JP5126014B2 - Pressure sensor - Google Patents

Description

  The present invention relates to a pressure sensor that detects a pressure applied to a pressure detection unit.

2. Description of the Related Art Conventionally, there is a pressure sensor in which a pressure detection element is housed on the bottom surface of a recess provided in a case and pressure is detected using this pressure detection element (see, for example, Patent Document 1).
JP 2006-23109 A

  The pressure sensor as described above includes a one-layer gel structure in which a recess is filled with one type of gel as a protective member for protecting the pressure detection element, such as the pressure sensor described in Patent Document 1, or a gel Some have a two-layer gel structure in which a concave portion is filled with two types of gels as protective members so that the soft gel is covered with a hard gel so as not to sag.

  However, such a pressure sensor having a one-layer gel structure or a pressure sensor having a two-layer gel structure in which a soft gel is covered with a hard gel, when the pressure sensor receives vibration from the outside, Therefore, there is a problem that the signal is easily transmitted to the pressure detection element via the signal and is superimposed as noise on the signal output from the pressure detection element.

  The present invention has been made in view of the above problems, and an object thereof is to reduce the influence of vibration.

In order to achieve the above object, the invention described in claim 1 includes a pressure detecting element (20) having a pressure receiving surface, detects the pressure of the pressure medium applied to the pressure receiving surface, and outputs an electric signal corresponding to the pressure. A pressure sensor that includes a first protective member (51) that covers at least one surface of the pressure-receiving surface, and has a second hardness lower than that of the first protective member so as to cover the first protective member (51). A protective member (52) is disposed , and further between the pressure receiving surface and the first protective member (51), a protective member (54) disposed so as to cover at least one side of the pressure receiving surface, and the protective member A third protective member (53) comprising a protective member (55) arranged to cover (54) and having a lower hardness than the protective member (54) is provided, and the first protective member in the third protective member (53) The protective member (55) in contact with (51) is the first protective member. Than member (51) is characterized by hardness is low.

According to such a configuration, the first protection member (51) is disposed so as to cover at least one surface side of the pressure receiving surface, and the first protection member (51) has a lower hardness than the first protection member so as to cover the first protection member (51). 2 protective members (52) are arranged , and further between the pressure receiving surface and the first protective member (51), a protective member (54) arranged to cover at least one side of the pressure receiving surface, and the protection A third protection member (53) is provided which is disposed so as to cover the member (54) and is made of a protection member (55) having a lower hardness than that of the protection member (54). Since the protective member (55) in contact with the member (51) is lower in hardness than the first protective member (51), the third protective member (53) comprising two protective members (54, 55) having different hardnesses. If, by the first, second protection member (51, 52), Hardness, low hardness, high hardness, protective layer having a relationship of a low hardness is formed, the vibration energy by the natural frequency of the difference dissipated vibration energy decreased for each protective member (51,52,54,55) Furthermore, vibration transmitted from the second protective member (52) side to the first protective member (51) side at the boundary between the second protective member (52) and the first protective member (51) is alleviated , and further, the protective member ( at the boundary 55) and the protective member (54), the protective member (55) travels from side to the protective member (54) side vibration is mitigated Runode, it is possible to reduce the influence of vibrations.

  Further, as in the invention described in claim 2, when the loss tangent is tan δ, the first protective member (51) is a gel having physical properties satisfying tan δ ≦ 0.7 at 130 ° C. The protective member (52) is preferably a gel having physical properties satisfying 0.7 <tan δ ≦ 1.0 at 130 ° C.

As the third protection member (53), as in the invention according to claim 3, may be configured to include a protective member comprising sealing the Fussooiru, also according to claim 4 Like invention, you may comprise so that the protection member which sealed the fluorine gel may be included.

The invention according to claim 5 includes an attachment member (80) in which a plurality of elastic members (81 to 85) having different hardnesses are alternately stacked, and the attachment portion (9) is provided via the attachment member (80). It is characterized in that it has a structure fixed to ().

  According to such a configuration, the mounting member (80) in which a plurality of elastic members (81 to 85) having different hardnesses are alternately stacked is provided and fixed to the mounted portion (9) via the mounting member (80). Therefore, the vibration energy is dissipated due to the difference in the natural frequency of the plurality of elastic members (81 to 85), the vibration energy is reduced, and the influence of vibration can be reduced.

As the attachment member (80), as in the invention described in claim 6 , O-rings made of a rubber-like material and O-rings made of a rubber-like material having a lower hardness than the rubber-like material are alternately laminated. Can be configured.

According to the seventh aspect of the present invention, there is provided a storage case (70) for storing the pressure sensor, and a lid (73) attached to the storage case (70) so as to cover an opening provided in the storage case (70). ), And the lid (73) is composed of at least one buffer member, and the storage case (70) is attached to the attachment portion (70) so that the lid (73) faces the attachment portion (9). It is characterized in that it can be attached to 9).

  According to such a configuration, the storage case (70) is attached to the attached portion (9) so that the lid (73) constituted by at least one buffer member faces the attached portion (9). The vibration is alleviated by the buffer member, and the influence of the vibration can be reduced.

The invention according to claim 8 is a storage case (70) for storing the pressure sensor, and a lid (73) attached to the storage case (70) so as to cover an opening provided in the storage case (70). ), And the joint portion between the storage case (70) and the lid (73) is filled with a gel (74).

  According to such a configuration, since the gel (74) is filled in the joint between the storage case (70) and the lid (73), the gel (74) causes the storage case (70) from the lid (73). The vibration transmitted to the can be relaxed and the influence of the vibration can be reduced.

According to the ninth aspect of the present invention, there is provided a storage case (70) for storing the pressure sensor, and a lid (73) attached to the storage case (70) so as to cover an opening provided in the storage case (70). ), And at least one elastic adhesive body (87) is attached to the lid (73), and the elastic adhesive body (87) is provided between the lid (73) and the attached portion (9). The storage case (70) is attached to the attached portion (9) so as to be arranged.

  According to such a configuration, at least one elastic adhesive body (87) is attached to the lid (73), and the elastic adhesive body (87) is provided between the lid (73) and the attached portion (9). Since the storage case (70) is attached to the attachment portion (9) such that the vibration is transmitted from the attachment portion (9) to the lid (73) by the elastic adhesive body (87). Thus, the influence of vibration can be reduced.

  In addition, the code | symbol in the bracket | parenthesis of each means described in this column and the claim shows the correspondence with the specific means as described in embodiment mentioned later.

(First embodiment)
A schematic cross-sectional view of a pressure sensor according to a first embodiment of the present invention is shown in FIG. The pressure sensor shown in the present embodiment is used as, for example, an intake pressure sensor installed in an intake manifold or the like, or a pressure sensor that detects the pressure of exhaust gas in an exhaust gas purification system (DPF system) of an automobile diesel engine. Is.

  This pressure sensor includes a case 10, a sensor chip 20, a circuit chip 30, and a chip back surface side protection member 50.

  The case 10 is, for example, a plate formed by molding a resin material such as PPS (polyphenylene sulfide), PBT (polybutylene terephthalate) or epoxy resin using a mold, and a plurality of conductor portions 11 are inserted. It is molded. The conductor part 11 is a terminal for electrical connection between the pressure sensor and the outside, and is made of a conductive material such as copper, for example. A recess 12 is formed on one surface of the plate forming the case 10, and a sensor chip 20 for pressure detection is stored in the recess 12.

  The sensor chip 20 detects a pressure and generates an electric signal having a level corresponding to the pressure, and has a plate shape utilizing a piezoresistance effect. Specifically, the sensor chip 20 has a diaphragm 21 that is a thin portion and a strained portion on one surface of the plate, and a recess 22 formed by anisotropic etching or the like to form the diaphragm 21 on the other surface of the plate. It is a semiconductor diaphragm type having That is, the sensor chip 20 has a recess 22 on the other surface of the plate, and has a diaphragm 21 as a distortion portion on one surface of the plate corresponding to the recess 22.

  Hereinafter, the surface of the sensor chip 20 on which the diaphragm 21 is formed is referred to as the front surface of the sensor chip 20, and the surface on which the recess 22 is formed is referred to as the back surface of the sensor chip 20. In this embodiment, since pressure is received by the front surface and the back surface of the sensor chip 20, both surfaces of the sensor chip 20 become pressure receiving surfaces.

  The diaphragm 21 is provided with a sensing unit including, for example, a bridge circuit configured by a diffused resistor or the like. Thereby, when pressure is applied to both surfaces of the plate of the sensor chip 20, the diaphragm 21 is distorted by the differential pressure between the two pressures, and an electrical signal corresponding to the differential pressure is generated in the bridge circuit.

  A pedestal 23 made of glass or the like is bonded to the back surface of the sensor chip 20 by anodic bonding or the like and integrated with the sensor chip 20. The pedestal 23 is adhered to the bottom surface of the recess 12 of the case 10 via an adhesive 24 and is housed and fixed in the case 10. Thus, the sensor chip 20 is fixed to the case 10 with the back surface of the sensor chip 20 facing the case 10.

  As the adhesive 24, a soft adhesive, for example, a silicon adhesive or a fluorosilicone adhesive, in which the thermal stress of the adhesive 24 hardly affects the sensor characteristics is employed.

  Further, one end of the conductor portion 11 insert-molded in the case 10 is exposed in the recess 12 of the case 10. The sensor chip 20 is connected to the exposed portion of the conductor portion 11 through the bonding wire 61 in the recess 12 and is electrically connected to the outside.

  The circuit chip 30 has a function of outputting a drive signal to the sensor chip 20, outputting a detection signal to the outside, inputting an electric signal from the sensor chip 20, calculating and amplifying the signal, and outputting the signal to the outside. A circuit is provided. As such a circuit chip 30, for example, a CMOS transistor or a bipolar transistor is formed on a silicon substrate or the like by a semiconductor process.

  Such a circuit chip 30 is housed and fixed in the recess 12 of the case 10. The circuit chip 30 and the sensor chip 20 are connected and electrically connected via bonding wires 62 made of gold, aluminum, or the like.

  Further, a conductor portion (not shown) is insert-molded in the vicinity of the circuit chip 30 in the case 10, and the conductor portion and the circuit chip 30 are connected via a bonding wire or the like and electrically connected to the outside. .

  In addition, the pedestal 23 is formed with a through hole 23a that penetrates from the surface to which the sensor chip 20 is fixed to the opposite surface. On the other hand, a pressure introduction hole 13 that penetrates from one surface of the plate forming the case 10 to the other surface is provided at a position corresponding to the through hole 23 a of the pedestal 23 on the bottom surface of the recess 12 of the case 10.

  The pressure introducing hole 13 is a through hole that guides pressure to the back surface of the sensor chip 20, and is closed by the sensor chip 20 via the pedestal 23. Thus, the recess 12 formed on one surface of the case 10 and the pressure introducing hole 13 opened on the other surface of the case 10 are partitioned by the sensor chip 20. Thereby, the diaphragm 21 of the sensor chip 20 is configured to receive pressure from the one surface side of the case 10 and the other surface side of the case 10.

  The pressure introducing hole 13 includes a first hole 13a that opens to the other surface of the case 10 and a second hole 13b that has a smaller diameter than the first hole 13a and opens to the bottom surface of the recess 12 of the case 10. ing. In the present embodiment, the connecting portion between the first hole 13a and the second hole 13b has a stepped shape due to the difference in diameter between the first hole 13a and the second hole 13b. Thus, the pressure receiving area can be widened because the diameter of the first hole 13a is larger than that of the second hole 13b on the sensor chip 20 side.

  The chip back surface side protection member 50 seals and protects the pressure introduction hole 13 and the through hole 23a of the base 23. As described above, since the pressure sensor is placed in a severe environment exposed to a highly corrosive pressure medium such as exhaust gas, it is necessary to protect each component of the pressure sensor from the highly corrosive pressure medium. is there.

  Specifically, on the back surface side of the sensor chip 20, the chip back surface side protection member 50 is filled in the pressure introduction hole 13 and the through hole 23 a of the base 23. The chip back surface side protection member 50 seals the back surface of the sensor chip 20 and prevents foreign matter from entering the pressure introducing hole 13. Further, it is possible to prevent problems such as characteristic fluctuations due to dirt adhering to the back surface of the sensor chip 20, blockage of the pressure introduction hole 13 due to freezing of condensed water, and destruction of the sensor chip 20 due to volume expansion when water freezes. It has become.

  As the chip back surface side protection member 50, for example, fluorine gel, silicon gel, fluorosilicon gel, or the like is employed. In particular, when the exhaust gas pressure is measured by a pressure sensor, the condensed water due to the exhaust gas has a strong acidity because the nitrogen oxides and sulfur oxides of the exhaust gas dissolve therein. It is desirable to employ a highly fluorinated gel.

  The chip back surface side protection member 50 covers the first protection member 51 filled in the through hole 23 a and the pressure introduction hole 13 of the base 23 so as to cover the back surface of the sensor chip 20, and the first protection member 51. It is configured as a two-layer structure with a second protective member 52 provided so as to be in contact with the pressure medium.

  The first protective member 51 and the second protective member 52 are mixed with oil materials in order to prevent the protective members 51 and 52 from becoming hard over time. This oil material can adjust the hardness of each protection member 51 and 52 according to the amount of mixing with each protection member 51 and 52, for example, fluorine oil is adopted. Some fluorine-based oils are non-functional. For example, non-functional perfluoroalkyl can be used as the non-functional fluorine-based oil.

  In the present embodiment, the first protective member 51 is made of a material harder than the second protective member 52 in order to reduce vibration transmitted from the second protective member 52 side to the first protective member 51 side. Has been. That is, in a multilayer structure in which protective members having different hardnesses are laminated, since the natural frequency of vibration in each layer is different, vibration energy can be dissipated and vibration energy can be reduced, and a soft material can be used. When a member and a hard material member are joined, vibration transmitted from the hard material member side to the soft material member side easily propagates, and conversely, vibration transmitted from the soft material member side to the hard material member side is a boundary. By utilizing the second characteristic that the light is easily reflected and relaxed, the first protection member 51 is made of a material harder than the second protection member 52 as described above, so that the second protection is achieved. Vibration transmitted from the member 52 side to the first protective member 51 side is reduced.

  Next, the degree of hardness of each protection member 51 and 52 will be described. There is a penetration test as a method for measuring the hardness of the material such as the protective members 51 and 52. This test is standardized in JIS K2207, and measures the hardness of a material by the length of a needle having a specified weight that has entered vertically into the material. The value of the penetration is 1/10 mm when the penetration is 1. The softer the material, the greater the penetration value.

Further, there is a loss tangent tan δ as an index representing the vibration absorbability of the materials such as the protective members 51 and 52. This loss tangent tan δ is a real part G ′ = (σ ₀ ) representing the spring (elastic body) component of the material in the complex viscoelastic modulus G ^* = α ^* / ε ₀ = (σ ₀ / ε ₀ ) (cos δ + isin δ). / Ε ₀ ) cos δ and the ratio of the imaginary part G ″ = (σ ₀ / ε ₀ ) sin δ representing the component of the liquid (viscous body). That is, the loss tangent tan δ is defined as tan δ = G ″ / G ′, and indicates how much energy the material absorbs (changes to heat) when the material deforms. Note that the closer to the liquid, the larger the loss tangent tan δ and the higher the vibration absorption.

  FIG. 2 is a graph showing the relationship between penetration and loss tangent tan δ measured in an environment of 130 ° C. for three gels A to C of different materials. In this figure, the physical properties of each of the gels A to C are shown with the penetration of the X axis and the loss tangent tan δ of the Y axis. The softer the material, the greater the penetration, and the closer the material to the liquid and the higher the vibration absorption, the greater the loss tangent tan δ.

  In the present embodiment, the second protection member 52 having a lower hardness than the first protection member 51 is disposed so as to cover the first protection member 51. However, if the hardness of the second protective member 52 is too low, there arises a problem that the second protective member 52 hangs down. Therefore, the second protective member 52 is made of gel satisfying a loss tangent tan δ at 130 ° C. of 0.7 <tan δ <1 so that the second protective member 52 does not sag and is soft. Is preferred. Moreover, it is preferable that the first protective member 51 is made of a gel whose loss tangent tan δ at 130 ° C. satisfies tan δ ≦ 0.7.

  Thus, for example, the first protective member 51 can be gel A, the second protective member 52 can be gel B or gel C, the first protective member 51 can be gel B, and the second protective member 52 can be gel. C can also be used.

  According to the configuration described above, the first protection member 51 is disposed so as to cover at least one surface side of the pressure receiving surface, and the second protection member 52 having a lower hardness than the first protection member so as to cover the first protection member 51. Since the vibration energy is dissipated due to the difference between the natural frequencies of the first and second protective members, the vibration energy is reduced, and the second protective member is further at the boundary between the second protective member and the first protective member. Since the vibration transmitted from the side to the first protective member side is reduced, the influence of the vibration can be reduced.

  When the loss tangent is tan δ, the first protective member 51 is a gel having physical properties satisfying tan δ ≦ 0.7 at 130 ° C., and the second protective member 52 is 0.7 <0.7 at 130 ° C. A gel having physical properties satisfying tan δ ≦ 1.0 is preferable.

(Second Embodiment)
A schematic cross-sectional view of a pressure sensor according to a second embodiment of the present invention is shown in FIG. In the first embodiment, the first protective member 51 is disposed so as to cover one side of the pressure receiving surface, and the second protective member 52 is disposed so as to cover the first protective member 51. In the embodiment, a third protective member 53 formed by stacking protective members 54 and 55 having different hardnesses is disposed between the pressure receiving surface and the first protective member 51. In addition, about the same part as the said embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted and it demonstrates below centering on a different part.

  The protection member 54 in the present embodiment is configured using the same member as the first protection member 51, and the protection member 55 is configured using the same member as the second protection member 52. That is, as the protective members 54 and 55, for example, a fluorine gel, a silicon gel, a fluorosilicon gel, or the like is employed as in the case of the first protective member 51 and the second protective member 52. Similarly to the first protection member 51 and the second protection member 52, oil materials are mixed in the protection members 54 and 55, respectively.

  In the present embodiment, a protective member 54 configured using the same member as the first protective member 51, a protective member 55 configured using the same member as the second protective member 52, on the back side of the pressure receiving surface, The first protective member 51 and the second protective member 52 are stacked.

  In such a configuration, the vibration energy is reduced due to the difference in the natural frequencies of the first, second, and third protection members 51, 52, and 53, and at the boundary between the second protection member 52 and the first protection member 51. The vibration transmitted from the first protective member 51 side to the second protective member 52 side is reduced, and further, the vibration transmitted from the protective member 55 side to the protective member 54 side is reduced at the boundary between the protective member 55 and the protective member 54. . Therefore, the influence of vibration can be further reduced.

  In this embodiment, the protective member 54 is configured using the same member as the first protective member 51 and the protective member 55 is configured using the same member as the second protective member 52. However, the first and second protective members are used. The protective members 54 and 55 may be configured by members different from the members 51 and 52. Moreover, although the 3rd protection member 53 was comprised by the protection members 54 and 55, you may make it comprise the 3rd protection member 53 by laminating | stacking three or more protection members, for example.

  Alternatively, the third protective member 53 may be provided between the pressure receiving surface and the first protective member 51 with only one protective member having a hardness different from that of the first protective member 51. In such a configuration, the vibration energy is reduced due to the difference in natural frequency between the first protective member 51 and the third protective member 53, so that the influence of vibration can be further reduced.

(Third embodiment)
FIG. 4 shows a state in which the storage case storing the pressure sensor according to the third embodiment of the present invention is attached to the mounted portion of the vehicle. The storage case 70 is formed by molding a material such as resin or rubber using a mold, and has a storage portion 71 for storing the pressure sensor and a hole portion for inserting the bolt 8. A mounting portion 72 is provided. The pressure sensor has the same configuration as that of the first embodiment shown in FIG. 1 and is not shown in FIG.

  A screw hole for fixing the bolt 8 is formed in the mounted portion 9 of the vehicle, and the bolt 8 is inserted into a hole portion formed in the mounting portion 72 of the storage case 70 so that the mounting portion of the storage case 70 is inserted. 72 is attached to the to-be-attached part 9 of a vehicle.

  In the present embodiment, the storage case 70 is mounted on the vehicle with the mounting member 80 in which a plurality of elastic members 81 to 85 having different hardnesses are alternately stacked between the mounting portion 72 and the mounted portion 9 of the vehicle. It is fixed to the attached portion 9 using bolts 8.

  Specifically, the elastic members 81, 83, and 85 are O-rings formed using a relatively hard rubber-like material, and the elastic members 82 and 84 are made of a rubber-like material having a relatively low hardness. The O-ring is formed.

  As described above, in the present embodiment, the mounting member 80 in which the plurality of elastic members 81 to 85 having different hardnesses are alternately stacked is disposed between the mounting portion 72 and the mounted portion 9 of the vehicle, so that pressure is applied from the vehicle. The vibration transmitted to the sensor is reduced.

  In the present embodiment, the same pressure sensor as in the first embodiment is stored in the storage case 70. However, the same pressure sensor as in the second embodiment may be stored in the storage case 70.

(Fourth embodiment)
FIG. 5 shows a state in which the storage case storing the pressure sensor according to the fourth embodiment of the present invention is attached to the mounted portion of the vehicle. The pressure sensor according to the present embodiment includes a storage case 70 that stores the pressure sensor, and a lid 73 that is attached to the storage case 70 so as to cover an opening of the storage case 70.

  The lid 73 has a function as a cushioning material, and is constituted by a buffer member such as rubber or sponge.

  And the storage case 70 is attached to the to-be-attached part 9 so that the lid 73 may face the to-be-attached part 9 of a vehicle.

  According to such a configuration, since the storage case 70 is attached to the attached portion 9 so that the lid 73 constituted by the buffer member faces the attached portion 9, the vibration is reduced by the shock absorbing member, and the vibration is caused by the vibration. The influence can be reduced.

  In the present embodiment, the lid 73 is configured by a buffer member such as rubber or sponge, but the lid 73 may be configured by combining a plurality of buffer members such as rubber and sponge.

(Fifth embodiment)
FIG. 6 shows a view of the storage case storing the pressure sensor according to the fifth embodiment of the present invention as viewed from the upper surface side of the storage case. Moreover, AA sectional drawing in FIG. 6 is shown in FIG.

  As shown in FIG. 6, the pressure sensor according to the present embodiment includes a storage case 70 that stores the pressure sensor. The storage case 70 includes a storage portion 71 that stores the pressure sensor, an attachment portion 72 in which a hole for inserting the bolt 8 is formed, and a lid 73 that covers each opening provided on the upper and lower surfaces of the storage case 70. It is configured. The pressure sensor has the same configuration as that of the first embodiment or the second embodiment, and is housed in a portion indicated by a dotted line in FIG.

  The joint 74 between the storage case 70 and the lid 73 disposed on the upper surface side of the storage case 70 is filled with a gel 74. Similarly, a gel 74 is filled in a joint portion between the storage case 70 and the lid 73 disposed on the lower surface side of the storage case 70.

  An elastic adhesive 87 is attached to the lid 73 disposed on the lower surface side of the storage case 70. In addition, as the elastic adhesive body 87, a gel-like adhesive material or an adhesive tape having cushioning properties can be used.

  And the storage case 70 is attached to the to-be-attached part 9 of a vehicle so that the elastic adhesive body 87 may be arrange | positioned between the lid 73 arrange | positioned at the lower surface side of the storage case 70, and the to-be-attached part 9 of a vehicle. It is like that.

  According to the configuration described above, the gel 74 is filled in the joint portion between the storage case 70 and the lid 73. Therefore, the vibration transmitted from the lid 73 to the storage case 70 is mitigated by the gel 74, and the influence of the vibration is reduced. Can be reduced.

  In addition, an elastic adhesive 87 is attached to the lid 73, and the storage case 70 is attached to the attached portion 9 so that the elastic adhesive 87 is disposed between the lid 73 and the attached portion 9. Therefore, the vibration transmitted from the attached portion 9 to the lid 73 is alleviated by the elastic adhesive 87, and the influence of the vibration can be reduced.

  In addition, as the elastic adhesive body 87, it is possible to use a combination of a plurality of members such as a gel-like adhesive material and a cushioning adhesive tape.

(Other embodiments)
In the first and second embodiments, the first protective member 51 is disposed so as to cover the pressure-receiving surface on the back surface side where the concave portion 22 of the sensor chip 20 is formed, and the second protective member 51 is covered so as to cover the first protective member 51. Although the configuration in which the protection member 52 is arranged is shown, for example, the first protection member 51 is also arranged so as to cover the pressure receiving surface on the surface side of the sensor chip 20, and the first protection member 51 is covered. The second protective member 52 may be arranged.

It is a schematic sectional drawing of the pressure sensor which concerns on 1st Embodiment of this invention. It is a figure which shows the relationship between penetration and loss tangent about gel AC. It is a schematic sectional drawing of the pressure sensor which concerns on 2nd Embodiment of this invention. It is the figure which showed a mode that the storage case which accommodated the pressure sensor which concerns on 3rd Embodiment of this invention was attached to the to-be-attached part of the vehicle. It is the figure which showed a mode that the storage case which accommodated the pressure sensor which concerns on 4th Embodiment of this invention was attached to the to-be-attached part of the vehicle. It is the figure which looked at the storage case which accommodated the pressure sensor which concerns on 5th Embodiment of this invention from the upper surface side of the storage case. It is AA sectional drawing in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Case 11 Conductor part 13 Pressure introduction hole 20 Sensor chip 21 Diaphragm 30 Circuit chip 50 Chip back surface side protection member 51 1st protection member 52 2nd protection member

Claims (9)

A pressure sensor that includes a pressure detection element (20) having a pressure receiving surface, detects a pressure of a pressure medium applied to the pressure receiving surface, and outputs an electric signal corresponding to the pressure;
A first protective member (51) is disposed so as to cover at least one side of the pressure receiving surface,
A second protective member (52) having a lower hardness than the first protective member is disposed so as to cover the first protective member (51) ;
Between the pressure receiving surface and the first protective member (51), a protective member (54) arranged to cover at least one surface side of the pressure receiving surface, and the protective member (54) are further covered. A third protective member (53) comprising a protective member (55) having a lower hardness than that of the protective member (54),
The pressure sensor according to claim 3, wherein the protective member (55) in contact with the first protective member (51) in the third protective member (53) is lower in hardness than the first protective member (51) .   When the loss tangent is tan δ, the first protective member (51) is a gel having physical properties satisfying tan δ ≦ 0.7 at 130 ° C., and the second protective member (52) is 0 at 130 ° C. The pressure sensor according to claim 1, wherein the pressure sensor is a gel having physical properties satisfying 0.7 <tan δ ≦ 1.0. The pressure sensor according to claim 1 or 2 , wherein the third protection member (53) includes a protection member formed by sealing a fluorine oil. The pressure sensor according to claim 1 or 2 , wherein the third protection member (53) includes a protection member sealed with a fluorine gel. A mounting member (80) in which a plurality of elastic members (81 to 85) having different hardnesses are alternately stacked is provided, and has a structure that is fixed to the mounted portion (9) via the mounting member (80). The pressure sensor according to any one of claims 1 to 4 , wherein: The mounting member (80) is configured by alternately laminating O-rings made of a rubber-like material and O-rings made of a rubber-like material having a lower hardness than the rubber-like material. 5. The pressure sensor according to 5 . A storage case (70) for storing the pressure sensor;
A lid (73) attached to the storage case (70) so as to cover an opening provided in the storage case (70),
The lid (73) is composed of at least one buffer member,
The so lid (73) facing the mounted portion (9), claims 1, wherein the storage case (70) said is adapted to be mounted in the mounting portion (9) 6 The pressure sensor according to any one of the above. A storage case (70) for storing the pressure sensor;
A lid (73) attached to the storage case (70) so as to cover an opening provided in the storage case (70),
The pressure sensor according to any one of claims 1 to 6 , wherein a gel (74) is filled in a joint portion between the storage case (70) and the lid (73). A storage case (70) for storing the pressure sensor;
A lid (73) attached to the storage case (70) so as to cover an opening provided in the storage case (70),
At least one elastic adhesive body (87) is attached to the lid (73),
The storage case (70) is attached to the attached portion (9) such that the elastic adhesive body (87) is disposed between the lid (73) and the attached portion (9). The pressure sensor according to any one of claims 1 to 6 , wherein the pressure sensor is provided.

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