JP5140316B2 - Inspection device - Google Patents

Description

  The present invention relates to an apparatus for inspecting the adhesion state of foreign matter adhering to a wafer.

  A wafer formed by dividing devices such as IC and LSI by streets is divided into individual devices by dicing, packaged after being mounted on a lead frame or the like, and used for various electronic devices. A plurality of electrodes are formed on the surface of each device along the street in order to enable electrical connection with a lead frame or the like.

  However, foreign matters such as cutting scraps and grinding scraps may adhere to the device during the manufacturing process, and there is a problem that the attached foreign matter deteriorates the quality of the device. Therefore, a method for detecting foreign matter such as attached cutting waste has also been proposed (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 11-173993

  However, as the degree of device integration improves and miniaturization progresses, the distance between the electrodes is becoming narrower, for example, 50 μm to 10 μm. There is a problem of short circuiting.

  On the other hand, inspecting whether or not a foreign substance is attached with a microscope or the like is inefficient and causes a decrease in productivity.

  Therefore, a problem to be solved by the present invention is to be able to efficiently inspect whether or not foreign matter such as cutting dust is attached in the vicinity of an electrode.

The present invention relates to a chuck table for holding a wafer formed by dividing a plurality of devices by streets, an inspection means for inspecting the surface of the wafer held on the chuck table, an area to be inspected, and an inspection means. The inspection unit includes at least an alignment unit that aligns, the inspection unit includes a line sensor in which a plurality of elements are arranged in an aligned state, a display unit that displays image information acquired by scanning the line sensor, A recording unit that records image information; and a determination unit that determines the quality of the electrodes formed on the side of the street along the street based on the image information. The scanning direction of the line sensor is the X-axis direction and the X-axis direction. The chuck table is moved in the X-axis direction when the width direction of the street perpendicular to the Y-axis direction is the Y-axis direction. A table driving means; an index feeding means for moving the inspection means in the Y-axis direction; a cassette placement table on which a cassette containing a plurality of wafers is placed; an unloading means for unloading a wafer from the cassette; The temporary placement table on which the wafers unloaded by the temporary placement are temporarily placed and the transport means for transporting the temporarily placed wafer on the temporary placement table to the chuck table are included.

In the present invention, the quality of the electrode can be determined efficiently based on the adhesion state of the foreign matter by scanning the electrode formed on the side of the street along the street using the line sensor. In addition, when inspecting a wafer using an inspection device after dicing the wafer, if the wafer scanning speed in the inspection device corresponds to the processing speed in the dicing device, the wafer inspection is performed at the same time as dicing. Increase productivity.

  An inspection apparatus 1 shown in FIG. 1 is an apparatus having a function of detecting a foreign substance attached to a wafer, and inspects a surface from a chuck table 2 that holds the wafer and image information of the wafer held on the chuck table 2. Means 3; alignment means 4 for detecting a region to be inspected of the wafer and aligning with the inspection means; cassette mounting table 5 on which a cassette 5a containing a plurality of wafers is placed; and cassette 5a Unloading means 6 for unloading the wafer from the unloading means, a temporary placing table 7 on which the wafer unloaded by the unloading means 6 is temporarily placed, and a conveying means 8 for carrying the wafer placed on the temporary placing table 7 to the chuck table 2. It has. Further, as shown in FIG. 2, the chuck table 2 is driven by the chuck table drive means 9 and can move in the X-axis direction, and the inspection means 3 is driven by the index feed means 10 and is moved in the X-axis direction. It is possible to move in the Y-axis direction, which is a direction orthogonal to the direction.

  As shown in FIG. 2, the chuck table driving means 9 is connected to a ball screw 90 disposed in the X-axis direction, a pair of guide rails 91 disposed in parallel to the ball screw 90, and one end of the ball screw 90. 90, a motor 92 that rotates 90, an internal nut (not shown) is screwed onto the ball screw 90, and a slide plate 93 whose lower part is in sliding contact with the guide rail 91 is fixed on the slide plate 93 to rotate the chuck table 2. A rotation driving unit 94 having a pulse motor inside, and as the ball screw 90 is rotated by the driving of the motor 92, it is guided by the slide plate 93 guide rail 91 and moves in the X-axis direction. It is configured to move in the X-axis direction.

  As shown in FIG. 2, the index feeding means 10 is connected to a ball screw 100 disposed in the Y-axis direction, a pair of guide rails 101 disposed in parallel to the ball screw 100, and one end of the ball screw 100. And a slide plate 103 whose inner side (not shown) is screwed to the ball screw 100 and whose side part is in sliding contact with the guide rail 101, and an elevating means 104 disposed on the slide plate 103. As the ball screw 100 is rotated by driving the pulse motor 102, it is guided by the slide plate 103 guide rail 101 and moved in the Y-axis direction, and the elevating means 104 is also moved in the Y-axis direction.

  The elevating means 104 includes a ball screw 104a disposed in the Z-axis direction, a pair of guide rails 104b disposed in parallel to the ball screw 104a, a pulse motor 104c connected to one end of the ball screw 104a and rotating the ball screw 104a. The inner nut (not shown) is screwed into the ball screw 104a and the side portion is composed of a lifting / lowering portion 104d slidably contacting the guide rail 104b. The alignment means 4 and the inspection means 3 are fixed to the lifting / lowering portion 104d.

  The alignment means 4 has an imaging unit 40 that images the wafer. On the other hand, the inspection unit 3 includes a line sensor 30 having an element row 30a in which a plurality of elements are arranged linearly in the Y-axis direction in the illustrated example. As shown in FIG. 3, the element row 30a is located on an extension line in the X-axis direction of the imaging unit 40, and the element is a CCD in which, for example, 5000 pixels are arranged in series on a straight line having a length of 5 mm. .

  As shown in FIG. 3, the inspection means 3 includes a display means 31 for displaying the image information acquired by the line sensor 30 on a screen, a recording means 32 for recording the acquired image information, and a wafer formed from the acquired image information. And determining means 33 for determining the quality of the formed electrodes.

  As shown in FIG. 1, the transport unit 8 includes a rail 80 installed in the Y-axis direction, a moving unit 81 that moves along the rail 80, and an adsorbing unit 82 that adsorbs and lifts the frame T. Thus, the suction portion 82 can move at least between the temporary placement table 7 and the chuck table 2.

  As shown in FIG. 1, a plurality of wafers W to be inspected are accommodated in a cassette 5 a in a state of being integrated with a ring-shaped frame F via a tape T, and are carried out by raising and lowering the cassette mounting table 5. The height of the wafer to be adjusted is adjusted. The unloading means 6 sandwiches the frame F and moves in the Y-axis direction, releases the sandwiched state, and places the wafer W on the temporary placement table 7.

  Next, the suction unit 82 is lowered to suck the frame F, and after the suction unit 82 is lifted, the moving unit 81 is moved to transport the wafer W to the position directly above the chuck table 2, and the suction unit 82 is lowered to be sucked. Is released, the wafer W integrated with the frame F is placed and held on the chuck table 2.

  The chuck table 2 holding the wafer W moves in the X-axis direction, positions the wafer W directly below the alignment means 4, and the image unit 40 images the surface of the wafer W, and stores image information stored in a memory or the like in advance. 4 is detected, for example, and the center of the street S and the element (photosensitive portion) 30a of the line sensor 30 are aligned in the Y-axis direction (the width direction of the street S).

  In the display example of FIG. 4, bonding pads B, which are a kind of electrodes, are formed side by side on the street S in a device region D partitioned by streets S formed vertically and horizontally. Further, the street S has already been cut to form a cutting groove G.

  When inspecting whether or not foreign matter has adhered to the wafer W, the line sensor 30 performs scanning along the street while moving the chuck table 2 in the X-axis direction, which is a direction orthogonal to the element row 30a. Image information including electrodes formed on both sides of the street is acquired. At this time, the moving speed of the chuck table 2 is, for example, 50 mm / second.

  The acquired image information can be displayed on the display means 31. The operator can check whether or not foreign matter such as cutting dust is attached by looking at the display means 31, thereby preventing the adjacent electrodes from being short-circuited. For example, if the bonding pads have a diameter of 5 μm, the distance between the centers of adjacent bonding pads is 10 μm, and foreign matter having a diameter of about 5 to 10 μm is adhered between the bonding pads, the bonding pads are short-circuited.

  The acquired image information can be recorded in the recording means 32. The determination unit 33 can recognize the shape and size of the bonding pad B, for example, by performing binarization processing on the acquired image information. Then, the area is calculated from the number of pixels constituting the bonding pad B in the image information, and if there is a larger area than the other bonding pads, it can be determined that foreign matter is attached to the bonding pad. . And the bonding pad to which the foreign material has adhered can be specified by X coordinate and Y coordinate of image information. Thus, even if the operator does not look at the display means 31, the determination means 33 can automatically make the determination. In particular, since the line sensor has high resolution, accurate determination is possible.

  After the inspection on both sides of one street is completed, the indexing and feeding means 10 moves the inspection means 3 in the Y-axis direction to perform indexing and acquire the image information on both sides of the next street to perform the same inspection. I do. Inspecting one after another while performing indexing feeding, and further performing the same processing after the chuck table 2 is rotated 90 degrees, allows the entire surface of the wafer W to be inspected.

  In the above example, a case has been described in which image information including electrodes on both sides of one street is acquired using one line sensor configured by aligning elements in a straight line. If a plurality of such line sensors are arranged, the image information of the electrodes on both sides of the plurality of streets can be acquired at a time, which is efficient.

  Further, when a wafer is inspected by using the inspection apparatus 1 after dicing the wafer, the wafer can be matched with the timing of dicing if the scanning speed of the wafer in the inspection apparatus 1 corresponds to the processing speed in the dicing apparatus. Can be inspected and productivity is increased. For example, in the case of using a dicing apparatus in which a chuck table that holds a wafer moves in the X-axis direction and a cutting means having a cutting blade moves in the Y-axis direction and the Z-axis direction, one street by the cutting blade is used. The feed rates of both chuck tables may be adjusted so that the time required for cutting (the time required for one reciprocation of the chuck table) is equal to the time required for scanning one street in the inspection apparatus 1.

It is a perspective view which shows a part of example of an inspection apparatus. It is a perspective view which expands and shows the principal part of a test | inspection apparatus. It is explanatory drawing which shows an example of a structure of a test | inspection means. It is explanatory drawing which shows an example of the acquired image information.

1: Inspection device 2: Chuck table 3: Inspection device 30: Line sensor 30a: Element row 31: Display means 32: Recording means 33: Determination means 4: Alignment means 40: Imaging unit 5: Cassette mounting table 5a: Cassette 6 : Unloading means 7: Temporary placing table 8: Conveying means 80: Rail 81: Moving part 82: Suction part 9: Chuck table driving means 90: Ball screw 91: Guide rail 92: Motor 93: Slide plate 94: Rotation driving part 10: Index feeding means 100: Ball screw 101: Guide rail 102: Pulse motor 103: Slide plate 104: Lifting means W: Wafer S: Street D: Device B: Bonding pad G: Cutting groove

Claims (1)

A chuck table for holding a wafer formed by dividing a plurality of devices by streets, an inspection means for inspecting the surface of the wafer held on the chuck table, and an area to be inspected and the inspection means are aligned. An inspection device comprising at least alignment means,
The inspection unit includes a line sensor in which a plurality of elements are arranged in an aligned state, a display unit that displays image information acquired by scanning the line sensor, a recording unit that records the image information , and the image information And determining means for determining the quality of the electrodes formed on the side of the street along the street,
When the scanning direction of the line sensor is the X-axis direction and the width direction of the street perpendicular to the X-axis direction is the Y-axis direction,
Chuck table driving means for moving the chuck table in the X-axis direction;
Index feeding means for moving the inspection means in the Y-axis direction;
A cassette mounting table on which a cassette containing a plurality of wafers is mounted;
Unloading means for unloading the wafer from the cassette;
A temporary placement table on which the wafer unloaded by the unloading means is temporarily placed;
Transport means for transporting a wafer temporarily placed on the temporary placement table to the chuck table;
Inspection equipment that includes .

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