JP5151846B2 - Ｑｃｍデバイスとその製造方法 - Google Patents

Ｑｃｍデバイスとその製造方法 Download PDF

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JP5151846B2
JP5151846B2 JP2008237529A JP2008237529A JP5151846B2 JP 5151846 B2 JP5151846 B2 JP 5151846B2 JP 2008237529 A JP2008237529 A JP 2008237529A JP 2008237529 A JP2008237529 A JP 2008237529A JP 5151846 B2 JP5151846 B2 JP 5151846B2
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organic polymer
polymer film
odor
fluorine
qcm device
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Japanese (ja)
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JP2010071716A (ja
JP2010071716A5 (enExample
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貴幸 近藤
健夫 川瀬
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Seiko Epson Corp
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Seiko Epson Corp
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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
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JP2008237529A 2008-09-17 2008-09-17 Ｑｃｍデバイスとその製造方法 Expired - Fee Related JP5151846B2 (ja)

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JP2008237529A JP5151846B2 (ja) 2008-09-17 2008-09-17 Ｑｃｍデバイスとその製造方法

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JP2010071716A JP2010071716A (ja) 2010-04-02
JP2010071716A5 JP2010071716A5 (enExample) 2011-10-06
JP5151846B2 true JP5151846B2 (ja) 2013-02-27

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5476632B2 (ja) * 2010-05-11 2014-04-23 公立大学法人大阪府立大学 水晶振動子用コーティング液、ガス検出素子、エチレン検出素子およびガス検出素子の製造方法
JP2013044579A (ja) * 2011-08-23 2013-03-04 Nagoya Institute Of Technology 金属錯体内包ゼオライトの疎水化方法およびそれによって得られたセンサー
WO2018221283A1 (ja) * 2017-05-31 2018-12-06 国立研究開発法人物質・材料研究機構 低吸湿性材料からなるナノメカニカルセンサ用受容体及びそれを受容体として使用するナノメカニカルセンサ
JP7767252B2 (ja) * 2022-09-16 2025-11-11 株式会社東芝 分子センサおよび分子検出装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312707A (ja) * 1992-05-06 1993-11-22 Nippon Soken Inc ガスセンサ
JP3141969B2 (ja) * 1993-04-26 2001-03-07 日本電信電話株式会社 混合ガス成分判別および定量方法ならびに装置
JP3628227B2 (ja) * 1999-04-27 2005-03-09 三菱電機株式会社 ガス検出装置およびその感応膜材料とその成膜方法
WO2006025358A1 (ja) * 2004-08-31 2006-03-09 Japan Science And Technology Agency 化学センサ装置用の検出子およびその利用

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