The amount of gas for detecting that it is empty flowing into the gas amount control device 56 is the maximum capacity of the gas amount control device 56 and the gas for detecting that it is empty in the gas amount control device 56. Depends on the pressure. Based on these factors, the gas source 52 for detecting emptyness fills the gas volume controller 56 with a desired amount of gas (eg, 100 pounds per square inch gauge). Inflow continues until

  When the gas amount control device 56 is filled with a desired amount of gas, the system control 46 closes the first block valve 55 to detect that the gas source 52 is empty and the gas amount control device. The connection with 56 is terminated. Thereafter, or simultaneously, the system control 46 opens the second block valve 58 to create a fluid connection between the gas volume control device 56 and the interior of the inner container 20. Thereby, the gas for detecting that it is empty contained in the gas amount control device 56 can flow into the inner container 20. When the gas for detecting that it is empty flows from the gas amount control device 56 into the inner container 20 and the compressed air supply source 30 is stopped, it is included in the gas amount control device 56. A gas for detecting that it is empty flows into the inner container 20. While the gas for detecting that it is empty flows into the inner container 20 from the gas amount control device 56, when the compressed air supply source 30 remains in an active state, it detects that it is empty. The gas to flow from the gas amount control device 56 into the inner container 20 until an equilibrium pressure is reached between the compressed air supply source 30 and the pressure in the gas amount control device 56. Typically, whether the compressed air source 30 is in an active state is controlled by a two-way or three-way valve connected between the compressed air source 30 and the compression space 31. . In general, the amount of gas for detecting that it is empty flowing from the gas amount control device 56 into the inner container 20 is the size of the gas amount control device 56, the pressure in the gas amount control device 56, and the compression. Based on the difference with the pressure in the space 31.

  After the gas for detecting that it is empty has flowed out of the gas amount control device 56, the system control 46 closes the second block valve 58 and connects the gas amount control device 56 to the inner container 20. End. When the compressed air is supplied to the compressed space 31 by the compressed air supply source 30 after the second block valve 58 is closed, the liquid 12 is pushed upward through the fluid passage 42. The inner container 20 is preferably crushed by pressurized air, but any means (including hydraulic or machine-based devices) that can collapse the inner container 20 and push liquid through the fluid passage 42 is used. obtain. Alternatively, a pump or venturi connected to the fluid passage 42 can draw the liquid 12 from the container 14.

  When the inner container 20 is crushed by the compressed air source 30, the liquid 12 continues to flow into the manufacturing process 13 until the liquid 12 is drained from the inner container 20. After the liquid 12 is discharged from the inner container 20, only the gas for detecting that it is empty remains in the inner container 20. Since the source 30 of compressed air continues to squeeze the inner container 20, the gas for detecting emptyness is pushed out through the fluid passage 42 toward the manufacturing process 13. When the gas for detecting that it is empty passes through the gas sensor 62 for detecting that it is empty, the gas sensor 62 for detecting that it is empty sends a signal to the system control 46. To stop the source 30 of compressed air, thereby terminating the operation of the system 50. Thereafter, the compressed air passage 32, the gas passage 34, and the fluid passage 42 are disconnected from the empty container 14, the empty container 14 is removed from the system 50, and the liquid 12 and headspace gas 18 are removed. A new container 14 containing is connected to the system 50. The dispensing of the liquid 12 from the container 14 then resumes.

  In summary, the purity of some chemicals has a tendency to decay or crosslink when stored over time, especially when subjected to temperature fluctuations. To prevent this attenuation or cross-linking from occurring, an empty portion of the container (referred to as the upper space) is filled with gas in the upper space. The headspace gas prevents decay of liquid chemicals by preventing chemical reactions from occurring in the liquid during storage. If the container is to be connected to a manufacturing process, the headspace gas is no longer needed or desired. Conventional dispensing systems do not allow easy removal of headspace gas prior to dispensing liquid chemicals. The present invention is a method and system for dispensing liquid chemicals from a container comprising an outer container, an inner container, and a port in communication with the interior of the inner container to a manufacturing process, a portion of the inner container comprising: The remaining portion of the inner container is occupied by the headspace gas to prevent the liquid chemical from decaying until the container is connected to the manufacturing process. ing. The system includes a probe having a fluid passage therein and a gas passage communicating between the interior of the inner container and the exterior of the outer container. The system further allows fluid to flow under pressure into the space between the inner wall of the outer container and the inner container, and allows the upper space gas to pass from the inner container to the upper space gas via a gas passageway. Means are provided for fluid communication with the compressed space between the inner wall of the outer container and the inner container for extruding the exhaust pipe and forcing liquid from the inner container through the fluid passage in the probe to the manufacturing process.

  Although the present invention has been described with reference to preferred embodiments, workers skilled in the art will recognize that changes may be made in form and detail without departing from the scope and spirit of the invention.

Claims (46)

A liquid dispensing system,
An outer container;
A collapsible inner container disposed within the outer container and configured to contain a liquid;
A gas passage configured to allow removal of headspace gas from the inner vessel;
An upper space gas exhaust pipe configured to receive gas from the gas passage;
An exhaust valve configured to selectively allow inflow of gas in the upper space into the exhaust pipe of gas in the upper space via the gas passage;
A liquid sensor configured to detect when liquid begins to flow into the gas passageway;
The liquid dispensing system, wherein the exhaust valve is closed in response to detection of the presence of liquid in the gas passage by the liquid sensor.   The liquid dispensing system of claim 1, wherein the inner container comprises a flexible polymer bag. A flow path configured to receive a dispensed liquid from the inner container;
The flow path and the gas passage are combined in a single connector package, wherein the interior of the inner container is fluidized in one connection with the gas exhaust pipe and manufacturing process of the upper space. 3. A liquid dispensing system according to claim 1 or 2, which enables communication.   The liquid distribution system according to claim 1, further comprising a probe which is insertable into the inner container and has a flow path therein for distributing liquid from the inner container.   5. A liquid dispensing system according to any one of the preceding claims, comprising means for detecting empty for detecting when liquid is drained from the inner container.   6. A liquid dispensing system according to claim 5, wherein the means for detecting emptyness comprises a gas sensor for detecting emptyness.   6. A liquid dispensing system according to claim 5, wherein the means for detecting emptyness comprises a scale.   8. A liquid dispensing system according to any one of the preceding claims, configured to dispense liquid from the inner container to a manufacturing process.   The liquid dispensing system of claim 8, wherein the manufacturing process comprises a flat panel display manufacturing process.   10. The liquid according to any one of claims 1 to 9, wherein the inner container comprises a liquid selected from the group consisting of acids, solvents, bases, photoresists, color filter chemicals, dopants, and inorganic solutions. Distribution system.   10. A liquid dispensing system according to any one of claims 1 to 9, wherein the inner container comprises a liquid selected from the group consisting of organic solutions, biological solutions, pharmaceuticals, and radioactive chemicals. A method of dispensing liquid from a collapsible inner container disposed within an outer container, the inner container first comprising liquid and headspace gas,
The method
Removing gas in the upper space from the inner vessel via a gas passage communicating with the exhaust pipe in the upper space;
Utilizing a liquid sensor to detect when liquid begins to flow into the gas passage;
In response to detection by the liquid sensor of the presence of liquid in the gas passage, closing the exhaust valve and terminating the connection between the inner container and the gas exhaust pipe in the upper space;
Dispensing a liquid from the inner container.   13. Dispensing liquid from the inner container includes using a probe that is insertable into the inner container and has a flow path therein for dispensing liquid from the inner container. Method.   14. A method according to claim 12 or 13, comprising dispensing liquid from the inner container into a manufacturing process.   The method of claim 14, wherein the manufacturing process comprises a flat panel display manufacturing process.   16. A method according to any one of claims 12-15, wherein dispensing liquid from the inner container comprises supplying pressurized fluid to a space between the inner container and the outer container. .   16. A method according to any one of claims 12-15, wherein dispensing liquid from the inner container comprises drawing liquid from the inner container by use of a pump or venturi.   18. A method according to any one of claims 12 to 17, comprising the use of means for detecting emptyness to detect when liquid is drained from the inner container.   The method of claim 18, wherein the means for detecting emptyness comprises a gas sensor for detecting emptyness.   The method of claim 18, wherein the means for detecting being empty comprises a scale.   13. Finishing dispensing liquid from the inner container and connecting a new container to the gas passage and the liquid sensor, the new container comprising liquid and headspace gas. 21. The method according to any one of 20.   22. The method of any one of claims 12-21, wherein the liquid is selected from the group consisting of acids, solvents, bases, photoresists, color filter chemicals, dopants, and inorganic solutions.   22. A method according to any one of claims 12 to 21, wherein the liquid is selected from the group consisting of organic solutions, biological solutions, pharmaceuticals, and radioactive chemicals. A liquid dispensing system,
An outer container;
An inner collapsible container disposed within the outer container and configured to contain a liquid, wherein an inner container is provided with a compression space provided between the outer container and the inner container;
A gas passage configured to allow removal of headspace gas from the inner vessel;
An upper space gas exhaust pipe configured to receive gas from the gas passage;
An exhaust valve for removal of upper space gas to the upper space gas exhaust pipe through the gas passage, the exhaust valve being in contact with any liquid contained in the inner vessel An exhaust valve configured to be opened before the pressure on any contents of the inner container is increased to initiate the venting of gas in the formed upper space;
A liquid sensor configured to detect when liquid begins to flow into the gas passage;
Including
The system is configured to close the exhaust valve in response to detection of the presence of liquid in the gas passage by the liquid sensor, and dispenses liquid from the inner container following closure of the exhaust valve. A liquid dispensing system that is configured. 25. A liquid dispensing system according to claim 24, wherein the inner container comprises a flexible polymer bag. A flow path configured to receive a dispensed liquid from the inner container;
The flow path and the gas passage are combined in a single connector package, wherein the interior of the inner container is fluidized in one connection with the gas exhaust pipe and manufacturing process of the upper space. 25. A liquid dispensing system according to claim 24, which allows communication. 25. The liquid dispensing system of claim 24, comprising a probe insertable into the inner container and having a flow path therein for dispensing liquid from the inner container. 28. A liquid dispensing system according to any one of claims 24 to 27, comprising means for detecting empty for detecting when liquid is drained from the inner container. 29. A liquid dispensing system according to claim 28, wherein the means for detecting emptyness comprises a gas sensor for detecting emptyness. 29. A liquid dispensing system according to claim 28, wherein the means for detecting being empty comprises a scale. 31. A liquid dispensing system according to any one of claims 24 to 30, configured to dispense liquid from the inner container into a manufacturing process. 32. A liquid dispensing system according to claim 31, wherein the manufacturing process comprises a flat panel display manufacturing process. 31. A liquid according to any one of claims 24 to 30, wherein the inner container comprises a liquid selected from the group consisting of acids, solvents, bases, photoresists, color filter chemicals, dopants, and inorganic solutions. Distribution system. 31. A liquid dispensing system according to any one of claims 24 to 30, wherein the inner container comprises a liquid selected from the group consisting of organic solutions, biological solutions, pharmaceuticals, and radioactive chemicals. A method of dispensing liquid from a collapsible inner container disposed within an outer container, the inner container initially containing liquid and headspace gas, wherein a compression space is formed between the outer container and the inner container. Is provided during the
The method
An upper portion disposed in contact with the liquid in the inner container before the pressure on the contents of the inner container is increased to remove the gas in the upper space through a gas passage communicating with the exhaust pipe of the upper space. Opening the upper space gas exhaust pipe to start the space gas ventilation;
Utilizing a liquid sensor to detect when liquid begins to flow into the gas passage;
In response to detection by the liquid sensor of the presence of liquid in the gas passage, closing an exhaust valve to terminate the connection between the inner container and the gas exhaust pipe in the upper space;
Dispensing the liquid from the inner container following closure of the exhaust valve;
Including a method. 36. Dispensing liquid from the inner container includes using a probe that is insertable into the inner container and has a flow path therein for dispensing liquid from the inner container. Method. 37. A method according to claim 35 or 36 comprising dispensing liquid from the inner container into a manufacturing process. 38. The method of claim 37, wherein the manufacturing process comprises a flat panel display manufacturing process. 39. A method according to any one of claims 35 to 38, wherein dispensing liquid from the inner container comprises supplying pressurized fluid to the compression space. 39. The method of any one of claims 35 to 38, wherein dispensing liquid from the inner container comprises drawing liquid from the inner container by use of a pump or venturi. 41. A method according to any one of claims 35 to 40 comprising the use of means for detecting emptyness to detect when liquid has been drained from the inner container. 42. The method of claim 41, wherein the means for detecting emptyness comprises a gas sensor for detecting emptyness. 42. The method of claim 41, wherein the means for detecting being empty comprises a scale. 35. Terminating dispensing of liquid from the inner container and connecting a new container to the gas passage and the liquid sensor, the new container comprising liquid and headspace gas. 44. The method according to any one of 43. 38. The method of any one of claims 35 to 37, wherein the liquid is selected from the group consisting of acids, solvents, bases, photoresists, color filter chemicals, dopants, and inorganic solutions. 38. A method according to any one of claims 35 to 37, wherein the liquid is selected from the group consisting of organic solutions, biological solutions, pharmaceuticals, and radioactive chemicals.

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