KR101008241B1 - Method of detecting abnormality in fluid supply system, using flow rate control device having pressure sensor - Google Patents

Method of detecting abnormality in fluid supply system, using flow rate control device having pressure sensor Download PDF

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Publication number
KR101008241B1
KR101008241B1 KR20087002907A KR20087002907A KR101008241B1 KR 101008241 B1 KR101008241 B1 KR 101008241B1 KR 20087002907 A KR20087002907 A KR 20087002907A KR 20087002907 A KR20087002907 A KR 20087002907A KR 101008241 B1 KR101008241 B1 KR 101008241B1
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KR
South Korea
Prior art keywords
flow rate
supply system
valve
pressure
control device
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KR20087002907A
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Korean (ko)
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KR20080025415A (en
Inventor
마사키 나가세
코우지 니시노
료스케 도히
아츠시 마츠모토
카츠유키 스기타
노부카즈 이케다
카오루 히라타
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가부시키가이샤 후지킨
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Priority to JPJP-P-2005-00253996 priority Critical
Priority to JP2005253996 priority
Priority to JPJP-P-2006-00228526 priority
Priority to JP2006228526A priority patent/JP4866682B2/en
Application filed by 가부시키가이샤 후지킨 filed Critical 가부시키가이샤 후지킨
Publication of KR20080025415A publication Critical patent/KR20080025415A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects
    • G01F1/34Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through the meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/40Details or construction of the flow constriction devices
    • G01F1/42Orifices or nozzles
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075For recording or indicating the functioning of a valve in combination with test equipment
    • F16K37/0091For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means
    • G05D7/0617Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Abstract

The present invention relates to a flow control apparatus for holding a pressure sensor without disconnecting the valve from the pipe line of the fluid supply system, such as an operation failure of a plurality of valves assembled in a fluid supply system using a flow control apparatus, an abnormality such as a seat leak, and the like. The function allows for simple, quick and accurate checks.
Specifically, in the fluid supply system provided with a flow rate control device having a pressure sensor provided with a flow rate setting mechanism, a flow rate and pressure display mechanism and / or a flow rate self-diagnosis mechanism, the flow rate control device and the upstream thereof An abnormality of the control valve provided on the side or the downstream side is detected using the displayed value of the pressure of the flow rate control device and / or the diagnostic value of the flow rate self-diagnosis mechanism.

Description

METHODS OF DETECTING ABNORMALITY IN FLUID SUPPLY SYSTEM, USING FLOW RATE CONTROL DEVICE HAVING PRESSURE SENSOR}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for detecting an abnormality in a flow control device and a valve provided upstream and downstream thereof using a flow control device having a pressure sensor, and is mainly used in semiconductor manufacturing equipment and chemical related equipment. will be.

In semiconductor manufacturing facilities and chemical-related facilities, pressure flow control devices (FCS) and thermal mass control devices (MFC) are widely used for flow control of fluid supply systems.

In addition, the pressure type flow control device (FCS) includes a pressure sensor for detecting a fluid pressure upstream and / or downstream of a throttle mechanism such as a sound velocity nozzle or an orifice, and means for displaying each detected pressure to the outside. The pressure sensor can easily detect the pressure of each part of the fluid supply system even if the fluid does not actually flow through the pressure type flow control device (FCS).

On the other hand, it is difficult for the said thermal mass flow control apparatus MFC to detect the pressure of each part of a gas supply system like a pressure flow control apparatus FCS, and to display this externally. This is because the pressure flow control device FCS and the thermal mass flow control device MFC basically differ in the operating mechanism (pressure detection function) of the pressure sensor.

Fig. 13 shows the basic circuit configuration of the flow control of the fluid supply system using the flow control device D including the pressure flow control device FCS and the thermal mass flow control device MFC. It is made of gas body.

13, the purge gas supply system B and the process gas supply system A are parallel to the upstream side of the flow control apparatus D which consists of a pressure type flow control apparatus FCS or a thermal mass flow control apparatus MFC. The process gas use system C is connected on the downstream side of the flow rate control device D.

In addition, each of the valves V 1 , V 2, and V 3 is provided in the gas supply systems A and B and the gas use system C, respectively.

On the other hand, in the fluid supply system as shown in FIG. 13, it is common to periodically check the operation state of the valves V 1 to V 3 and the like. It is indispensable to supply stably at a predetermined location.

In other words, in the inspection (hereinafter referred to as check) of the valves V 1 to V 3 , the check of the operation state of each valve (including the operation of the valve actuator) and the check of the sheet leak of each valve are performed. Is performed.

However, in the case where the thermal mass flow control device MFC is used as the flow control device D, for example, a change in the gas pressure of the process gas using system C is detected using this, and the valve is detected from this detection value. Sheet leak of (V 3 ) cannot be detected.

As a result, when checking the seat leak of the valve V 3 of the process gas working system C, it is necessary to remove the valve V 3 from the conduit and check it by using a test apparatus provided separately. 3 ) There is a problem that requires a lot of effort and time to check the seat leak.

In addition, this is also true for the upstream side of the valve (V 1) and a valve (V 2) of the flow control device (D), usually such valves (V 1, V 2) sheet leak of the respective valve (V 1, V 2 ) is separated from the pipeline and checked by a separate sheet leak tester. Therefore, there is a problem that requires a lot of effort and time.

[Patent Document 1] Japanese Patent Application Laid-open No. Hei 8-338546

[Patent Document 2] Japanese Patent Laid-Open No. 2000-66732

[Patent Document 3] Japanese Patent Laid-Open No. 2000-322130

[Patent Document 4] Japanese Patent Publication No. 2003-195948

[Patent Document 5] Japanese Patent Publication No. 2004-199109

[Patent Document 5] Japanese Patent Application Laid-Open No. 2004-199109

The present invention provides a gas supply system using a conventional thermal mass flow control device or a flow control device of another mechanism, such as the above-described problem, namely, when checking the seat leakage of a valve provided on the upstream and downstream sides of the flow control device. In order to solve the problem that each valve needs to be separated from the pipeline and it requires a lot of trouble and time to check the seat leak, the flow control device is a flow rate setting mechanism, a flow rate and pressure display mechanism and / or a flow rate self-diagnosis mechanism. In addition to the flow rate control device provided with a pressure sensor of the flow rate control device and the respective mechanisms, the flow rate control device and the operation state and seat leakage of each valve disposed on the upstream side and / or downstream side thereof Flow rate with pressure sensor to enable simple and accurate checks without disconnecting each valve from the pipeline Or more of the fluid supply system using a control device to provide a detection method.

In addition, the present invention can identify and indicate the cause of abnormality from the form of pressure drop characteristics based on the diagnosis when an abnormality is detected in the operation of the valve or the flow control device itself from the diagnostic value of the flow rate self-diagnosis mechanism. It is another object of the invention to make it possible.

It is another object of the present invention to make it possible to easily calculate and display the amount of leakage generated when a seat leakage abnormality of the valve is detected.

In order to solve the problem of the present invention, the invention of claim 1 includes a flow rate self-diagnosis mechanism having a function of diagnosing an abnormality in comparison with a pressure drop characteristic of initial setting and a pressure drop characteristic at the time of diagnosis. A fluid supply system having a flow control device having a pressure sensor, wherein the abnormality of the flow rate control device and a valve provided on at least an upstream side of the upstream side and the downstream side thereof is used by using a diagnostic value of the flow rate self-diagnosis mechanism. The detection is performed as the basic configuration of the invention.

Moreover, invention of Claim 2 makes the abnormality detected in invention of Claim 1 to open / close operation and seat leak of a valve.

In the invention of claim 3, in the invention of claim 1, the seat leak of the valve of the process gas supply system or the purge gas supply system is detected from the change in the diagnostic value when the mixed gas of the process gas and the purge gas flows in.

In the invention of claim 4, the basic configuration of the invention is to determine the cause of the abnormality detected from the form of the pressure drop characteristic in the flow rate self-diagnosis by the flow rate self-diagnosis mechanism.

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In the invention of claim 6, in the invention of claim 1, when the leak of the seat leak of the valve is detected, the basic configuration of the invention is to calculate and display the leak amount Q (sccm).

According to the invention of claim 7, in the invention of claim 6, the leak amount Q (sccm) from the valve seat is Q = K · 273 · R / (273 + T) [wherein K is an integer and T is a temperature (° C.). Where R is the pressure drop rate (Pa absm 3 / s), and R is the displacement of the pressure reading between the volume (v) (m 3 ) and Δt (sec) of the closed piping system. Where R = -ΔP × v / Δt].
According to the invention of claim 8, in the invention of claim 1, the flow rate control device further includes a pressure indicating mechanism, and an abnormality between the flow rate control device and a valve provided on at least one of the upstream side and the downstream side thereof is the pressure of the flow rate control device. It is a basic structure of this invention to detect using the display value of and the value of at least one of the diagnostic value of the said flow rate self-diagnosis mechanism.
According to a ninth aspect of the present invention, in accordance with the processing program stored in advance in the invention of claim 1 or 8, the basic configuration of the invention is to automatically identify an abnormal valve and automatically detect an abnormal type of the specified valve. .
The invention of claim 10 is a valve of a purge gas supply system, a valve of a process gas supply system, and the flow rate control device, wherein the valve that is the object of abnormality detection in the invention of claim 1 or 8 is provided upstream of the flow rate control device. The valve is installed in the downstream process gas using system as the basic configuration of the invention.
According to the invention of claim 8, in the invention of claim 8, the inside of the pipes on the upstream side and the downstream side of the flow control device are evacuated through the pipe of the process gas using system, and the respective valves are converted from the displayed value of the pressure of the flow control device. This is to detect abnormal seat leakage.
A fluid supply system comprising a flow rate control device having a pressure sensor, comprising a flow rate setting mechanism and a flow rate and pressure display mechanism, comprising: a purge gas supply system upstream of the flow rate control device; The display of the pressure of the flow control device indicates an abnormality in opening and closing operation due to the non-operation of a valve provided in each of the process gas supply system upstream of the flow control device and the process gas use system downstream of the flow control device. Detection using a value is a basic configuration of the invention.
According to a thirteenth aspect of the present invention, in the twelfth aspect of the present invention, the basic configuration of the invention is to automatically specify a valve having the above opening / closing operation in accordance with a previously stored processing program.
According to the invention of claim 12 or 13, in the invention according to claim 12 or 13, by using the display value of the pressure of the flow control device to further detect the seat leakage of the valve provided in the process gas use system downstream of the flow control device. will be.
The invention of claim 15 is a fluid having a flow control device having a pressure sensor, a valve provided in a process gas supply system upstream of the flow control device, and a valve provided in a purge gas supply system connected to the process gas supply system. A method for detecting an abnormality in a supply system, comprising comparing an initial pressure drop characteristic previously measured by the pressure sensor with a pressure drop characteristic measured at the time of diagnosis by the pressure sensor, based on a difference in both pressure drop characteristics, It is a basic structure of this invention to detect the abnormality regarding the seat leak of each said valve.
According to the invention of claim 15, the fluid supply system further comprises a process gas usage system provided downstream of the flow control device and a valve interposed in the process gas usage system, the process gas supply system, The basic configuration of the present invention is to further detect an abnormality relating to the opening / closing operation of the valve provided in each of the purge gas supply system and the process gas using system, based on the indication value of the pressure sensor.
According to a seventeenth aspect of the present invention, the abnormality valve is automatically specified in accordance with the processing program stored in advance in the invention of the sixteenth aspect, and the basic configuration of the invention is automatically detected.

In the present invention, the valves in the gas supply system can be opened and closed, the seat leaks, the zero point of the pressure flow control device (FCS), etc., by using the pressure flow control device (FCS) itself as a gas supply system. The flow can be checked very easily and accurately without disconnecting the flow from the pipeline.

In addition, in the present invention, the cause of the abnormality can be accurately determined from the shape of the pressure drop characteristic curve when the seat leak of the valve, the operation abnormality of the valve, or the zero point abnormality of the pressure-type flow control device occurs, and the necessary equipment, etc. Maintenance and adjustment can be performed more efficiently.

In addition, in the present invention, the leak amount can be automatically calculated and displayed within a short time as well as the detection of the sheet leak abnormality, so that it is possible to accurately and promptly determine whether the operation of the apparatus or the like continues or the effect due to the occurrence of the seat leak. have.

1 is a block diagram showing an example of a fluid supply system for carrying out the present invention.

2 is a flow sheet showing an example of a method for detecting an abnormality in a valve of a fluid supply system according to the present invention.

3 is a diagram showing a representative example of the pressure drop characteristic when the supply pressure is insufficient in the flow rate self-diagnosis of the pressure type flow control device.

4 (a) is a diagram showing a representative example of the tension drop characteristic when there is a failure in the drive mechanism of the air-driven valve on the secondary side, and FIG. 4 (b) is a leak from the outside on the secondary side. .

FIG. 5A shows a representative example of the pressure drop characteristic when a gas having a large flow factor is mixed, and FIG. 5B is a case where a gas having a small flow factor is mixed.

Fig. 6 (a) is a diagram showing a representative example of the pressure drop characteristic when the orifice is clogged, and Fig. 6 (b) is shown when the orifice is enlarged.

7 is a diagram showing a representative example of the pressure drop characteristic when the control valve of the FCS has a seat leak.

8 is a diagram illustrating a representative example of the pressure drop characteristic when a failure occurs in the drive unit of the control valve of the FCS.

9 is a diagram showing a representative example of the pressure drop characteristic during the zero point change of the FCS.

FIG. 10 is a diagram showing the types of four pressure drop characteristics derived from the form (pattern) of each pressure drop characteristic from FIGS. 3 to 9.

It is a system diagram of the measuring device of the pressure drop characteristic in the flow rate self-diagnosis of a pressure type flow control apparatus.

Fig. 12 shows an example of the pressure drop characteristic measured by the measuring device of Fig. 11, and Fig. 12A shows a small amount of leak (0.2sccm) in a small capacity (10sccm) of FCS, and Fig. 12 ( b) is a figure which shows an example of the pressure drop characteristic at the time of large leak generation (4sccm) in a large capacity (2000sccm) FCS.

It is a block block diagram which shows an example of the fluid supply system provided with the conventional flow control apparatus.

It is a schematic diagram which shows the structure of the conventional pressure type flow control apparatus.

<Description of the code>

A: process gas supply system

A 1 : Piping

B: purge gas supply system

B 1 : Piping

C: process gas usage meter

1c: piping

D: pressure flow control

V 1 to V 3 : Valve

Go: purge gas

Gp: process gas

1a: Upstream piping of the pressure type flow control device

FCS: Pressure Flow Control

1b: downstream piping of the pressure flow control device

E: process chamber

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing.

14 (a) and 14 (b) show an example of a basic configuration of a conventional pressure type flow control device (FCS), and include a control valve 2, a pressure detector 6, 27, a sound velocity nozzle or an orifice. The recessed part of the pressure type flow control apparatus FCS is formed with the throttle mechanism 8, the flow volume calculation circuit 13, the flow volume setting circuit 14, the arithmetic control circuit 16, the flow volume output circuit 12, etc. which are formed. . In addition, an orifice is used for the throttle mechanism 8 in FIGS. 14A and 14B.

14 (a) and 14 (b), 3 is an orifice upstream pipe, 4 is a valve drive part, 5 is an orifice downstream pipe, 9 is a valve, 15 is a flow rate conversion circuit, and 10, 11, 22, 28 is Amplifier, 7 is temperature detector, 17, 18, 29 is A / D converter, 19 is temperature correction circuit, 20, 30 is operation circuit, 21 is comparison circuit, Qc is operational flow signal, Qf is switching operational flow signal, Qe is a flow rate setting signal, Qo is a flow rate output signal, Qy is a flow rate control signal, P 1 is an orifice upstream gas pressure, P 2 is an orifice downstream gas pressure, and k is a flow rate conversion rate.

The pressure flow control device FCS is provided with a storage device such as a processing program or data necessary for arithmetic operations or various arithmetic processing units in addition to the basic circuits described in FIGS. 14A and 14B. Of course.

In the pressure type flow control device FCS of FIG. 14A, the ratio P 2 / P 1 of the orifice upstream gas pressure P 1 and the orifice downstream gas pressure P 2 is equal to the threshold of the fluid. It is mainly used when it is the same or lower (when the so-called gas flow is under the critical state), and the gas flow rate Qc flowing through the orifice 8 is Qc = KP 1 (where K is a proportional integer). Given by

Moreover, the pressure type flow control apparatus FCS of FIG. 14 (b) is mainly used for the flow rate control of the gas which becomes a flow state of both a critical state and a non-critical state, and the flow volume of the gas which flows through the orifice 8 Is given by Qc = KP 2 m (P 1 -P 2 ) n (K is a proportional integer, m and n are integers).

In the pressure type flow rate control apparatus of FIG. 14A, the set value of the control flow rate is provided as a voltage value as the flow rate setting signal Qe, for example, the pressure control range 0 to 3 of the upstream pressure P 1 . If (kgf / cm 2 abs) is expressed in the voltage range of 0 to 5 V, Qe = 5 V (full scale value) corresponds to the flow rate Qc at the pressure P 1 of 3 (kgf / cm 2 abs). do.

For example, when the flow rate setting signal Qe = 5V is input when the conversion rate of the current flow rate converting circuit 15 is set to 1, the switching calculation flow rate signal Qf (Qf = kQc) becomes 5V and the upstream pressure The control valve 2 is opened and closed until (P 1 ) becomes 3 (kgf / cm 2 abs), and the flow rate Qc = KP 1 corresponding to P 1 = 3 (kgf / cm 2 abs) The gas will flow through the orifice 8.

The pressure type flow control apparatus FCS of FIGS. 14 (a) and 14 (b) includes a flow rate setting circuit 14 corresponding to a flow rate setting mechanism and a pressure display mechanism corresponding to a pressure display mechanism (not shown). ) And a flow rate output circuit 12 for displaying the flow rate.

In addition, a so-called flow rate self-diagnosis mechanism (not shown) is provided in the pressure-type flow rate control apparatus FCS, and an abnormal state is determined in comparison with the pressure drop characteristic initially set and the pressure drop characteristic at the time of diagnosis as described later. In addition, it is configured to output the determination result.

In addition, when the pressure flow control device FCS lacks the supply pressure from the gas supply source to the control valve 2, it becomes impossible to supply the gas flow rate of the set flow rate, or the supply pressure when the critical condition cannot be maintained. A short signal transmission mechanism is provided.

1 shows an example of a fluid supply system using the pressure type flow control device of the present invention, and the fluid supply system includes a purge gas supply system (B), a process gas supply system (A), and a pressure type. It consists of the flow volume control part D, the process gas use system C, etc.

In the case of using the fluid supply system, in general, an inert gas such as N 2 or Ar is first used as the purge gas Go from the purge gas supply system B as the pipe line 1a, the pressure flow control device (FCS), and the pipe line. (1b) or the like to purge the fluid supply system. Subsequently, the process gas Gp is supplied in place of the purge gas Go, and the process gas Gp is supplied to the process gas using system C while the pressure type flow controller D adjusts the desired flow rate. .

Further, a is V 1, V 2, V 3 the valve 1, the automatic opening and closing valve with a hydraulic drive or electric drive unit is generally used.

The valve to be checked using the present invention is a valve (V 1 , V 2 , V 3 ) in FIG. 1. The so-called seat leak and the abnormal operation of the valves V 1 to V 3 are being prepared for the start of supply of the process gas to the process chamber E using a pressure type flow control device (hereinafter referred to as FCS), or It is performed during the preparation of stopping supply of the process gas.

More specifically, each valve (V 1, V 2, V 3) or more is checked by operation of the following procedure using a pressure type flow rate control device (FCS).

A. Malfunction of the valve (V 1 )

a. The predetermined real gas (process gas Gp) is circulated and the gas of a predetermined | prescribed set flow volume is circulated by FCS. At this time, when the flow rate indication value or the pressure indication value (pipe line 1a and / or pipe line 1b) of the FCS changes to zero, there is an abnormality (non-operation) in the operation of the valve V 1 .

b. A predetermined actual gas (process gas Gp) is circulated to the FCS, and it is diagnosed whether or not the actual gas control flow rate of the FCS is a predetermined flow rate (hereinafter referred to as a real gas flow rate self-diagnosis) from the FCS. When the insufficient error signal is transmitted, there is an abnormality (inaction) in the operation of the valve V 1 .

B. Malfunction of valve (V 2 )

a. N 2 is passed through as the purge gas G, and a gas having a predetermined set flow rate is passed through the FCS. At this time, when the flow rate indication value or the pressure indication value of the FCS changes to zero, there is an abnormal operation (non-operation) of the valve V 2 .

b. When an N 2 gas is flowed to the FCS and an error signal of insufficient supply pressure is sent from the FCS during the diagnosis (hereinafter referred to as N 2 flow rate self-diagnosis) when the N 2 control flow rate of the FCS reaches the set flow rate. There is an abnormality (inaction) in the operation of the valve V 2 .

C. Operation Error of Valve (V 3 )

a. If the flow rate self-diagnosis error signal is sent from the FCS at the time of N 2 flow rate self-diagnosis under the state of flowing N 2 or real gas, or at the real gas flow rate self-diagnosis, the valve V 3 may malfunction. Operation).

b. If the pressure output display of the FCS does not drop to zero at the time of evacuation of the pipe 1c or the like, there is an abnormality (inaction) in the operation of the valve V 3 .

c. Even if the flow rate setting value is appropriately changed at the time of setting the flow rate of the FCS, if there is no change in the pressure display value of the FCS, there is an abnormal operation (non-operation) of the valve V 3 .

The sheet leak of the valves (V 1, V 2, V 3) is checked by the sequence of the following using a pressure type flow rate control device (FCS).

A. Seat leak of valve (V 1 )

a. When there is a seat leak in the valve V 1 at the flow rate self-diagnosis of the FCS by N 2 , N 2 flows back to the real gas Gp side, and the real gas Gp upstream of the valve V 1 is equal to N 2 . It becomes a mixed gas of the real gas Gp.

Subsequently, when real gas flow rate self-diagnosis of the FCS is performed, the real gas flow rate self-diagnosis is performed with the mixed gas, and the diagnostic value becomes an abnormal value.

The diagnostic value of the ideal value is found out by being in the seat leak in the valve (V 1).

Specifically, in the case where the flow factor (F.F.)> 1 of the real gas (process gas Gp) is> 1, the diagnostic result is on the negative side, and the F.F. In the case of <1, the diagnosis result is located on the + side.

Further, the flow factor FF is a value indicating how many times the real gas flow rate becomes the reference gas N 2 flow rate when the orifice and orifice upstream pressure P 1 of the FCS are the same, and FF = real gas flow rate / It is a value defined by N 2 flow rate (see Japanese Patent Laid-Open No. 2000-66732, etc.).

B. Seat leak of valve (V 2 )

When the diagnostic value at the time of the real gas flow rate self-diagnosis becomes an abnormal value, a seat leak occurs in the valve V 2 .

This is because N 2 gas is mixed in the actual gas Gp of the upstream pipe 1a of the FCS, and the real gas flow rate self-diagnosis is performed by the mixed gas in the FCS.

C. Seat Leak of Valve (V 3 )

After completion of the flow rate control by the FCS, the valve V 3 is kept closed, and the flow rate setting of the FCS is set to 0 (the flow rate is set to zero).

Thereafter, when the pressure indication value of the FCS falls, a seat leak occurs in the valve V 3 .

By performing each operation using the FCS as described above, in the fluid supply system having the configuration shown in FIG. 1, abnormal operation and seat leakage of the valves V 1 , V 2 , and V 3 can be detected using the FCS.

In addition, in embodiment of FIG. 1, although the fluid supply system provided with three valve | bulb is the object of application of this invention, the number of the process gas supply system A is plural, or the number of the process gas use system C is shown. It goes without saying that the present invention can be applied to a plurality of cases.

Figure 2 shows a flow sheet of a case that checks the more of the valves (V 1, V 2, V 3) of the fluid supply device shown in Fig.

In addition, the flow sheet in Fig. 1 (a), each valve (V 1, V 2, V 3), FCS and the piping system (1a, 1b, 1c) or the like is other than the seat leakage, for external leakage (e. G., Seam B) no leakage from the bonnet, etc., (b) the driving part of each valve is operating normally, (c) the FCS is operating normally, and (d) V 1 and V 2 are not opened simultaneously. And so on.

First, the abnormality check is started at step S 0 . Subsequently, at step S 1 , V 1 closing, V 2 opening to closing (switching), V 3 closing, and FCS control valve opening are performed to fill N 2 in the downstream piping 1b of the FCS.

Check the tension display (P 1) of FCS in the step (S 2), and determines whether or not the increase or decrease (ΔP 1) is 0, the P 1.

If ΔP 1 is not 0 and P 1 rises, either or both of V 1 or V 2 is abnormal (seat leak or malfunction), and if P 1 is decreased, V 3 is abnormal (seat leak). Or defective operation) (step S 3 ).

Then, in step S 4 , the inside of the pipe is evacuated by V 1 closing, V 2 closing, V 3 opening, FCS control valve opening, and then V 1 opening, V 2 closing to process gas (real gas) ( spilling the Gp) in FCS, checks the tension display (P 1) of FCS in the step (S 5). If the rise of P 1 operating in V 1 is normally [step (S 7)], if there is no rise of P 1 is determined due to a malfunction of V 1 [step (S 6)] to determine the operational state of V 1.

Then, in step S 8 , the inside of the pipe is evacuated by V 1 closing, V 2 closing, V 3 opening, FCS control valve opening, and then V 1 closing, V 2 opening to display the pressure of the FCS (P 1 ). (Step S 9 ). If P 1 does not rise, it is determined that the operation of V 2 is abnormal (step S 10 ) and the operation state of V 2 is confirmed.

If P 1 rises, the operation of V 2 is determined to be normal (step S 11 ).

Subsequently, in step S 12 , it is determined whether or not the abnormality of the valves in step S 2 corresponds to the abnormal operation of the valve V 3 . In other words, if the judgment of step S 2 is NO (any of the valves V 1 , V 2 , V 3 is abnormal in operation), and the operation of the valves V 1 , V 2 is normal, then the valve V 3 is normal. ) Is judged to be abnormal in operation (step S 13 ), and when the judgment in step S 2 is YES, the operation of each valve V 1 , V 2 , V 3 is determined to be normal [ Step S 14 ].

Then, the sheet is carried out of the leak check of the valves (V 1, V 2, V 3). In other words, in step S 15 , the inside of the pipe is evacuated by V 1 closing, V 2 closing, V 3 opening, and FCS control valve opening, and then V 1 closing, V 2 opening → closing as in step S 1 . (Switching), V 3 closed and pressurized pipe 1b between FCS and valve V 3 to maintain the FCS pressure display at P 1 (Pressure between control valve 2 and valve V 3 ) Maintain).

In step S 16 , the depressurization of P 1 is checked, and if there is a depressurization, it is determined that there is a seat leak in the valve V 3 (step S 17 ). Also, if no pressure is determined by the sheet-leak valve (V 3) [step (S 18)].

Then, in step S 19 , the inside of the pipe is evacuated with V 1 closed, V 2 closed, V 3 open, FCS control valve open, and then the valve V 1 closed, V 2 closed, V 3 open to the pipe. (1a, 1b, 1c) and then under reduced pressure (vacuum drawing) to close the valve (V 3) [step (S 20)].

Thereafter, the pressure display P 1 of the FCS is checked in step S 21 , and if the pressure display P 1 is not increased, the valves V 1 and V 2 are performed in step S 22 . It is judged that there is no seat leak in the table, and the abnormality check is completed (step S 31 ).

In addition, if there is a pressure increase in P 1 at step S 21 , it is determined that either of the valves V 1 or V 2 has a seat leak (step S 23 ), and it is determined which valve has a seat leak. Enter the process.

Performs V 1 closed, V 2 closed, V 3 opened, the FCS control, after vacuum recover pipe in the valve-opening valve V 1 open, chamber gas flow rate of the FCS self-diagnosis by a V 2 closed at the step (S 24). In other words, in contrast to the pressure drop characteristic when the real gas (process gas Gp) is flowed and the initial pressure drop characteristic, if the difference between the two is less than the allowable value, it is determined that there is no abnormality in the diagnostic value. On the contrary, when the difference between the two becomes more than the allowable value, it is determined that the diagnostic value is abnormal.

If there is no abnormality in the diagnostic value in step S 24 , it is determined that there is a seat leak only in the valve V 1 (step S 26 ). Even if the valve (V 1) a sheet leak if there is no seat leakage to the valve (V 2) the fluid flowing to the FCS is that the process merely gas (Gp), therefore the seal gas flow diagnostic value of the self-test is not more than the come .

On the other hand, when there is an error in the diagnostic value in the step (S 24) there is a N 2 flow rate self-diagnostic of the FCS is performed by in the step (S 27) to the valve (V 1) closed, the valve (V 2) open. In other words, in contrast to the pressure drop characteristic and the initial pressure drop characteristic when the N 2 gas is flown, if the difference between the two is less than the allowable value, the diagnosis value is diagnosed as abnormal. If the difference between the two is larger than the allowable value, the diagnosis value is diagnosed as abnormal.

If there is no abnormality in the diagnostic value of the N 2 flow rate self-diagnosis in step S 28 , it is determined in step S 29 that there is a seat leak only in the valve V 2 . This is because when the valve V 1 generates a seat leak, the real gas is mixed into the N 2 and an abnormality occurs in the flow rate self-diagnosis value of the FCS.

On the contrary, when there is an abnormality in the N 2 flow rate self-diagnosis value in step S 28 , the valve V 1 generates a seat leak and the mixed gas of N 2 and real gas flows into the FCS, thereby causing an abnormality in the diagnosis value. Will be produced. Accordingly, it is judged that the both sides of the valves (V 1 and V 2) in the step (S 30) the seat leakage.

Further, FIG. In the outside of the second check the flow sheet after detecting the abnormality of the valve (V 1, V 2, V 3) at the step (S 3) over the operation of each valve (V 1, V 2, V 3) and It is a flow which checks a sheet leak abnormality in order, respectively. However, if an abnormality is detected in step S 3 , the abnormality is first determined whether the abnormal type is an operation abnormality of the valve or a seat leak, and if it is an abnormal operation, steps S 4 to S 13 are abnormal. If up to, and a sheet leak may be at least to carry out the step (S 15) ~ step (S 30), respectively.

In addition, the determination or more of the operations can be determined from the increasing rate or decreasing rate of P 1 of P 1 in the step (S 3). For example, when the rising rate of P 1 is large, it may be determined that the valve is open or closed abnormally, and when the rising rate of P 1 is small, the valve leak is abnormal.

Next, the relationship between the pressure drop characteristic at the time of flow rate self-diagnosis and the cause of abnormality when the result of the flow rate self-diagnosis was determined to be abnormal was verified.

In addition, the flow rate self-diagnosis is judged as abnormal when the difference is outside the predetermined range in preparation for the pressure drop characteristic initially set as described above and the pressure drop characteristic at the time of diagnosis.

First, the inventors constructed the basic fluid supply system shown in FIG. 1, simulated a failure (abnormal), and investigated the pressure drop characteristic at each abnormality. Moreover, the relationship between the obtained pressure drop characteristic and its occurrence factor was analyzed, and as a result of the analysis, it was found that a close constant relationship exists between the form of the pressure drop characteristic and the cause of abnormality occurrence. In other words, it has been found that the cause of the abnormality can be found by knowing the form of the pressure drop characteristic when the abnormality occurs.

Table 1 examines the relationship between the specific types of failures A (specification of failures) simulated in flow rate self-diagnosis, the phenomenon B caused by it, and the overall factor C of the failures directly connected to the phenomenon B generated. And summarized this.

In addition, the numerical value (1-4) of the column of the form of a pressure drop characteristic shows the type of the type of the pressure drop characteristic each generate | occur | produces with respect to specific failure A, as mentioned later.

Figure 112008008934006-pct00001

3 to 9 show the pressure drop characteristics in the flow rate self-diagnosis in the case where each specific failure shown in Table 1 occurs, the horizontal axis indicates time, and the vertical axis detects the pressure type flow control device (FCS). Pressure is shown respectively.

That is, in Fig. 3, the control pressure is insufficient at the 100% flow rate maintenance due to the lack of the supply pressure on the gas supply source side, and the form of the pressure drop characteristic becomes the type 4 described later.

Figure 4 (a) In the air operated air operation is slow is broken because the pressure drop from the middle orifice outlet pressure rises, with the result that diagnosis (in the form of type 2 of the valve (V 3) of the secondary side (the output side of the FCS) being).

In addition, in FIG. 4 (b), since the leak gas flows into the secondary side from the outside of the orifice secondary side, the orifice secondary pressure rises and the pressure drop characteristic has the same type 2 shape as in the case of FIG. 4 (a). do.

In FIG. 5 (a), since a gas having a large flow factor FF flows into the primary side of the pressure control device FCS, the gas is easily released from the throttle mechanism (orifice), and as a result, the pressure drop in the pressure drop characteristic. Is faster (type 3).

On the contrary, in Fig. 5 (b), since gas having a small flow factor (F.F.) flows in, it is difficult for gas to escape from the throttle mechanism (orifice) and the pressure drop in the pressure drop characteristic is delayed (type 1). In addition, in the following description, a throttle mechanism is also represented by an orifice.

In Fig. 6A, when the orifice is blocked, it is difficult for gas to escape from the orifice and the pressure drop in the pressure drop characteristic is delayed (type 1).

In contrast, in Fig. 6 (b), the orifice is enlarged, so that gas is easily released from the orifice and the pressure drop is faster (type 3).

In Fig. 7, since the control valve generates seat leak, gas flows in from the control valve at the time of flow rate self-diagnosis, and the pressure drop in the pressure drop characteristic is delayed (type 1).

In FIG. 8, since there exists an abnormality in the transmission system of the drive part of a control valve, a control valve does not open a valve smoothly. As a result, since the gas is not supplied and the gas does not flow, the pressure drop characteristic is not changed (type 4 type).

Fig. 9 shows a case where the zero adjustment of the pressure type flow control device is distorted. When the zero point changes to the positive side, the pressure drop is delayed and becomes a type 1 form.

In addition, when the zero point changes to the negative side, the pressure drop is accelerated, and the pressure drop characteristic is in the form of type 3.

FIG. 10 collectively displays the types of the types of the pressure drop characteristics in the flow rate self-diagnosis shown in FIGS. 3 to 9.

That is, the pressure drop characteristic is largely divided into the following four types of patterns (patterns).

[Pressure drop characteristic of type 1 (the pressure drop is delayed immediately after diagnosis)]

The flow factor occurs in the case of failures such as incorporation of small gas, clogging of product to orifice, clogging of garbage, control bite of garbage, sticking of product (seat leak), plus fluctuation of zero point, and the like.

[Pressure drop characteristic of type 2 (pressure drop slowed down during diagnosis)]

It occurs when there is a failure of the air operation mechanism of the secondary valve, a failure such as leakage from the outside to the secondary side, and the like.

[Pressure drop characteristic of type 3 (faster pressure drop immediately after diagnosis)]

The flow factor occurs in the case of failures such as mixing of large gases, improper zero point input, clogging of holes (orifices) due to corrosion, breakage of orifice plates, and negative fluctuations of zero point.

[Pressure drop characteristic of type 4 (initial diagnosis does not reach 100% flow rate)]

This occurs when there is a lack of supply pressure, a failure of the air operation mechanism of the primary valve, clogging of the [pre-filter], an abnormality in the transmission system of the control valve, and a failure of the control valve.

As is clear from Table 1 and the descriptions of Figs. 4 to 10, in the present invention, the type of the pressure drop characteristic at the time of flow rate self-diagnosis is examined by which type of 1 to 4 causes the failure and its occurrence point. It can be easily understood, and the maintenance (or inspection) of the gas supply system can be performed efficiently and quickly.

On the other hand, when it turns out that abnormality, such as a seat leak, exists in the valve of a gas supply system, it is often necessary to know the leakage amount specifically. This is because it is possible to judge whether emergency repair is necessary or allow a little time for repair by subtracting the leakage amount.

FIG. 11 is a system diagram of a test apparatus used to confirm whether or not a seat leak can actually be detected from the pressure drop characteristic when a seat leak occurs in a secondary valve of a pressure flow control device, and RG is a pressure Regulator, MFC is the flow monitor (thermal mass flow meter), FCS is the pressure flow control device, V 1 is the inlet valve, V 3 is the simulated leak rate generation valve, Vp is the vacuum pump, pressure flow control device (FCS The inner volume v including the piping system of () is set to v = 6.69 × 10 −6 m 3 . In addition, the leak amount generation valve V 3 can be switched and adjusted in two types, 4 sccm and 0.2 sccm (supply pressure 350 kPa abs).

Referring to FIG. 11, first, the N 2 gas is supplied at a supply pressure of 350 kPa abs, and the simulated leak amount is controlled by adjusting the closing degree of the leak amount generating valve V 3 while monitoring the supply flow rate with the flow rate monitoring device MFC. (Inlet valve (V 1 ) is open, pressure flow control device (FCS) is forced open).

Next, the inlet valve V 1 is opened and the pressure type flow control device FCS is closed.

Then, the inlet valve V 1 is opened, the pressure flow control device FCS is forcibly opened (the FCS maintains the forced opening thereafter), and the inlet valve V 1 is closed after a few seconds. .

Then, the pressure indication value and supply pressure P of the pressure type flow control apparatus FCS are measured, and the pressure drop characteristic of the gas supply system containing a pressure type flow control apparatus by the seat leak of a leak amount generation valve is measured. Measured.

Next, when the pressure drop characteristic was found, the leak amount was calculated using the pressure drop characteristic.

First, prior to the formula for calculating the leakage amount, the pressure drop rate (R) = ΔP / Δt × v (Pa abs · m 3 / s). Calculate (1). However, in formula (1), ΔP (Pa abs) is the displacement of the pressure indicating value between time [Δt (s)], and v (m 3 ) is the internal volume of the FCS system (v = 6.09 × 10 -6 m 3 ).

When the pressure drop rate R is obtained, the leak amount Q (sccm) is calculated by the following equation (2).

Q (sccm) = -1 (atm) / {760 (Torr) × 133.3 (Paabs / Torr)} × 273 (K) / (273 + T) (K) × v (m 3 ) × 10 6 ( cc / m 3 ) × ΔP (Paabs) / Δt (s) / 60

= 60 × 10 6 /(760×133.3)×273/(273+T)×R

= K x 273 / (273 + T) x R... … (2)

However, T is gas temperature (degreeC).

In the calculation of the actual leak amount, it is a matter of how many seconds after the closing point of the inlet valve V 1 is set to the calculated point of? T for determining the pressure drop rate R.

FIG. 12 (a) shows the pressure drop characteristic when the leak amount of the leak generating valve V 3 of the pressure-type flow controller FCS of the rated flow rate 10 sccm is 10 sccm, and FIG. 12 (b) shows the rated flow rate 2000 sccm the amount of the leakage of the leakage occurred valve (V 3) of the pressure type flow rate control device (FCS) shows pressure drop characteristics when the 4sccm.

The time from closing the inlet valve V 1 to closing the inlet valve V 1 from the results of the test data shown in Figs. 12 (a) and 12 (b) or the like until the slope of the pressure drop characteristic is stable is sufficient for about 15 sec. In addition, it turns out that (degree) t (s) for calculating the pressure drop rate R is about 5 sec.

In addition, the arithmetic value Q by said formula (2) in FIG. 12 (a) is 0.15 (sccm), and the arithmetic value in the case of FIG. 12 (b) is 2.8 (sccm). However, gas temperature T is made into 21 degreeC. Since the leak amount of the leak generation (V 3 ) is 0.2 (sccm) and 4 (sccm), it was proved that the leak amount can be calculated even with the above-described level of practical use even in the above formula (2) of the present invention.

INDUSTRIAL APPLICABILITY The present invention is applicable to an entire fluid supply system using a flow control device having a pressure sensor in a semiconductor manufacturing industry, a chemical industry, or a food industry.

Claims (17)

  1. A fluid having a flow rate control device having a pressure sensor, comprising a flow rate setting mechanism and a flow rate self-diagnosis mechanism having a function of diagnosing an abnormality in preparation for the pressure drop characteristic at the initial setting and the pressure drop characteristic at the time of diagnosis. In the supply system,
    Fluid supply using a flow control device having a pressure sensor configured to detect an abnormality in the flow rate control device and at least an upstream side of the upstream side and the downstream side thereof using a diagnostic value of the flow rate self-diagnosis mechanism. As an abnormality detection method of the system,
    The form of the pressure drop characteristic at the time of flow rate self-diagnosis by the flow rate self-diagnosis mechanism is compared with the pressure drop characteristic at which the initial setting is made, whether the pressure drop is delayed immediately after the diagnosis or whether the pressure drop is delayed from the middle of the diagnosis. The flow rate control characterized by identifying the cause of the failure and the location of the failure by determining whether the pressure drop accelerates immediately or whether the initial pressure at the time of diagnosis corresponds to the type at which the pressure at the 100% set flow rate does not reach. An abnormality detection method of a fluid supply system using a device.
  2. The method of claim 1,
    The abnormality detection method includes the opening-closing operation | movement of a valve, and a seat leak. The abnormality detection method of the fluid supply system using a flow control apparatus.
  3. The method of claim 1,
    The fluid supply using the flow control apparatus which detects the seat leak of the valve of the said process gas supply system or the said purge gas supply system from the change of the said diagnostic value when the mixed gas of process gas and purge gas flowed in. An abnormality detection method of the system.
  4. delete
  5. delete
  6. The method of claim 1,
    And a leak amount Q (sccm) is calculated and displayed when a seat leak abnormality of the valve is detected.
  7. The method of claim 6,
    The leakage amount (Q) (sccm) to Q = K · 273 · R / (273 + T) [ stage, K is a constant, T is temperature (℃), R of the valve seat is pressure drop (Pa abs · m 3 / s), and R is determined by R = -ΔP × v / Δt when the displacement of the pressure indication between the internal volume (v) (m 3 ) and Δt (sec) of the closed piping system is ΔP (Pa abs). Is a given value]. The abnormality detection method of the fluid supply system using a flow control apparatus characterized by the above-mentioned.
  8. The method of claim 1,
    The flow rate control device further includes a pressure display mechanism, and an abnormality between the flow rate control device and a valve provided on at least one of the upstream side and the downstream side of the flow rate control device is determined by the display value of the pressure of the flow rate control device and the flow rate self-diagnosis mechanism. The abnormality detection method of the fluid supply system using a flow control apparatus characterized by the structure which detects using the value of at least one of a diagnostic value.
  9. The method according to claim 1 or 8,
    The abnormality detection method of the fluid supply system using a flow control apparatus characterized by automatically specifying an abnormality valve according to the process program memorize | stored in advance, and detecting the kind of abnormality of the specified valve automatically.
  10. The method according to claim 1 or 8,
    The valve which is an object of abnormality detection was made into the valve of the purge gas supply system provided upstream of the said flow control apparatus, the valve of a process gas supply system, and the valve provided in the process gas use system downstream of the said flow control apparatus. An abnormality detection method of a fluid supply system using a flow control apparatus characterized by the above-mentioned.
  11. The method of claim 8,
    The inside of piping upstream and downstream of the said flow control apparatus was made to vacuum through the piping of a process gas use system, and the abnormality of the seat leak of each valve is detected from the display value of the pressure of the said flow control apparatus. An abnormality detection method of a fluid supply system using a flow control device.
  12. A fluid supply system having a flow rate control device having a pressure sensor, comprising a flow rate setting mechanism and a flow rate and pressure display mechanism, the purge gas supply system upstream of the flow rate control device and the flow rate control device. Detecting abnormality of opening / closing operation due to non-operation of a valve provided in each of the upstream process gas supply system and the downstream process gas use system using the display value of the pressure of the flow control device. An abnormality detection method of a fluid supply system using a flow control device, characterized by holding a pressure sensor configured to.
  13. 13. The abnormality detecting method of a fluid supply system using a flow rate control device according to claim 12, characterized in that the valve for abnormality of the opening / closing operation is automatically specified in accordance with a previously stored processing program.
  14. The flow rate control according to claim 12 or 13, further comprising detecting a seat leak of a valve provided in a process gas use system downstream of the flow control device by using a display value of the pressure of the flow control device. An abnormality detection method of a fluid supply system using a device.
  15. The abnormality of the fluid supply system which has a flow control apparatus holding a pressure sensor, the valve provided in the process gas supply system upstream of the said flow control apparatus, and the valve provided in the purge gas supply system connected to the process gas supply system A detection method comprising: comparing the initial pressure drop characteristic measured by the pressure sensor in advance with the pressure drop characteristic measured at the time of diagnosis by the pressure sensor, and based on the difference between the two pressure drop characteristics, The abnormality detection method of the fluid supply system using the flow control apparatus which has a pressure sensor characterized by detecting the abnormality regarding a seat leak.
  16. The method of claim 15,
    The fluid supply system further includes a process gas usage system provided downstream of the flow control device and a valve interposed in the process gas usage system, each of the process gas supply system, purge gas supply system, and the process gas usage system. And detecting an abnormality relating to the opening / closing operation of the valve provided on the basis of the indication value of the pressure sensor.
  17. The method of claim 16,
    The abnormality detection method of the fluid supply system using a flow control apparatus characterized by automatically specifying an abnormality valve according to the process program memorize | stored in advance, and detecting the kind of abnormality of the specified valve automatically.
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