JP5134125B2 - 熱音響装置 - Google Patents
熱音響装置 Download PDFInfo
- Publication number
- JP5134125B2 JP5134125B2 JP2011190488A JP2011190488A JP5134125B2 JP 5134125 B2 JP5134125 B2 JP 5134125B2 JP 2011190488 A JP2011190488 A JP 2011190488A JP 2011190488 A JP2011190488 A JP 2011190488A JP 5134125 B2 JP5134125 B2 JP 5134125B2
- Authority
- JP
- Japan
- Prior art keywords
- carbon nanotube
- sound wave
- graphene
- wave generator
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 423
- 239000002041 carbon nanotube Substances 0.000 claims description 243
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 243
- 239000000758 substrate Substances 0.000 claims description 100
- 239000002131 composite material Substances 0.000 claims description 52
- 239000002238 carbon nanotube film Substances 0.000 description 139
- 239000003960 organic solvent Substances 0.000 description 31
- 239000000463 material Substances 0.000 description 19
- 125000006850 spacer group Chemical group 0.000 description 18
- 229910021389 graphene Inorganic materials 0.000 description 17
- 238000000034 method Methods 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 14
- 238000006243 chemical reaction Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 239000010410 layer Substances 0.000 description 11
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 238000001878 scanning electron micrograph Methods 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000004020 conductor Substances 0.000 description 6
- 239000002079 double walled nanotube Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000002109 single walled nanotube Substances 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 230000000644 propagated effect Effects 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000002048 multi walled nanotube Substances 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000002071 nanotube Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 244000062175 Fittonia argyroneura Species 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229920002334 Spandex Polymers 0.000 description 1
- 229920002522 Wood fibre Polymers 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000881 depressing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002557 mineral fiber Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000004759 spandex Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
- 239000002025 wood fiber Substances 0.000 description 1
Landscapes
- Carbon And Carbon Compounds (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110076749.0A CN102724617B (zh) | 2011-03-29 | 2011-03-29 | 热致发声装置及电子装置 |
CN201110076749.0 | 2011-03-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012209919A JP2012209919A (ja) | 2012-10-25 |
JP5134125B2 true JP5134125B2 (ja) | 2013-01-30 |
Family
ID=46950253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011190488A Active JP5134125B2 (ja) | 2011-03-29 | 2011-09-01 | 熱音響装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5134125B2 (zh) |
CN (1) | CN102724617B (zh) |
TW (1) | TWI420507B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104320741B (zh) * | 2014-10-22 | 2018-11-02 | 李亚宁 | 带有石墨烯复合音膜的音频装置 |
CN106612486B (zh) * | 2015-10-27 | 2019-04-05 | 清华大学 | 一种热致发声装置的制备方法及装置 |
CN111512645B (zh) * | 2018-02-19 | 2021-05-11 | 株式会社村田制作所 | 热激励型的声波产生装置及声波产生系统 |
JP2019162894A (ja) * | 2018-03-19 | 2019-09-26 | 株式会社デンソー | 車両用空調ユニット |
CN114394585B (zh) * | 2021-12-31 | 2023-08-04 | 深圳市深瑞墨烯科技有限公司 | 复合膜及其制备方法、电子设备 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009105513A (ja) * | 2007-10-19 | 2009-05-14 | Epson Toyocom Corp | 弾性表面波デバイス |
CN101635361B (zh) * | 2008-07-25 | 2013-02-13 | 清华大学 | 膜电极及采用该膜电极的生物燃料电池 |
CN101771921A (zh) * | 2008-12-30 | 2010-07-07 | 北京富纳特创新科技有限公司 | 发声装置 |
CN101771915B (zh) * | 2008-12-30 | 2013-08-21 | 北京富纳特创新科技有限公司 | 发声装置 |
CN103475984B (zh) * | 2009-01-15 | 2016-06-22 | 北京富纳特创新科技有限公司 | 热致发声装置 |
TWI380284B (en) * | 2009-03-06 | 2012-12-21 | Hon Hai Prec Ind Co Ltd | Thermoacoustic device |
JP2010245797A (ja) * | 2009-04-06 | 2010-10-28 | Panasonic Corp | コンデンサーマイクロフォン |
CN101964292B (zh) * | 2009-07-24 | 2012-03-28 | 清华大学 | 石墨烯片-碳纳米管膜复合结构及其制备方法 |
CN101734650B (zh) * | 2009-12-23 | 2012-06-20 | 沈阳建筑大学 | 一种石墨烯-碳纳米管混杂复合材料的制备方法 |
JP2011171790A (ja) * | 2010-02-16 | 2011-09-01 | Panasonic Corp | スピーカ装置 |
-
2011
- 2011-03-29 CN CN201110076749.0A patent/CN102724617B/zh active Active
- 2011-04-12 TW TW100112571A patent/TWI420507B/zh active
- 2011-09-01 JP JP2011190488A patent/JP5134125B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2012209919A (ja) | 2012-10-25 |
TW201239873A (en) | 2012-10-01 |
CN102724617A (zh) | 2012-10-10 |
CN102724617B (zh) | 2015-06-03 |
TWI420507B (zh) | 2013-12-21 |
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