JP5177482B2 - 超伝導単一光子検出素子の製造方法 - Google Patents
超伝導単一光子検出素子の製造方法 Download PDFInfo
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- JP5177482B2 JP5177482B2 JP2007200727A JP2007200727A JP5177482B2 JP 5177482 B2 JP5177482 B2 JP 5177482B2 JP 2007200727 A JP2007200727 A JP 2007200727A JP 2007200727 A JP2007200727 A JP 2007200727A JP 5177482 B2 JP5177482 B2 JP 5177482B2
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- 238000001514 detection method Methods 0.000 title claims description 111
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- CFJRGWXELQQLSA-UHFFFAOYSA-N azanylidyneniobium Chemical compound [Nb]#N CFJRGWXELQQLSA-UHFFFAOYSA-N 0.000 claims description 82
- 239000000758 substrate Substances 0.000 claims description 44
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 21
- 239000000395 magnesium oxide Substances 0.000 claims description 21
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 20
- 238000000059 patterning Methods 0.000 claims description 3
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- 239000002356 single layer Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 238000004891 communication Methods 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 13
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000031700 light absorption Effects 0.000 description 4
- 239000010955 niobium Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052594 sapphire Inorganic materials 0.000 description 4
- 239000010980 sapphire Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000012795 verification Methods 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
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- 238000005516 engineering process Methods 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
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- 229910052758 niobium Inorganic materials 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
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Description
23 January 2006/Vol.14, No 2/OPTICS EXPRESS 527-534
伝送線路を介してバイアス源に接続され、所定のバイアス電流を流すようにして、超伝導状態で使用されている窒化ニオブ配線と、
前記窒化ニオブ配線と前記反射層との間に介在しているキャビティ層と、
前記窒化ニオブ配線上に配された反射防止層と、を備え、
前記反射防止層を通過した光子が前記窒化ニオブ配線に入射した際の前記窒化ニオブ配線の抵抗変化に基づいて、前記光子を1個ずつ検出するように構成されている、超伝導単一光子検出素子を提供する。
伝送線路を介してバイアス源に接続され、所定のバイアス電流を流すようにして、超伝導状態で使用されている窒化ニオブ配線と、
前記窒化ニオブ配線と前記反射層との間に介在しているキャビティ層と、
前記窒化ニオブ配線上に配された反射防止層と、を備える超伝導単一光子検出素子の製造方法であって、
前記基板上に、前記反射層と、前記キャビティ層と、窒化ニオブ層と、この順番にエピタキシャル成長させ、
その後、前記窒化ニオブ層をパターニングすることにより、前記窒化ニオブ配線を形成させ、前記窒化ニオブ配線を覆うように前記反射防止層を形成させる、超伝導単一光子検出素子の製造方法を提供する。
410 シリコン基板
11、211 窒化ニオブからなる反射層
411 アルミ金属からなる反射層
12、212 酸化マグネシウムからなるキャビティ層
412 酸化シリコンからなるキャビティ層
13 ナノワイヤ
13A、213A、313A、413A 窒化ニオブ層
14 反射防止層
15 伝送経路
101 積層体
100 超伝導単一光子検出素子
200 実施例の検出素子
300 第1比較例の検出素子
400 第2比較例の検出素子
S 光検出部
P 光子
G グランド部分
Claims (2)
- 基板上に配された反射層と、
伝送線路を介してバイアス源に接続され、所定のバイアス電流を流すようにして、超伝導状態で使用されている窒化ニオブ配線と、
前記窒化ニオブ配線と前記反射層との間に介在しているキャビティ層と、
前記窒化ニオブ配線上に配された反射防止層と、を備える超伝導単一光子検出素子の製造方法であって、
前記基板上に、前記反射層と、前記キャビティ層と、窒化ニオブ層と、この順番にエピタキシャル成長させ、
その後、前記窒化ニオブ層をパターニングすることにより、前記窒化ニオブ配線を形成させ、
前記窒化ニオブ配線を覆うように前記反射防止層を形成させる、超伝導単一光子検出素子の製造方法。 - 酸化マグネシウムからなる前記基板上に、窒化ニオブからなる前記反射層と、酸化マグネシウムからなる前記キャビティ層と、前記窒化ニオブ層とが、同一成膜装置内において連続的にエピタキシャル成長される、請求項1記載の超伝導単一光子検出素子の製造方法。
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CN103165723A (zh) * | 2013-03-26 | 2013-06-19 | 中国科学院上海技术物理研究所 | 一种汇聚增强光响应超导单光子探测器及其制备方法 |
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JP5344393B2 (ja) * | 2009-04-24 | 2013-11-20 | 独立行政法人情報通信研究機構 | 超伝導単一光子検出器の部品の実装方法 |
JP5470654B2 (ja) * | 2010-02-25 | 2014-04-16 | 独立行政法人情報通信研究機構 | 超伝導単一光子検出器の実装方法 |
JP6440304B2 (ja) * | 2014-11-04 | 2018-12-19 | 国立研究開発法人情報通信研究機構 | 超伝導単一光子検出器の光学設計方法 |
JP2016148534A (ja) * | 2015-02-10 | 2016-08-18 | 国立研究開発法人情報通信研究機構 | 蛍光相関分光装置 |
JP6684400B2 (ja) * | 2016-10-31 | 2020-04-22 | 国立研究開発法人情報通信研究機構 | 超伝導単一光子検出器 |
KR20200127412A (ko) * | 2019-05-02 | 2020-11-11 | 전북대학교산학협력단 | 광 검출기 |
CN111675199B (zh) * | 2020-05-15 | 2023-05-09 | 南京大学 | 一种高深宽比超导氮化铌纳米线及其制备方法和应用 |
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JP3355371B2 (ja) * | 2000-06-08 | 2002-12-09 | 独立行政法人通信総合研究所 | 超電導体多層構造体およびその製造方法ならびに超電導体装置 |
US6812464B1 (en) * | 2000-07-28 | 2004-11-02 | Credence Systems Corporation | Superconducting single photon detector |
JP2004064003A (ja) * | 2002-07-31 | 2004-02-26 | Communication Research Laboratory | 超伝導多層構造体とその製造法及び装置 |
JP2008071908A (ja) * | 2006-09-13 | 2008-03-27 | Nippon Telegr & Teleph Corp <Ntt> | 超伝導光検出素子 |
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