JP5144475B2 - エキシマランプ - Google Patents

エキシマランプ Download PDF

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Publication number
JP5144475B2
JP5144475B2 JP2008293140A JP2008293140A JP5144475B2 JP 5144475 B2 JP5144475 B2 JP 5144475B2 JP 2008293140 A JP2008293140 A JP 2008293140A JP 2008293140 A JP2008293140 A JP 2008293140A JP 5144475 B2 JP5144475 B2 JP 5144475B2
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JP
Japan
Prior art keywords
inner tube
tube
electrode
excimer lamp
outer tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008293140A
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English (en)
Japanese (ja)
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JP2010123272A (ja
JP2010123272A5 (enExample
Inventor
幸男 塩谷
喜正 牛山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP2008293140A priority Critical patent/JP5144475B2/ja
Publication of JP2010123272A publication Critical patent/JP2010123272A/ja
Publication of JP2010123272A5 publication Critical patent/JP2010123272A5/ja
Application granted granted Critical
Publication of JP5144475B2 publication Critical patent/JP5144475B2/ja
Active legal-status Critical Current
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  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
JP2008293140A 2008-11-17 2008-11-17 エキシマランプ Active JP5144475B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008293140A JP5144475B2 (ja) 2008-11-17 2008-11-17 エキシマランプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008293140A JP5144475B2 (ja) 2008-11-17 2008-11-17 エキシマランプ

Publications (3)

Publication Number Publication Date
JP2010123272A JP2010123272A (ja) 2010-06-03
JP2010123272A5 JP2010123272A5 (enExample) 2011-11-04
JP5144475B2 true JP5144475B2 (ja) 2013-02-13

Family

ID=42324456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008293140A Active JP5144475B2 (ja) 2008-11-17 2008-11-17 エキシマランプ

Country Status (1)

Country Link
JP (1) JP5144475B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6229404B2 (ja) * 2013-09-27 2017-11-15 ウシオ電機株式会社 エキシマランプ装置および光照射処理装置
JP6800678B2 (ja) * 2016-09-29 2020-12-16 株式会社オーク製作所 放電ランプおよび放電ランプ装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6398163A (ja) * 1986-10-15 1988-04-28 Fanuc Ltd 交流放電管
JP3006665B2 (ja) * 1995-02-27 2000-02-07 日本電気ホームエレクトロニクス株式会社 稀ガス放電灯
JPH09245744A (ja) * 1996-03-12 1997-09-19 Nec Home Electron Ltd 希ガス放電灯及びその製造方法
JP3124948B2 (ja) * 1997-05-09 2001-01-15 スタンレー電気株式会社 省電力型放電灯の製造方法
US20100259152A1 (en) * 2007-12-17 2010-10-14 Orc Manufacturing Co., Ltd. Discharge lamp
JP5074248B2 (ja) * 2008-03-14 2012-11-14 株式会社オーク製作所 エキシマランプ
JP5302637B2 (ja) * 2008-11-17 2013-10-02 株式会社オーク製作所 放電ランプ

Also Published As

Publication number Publication date
JP2010123272A (ja) 2010-06-03

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