JP5169371B2 - Microwave processing equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a device in which various heated objects are heated with high efficiency by most suitably arranging a plurality of power feeding parts on a heating chamber wall face, and by optimizing frequency and phase difference of a radiation microwave from respective power feeding parts. <P>SOLUTION: A microwave generation part 1 includes: oscillation parts 2a, 2b; electric power distribution parts 3a, 3b; amplification parts 5a to 5d; the heating chamber 8 to store the heated objects; the power feeding parts 7a to 7d which are arranged on the wall face of the heating chamber 8, to which output of the microwave generation part 1 is transmitted, and the microwave is radiation-supplied into the heating chamber 8; and phase variation parts 4a to 4d inserted into a microwave transmission passage. By variable control of the phase difference and an oscillation frequency of the microwave outputted from the power feeding parts 7a to 7d, reflected electric power against the various heated objects can be suppressed to the minimum, and heating with high efficiency can be achieved. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a microwave processing apparatus including a microwave generation unit configured using a semiconductor element.

  This type of conventional microwave processing apparatus includes a semiconductor oscillation unit, a distribution unit that divides the output of the oscillation unit into a plurality of units, a plurality of amplification units that amplify the distributed outputs, and a recombination of the outputs of the amplification units. In some cases, a phase shifter is provided between the distributing unit and the amplifying unit (see, for example, Patent Document 1).

The phase shifter is configured to switch the length of the microwave transmission line according to the on / off characteristics of the diode. In addition, the synthesis unit can use two 90-degree and 180-degree hybrids, so that the output of the synthesis unit can be made two, and the power ratio of the two outputs can be changed by controlling the phase shifter, or between the two outputs. The phase can be in phase or out of phase.
JP 56-132793 A

  However, in the above-described conventional configuration, the microwaves radiated from the two outputs of the synthesizer can change the radiated power ratio and phase difference from the two radiating antennas instantaneously by changing the phase by the phase shifter. It is possible, however, to reduce the reflected power generated by the heated objects of various shapes, types, and quantities stored in the heating chamber supplied with microwaves, and to operate the amplifier efficiently. , Had a difficult task.

  The present invention solves the above-described conventional problems, and forms a pair with a plurality of power feeding units that radiate microwaves, and also switches the pairs according to the heating state and shape of the object to be heated by the power switching unit. An object of the present invention is to provide a microwave processing apparatus that suppresses the return of reflected power generated by objects to be heated having different shapes, types, and quantities to the power amplification unit and efficiently heats the objects to be heated to a desired state. To do.

In order to solve the above-described conventional problems, a microwave processing apparatus of the present invention includes a heating chamber that accommodates an object to be heated, an oscillation unit, and a power distribution unit that distributes and outputs the output of the oscillation unit to a plurality of units. A power switching unit that switches the output of the power distribution unit, an amplifying unit that amplifies the power of the output of the power switching unit, and a wall that forms the heating chamber while supplying the output of the amplifying unit to the heating chamber And a plurality of power feeding units arranged in the antenna, and a power source that detects power reflected from the power feeding unit to the amplifying unit.
And a control unit that controls the oscillation frequency of the oscillating unit and the power switching unit according to the amount of reflected power detected by the reflected power detecting unit, and the power feeding unit includes at least four power feeding units. , Having a plurality of pairs of power feeding units that combine two power feeding units to form a pair of power feeding units, and the control unit is configured to have the plurality of pairs in the power switching unit according to the amount of reflected power detected by the reflected power detection unit. In this configuration, the combination of two power feeding units in the power feeding unit is switched .

As a result, the control unit can arbitrarily configure a combination of two power feeding units in a plurality of pairs of power feeding units by controlling the power switching unit according to the amount of reflected power detected by the reflected power detection unit. Microwaves radiated indoors can be efficiently absorbed by the object to be heated, and microwaves can be directly incident on the object to be heated from different directions by performing microwave radiation from different power supply units. By switching the pair of power feeding units with the power switching unit, it is possible to change the state of microwave irradiation to the heated object, so that the heated object with various shapes, types, and quantities can be changed to the desired state. Can be heated.

  The microwave processing apparatus of the present invention arbitrarily arranges a plurality of power feeding units having a function of radiating microwaves on a wall surface constituting the heating chamber and arbitrarily configures a pair of power feeding units by the power switching unit, A microwave processing device that efficiently heats objects to be heated in various shapes, types, and quantities to a desired state by controlling the frequency, phase difference, and output of microwaves radiated from a pair of power supply units Can be provided.

A first invention includes a heating chamber that accommodates an object to be heated, an oscillation unit, a power distribution unit that distributes and outputs the output of the oscillation unit, and a power switching unit that switches the output of the power distribution unit. An amplifying unit for amplifying the output of each of the power switching units, a plurality of power feeding units disposed on a wall surface constituting the heating chamber, and supplying the output of the amplifying unit to the heating chamber; A reflected power detector that detects power reflected from the amplifier to the amplifier, and a controller that controls the oscillation frequency of the oscillator and the power switching unit according to the amount of reflected power detected by the reflected power detector, The power supply unit includes a plurality of pairs of power supply units that combine two power supply units out of at least four power supply units to form a pair of power supply units, and the control unit detects the amount of reflected power detected by the reflected power detection unit In the power switching unit With the structure for switching the combination of the two feeding parts in the feeding portion of the plurality of pairs, the control unit by the reflected power amount detected by the reflected power detection unit, by controlling the power switching unit, a plurality of pairs of feeding parts Since the combination of the two power feeding units in the can be arbitrarily configured, the microwave to be radiated into the heating chamber by the power feeding unit can be efficiently absorbed by the object to be heated, and the microwave radiation is performed from a plurality of different power feeding units The microwave can be directly incident on the object to be heated from different directions, and the irradiation state of the microwave to the object to be heated can be changed by switching the pair of the power feeding units by the power switching unit. A variety of shapes, types, and amounts of objects to be heated can be efficiently heated to a desired state.

A second invention is, in particular, Te first invention smell, the phase variable part is provided between the power distribution unit and the power switching unit, control unit, the reflected power amount detected by the reflected power detection unit, the feeding of the oscillator The frequency of the microwave radiated from the unit, the phase difference of the phase variable unit, and the power switching unit are respectively controlled to switch the combination of two power feeding units in a plurality of pairs of power feeding units . By controlling the phase of the microwaves radiated by the power supply unit, the absorption state of the radio wave to the object to be heated can be varied, and at the same time, the power switching unit can switch the configuration of the pair, so the shape and weight of the object to be heated It is possible to irradiate microwaves in accordance with the like, and to efficiently heat an object to be heated having various shapes, types, and amounts to a desired state.

A third invention is particularly Te first or second aspect of the invention odor, the temperature detecting means is provided, with the configuration for detecting the heating condition of the object to be heated placed on the heating chamber, heating of the article to be heated Depending on the situation, the control unit appropriately controls the power switching unit to switch the pair of power supply units, so that microwaves can be irradiated according to the heating status of the object to be heated, and various shapes, types, and quantities differ An object to be heated can be efficiently heated to a desired state.

A fourth invention is, in particular, Te third invention odor, control unit, depending on the heating conditions of the heated object detected by the temperature detection means, two of the power supply unit of the plurality of pairs by controlling the power switching unit The control unit is configured to control the combination of the power feeding units. The control unit appropriately controls the power switching unit according to the heating state of the object to be heated, and switches the paired power feeding units or the phase variable unit. By changing the phase difference of the microwave irradiated from the power supply unit or by changing the oscillation frequency of the oscillating unit, it is possible to irradiate microwaves according to the heating status of the object to be heated. Objects to be heated of different types and amounts can be efficiently heated to a desired state.

A fifth invention is particularly Te first or second aspect of the invention smell, the shape detecting means is provided, in which a configuration for detecting the shape and placement position of the object to be heated placed on the heating chamber. This makes it possible to select a pair of power feeding units according to the shape of the object to be heated in advance, so that microwaves can be irradiated according to the object to be heated. Can be efficiently heated to a desired state.

A sixth invention is particularly control unit in the fifth invention, depending on the shape and mounting position of the detection to the heated object shape detecting means, to switch a combination of the two feeding parts in the power supply unit of the plurality of pairs By adopting a configuration that controls the power switching unit, it is possible to select a pair of power feeding units according to the shape of the food, so microwave irradiation according to the object to be heated can be performed, so various shapes, types, Objects to be heated having different amounts can be efficiently heated to a desired state.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments.

(Embodiment 1)
FIG. 1 is a configuration diagram of a microwave processing apparatus according to the first embodiment of the present invention.

  In FIG. 1, the microwave generation unit includes oscillation units 2 a and 2 b configured using semiconductor elements, power distribution units 3 a and 3 b that distribute the output of the oscillation units 2 a and 2 b, and outputs of the distribution units 3 a and 3 b. Power amplifying units 5a to 5d configured using semiconductor elements to be amplified, power feeding units 8a to 8d for radiating the microwave output amplified by the power amplifying units 5a to 5d into the heating chamber 10, and a power distributing unit 3a, 3 b and phase variable units 4 a to 4 d that are inserted into a microwave transmission path connecting the power amplifying units 5 a to 5 d to generate an arbitrary phase difference between input and output, and microwaves output from the phase variable units 4 a to 4 d are arbitrary The power switching unit 7 for switching to the power amplifying units 5a to 5d and the power reflected by the power feeding units 8a to 8d inserted into the microwave transmission path connecting the power amplifying units 5a to 5d and the power feeding units 8a to 8d are detected. The power detectors 6a to 6d, the power detectors 6a to 6d, the oscillation frequencies of the oscillators 2a and 2b and the phase amounts of the phase variable units 4a to 4d according to the reflected power detected by the power detectors 6a to 6d And a control unit 12 that controls the power switching unit 7.

In addition, the microwave processing apparatus of the present invention has a heating chamber 10 having a substantially rectangular parallelepiped structure that accommodates an object to be heated. The heating chamber 10 has a left wall surface, a right wall surface, a bottom wall surface, an upper wall surface, and a back wall made of a metal material. An opening / closing door (not shown) that opens and closes to store the wall surface and the object to be heated 11 and a mounting table on which the object to be heated 11 is placed are configured to confine the supplied microwave inside. ing. The power supply units 8 a to 8 d that transmit the output of the microwave generation unit and radiate the microwave into the heating chamber 10 are arranged on the wall surface of the heating chamber 10. In the present embodiment, power supply units 8a and 8b are arranged at the approximate center of the left wall surface and the right wall surface of the opposing configuration, respectively, and the power supply units that are paired in control are supplied to the approximate center of the upper wall surface and the bottom surface of the heating chamber 10, respectively. The structure which has arrange | positioned the parts 8c and 8d is shown. The arrangement of the power supply unit is not limited to the present embodiment, and a plurality of power supply units may be provided on any wall surface, or may be an adjacent combination such as a right wall surface and a bottom wall surface that are not opposed surfaces. You may comprise the electric power feeding part used as a pair.

  Each of the power amplifying units 5a to 5d constitutes a circuit with a conductor pattern formed on one side of a dielectric substrate made of a low dielectric loss material, and each of the power amplifying units 5a to 5d is configured to operate the semiconductor element which is an amplifying element of each amplifying unit. Matching circuits are arranged on the input side and output side of the semiconductor element, respectively.

  The microwave transmission path connecting each functional block forms a transmission circuit having a characteristic impedance of about 50Ω by a conductor pattern provided on one side of the dielectric substrate.

  The power distribution units 3a and 3b may be in-phase distributors that do not cause a phase difference between outputs such as a Wilkinson distributor, or may have a phase difference between outputs such as a branch line type or a rat race type. It may be the resulting distributor. The power distribution units 3a and 3b transmit approximately half of the microwave power input from the oscillation units 2a and 2b to the respective outputs.

  Further, the phase variable sections 4a to 4d are configured by using variable capacitance elements whose capacitance changes according to the applied voltage, and each phase variable range is a range from 0 degrees to about 180 degrees. As a result, the phase difference of the microwave power output from the phase varying units 4a to 4d can be controlled in the range of 0 degrees to ± 180 degrees.

  As shown in FIG. 2, the power switching unit 7 functions to switch the connection state between the outputs of the phase variable units 4a to 4d and the power amplification units 5a to 5d to any one of the three states (a) to (c). By operating in this way, it is possible to arbitrarily set a pair of power feeding units in control. For example, in the state of FIG. 2A, the combination of the power feeding units 8a and 8b and the combination of the power feeding units 8c and 8d form a control pair. The phase difference of the microwaves to be applied can be controlled, and the phase difference of the microwaves irradiated from the power supply units 8c and 8d can be controlled by controlling the phase variable units 4c and 4d. In the state of FIG. 2B, the combination of the power feeding units 8a and 8c and the combination of the power feeding units 8b and 8d constitute a control pair, and in the state of FIG. 2C, the combination of the power feeding units 8a and 8d. A combination of the power feeding units 8b and 8c forms a controllable pair.

  The power detection units 6a to 6d extract the power of so-called reflected waves respectively transmitted from the heating chamber 8 side to the power amplification unit (5a to 5d) side, and the power coupling degree is set to about 40 dB, for example. An amount of electric power that is about 1/10000 of the electric power is extracted. Each power signal is rectified by a detection diode (not shown), smoothed by a capacitor (not shown), and the output signal is input to the control unit 12.

  The control unit 12 generates microwaves based on the heating information directly input by the user or the heating information obtained from the heating state of the heated object during heating and the detection information from the power detection units 6a to 6d. The drive power supplied to each of the oscillation units 2a and 2b and the power amplification units 5a to 5d, which are constituent elements of the unit, and the voltage supplied to the phase variable units 4a to 4d are controlled and stored in the heating chamber 10 Heats the object to be heated optimally.

In addition, a heat radiating means (not shown) for dissipating heat generated by the semiconductor elements provided in the power amplifiers 5a to 5d is mainly disposed in the microwave generation unit.

  About the microwave processing apparatus comprised as mentioned above, the operation | movement and an effect | action are demonstrated below.

  First, an object to be heated is stored in the heating chamber 10, the heating condition is input from an operation unit (not shown), and a heating start key is pressed. The microwave generator starts to operate according to the control output signal of the controller 12 that has received the heating start signal. The control unit 12 operates a drive power supply (not shown) to supply power to the oscillation units 2a and 2b. At this time, the initial oscillation frequency of the oscillation units 2a and 2b is supplied with a voltage signal set to 2400 MHz, for example, and oscillation starts.

  When the oscillating units 2a and 2b are operated, their outputs are distributed approximately ½ each by the power distributing units 3a and 3b, resulting in four microwave power signals. Thereafter, the drive power supply is controlled to operate the power amplifiers 5a to 5d.

  The respective microwave power signals are output to the first power feeding units 8 a to 8 d through the power amplification units 5 a to 5 d and the power detection units 6 a to 6 d that operate in parallel, and are radiated into the heating chamber 10. Each power amplification unit at this time outputs microwave power of less than 100 W, for example, 50 W.

  When 100% of the microwave power supplied into the heating chamber 10 is absorbed by the object to be heated, the reflected power from the heating chamber 10 becomes 0 W, but the type, shape, and amount of the object to be heated include the object to be heated. The electrical characteristics of the heating chamber 10 are determined, and the reflected power transmitted from the heating chamber 10 side to the microwave generating portion side is generated based on the output impedance of the microwave generating portion and the impedance of the heating chamber 10.

  The power detectors 6a to 6d detect the reflected power transmitted to the microwave generation unit and detect a signal proportional to the amount of reflected power. The control unit 12 that receives the detection signal receives the reflected power. Select the oscillation frequency and phase difference at which becomes the minimum value. In response to the selection of the frequency and the phase difference, the control unit 12 increases the oscillation frequency of the oscillation units 2a and 2b from the initial 2400 MHz, for example, at a 1 MHz pitch with the phase difference generated by the phase variable units 4a to 4d being 0 degrees. The frequency is changed to reach 2500 MHz which is the upper limit of the frequency variable range. By performing this operation, the control unit 12 can obtain an array of reflected power with respect to the oscillation frequencies of the oscillation units 2a and 2b. The control unit 12 controls the conditions of the oscillation units 2a and 2b where the reflected power is minimized, and controls the oscillation output so that an output corresponding to the input heating condition is obtained. Thereby, each amplification part 5a-5d outputs predetermined microwave electric power, respectively. Each output is transmitted to the power feeding units 8 a to 8 d and radiated into the heating chamber 10.

  The phase varying units 4a to 4d change the phase every moment with a predetermined change amount from the start of heating. The position where the microwaves radiated by the first power supply units 8a to 8d can be changed in the heating chamber 10 by changing the phase by the phase variable units 4a to 4d, so that it is placed in the heating chamber 10. By controlling the interference position according to the position of the heated object 11, the heated object 11 can be heated evenly or locally.

Further, when the reflected power detected by the power detectors 6a to 6b increases, the power switching unit 7 receives a signal from the control unit 12 so as to controlly switch the power feeding units constituting the pair, The paired power feeding units are switched so as to be in any one of the states shown in FIGS. By operating in this way, it is possible to switch the power supply units constituting the control pair, so that the microwave interference position in the heating chamber 10 can be greatly changed, so that the object placed in the heating chamber 10 can be changed. Since the heating state of the heated object 11 can be changed greatly, the power feeding unit is switched so that the microwaves are concentrated on the portion where the heating is insufficient depending on the shape and amount of the heated object 11 and the entire heated object. Uniform heating can be promoted. On the contrary, when it is desired to locally heat only a part of the object to be heated 11, the interference position of the microwave can be controlled by switching the control pair by the power switching unit 7 in the same manner.

  By operating in this way, it is possible to start heating under the condition that the reflected power is the smallest even for heated objects having various shapes, sizes, and amounts, and the power amplifiers 5a to 5d are provided. It is possible to prevent the semiconductor element from excessively generating heat due to the reflected power and to avoid thermal destruction.

  FIG. 3 is a flowchart showing a control example of the phase difference of the phase variable units 4a and 4b and the oscillation frequency of the oscillating unit 2 that are paired in control during the heating operation. Since the other phase variable units 4c and 4d perform the same control, the control flow of the phase variable units 4a and 4b as one pair will be representatively described here. First, Δf (for example, 0.1 MHz) is controlled so that the oscillation frequency is shifted while the oscillation unit 2 is oscillating at a certain frequency f (step 102), and the reflected power at that time is measured (step 103). The control unit 12 compares this reflected power with the reflected power measured last time (before changing the oscillation frequency), and if the reflected power is reduced, Δf is left as it is (step 106), and the reflected power increases. If so, the sign of Δf is reversed (step 108). By this operation, the reflected power can be controlled to always decrease with respect to the change of the oscillation frequency.

  Further, the phase variable sections 4a and 4b change the phase difference from time to time with a constant change width ΔΦ during the heating operation (step 101). Since the microwave interference position in the heating chamber 10 is changed by the phase difference Φ generated by the phase variable portions 4a and 4b, the object to be heated 11 can be heated evenly or locally.

  By controlling in this way, the power detection units 6a and 6b can detect the reflected power from the heating chamber 10 even during the heating operation, so the control unit 12 determines this and minutely determines the oscillation frequency and phase difference. Since the state where the reflected power is always kept low can be adjusted, the heat generation of the semiconductor element can be further suppressed, and the heating efficiency can be maintained high, so that heating in a short time can be achieved. Alternatively, the allowable reflected power is set to a predetermined value, and the control unit 12 can temporally change the phase difference between the phase variable units 4a and 4b and the oscillation frequency of the oscillating unit 2 within the allowable reflected power range. By performing such an operation, the propagation state of the microwave in the heating chamber 10 can be changed with time, so that local heating of the object to be heated can be eliminated and the heating can be made uniform. is there.

  In the above description, the example in which two phase variable units are inserted has been described. However, the phase change width is set to 0 degree to 360 degrees by inserting only one of the outputs of the power distribution unit 3a. You can also

(Embodiment 2)
FIG. 4 is a configuration diagram of a microwave processing apparatus according to the second embodiment of the present invention.

  The difference from the first embodiment is that temperature detecting means 13 for measuring the heating state of the object to be heated 11 is provided during the heating operation. In addition, since components having the same reference numerals operate and operate in the same manner as in the first embodiment, detailed description thereof is omitted here.

The temperature detection means 13 measures the temperature state of the object to be heated 11 during the heating operation, and may be a means for detecting the temperature in a non-contact manner, such as an infrared sensor, or directly on the object to be heated 11. The structure which attaches a temperature sensor may be sufficient. In the present embodiment, an example in which non-contact type temperature detecting means 13 such as an infrared sensor is arranged is shown. This temperature detection means 13 is configured to measure the entire inside of the heating chamber 10 by arranging a plurality of infrared sensors in an array so that the temperature state of the entire object to be heated 11 placed in the heating chamber 10 can be measured. Yes.

  The operation and action of the microwave processing apparatus configured as described above will be described below.

  When the reflected power detected by the power detectors 6a to 6b is increased or the heating state of the object 11 detected by the temperature detector 13 is generated locally, the power switching unit 7 is controlled. In response to a signal from the control unit 12, the paired power supply units are switched so as to be in any one of the states shown in FIGS. By operating in this way, it is possible to switch the power supply units constituting the control pair, so that the microwave interference position in the heating chamber 10 can be greatly changed, so that the object placed in the heating chamber 10 can be changed. Since the heating state of the heated object 11 can be changed greatly, the power feeding unit is switched so that the microwaves are concentrated on the portion where the heating is insufficient depending on the shape and amount of the heated object 11 and the entire heated object. Uniform heating can be promoted. Conversely, when only a part of the object to be heated 11 is to be heated locally, the position of the microwave interference can be controlled by switching the control pair by the power switching unit 7 in the same manner. It is also possible to locally heat only a part of the object 11.

(Embodiment 3)
FIG. 5 is a configuration diagram of a microwave processing apparatus according to the third embodiment of the present invention.

  The difference from the first and second embodiments is that a shape detecting means 14 for measuring the shape of the object to be heated 11 is provided during the heating operation. In addition, since components having the same reference numerals operate and operate in the same manner as in the first embodiment, detailed description thereof is omitted here.

  The shape detection means 14 detects the shape of the object to be heated 11 placed in the heating chamber 10, and the object to be heated 11 is a flat one, for example, a tall object to be heated such as a cup. Determine if it is a thing.

  The operation and action of the microwave processing apparatus configured as described above will be described below.

  When the shape detection unit 14 measures the shape of the object to be heated 11 in the heating chamber 10 and, for example, measures that the object to be heated 11 has a planar shape, the power supply units 8a and 8b that controlly form a pair are controlled. The power switching unit 7 performs switching and starts a heating operation so as to be a combination and a combination of the power feeding units 8c and 8d. When it is detected that the object to be heated 11 is a tall object, the power switching unit 7 performs switching so that, for example, a combination of 8a and 8c and a combination of 8b and 8d are obtained. In addition, since the shape detection unit 14 can measure the shape of the object to be heated 11 and can simultaneously detect the placement position of the object to be heated 11, the power switching unit 7 also depends on the placement position of the object to be heated 11. Can switch the pair so as to set a pair of feeding units optimally in control.

In addition, the power switching unit 7 controls when the reflected power detected by the power detection units 6a to 6b is increased, or when the heating state of the object to be heated 11 detected by the temperature detection means 13 is generated locally. In response to a signal from the control unit 12 so as to switch the power supply unit constituting the pair, the power supply unit that is paired in control is switched so as to be in any one of the states shown in FIGS. By operating in this way, it is possible to switch the power supply units constituting the control pair, so that the microwave interference position in the heating chamber 10 can be greatly changed, so that the object placed in the heating chamber 10 can be changed. Since the heating state of the heated object 11 can be changed greatly, the shape of the heated object 11
By switching the power feeding unit so that the microwaves are concentrated on a portion where heating is insufficient depending on the amount or the like, uniform heating can be promoted over the entire object to be heated. Conversely, when only a part of the object to be heated 11 is to be heated locally, the position of the microwave interference can be controlled by switching the control pair by the power switching unit 7 in the same manner. It is also possible to locally heat only a part of the object 11.

  As described above, the microwave processing apparatus according to the present invention switches and controls a power supply unit that has a plurality of power supply units and radiates microwaves, or changes the phase difference of the microwaves between the power supply units in operation. Therefore, the present invention can be applied to applications such as a heating device using dielectric heating, a garbage disposal machine represented by a microwave oven, or a microwave power source of a plasma power source as a semiconductor manufacturing device.

Configuration diagram of microwave processing apparatus according to Embodiment 1 of the present invention The figure which shows the operation state of the electric power switching part 7 of the same microwave processing apparatus Flow chart showing a control example of the microwave processing apparatus The block diagram of the microwave processing apparatus in Embodiment 2 of this invention The block diagram of the microwave processing apparatus in Embodiment 3 of this invention

2a, 2b Oscillator 3a, 3b Power distribution unit 4a-4d Phase variable unit 5a-5d Power amplification unit 6a-6d Power detection unit 7 Power switching unit 8a-8d First power supply unit 10 Heating chamber 11 Heated object 12 Control Part 13 Temperature detection means 14 Shape detection means

Claims (6)

A heating chamber for storing an object to be heated;
An oscillation unit;
A power distribution unit that distributes and outputs the output of the oscillation unit to a plurality of outputs;
A power switching unit for switching the output of the power distribution unit;
An amplifier for amplifying the output of each of the power switching units;
While supplying the output of the amplification unit to the heating chamber, a plurality of power supply units arranged on the wall surface constituting the heating chamber ,
A reflected power detection unit that detects power reflected from the power feeding unit to the amplification unit;
A control unit that controls the oscillation frequency of the oscillation unit and the power switching unit according to the amount of reflected power detected by the reflected power detection unit;
The power supply unit has a plurality of pairs of power supply units that combine two power supply units among at least four power supply units to form a pair of power supply units,
The microwave processing apparatus in which the control unit is configured to switch a combination of two power feeding units in the plurality of pairs of power feeding units in the power switching unit according to the amount of reflected power detected by the reflected power detection unit. A phase variable unit is provided between the power distribution unit and the power switching unit,
Control unit, the reflected power amount detected by the reflected power detection unit, and the frequency of the microwave radiated from the feeding part of the oscillator, the power supply unit of the plurality of pairs of the phase difference and the power switching unit of the phase variable parts The microwave processing device according to claim 1, wherein each of the two power feeding units is controlled to be switched . The microwave processing apparatus according to claim 1 or 2, wherein a temperature detection unit is provided to detect a heating state of an object to be heated placed in a heating chamber. Control unit, the claims depending on heating conditions of the heated object detected by the temperature detecting means, and configured to control so as to switch the combination of the two feeding parts in the power supply unit of the plurality of pairs by controlling the power switching unit 3. The microwave processing apparatus according to 3. Shape detecting means is provided, microwave processing apparatus according to claim 1 or 2 and configured to detect the shape and placement position of the object to be heated placed on the heating chamber. Control unit, depending on the shape and mounting position of the detection to the heated object shape detecting means, claim and configured to control the power switching unit to switch a combination of the two feeding parts in the power supply unit of the plurality of pairs 5 Microwave apparatus according to.

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