TWI780625B - Liquid supply system and an auxiliary judgment method of liquid amount - Google Patents

Abstract

A liquid supply system including a weighing pan, a liquid storage tank, a liquid outlet pipeline, a gas inlet pipeline, a liquid inlet pipeline and a control apparatus is provided. The liquid storage tank is placed on the weighing pan and is suitable for storing liquid. The liquid outlet pipeline is connected to the liquid storage tank and includes a hydraulic sensor. The gas inlet pipeline is connected to the liquid storage tank and includes an gas valve. The liquid inlet pipeline is connected to the liquid storage tank, and the liquid is suitable for flowing into the liquid storage tank through the liquid inlet pipeline. The the control device is signal connected to the weighing pan, the gas valve and the hydraulic sensor. The control device is adapted to calibrate the weighing pan by the value corresponding to the hydraulic sensor.

Description

Liquid supply system and liquid volume auxiliary judgment method

The present invention relates to a fluid supply module and a fluid quantity auxiliary judgment method, and in particular relates to a liquid supply system and a liquid quantity auxiliary judgment method.

Liquid supply systems can be widely used in industry or research. For example, in the semiconductor manufacturing process, it is often necessary to supply liquids (such as wet etching solution, lotion, etc., but not limited) required by the manufacturing process through the liquid supply system.

In a general liquid supply system, the liquid is stored in a liquid storage tank. Generally speaking, due to the cleanliness of the equipment, the difficulty of installation, use and/or disassembly, the liquid storage tank for storing liquid will not be easily disassembled. Therefore, in order to confirm the amount of liquid in the liquid storage tank, the liquid storage tank for storing liquid can be placed on the weighing pan, and the liquid amount in the liquid storage tank can be confirmed by weighing the weighing pan. However, under prolonged use, the weighing pan may become out of alignment. Therefore, how to judge whether the weighing pan is inaccurate has become an urgent problem to be solved at present.

The invention provides a liquid supply system and a method for judging auxiliary liquid volume, which can make the liquid supply system more convenient and/or more efficient in use.

The liquid supply system of the present invention includes a weighing pan, a first liquid storage tank, a liquid outlet pipeline, an air inlet pipeline, a liquid inlet pipeline and a control device. The first liquid storage tank is placed on the weighing pan and is suitable for storing liquid. The liquid outlet pipeline communicates with the first liquid storage tank and includes a hydraulic pressure sensor. The air intake pipeline communicates with the first liquid storage tank and includes an air valve. The liquid inlet pipeline communicates with the first liquid storage tank, and the liquid is suitable to flow into the first liquid storage tank through the liquid inlet pipeline. The signal of the control device is connected to the weighing pan, air valve and hydraulic pressure sensor. The control device is suitable for calibrating the weighing pan by the value corresponding to the hydraulic pressure sensor.

In an embodiment of the present invention, the control device is adapted to calibrate the weighing pan by using the values corresponding to the hydraulic pressure sensors in the multiple sets of liquid volume information stored in the storage unit.

In an embodiment of the invention, the liquid supply system further includes a second liquid storage tank. The first liquid storage tank is a fixed liquid storage tank. The second liquid storage tank is a movable type liquid storage tank. The liquid inlet pipeline is further connected to the second liquid storage tank. The liquid is adapted to flow from the second liquid storage tank into the first liquid storage tank through the liquid inlet pipeline.

The liquid supply system of the present invention includes the following steps: providing a liquid supply system, which includes: a weighing pan, a first liquid storage tank placed on the weighing pan and suitable for storing liquid, communicated with the first liquid storage tank and comprising: The liquid outlet pipeline of the hydraulic sensor is connected to the first liquid storage tank and includes an air intake pipeline of the air valve, which is connected to the first liquid storage tank and is suitable for liquid to flow into the first liquid storage tank through the liquid inlet pipeline The liquid inlet pipeline, and the control device whose signal is connected to the weighing pan, air valve and hydraulic sensor; judge whether the value corresponding to the hydraulic sensor is within the reference range; and use the corresponding hydraulic sensor Numerically corrected weighing pan.

In an embodiment of the present invention, the way of calibrating the weighing pan by the value corresponding to the hydraulic pressure sensor includes the following steps: collecting multiple sets of liquid volume information, wherein each set of liquid volume information includes: hydraulic pressure sensor The corresponding numerical value; and the corresponding amount of liquid in the first liquid storage tank or the corresponding numerical value of the weighing pan.

In one embodiment of the present invention, the method of collecting the liquid volume information of each group includes the following steps: opening the gas valve within the first time range, so that the gas flows into the first liquid storage tank through the intake pipeline; and The values corresponding to the hydraulic pressure sensor are recorded in two time ranges, wherein the second time range is within the first time range, and the second time range is shorter than the first time range.

In an embodiment of the present invention, the initial value of the second time range is the same as the initial value of the first time range.

In an embodiment of the present invention, the method of calibrating the weighing pan by the value corresponding to the hydraulic sensor further includes the following steps: using the hydraulic sensor in the multiple sets of liquid volume information stored in the storage unit The corresponding value corrects the weighing pan.

In an embodiment of the present invention, the method of calibrating the weighing pan by the value corresponding to the hydraulic sensor further includes the following steps: using the hydraulic sensor in the multiple sets of liquid volume information stored in the storage unit The median of the corresponding values corrects the weighing pan.

Based on the above, in the liquid supply system of the present invention, the liquid can be supplied through the first liquid storage tank. Moreover, besides being measured by the first weighing pan, the amount of liquid in the first liquid storage tank can also be judged, confirmed or corrected by the above-mentioned auxiliary judgment method for liquid amount. In this way, the liquid supply system can be more convenient and/or more efficient in use.

Some embodiments are listed below and described in detail with the accompanying drawings, but the provided embodiments are not intended to limit the scope of the present invention. In addition, the drawings are for illustrative purposes only and are not drawn to original scale. In order to facilitate understanding, the same components in the following description will be described with the same symbols.

FIG. 1 is a schematic diagram of a system appearance of a liquid 91 supply system according to an embodiment of the present invention.

Referring to FIG. 1 , the liquid supply system 100 includes a first weighing pan 111 , a first liquid storage tank 121 , a liquid outlet pipeline 130 , a liquid inlet pipeline 140 , an air inlet pipeline 150 and a control device 160 . The first liquid storage tank 121 is placed on the first weighing pan 111 . The first liquid storage tank 121 is suitable for storing the liquid 91 . The liquid outlet pipeline 130 communicates with the first liquid storage tank 121 . The liquid outlet pipeline 130 includes a pipe 133 suitable for passing the liquid 91 and a hydraulic sensor 134 capable of detecting the hydraulic pressure of the liquid 91 in the pipe 133 . The liquid inlet pipeline 140 communicates with the first liquid storage tank 121 . The liquid 91 is suitable to flow into the first liquid storage tank 121 through the liquid inlet pipe 140 . The intake pipeline 150 communicates with the first liquid storage tank 121 . The air intake pipeline 150 includes a pipe 153 suitable for allowing gas to flow through and an air valve 154 capable of controlling the flow of gas in the pipe 153 . The control device 160 is signal-connected to the first weighing pan 111 , the air valve 154 and the hydraulic pressure sensor 134 . The control device 160 is suitable for calibrating the first weighing pan 111 according to the value corresponding to the hydraulic pressure sensor 134 .

In this embodiment, the gas can flow into the first liquid storage tank 121 through the pipe 153 through the control of the gas valve 154 . In this way, the liquid 91 in the first liquid storage tank 121 can flow to other corresponding places (such as: the reaction chamber, but not limited to) via the tube 133 . That is to say, the first liquid storage tank 121 can be regarded as a closed tank. Moreover, when the air valve 154 is opened to allow gas to flow into the first liquid storage tank 121 , the liquid volume in the first liquid storage tank 121 (such as the volume of the liquid 91 ) can be judged or estimated by the hydraulic pressure sensor 134 .

In this embodiment, the liquid supply system 100 may further include a second liquid storage tank 122 . The liquid inlet pipeline 140 may further communicate with the second liquid storage tank 122 . In this way, the liquid 91 can flow into the first liquid storage tank 121 from the second liquid storage tank 122 through the liquid inlet pipeline 140 .

For example, if (but not limited to) when the amount of liquid in the first liquid storage tank 121 is less or insufficient, the pump 144 in the liquid inlet pipeline 140 can be used to pump the liquid in the second liquid storage tank 122 The liquid 91 is pumped to the first liquid storage tank 121 through the liquid inlet pipeline 140 and the pipe member 143, but the present invention is not limited thereto. For another example, a pneumatic valve (not shown) can be used to pump the liquid 91 in the second liquid storage tank 122 to the first liquid storage tank 121 through the pipe fitting 143 of the liquid inlet pipeline 140 .

In one embodiment, the first liquid storage tank 121 and/or the second liquid storage tank 122 may be placed in the corresponding frame body 181 , but the invention is not limited thereto.

In this embodiment, the liquid supply system 100 may further include a second weighing pan 112 . The second liquid storage tank 122 may be placed on the second weighing pan 112 .

In one embodiment, the first liquid storage tank 121 may be a fixed liquid storage tank, and the second liquid storage tank 122 may be a movable liquid storage tank.

For example, if (but not limited to) when the amount of liquid in the second liquid storage tank 122 is less or insufficient, the second liquid storage tank 122 can be disassembled, taken out and/or filled, so that the second liquid storage tank 122 The amount of liquid in the liquid tank 122 is more or sufficient. Compared with the first liquid storage tank 121 with more pipes (such as the pipe 133 or the pipe 153 ), the above method is simpler.

In this embodiment, the control device 160 can be connected to the corresponding components or units (such as: the first weighing pan 111, the second weighing pan 111, weight plate 112, air valve 154, hydraulic sensor 134 and/or pump 144, but not limited), but the present invention is not limited thereto. In one embodiment, the control device 160 may be connected to corresponding components or corresponding units by way of wireless signal transmission. In other words, the signal connection mentioned in the present invention can generally refer to the connection mode of wired signal transmission or wireless signal transmission. In addition, the present invention does not limit all signal connection methods to be the same or different.

In this embodiment, the control device 160 may include corresponding hardware or software.

In one embodiment, the control device 160 includes, for example, an input unit 165 , an output unit 166 , a computing unit 167 and/or a storage unit 168 . The input unit 165 includes, for example, a keyboard, a mouse, a touch screen, a signal receiving terminal (such as a corresponding data port or an antenna) and/or other similar units suitable for data input. The output unit 166 includes, for example, a screen, a printer, a signal output terminal (such as a corresponding data port or an antenna) and/or other similar units suitable for data output. The computing unit 167 includes, for example, a central processing unit (Central Processing Unit; CPU), a graphics processing unit (Graphics Processing Unit), a physical processor (Physics Processing Unit; PPU), or other devices suitable for computing, logical judgment, and/or data processing. similar unit. The storage unit 168 includes, for example, a memory, a hard disk, a disk array, a database, and/or other similar units suitable for permanent or temporary data storage.

In an embodiment, the control device 160 can also be connected to the cloud system 170 with a signal. The cloud system 170 can perform input, output, calculation, storage, monitoring, data collection, statistics and/or other appropriate control via the control device 160 by way of remote control. The aforementioned cloud system 170 includes, for example, a failure detection and classification system (Fault Detection and Classification system; FDC system), a factory monitoring system (Facility Monitoring Control System; FMCS), or other suitable industrial control systems (Industrial control system; ICS). , but the present invention is not limited thereto.

In one embodiment, the control device 160 includes, for example, software suitable for logic judgment or a platform (platform) and/or programmable logic controller (programmable logic controller) suitable for advanced process control (Advanced Process Control; APC). ; PLC).

FIG. 2 is a schematic flow chart of a method for assisting determination of liquid volume in a liquid supply system according to an embodiment of the present invention.

Please refer to FIG. 2 , before starting the process (for example: step S510 ), a liquid supply system may be provided first. It should be noted that, in the process shown in FIG. 2 , the liquid supply system used is the liquid supply system 100 of the aforementioned embodiment as an example. Therefore, in the following description or corresponding symbols, the liquid supply system 100 is taken as an example. However, other liquid supply systems similar to liquid supply system 100 may also be used with the present invention.

Referring to FIG. 2 , in step S520 , it is determined whether the value corresponding to the hydraulic pressure sensor 134 is within a reference range. The aforementioned reference range may be a preset numerical range. For example, the aforementioned reference range may be ±10% of the standard pressure.

In this embodiment, the manner of acquiring the value corresponding to the hydraulic pressure sensor 134 may be as follows.

Please refer to FIG. 3A , during the time interval from T0 to Ty, the gas valve 154 can be opened by the control device 160 , so that the gas flows into the first liquid storage tank 121 through the intake pipeline 150 .

Referring to FIG. 3A to FIG. 3C , during the time interval from T0 to Ty, the gas can flow into the first liquid storage tank 121 , so that the liquid 91 can flow out of the first liquid storage tank 121 through the liquid outlet pipeline 130 correspondingly. Moreover, when the liquid 91 flows through the liquid outlet pipeline 130 , the hydraulic pressure value measured by the hydraulic pressure sensor 134 will basically increase correspondingly.

As shown in FIG. 3B , in one embodiment, if the gas flowing into the first liquid storage tank 121 has a relatively stable flow rate or flow rate, the hydraulic pressure value measured by the hydraulic pressure sensor 134 will be at the beginning of air intake (such as : In the time interval from T0 to Tx, where the time interval from T0 to Tx is shorter than the time interval from T0 to Ty) will be relatively high; then, because the gas or liquid 91 tends to be stable, the hydraulic pressure sensor The measured hydraulic pressure value at 134 drops slightly or tends to be stable.

In general, the compressibility of gases is greater than that of liquids. Therefore, in one embodiment, the hydraulic pressure value measured by the hydraulic pressure sensor 134 at the beginning of the air intake (for example: in the time interval from T0 to Tx) can be used to judge or estimate the pressure in the first liquid storage tank 121 liquid volume. For example, if the amount of liquid in the first liquid storage tank 121 is large, the hydraulic pressure value measured by the hydraulic pressure sensor 134 may be correspondingly high at the beginning of air intake; if the liquid in the first liquid storage tank 121 If the amount of liquid is small, the hydraulic pressure value measured by the hydraulic sensor 134 may be correspondingly low at the beginning of air intake.

In an embodiment, the time interval from T0 to Ty may be 50 times to 200 times the time interval from T0 to Tx. For example, if the moment when the air valve 154 is opened is defined as the 0th second (that is, T0), then the time interval from T0 to Tx can be 1 second, and the time interval from T0 to Ty can be 100 seconds, but this The invention is not limited thereto.

In step S520, if it is considered that the value corresponding to the hydraulic pressure sensor 134 is within the reference range, it may be confirmed whether other devices or systems are normal as shown in step S560. For example, it may be confirmed via the control device 160 whether the read status of the first weighing pan 111 or whether the reading is normal, but the invention is not limited thereto.

In step S520, if it is considered that the value corresponding to the hydraulic pressure sensor 134 is not within the reference range; and/or, in step S560, if other devices or the system is abnormal, the display unit or the The abnormality information is sent to the control terminal (such as: the aforementioned cloud system 170 ) to display the abnormality of the control system (such as: step S521 ). Then, as shown in step S522 , the first weighing pan 111 can be calibrated by the hydraulic pressure value measured by the hydraulic pressure sensor 134 .

In this embodiment, the method of correcting the first weighing pan 111 by using the hydraulic pressure value measured by the hydraulic pressure sensor 134 may be as follows.

Please refer to FIG. 3A to FIG. 3C , the aforementioned method can be used to record the hydraulic pressure value measured by the hydraulic pressure sensor 134 and the first weighing pan at the beginning of air intake (for example: in the time interval from T0 to Tx). 111 corresponds to the measured weight value.

As shown in FIG. 4 , the calculation unit 167 of the control device 160 can be used to calculate or estimate the hydraulic pressure value measured by the hydraulic pressure sensor 134 as the corresponding amount of liquid in the first liquid storage tank 121 . In one embodiment, if the hydraulic pressure value measured by the hydraulic pressure sensor 134 is higher, the corresponding amount of liquid in the first liquid storage tank 121 is substantially larger. In one embodiment, the corresponding mathematical equation (such as: linear function, but not limited) can be used to calculate the corresponding liquid level in the first liquid storage tank 121 from the hydraulic pressure value measured by the hydraulic pressure sensor 134. quantity. In one embodiment, the corresponding amount of liquid in the first liquid storage tank 121 can be estimated from the hydraulic pressure value measured by the hydraulic pressure sensor 134 by using the existing information (such as: the existing corresponding table). (eg: estimated by interpolation, but not limited to).

As shown in FIG. 4, the value corresponding to the hydraulic pressure sensor 134 (such as: the hydraulic pressure measured by the hydraulic pressure sensor 134 and/or the corresponding amount of liquid in the first liquid storage tank 121 obtained by the aforementioned hydraulic pressure ) and the value corresponding to the first weighing pan 111 (for example: the weight value measured by the first weighing pan 111 ) can be stored as a set of liquid volume information. The aforementioned liquid volume information can be stored in the storage unit 168 .

In this embodiment, the above steps may be performed multiple times to obtain and store multiple sets of liquid volume information. In FIG. 4 , it is an exemplary representation of the liquid quantity information of the first group to the 2n-1 group, wherein f(1) to f(2n-1) are values corresponding to the hydraulic pressure sensor 134 in each group, g(1) to g(2n-1) are the corresponding amounts of liquid in the first liquid storage tank 121 in each group, and w(1) to w(2n-1) are the corresponding amounts of liquid in the first weighing pan 111 in each group the corresponding value. However, the present invention does not limit the number of groups.

Referring to FIG. 4 and FIG. 5 , the first weighing pan 111 can be calibrated by using multiple sets of liquid volume information.

In this embodiment, multiple sets of values corresponding to the hydraulic pressure sensors 134 (such as: f(1) to f(2n-1) shown in FIG. 4 ) and/or multiple sets of the first storage The corresponding amount of liquid in the liquid tank 121 (such as: g(1) to g(2n-1) shown in Figure 4) is obtained by the commonly used statistical method or conversion method to obtain the corresponding first scale The reference value of the weighing pan 111 (such as: R(m) shown in FIG. 5 ) and/or the value corresponding to the first weighing pan 111 before correction (such as: w(m) shown in FIG. 5 ). Moreover, the aforementioned reference value of the first weighing pan 111 (such as R(m) shown in FIG. 5 ) and the value corresponding to the first weighing pan 111 before correction (such as: R(m) shown in FIG. 5 Shown w(m)) to calibrate the first weighing pan 111 to have a corresponding corrected value (eg w'(m) shown in FIG. 5 ). The way of correction is, for example, offset correction (offset correction), but the present invention is not limited thereto.

In this embodiment, the aforementioned statistical method is, for example, taking the median of multiple sets of fluid volume information, but the present invention is not limited thereto. In the commonly used statistical methods, if the number of data is odd, the middle data can be the median of this group of data; if the number of data is even, the arithmetic mean of the middle two data can be this The median of the group data.

In this embodiment, after the first weighing pan 111 is calibrated, it may be determined whether the detection is normal by the same or similar method as described in step S520 or step S560. If the aforementioned detection is still abnormal, corresponding troubleshooting (troubleshooting) can be performed. For example, troubleshooting may include repairing or replacing the first weighing pan 111 , the second weighing pan 112 , the hydraulic sensor 134 , and/or other components or devices.

In this embodiment, the liquid volume auxiliary judging method can be performed in a fully automatic or semi-automatic scheduling mode. In this way, the amount of liquid in the liquid storage tank (such as: the first liquid storage tank 121 or the second liquid storage tank 122) can also be recorded, so as to further track, understand or confirm the usage amount of the liquid 91 and/or or fill time.

To sum up, in the liquid supply system of the present invention, the liquid can be supplied through the first liquid storage tank. Moreover, in addition to being measured by the first weighing pan, the liquid volume in the first liquid storage tank can also be judged, confirmed or corrected by the above-mentioned liquid volume auxiliary judging method. In this way, the liquid supply system can be more convenient and/or more efficient in use.

100: Liquid supply system 111: The first weighing pan 121: the first liquid storage tank 112: Second weighing pan 122: Second liquid storage tank 130: Outlet pipeline 133: pipe fittings 134: Hydraulic pressure sensor 140: Inlet pipeline 143: pipe fittings 144: pump 150: Intake pipeline 153: pipe fittings 154: air valve 160: Control device 165: input unit 166: output unit 167: Operation unit 168: storage unit 170:Cloud system 181: frame body 198: Signal line 91: liquid S510, S520, S521, S522, S530, S531, S560, S591, S592: steps T0, Tx, Ty: time point

FIG. 1 is a schematic diagram of a system appearance of a liquid supply system according to an embodiment of the present invention. FIG. 2 is a schematic flow chart of a method for assisting determination of liquid volume in a liquid supply system according to an embodiment of the present invention. 3A to 3C are partial timing diagrams of some components or devices in a liquid supply system according to an embodiment of the present invention. Fig. 4 is a numerical table diagram according to an embodiment of the present invention. FIG. 5 is a schematic diagram of a calibration method according to an embodiment of the present invention.

100: Liquid supply system 111: The first weighing pan 121: the first liquid storage tank 112: Second weighing pan 122: Second liquid storage tank 130: Outlet pipeline 133: pipe fittings 134: Hydraulic pressure sensor 140: Inlet pipeline 143: pipe fittings 144: pump 150: Intake pipeline 153: pipe fittings 154: air valve 160: Control device 165: input unit 166: output unit 167: Operation unit 168: storage unit 170:Cloud system 181: frame body 198: Signal line 91: liquid

Claims (10)

A liquid supply system, comprising: a weighing pan; a first liquid storage tank, placed on the weighing pan and suitable for storing liquid; a liquid outlet pipeline, connected to the first liquid storage tank and including a hydraulic pressure sensor detector; an air inlet pipeline, connected to the first liquid storage tank and including an air valve; a liquid inlet pipeline, connected to the first liquid storage tank, and the liquid is suitable for passing through the liquid inlet pipeline flow into the first liquid storage tank; and a control device, which is signal-connected to the weighing pan, the gas valve and the hydraulic pressure sensor, and the control device is adapted to be controlled by the hydraulic pressure sensor The corresponding value corrects the weighing pan. The liquid supply system according to claim 1, wherein the control device includes: a storage unit for storing multiple sets of liquid amount information, wherein each set of liquid amount information includes: the hydraulic pressure sensor corresponding and the corresponding amount of the liquid in the first liquid storage tank or the corresponding value of the weighing pan. The liquid supply system according to claim 2, wherein the control device is suitable for correcting the weighing pan. The liquid supply system as described in Claim 1, further comprising: The second liquid storage tank, wherein the first liquid storage tank is a fixed liquid storage tank, the second liquid storage tank is a movable liquid storage tank, and the liquid inlet pipeline is further connected to the second liquid storage tank tank, and the liquid is adapted to flow from the second liquid storage tank into the first liquid storage tank through the liquid inlet pipeline. A liquid volume auxiliary judging method, comprising: providing a liquid supply system, which includes: a weighing pan; a first liquid storage tank, placed on the weighing pan and suitable for storing liquid; a liquid outlet pipeline, connected to the The first liquid storage tank and includes a hydraulic pressure sensor; the air inlet pipeline is connected to the first liquid storage tank and includes an air valve; the liquid inlet pipeline is connected to the first liquid storage tank, and the The liquid is suitable for flowing into the first liquid storage tank through the liquid inlet pipeline; and a control device, which is signally connected to the weighing pan, the air valve and the hydraulic pressure sensor; enables the liquid to be stored Put it in the first liquid storage tank; judge whether the value corresponding to the hydraulic pressure sensor is within the reference range; after the liquid is stored in the first liquid storage tank, and weigh the Before the pan is calibrated, a reference value corresponding to the liquid stored in the first liquid storage tank is obtained by the weighing pan; after the liquid is stored in the first liquid storage tank , and before correcting the weighing pan, make the liquid flow through the liquid outlet pipeline, so as to use the hydraulic pressure sensor to obtain the liquid corresponding to the liquid stored in the first liquid storage tank The hydraulic pressure of the liquid value; and correcting the weighing pan by the hydraulic value and the reference value. The liquid volume assistant judging method as described in claim item 5, wherein the method of correcting the weighing pan by the hydraulic pressure value and the reference value includes: collecting multiple sets of liquid volume information, wherein the liquid volume information of each set The volume information includes the following values obtained at different points in time: the hydraulic pressure value; and the reference value, which includes the corresponding amount of the liquid in the first liquid storage tank or the corresponding amount of the weighing pan value. The liquid volume auxiliary judging method as described in claim item 6, wherein the method of collecting the liquid volume information of each group includes: opening the gas valve within the first time range to allow gas to flow in through the intake pipeline the first liquid storage tank; and record the value corresponding to the hydraulic pressure sensor within a second time range, wherein the second time range is within the first time range, and the second time range shorter than the first time frame. The liquid volume auxiliary judging method according to claim 7, wherein the initial value of the second time range is the same as the initial value of the first time range. The liquid volume auxiliary judging method as described in claim 6, wherein the method of correcting the weighing pan by using the hydraulic pressure value and the reference value further includes: using multiple sets of the The hydraulic pressure value in the liquid volume information corrects the weighing pan. The liquid volume auxiliary judging method as described in claim 9, wherein the method of correcting the weighing pan by the hydraulic pressure value and the reference value further includes: using multiple sets of the The median of the hydraulic values in the volume information corrects the weighing pan.

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