JP3039689B2 - Liquid distribution apparatus, liquid distribution method, and processing method of liquid distribution apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid dispensing apparatus and a liquid dispensing method, and more particularly, to a liquid dispensing apparatus for processing a predetermined amount of liquid from a liquid dispensing apparatus. The present invention relates to an automatic microprocessor-controlled liquid dispensing device and a liquid dispensing method for dispensing a liquid, wherein the liquid dispensing device automatically switches between a plurality of liquid supply sources, and the liquid supply gate is a liquid supply source. When it is detected that one is empty, the liquid is supplied to the liquid distribution device.

[0002]

2. Description of the Related Art With respect to a given manufacturing process, it is inevitable to carefully control the operating conditions of various processes. One problem encountered in certain manufacturing processes, such as dispensing chemicals such as liquid photoresist, is discontinuities, such as cuts and tears, formed in the photoresist layer due to bubbles. These bubbles are brought into the manufacturing process when the liquid photoresist is dispensed. Chemicals, such as liquid photoresist, are supplied in relatively small bottles, which need to be replenished when empty.

As described in US Pat. No. 4,601,409, pumping which creates a reduced pressure in a reservoir by charging and discharging liquid from the reservoir to dispense liquid chemicals. It is known to use This pumping simultaneously supplies liquid from the container to the reservoir to keep the reservoir filled above a preset level. It is also known from the disclosure of the above-mentioned U.S. patent that when one container is empty, one container is switched to the other. Therefore, the filling of the reservoir is continued. However, the above is not entirely satisfactory because both the filling and dispensing operations occur simultaneously. Thus, if the reservoir cannot be filled at the same rate, at least if the liquid is dispensed due to empty inlets, other fluid obstructions or other reasons, instead of or with liquid chemicals Together with the distribution of gaseous fluids is possible.

Second, conventional charging / discharging devices (liquid distribution devices) are traditionally provided by bellows type pumps.
However, this is not entirely satisfactory because the flow rates are not constant. Therefore, it is difficult to distribute a predetermined amount of liquid chemical. Further, with this type of charging and discharging device, it would be difficult to compensate for the increased pressure drop through the filter if the filter was packed with contaminants over time, if included. is there.

[0005] SUMMARY OF THE INVENTION Accordingly, a method of the liquid dispensing apparatus and a liquid dispensing application, in order to prevent gaseous fluid from the liquid chemicals and with the distribution,
Dispensing liquid chemicals in precise repetitive volumes during the dispense operation and the isolation fill or refill operation. The liquid dispensing device of the present application includes a microprocessor (controller) for controlling a liquid filter reservoir and a plurality of outlets connected to the liquid filter reservoir, each outlet adapted to receive a predetermined amount of liquid fluid from the outlet. Connected to the processing unit of the processing device. The control microprocessor is driven by optimal software according to the algorithm of the present application. The parameters of the various modes of the liquid distribution device are programmed into the controller by the user. An outlet valve at each outlet controls the flow through the outlet. Since each outlet valve is individually controlled by the controller, each outlet can be individually selected. The liquid dispensing device and liquid dispensing method provide the user with complete control of the dispensing requirements, which is convenient for the user.

[0006] The controller is used to receive a signal from a processing unit of a processing device connected to a specific outlet,
Informs a demand for a predetermined volume of liquid from a particular outlet. Upon receipt of the request, the liquid dispenser switches to the dispensing mode and the pressure regulator (flow controller) responds to a signal from the controller.
Body pressure means (ie, pump means) exerts pressure on the liquid in the reservoir. When the applied pressure reaches a predetermined value represented by the detected pressure near the specific outlet, a specific outlet valve that controls that specific outlet is selected, and while the other outlet valves are closed, a signal from the controller is output. Opened in response, liquid is dispensed to the processor only through the selected outlet.

[0007] The predetermined pressure supplied to the orifice contained in each outlet and the liquid sensed near the selected outlet controls the rate of flow through the selected outlet. The controller provides a signal to the select outlet valve at the end of the predetermined period to close the select outlet valve. During a predetermined time period along with the flow rate, a predetermined amount of liquid is dispensed to the processing device. The servo loop between the pressure sensing means via the controller and the pressure regulator provides a stable distribution regardless of the number of outlet valves that are open. Because the pressure is detected by a pressure sensor adjacent to the outlet, one or more outlets are open at any time, and the liquid chemical being distributed is sent to the processing units of one or more processing units. It is.

After a predetermined amount of liquid has been dispensed to the processing device,
The selective outlet valve is closed and the liquid distributor switches to the selective exhaust mode. The vacuum venturi is actuated through a signal from the controller to relieve pressure acting on the liquid in the reservoir, thus delivering liquid around itself. A check valve between the reservoir and the vacuum venturi prevents the venturi operating pressure supplied by compressed air or nitrogen from backflowing to the reservoir. In this mode, the vacuum venturi is not operated, but the reservoir is vented through the vacuum venturi to ambient pressure.

[0009] The plurality of inlets connect to the reservoir such that the reservoir is filled with the liquid chemical. Each inlet is connected to a separate liquid supply. When a low liquid level is detected in the reservoir, and when dispensing is not in progress, the liquid dispenser switches to fill mode, an inlet responsive to a signal from the controller is selected and opened, and the reservoir is opened. Filled to the level. Below the low liquid level,
While dispensing a well-known predetermined volume in the reservoir, which is currently above the reservoir outlet or filter, the reservoir naturally drops below the low liquid level and an empty count (empty co)
Further supply of liquid to dispense a known dispensing number, called unt), prevents gaseous fluid from dispensing until the required amount of liquid is dispensed.

When the controller detects that the reservoir has not been filled after a predetermined time, an inlet responsive to another signal from the controller is selected and opened, and the reservoir continues to fill until a predetermined level is reached. . An inlet detected by the controller as having an empty liquid supply is assigned an empty state by the controller. Since this empty state is used by the controller to identify an empty entrance, the empty entrance will not be selected again when the fill mode is operated again.

[0011] While the reservoir is being refilled and while the empty count of the reservoir does not exceed its maximum value, the liquid dispenser switches back to the dispensing mode and is temporarily closed for the filling mode. The outlet is reselected and continues to direct liquid through the selected outlet until a predetermined amount of liquid is directed to the processing device. After dispensing, the liquid dispenser switches back to the refill (refill) mode, if necessary, and continues filling. A visual or audible liquid source alarm alerts the operator that the liquid supply is empty and causes the operator to refill or replace the empty liquid supply.

The best way to fill the reservoir with liquid is to supply a vacuum to the isolated reservoir while the selection inlet is opened by operating a vacuum venturi tube in response to a signal from the controller. It is. The reduced pressure draws liquid from the liquid source through the inlet to the reservoir. Another best way to fill the reservoir with liquid is to supply gas pressure to a selected liquid source to operate on that liquid in the liquid, and to the reservoir through a selected inlet. Let the liquid flow.

When the high liquid level sensor fails, the liquid overflow detecting means adjacent to the exhaust interlock means between the reservoir and the vacuum venturi detects the liquid overflow at the time of the interlock and sends a signal to the controller. send. Upon receipt of a signal indicative of liquid overflow at the controller, the selection inlet is closed by a signal from the controller, further stopping the flow of liquid to the reservoir.

When a demand for liquid is received in fill mode and while the liquid level in the reservoir is above the low liquid level,
The filling mode is ended. The selection inlet responsive to a signal from the controller is closed and the liquid dispenser switches to the dispensing mode.

[0015] A filter is provided between the reservoir and the outlet to filter the liquid during the distribution mode. Thus, the sensed pressure near the selection outlet during the distribution mode is downstream between the filter and the outlet. During the dispense mode, the liquid distributor detects a pressure drop in the filter and provides a signal to the controller indicating the pressure drop. Because, when the filter is packed with contaminants, if the sensing pressure near the selection outlet decreases, the pressure supplied to the liquid in the reservoir will increase and the sensing pressure near the selection outlet will remain at a predetermined pressure. be able to.

The controller receives the signal and converts the signal to a valid value that is compared to a predetermined value for the pressure drop. When the effective value converted from the received signal is larger than a predetermined value, the controller sends an alarm signal to the operator. Thus, when the effective value converted from the received signal is greater than a predetermined value, the controller activates an audible or visual filter alert indicating that the condition of the filter is insufficient.

[0017] The foregoing and other features of the present application will be apparent from the drawings, detailed description, and the appended claims. The present invention may be better understood with reference to the following description of a preferred embodiment, taken together with the drawings.

[0018]

DETAILED DESCRIPTION Referring to FIG. 1, there is shown a schematic view of a liquid distribution apparatus 10 of the present invention. The liquid dispensing device 10 dispenses liquid fluids in precise repetitive volumes and can be adapted to all different types of acids, solvents and bases. At the center of the liquid distribution device 10 is a pressurizable chemical reservoir 12. The reservoir 12
A closed container that can contain a substantial amount of a liquid fluid suitable for pressurization for the purposes described below.

A software-driven controller 14, programmed according to the algorithms of FIGS. 4 through 34, controls the operation of the liquid distribution device 10. The control <br/> keyboard 16 connected to the over La 14, the user can selectively programmed microprocessor controller 14 to manage the operation of the liquid dispensing device 10. The controller 14 is a suitable microprocessor, such as a Zilog Z80, a suitable I / O board mounted in a slot on the motherboard, and a suitable microprocessor, such as an Intel 8254 programmable timer that provides 1 / 100th of a second timing increments. A plurality of timing means. Suitable connection means in the form of wiring harnesses attached to the I / O board and indicated by reference letters a-n provide for individually connecting the controller 14 with other components of the liquid distribution device 10. Referring to FIG. 3, a pilot valve manifold (a pilot
A plurality of individually selectable valves supported along a valve manifold are managed by the controller 14 and each valve in the open position to convey pilot pressure selectively operates other components of the liquid distribution device 10. Alternatively, controller 14 may be a programmable personal computer, such as an IBM AT, and other suitable programmable devices may be used. The controller 14 includes a random access memory (RAM) in which the power is backed up in the event of a power failure,
The programmed data remains in its memory.

The liquid distribution device 10 includes a plurality of selectable liquid inlets 18a, 18 that connect to the reservoir 12 via a branch of a conduit 20 to fill and refill the reservoir 12.
b, 18c and 18d. Each liquid inlet 18a, 18
b, 18c and 18d are inlet valves 22a and 22d, respectively.
b, 22c and 22d. The controller 14
It selectively communicates with each inlet valve 22a, 22b, 22c or 22d through a portion of the wiring harness so that each inlet valve 22a, 22b, 22c and 22d is separately controlled. Accordingly, the liquid input to reservoir 12 is selectively controlled.

Each inlet 18a, 18b, 18c and 18d
Are connected to separate liquid chemical sources, not shown, each liquid chemical source having the same chemical. Each liquid source is in the form of a conventional bottle or bag. The liquid dispensing device 10 is configured to switch one of the inlet valves 22a, 22b, 22c or 22d while the remaining inlet valve is closed.
The reservoir 12 is automatically refilled by selectively opening one. Thus, while only one inlet, indicated by bold line 24 in FIG. 1, is selected and the liquid dispensing device operates to prevent liquid flowing through the other inlet, the liquid dispensing device 10 is provided with the selected liquid By drawing liquid chemicals from the chemical source, the operator can refill any empty liquid chemical source with the liquid chemicals. When the selected liquid chemical source is emptied, the liquid dispensing device 10 automatically switches to another inlet, selects another liquid chemical source, and sets the empty liquid chemical source to liquid. Replenished with chemicals.

The liquid distribution device 10 includes a plurality of selectable outlets 26a, 26b, 26c. Outlets 26a, 26b and 26c are connected via a branch of conduit 28 for dispensing liquid chemicals from reservoir 12. Each liquid outlet 26a, 26b and 26c is provided with an outlet valve 30a, 3
0b and 30c. Controller 14 is in selective communication with each outlet valve 30a, 30b and 30c to control each outlet valve 30a, 30b and 30c separately. Thus, the liquid output from reservoir 12 is selectively controlled,
Liquid is selectively dispensed from reservoir 12. Therefore, although not shown, only one outlet or a plurality of outlets indicated by bold lines 32 in FIG. 1 are selected.
Preferably, each outlet valve 30a, 30b and 30c is a return or check valve portion 34a, 34a, respectively, to prevent chemicals from falling onto the processing material in the processing equipment receiving the dispensing.
34b and 34c.

Although not shown, each outlet 26a, 26
b and 26c are connected to different processing units of the processing equipment and selectively distribute chemicals to the processing equipment on demand. In order for this to be best achieved, each processing section of the processing unit is individually connected to the controller 14 through a wiring harness such as a serial port or suitable means, and under appropriate conditions, Each processor sends a request signal to the controller 14 to open the appropriate outlet valve 30a, 30b or 30c, and distributes the selected amount of chemicals thereto.

The liquid level sensor in the reservoir 12 has 36
Detects the level of the liquid level in the reservoir 12. The liquid level sensor 36 moves between a high position indicated by reference numeral 38 in FIG. 1 and a low position indicated by reference numeral 40 in FIG. Liquid level sensor 36 provides a first signal indicative of a high liquid level, which indicates that a high liquid level has been sensed, to controller 14.
And sends a second signal to the controller 14 representing the low liquid level, meaning that a low liquid level has been sensed.
Thus, the liquid level sensor 36 is a single liquid fluid level detector capable of detecting both high and low liquid levels, and is suitable for sending different signals to the controller 14 indicating high and low liquid fluid level conditions. Including means. Alternatively, liquid level sensor 36 includes a high liquid level sensor and a separate low liquid level sensor, each of which sends an appropriate signal to controller 14 representing a high or low liquid level.

The servo-controlled electronic pressure regulator 42 comprises:
Pressure is supplied on demand to act on the liquid present in the reservoir 12. Referring to FIG. 2, the pressure regulator 4
2 contains compressed nitrogen or air through conduit 44.
Typically, the compressed nitrogen is at a pressure of about 60 psi. Controller 14 manages the operation of pressure regulator 42 and causes pressure regulator 42 to supply pressure on demand in response to signals from controller 14.

A pressure sensor 46 is connected to the reservoir 12 to sense the pressure. A servo loop between the pressure sensor 46 and the pressure regulator 42 via the controller 14 provides an outlet valve 30a, 30b or 30 for the selected chemical.
Before c opens, it is employed to stabilize the pressure acting on the reservoir 12 against the outlet pressure programmed by the user.

The controllable three-way valve 48 is connected via conduits 50, 52 and 54 to a pressure regulator 42, a reservoir 12 and a vacuum venturi 56, respectively, which will be described later. The controller 14 manages switching of the three-way valve 48. Upon receipt of an appropriate signal from the controller 14, a pressure location for supplying pressure from the pressure regulator 42 to the reservoir 12 via conduits 50 and 52, and a low pressure on the conduit 54, as described below. A vacuum bench lily tube 56 or other conventional device to create a second
The three-way valve 48 is selectable between the two positions, ie, the vacuum position. The pressure position of the three-way valve 48 is useful in demanding depending on the pressure distribution mode, and as will be described later, the conduit 50,
52 and the pressure regulator 4 via the exhaust interlock 58
2 and the reservoir 12 are communicated. As shown in FIG. 2, an analog manometer 59 is included in conduit 50 to provide a visual indication of the pressure supplied to reservoir 12 to an operator.
The vacuum position of the three-way valve 48 is useful in the fill or evacuation mode, and connects the reservoir 12 to the vacuum venturi tube 56 via conduits 52, 54 and evacuation interlock 58.

The exhaust interlock 58 is connected by a conduit 52 between the three-way valve 48 and the reservoir 12. The exhaust interlock 58 evacuates the reservoir 12 via the vacuum venturi tube 56 when the three-way valve 48 is in the vacuum position, and equalizes the reservoir 12 with the atmospheric pressure after each distribution. The exhaust interlock 58 is connected to the chamber portion 6 connected between the portions of the conduit 52.
0, a chamber unit 60 for detecting the presence of liquid flowing out of the chamber unit 60 when the high liquid level sensor fails.
And a liquid overflow indicating means adjacent to the liquid. Therefore, the liquid overflow indicating means is provided with the exhaust interlock 5
8 to provide a means for detecting the presence of effluent liquid. Preferably, the liquid overflow indicating means is provided in the form of a capacitance sensor 62 mounted on the outer wall of the chamber 60 and operative to detect the approach of liquid. The capacitance sensor or overflow sensor 62 is connected to the controller 14 and the
When the signal is detected at around 8, an appropriate signal is sent to the controller 14. Alternatively, the liquid overflow indicating means is provided in another form such as a float switch for detecting liquid near the exhaust interlock 58. As shown in FIG. 3, the movable stopper 63 is moved so as to allow access to the closed chamber 60, and when a liquid overflow is detected,
And when the liquid dispensing device 10 is shut down for maintenance, any liquid there is swept out.

The selectable valve 64 includes a vacuum venturi 56
Control the operation of. Referring to FIG. 3, the selectable valve 64 includes a pilot valve manifold 66 and a plurality of individually selectable valve elements 6 connected to the manifold 66.
8a to 68j. Each valve element is individually selectable via a suitable signal from the controller 14 between a closed position and an open position for supplying compressed gas to the appropriate components. Generally, the vacuum venturi 56 includes a venturi member 70 having an exhaust conduit 72 and an inlet conduit 74 for receiving compressed nitrogen or other gaseous fluid compatible with the liquid chemical to be dispensed. The exhaust conduit 72 is preferably connected to a compatible house exhaust distribution device (not shown). Inlet conduit 74 is valve 64
The conduit 76 connects a source 78 of compressed nitrogen gas or air to the inlet side of the pilot valve manifold 66 and is selectively distributed by the valve elements 68a-68j. To Within the Venturi member 70, the flow of compressed gas through the restricted area of the Venturi member 70 passes through the conduit 5 according to Bernoulli's principle.
4. Create a decompressed area in 4. Typically, the reduced pressure can be 254 mm (10 inches) Hg.

The controller 14 is connected to the valve 64 and handles opening and closing of the valve 64. At the same time controller 14 switches valve 48 to the vacuum position, controller 14 communicates a signal to open valve element 68d. Valve element 68d
Is open, compressed nitrogen gas or air from source 78 flows through vacuum venturi 56 to create a vacuum or reduced pressure in conduit 54 and to conduits 52, 54, exhaust interlock 58 and vacuum position. The reservoir 12 is evacuated via a valve 48. A typical one-way check valve 80 in conduit 54 connected to valve 48 and vacuum venturi 56 serves to allow air to flow from reservoir 12 while reservoir 12 is located via valve 48 and exhaust interlock 58. To prevent compressed nitrogen gas or air from flowing in the opposite direction. At the end of the evacuation process, the controller 14 communicates a signal to the valve element 68d to close them.

When the controller 14 switches the valve 48 to the vacuum position to allow the compressed gas to flow through the vacuum venturi 56, the reduced pressure in the conduit 54 over the reservoir 12 causes the liquid level in the reservoir 12 to be low. It is also used to refill the reservoir 12 with liquid when it drops below level 40. Because the reduced pressure is used to replenish the reservoir 12 when the dispenser is not in the dispensing mode, the inlet valves 22a,
One of 2b, 22c or 22d is opened, such that the reduced pressure in reservoir 12 draws liquid into reservoir 12 from the liquid chemical source present at the open inlet through the inlet. .

Instead of the controller 14 operating a vacuum venturi so that the reduced pressure in the reservoir 12 draws liquid into the reservoir 12, the controller 14 causes pressure to be applied to the liquid chemical source and May be introduced into the reservoir 12. This means that the controller 14 communicates a signal to the valve 81 to open the valve 81 and the controller 14 communicates with the pressure regulator 42 to dash the other suitable gaseous fluid nitrogen gas or air at a given pressure. This can be accomplished by flowing through the conduit shown at 83 and acting on the liquid supply and introducing the liquid into the regulator 12 through an open inlet.

Alternatively, each liquid source can be repressurized. As a result, when the inlet is open and one of these re-pressurized liquid sources is being directed, the internal pressure of the liquid source will cause liquid to enter the reservoir 12 through the open inlet.

The filter 82 may be included depending on the liquid chemical used and on the processing requirements of the liquid chemical located on the dispensing device 10. Filter 82, if included, includes reservoir 12 and outlet valve 30a,
It is located between 30b and 30c. Alternatively, as shown in FIG. 2, the filter 82 may be located outside the reservoir 12, as described in the following paragraphs. Another filter 84 located in front of the reservoir 12 filters the pressure gas before the incoming pressure gas enters the reservoir 12.

Referring to FIG. 2, the filter 82
May be contained within a sealed filter container 86 outside of reservoir 12. A sealed container 86 is adjacent to the filter 82 and a flange 88 having an inlet and outlet suitable for connecting the conduit segments 28 and 90 of the flow path between the reservoir 12 and the outlets 26a, 26b and 26c. And a removable cylindrical portion 92 for mounting. Alternatively, the barrel 92 and the filter 82 may be coupled to a common thread on the cartridge filter. The storage 12 is the storage 1
It is connected to the input side of a sealed container 86 via a conduit 90 leading from the bottom of the container 2. A manual valve 94 in conduit 90 allows filter 82 to be replaced without draining reservoir 12.

Referring to FIGS. 1 and 3, when the filter 82 is located in the reservoir 12, the top of the filter 82 is located below the low liquid level at a given point and has a known amount of liquid chemical. Is the reservoir 12 on the filter 82
So that it stays within. Filter 82 is located at the low liquid level.
, Thus preventing gaseous fluid from entering the filter 82. Alternatively, as shown in FIG. 2, the inlet to filter 82 is connected in connection with the low liquid level of liquid in reservoir 12 by connecting the inlet side of conduit 90 to the bottom of reservoir 12. You may. Similarly, the low liquid level portion is on the input side of conduit 90, so that a known amount of liquid chemical remains in reservoir 12.

Since the filter 82 will saturate with contaminants over time, the flow through the filter 82 will be reduced in relation to the pressure on the chemical liquid present in the reservoir 12 and the pressure sensor 46 will 2 and 3, it is located downstream of the liquid flow passage between the filter 82 and the outlet valves 30a, 30b and 30c. As a result, when the filter 82 is included, the pressure sensor 46
Both the static pressure of the reservoir 12 and the dynamic fluid flow pressure downstream of the filter 82 are sensed. Accordingly, the pressure on the liquid in reservoir 12 can be adjusted upward to maintain pressure sensor 46 at the same pressure.

If the filter 82 is not included, the pressure sensor 46 will be connected to the reservoir 12 and outlet valves 30a, 30b and 30.
Read the dynamic flow pressure between c and c. As a result, when the filter 82 is not included, the pressure sensor 46 similarly outputs
The pressure on the liquid in reservoir 12 is adjusted so that pressure sensor 46 is maintained at the same pressure. Filter 82
, The dynamic pressure is detected by the pressure sensor 46 proximate to the outlets 26a, 26b and 26c. Thus, one or more outlets 26a, 26b and 26c may be opened at any time during dispensing so that liquid chemicals may be dispensed through one or more outlets to each part of the processing equipment that is requesting dispensing. Good. This is because the servo loop compensates for the additional outlet to be opened by increasing the pressure applied by the pressure regulator 42 and maintaining the pressure sensed by the pressure sensor 46 at the same pressure. It is.

A manual drain valve 96 connected proximate the bottom of the reservoir 12 allows the reservoir 12 to be manually drained. A general one-way check valve 98 in the drain 100 connecting the drain valve 96 to the reservoir 12 inhibits backflow into the reservoir 12 through the drain 100. The cap 102 on the drain 100, which can be removed for drainage,
00 is protected.

Preferably, the controller 14 is capable of operating up to four liquid chemical dispensers 10. However, it is within the scope of the invention if all dispensers are configured with fewer or more.

The controller 14 has the entrances 18a, 18
Includes both visual and audible means for any empty liquid chemical dispensing source present in either b, 18c or 18d. The controller 14 also communicates with a processing device connected via a wiring harness when the operation of the distribution device 10 needs to be stopped.

All operating modes are handled by the controller 14. The operation modes preferably include a calibration mode, a distribution mode, a normal mode, a degassing mode, a purification mode, a drainage mode, and a stop mode. Controller 14 may include any suitable means, such as a serial port for communicating with a main computer or other device.

The controller 14 is programmed by the user via the keyboard 16, and parameters for the operation mode are set. As a result, the user can: a) selectively enter the liquid chemical inlet 18a, 18b, 18c or 18;
d or any combination may be selected; b) the pressure sensed by the pressure sensor 46 may be set; and c) the pressure sensed by the pressure sensor 46 downstream of the filter 82 and the pressure in the reservoir 12. , A pressure deviation limit with respect to the pressure applied to the liquid present at the outlet or a pressure loss may be set, d) a time interval distribution amount for each outlet may be set, and e) open outlet valves 30a, 30b, The pressure of the servo loop for a constant liquid flow independent of the number of 30c and 30d may be defined, and f) a peak pressure limit for the compressed reservoir 12 may be set.

The dispensing device 10 controls the switching of liquid chemical sources from a plurality of inlets, numbered 4 in the figure, but which may be more or less, with a liquid level sensing function and It is integrated into one unit with the function of distributing liquid chemicals. The dispensing device 10 allows the size of the reservoir 12 to be varied, so that the dispensing device 10 is adaptable to a wide variety of liquid chemical dispensing applications. Depending on the liquid chemistry used and the processing requirements, the dispensing device 10 may operate with or without filtration in the liquid chemical reservoir 12.

The operation of all dispensers that can have a plurality of liquid dispensers 10 is as follows. Referring to FIG. 4, all distributors are powered up and all inlet and outlet valves are closed as shown in block 103, followed by an active main mode of operation as shown in the next block 104. That is, the initial mode is activated and each distribution device 10 is selected for output to the host processing device connected thereto. During the main mode, the controller 14 determines for each dispensing device 10 a block 10
Check if one of the various modes shown at 6-112 is selected, and check if the alarm that the reservoir 12 is critically empty is on, as shown below at block 114, as defined below. Also, as indicated by block 116, a check is made for the presence of a liquid chemical overflow adjacent to the sensor 62.

If an overflow of the liquid chemical is detected in proximity to the sensor 62, all inlet and outlet valves of the overflowed dispensing device 10 are closed and a visual or audible overflow alarm is issued. And signals sent by the controller 14 to block 117A-1
As shown at 17B, the connected host processing device is prevented from connecting to the overflowed distribution device 10. If one or more distributors 10 are handled by the controller 14, pointers, each of which is a register containing each data of one distributor 10, are stored in a block 117C.
Incremented to select another dispensing device 10 as indicated by, the controller 14 continues to resume the active main mode as indicated by block 104 and the other distributing device 10 continues operating (active). In contrast, a maintenance operation can be performed on the overflowing distribution device 10. As can be appreciated, further, the dispense and refill cycles are stopped until the overfill is removed by the overfilled reservoir.

After checking the mode of operation of each dispensing device 10 and checking for overflow of the liquid chemical in proximity to the sensor 62 of each dispensing device 10, the controller 14 determines whether each portion of the processing device is connected to the outlet of the dispensing device. To enable each portion of the processing unit as indicated by block 118. Thereafter, the controller 14 proceeds to block 120
As indicated by .about.124, the trigger input changes are intermittently checked from each part of the processing device connected to each distribution device 10.

When a trigger change is detected from one of the dispensers 10, the controller 14 proceeds to blocks 126-1.
The trigger routine module (see FIG. 10) is called as shown at 30 and block 132 is entered. After checking for a trigger change, the controller 14 tests for a change in the low liquid level signal from the sensor 36 of each dispensing device 10, as indicated by block 134. As can be appreciated, the low liquid level signal controls the filling of each reservoir. If the low liquid level signal changes, the controller 14 will execute a low detection routine, the refill cycle module (FIG. 1).
1) and passes the appropriate distributor register. After testing the low liquid level signal, the controller 14
As indicated by block 136, the sensor 3 of each distribution device 10
Test for changes in high liquid level signal from 6.
If the high liquid level signal changes, the controller 14 calls the high detection routine module (see FIG. 12) and passes the appropriate dispenser register.

After a test for changes in the low and high liquid level sensors of each dispensing device 10 has been performed,
The controller 14 checks to see if the distribution point of any of the distribution devices 10 is active, as indicated by block 138. If none of the dispensing points of any dispensing device 10 are active, the controller 14 determines whether a refill cycle for that dispensing device 10 has been interrupted by a trigger signal, as indicated by block 140. Perform an inspection. If the refill cycle has been interrupted, the refill timer associated with the interrupted dispensing device 10 is restored and the refill cycle is resumed, as indicated by block 142.

If the distribution point of the distribution device 10 is active, the controller 14 operates the pressure regulator 4 of the distribution device.
2 reads the pressure applied to the reservoir 12 and the pressure present at the pressure sensor 46 of the dispensing device and calculates their difference, as indicated by block 144. A preferred method of measuring the pressure applied by the pressure regulator 42 is for the controller 14 to read the servo loop voltage or current across the coil of the pressure regulator 42.
A preferred method of measuring the pressure present at the sensor 46 is to read by the controller 14 the voltage across the pressure sensor 46 or the current through the pressure sensor 46. The controller 14 takes in the value representing the pressure applied by the pressure regulator 42 and the value of the pressure present at the sensor 46 and calculates the difference between them. The difference between them is block 1
As shown at 46, it is compared to a preset limit for that dispensing device 10 defined by the operator. If the difference is greater than the operator defined limit, then by visual or audible means, the controller 14 indicates that the preset limit for the dispensing device has been exceeded, as shown at block 148; This indicates that it is time to replace the filter 82 of the distributor. The preset limit for each dispenser depends on the viscosity of the particular liquid chemical being dispensed by the dispenser,
Also, the size of the filter, ie, 0.2 μm or 0.5 μm
It is variable depending on m. Next, the difference value is
As shown at 50, it is compared to the last stored peak difference for that distributor. If the difference is greater than the last stored peak difference, the new peak difference is stored instead of the old value, as shown at block 152.

The controller 14 is connected to one of the distribution devices 1
After checking whether the distribution point for 0 is working, if
If a refill cycle is interrupted for each active dispensing device, the controller 14 checks to see if the empty count for each dispensing device 10 has exceeded the limit, as indicated by block 154. The height of the liquid, if any, present between the filter 82 (or the outlet to the reservoir 12) and the low liquid level 40 of each distribution device 10, along with the size of each reservoir 12, will be low. The liquid storage volume present between 40 and the filter 40 or reservoir outlet can be determined for each dispensing device 10. Thus, this storage volume for each dispensing device 10 is:
It allows a predetermined number of dispenses before the reservoir 12 of the dispensing device is critically empty. This predetermined number of distributions for each distributor 10 represents the maximum value of the empty count for that distributor.

If the empty count for any of the distributors 10 exceeds the limit for that distributor, the controller 14 proceeds to block 156-16 of FIG.
Enter the critical empty submode 247 illustrated by FIG. If the critical empty submode is entered, no further dispensing is allowed until the reservoir 12 is refilled. After entering the empty mode, the controller 14 indicates by audible or visual alarm means that the reservoir 12 of the dispensing device is critically empty, block 1
As shown at 56, disabling the host processor of the distribution device. The keyboard mode is interrupted and set, as indicated by block 160 in FIG. 14 and block 156 corresponding to FIG. Next, the controller 14
Performs a check to see if the alert means for the empty dispensing device has been acknowledged, as indicated by block 160. If the alarm has been acknowledged, the controller 14 begins refilling the empty dispensing device reservoir 12 by calling the low detect or refill cycle routine shown in FIG. And passes an empty distributor register. Next, the controller 14
Blocks 1 by calling the high detection routine.
As shown at 64, a check is made to see if the reservoir 12 of the dispensing device 10 is full. If the storage device 1 of the distribution device 10
If 2 is full, then as shown at block 166, each portion of the connected host processor of the distributor is re-enabled.

After checking whether the empty count number of any of the distribution apparatuses 10 has exceeded the limit, the controller 14
Checks whether any liquid supply present at the inlet 18a, 18b, 18c or 18d of any dispensing device 10 is empty, as indicated by block 168. If all liquid sources present at one dispensing device inlet 18a, 18b, 18c or 18d are empty, a liquid source alarm, which may be visual or audible,
As shown at 70, an empty liquid chemical source is provided to identify and allow the operator to refill all or one empty liquid source.

Thereafter, the controller 14 increments the pointer register with the information indicating the next distribution device 10, and the controller 14 resumes the continuation of the main mode of operation from the initial start point, as indicated by block 104. As a result, each dispensing device 10 will have a mode of operation, overflow of liquid chemical in proximity to its sensor 62, trigger input, liquid level, active (active) distribution point, interrupted refill cycle, empty count, and empty. Input sources are subsequently checked.

If the dispense mode is selected by a trigger "on" signal from the portion of the processor which requires the dispensing of the liquid chemical, the trigger "on" signal is communicated to the controller 14 and the decision block 120 of FIG. , 122 and 12
As shown at 4, it is associated with a particular part of the processing device. The "on" signal is converted by an appropriate interface to a usable signal indicating an "on" state and the controller 14
It can occur in electronic or gaseous form communicated with. afterwards,
The controller 14 includes blocks 126 and 12 in FIG.
Invoke the trigger routine as shown at 8 and 130;
Entering block 132, a specific outlet 26a of the dispensing device connected to the dispensing device and the processing device calling for dispensing,
The parameter for the subroutine for confirming 26b or 26c is passed.

As the "on" signal is passed to the trigger routine, trigger decision block 174 selects the "on" branch of that routine. After entering the "on" branch, the controller 14 tests whether a refill cycle for the reservoir of the dispenser leading to the particular outlet is in progress, as indicated by block 176. If a refill cycle is in progress, the refill timer information is stored in a register associated with the dispenser's reservoir and the refill cycle is interrupted, as indicated by blocks 178 and 180. Once the refill cycle is restarted at the end of the distribution mode, the refill time is restarted from that end point. The dispense mode will invalidate all refill cycles except when the reservoir is critically empty.

After checking for the presence of a refill cycle, the three-way valve 48 associated with the identified dispensing device is moved to its pressure position in response to a signal from the controller 14. Valve 48
The pressure regulator 42 associated with the identified dispensing device, along with the movement of the dispensing device to the pressure position, causes the identified dispensing device conduits 50, 52 and Start applying pressure to the selected regulator 12 via the exhaust interlock 58.

The controller 14 determines the pressure present at the pressure sensor 46 by reading the voltage across the pressure sensor 46 or the current passing through the pressure sensor 46.
If the servo loop between the pressure sensor 46 and the pressure regulator 42 stabilizes to a pressure within a user-selected predetermined tolerance for the pressure sensor 46, as shown at block 184, the controller 14 proceeds to block 184. As shown, acknowledge the trigger "on" signal event. After recognizing the trigger-on signal, the controller 14 programs a timer that controls a particular outlet valve that directs the request signal to the processing device that communicates the request signal at predetermined time intervals selected by the operator for a particular portion of the processing device, block 188. As shown by, the end of distribution can be interrupted for the subsequent operation by the timer at the end of the predetermined time interval. Thereafter, the controller 14 enables the selected dispensing outlet by communicating an open signal to a particular outlet valve associated with the selected outlet, as indicated by block 190.

However, if the trigger routine is "off"
Once the signal is passed, decision block 174 selects the "off" branch of the routine. After entering the "off" branch, the controller 14 switches off the end distribution signal for the selected exit, as shown at block 191, and suspends the selected distribution, as shown at block 193, and Blocks 196 to 20 described in
The operation indicated by 6 is executed, and the process returns to call the program.

An orifice (not shown) in the selected outlet determines the flow rate corresponding to the pressure maintained at pressure sensor 46. The flow rate, along with the time interval selected by the operator and programmed into the timer by the controller 14, causes a predetermined specified amount of liquid chemical to be dispensed to the portion of the connected processing equipment. At the end of the predetermined time interval programmed into the timer, the timer automatically sends a signal to the opened outlet valve to close it and activates the end-of-distribution interrupt sub-module to indicate the distribution indicated by block 192. Jump to end interrupt. As can be understood,
The programmed time for dispensing will be the selected outlet valve 30a, 30b or 3 after the servo loop has stabilized.
It does not start until 0c is released.

When the end-of-distribution interrupt is triggered, as shown at block 192, an end-of-distribution signal is provided to the closed and opened exit as shown at block 194. After the distribution end signal is given, the controller 1
4 interrupts the selected distribution point, as indicated by block 193, and checks whether any other distribution points of the selected reservoir are still active, as indicated by block 196. . If all other distribution points are not active, the pressure applied to the reservoir via the selected pressure regulator 42 is turned off, as indicated by block 198.

After the pressure is turned off, the three-way valve 48 associated with the selected reservoir is moved to the second vacuum position and vented (out), as indicated by decision block 200.
A check is made whether the -gas) mode has been selected. If the vent mode is selected, the venturi associated with the selected reservoir communicates a signal that causes the flow of pressurized gas to flow through the venturi for only three seconds, as indicated by block 202. Controller 14
To create a vacuum or low pressure on the vacuum exhaust gas from the selected reservoir. The degas mode evacuates any air or nitrogen present in the reservoir 12 and allows the distributor to be in its own environment. However, signals for other distribution cycles override this mode.

If the degassing mode is not selected, the normal mode (not shown) is selected. In normal mode, the selected reservoir is selected (but
It is automatically vented to atmospheric pressure via a vacuum venturi (not in operation) and a three-way valve in a second position. Requests for other dispense cycles also override this mode.

After checking whether any distribution points of the selected reservoir are operational, the low liquid level signal change is tested, as indicated by block 204. If the low liquid level signal indicates that the liquid level is lower than the low liquid level, the empty count is incremented, as indicated by block 206. After the low liquid level signal test is complete, the end of distribution interrupt is disabled and the subroutine returns to the address in the program where the interrupt occurred.

The electronic pressure regulator 42 will adjust the programmed pressure sensor 46 to remain constant in response to the output load. Chemical filter 82 will be loaded over time. Therefore, the pressure regulator 42
Adjusts the pressure applied to the reservoir 12 upward and maintains the pressure detected by the pressure sensor 30 at a programmed value.

When storage of the dispensing device is needed, FIG.
Is selected and the purification mode as indicated by block 208 is invoked, passing a parameter indicating which dispensing device is to be purified. Referring to FIG. 6, the purification mode is shown in detail. First, the host processor connected to the dispensing device to be cleaned is
As indicated by 10, use is prohibited through a signal from the controller 14. After disabling the host processor, the controller 14 tests the signal from the overflow sensor 62 for the presence of liquid adjacent the interlock 58, as indicated by block 212. Liquid interlock 58
Block 214 if the signal indicates that
Close all inlet and outlet valves of the dispensing device to be cleaned, as shown at, and provide an overflow alert that is audible or audible and indicates the dispensing device where the overflow was detected.

If no liquid overflow is detected near the interlock 58, the controller 14 tests the low liquid level signal from the sensor 36 of the dispensing device to be cleaned, as indicated by block 216, for modification. When the signal changes, as indicated by block 218, controller 14 calls the low detect routine shown in FIG. 11 and passes through the appropriate dispenser registers. After testing the low liquid level signal, as shown in block 220, the controller 14 tests the high liquid level signal from the sensor 36 of the dispenser to be cleaned for modification. When the signal changes, as indicated by block 222, the controller 14 calls the high detect routine shown in FIG. 12 and passes through the appropriate dispenser registers.

After testing with the low and high liquid level sensors of the dispenser to be cleaned, the controller 14 checks to see if the reservoir of the dispenser to be cleaned is about to be refilled, as indicated by block 224. If the reservoir of the dispensing device to be cleaned is not refilling, the controller 14 turns off all of its inlet valves 22a, 22b, 22c, as shown in block 226. After turning off the inlet valve, the controller 14 sends a signal to the three-way valve 48 to cause the valve to move to a pressure position where the pressure regulator 42 communicates with the reservoir 12 and to the reservoir from which the pressure from the pressure regulator 42 is to be purified. The preselected outlet valve of the dispenser to be activated and purged, as indicated by block 228, opens and purges the reservoir. Activate the pressure regulator 42,
After opening the selected outlet valve, as shown at block 230, the pointer registers, each containing one of the dispenser devices, are incremented to select the next dispenser device and, as shown at block 232, the purification routine is executed. Returning to the main mode, the cleaning mode remains active until the operator completes the cleaning cycle via the keyboard.

When it is desired to drain the dispenser, the drain mode is selected, as shown in FIG. 4, and the drain mode is invoked, as indicated by block 234, to determine which dispenser should be drained. Is passed. FIG. 5 shows the drainage mode in detail. First, as indicated by block 236, use is prohibited through a signal from controller 14 at a host processor connected to the dispenser to be drained. After prohibiting the use of the host processor,
As indicated by block 238, the controller 14 sends a signal to turn off all of the inlet valves 22a, 22b and 22c of the distributor to be drained. After all inlet valves have been turned off, as indicated by block 240, the controller 1
4 applies pressure to the reservoir to be drained, opens the selected outlet valve and drains the reservoir, as described in the purification mode. After applying pressure to the reservoir to be drained and opening the selected valve, the pointer registers, each containing data representing one of the dispensers, are incremented to select the next dispenser, as shown at block 242. Then, as shown at block 244, the drain mode returns to the main mode, which remains active until the operator completes the drain cycle through the keyboard. This has the advantage of drying the line to the outlet.

For the purify and drain modes, the controller 14 causes the operator to select the "0" outlet valve. This selection circulates the dispensing device to be purged or drained, in use in connection with the manual drain valve 96 of the dispensing device to be drained or purged, at which point the liquid chemical is drained, supplied or sampled.

As indicated by block 114 in FIG. 4, when a critical empty warning of the reservoir appears, or in block 1 of FIG.
If the empty count exceeds the limit, as shown at 54, the controller 14 via the "to jump" or "empty count" decision block 154, as shown at block 245, returns to block 156-164 as described above. Enter the critical empty submode 247 as shown in block 1 above.
The input source is checked for emptyness as shown at 68, the pointer register is incremented as shown at block 172 above, another dispenser is selected, and the main mode continues. The empty liquid chemical reservoir 12 can be filled with a pressure supply, a weight supply, or any type of static pressure type input. Preferably, it is filled in a vacuum venturi 56 arrangement.

In FIG. 11, blocks 162, 218
Or when the low sense or reservoir refill module is called via 246, controller 114 first proceeds to block 247
Check to see if a distribution is in progress, as indicated by. If a dispense is in progress, the routine returns to the calling program. If a dispense is not in progress, controller 14 checks for a low liquid level signal as indicated by block 248. If there is no low liquid level signal, the empty count of the dispenser is reset to a predetermined value as indicated by block 250 and the subroutine returns to the calling routine. If the low liquid level sensor indicates a low liquid level, the controller 14 programs one of the timers controlling one of the inlet valves leading to the empty reservoir to a refill predetermined time interval, as indicated by block 252. After programming the timer, a refill interrupt is enabled and a signal is sent by the controller 14 to the three-way valve 48 leading to the empty reservoir, which passes it to the empty reservoir and valve 64 and the vacuum venturi 5.
6 in a vacuum position communicating with it and flowing compressed gas through the vacuum venturi 56 as described above, evacuating the conduit 54 and thus the reservoir 12 to vacuum or low pressure, and selecting selected inlet valves 22a, 22b and 22c controlled by a timer. To block 2
As indicated by 54, it is opened by a signal from the timer, and the liquid flows into the empty reservoir due to the reduced pressure in the reservoir 12. After enabling the refill interrupt, activating the vacuum venturi and opening the selected inlet valve, the low liquid level signal is acknowledged as shown at block 256 and the subroutine returns to the calling program.

Also, although not shown in the algorithm, instead of placing the three-way valve of the distributor required for refilling in its vacuum position, the controller 14 sends a signal to the servo valve 81 which communicates it with the pressure regulator 42. Opened along with the controller 14, the predetermined pressure of the gaseous liquid is programmed by the operator and flows through the conduit 83, acts on the selected liquid supply, and flows the liquid through the valve to the reservoir to be filled.

When one liquid level sensor 36 of the dispenser sends a signal indicating high liquid level to the reservoir 12, FIG.
The high sensing module is called as shown at blocks 164 and 258 of FIG. FIG. 12 shows a high detection subroutine module. Block 2 when the module enters
As shown at 60, controller 14 first checks for a high liquid level signal. If there is no high liquid level signal, then the subroutine returns to the calling routine.
If there is a high liquid level signal, controller 14 sends the signal to valve 64, which deactivates full reservoir vacuum venturi 56, and sends the signal to the selected inlet valve to close it, block 262. The prohibition of the replenishment interrupt is prohibited as shown in (1). After turning off the Venturi, closing the inlet valve and disabling the refill interrupt, block 264
As shown by, the refill timer is reset at a predetermined time interval. After resetting the refill timer, a check is made to see if the reservoir empty alert for the full reservoir has been turned on, as indicated by decision block 266. If the reservoir empty alarm is on, the alarm is reset to a non-empty state, as indicated by block 268. After checking for a reservoir empty alarm condition, the controller 14 checks whether the selected reservoir is flagging memory as empty, as indicated by block 270. If the reservoir was flagged as empty, the flag is reset, indicating that the selected reservoir is now full, as shown in block 272. After checking if the reservoir is flagged as empty, the empty count of the replenishment reservoir is reset to the program value, as indicated by block 274, and the subroutine returns to the calling program.

When the reservoir being filled is not filled within a predetermined time interval, the liquid chemical source at the selected inlet is considered empty by the controller 14 and the refill interrupt module shown in FIG. 13 is called. In FIG. 13, when the replenishment interrupt module is called, the number of available liquid chemical sources connected to the inlet leading to the reservoir is determined. As indicated by block 276, one of the liquid sources is now empty. After decrementing the number of available liquid chemical sources, block 2
A check is made as to whether the number of remaining liquid chemical sources is equal to zero, as shown at 78, indicating that all liquid sources of the dispensing device are empty. If the number of remaining liquid chemical sources is equal to zero, the vacuum venturi 56 that has been activated to fill the reservoir is deactivated and the selected inlet valve is activated by a signal from the controller 14, as indicated by block 280. Closed through. After the venturi is turned off and the selected inlet valve is turned off, as shown at block 282,
The refill timer is turned off. After turning off the refill timer, the main program passes a parameter indicating that all of the chemical liquid supplies to the reservoir are empty, as indicated by block 284. After passing the parameters to the main program, the refill interrupt is disabled, as indicated by block 286, and the subroutine returns to the address of the calling program where the interrupt occurred.

If the number of liquid chemical sources is not equal to zero, the selected inlet valve is closed, as indicated by block 288, and the other inlet valves to the reservoir to be filled are sent from the controller 14. The reservoir is opened through another signal and the reservoir continues to fill from another liquid source. Preferably, this switching occurs between four points of entry. After closing the empty inlet and opening the other inlet valves, the refill timer controlling the open inlet valve is set to a predetermined time interval to fill the reservoir and the subroutine is interrupted, as shown at block 290. Returns to the address of the calling program in which

When calibration of the dispenser is required, FIG.
The calibration mode is selected, as shown at, and the calibration routine is invoked, as shown at block 292, where the step counter begins to step through zero, passing a parameter indicating which dispensing device to calibrate. In FIG. 8, the calibration mode is shown in detail. First, as indicated by block 294, controller 14 checks whether the step counter of the dispensing device to be calibrated indicates a step zero. When the step counter indicates step zero, as shown at block 296, the controller 14 activates all inlet and outlet valves of the dispenser to be calibrated with a signal to disable the host processor connected to the dispenser to be calibrated. Send signals to return to their closed position. After disabling the host processor and closing all valves, a signal is sent to the three-way valve 48 of the distributor, as shown at block 298, moving the valve to its pressure position and reducing the reservoir pressure to 3 psi. By setting
The controller 14 controls the pressure regulator 4 of the dispensing device to be calibrated.
2 communicates with the reservoir. After setting the pressure and turning on the pressure, the controller 14 displays information for the operator, as indicated by block 300. After displaying the information to the operator, the controller 14 increments the pointer register containing the information for each distributing device with respect to the next distributing device, increments the step counter by one step, and returns to the calling program.

If the step counter indicates step 1 as indicated by decision block 304, the pressure regulator 42 connected to the dispensing device to be calibrated is set to a pressure of 15 psi as indicated by block 306. The information is displayed to the operator as indicated by block 308. As indicated by block 302, the pointer register is incremented for the next dispenser, the step counter is incremented by one step, and the subroutine returns to the main call routine.

As indicated by decision block 310, if the step counter indicates step 2, controller 1
4 communicates with the pressure regulator 42 of the dispensing device to be calibrated,
The pressure is set to 10 psi, as indicated by block 312. After setting the pressure to 10 psi, the controller 14 displays information indicating that the pressure is set to 10 psi, as indicated by block 314. After displaying the information to the operator, the step counter is incremented to step 3, as shown at block 316, the pointer register is incremented for the next dispenser, as shown at block 302, and the subroutine returns to the main program.

If the step counter indicates step 3, as indicated by decision block 318, decision block 32
"1" or "0" through the keyboard as indicated by 0
A check is made to see if a has been entered. If no input is made, the pointer register is incremented for the next distributor, as indicated by block 302, and the subroutine returns to the calling program. When a "0" is input, the controller 14 sends a signal to the pressure regulator 42 to reduce the pressure by 0.15 psi, as indicated by block 322. After reducing the pressure, the pointer register is incremented for the next dispenser, as indicated by block 302, and the subroutine returns to the calling program. When a "1" is entered through the keyboard, the controller 14 sends a signal to the pressure regulator 42 to increase the applied pressure by 0.15 psi, as indicated by block 324. After the pressure is increased, as shown in block 302, the pointer register is incremented for the next dispenser and the subroutine returns to the calling program. Whenever the dispenser indicates 10 psi to the operator, the operator selects the appropriate input through the keyboard, which communicates with the controller 14 to cause the step counter to increment to step 4.

As indicated by decision block 326, if the step counter indicates step 4, block 328
As shown by, the controller 14 reads the current applied to the coil of the pressure regulator 42, determines the value of the pressure applied to the reservoir, and converts the read pressure value to the preset table value input by the operator. Calculate the difference between After finding the difference, as indicated by block 330,
The read value is stored in the memory as an offset with respect to the preset table value. After storing the read value, the step counter is incremented to step 5, as indicated by block 332.

If the step counter indicates step 5, as indicated by decision block 334, block 336
The controller 14 communicates with the pressure regulator 42, as shown at, and sets the pressure to be applied to the reservoir to 3 psi, as shown at block 336. After setting the pressure, the refill timer for the reservoir is set to 3 seconds, as indicated by block 338. After setting the timer, as indicated by block 340,
The calibration interrupt is enabled. After the interrupt is enabled, pressure information and timer information are displayed for operator inspection by a terminal or other suitable means, as indicated by block 342. After displaying the information to the operator, the step counter is incremented to step 6, as indicated by block 344. After incrementing the step counter, the pointer register is incremented to select the next dispenser, as indicated by block 346, and the subroutine returns to the calling program.

If the step counter indicates step 6, as indicated by block 348, the pointer register is incremented for the next dispenser, as indicated by block 346, and the subroutine returns to the main program. If the step counter indicates a step value greater than 6, as shown at block 348, a fatal error has occurred and a soft boot power-on is performed, as shown at block 350, and as shown at block 352 of FIG. Let the program jump to the power-on cycle,
The general dispenser is restarted.

Upon expiration of the timer set in block 338 or 368, the calibration interrupt routine module is entered. FIG. 9 shows a calibration interrupt subroutine. When the routine is called, the controller 14 reads the pressure value at the pressure sensor 46 and stores the read pressure value in a sensor table in memory, as indicated by block 354. After reading the pressure, as shown at block 356, the controller 14 communicates with the pressure regulator 42 and causes the pressure regulator 42 to increase the pressure applied to the reservoir by one psi. After increasing the pressure, the controller 14 reads the pressure of the pressure sensor 46, as indicated by block 358, and checks whether the pressure value is greater than 15 psi. If the pressure value is greater than 15 psi, the refill timer is turned off, as shown at block 360, the calibration interrupt is disabled, as shown at block 362, the calibration dispenser is placed in its run mode, and its run mode is turned off. The status is indicated on the display of controller 14 as indicated by block 364. After placing the calibration dispenser in its run mode, the controller 14 communicates with its pressure regulator 42 to turn off the pressure to be applied to the reservoir, as indicated by block 366, and the interrupt module has caused an interrupt. Returns to the address of the calling program.

The pressure value detected by the pressure sensor 46 is 1
If not greater than 5 psi, the timer will block 368
Reprogramming for an additional second, as indicated by, the calibration interrupt routine returns to the address of the calling program when a calibration interrupt occurs.

When one dispenser is to be disabled, the abandon mode is selected as shown in FIG.
As indicated by, the abandon routine mode is invoked, passing a parameter indicating which dispenser should be disabled.
FIG. 7 shows the abandonment mode in detail. First, the controller 14 sends a signal to the host processor of the distributing device to be disabled, disabling the connected host processor, as indicated by block 370. After disabling the host processor, the controller 14 sends a close signal to all inlet and outlet valves of the dispenser to be disabled, block 3
As shown at 72, all inlet and outlet valves are closed. After closing all inlet and outlet valves, the pointer register containing the data representing one dispenser, respectively, is incremented for the next dispenser, as shown at block 374, and the abandon subroutine returns to the main program.

FIGS. 14 to 34 show the keyboard interrupt routine operating in conjunction with the individual subroutines. Selecting one of the operating modes in which one of the keys on the keyboard is pressed by the operator inputs parameters to control the operation of the dispensing device or other reasons, and invokes a keyboard interrupt to read the pressed key; The value is passed through the controller 14 and used to control the operation of the distributor. Depending on the term in which the algorithm is coded, the input algorithm of FIGS.

The above disclosure and description of the invention is illustrative, and various changes may be made in the method and details of the illustrated apparatus without departing from the spirit of the invention.

[Brief description of the drawings]

FIG. 1 is a system diagram showing a preferred embodiment of a liquid distribution device of the present invention.

FIG. 2 is a second system diagram showing another preferred filter device for filtering a liquid flow and showing the liquid distribution device of the present invention.

FIG. 3 is a third system diagram showing the liquid distribution device of the present invention.

FIG. 4 is a flow chart showing a continuous main operation of the liquid distribution apparatus of the present invention, that is, a main operation mode, and a sub-operation mode of a reservoir empty critical included in the main operation mode.

FIG. 5 is a flowchart illustrating a discharge mode according to the present invention.

FIG. 6 is a flowchart showing a purification mode of the present invention.

FIG. 7 is a flowchart showing a sleep mode according to the present invention.

FIG. 8 is a flowchart illustrating a calibration mode according to the present invention.

FIG. 9 is a flow chart diagram illustrating a calibration interrupt module that is enabled during a calibration mode of the present invention.

FIG. 10 is a flow chart diagram showing a trigger module for dispensing liquid on demand and a dispensing end interrupt sub-module operated at the end of the dispensing time interval according to the present invention.

FIG. 11 is a flowchart illustrating a low-level detection module according to the present invention.

FIG. 12 is a flowchart showing a high-level detection module of the present invention.

FIG. 13 is a flow chart illustrating a replenishment module that is enabled to be interrupted in the low level detection module of the present invention.

FIG. 14 is a flowchart showing a keyboard interrupt routine of a continuous operation of the present invention.

FIG. 15 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 16 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 17 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 18 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 19 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 20 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 21 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 22 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 23 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 24 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 25 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 26 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 27 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 28 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 29 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 30 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 31 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 32 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 33 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

FIG. 34 is a flowchart showing a subroutine of a keyboard interrupt routine of the present invention.

[Explanation of symbols]

 10 Liquid distributor 12 Reservoir 14 Controller 16 Keyboard 18a-18d Inlet 22a-22d Inlet valve 26a-26c Outlet 30a-30c Outlet valve 36 Liquid level sensor 42 Pressure regulator 46 Pressure sensor 48, 64 Three-way valve 56 Vacuum venturi 58 Exhaust Interlock 60 Chamber 62 Overflow sensor 66 Manifold 68 Valve member 70 Venturi member 78 Supply source 80, 98 One-way check valve 82 Filter

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-272938 (JP, A) JP-A-61-30597 (JP, A) JP-A-61-125429 (JP, A) JP-A-53-1982 52454 (JP, A) JP-A-62-64792 (JP, A) JP-A-59-165395 (JP, U) JP-A-63-54465 (JP, U) Special table 60-501521 (JP, A) (58) Field surveyed (Int. Cl. ⁷ , DB name) G01F 13/00 311 B67D 5/02

Claims (87)

(57) [Claims] A storage means containing an amount of liquid; a control processor means adapted to receive a request signal indicating that at least a portion of the liquid is needed; and the processor. Fluid pressure means controlled by means and connected to said reservoir means for applying pressure to said reservoir means to act against said liquid when required; and said fluid pressure means connected to said reservoir means At least one outlet for passing a portion of the liquid when applying a pressure acting against the liquid, the processor means transmitting a signal to the fluid pressure means in response to the request signal; A liquid dispensing device for applying a pressure acting against the liquid to the fluid pressure means.
And the fluid pressure means responds to a signal for applying the pressure.
The second signal from the processor means.
Is inoperative by No., and small to said reservoir means
At least one inlet, each of which is connected to a liquid source
Connected to supply said volume of liquid to said reservoir means.
For selecting a particular liquid source, included with each said inlet and each inlet
Open and close each entrance separately so that each entrance can be selected individually
An inlet valve means for, included with each outlet, so that each outlet can be selected individually
Outlet valve means for opening and closing each outlet separately, and said outlet means connected to said reservoir means near said outlet.
Detecting the pressure of a nearby liquid and providing said processor means
Pressure signal indicating the pressure of the liquid near the outlet
Pressure sensing means for transmitting a signal to said processor means
Further comprising the door, the inlet valve means, control separately by said processor means
Controlled and responsive to an open signal from the processor means
To the open position and a closing signal from the processor means.
The processor means can be moved to a closed position in response to the fluid pressure means being disabled.
To fill said reservoir means with said amount of liquid.
Sending an open signal to the selected inlet valve means,
Comparing a value representing the signal with a preselected value of the pressure;
When the value of both that will be the comparative exceeds a predetermined allowable value
A signal to said fluid pressure means at a preselected pressure
The pressure near the outlet is varied to coincide with the outlet valve means , and each outlet valve means is separately controlled by the processor means.
Controlled by an open signal from the processor means.
Into the open position to pass the liquid through the selected outlet
The flow path through the selected outlet by the closing signal of 2
A liquid dispensing device that can move to a closed position . 2. Reservoir means containing an amount of liquid.
And a request indicating that at least a portion of the liquid is required
Control processor means adapted to receive a signal
And the reservoir hand controlled by the processor means.
Connected to a stage and applying pressure to said reservoir means when required
A fluid pressure means for acting against the liquid, connected to the reservoir means, wherein the fluid pressure means comprises
When you apply pressure that acts against your body,
At least one outlet through which the processor signal is transmitted in response to the request signal.
Sending a signal to the body pressure means, the fluid pressure means
With a liquid dispensing device that applies pressure acting against the body
And the fluid pressure means responds to a signal for applying the pressure.
The second signal from the processor means.
Is inoperative by No., and small to said reservoir means
At least one inlet, each of which is connected to a liquid source
Connected to supply said volume of liquid to said reservoir means.
For selecting a particular liquid source, included with each said inlet and each inlet
Open and close each entrance separately so that each entrance can be selected individually
Inlet valve means for adjusting the liquid level in the reservoir means adjacent to the reservoir means.
Liquid level sensor means for detecting
For example, each inlet valve means, control separately by said processor means
Controlled and responsive to an open signal from the processor means
To the open position and a closing signal from the processor means.
The processor means can be moved to a closed position in response to the fluid pressure means being disabled.
To fill said reservoir means with said amount of liquid.
Sending an open signal to the selected inlet valve means,
Bell sensor means detects a low liquid level in the reservoir means.
Detecting the first liquid from the liquid level sensor means;
Receiving a body level signal;
The release signal is selected in response to a liquid level signal.
Transmitting the selected inlet valve means to its open state.
Position and the fluid pressure means is inactive
Communicating said selected liquid supply to said reservoir means.
Liquid dispensing apparatus for. 3. The fluid pressure means further comprises a liquid supply source
Close to the source, acting on the selected liquid source when required
And the processor means comprises:
The first liquid level signal when the fluid pressure means is inactive;
Sending a fill signal to said fluid pressure means in response to the
Thereby reducing the pressure acting on the selected liquid supply.
Said fluid pressure means is selectively supplied and said selected
The reservoir from the liquid source through the selected inlet
3. The liquid distribution device according to claim 2, wherein said liquid is caused to flow through a means. 4. The apparatus controlled by said processor means and
Vacuum means connected to said reservoir means.
The processor means is such that the fluid pressure means is inactive.
Sometimes a filling signal is generated in response to the first liquid level signal.
Transmitting to the vacuum means, whereby the vacuum means
Applying a suction force to the reservoir means to provide the selected liquid
Withdraw liquid from a source through the selected inlet
3. The liquid dispensing device of claim 2, wherein said liquid is sent to said reservoir means . 5. The liquid processor according to claim 5 , further comprising:
Bell sensor means detects a high liquid level in the reservoir means.
When detecting the second liquid from the liquid level sensor means
It receives body level signals,
The second liquid level signal in response to the second liquid level signal.
To the selected inlet valve means,
Further communication between the selected liquid supply and said reservoir means.
Moving the selected inlet valve means to the closed position;
The liquid dispensing device of claim 2 . 6. A front end between said reservoir means and said vacuum means.
Above the high liquid level, the processor
A drain including liquid overflow detection means connected to the
Gas interlock means, wherein the liquid overflow
The detecting means detects the liquid near the exhaust interlock means.
Overflow signal to the processor means upon detection
6. The liquid distribution device according to claim 5, wherein 7. A fill between said reservoir means and said outlet.
Filter means, alarm means controlled by the processor means, and detecting a pressure drop across the filter means,
The fluid pressure means is activated in response to the request signal;
Liquid is dispensed from the reservoir means through the outlet
The pressure drop across the filter means when
Means for generating at least one filter signal.
Further comprising: the processor means for receiving the filter signal.
Is converted into a useful value representing the pressure drop, the useful value
Is compared with the specified value, and an alarm is activated when the former exceeds the latter.
Sending a motion signal to the alarm means, and activating the alarm means.
2. The liquid dispensing device of claim 1, wherein 8. The liquid dispensing device according to claim 7, wherein said alarm means is of a visible type . 9. The liquid dispensing device according to claim 7, wherein said alarm means is audible . 10. The system according to claim 1 , wherein said outlet means is located between said reservoir means and said outlet.
And a liquid of a selected flow rate at the preselected pressure.
The liquid dispensing device of claim 1, further comprising means for supplying a body . 11. Supplying the liquid at a certain selected flow rate.
11. The liquid dispensing device of claim 10, wherein the means for performing is an orifice . 12. A filter between said reservoir means and said outlet.
Filter means, wherein the pressure detecting means comprises a filter.
The reservoir located downstream between the outlet means and the outlet
The liquid dispensing device of claim 1 connected to the means . 13. The microprocessor according to claim 12, wherein said processor means is a microprocessor.
2. The liquid distribution device according to claim 1, wherein the liquid distribution device is a heat sink . 14. A reservoir means containing an amount of liquid.
And a request indicating that at least a portion of the liquid is required
Control processor means adapted to receive a signal
And the reservoir hand controlled by the processor means.
And the request signal is transmitted by the processor means.
When received from the processor means
Actuated by a signal to apply pressure to the reservoir means
Acts against the liquid in the reservoir means and
Fluid pressure means for dispensing a liquid, and said reservoir means controlled by said processor means and
Connected to the stage, when the fluid pressure means is actuated
An outlet means for passing the specified amount of liquid and a low liquid level adjacent to said reservoir means for detection.
The low liquid level signal at which the low liquid level is detected.
Means for transmitting a signal to the processor means
And to the reservoir means connected to a liquid source and to the reservoir.
Inlet means controlled by a processor means , said processor means dispensing said specific amount of liquid.
Sometimes a second signal is sent to the fluid pressure means to
Deactivate the body pressure means, and
Receiving said low liquid level signal and said fluid pressure means
When it is in operation, it sends an open signal to open the entrance means.
Ku liquid distributor. 15. The apparatus controlled by said processor means.
And further comprising vacuum means connected to the reservoir means,
The processor means receives the low liquid level signal.
And when the fluid pressure means is inactive, the low liquid
Send fill signal to the vacuum means in response to level signal
This allows the vacuum means to draw into the reservoir means
Withdrawing liquid from the liquid supply by applying force,
15. The liquid dispensing device of claim 14, wherein said liquid is dispensed through said entry means to said reservoir means . 16. The pump connected to the liquid supply and the pump
Fluid pressure means controlled by the processor means is further provided.
The processor means receives the low liquid level signal.
And when the fluid pressure means is inactive,
A filling signal in response to a liquid level signal;
To supply the liquid to the fluid pressure means.
Pressure from the liquid supply and the input from the liquid supply.
Supplying liquid to said reservoir means through a mouth means.
14. Liquid dispensing device. 17. The microprocessor according to claim 17, wherein said processor means is a microprocessor.
15. The liquid distribution device according to claim 14, which is a heat sink . 18. Reservoir means containing an amount of liquid.
And a request indicating that at least a portion of the liquid is required
Control processor means adapted to receive a signal
And the reservoir hand controlled by the processor means.
And the request signal is transmitted by the processor means.
When received from the processor means
Actuated by a signal to apply pressure to the reservoir means
Acts against the liquid in the reservoir means and
Liquid pressure means for dispensing liquid, and said reservoir means controlled by said processor means and
At least one outlet means individually connected to the stage and adjacent to the reservoir means for detecting a low liquid level therein.
Sensing means and at least one inlet means to said reservoir means.
Each of which is connected to a separate liquid supply and
Said inlet means individually controlled by a processor means;
Wherein the processor means, the specific amount of liquid is dispensed
Sometimes a second signal is sent to the fluid pressure means to
Deactivate the body pressure means and the fluid pressure means
When the pressure acting against
Selected output means of said outlet means through which the body passes
Opening means and said specific amount of liquid is said selected outlet means
Closing the selected outlet means when passing through,
Sensor means detects a low liquid level in the reservoir means
Receiving a low liquid level signal from the sensor means when
And the processor means is
Receiving said low liquid level signal and said fluid pressure means
When the selected inlet means of the inlet means is in operation
Liquid dispensing device that sends a signal to open . 19. Controlled by said processor means.
And further comprising vacuum means connected to the reservoir means,
The processor means receives the low liquid level signal.
And when the fluid pressure means is inactive, the low liquid
Send fill signal to the vacuum means in response to level signal
This allows the vacuum means to draw into the reservoir means
Before being connected to the selected inlet means by applying force
Withdrawing liquid from the liquid supply and selecting the selected inlet
19. The liquid dispensing device of claim 18, wherein said liquid dispensing means passes through said means to said reservoir means . 20. The fluid pressure means further comprises a liquid supply source.
And controlled by said processor means
Wherein said processor means outputs said low liquid level signal.
Receiving and when the fluid pressure means is inactive,
A fill signal is provided in response to the low liquid level signal by the fluid pressure hand.
Stage to the fluid pressure means,
Against the liquid supply present at the isolated inlet means
From the liquid source and the selected inlet
19. Supplying liquid to the reservoir means through a stage.
Liquid dispensing apparatus. 21. A method according to claim 21, wherein said processor means is a microprocessor.
20. The liquid distribution device according to claim 18, which is a heat sink . 22. Reservoir means containing an amount of liquid.
And a request indicating that at least a portion of the liquid is required
Control processor means adapted to receive a signal
And the reservoir hand controlled by the processor means.
And the request signal is transmitted by the processor means.
When received from the processor means
Actuated by a signal to apply pressure to the reservoir means
Acts against and separates the liquid in the reservoir means.
Fluid pressure means for disposing the reservoir means and the reservoir means controlled by the processor means.
Connected to the stage and when the liquid pressure means is actuated
Outlet means for passing the liquid, and present before the outlet means, passed through the outlet means
A filter means for filtering the liquid; and a filter means connected to the reservoir means and provided by the processor means.
When the fluid pressure means is inactive.
Actuated by a discharge signal from the processor means
Except for the pressure acting on the liquid in the reservoir means
Dispensing device provided with a discharging means for the liquid. 23. The filter according to claim 23, wherein said fill means is close to said outlet means.
Detecting the pressure of the liquid in front of the
Connected to the processor means to allow liquid to pass through said outlet means.
Pressure drop across the filter means when
Indicating at least one pressure signal to the processor means
Further seen including a pressure sensing means for transmitting, the processor
The means receives the pressure signal and converts it to the pressure drop.
Into a useful value representing
Comparing with a fixed value, and furthermore, the useful value is the predetermined value.
Exceeds the alarm signal from the processor means.
23. The liquid dispensing device of claim 22, including alarm means activated by: 24. The discharge means is connected to the storage means.
Vacuum connected and controlled by said processor means
Venturi means, wherein the vacuum Venturi means comprises
Activated by a Venturi signal from the processor means.
Discharging said reservoir means to a reduced pressure.
22 liquid dispensing devices. 25. The discharge means is connected to the storage means.
Continued vacuum venturi means and said vacuum venturi
Means and the storage controlled by the processor means
Vacuum means comprising valve means present between the vacuum bench
And the opening means sends an open signal to the valve means.
Bringing said reservoir means to atmospheric pressure when transmitting a signal
23. The liquid distribution device according to claim 22 . 26. Reservoir means containing an amount of liquid.
And a request indicating that at least a portion of the liquid is required
Control processor means adapted to receive a signal
And the reservoir hand controlled by the processor means.
And the request signal is transmitted by the processor means.
When received from the processor means
Triggered by a signal to dispense an amount of liquid
Fluid pressure means, and said reservoir means controlled by said processor means.
Connected to the stage, when the fluid pressure means is actuated
Outlet means for passing said liquid, said exit means being in front of said exit means and passing through said outlet
A filter means for filtering the liquid; and a filter means present near the outlet means and near the outlet means.
Detecting the pressure of the liquid before the filter means
Liquid connected to said processor means and
Between the ends of said filter means when passed through the means
At least one pressure signal indicating a pressure drop of
Pressure sensing means for transmitting to the sensor means, wherein the processor means receives the pressure signal and
While converting to a useful value representing the pressure drop,
A liquid dispensing device that compares a useful value to a predetermined value . 27. The processor according to claim 27, wherein the fluid pressure means is a processor.
Controlled by means and connected to said reservoir means
Fluid pressure means, wherein the fluid pressure means is capable of receiving the request signal.
The signal is received by the processor means.
Actuated by the first signal from the processor means
Pressure is applied to said reservoir means to cause pressure in said reservoir means.
Claims: Acting against and distributing liquid.
26 liquid dispensing device. 28. Reservoir means containing an amount of liquid.
And a request indicating that at least a portion of the liquid is required
Control processor means adapted to receive a signal
And the reservoir hand controlled by the processor means.
And the request signal is transmitted by the processor means.
When received from the processor means
Triggered by a signal to dispense an amount of liquid
Fluid pressure means, and said reservoir means controlled by said processor means.
Connected to the stage, when the fluid pressure means is actuated
Outlet means for passing said liquid, said exit means being in front of said exit means and passing through said outlet
A filter means for filtering the liquid; and a filter means present near the outlet means and near the outlet means.
Detecting the pressure of the liquid before the filter means
Liquid connected to said processor means and
Between the ends of said filter means when passed through the means
Providing at least one pressure signal indicative of a pressure drop of
Pressure sensing means for transmitting to the processor means.
The processor means receives the pressure signal and processes it.
While converting to a useful value representing the pressure drop,
Comparing the useful value with a predetermined value and further controlling and controlling the
Said processor when said useful value exceeds said predetermined value.
The filter alarm means which is actuated by a signal from the means
The provided liquid distribution device. 29. The processor as claimed in claim 29, wherein the fluid pressure means is a processor.
Controlled by means and connected to said reservoir means
Fluid pressure means, wherein the fluid pressure means is capable of receiving the request signal.
The signal is received by the processor means.
Actuated by the first signal from the processor means
Pressure is applied to said reservoir means to cause pressure in said reservoir means.
Claims: Acting against and distributing liquid.
28 liquid dispensing device. 30. The audible alarm means wherein the filter alarm means is audible alarm means.
29. The liquid distribution device of claim 28, comprising: 31. The filter alarm means is a visual alarm means.
29. The liquid distribution device of claim 28, comprising: 32. Reservoir means containing an amount of liquid.
And a request indicating that at least a portion of the liquid is required
Control processor means adapted to receive a signal
And the reservoir hand controlled by the processor means.
And the request signal is transmitted by the processor means.
When received from the processor means
Actuated by a signal to apply pressure to the reservoir means
Acts against and separates the liquid in the reservoir means.
Fluid pressure means for disposing the reservoir means and the reservoir means controlled by the processor means.
Connected to the stage, when the fluid pressure means is actuated
An outlet means for passing said liquid, said outlet means being connected to said reservoir means and being provided by said processor means.
When the fluid pressure means is inactive.
Actuated by a discharge signal from the processor means
Except for the pressure acting on the liquid in the reservoir means
Drain means for discharging the liquid when the liquid is dispensed.
2 is transmitted to the fluid pressure means, and the fluid pressure
Liquid dispensing device that deactivates the stage . 33. The discharge means is connected to the storage means.
Vacuum connected and controlled by said processor means
Venturi means, wherein the vacuum Venturi means comprises
Activated by a Venturi signal from the processor means.
Discharging said reservoir means to a reduced pressure.
32 liquid dispensers. 34. The discharge means is connected to the storage means.
Continued vacuum venturi means and said vacuum venturi
Means and the storage controlled by the processor means
Vacuum means comprising valve means present between the vacuum bench
And the opening means sends an open signal to the valve means.
Bringing said reservoir means to atmospheric pressure when transmitting a signal
33. The liquid distribution device according to claim 32 . 35. A processor means, a reservoir means containing a quantity of liquid, and detecting a high liquid level in said reservoir means,
When the liquid level is reached, a high liquid level signal is
Means for transmitting to the sensor means and connecting to the reservoir means above the high liquid level
To prevent liquid overflow above the high liquid level.
Processor means for detecting an overflow signal upon detection
Discharge interlock means for overflow detection to be sent to
And connected to the reservoir means, and from the reservoir means
Dispensing and replenishing said reservoir means,
Means controlled by processor means, wherein the processor is adapted to detect the overflow signal by the processor.
Disable signal when received by the
Send to distribution means to disable distribution and supply means
Liquid distribution device. 36. The processor according to claim 31, wherein said processor means is a microprocessor.
36. The liquid distribution device according to claim 35, which is a heat sink . 37. The dispensing and replenishing means, wherein the processor
Controlled by means and connected to said reservoir means;
When a request signal is received by said processor means
Operating in response to a first activation signal from the processor means.
Fluid pressure means for moving to dispense an amount of liquid
Controlled by said processor means and said storage
When the fluid pressure means is actuated
36. The liquid dispensing device of claim 35, further comprising an outlet means for passing said liquid through . 38. The fluid pressure means, comprising: the processor
Controlled by means and connected to said reservoir means
Fluid pressure means, wherein the fluid pressure means is capable of receiving the request signal.
The signal is received by the processor means.
Actuated by the first actuation signal from the processor hands stage
And applying pressure to said reservoir means.
Acting against said liquid and distributing the liquid
Item 38. The liquid distribution device according to Item 37 . 39. The dispensing and replenishing means includes the reservoir means.
To the reservoir means.
36. The liquid dispensing device of claim 35, connected to a liquid supply for replenishment . 40. A discharge interlock means, comprising:
The chain connected to the reservoir means above body level
Member means and the chain connected to the processor means.
Liquid overflow near the chamber means
The overflow signal when detected in the member means;
Overflow detection to transmit to the processor means
36. The liquid distribution device of claim 35, comprising means. 41. The liquid overflow detecting means has a capacity.
41. The liquid distribution device of claim 40, wherein the device is a type sensor . 42. A processor means; a reservoir means containing an amount of liquid ; and said reservoir means controlled by said processor means.
For refilling said quantity of liquid therein.
Means and the storage means controlled by the processor means
Dispenses an amount of liquid from the reservoir means
Means for performing the processing , wherein the processor means comprises:
Said refilling when activated by processor means.
Dispensing means for disabling the means for refilling, wherein the means for refilling is provided by the processor means.
Inlet means connected to said reservoir means controlled by
Wherein said inlet means refills said reservoir means.
Hand connected to a liquid supply for
A stage wherein the storage is controlled by the processor means
Further comprising a vacuum venturi means connected to the instrument means;
The entry means is provided by an open signal from the processor means.
And the vacuum venturi means dispenses the
When the processor means is inactive.
Activated by their refill signal and said vacuum bench
The storage means, when actuated, has a drop in the reservoir means.
Pressure draws the volume of liquid from the liquid source.
A liquid dispensing device for supplying to the reservoir means through the outlet means . 43. Processor means, reservoir means containing an amount of liquid , and said reservoir means controlled by said processor means.
For refilling said quantity of liquid therein.
Means and the storage means controlled by the processor means
Dispenses an amount of liquid from the reservoir means
Means for performing the processing , wherein the processor means comprises:
Said refilling when activated by processor means.
Dispensing means for disabling the means for refilling, wherein the means for refilling is provided by the processor means.
Inlet means connected to said reservoir means controlled by
Wherein said inlet means refills said reservoir means.
Hand connected to a liquid supply for
The stage further comprises a fluid pressure means connected to the liquid supply.
Wherein said inlet means is open to said processor means.
Opened by a signal, the fluid pressure means dispenses the dispensing
The processor means when the means for operating is inactive.
Actuated by a refill signal from the
The means comprises, when activated, the liquid in the liquid supply.
Pressure from the liquid source to apply the amount of liquid
Liquid dispensing device for supplying to the reservoir means through the inlet means . 44. A liquid component for distributing an amount of liquid.
A dispensing device that receives a reservoir means containing an amount of liquid and a request signal indicating that a particular amount of said liquid is required.
Controlling processor means adapted to communicate with the storage means controlled by the processor means.
Connected to a stage and applying pressure to said reservoir means when required
A fluid pressure means for acting against the liquid, connected to the reservoir means, wherein the fluid pressure means comprises
That part of the liquid when applying pressure acting against the body
And outlet means for passing minute, near the connection to said outlet means to said processor means
Present a pressure signal indicative of the pressure near said outlet means.
Pressure sensing means for transmitting to said processor means , said processor means being a microprocessor;
Transmitting a signal to the fluid pressure means in response to the request signal
Pressure acting on the fluid pressure means against the liquid
Force to convert the pressure signal to a useful value and
Comparing said value with a predetermined pressure value and determining the pressure near said outlet means;
Is close to the predetermined pressure value and the value is a predetermined allowable value.
Pressure applied by said fluid pressure means until indicated in
To control the liquid dispensing device. 45. The storage means and the pressure sensing means.
45. The liquid distribution device of claim 44, further comprising a filter means therebetween. 46. A liquid component for distributing an amount of liquid.
A dispensing device that receives a reservoir means containing an amount of liquid and a request signal indicating that a particular amount of said liquid is required.
Controlling processor means adapted to communicate with the storage means controlled by the processor means.
Connected to a stage and applying pressure to said reservoir means when required
Fluid pressure means for acting against said liquid; and said reservoir means controlled by said processor means.
Connected to a stage and the fluid pressure means against the liquid
When you apply an acting pressure,
Exit means, wherein the exit means is near the exit means and is connected to the processor means.
Dispensing the specified amount of liquid through the controlled outlet means
Means for dispensing the specified amount of liquid, wherein the means for dispensing the specific amount of liquid comprises:
Pressure present near said outlet means connected to the
Near the force detecting means and the output means through which the liquid passes
Orifice means present in the processor means;
Rare and at the end of a predetermined time interval
And timing means for closing the outlet.
The pressure detecting means is a pressure indicating a pressure near the outlet means.
Transmitting a force signal to said processor means;
The means converts the pressure signal to a useful value and stores the value.
The pressure near the outlet means is lower than the constant pressure value.
Fluid until the value indicates that it is close to a constant pressure value
Controlling the pressure applied by the pressure means, and
The pressure detected near the outlet means is close to the predetermined pressure value.
Release signal when the value indicates similarity
Liquid dispensing device to send to the stage . 47. The storage means and the pressure sensing means
47. The liquid distribution device of claim 46, further comprising a filter means therebetween. 48. The processor means comprising : a microprocessor;
47. The liquid distribution device according to claim 46, wherein the device is a heat sink . 49. A method for dispensing a measured amount of a liquid.
A liquid dispensing device that distributes liquid and controls the amount of liquid depending on the length of valve opening time.
, A reservoir means for holding the liquid to be dispensed, and a liquid pressure means for applying pressure to the liquid in the reservoir means
When, the liquid between the reservoir means and the distributing valve mechanism filtration
A filter for over to, the pressure sensor means associated with the liquid that has passed through the filter
And responsive to said pressure sensor means and associated with said liquid pressure means.
An associated controller, wherein the reservoir means is coupled to the dispensing valve mechanism and
The liquid is supplied at the pressure of the supply amount measured by the valve distribution mechanism.
Outlet and the liquid from the liquid source
An inlet for filling, wherein the controller outputs the reservoir means during a dispensing operation.
So that the pressure in the mouth is substantially maintained at a predetermined pressure.
By applying pressure to the liquid from the liquid pressure means
And a part of the pressure drop that varies between both ends of the filter
Liquid dispenser to compensate . 50. The distribution valve mechanism includes a plurality of outlet valve means.
Wherein each of said outlet valve means is individually controlled by said controller.
And an open signal from the controller.
To the open position for liquid distribution by
Moved to the closing position by the closing signal and the selected output
50. The liquid dispensing device of claim 49, wherein passage of the liquid through the mouth is prohibited . 51. The pressure sensor means is provided near the outlet.
Close to the outlet to detect the pressure of the liquid in contact
Connected to the storage means by the controller , wherein the controller compares a value indicative of a pressure signal to the pressure.
And compare it with a pre-selected value, and compare the
The output in connection with the liquid pressure means when the pressure is exceeded
Claim: Matching the pressure near the mouth with a preselected pressure
49 liquid dispensers. 52. An apparatus according to claim 1, wherein said storage means is located between said storage means and said outlet.
And a liquid of a selected flow rate at the preselected pressure.
52. The liquid dispensing device of claim 51, further comprising means for supplying a body . 53. Supplying the liquid at a certain selected flow rate
53. The liquid distribution device of claim 52, wherein the means for performing is an orifice . 54. The controller according to claim 54, wherein the controller is a microprocessor.
50. The liquid distribution device according to claim 49, wherein the device is a liquid distribution device. 55. A liquid component for dispensing a liquid in a measured amount.
A method of dispensing a liquid under a known pressure to dispense a measured amount of liquid.
To be distributed for a predetermined period of time in connection with the distribution means.
The liquid dispensed from the reservoir means via the outlet being released
Filling the reservoir means, and pressure on the liquid in the reservoir means if dispensing is required.
And monitoring the pressure of the liquid at the outlet of the reservoir means.
Step and the preselected liquid pressure at the outlet of the reservoir means
Distribution request to maintain the
Adjusting the pressure applied to the liquid at the time of dispensing , wherein the dispensing is stopped at a pressure lower than atmospheric pressure,
Step to reduce the pressure applied to the liquid in the reservoir means
And a liquid distribution method comprising: 56. The decompression step, wherein the decompression step comprises :
Reducing the pressure applied to the atmosphere to atmospheric pressure.
55 liquid dispensing methods . 57. A method for dispensing liquid from a reservoir means.
And at least a portion of the liquid contained in the reservoir means is required.
The microprocessor receives a request signal indicating that
And when the request signal is received by the microprocessor.
Minute delivery generated by said microprocessor
Dispensing liquid contained in said reservoir means in response to a signal
A step that, the filter while distributing said liquid from said reservoir means
Means for filtering, at least indicative of a pressure drop across the filter means.
Transmitting one signal to the microprocessor;
And a signal representing the pressure drop, a useful signal representing the pressure drop.
Convert the value to a value in the microprocessor and
And comparing the predetermined value for the serial pressure drop
Liquid distribution method . 58. The method according to claim 58, wherein said distributing step comprises :
Signal is received by the microprocessor.
Responding to the distribution signal generated by the microprocessor.
In response to applying pressure to the liquid contained in said reservoir means
58. The liquid dispensing method of claim 57, comprising a step . 59. A value representing the pressure drop corresponds to the predetermined value.
Activating the alarm means when exceeded
58. The liquid distribution method according to claim 57 . 60. A method for dispensing liquid from the reservoir means, receiving a microprocessor request signal indicating that at least a part of the liquid placed in the reservoir section is required
And a distribution generated by the microprocessor when the request signal is received by the microprocessor.
Applying pressure to the liquid contained in said reservoir means in response to a signal; and applying a pressure to the liquid contained in said reservoir means .
Ri out the steps of dispensing a liquid from said reservoir means, which is the liquid before the step of dispensing through
A pressure signal representing the pressure detected near the mouth
Receiving the detected pressure by a predetermined pressure value and the microcomputer.
And a value representing the detected pressure is a predetermined value of the predetermined pressure value.
Sends release signal when liquid is within tolerance and dispenses liquid
Opening the outlet for performing the liquid dispensing. 61. The distributing step further comprises: distributing the pressure signal during the distributing step.
Receiving continuously at the processor; and a value representing the sensed pressure during the dispensing step.
Is continuously compared with the predetermined value by the microprocessor.
70. The method of claim 60, comprising the step of comparing . 62. The dispensing step, wherein the liquid is
When dispensed, they are preselected through orifice means.
Passing the liquid to provide a controlled flow rate
63. The liquid distribution method according to claim 61, further comprising : 63. The dispensing step, comprising the step of :
At the end of the pre-selected time interval to distribute the body
Stopping the distributing step.
63. The liquid distribution method according to claim 62 . 64. A step of filtering while distributing the liquid.
61. The liquid dispensing method of claim 60, further comprising a tap. 65. A method for dispensing a certain amount of liquid.
Te, receiving a request signal in a microprocessor, when the request signal is received by the microprocessor
The distribution generated by the microprocessor
Dispensing a specific amount of liquid from reservoir means in response to a signal
Step, wherein the level of said liquid is a predetermined low liquid level of said reservoir means.
A low liquid level signal when the signal falls below the bell
Receiving at the processor; and receiving the low liquid level signal at the microprocessor.
Response to the request signal when the storage means
Continuing to dispense a particular amount of liquid from the microprocessor , wherein the low liquid level signal is received by the microprocessor.
Only one accumulator for distribution that occurs after
Increasing the accumulator with a predetermined empty cowl of the reservoir means.
Comparing said accumulator with said predetermined space in said reservoir means.
Stopping the dispensing step when the count is exceeded
And receiving the low liquid level signal at the microprocessor.
And liquid has not been dispensed from the reservoir means
The filling generated by the microprocessor
Refilling the reservoir means in response to a signal;
And a liquid distribution method. 66. A liquid component for distributing a liquid in a measured amount.
A method of dispensing a liquid under a known pressure to dispense a measured amount of liquid.
To be distributed for a predetermined period of time in connection with the distribution means.
The liquid dispensed from the reservoir means via the outlet being released
Filling the reservoir means, and pressure on the liquid in the reservoir means if dispensing is required.
Applying liquid from the reservoir means at the outlet.
Filtering through a filter, and reducing the pressure of the liquid at the outlet of the reservoir means by the filter.
Monitoring downstream of the reservoir, and a preselected liquid pressure at the outlet of the reservoir means.
Distribution request to maintain the
Liquid distribution method comprising the step of adjusting the pressure applied to the liquid. 67. Reducing the low liquid level in said reservoir means
Sends a low liquid level signal to the microprocessor indicating
A step, receiving the low liquid level signal in the microprocessor
Communicating the low liquid level signal by the microprocessor.
Received and the liquid dispensing step is not working
Upon the refill signal generated by the microprocessor
Opening an inlet connected to said reservoir means in response; and
The liquid supply present at the inlet when the inlet is open
Refilling said reservoir means with liquid from a source;
67. The liquid distribution method of claim 66, further comprising : 68. Opening said inlet to said reservoir means
The step of refilling comprises the low fluid level signal being generated by the microprocessor.
And liquid has been dispensed from said reservoir means.
Not generated by the microprocessor when not
Reducing the pressure of the reservoir means in response to a second refill signal
And the effect of the reduced pressure of the reservoir means
Dispense a certain amount of liquid from the source through an open inlet
Claims, including a step of pulling out said reservoir means and
67. The liquid dispensing method of 67 . 69. Opening said inlet to said reservoir means
The step of refilling comprises the low fluid level signal being generated by the microprocessor.
And liquid has been dispensed from said reservoir means.
Not generated by the microprocessor when not
Entered the liquid supply in response to a second refill signal
Applying pressure to the liquid; and applying pressure to the liquid contained in the liquid supply.
Opening a certain amount of liquid in the liquid supply.
Feeding said reservoir means through a closed inlet
Liquid dispensing method of claim 67 including and. 70. High liquid level in said reservoir means
Transmitting a high liquid level signal indicative of the high liquid level signal received by the microprocessor.
A step of, the high liquid level signal by the microprocessor
Issued by the previous SL microprocessor when it is received Te
Closing said inlet responsive to the generated fill signal and
Separate the liquid from the liquid source when the entry opening is closed
Stopping the flow of liquid. 71. A liquid exists above said high liquid level.
Monitoring the reservoir means during presence and detecting the presence of liquid above the high liquid level
To stop another dispensing and filling step when
And the presence of liquid above the high liquid level
Steps to reduce the pressure of the reservoir means when
71. The liquid distribution method of claim 70, further comprising a pump. 72. A switch for reducing the pressure of said reservoir means.
Step reduces the pressure of the reservoir means to atmospheric pressure
72. The liquid distribution method of claim 71, comprising : 73. The method as claimed in claim 73 , further comprising the step of :
Further comprising the step of detecting a pressure drop across the
67. The liquid distribution method of claim 66 . 74. When the pressure drop exceeds a predetermined value,
The liquid dispensing method of claim 73, further comprising the step of activating alarm means . 75. The reservoir means and the liquid distribution step.
Before being placed between the outlet and the outlet through which the liquid passes
Filtering said liquid through said filter; and the pressure across said filter during said liquid dispensing step.
Detecting a drop, and activating an alarm when the pressure drop exceeds a predetermined value.
67. The liquid dispensing method of claim 66, further comprising the step of : 76. The method as claimed in claim 75 , wherein the dispensing request is no longer present.
70. The method of claim 66, further comprising reducing the pressure above . 77. Liquid supply when said pressure is removed
Refill the reservoir means with liquid from a source via an inlet
77. The liquid dispensing method of claim 76, further comprising a step . 78. A multiple outlet coupled to the outlet of the reservoir means.
Having a number of distributing means, wherein two of said distributing means during dispensing.
67. The method of claim 66, further comprising the step of operating two dispensing means.
The method of liquid dispensing. 79. Reservoir means and pressure under control of a controller for liquid in said reservoir means.
Pressure gas supplied to said reservoir means for applying pressure
Pressure gas source and a predetermined quantity for measuring the required amount of liquid in connection with the distribution means.
An outlet in the reservoir means open only for a period of time, and a refill cycle for refilling the reservoir means with liquid.
For dispensing fluid, idle cycle and liquid
Liquid fraction and a controller processing including dispensing cycle
In the method of dispensing a dispensing device, the dispensing cycle includes the steps of:
Applying the pressure, monitoring the pressure of the liquid at the outlet, and maintaining the pressure of the liquid at the outlet within a predetermined pressure resistance.
Adjusting the gas pressure on the liquid for
The refill cycle, if there is a refill instruction
Refilling said reservoir means with liquid from a source.
Wherein the idle cycle includes the step of reducing the gas pressure on the liquid to a predetermined pressure when there is no distribution request.
Depressurizing to a pressure less than the level, and a step for reapplying pressure to the liquid in the reservoir means.
Waiting for receipt of an instruction for a dispensing request, wherein the predetermined pressure level determines the measurement accuracy of the amount of liquid dispensed.
Substantially reduce the overlap possibility of the pressure gas in the liquid
The method of treatment of the liquid dispensing device, which is the reduced pressure level . 80. A step for adjusting a gas pressure on the liquid.
The tip provides a pressure signal indicating the pressure of the liquid at the outlet.
Inputting from Sa to the controller, in response to the instruction signal, the pressure of the liquid at the outlet
Pressure gas source to maintain pressure within specified pressure
80. The method of treating a liquid dispensing device of claim 79, comprising:
Law . 81. The refill cycle has no distribution request.
Activated only when generating vacuum pressure in the reservoir means
To draw liquid from the liquid source into the reservoir means.
80. The method of claim 79, further comprising a tap . 82. A liquid supply apparatus comprising : a plurality of liquid supply units;
And each of said liquid sources is in communication via one of a plurality of valves.
Coupled to the reservoir means, the refill cycle opens one of a plurality of valves to
Introducing and refilling the liquid in the reservoir means.
82. The processing method of the liquid distribution device according to claim 81 . 83. The liquid dispensing device, wherein the reservoir means
Further comprising a dispensing means in communication with the outlet of said liquid , said dispensing cycle comprising:
Only when the pressure is within a certain withstand pressure, the distributing means can be opened.
8. The method of claim 7, further comprising the step of distributing the liquid.
9. The processing method of the liquid dispensing device of 9 . 84. The idle cycle, the distribution of the distribution means when the pressure on the liquid is reduced
And reapplying a compressed gas to the liquid in said reservoir means.
Waiting for the receipt of a distribution request for
Item 84. The processing method of the liquid distribution device according to Item 83 . 85. The apparatus according to claim 85, further comprising :
Reducing the gas pressure of the
If there is no indication to refill the reservoir means
80. The processing method of the liquid dispensing device according to claim 79, wherein the liquid dispensing device is started up in the case where
Law . 86. A predetermined pressure during the idle cycle.
Reducing the pressure to a pressure lower than atmospheric pressure.
80. The method of claim 79, comprising the step of:
Processing method . 87. A predetermined pressure level during the idle cycle.
Depressurizing to a pressure lower than the bell,
Contracting to reduce the force to a pressure below atmospheric pressure
80. The processing method of the liquid distribution device according to claim 79 .